MAGNETIC SENSOR DEVICE
20210080518 ยท 2021-03-18
Assignee
Inventors
Cpc classification
G01R33/091
PHYSICS
International classification
Abstract
A magnetic sensor device includes a first magnetic sensor including a ring-shaped first magnetosensitive part whose magnetoresistance value changes due to interaction with a radial magnetic field produced by a magnet, and a second magnetic sensor and a third magnetic sensor that are arranged based on an ideal trajectory of the magnet passing through the center of the first magnetic sensor, include a ring-shaped second magnetosensitive part and a ring-shaped third magnetosensitive part, respectively, and are arranged inside the first magnetic sensor so as to face each other without overlapping.
Claims
1. A magnetic sensor device, comprising: a first magnetic sensor comprising a ring-shaped first magnetosensitive part whose magnetoresistance value changes due to interaction with a radial magnetic field produced by a magnet; and a second magnetic sensor and a third magnetic sensor that are arranged based on an ideal trajectory of the magnet passing through the center of the first magnetic sensor, comprise a ring-shaped second magnetosensitive part and a ring-shaped third magnetosensitive part, respectively, and are arranged inside the first magnetic sensor so as to face each other without overlapping.
2. The magnetic sensor device according to claim 1, wherein the second magnetic sensor and the third magnetic sensor are arranged so as to have centers at positions separated from the ideal trajectory of the magnet by an acceptable amount of deviation of the magnet.
3. The magnetic sensor device according to claim 2, wherein the second magnetic sensor and the third magnetic sensor are arranged so as to have centers at positions separated from the center of the first magnetic sensor by the acceptable amount in a direction orthogonal to the trajectory of the magnet.
4. The magnetic sensor device according to claim 1, wherein the first to third magnetosensitive parts of the first to third magnetic sensors comprise thin alloy films that comprise mainly a ferromagnetic metal comprising Ni or Fe.
5. The magnetic sensor device according to claim 1, wherein the second magnetic sensor and the third magnetic sensor are configured such that the second magnetosensitive part and the third magnetosensitive part have the same radius and the same resistance value including the magnetoresistance value.
6. The magnetic sensor device according to claim 1, wherein the first magnetic sensor has the magnetoresistance value equal to the sum of the magnetoresistance value of the second magnetic sensor and the magnetoresistance value of the third magnetic sensor.
7. The magnetic sensor device according to claim 1, wherein the second magnetic sensor and the third magnetic sensor are formed close to an inner circumference of the first magnetosensitive part of the first magnetic sensor to the extent that insulating properties are maintained.
8. The magnetic sensor device according to claim 1, wherein the first to third magnetosensitive parts of the first to third magnetic sensors are connected into one magnetosensitive part.
9. The magnetic sensor device according to claim 1, wherein the first to third magnetic sensors are connected in series, and a detection unit detecting the magnet based on the magnetoresistance values of the first to third magnetic sensors is provided.
10. The magnetic sensor device according to claim 9, wherein the detection unit calculates a resistance value including the magnetoresistance value based on a detection signal, that is based on voltage output from the first to third magnetic sensors, and a current supplied to the first to third magnetic sensors, and detects the magnet by comparing the detection signal with a threshold value.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0012]
[0013]
[0014]
[0015]
[0016]
DESCRIPTION OF EMBODIMENTS
Summary of the Embodiment
[0017] A magnetic sensor device in an embodiment has a first magnetic sensor comprising a ring-shaped first magnetosensitive part whose magnetoresistance value changes due to interaction with a radial magnetic field produced by a magnet, and a second magnetic sensor and a third magnetic sensor that are arranged based on an ideal trajectory of the magnet passing through the center of the first magnetic sensor, comprise a ring-shaped second magnetosensitive part and a ring-shaped third magnetosensitive part, and are arranged inside the first magnetic sensor so as to face each other without overlapping.
[0018] This magnetic sensor device is configured such that, even when the amount of change in the magnetoresistance value of the first magnetic sensor decreases due to deviation of the magnet from the ideal trajectory, the decrease is compensated by the amount of change in the magnetoresistance values of the second magnetic sensor and the third magnetic sensor. Therefore, it is possible to provide higher switching accuracy as compared to when one ring-shaped magnetic sensor is arranged.
