Diamond-like carbon films and uses thereof
10941485 ยท 2021-03-09
Assignee
Inventors
- Nicolas Argibay (Albuquerque, NM, US)
- Michael T. Dugger (Tijeras, NM, US)
- Michael E. Chandross (Albuquerque, NM, US)
- Tomas Farley Babuska (Bethlehem, PA, US)
- Brendan L. Nation (Albuquerque, NM, US)
- John Curry (Albuquerque, NM, US)
Cpc classification
C23C4/02
CHEMISTRY; METALLURGY
F01M9/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B05D2202/40
PERFORMING OPERATIONS; TRANSPORTING
C23C24/087
CHEMISTRY; METALLURGY
F16N15/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B05D5/08
PERFORMING OPERATIONS; TRANSPORTING
C23C28/34
CHEMISTRY; METALLURGY
C23C28/343
CHEMISTRY; METALLURGY
International classification
Abstract
The present invention relates to methods of forming a film between two surfaces, in which the film includes diamond-like carbon. Also provided herein are uses of such films, such in sliding contacts and in metal coatings.
Claims
1. A method of forming a film, the method comprising: providing a first surface comprising a first binary alloy, wherein the first binary alloy comprises a plurality of columnar grains, and wherein at least one grain has a grain diameter of less than about 100 nm and/or an aspect ratio of at least one grain is 1:2 or greater; contacting the first surface with a second surface in the presence of one or more organic compounds; and generating a film disposed between first and second surfaces, wherein the film comprises diamond-like carbon.
2. The method of claim 1, wherein the contacting comprising providing a continuous flow of the one or more organic compounds.
3. The method of claim 2, wherein the one or more organic compounds comprises a volatile compound in combination with a gas.
4. The method of claim 3, wherein the gas has a partial pressure of oxygen and water of less than about 100 ppm each.
5. The method of claim 3, wherein the gas consists essentially of an inert gas or a combination of inert gases.
6. The method of claim 5, wherein the inert gas comprises helium, nitrogen, or argon.
7. The method of claim 1, wherein the one or more organic compounds comprises an optionally substituted alcohol, an optionally substituted carboxylic acid, an optionally substituted acid anhydride, an optionally substituted acetal, an optionally substituted alkane, an optionally substituted alkene, and/or an optionally substituted arene.
8. The method of claim 7, wherein the one or more organic compounds comprises an alkanol, a phenol, an aldehyde, a ketone, an alkene, and/or an alkane.
9. The method of claim 1, wherein the one or more organic compounds is present at a concentration of from about 0.001 ppb to about 10 ppb.
10. The method of claim 1, wherein the generating comprises sliding the first surface against the second surface for a plurality of cycles, and wherein the plurality of cycles comprises of from about 50 to about 100,000 cycles of bi-directional sliding.
11. The method of claim 1, wherein the generating comprises sliding the first surface against the second surface at a contact pressure of from about 200 MPa to about 2 GPa.
12. The method of claim 1, wherein the film has a thickness of from about 20 nm to about 500 nm.
13. The method of claim 12, wherein the film further comprises a plurality of nanoparticles comprising the first binary alloy.
14. The method of claim 1, wherein the first surface is disposed on a first electric contact and the second surface is disposed on a second electric contact.
15. The method of claim 1, wherein the binary alloy comprises one or more noble metals selected from the group consisting of Ag, Al, Au, Ba, Be, Bi, Ca, Cd, Co, Cr, Cs, Cu, Fe, Ga, Ge, Hf, In, Ir, K, La, Li, Mg, Mn, Mo, Na, Nb, Ni, Os, Pb, Pd, Pt, Rb, Re, Rh, Ru, Sb, Sc, Sn, Sr, Ta, Tc, Th, Ti, Tl, V, W, Y, Zn, and Zr.
16. The method of claim 15, wherein the binary alloy comprises Pt and Au.
17. The method of claim 16, wherein the binary alloy comprises less than about 50 atom percent of Au.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE INVENTION
(14) Diamond-like carbon (DLC) films exhibit the lowest known wear rates and friction coefficients of any material. They are widely used as wear resistant lubricants in applications ranging from satellites to automobiles.
(15) Herein, we describe methods for generating low friction films (e.g., having a friction coefficient <0.05) including DLC. These films can be formed in situ from organic compounds (e.g., hydrocarbons and alcohols provided as vapor species) at a low temperature (e.g., at ambient temperatures). Without wishing to be limited by mechanism, this process occurs by stress-assisted surface catalysis, e.g. in the form of sliding contacts with catalytic metallic surface(s) (e.g., a Pt-based binary alloy, as described herein). In part, the method includes contacting at least one of two surfaces, in which at least one surface includes an ultra-low wear catalytic alloy whose wear rate is sufficiently low to enable DLC formation. In one embodiment, the alloy is an ultra-low wear metal alloy having thermodynamically stable nanocrystalline microstructures that are both fatigue and wear resistant (e.g. a Pt.sub.0.9Au.sub.0.1 alloy). In some embodiments, the in situ grown DLC tribofilms (e.g., sp.sup.2/sp.sup.3 hybridized carbon films) grow and persist for hundreds of thousands of sliding cycles, imparting friction coefficients as low as =0.01 in a nitrogen purged laboratory environment and effectively preventing any wear on the PtAu film/substrate.
(16) Traditionally, DLC is generated in film form through high temperature (e.g., more than about 500 C.) chemical vapor deposition and sputter deposition routes using DLC targets. In contrast, the methods herein employ mechanical shear at ambient conditions (e.g., ambient temperatures, such as of from about 20 C. to about 30 C.) to generate DLC within the tribofilm. The resulting tribofilm can be used in any component, including combustion engines, turbine engines and nano-/micro-electromechanical systems (NEMS/MEMS). Furthermore, such tribofilms can be generated in situ, as well as regenerated in situ. Such regeneration can be useful if, e.g., additional lubrication is needed without disassembling the component. Rather, an organic compound can be delivered by using a carrier gas, and then the component can be operated to provide a sufficient mechanical stress to regenerate the tribofilm at the contact interface. Once the tribofilm is formed, the organic compound can be removed by purging the component with inert air.
(17) The film (e.g., a tribofilm) can be characterized in any useful manner. In some embodiments, the film includes a friction coefficient less than about 0.05 and/or a specific wear rate of less than about 10.sup.6 mm.sup.3/N-m (e.g., less than about 10.sup.9 mm.sup.3/N-m). In particular embodiments, we provide alloys and films having wear rates that are sufficiently low on a highly wear resistant catalytic surface (e.g., a PtAu film surface), even at moderate to high contact stresses (e.g., about 1 GPa or greater). Furthermore, such alloys allow for the formation of DLC in situ from hydrocarbon vapor found in typical ambient conditions.
(18) We provide details on how to tailor the in situ formation of such tribofilms. In one non-limiting embodiment, the method includes use of a binary metal alloy that exhibits stable nanocrystallinity. For instance, such alloys (e.g., Pt.sub.0.9Au.sub.0.1) can be provided as a surface prepared in thin film form. Such films can, e.g., provide a stable nanocrystalline surface that renders the grain structure intrinsically insensitive to stress and temperature, as well as exhibit extremely low wear rates (e.g., specific wear rates much less than about 10.sup.6 mm.sup.3/N-m).
(19) In some instances, the method includes controlling the presence of oxygen and water during tribofilm formation. Thus, in one non-limiting instance, the in situ formation of a tribofilm (including DLC) on these surfaces under shear includes providing organic compounds with a low partial pressure of oxygen and water (e.g., about less than about 100 ppm for each). Such conditions can be achieved in any useful manner, such as by purging the gas environment around the alloy surface to allow for the stress-assisted catalysis of organic compounds (e.g., ambient hydrocarbons) into hydrogenated amorphous carbon. In certain conditions, ambient air may include a sufficiently high oxygen concentration that inhibits the reaction pathway for DLC formation. For example and without limitation, the presence of oxygen could consume the organic compounds and generate volatile species (e.g., CO and CO.sub.2) that would not be beneficial for forming a DLC. Beneficial conditions can be attained by controlling the content of the input carrier gas. In another instance, if the catalyst surface wears at any appreciable rate, then DLC formation may be reduced due to partial removal of the alloy film. Finally, in another non-limiting instance, the applied stress must be sufficiently high to promote the formation of DLC. Methods for making and testing such tribofilms are described herein.
(20) Films Including Diamond-Like Carbon
(21) The present invention relates, in part, to a tribofilm including diamond-like carbon (DLC). This tribofilm is a persistent composite (e.g., nanocomposite) that arises from contact between two surfaces. In one non-limiting instance, one of the surfaces includes a binary alloy (e.g., any described herein, such as the PtAu system). The tribofilm can optionally include a plurality of nanoparticles dispersed within the DLC, in which the nanoparticles are formed from wearing against one of the surfaces. Thus, if one of the surfaces includes a binary alloy, then the nanoparticles within the tribofilm can be formed from that binary alloy.
(22) The tribofilm can include a plurality of layers, in which at least one layer includes DLC and a plurality of nanoparticles. In some embodiments, the tribofilm includes a first layer including hydrogenated amorphous carbon and a plurality of nanoparticles having a first mean particle size; and a second layer including hydrogenated amorphous carbon and a plurality of nanoparticles having a second mean particle size, in which the first and second mean particles sizes are different.
(23) The DLC can include hydrogenated amorphous carbon. The amorphous carbon can be in graphitic form and/or include of from about 1% to 70% hydrogen (e.g., 1 at. % to 5 at. %, 1 at. % to 10 at. %, 1 at. % to 15 at. %, 1 at. % to 20 at. %, 1 at. % to 25 at. %, 1 at. % to 30 at. %, 1 at. % to 35 at. %, 1 at. % to 40 at. %, 1 at. % to 45 at. %, 1 at. % to 50 at. %, 1 at. % to 55 at. %, 1 at. % to 60 at. %, 1 at. % to 65 at. %, 5 at. % to 10 at. %, 5 at. % to 15 at. %, 5 at. % to 20 at. %, 5 at. % to 25 at. %, 5 at. % to 30 at. %, 5 at. % to 35 at. %, 5 at. % to 40 at. %, 5 at. % to 45 at. %, 5 at. % to 50 at. %, 5 at. % to 55 at. %, 5 at. % to 60 at. %, 5 at. % to 65 at. %, 5 at. % to 70 at. %, 10 at. % to 15 at. %, 10 at. % to 20 at. %, 10 at. % to 25 at. %, 10 at. % to 30 at. %, 10 at. % to 35 at. %, 10 at. % to 40 at. %, 10 at. % to 45 at. %, 10 at. % to 50 at. %, 10 at. % to 55 at. %, 10 at. % to 60 at. %, 10 at. % to 65 at. %, 10 at. % to 70 at. %, 15 at. % to 20 at. %, 15 at. % to 25 at. %, 15 at. % to 30 at. %, 15 at. % to 35 at. %, 15 at. % to 40 at. %, 15 at. % to 45 at. %, 15 at. % to 50 at. %, 15 at. % to 55 at. %, 15 at. % to 60 at. %, 15 at. % to 65 at. %, 15 at. % to 70 at. %, 20 at. % to 25 at. %, 20 at. % to 30 at. %, 20 at. % to 35 at. %, 20 at. % to 40 at. %, 20 at. % to 45 at. %, 20 at. % to 50 at. %, 20 at. % to 55 at. %, 20 at. % to 60 at. %, 20 at. % to 65 at. %, 20 at. % to 70 at. %, 25 at. % to 30 at. %, 25 at. % to 35 at. %, 25 at. % to 40 at. %, 25 at. % to 45 at. %, 25 at. % to 50 at. %, 25 at. % to 55 at. %, 25 at. % to 60 at. %, 25 at. % to 65 at. %, 25 at. % to 70 at. %, 30 at. % to 35 at. %, 30 at. % to 40 at. %, 30 at. % to 45 at. %, 30 at. % to 50 at. %, 30 at. % to 55 at. %, 30 at. % to 60 at. %, 30 at. % to 65 at. %, 30 at. % to 70 at. %, 35 at. % to 40 at. %, 35 at. % to 45 at. %, 35 at. % to 50 at. %, 35 at. % to 55 at. %, 35 at. % to 60 at. %, 35 at. % to 65 at. %, 35 at. % to 70 at. %, 40 at. % to 45 at. %, 40 at. % to 50 at. %, 40 at. % to 55 at. %, 40 at. % to 60 at. %, 40 at. % to 65 at. %, 40 at. % to 70 at. %, 45 at. % to 50 at. %, 45 at. % to 55 at. %, 45 at. % to 60 at. %, 45 at. % to 65 at. %, 45 at. % to 70 at. %, 50 at. % to 55 at. %, 50 at. % to 60 at. %, 50 at. % to 65 at. %, 50 at. % to 70 at. %, 55 at. % to 60 at. %, 55 at. % to 65 at. %, 55 at. % to 70 at. %, 60 at. % to 65 at. %, 60 at. % to 70 at. %, or 65 at. % to 70 at. % of H). The presence of hybridized sp.sup.2/sp.sup.3 carbon can indicate the form of carbon present within the tribofilm, in which graphitic carbon is an amorphous carbon with a significant fraction of sp.sup.2 content.
(24) The tribofilm can further include a plurality of nanoparticles (e.g., formed from the material of a first surface). In one non-limiting instance, the nanoparticles include a binary alloy. In other instances, the nanoparticles have a mean particle size of from about 5 nm to about 250 nm (e.g., from about 5 nm to 10 nm, 5 nm to 20 nm, 5 nm to 30 nm, 5 nm to 40 nm, 5 nm to 50 nm, 5 nm to 60 nm, 5 nm to 70 nm, 5 nm to 80 nm, 5 nm to 90 nm, 5 nm to 100 nm, 5 nm to 110 nm, 5 nm to 120 nm, 5 nm to 130 nm, 5 nm to 140 nm, 5 nm to 150 nm, 5 nm to 160 nm, 5 nm to 170 nm, 5 nm to 180 nm, 5 nm to 190 nm, 5 nm to 200 nm, 5 nm to 210 nm, 5 nm to 220 nm, 5 nm to 230 nm, 5 nm to 240 nm, 5 nm to 250 nm, 10 nm to 20 nm, 10 nm to 30 nm, 10 nm to 40 nm, 10 nm to 50 nm, 10 nm to 60 nm, 10 nm to 70 nm, 10 nm to 80 nm, 10 nm to 90 nm, 10 nm to 100 nm, 10 nm to 110 nm, 10 nm to 120 nm, 10 nm to 130 nm, 10 nm to 140 nm, 10 nm to 150 nm, 10 nm to 160 nm, 10 nm to 170 nm, 10 nm to 180 nm, 10 nm to 190 nm, 10 nm to 200 nm, 10 nm to 210 nm, 10 nm to 220 nm, 10 nm to 230 nm, 10 nm to 240 nm, 10 nm to 250 nm, 25 nm to 30 nm, 25 nm to 40 nm, 25 nm to 50 nm, 25 nm to 60 nm, 25 nm to 70 nm, 25 nm to 80 nm, 25 nm to 90 nm, 25 nm to 100 nm, 25 nm to 110 nm, 25 nm to 120 nm, 25 nm to 130 nm, 25 nm to 140 nm, 25 nm to 150 nm, 25 nm to 160 nm, 25 nm to 170 nm, 25 nm to 180 nm, 25 nm to 190 nm, 25 nm to 200 nm, 25 nm to 210 nm, 25 nm to 220 nm, 25 nm to 230 nm, 25 nm to 240 nm, 25 nm to 250 nm, 50 nm to 60 nm, 50 nm to 70 nm, 50 nm to 80 nm, 50 nm to 90 nm, 50 nm to 100 nm, 50 nm to 110 nm, 50 nm to 120 nm, 50 nm to 130 nm, 50 nm to 140 nm, 50 nm to 150 nm, 50 nm to 160 nm, 50 nm to 170 nm, 50 nm to 180 nm, 50 nm to 190 nm, 50 nm to 200 nm, 50 nm to 210 nm, 50 nm to 220 nm, 50 nm to 230 nm, 50 nm to 240 nm, 50 nm to 250 nm, 75 nm to 80 nm, 75 nm to 90 nm, 75 nm to 100 nm, 75 nm to 110 nm, 75 nm to 120 nm, 75 nm to 130 nm, 75 nm to 140 nm, 75 nm to 150 nm, 75 nm to 160 nm, 75 nm to 170 nm, 75 nm to 180 nm, 75 nm to 190 nm, 75 nm to 200 nm, 75 nm to 210 nm, 75 nm to 220 nm, 75 nm to 230 nm, 75 nm to 240 nm, 75 nm to 250 nm, 100 nm to 110 nm, 100 nm to 120 nm, 100 nm to 130 nm, 100 nm to 140 nm, 100 nm to 150 nm, 100 nm to 160 nm, 100 nm to 170 nm, 100 nm to 180 nm, 100 nm to 190 nm, 100 nm to 200 nm, 100 nm to 210 nm, 100 nm to 220 nm, 100 nm to 230 nm, 100 nm to 240 nm, 100 nm to 250 nm, 125 nm to 130 nm, 125 nm to 140 nm, 125 nm to 150 nm, 125 nm to 160 nm, 125 nm to 170 nm, 125 nm to 180 nm, 125 nm to 190 nm, 125 nm to 200 nm, 125 nm to 210 nm, 125 nm to 220 nm, 125 nm to 230 nm, 125 nm to 240 nm, 125 nm to 250 nm, 150 nm to 160 nm, 150 nm to 170 nm, 150 nm to 180 nm, 150 nm to 190 nm, 150 nm to 200 nm, 150 nm to 210 nm, 150 nm to 220 nm, 150 nm to 230 nm, 150 nm to 240 nm, 150 nm to 250 nm, 200 nm to 210 nm, 200 nm to 220 nm, 200 nm to 230 nm, 200 nm to 240 nm, or 200 nm to 250 nm).
(25) Methods of Forming a Film
(26) The present invention relates to methods of forming a film, as well as structures including such a film. In one non-limiting embodiment, the film is a tribofilm, in which a persistent composite is formed in situ between a first surface and a second surface. In one embodiment, the first surface includes a binary alloy (e.g., any described herein), and the second surface can include a metal or an alloy. Furthermore, the film is generated by contacting the first and second surfaces in the presence of organic compound(s), which supply the carbon source for the amorphous carbon within the tribofilm.
(27) The method can include providing a first surface, contacting the first surface with a second surface in the presence of organic compound(s), and generating a film (e.g., a tribofilm) disposed between the first and second surfaces. The first surface can include any useful material having sufficient wear resistance, sufficient hardness, and/or reduced friction coefficient, such as a binary alloy. Exemplary methods of forming an alloy are described herein.