EMBODIMENT
(General Configuration of a Magnetic Sensor Device 1b)
[0019]
[0020] An XY-coordinate system with the origin at a center P.sub.1 of a first magnetic sensor 3 is shown in
[0021] A magnetic sensor device 1 detects, e.g., approach and separation of a magnet 9 to/from the magnetic sensor device 1. As an example, the magnetic sensor device 1 is used in a non-contact switch which detects ON and OFF, or in an electronic device which detects two states such as an operation device detecting whether or not an operation is performed on an operation part. The magnetic sensor device 1 in the present embodiment is used in a non-contact switch which determines approach of the magnet 9 as ON and separation as OFF, as an example.
[0022] The magnetic sensor device 1 has, e.g., a first magnetic sensor 3 having a ring-shaped first magnetosensitive part 30 having a magnetoresistance value which changes due to interaction with a radial magnetic field 91 produced by the magnet 9, and a second magnetic sensor 4 and a third magnetic sensor 5 which are arranged based on an ideal trajectory of the magnet 9 passing through the center of the first magnetic sensor 3, have a ring-shaped second magnetosensitive part 40 and a ring-shaped third magnetosensitive part 50, and are arranged inside the first magnetic sensor 3 so as to face each other without overlapping, as shown in
[0023] The second magnetic sensor 4 and the third magnetic sensor 5 are arranged so as to have centers at positions separated from the ideal trajectory of the magnet 9 by an acceptable amount of deviation of the magnet 9. The ideal trajectory here is the travel path of the magnet 9 when providing the largest amount of change in the magnetoresistance value of the first magnetic sensor 3 and is, e.g., the x-axis shown in
[0024] The second magnetic sensor 4 and the third magnetic sensor 5 are arranged so as to have a center P.sub.2 and a center P.sub.3 at positions separated from the center P.sub.1 of the first magnetic sensor 3 by the acceptable amount in a direction orthogonal to the trajectory of the magnet 9.
[0025] The acceptable amount here is the maximum amount of deviation which is estimated at the time of design, as an example. The acceptable amount is, e.g., Y which are distances from the x-axis to two straight lines indicated by dashed-dotted lines in
[0026] The second magnetic sensor 4 has the center P.sub.2 at a position separated from the x-axis by +Y. Meanwhile, the third magnetic sensor 5 has the center P.sub.3 at a position separated from the x-axis by Y. The center P.sub.2 of the second magnetic sensor 4 and the center P.sub.3 of the third magnetic sensor 5 do not necessarily need to be the maximum value of the deviation.
[0027] The magnetic sensor device 1 is configured such that, e.g., the first to third magnetic sensors 3 to 5 are connected in series, and a control unit 6 as a detection unit detecting the magnet based on the magnetoresistance values of the first to third magnetic sensors 3 to 5 is provided, as shown in
(Configuration of the Magnetic Sensor Unit 2)
[0028] The first to third magnetic sensors 3 to 5 are magneto-resistive elements of which magnetoresistance values change depending on the direction of the magnetic field 91. As shown in
[0029] The first to third magnetosensitive parts 30 to 50 of the first to third magnetic sensors 3 to 5 have a ring shape. The first to third magnetosensitive parts 30 to 50 are formed as, e.g., thin alloy films consisting mainly of a ferromagnetic metal such as Ni or Fe.
[0030] Meanwhile, the wirings 31 to 51 are formed of, e.g., a metal material of which resistance value does not change with the change in the direction of the magnetic field 91, such as copper.
[0031] The second magnetic sensor 4 and the third magnetic sensor 5 are configured such that the second magnetosensitive part 40 and the third magnetosensitive part 50 have the same radius and the second magnetosensitive part 40 and the third magnetosensitive part 50 have the same resistance value including the magnetoresistance value. In addition, the second magnetosensitive part 40 and the third magnetosensitive part 50 are formed close to an inner circumference of the first magnetosensitive part 30 of the first magnetic sensor 3 to the extent that insulating properties are maintained. Thus, the radii of the second magnetosensitive part 40 and the third magnetosensitive part 50 are set based on the ON-OFF switching position, the widths of the magnetosensitive parts, and the centers P.sub.2 and P.sub.3 based on X.
[0032] The magnetoresistance value R.sub.1 of the first magnetic sensor 3 is preferably a value equal to the sum of the magnetoresistance value R.sub.2 of the second magnetic sensor 4 and the magnetoresistance value R.sub.3 of the third magnetic sensor 5 (R.sub.1=R.sub.2+R.sub.3), as an example, from the viewpoint of correcting the amount of change in the magnetoresistance value R.sub.1 caused by deviation. This is because the effect of the correction is small if the magnetoresistance values R.sub.2 and R.sub.3 are magnetoresistance values which are extremely smaller than the magnetoresistance value R.sub.1. The equation mentioned above is also true for resistance values other than the magnetoresistance values. In other words, the resistance value of the first magnetic sensor 3 including the magnetoresistance value R.sub.1 is a value equal to the sum of the resistance value of the second magnetic sensor 4 including the magnetoresistance value R.sub.2 and the resistance value of the third magnetic sensor 5 including the magnetoresistance value R.sub.3.
[0033] Alternatively, the magnetoresistance values R.sub.1 to R.sub.3 may be equal to each other, as a modification. In this case, the magnetoresistance values are adjusted by changing a material of the magnetosensitive parts and the widths of the magnetosensitive parts, etc.
[0034] The center P.sub.2 of the second magnetic sensor 4 and the center P.sub.3 of the third magnetic sensor 5 are located on, e.g., the y-axis in the same manner as the center P.sub.1 of the first magnetic sensor 3 as shown in
[0035] The magnetic sensor unit 2 outputs, e.g., a detection signal S.sub.1, as shown in
(Configuration of the Control Unit 6)
[0036] The control unit 6 is, e.g., a microcomputer composed of a CPU (Central Processing Unit) performing calculation and processing, etc., of the acquired data according to a stored program, and a RAM (Random Access Memory) and a ROM (Read Only Memory) which are semiconductor memories, etc. The ROM stores, e.g., a program for operation of the control unit 6, and a threshold value Th. The RAM is used as, e.g., a storage area for temporarily storing calculation results, etc.
[0037] The control unit 6 calculates the resistance value including the magnetoresistance value based on the detection signal S.sub.1 acquired from the magnetic sensor unit 2 and a supplied current, and compares the resistance value with the threshold value Th. When the calculated resistance value is not more than the threshold value Th, the control unit 6 determines that it is switched from ON to OFF or OFF to ON.
[0038] In the present embodiment, as an example, it is OFF when the center 90 of the magnet 9 is located outside the magnetic sensor unit 2, and it is ON when located inside the magnetic sensor unit 2. This switching between ON and OFF occurs at, e.g., the x-coordinate X.sub.1 which is an intersection between the outer circumference of the first magnetosensitive part 30 of the first magnetic sensor 3 and the x-axis as shown in
[0039] This ON-OFF switching position moves due to deviation of the magnet 9. Thus, switching between ON and OFF occurs within a range defined based on the switching position without deviation and the switching positions with Y since the magnetic field 91 at +X and Y is symmetric. Regarding this, the simulation result of the switching range in Comparative Example and the embodiment shown in
[0040] In Comparative Example, only the first magnetic sensor 3 is provided. Meanwhile, in the embodiment, the first to third magnetic sensors 3 to 5 are provided. The same magnet 9 is used in Comparative Example and the embodiment.
[0041] In Comparative Example, the switching start point, at which the resistance value becomes not more than the threshold value Th, is an x-coordinate X.sub.a without deviation and an x-coordinate X.sub.b with deviation, as shown in
[0042] On the other hand, in the embodiment, the influence of deviation of the magnet 9 is smaller than Comparative Example, and the switching start point, at which the resistance value becomes not more than the threshold value Th, is an x-coordinate X.sub.A without deviation and an x-coordinate X.sub.B with deviation, as shown in
[0043] In addition, a difference between a resistance value R.sub.a without deviation from the center P.sub.1 and a resistance value R.sub.b with deviation in Comparative Example is much larger than a difference between a resistance value R.sub.A without deviation and a resistance value R.sub.B with deviation in the embodiment, as shown in
[0044] In addition, L.sub.2<L.sub.1 when a length between the x-coordinate X.sub.a and the x-coordinate X.sub.b in Comparative Example is defined as L.sub.1 and a length between the x-coordinate X.sub.A and the x-coordinate X.sub.B in the embodiment is defined as L.sub.2, as shown in
[0045] Here, if a disturbance magnetic field acts on the magnetic sensor device 1, e.g., the disturbance magnetic field acts in the same direction on the first to third magnetic sensors 3 to 5. In this case, since the change in the magnetoresistance values of the first to third magnetic sensors 3 to 5 is small in the same manner as when the magnet 9 is located outside the magnetic sensor unit 2, the resistance value is higher than the threshold value Th, e.g., as shown in
[0046] Therefore, when the disturbance magnetic field is acing, the control unit 6 does not determine that the magnet 9 is at the ON position, hence, it is possible to prevent erroneous determination in which ON is determined due to the action of the disturbance magnetic field.