(28) Contact between the first and second surfaces can occur in any useful manner, such as a sliding contact (e.g., bidirectional, reciprocating, and/or unidirectional translation across a surface), a rotating contact, a translating contact, etc. Contact can include repeated cycles, such as a sliding contact between the first and second surfaces for a plurality of cycles (e.g., from about 50 to about 100,000 cycles of bi-directional sliding, including from about 50 to 100, 50 to 250, 50 to 500, 50 to 750, 50 to 1,000, 50 to 2,000, 50 to 5,000, 50 to 10,000, 50 to 50,000, 50 to 100,000, 100 to 250, 100 to 500, 100 to 750, 100 to 1,000, 100 to 2,000, 100 to 5,000, 100 to 10,000, 100 to 50,000, 100 to 100,000, 250 to 500, 250 to 750, 250 to 1,000, 250 to 2,000, 250 to 5,000, 250 to 10,000, 250 to 50,000, 250 to 100,000, 500 to 1,000, 500 to 2,000, 500 to 5,000, 500 to 10,000, 500 to 50,000, 500 to 100,000, 750 to 1,000, 750 to 2,000, 750 to 5,000, 750 to 10,000, 750 to 50,000, 750 to 100,000, 1,000 to 2,000, 1,000 to 5,000, 1,000 to 10,000, 1,000 to 50,000, 1,000 to 100,000, 2,000 to 5,000, 2,000 to 10,000, 2,000 to 50,000, 2,000 to 100,000, 5,000 to 10,000, 5,000 to 50,000, 5,000 to 100,000, 10,000 to 50,000, 10,000 to 100,000, 25,000 to 50,000, 25,000 to 100,000, 50,000 to 100,000, or 75,000 to 100,000 cycles).
(29) In particular embodiments, sliding is performed in the presence of one or more organic compounds (e.g., any described herein). In some embodiments, the organic compound(s) are volatile and provided with a carrier gas to transport the organic compound(s) to the interface between the first and second surfaces. If higher local concentration of the organic compound(s) are required to form the tribofilm, then the concentration of the organic compound(s) within the carrier gas can be increased and/or the flow rate of carrier gas can be increased to deliver additional organic compound(s) to the interface.
(30) By repeatedly contact the two surfaces, a tribofilm can be generated. The film can include, e.g., diamond-like carbon and/or nanoparticles formed from an alloy (e.g., any described herein).
(31) Organic Compounds
(32) The present invention can include the use of organic compounds. In particular embodiments, such compounds are useful in providing a carbon source during film generation. As described herein, such generated films can include diamond-like carbon. In some embodiments, the organic compounds are provided in having a low partial pressure of oxygen and/or water (e.g., less than about 100 ppm for each of oxygen and water).
(33) Exemplary organic compounds include volatile organic compounds (VOCs), an optionally substituted alcohol (e.g., ROH, in which R is an optionally substituted alkyl, optionally substituted alkenyl, optionally substituted cycloalkyl, optionally substituted alkaryl, or optionally substituted aryl; or a compound including hydroxyl), an optionally substituted carboxylic acid (e.g., RCO.sub.2H, in which R is an optionally substituted alkyl, optionally substituted aryl, or optionally substituted alkaryl; or a compound including carboxyl), an optionally substituted acid anhydride (e.g., R.sup.1C(O)OC(O)R.sup.2, in which each of R.sup.1 and R.sup.2 is, independently, an optionally substituted alkyl, optionally substituted alkaryl, optionally substituted aryl, or R.sup.1 and R.sup.2, when taken together, form an optionally substituted alkylene, such as a CH.sub.2CH.sub.2 group or a CHCH group), an optionally substituted acetal (e.g., R.sup.1OC(R.sup.3)(R.sup.4)OR.sup.2, in which each of R.sup.1 and R.sup.2 is, independently, an optionally substituted alkyl, optionally substituted alkaryl, optionally substituted aryl, or R.sup.1 and R.sup.2, when taken together, form an optionally substituted alkylene, such as a CH.sub.2CH.sub.2 group or a CHCH group; and in which each of R.sup.3 and R.sup.4 is, in dependently, H, optionally substituted alkyl, or optionally substituted aryl), an optionally substituted alkane (e.g., RH, in which R is an optionally substituted alkyl or optionally substituted cycloalkyl), an optionally substituted alkene (e.g., RH, in which R is an optionally substituted alkenyl), and/or an optionally substituted arene (e.g., RH, in which R is an optionally substituted aryl or optionally substituted alkaryl).
(34) Further exemplary compounds include an alkanol (e.g., ROH, in which R is an optionally substituted alkyl, optionally substituted cycloalkyl, or optionally substituted alkenyl), a phenol (e.g., ROH, in which R is an optionally substituted aryl), an aldehyde (e.g., RC(O)H, in which R is an optionally substituted alkyl, optionally substituted alkaryl, or optionally substituted aryl; or a compound including carboxyaldehyde), a ketone (e.g., R.sup.1C(O)R.sup.2, in which each of R.sup.1 and R.sup.2 is, independently, an optionally substituted alkyl, optionally substituted alkaryl, or optionally substituted aryl, or R.sup.1 and R.sup.2, when taken together, form an optionally substituted alkylene, such as a CH.sub.2CH.sub.2 group or a CHCH group; or a compound including carbonyl between two organic moieties), an alkene (e.g., RH, in which R is an optionally substituted C.sub.2-24 alkenyl), and/or an alkane (e.g., RH, in which R is an optionally substituted C.sub.1-24 alkyl). Yet other exemplary compounds include a haloalkane (e.g., ROH, in which R is an optionally substituted C.sub.1-6 haloalkyl), a haloalkene (e.g., ROH, in which R is an optionally substituted C.sub.2-6 haloalkenyl), an alkanol (e.g., ROH, in which R is an optionally substituted C.sub.1-24 alkyl), a phenol (e.g., ROH, in which R is an optionally substituted C.sub.4-18 aryl), an alkane (e.g., RH, in which R is an optionally substituted C.sub.1-24 alkyl), or an aromatic compound (e.g., a compound including one or more optionally substituted C.sub.4-18 aryl). In some embodiments, any alkyl group herein can include a heteroalkyl group or an alkylene group, as defined herein. In other embodiments, any aryl group herein can include a heteroaryl group, as defined herein.
(35) In other embodiments, the organic compound is a VOC. In one instance, a VOC is an organic chemical compound that can evaporate under normal indoor atmospheric conditions of temperature and pressure, e.g., VOC is any organic compound having an initial boiling point less than or equal to 250 C. measured at a standard atmospheric pressure of 101.3 kPa. Exemplary, non-limiting VOCs include an alcohol (e.g., ethanol or isopropanol), a hydrocarbon (e.g., a saturated alkane, a haloalkane, or a cycloalkane, such as propane, butane, methyl chloride, or limonene), aromatic hydrocarbons (e.g., benzene or toluene), aldehydes (e.g., formaldehyde or hexanal), ketones (e.g., acetone), etc.
(36) In some embodiments, the organic compound is provided in a mixture with a carrier gas. Exemplary carrier gases include an inert gas (e.g., N.sub.2 or He), water vapor, oxygen (e.g., O.sub.2), helium, nitrogen, argon, ambient air, or combinations thereof.
(37) Alloys, Including Binary Alloys
(38) The present invention includes the use of an alloy (e.g., a binary alloy) on at least one surface, in which a tribofilm is then formed in proximity to this surface. The alloy (e.g., a binary alloy) can be characterized by a base material (e.g., a solvent) and a dopant (e.g., a solute). Exemplary solvents include a metal, such as silver (Ag), aluminum (Al), gold (Au), cobalt (Co), chromium (Cr), copper (Cu), iron (Fe), hafnium (Hf), iridium (Ir), lanthanum (La), manganese (Mn), molybdenum (Mo), niobium (Nb), nickel (Ni), osmium (Os), palladium (Pd), platinum (Pt), rhenium (Re), rhodium (Rh), ruthenium (Ru), scandium (Sc), strontium (Sr), tantalum (Ta), technetium (Tc), thorium (Th), titanium (Ti), vanadium (V), tungsten (W), yttrium (Y), and zirconium (Zr). Exemplary solutes include a metal, such as silver (Ag), aluminum (Al), gold (Au), barium (Ba), beryllium (Be), bismuth (Bi), calcium (Ca), cadmium (Cd), cobalt (Co), chromium (Cr), cesium (Cs), copper (Cu), iron (Fe), gallium (Ga), germanium (Ge), hafnium (Hf), indium (In), potassium (K), lanthanum (La), lithium (Li), magnesium (Mg), manganese (Mn), molybdenum (Mo), sodium (Na), niobium (Nb), nickel (Ni), lead (Pb), palladium (Pd), rubidium (Rb), rhodium (Rh), antimony (Sb), scandium (Sc), tin (Sn), strontium (Sr), tantalum (Ta), thorium (Th), titanium (Ti), thallium (Tl), vanadium (V), tungsten (W), yttrium (Y), zinc (Zn), and zirconium (Zr).
(39) In particular embodiments, the alloy includes one solvent (e.g., any herein) and one solute (e.g., any herein), in which the solvent and the solute are different. The solute can be present in any useful amount. In one non-limiting instance, the solute is present at an amount of about 1 atomic percent (at. %) or greater and/or of from about 1 at. % to about 50 at. % (e.g., from 1 at. % to 10 at. %, 1 at. % to 10 at. %, 1 at. % to 15 at. %, 1 at. % to 20 at. %, 1 at. % to 25 at. %, 1 at. % to 30 at. %, 1 at. % to 35 at. %, 1 at. % to 40 at. %, 1 at. % to 45 at. %, 2 at. % to 10 at. %, 2 at. % to 15 at. %, 2 at. % to 20 at. %, 2 at. % to 25 at. %, 2 at. % to 30 at. %, 2 at. % to 35 at. %, 2 at. % to 40 at. %, 2 at. % to 45 at. %, 2 at. % to 50 at. %, 5 at. % to 10 at. %, 5 at. % to 15 at. %, 5 at. % to 20 at. %, 5 at. % to 25 at. %, 5 at. % to 30 at. %, 5 at. % to 35 at. %, 5 at. % to 40 at. %, 5 at. % to 45 at. %, 5 at. % to 50 at. %, 10 at. % to 15 at. %, 10 at. % to 20 at. %, 10 at. % to 25 at. %, 10 at. % to 30 at. %, 10 at. % to 35 at. %, 10 at. % to 40 at. %, 10 at. % to 45 at. %, 10 at. % to 50 at. %, 15 at. % to 20 at. %, 15 at. % to 25 at. %, 15 at. % to 30 at. %, 15 at. % to 35 at. %, 15 at. % to 40 at. %, 15 at. % to 45 at. %, 15 at. % to 50 at. %, 20 at. % to 25 at. %, 20 at. % to 30 at. %, 20 at. % to 35 at. %, 20 at. % to 40 at. %, 20 at. % to 45 at. %, 20 at. % to 50 at. %, 25 at. % to 30 at. %, 25 at. % to 35 at. %, 25 at. % to 40 at. %, 25 at. % to 45 at. %, 25 at. % to 50 at. %, 30 at. % to 35 at. %, 30 at. % to 40 at. %, 30 at. % to 45 at. %, 30 at. % to 50 at. %, 35 at. % to 40 at. %, 35 at. % to 45 at. %, 35 at. % to 50 at. %, 40 at. % to 45 at. %, 40 at. % to 50 at. %, and 45 at. % to 50 at. %). In another non-limiting instance, the solute is present at of from about 1 vol. % to about 60 vol. % (e.g., from 1 vol. % to 10 vol. %, 1 vol. % to 20 vol. %, 1 vol. % to 30 vol. %, 1 vol. % to 40 vol. %, 1 vol. % to 50 vol. %, 2 vol. % to 10 vol. %, 2 vol. % to 20 vol. %, 2 vol. % to 30 vol. %, 2 vol. % to 40 vol. %, 2 vol. % to 50 vol. %, 2 vol. % to 60 vol. %, 5 vol. % to 10 vol. %, 5 vol. % to 20 vol. %, 5 vol. % to 30 vol. %, 5 vol. % to 40 vol. %, 5 vol. % to 50 vol. %, 5 vol. % to 60 vol. %, 10 vol. % to 20 vol. %, 10 vol. % to 30 vol. %, 10 vol. % to 40 vol. %, 10 vol. % to 50 vol. %, 10 vol. % to 60 vol. %, 15 vol. % to 20 vol. %, 15 vol. % to 30 vol. %, 15 vol. % to 40 vol. %, 15 vol. % to 50 vol. %, 15 vol. % to 60 vol. %, 20 vol. % to 30 vol. %, 20 vol. % to 40 vol. %, 20 vol. % to 50 vol. %, 20 vol. % to 60 vol. %, 25 vol. % to 40 vol. %, 25 vol. % to 50 vol. %, 25 vol. % to 60 vol. %, 30 vol. % to 40 vol. %, 30 vol. % to 50 vol. %, 30 vol. % to 60 vol. %, 35 vol. % to 40 vol. %, 35 vol. % to 50 vol. %, 35 vol. % to 60 vol. %, 40 vol. % to 50 vol. %, 40 vol. % to 60 vol. %, 45 vol. % to 50 vol. %, 45 vol. % to 60 vol. %, and 50 vol. % to 60 vol. %).
(40) In particular embodiments, the alloy includes Pt and Au. In certain embodiments, the alloy displays high aspect ratio grain structures having grain diameters <100 nm and with >50% of the Au segregated to grain boundaries. In other embodiments, the alloy possesses nanocrystalline structures of high thermodynamic stability, which in turn provides materials having unprecedented thermo-mechanical stability and other beneficial physical characteristics. Exemplary characteristics include low specific wear rates (e.g., less than about 110.sup.8 mm.sup.3/N-m), low friction coefficients (e.g., of from about 0.2 to about 0.3), low resistivity (e.g., in the range of about 10.sup.8 .Math.m), and/or high endurance limit (e.g., numerous cycling even at high stress).
(41) In particular embodiments, the alloy is a binary alloy. Exemplary binary alloys include AgLa, AgSc, AgY, BaPd, BaPt, BeTi, BiPd, CaPt, CdPd, CoAl, CoAs, CoGa, CoGe, CoHf, CoNb, CoSc, CoTa, CoTi, CoY, CoZr, CrPt, CuSc, FeAl, FeAs, FeHf, FeZr, HfBi, HfCo, HfNi, HfOs, HfRe, HfTl, IrGe, LaAg, LaIr, LaRh, LaZn, MnGa, MnPd, MnSb, NbCo, NbNi, NbRe, NbSb, NiGa, NiGe, NiHf, NiLa, NiNb, NiTa, NiTh, NiY, OsAs, OsV, OsY, PtBi, PtMn, ReAs, ReHf, ReNb, ReTa, ReTi, RhSb, RhSn, RhZn, RuGa, RuLa, RuV, RuY, ScAg, ScNi, ScOs, ScRu, ScTc, SnPd, SrPd, SrPt, TaGa, TaNi, TaRe, TaSb, TcLa, TcTh, TcY, ThIr, ThRh, TiBe, TiBi, TiCo, TiNi, TiPb, TiSn, TiZn, VRu, VSb, VTc, WAs, WSi, Y Ag, YIr, YRh, YZn, ZnHf, ZnLa, ZnSc, ZnY, ZrBe, ZrCo, ZrNi, and ZrRe.
(42) In other embodiments, the alloy is a binary alloy including Pt (e.g., PtAg, PtAu, PtCu, PtFe, PtGe, PtHf, PtIn, PtMo, PtNi, PtPb, PtSb, or PtSn).
(43) In some embodiments, the alloy is a binary alloy including Pd (e.g., PdAg, PdAu, PdBa, PdCa, PdCs, PdCu, PdFe, PdGe, PdIn, PdK, PdMo, PdNi, PdPb, PdSb, or PdSn).
(44) In some embodiments, the alloy is a binary alloy including Ni (e.g., NiAg, NiAu, NiCu, NiGe, NiIn, NiNb, NiPd, NiPt, NiSb, NiSn, or NiTi).
(45) Further exemplary binary alloys (e.g., having nanocrystalline metastability) include FeSc, HfAg, IrCd, IrCr, IrIn, IrMg, IrMn, IrSb, IrZn, LaAu, MoAl, MoGe, MoPd, NbGa, NbSn, NbZn, NiIn, NiMg, NiZn, OsGa, OsGe, OsP, OsZn, PdMn, PtK, PtNa, PtTl, ReAl, ReGa, ReGe, ReSc, RhBi, RhCd, RhIn, RhMg, RhMn, RhTl, RuGe, RuMg, RuZn, ScCu, TaAl, TaFe, TaSn, TaZn, TcGe, TcV, TcZn, TiCd, TiIn, VGa, WAl, WGe, WHf, WIr, WPt, WZr, ZrAg, and ZrCu.
(46) Yet other exemplary alloys include AlPb, AlZn, CoCd, CoCu, CoPd, CuAg, CuBi, CuPb, CuY, FeAg, FeAu, FeCu, FeIn, FeMg, HfMg, HfSc, Hf-Ti, IrAg, IrAu, IrCu, IrNi, IrPd, IrRh, LaBa, LaCa, LaCr, LaLi, MnCd, MoAu, MoCr, MoSc, NbBi, NbCu, NbZr, NiAg, NiAu, NiCu, NiPb, NiSn, NiTl, OsAg, OsCu, OsNi, OsPd, OsRh, PdAu, PtAu, PtPd, ReCu, ReNi, RePd, ReRh, RhAg, RhAu, RhCo, RhCu, RhNi, RhPd, RuAg, RuCu, RuNi, RuPd, RuRh, ScAu, ScBa, ScCr, ScCu, ScSr, SrMn, TaBi, TaCu, TaHf, TaIn, TaZr, TcCu, TcNi, TcPd, ThCr, ThLa, ThMo, ThSc, ThTi, ThV, ThY, TiCa, TiK, TiLa, TiMg, TiSc, VCd, VCu, VSc, WAu, WCr, WCu, WSb, WSc, WTh, WY, YBa, YCa, YCr, YSr, YTL, YV, ZrCs, ZrK, ZrMg, ZrSc, ZrTi, and ZrY.
(47) In particular embodiments, the alloy includes one or more of the following: Hf, La, Mo, Nb, Ni, Os, Pt, Re, Rh, Ru, Ta, Tc, Ti, V, W, Y, and Zr (e.g., as a solvent). In other embodiments, the alloy includes one or more of the following: Ag, Al, Au, Ba, Be, Bi, Ca, Cd, Co, Cr, Cs, Cu, Fe, Ga, Ge, In, K, La, Li, Mg, Mn, Na, Ni, Pb, Rb, Sb, Sc, Sn, Sr, Th, Tl, Y, Zn, and Zr (e.g., as a solute).
(48) The alloy can be characterized by any useful feature. In one embodiment, the alloy is a binary alloy including a base material (e.g., a solvent) and a dopant (e.g., a solute). Exemplary solvents and solutes (e.g., a metal solvent and a metal solute) are described herein. In one non-limiting instance, the alloy includes a structure having segregation of the solute at grain boundaries. In particular embodiments, more than about 50% of the solute is segregated to grain boundaries (e.g., more than about 60%, 70%, 80%, or greater).
(49) In another embodiment, the alloy has a nanocrystalline structure. In a further embodiment, the nanocrystalline structure is characterized by a plurality of crystalline grains. In at least some embodiments, a nanocrystalline structure refers to the size of a grain (a crystal or a crystalline grain) having a dimension that is less than or equal to about 1000 nm (e.g., less than or equal to about 500 nm, 200 nm, 100 nm, 50 nm, 20 nm, 10 nm, 5 nm, 2 nm, or less). For example, the grain size may be between about 1000 nm and about 2 nm (e.g., about 500 nm and about 2 nm, about 200 nm and about 2 nm, about 100 nm and about 2 nm, about 50 nm and about 2 nm, about 30 nm and about 2 nm, about 20 and about 2 nm, about 10 nm and about 2 nm). The size may refer to the largest dimension of the grain or an average dimension determined by measuring that dimension for a plurality of grains. An average may be measured by any suitable techniques. A dimension may refer to the diameter, length, width, and/or height, depending on the geometry of the grain. In some instances, a nanocrystalline material may also refer to a material including an amorphous microstructure or a metastable microstructure. In one non-limiting instance, a metastable nanocrystalline phase can refer to a nanocrystalline structure that is more energetically favorable than the single phase solid solution at that solute content, but less favorable than macroscopic phase separation of the system into two solid solutions.