(Configuration of the Magnet 9)
[0047] The magnet 9 has, e.g., a pillar shape, such as column or quadrangular prism, which generates the radial magnetic field 91, as shown in
[0048] The magnet 9 is magnetized to have, e.g., an N-pole on the side of the magnetic sensor unit 2 located below, and an S-pole on the other side, as shown in
[0049] The magnet 9 is obtained by, e.g., shaping a permanent magnet such as alnico magnet, ferrite magnet or neodymium magnet into a desired shape, or by mixing a magnetic material based on ferrite, neodymium, samarium-cobalt or samarium-iron-nitrogen, etc., with a synthetic resin material and shaping into a desired shape. The magnet 9 in the present embodiment is a permanent magnet, as an example. Alternatively, the magnet 9 may be an electromagnet.
[0050] The magnet 9 is configured to, e.g., linearly move from the initial position X.sub.0 to the center P.sub.1 of the magnetic sensor unit 2, as shown in
[0051] The magnetic sensor device 1 as a modification is configured such that the first to third magnetosensitive parts 30 to 50 of the first to third magnetic sensors 3 to 5 are connected into one magnetosensitive part, e.g., as shown in
[0052] Next, an example of an operation of the magnetic sensor device 1 in the present embodiment will be described along with the flowchart in
(Operation)
[0053] When the power is turned on, the control unit 6 of the magnetic sensor device 1 monitors the detection signal S.sub.1. When it is Yes in Step 1, i.e., when the resistance value calculated based on the detection signal S.sub.1 is not more than threshold value Th (Step 1: Yes), the control unit 6 determines that the state is switched from OFF to ON (Step 2).
[0054] Based on the determination result, the control unit 6 generates detection information S.sub.2 indicating determination of ON and outputs it to a connected electronic device (Step 3).
Effects of the Embodiment
[0055] The magnetic sensor device 1 in the present embodiment can provide high switching accuracy. In detail, the magnetic sensor device 1 is configured such that, even when the amount of change in the magnetoresistance value of the first magnetic sensor 3 decreases due to deviation of the magnet 9 from the ideal trajectory (the x-axis), the decrease is compensated by the amount of change in the magnetoresistance values of the second magnetic sensor 4 and the third magnetic sensor 5. Therefore, the switching range is narrower and it is thus possible to provide higher switching accuracy, as compared to when one ring-shaped magnetic sensor is arranged.
[0056] In the magnetic sensor device 1, the second magnetic sensor 4 and the third magnetic sensor 5 are arranged inside the first magnetic sensor 3. Therefore, the magnetic sensor unit 2 can be reduced in size as compared to when arranging outside the first magnetic sensor.
[0057] Even when the disturbance magnetic field is applied, it acts on the magnetic sensor unit 2 in the same direction similarly to when the magnet 9 is located outside the magnetic sensor unit 2, unlike when each magneto-resistive element is arranged rotationally symmetric. An erroneous determination causing switching from OFF to ON thus can be prevented and the magnetic sensor device 1 can thereby have a resistance to the disturbance magnetic field. Therefore, the magnetic sensor device 1 can be suitably used in an environment in which the disturbance magnetic field is likely to be generated, such as in vehicle.
[0058] Although some embodiment and modifications of the invention have been described, the embodiment and modifications are merely examples and the invention according to claims is not to be limited thereto. These new embodiment and modifications may be implemented in various other forms, and various omissions, substitutions and changes, etc., can be made without departing from the gist of the invention. In addition, all combinations of the features described in the embodiment and modifications are not necessary to solve the problem of the invention. Further, these embodiment and modifications are included within the scope and gist of the invention and also within the invention described in the claims and the range of equivalency.
REFERENCE SIGNS LIST
[0059] 1 MAGNETIC SENSOR DEVICE [0060] 3 FIRST MAGNETIC SENSOR [0061] 4 SECOND MAGNETIC SENSOR [0062] 5 THIRD MAGNETIC SENSOR [0063] 6 CONTROL UNIT [0064] 9 MAGNET [0065] 30 FIRST MAGNETOSENSITIVE PART [0066] 40 SECOND MAGNETOSENSITIVE PART [0067] 50 THIRD MAGNETOSENSITIVE PART