(50) An alloy herein can be characterized by a grain size. In one instance, the alloy includes grain (e.g., at least one grain or a plurality of grains) having a grain diameter (e.g., an average grain diameter) of less than about 100 nm (e.g., less than about 90 nm, 80 nm, 75 nm, 70 nm, 60 nm, 50 nm, 40 nm, 30 nm, 25 nm, 20 nm, 15 nm, 10 nm, 5 nm, 2 nm, or less). In another non-limiting instance, the alloy includes a grain (e.g., at least one grain or a plurality of grains) having a grain diameter (e.g., an average grain diameter) of from about 0.5 nm to about 150 nm (e.g., from 0.5 nm to 5 nm, 0.5 nm to 10 nm, 0.5 nm to 20 nm, 0.5 nm to 30 nm, 0.5 nm to 40 nm, 0.5 nm to 50 nm, 0.5 nm to 60 nm, 0.5 nm to 70 nm, 0.5 nm to 80 nm, 0.5 nm to 90 nm, 0.5 nm to 100 nm, 0.5 nm to 125 nm, 1 nm to 5 nm, 1 nm to 10 nm, 1 nm to 20 nm, 1 nm to 30 nm, 1 nm to 40 nm, 1 nm to 50 nm, 1 nm to 60 nm, 1 nm to 70 nm, 1 nm to 80 nm, 1 nm to 90 nm, 1 nm to 100 nm, 1 nm to 125 nm, 1 nm to 150 nm, 5 nm to 10 nm, 5 nm to 20 nm, 5 nm to 30 nm, 5 nm to 40 nm, 5 nm to 50 nm, 5 nm to 60 nm, 5 nm to 70 nm, 5 nm to 80 nm, 5 nm to 90 nm, 5 nm to 100 nm, 5 nm to 125 nm, 5 nm to 150 nm, 10 nm to 20 nm, 10 nm to 30 nm, 10 nm to 40 nm, 10 nm to 50 nm, 10 nm to 60 nm, 10 nm to 70 nm, 10 nm to 80 nm, 10 nm to 90 nm, 10 nm to 100 nm, 10 nm to 125 nm, 10 nm to 150 nm, 15 nm to 20 nm, 15 nm to 30 nm, 15 nm to 40 nm, 15 nm to 50 nm, 15 nm to 60 nm, 15 nm to 70 nm, 15 nm to 80 nm, 15 nm to 90 nm, 15 nm to 100 nm, 15 nm to 125 nm, 15 nm to 150 nm, 20 nm to 30 nm, 20 nm to 40 nm, 20 nm to 50 nm, 20 nm to 60 nm, 20 nm to 70 nm, 20 nm to 80 nm, 20 nm to 90 nm, 20 nm to 100 nm, 20 nm to 125 nm, 20 nm to 150 nm, 30 nm to 40 nm, 30 nm to 50 nm, 30 nm to 60 nm, 30 nm to 70 nm, 30 nm to 80 nm, 30 nm to 90 nm, 30 nm to 100 nm, 30 nm to 125 nm, 30 nm to 150 nm, 40 nm to 50 nm, 40 nm to 60 nm, 40 nm to 70 nm, 40 nm to 80 nm, 40 nm to 90 nm, 40 nm to 100 nm, 40 nm to 125 nm, 40 nm to 150 nm, 50 nm to 60 nm, 50 nm to 70 nm, 50 nm to 80 nm, 50 nm to 90 nm, 50 nm to 100 nm, 50 nm to 125 nm, 50 nm to 150 nm, 60 nm to 70 nm, 60 nm to 80 nm, 60 nm to 90 nm, 60 nm to 100 nm, 60 nm to 125 nm, 60 nm to 150 nm, 70 nm to 80 nm, 70 nm to 90 nm, 70 nm to 100 nm, 70 nm to 125 nm, 70 nm to 150 nm, 80 nm to 90 nm, 80 nm to 100 nm, 80 nm to 125 nm, 80 nm to 150 nm, 90 nm to 100 nm, 90 nm to 125 nm, 90 nm to 150 nm, 100 nm to 125 nm, and 100 nm to 150 nm).
(51) In one non-limiting instance, the alloy includes grain (e.g., at least one grain or a plurality of grains) having a grain length (e.g., an average grain length) of greater than about 100 nm (e.g., greater than about 200 nm, 500 nm, 750 nm, 1000 nm). In another non-limiting instance, the alloy includes a grain (e.g., at least one grain or a plurality of grains) having a grain length (e.g., an average grain length) of from about 20 nm to about 2000 nm (e.g., from 20 nm to 50 nm, 20 nm to 75 nm, 20 nm to 100 nm, 20 nm to 200 nm, 20 nm to 300 nm, 20 nm to 400 nm, 20 nm to 500 nm, 20 nm to 750 nm, 20 nm to 1000 nm, 20 nm to 1500 nm, 50 nm to 75 nm, 50 nm to 100 nm, 50 nm to 200 nm, 50 nm to 300 nm, 50 nm to 400 nm, 50 nm to 500 nm, 50 nm to 750 nm, 50 nm to 1000 nm, 50 nm to 1500 nm, 50 nm to 2000 nm, 75 nm to 75 nm, 75 nm to 100 nm, 75 nm to 200 nm, 75 nm to 300 nm, 75 nm to 400 nm, 75 nm to 500 nm, 75 nm to 750 nm, 75 nm to 1000 nm, 75 nm to 1500 nm, 75 nm to 2000 nm, 100 nm to 75 nm, 100 nm to 100 nm, 100 nm to 200 nm, 100 nm to 300 nm, 100 nm to 400 nm, 100 nm to 500 nm, 100 nm to 750 nm, 100 nm to 1000 nm, 100 nm to 1500 nm, 100 nm to 2000 nm, 250 nm to 75 nm, 250 nm to 100 nm, 250 nm to 200 nm, 250 nm to 300 nm, 250 nm to 400 nm, 250 nm to 500 nm, 250 nm to 750 nm, 250 nm to 1000 nm, 250 nm to 1500 nm, 250 nm to 2000 nm, 500 nm to 75 nm, 500 nm to 100 nm, 500 nm to 200 nm, 500 nm to 300 nm, 500 nm to 400 nm, 500 nm to 500 nm, 500 nm to 750 nm, 500 nm to 1000 nm, 500 nm to 1500 nm, 500 nm to 2000 nm, 750 nm to 75 nm, 750 nm to 100 nm, 750 nm to 200 nm, 750 nm to 300 nm, 750 nm to 400 nm, 750 nm to 500 nm, 750 nm to 750 nm, 750 nm to 1000 nm, 750 nm to 1500 nm, 750 nm to 2000 nm, 1000 nm to 1500 nm, and 1000 nm to 2000 nm).
(52) The grain can have any useful shape (e.g., a columnar shape). The shape can be characterized in any useful manner. In one non-limiting instance, the grain has an aspect ratio defined by a ratio of a first dimension (e.g., a grain diameter, including an average grain diameter) to a second dimension (e.g., a grain length, including an average grain length). The aspect ratio can be determined in any useful manner. In one instance, an aspect ratio is determined for each grain and then each ratio can be used to formulate an average. In another instance, an aspect ratio is determined by employing an average first dimension and an average second dimension. In one non-limiting embodiment, the aspect ratio is a ratio of a grain diameter: grain length. Exemplary aspect ratio includes 1:2 or greater (e.g., 1:3, 1:4, 1:5, 1:6, 1:7, 1:8, 1:9, 1:10, 1:15, 1:20, or greater). Yet other exemplary aspect ratios include that of from about 1:2 to about 1:100 (e.g., from 1:2 to 1:5, 1:2 to 1:10, 1:2 to 1:25, 1:2 to 1:50, 1:2 to 1:75, 1:2 to 1:100, 1:5 to 1:10, 1:5 to 1:25, 1:5 to 1:50, 1:5 to 1:75, 1:5 to 1:100, 1:10 to 1:25, 1:10 to 1:50, 1:10 to 1:75, and 1:10 to 1:100).
(53) In yet another non-limiting embodiment, an average grain diameter of the plurality of columnar grains is less than about 100 nm (or any range described herein), and/or an average grain length of the plurality of columnar grains in greater than about 100 nm (or any range described herein).
(54) In some embodiments, stability of the grain is characterized by minimal grain growth (e.g., at a temperature of from about 300 C. after weeks of exposure). Minimal grain growth can be determined in any useful manner (e.g., a growth less than about 30% of one or more grain dimensions, such as a growth of less than about 20% of one or more grain dimensions). Without wishing to be limited by mechanism, in some instances, the presence of columnar grains may impart resistance to stress-induced grain growth, which in turn may promote ultra-low wear behavior.
(55) Methods of Forming an Alloy
(56) The alloy can be formed in any useful manner. In some embodiments, the alloy can be used as a coating (e.g., a contact coating). These coatings can be deposited using various physical vapor deposition routes, including sputtering (e.g., magnetron sputtering), atomic layer deposition, pulsed laser deposition, and electron beam deposition; chemical vapor deposition routes; electrodeposition routes, including electroplating; plating routes, including electroless plating; thermal spraying routes, including cold spray; and other deformation-based techniques, such as equal channel angular pressing, high-pressure torsion, rapid forging, and surface mechanical attrition treatment. The coating may be further treated (e.g., annealed and/or processed).
(57) Other methods include forming a thin film (e.g., by depositing an alloy on a substrate, such as in any deposition routes described herein) and optionally annealing the film or alloy (e.g., at a temperature greater than about 300 C.). In some embodiments, the methods can be optimized to achieve a particular microstructure (e.g., a plurality of columnar grains).
(58) Methods herein can also include forming a device or a component thereof. In one non-limiting embodiment, the method includes forming an electrical contact (e.g., by depositing an alloy on a substrate and optionally annealing the alloy at a temperature greater than about 300 C.). Further steps can be included to process a surface of the contact, e.g., by exposing the film to a current source or to a heat source, thereby removing one or more insulating species from a surface of the film. If the electrical contact is formed from an alloy that preserves its nanocrystallinity and/or microstructure at high currents and/or high temperature, then the exposure step provides a simplified way to clean an electrical contact surface from debris without negatively impacting the wear parameters of the contact.
(59) The alloys herein can be employed in any useful form (e.g., a thin film) and in any useful device (e.g., a device component, such as an electrical contact, including sliding electrical contacts). In particular embodiments, the alloys herein provide enhanced wear characteristics even as a thin film. Thus, function can be retained even at reduced thickness of the coating. Reduced thickness coating can have any useful thickness (e.g., greater than about 100 nm and/or less than about 5 m, as well as any range described herein).
(60) In one embodiment, the method includes depositing a binary alloy on a substrate; and annealing the alloy at a temperature greater than about 200 C. (e.g., after weeks of exposure at the temperature, including a temperature greater than about 250 C., 300 C., 350 C., 400 C., 450 C., or 500 C., or a temperature of from about 150 C. to about 650 C.). In other embodiments, the alloy includes a plurality of columnar grains (e.g., where at least one grain has a grain diameter of less than about 100 nm and/or an aspect ratio of at least one grain is 1:2 or greater). The alloy can be provided as a coating or a thin film.
(61) In another embodiment, the method includes depositing a binary alloy on a substrate; annealing the alloy at a temperature greater than about 200 C. (e.g., after weeks of exposure at the temperature, including a temperature greater than about 250 C., 300 C., 350 C., 400 C., 450 C., or 500 C., or a temperature of from about 150 C. to about 650 C.), thereby forming an alloy film including a plurality of columnar grains, and where at least one grain has a grain diameter of less than about 100 nm and/or an aspect ratio of at least one grain is 1:2 or greater; and optionally exposing the film to a current source, thereby removing one or more insulating species from a surface of the alloy film.
EXAMPLES
Example 1
In Situ Tribochemical Formation of Self-Lubricating Diamond-Like Carbon Films
(62) Diamond-like carbon (DLC) films were tribochemically formed on the surface of highly stable nanocrystalline PtAu alloys from ambient hydrocarbons. A sliding contact between an alumina sphere and PtAu coated steel exhibited extremely low friction coefficients (e.g., as low as =0.01) after dry sliding in environments containing trace (e.g., ppb) organics. Ex situ analysis indicated that the change in friction coefficient was due to the formation of amorphous carbon films. Raman spectroscopy and elastic recoil analysis showed that these films include amorphous carbon (e.g., highly graphitic amorphous carbon or sp.sup.2/sp.sup.3 amorphous carbon) with as much as 20% hydrogen. Transmission electron microscopy indicated films with thicknesses exceeding 100 nm and were enhanced by the incorporation of worn PtAu nanoparticles, resulting in highly wear-resistant, low-friction DLC/PtAu nanocomposites. Atomistic simulations of hydrocarbons under shear between rigid Pt slabs using a reactive force field showed stress-induced changes in bonding through chain scission, a likely route towards the formation of these coatings. This novel demonstration of an in situ, tribochemical route for the formation of self-lubricating films has significant impact potential in a wide range of engineering applications.
(63) Surface catalysis routes are often employed in industrial and commercial applications to process organic species [1-4]. Examples include the use of precious metals (e.g., Pt, Rh, and Pd) in catalytic converters to convert toxic constituents found in combustion engine exhaust gas (e.g. complex hydrocarbons such as unburned alkanes) into simpler and less toxic compounds like carbon dioxide and water [1]. In many cases, surface reaction rates are enhanced by increasing the temperature of the catalyst, or applying a shear stress [5-11].
(64) While the promise of PtAu alloys has been previously discussed in the catalysis literature [12,13], we show that a unique subclass of PtAu alloys having highly stable nanocrystallinity [14] and extraordinary wear resistance [15] enabled the formation of diamond-like carbon (DLC) films, one of the most wear resistant and lubricious materials. Unlike conventional synthesis routes for DLC coatings, we show it is possible to generate highly lubricious and wear-resistant hydrogenated amorphous carbon films in situ through shear of a PtAu alloy surface in the presence of trace amounts of ambient organic adsorbates at room temperature in the absence of free oxygen.
(65) DLC films can exhibit extraordinarily high hardness and wear resistance, and when sufficiently hydrogenated, some of the lowest friction coefficients of any solid [16-18]. Hydrogenated DLC, or more generally hydrogenated amorphous carbon (a-C:H), is found in a wide range of commercial applications (e.g. bearings, gears and mechanical linkages in satellites, wind turbines and automobiles) primarily as thin films, to impart low friction and high wear resistance [16,17,19]. While these materials share a common molecular structure of sp.sup.2 and sp.sup.3 hybridized carbon [18], they lack long-range order and are thus amorphous. When a-C:H exhibits extremely low friction in inert or vacuum environments (e.g., 0.001 to 0.05; 10N load [20]), it is generally attributed to hydrogen passivation of unterminated carbon surface bonds [21]. Unlike other low friction carbonaceous coatings that require humid requirements (e.g., a-C, graphite, etc.), a-C:H typically exhibits increasing friction coefficients with exposure to humidity (e.g., 0.2 to 0.3; 10N load [20,22])
(66) DLC coatings are routinely manufactured via plasma enhanced-chemical vapor deposition (PECVD) from hydrocarbon feed gases [17]. A recent publication demonstrated how transition metal-nitride coatings can act as a catalyst for the formation of low-friction solid carbon films from fluid lubricants [6], but these films were observed outside of the region of contact and did not confer enhanced lubricity. Here, we show in situ tribochemical formation of thick, persistent, low friction a-C:H films from adventitious carbon and ambient organics, including simple alcohols and alkanes, at room temperature.
(67) As described herein, we describe in situ tribochemical formation of low friction DLC films on PtAu alloy surfaces at room temperature from ambient hydrocarbons, simple alcohols, and alkanes. The films were nanocomposites, consisting of a mixture of DLC and PtAu nanoparticles. No material removal from the wear tracks produced in N.sub.2 with trace organics was evident after as many as 100 k cycles of sliding at 1.1 GPa maximum Hertzian stress. The generation of PtAu nanoparticles, which were incorporated into the tribofilm, implies the possibility of forming electrically conductive, extremely wear resistant and low-friction DLC-metal nanocomposites in situ and at room temperature. While the use of precious metal films in electrical contact applications is commonplace, these films are in general unlubricated, so the formation of self-lubricating DLC films from trace organics at ambient temperature would have extraordinary utility in a wide range of engineering applications. The use of this approachcurrently requiring precious metalsmay be cost prohibitive except in the case of rolling element or simple bearings.
(68) Another tantalizing application for stable nanocrystalline noble metal alloys like PtAu is in microelectromechanical systems, where the preferential formation of a conductive and wear resistant carbon-based nanocomposite lubricant may mitigate two key failure modes, namely the formation of insulating tribopolymer films and wear of metallic substrates, better than the vapor phase lubrication by molecular adsorption of simple hydrocarbons on silicon structures that has been previously reported [35]. Additional details follow.
Example 2
Experimental Methods
(69) Provided herein are exemplary methods for some of the experimental data described herein.
(70) Material synthesis: Thin films of Pt with 10 at. % Au (PtAu) were deposited by direct current (DC) magnetron sputtering using a cryo-pumped vacuum system with a base pressure of 210.sup.7 Torr. Films were prepared from a single, high purity PtAu deposition target (Refining Systems) that was pre-sputtered for approximately 5 min. prior to the start of each deposition to avoid incorporation of adventitious carbon or other impurities in the deposited films. Ultra-high purity Ar (99.999%) was used for all sputter processes, and substrates did not exceed 50 C. during deposition. A quartz crystal monitor was used to determine film thickness with Angstrom-level precision. Film composition was verified by Electron Microprobe Analysis (EMPA). A JEOL model JXA-8530F Microprobe operating at 7.0 keV incident energy (20 nA, 2 m beam diameter) was used to determine the composition of a 1 m thick PtAu witness film. The average of 50 spaced measurements was used to demonstrate a film composition of Pt..sub.90Au..sub.10, with uncertainty of +/ 0.5 at. % with 95% confidence or with an experimental accuracy of 1.89% relative to measured standards. Reference materials of known compositions for Pt and Au were used from Taylor Metal Standards (Charles Taylor Multi Element Standard No. 202, September 1976) using Pt M.sub.a line and Au M.sub. line for composition calculations. For brevity, we will refer to these simply as PtAu films in the Examples described herein. Friction experiments were performed on 2 m thick PtAu films deposited on polished 440 C stainless steel coupons.
(71) Tribological testing: The wear, friction, fatigue, and other mechanical properties of these films are described in detail in separate manuscripts [15,23]. Briefly, we found that these films exhibited extraordinarily high resistance to wear (wear rates of about 310.sup.9 mm.sup.3/N-m), low and consistent friction coefficients (0.25-0.3 over 100K cycles in laboratory air, more below), and high nanoindentation hardness (7.1+/0.4 GPa) [15]. The ability of these films to withstand high applied stresses, coupled with the well-known catalytic properties of pure Pt and PtAu alloys, combined to enable the formation of DLC films.
(72) Friction coefficients were measured for 3.2 mm diameter sapphire spheres sliding against the PtAu thin films deposited on steel using a 1 N normal force, corresponding to a 1.1 GPa maximum Hertz stress and 41 m contact diameter. A sliding speed of 1 mm/s and wear track length of 2 mm were used in bi-directional sliding motion, exposing any given location on the wear track the ambient gas environment in the test chamber for approximately 2 seconds per contact pass. Tribological testing was performed on a modified Anton Paar Nano Tribometer housed in an acrylic glove box; modifications include a stepper motor (PI Instruments PLS 85), National Instruments data acquisition hardware (PXIe 1073 and 6361) and custom LabVIEW software. Position encoded normal and friction forces were acquired at 50 Hz. Experiments performed in lab air were performed with the gloves removed from the chamber, exposing the tribometer to ambient air that was temperature regulated to 20-22 C. at a relative humidity of 12-17%. For an oxygen-free environment, the box was purged using 34 L/min flow of ultra-high purity (UHP) nitrogen until <10 ppm of O.sub.2 and H.sub.2O were present, measured using an Alpha Omega 3000 series oxygen analyzer and Michell Instruments S8000 precision chilled mirror hygrometer. Samples were also exposed to mixed flows of N.sub.2 and isopropyl alcohol (IPA), or N.sub.2 and anhydrous hexanes, in a nitrogen purged glove box. In both instances, a 34 L/min ultra-high-purity nitrogen stream was used to continuously purge the chamber, while a second 1.4 L/min stream of ultra-high-purity nitrogen was routed through a vessel filled with approximately 3 L of either water and IPA or anhydrous hexanes in liquid form. A diffuser stone was used to maximize exposure of the nitrogen gas to the liquid medium. In referencing data from these experiments in the Examples below, the term high concentration is used to describe situations in which the hydrocarbon stream was directed at the sliding contact, while low concentration is used when the hydrocarbon stream was directed away from the contact, thus implying dilution by mixing with the continuously flowing UHP nitrogen stream that is used to maintain a positive pressure in the glove box.
(73) Microscopy: Raman spectroscopy was performed on tribofilms using a Horiba LabRam HR Spectrometer equipped with a 600 grooves/mm grating, a Synapse CCD detector, and a 50 microscope objective with a spectral resolution of 0.3 cm.sup.1 at 680 nm and 1800 gr/mm. A 532 nm laser line set at an output of 10 mW was used as the excitation source, resulting in an incident 1.5 mW on the sample surface as measured by a Pocket Laser Power meter 840011 with a 1.55 signal correction factor. Sampling was performed using a DuoScan method over a spot size of approximately 80 m60 m. Using a pinhole setting of 100 m, typical collection times ranged from 5 to 20 seconds with 20 scans collected to increase the signal to noise ratio. An FEI Helios G3 dual beam focused ion beam (FIB) with electron imaging and Ga-ion milling capabilities was used to image the wear track surfaces and to prepare electron transparent cross-sectional specimens for imaging via transmission electron microscope (TEM). An FEI Titan G2 80-200 scanning transmission electron microscope (STEM) with a Cs probe corrector operated at 200 keV was used in this study. An electron probe smaller than 0.13 nm with a convergence angle of 18.1 mrad, and a current of 75 pA was used for data acquisition. A Bruker Contour GT-I optical interferometer was used to determine wear volumes. The entire length of each wear scar was imaged using the stitching feature on the Vision64 software, using a 10 objective and 2 magnified, providing a pixel resolution of 500 nm in the lateral and <1 nm in the vertical (height) directions. Wear rates were determined using topographical data from each track, excluding the ends of the wear tracks where sliding speeds vary and wear debris pile-up occurs from the reciprocating motion of the slider. The specific wear rate (K) of the PtAu track was calculated using the following expression:
(74)
where A is the average wear track cross-sectional area, F.sub.n is the contact force, and N is the number of cycles. A more detailed explanation of volumetric wear rate calculations based on mean cross-sectional wear track analysis and the uncertainty of these calculations are provided elsewhere [24,25]
(75) Gas composition analysis: Analysis was performed to identify the concentrations of organic species present in the dry nitrogen purged glove box that housed the friction testing apparatus. Samples were tested using a Perkin Elmer (Groton, Conn.) Turbo Matrix ATD thermal desorption unit. Gas samples were pumped through a pre-conditioned thermal desorption tube (Perkin Elmer Tenax TA Thermal Desorption Tubes, (6.35 mm) O.D.3.5 (89 mm) long), and desorbed at 300 C. for 10 minutes. The outgassed species are trapped on a M041-3628 Air Monitoring Trap cooled to 30 C., desorbed at 40 C./s, and transferred via heated line to an Agilent 6890N using a J&W DB-1701 column (60 m0.32 mm1.0 m). Analytes were detected with an Agilent 5975 Inert XL Mass Selection device (Chemstation version D.03.00.611).
(76) A Tenax TA desorption tube was conditioned by purged heating and used to concentrate a flow-through gas sample at a measured flow rate of 0.4 L/min for 16 minutes, resulting in a total collection volume of 6.5 L. The same Tenax TA desorption tube was reanalyzed as a blank reference, and the chromatograms overlaid. The components not detected in the blank analysis were integrated using Agilent Chemstation software, and instrument response (as peak area) was compared to the response of a known mass of ethylene glycol. The resulting compounds could only be estimated at concentrations between 20 and 100 ng/L. These estimates assumed equivalent response factors.
Example 3
Understanding the Role of Environment on Friction Coefficient Evolution of DLC Films
(77) Friction coefficient data for sapphire spheres sliding against PtAu thin films in various operating environments are shown in
(78) When friction measurements were performed in dry N.sub.2, friction coefficients were initially similar to the test in laboratory air, in the range =0.25-0.30, but dropped over approximately 10K cycles to a value of =0.01 (
(79) TABLE-US-00001 TABLE 1 Compounds identified from NIST library of gas samples Compounds identified trichloroethylene acetic acid benzaldehyde tridecane phenol acetophenone 2-heptyl-1,3-dioxolane butylated hydroxytoluene benzoylformic acid phenylmaleic anhydride
(80) Trace amounts of several complex hydrocarbon gaseous species were identified with concentrations in the range 20-100 ng/L, assuming equivalent response factors. Assuming a linear growth rate of the DLC film in this environment, i.e., N.sub.2 with trace organics, we can estimate whether this environment can generate a 50 nm thick film in the time required to complete a 35 k cycle test (see
(81) Even if we ignore the continuous flow of nitrogen with similar concentrations of trace organics into the chamber at 34 L/min, corresponding to 680 ng/min of trace organics, there is well over 8,400 ng of trace organic material in the chamber to feed the tribochemical formation of DLC. The specific concentrations of hydrocarbons were only measured for the UHP dry N.sub.2 case to verify that even a nominally pure source of nitrogen with ppb concentrations of trace organics contains more than enough hydrocarbons to amply sustain film growth. The concentrations of hexanes and IPA in the high and low concentration regimes were not quantified, as a systematic study of formation rates as a function of hydrocarbon concentrations and compositions was outside the scope this investigation. We rely on these qualitative statements of concentration simply to motivate future work to establish the correlation between DLC formation rates and environment composition.
(82) Experiments were also performed to probe film formation kinetics by deliberately increasing the concentration of hydrocarbons present in the chamber. Friction coefficients of .Math.0.2 were observed when a direct flow of N.sub.2 carrying concentrated IPA and water vapor was impinged on the contact during sliding (
(83) An additional experiment using both high and low concentrations of anhydrous hexanes (
(84) These results imply that (1) while humidity is known to significantly impact the friction behavior of hydrogenated DLC [16,26], the presence of water alone did not appear to inhibit the tribochemical formation of a-C:H DLC, and (2) that the friction coefficient exhibited a dependence on hydrocarbon concentration in the absence of water (
(85) Without wishing to be limited by mechanism, we hypothesize that, despite the presence of ambient organic species in the lab air environment, the combination of oxygen and water is necessary to inhibit film formation. The rate of film formation is clearly faster with higher concentration of organic species; this is evident in a comparison of data in
Example 4
Characterizing In Situ DLC Films
(86) Raman spectroscopy was used to characterize the films formed on the low-friction wear tracks, and they were found in all cases to correspond to highly graphitic amorphous carbon or DLC, as shown in
(87) The hydrogen concentration on the DLC tribofilm shown in
(88) The ERDA-determined value of 20% H and Raman G-peak position of 1585 cm.sup.1 and I(D)/I(G) ratio of 0.7 (
(89) TEM of wear track cross-sections corresponding to the data sets in
(90) The gradual increase in friction coefficient to values of about =0.1 at very long times, as observed in prolonged sliding experiments (
(91) Referring to pressure-temperature phase diagrams for carbon [33], it is reasonable to expect that the contact stresses in these experiments are sufficient to enable the formation of sp.sup.2/sp.sup.3 bonds in the tribofilm. The high hardness of this alloy (H7 GPa), coupled with evolving surface roughness, and the high surface-area-to-volume ratio and small curvature of interspersed PtAu nanoparticles all likely play a role in enabling and enhancing the decomposition and cross-linking of hydrocarbons into a predominately sp.sup.2/sp.sup.3 tribofilm. While the process of tribopolymer formation from benzene on the surface of Pt contacts has been shown by Qi et al. [5], the higher contact stresses accessible by virtue of our stable nanocrystalline PtAu alloy enable the formation of the more desirable self-lubricating DLC films. A conservative calculation of contact stress (i.e. Hertz maximum stress of 1.1 GPa) approaches the Berman-Simon boundary where the diamond allotrope of carbon is stable at room temperature [33]. Future systematic investigations could provide greater insight about the numerous factors impacting the formation of DLC/PtAu nanocomposite tribofilms, and possibly elucidate new methods to optimize this and related systems for greater engineering utility.
Example 5
Using MD for Evidence of Stress-Dependent Hydrocarbon Deposition
(92) Chemically reactive molecular dynamics simulations were used to further explore the formation of these DLC films, by studying hydrocarbon chain scission under high applied stresses on a catalytic substrate. These simulations used a ReaxFF force field that was previously parameterized for hydrocarbon catalysis on Pt [34]. We studied two hydrocarbons, isopropyl alcohol (IPA) and hexane, initially applied in a single layer between two Pt slabs at room temperature as depicted in
(93) The number of C-C bonds and H-H bonds, shown in
Example 6
Formation and Characterization of an Exemplary PtAu Alloy System
(94) The DLC films herein can be employed with any useful alloy system. One exemplary system includes a binary alloy having stable non-crystallinity characteristics with optimal wear rates. In this Example, we show one such alloy system including Pt and Au. In particular, we describe such alloys having wear rates about 100 lower rates than any reported nanocrystalline alloy, while exhibiting friction coefficients (0.2-0.3) similar to polytetrafluoroethylene nanocomposites.
(95) PtAu thin films were deposited by direct current (DC) magnetron sputtering using a cryopumped vacuum system with a base pressure of 210.sup.7 Torr. A single, high purity PtAu target (Refining Systems) was used for all depositions. This target was pre-sputtered for 5 min. prior to the start of each deposition to avoid incorporation of adventitious carbon or other impurities in the deposited films. Ultra-high purity Ar (99.999%) was used for all sputter processes, and substrates did not exceed 50 C. during deposition. A quartz crystal monitor was used to determine film thickness with Angstrom-level precision. Thickness calibrations conducted prior to depositions utilized a calibrated DEKTAK 3 (Veeco; Woodbury, N.Y.) surface profilometer and cross-section TEM. The 18 nm thin film and the 2 m thick film were deposited on polycrystalline NaCl and oxidized Si(100) substrates, respectively. The thick films deposited on a 150 mm diameter Si wafer showed an in-plane compressive residual stress of 650 MPa, determined from wafer curvature.
(96) Film composition was verified by Wavelength Dispersive Spectroscopy (also referred to as Electron Microprobe). A JEOL model JXA-8530F Microprobe operating at 7.0 keV incident energy (20 nA, 2 m beam diameter) was used to determine the composition of a 1 m thick PtAu witness film. The average of 50 spaced measurements demonstrated a film composition of Pt.sub..90Au.sub..10. Uncertainty in the measurement was +/0.5 at. % with 95% confidence. For brevity in this Example, we often refer to this as simply PtAu.
(97) To confirm the suppression of grain growth in Pt through grain boundary segregation of Au, thermal anneals were performed on both thin and thick films of pure Pt and PtAu. Results of thermal grain growth experiments on magnetron sputtered PtAu (10 at. % Au) are presented in
(98) In
(99) In
(100) Typical of magnetron sputter-deposited metal films, all thick films used in this study had a columnar structure with large grain aspect ratios. Thus, for the thick films in annealing and mechanical testing, the reported grain sizes are the average columnar grain diameters based on plan-view images of films sectioned near the middle of the film thickness. In situ X-ray diffraction annealing data suggests a stable grain size of 40-50 nm at temperatures up to 600 C. In both the thin and thick films we found that Au segregated to grain boundaries and free surfaces, with highly heterogeneous distributions.
(101) Segregation of Au in PtAu alloys was explored through equilibrium atomistic (off-lattice) Monte Carlo (MC) simulations. These simulations model the interatomic interactions by an embedded atom method (EAM) potential that predicts a bulk phase diagram in good agreement with experiment. A Metropolis MC algorithm was used to sample off-lattice thermal equilibrium configurations [39,40]. Note that since the procedures allow interchanges between distant atoms, this method does not reflect the kinetic pathways that the physical system will take to reach equilibrium, however the results are representative of equilibrium compositional arrangements.
(102) Consistent with the bulk phase diagram, there are only dilute levels of Au in the grain interiors (see, e.g., plan view of a thick film columnar microstructure in
(103) One notable consistency between the experimental microstructures and computational segregation calculations is that the distribution of Au is not uniform along the grain boundaries but rather occurs in clusters (see, e.g.,
(104) We also performed cyclic fatigue tests using 5 m thick freestanding columnar grained PtAu dogbones in tension (
(105) Uniaxial tension tests were used to test whether thermal stability also results in inhibition of mechanically-driven grain growth. A comparison of uniaxial tension experiments and simulations using columnar grained structures is shown in
(106) Overall, we describe binary nanocrystalline alloys that are intrinsically stable, resulting in a new class of alloys inherently impervious to abnormal thermal environments, large cyclic thermal stresses, and loss of wear-resistance in electrical-tribological components. We identified the highest wear resistance noble metal alloy, which can significantly improve the reliability, cost and efficiency of electrical systems, ranging from commercial devices like cell phones to utility-scale wind turbines.
(107) Unlike conventional electrical contact alloys, which are sensitive to even modest stresses and temperatures, the ability of PtAu alloys to resist grain growth at extreme stresses and temperatures imparts extraordinary wear and fatigue resistance. A two-order-of-magnitude improvement in wear resistance, and concomitant resistance to thermally-driven aging mechanisms, enables several opportunities to dramatically reduce the cost and improve the reliability and performance of electrical devices in a broad range of applications.
Example 7
Nanocrystalline PtAu MEMS Electrical Switches
(108) Solid state switches suffer from a critical inherent deficiency that has motivated the search for an alternative ohmic switch technology; fundamentally, semiconductor devices suffer from leakage current losses that draw power and drain batteries even in the off-state. This characteristic of solid state semiconductor devices can be mitigated using a mechanical micro-switch. In part, micro-electromechanical (MEMS) ohmic switches have been unable to replace semiconductor switches due to limitations on electrical insertion loss and switch life.
(109) We propose MEMS switches based on highly stable nanocrystalline metal alloys that remove these limitations and enable the realization of their full potential as a substitute for solid state switches in a wide range of microelectronics applications such as cell phones and high efficiency sensors. Stable nanocrystalline alloys should enable operation at unprecedented temperatures than presently achievable with existing solid state or MEMS technologies.
(110) Any useful portion of a switch can include the alloy and/or DLC film described herein.
(111)
(112) In particular embodiments, the MEMS switch employs an alloy displaying thermodynamic and mechanical microstructural stability. One exemplary alloy includes a subset of nanocrystalline binary metal alloys (e.g. grain boundary solute segregated Pt-15 wt. % Au) to enable unprecedented long-life operation of ohmic MEMS switches. Three primary failure mechanisms associated with existing technology are addressed by implementation of these unique alloys: (1) the formation of insulating carbon-based deposits by decomposition and reaction of adsorbates, (2) adhesive failure through mechanical cycling of metal surfaces, and/or (3) loss of restoring force due to diffusional creep in the structural metal. Specifically, these three failure modes generate failure either by progressively larger insertion loss (i.e. contact resistance) or eventual unrecoverable contact adhesion.
(113) The introduction of stable nanocrystalline alloys that also exhibit high catalytic activity for carbon decomposition (e.g. nanocrystalline Au stabilized Pt-matrix alloys) enables mitigation of all three critical failure modes. For example, Pt is a catalyst for the decomposition of organic contaminants into volatile carbonaceous gases (e.g. COx); this property can be used to create a self-cleaning of adsorbate contaminants that are the source of high-electrical resistance failure. Conversely, stress and temperature driven microstructural evolution of the contacting surfaces will eventually result in permanent contact adhesion and failure to separate or switch.
(114) The same characteristics of these alloys that impart high thermal and mechanical stability can act to mitigate the eventual progression to failure through microstructural evolution. Additionally, these alloys are insensitive to temperature up to homologous temperatures of 0.5 or more (e.g. for PtAu, temperatures as high as 500 C. have been demonstrated), enabling operation of the contact at previously impractically high temperatures. The ability for high temperature operation greatly expands the design space, and enables higher current density operation and/or switch miniaturization for a given power requirement.
(115) As also described herein, such alloys can be used in conjunction with DLC films, which can be formed in situ. Thus, in particular non-limiting embodiments, a MEMS switch can include a binary alloy (e.g., any described herein) and a DLC film, in which the film is formed in situ (e.g., employing any method described herein).
(116) In other embodiments, these stable nanocrystalline alloys can serve as both the structural and contact surface material, greatly simplifying fabrication and effectively mitigating fabrication-defect related failure (e.g. film delamination). Additionally, microstructural evolution of the structural members of the MEMS switches has been associated with variability over time in the operating performance; for example, the voltage required to close the contact can change over time as a function of increasing total cycles of operation. Avoiding multilayer structures of dissimilar materials by using monolithic devices made of highly stable nanocrystalline alloys should reduce or mitigate variability in device response to input signals.
Example 8
Load-Dependent Friction Behavior of DLC PtAu Tribofilm
(117) Further experiments were conducted to determine the shear strength of the DLC film obtained on the PtAu track. As seen in
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Other embodiments
(158) All publications, patents, and patent applications mentioned in this specification are incorporated herein by reference to the same extent as if each independent publication or patent application was specifically and individually indicated to be incorporated by reference.
(159) While the invention has been described in connection with specific embodiments thereof, it will be understood that it is capable of further modifications and this application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure that come within known or customary practice within the art to which the invention pertains and may be applied to the essential features hereinbefore set forth, and follows in the scope of the claims.
(160) Other embodiments are within the claims.