Circuit board
10932362 ยท 2021-02-23
Assignee
Inventors
- Jong Sik Lee (Seoul, KR)
- Jin A Gu (Seoul, KR)
- Soo Jung Yoon (Seoul, KR)
- Gyung Seok Lee (Seoul, KR)
- Hyun Gu IM (Seoul, KR)
Cpc classification
H01L33/62
ELECTRICITY
C09C1/00
CHEMISTRY; METALLURGY
H05K1/0204
ELECTRICITY
H05K2201/0195
ELECTRICITY
H05K3/4644
ELECTRICITY
H05K2201/0269
ELECTRICITY
C01P2004/54
CHEMISTRY; METALLURGY
C01P2004/24
CHEMISTRY; METALLURGY
H05K1/09
ELECTRICITY
H01L33/647
ELECTRICITY
International classification
H05K1/09
ELECTRICITY
C09C1/00
CHEMISTRY; METALLURGY
Abstract
A circuit board according to an embodiment of the present invention comprises: a first metal layer; an insulating layer disposed on the first metal layer and comprising boron nitride agglomerate particles coated with a resin; and a second metal layer disposed on the insulating layer, wherein: one of both surfaces of the first metal layer, on which the insulating layer is disposed, is in at least partial contact with one surface of the insulating layer; one of both surfaces of the second metal layer, on which the insulating layer is disposed, is in at least partial contact with the other surface of the insulating layer; a plurality of grooves are formed on a surface which is one of both surfaces of at least one of the first metal layer and the second metal layer and which has the insulating layer disposed thereon; at least some of the particles are arranged in at least some of the plurality of grooves; the width (W) of at least one of the plurality of grooves is 1 to 1.8 times D50 of the particles; and a ratio (D/W) of the depth (D) to the width (W) of at least one of the plurality of grooves is 0.2 to 0.3.
Claims
1. A circuit board comprising: a first metal layer; an insulating layer disposed on the first metal layer and including particles in which a boron nitride agglomerate is coated with a resin; and a second metal layer disposed on the insulating layer, wherein at least a portion of one surface of both surfaces of the first metal layer, on which the insulating layer is disposed, is in contact with one surface of the insulating layer, at least a portion of one surface of both surfaces of the second metal layer, on which the insulating layer is disposed, is in contact with the other surface of the insulating layer, a plurality of grooves are formed in the one surfaces of the both surfaces of at least one of the first metal layer and the second metal layer, on which the insulating layer is disposed, at least a portion of each of the particles is disposed in at least a portion of each of the plurality of grooves, a width (W) of at least one of the plurality of grooves is 1 to 1.8 times a D50 of the particles, and a ratio (D/W) of a depth (D) to the width (W) of the at least one of the plurality of grooves ranges from 0.2 to 0.3.
2. The circuit board of claim 1, wherein the at least one of the plurality of grooves includes a wall surface disposed in a direction of the depth (D) and a bottom surface connected to the wall surface.
3. The circuit board of claim 2, wherein the bottom surface has a concave shape.
4. The circuit board of claim 3, wherein the bottom surface is formed such that the depth (D) is gradually increased in a direction from an edge to a center of the width.
5. The circuit board of claim 3, wherein a cross section of the bottom surface has a curved shape.
6. The circuit board of claim 3, wherein the wall surface is provided as a plurality of wall surfaces, and a first wall surface of the plurality of wall surfaces forms a certain angle with respect to a second wall surface adjacent to the first wall surface.
7. The circuit board of claim 6, wherein the wall surface is provided as six wall surfaces.
8. The circuit board of claim 1, wherein the one surfaces of the both surfaces of the first metal layer and the both surfaces of the second metal surface, in which the plurality of grooves are formed, have a honeycomb shape.
9. The circuit board of claim 1, wherein at least one of the first metal layer and the second metal layer includes copper (Cu) and has a circuit pattern.
10. The circuit board of claim 1, wherein the insulating layer is in direct contact with at least one of the first metal layer and the second metal layer.
11. The circuit board of claim 1, wherein a thickness of the insulating layer is 1 to 2 times the D50 of the particles.
12. The circuit board of claim 1, wherein the boron nitride agglomerate includes: an agglomerate in which a plurality of plate-shaped boron nitride compounds agglomerate together; and a coating layer formed on the agglomerate, wherein the coating layer includes a polymer having a monomer below: ##STR00005## wherein one of R.sup.1, R.sup.2, R.sup.3, and R.sup.4 is hydrogen (H), the remainder thereof are each selected from the group consisting of C.sub.1-C.sub.3 alkyl, C.sub.2-C.sub.3 alkene, and C.sub.2-C.sub.3 alkyne, and R.sup.5 is a linear, branched, or cyclic divalent organic linker having one to twelve carbon atoms.
13. The circuit board of claim 12, wherein the insulating layer includes the resin in an amount ranging from 15 vol % to 35 vol % and the boron nitride agglomerate in an amount ranging from 65 vol % to 85 vol %.
14. The circuit board of claim 1, wherein the plurality of grooves are formed in a regular pattern at a certain interval.
15. The circuit board of claim 1, wherein a density of the plurality of grooves formed on the first metal layer differs from a density of the plurality of grooves formed on the second metal layer.
16. The circuit board of claim 1, wherein a pattern of the plurality of grooves formed on the first metal layer differs from a pattern of the plurality of grooves formed on the second metal layer.
17. The circuit board of claim 1, wherein the width (W) of at least one of the plurality of grooves is 1 to 1.4 times a D50 of the particles.
18. The circuit board of claim 1, wherein the width (W) of at least one of the plurality of grooves is greater than 300 m.
19. A circuit board comprising: a first metal layer; an insulating layer disposed on the first metal layer; and a second metal layer disposed on the insulating layer, wherein at least a portion of one surface of both surfaces of the first metal layer, on which the insulating layer is disposed, is in contact with one surface of the insulating layer, wherein at least a portion of one surface of both surfaces of the second metal layer, on which the insulating layer is disposed, is in contact with the other surface of the insulating layer, wherein a plurality of protrusions are formed on at least one of both surfaces of the insulating layer, wherein a plurality of recesses are formed in the one surfaces of the both surfaces of the first metal layer and the both surfaces of the second metal layer, which are in contact with the plurality of protrusions, wherein at least a portion of each of the protrusions is disposed in at least a portion of each of the plurality of recesses, wherein a ratio (D/W) of a depth (D) to a width (W) of at least one of the plurality of recesses ranges from 0.2 to 0.3, wherein the insulating layer includes particles of inorganic filler coated with a resin, and wherein the width (W) of at least one of the plurality of recesses is 1 to 1.8 times a D50 of the particles.
20. The circuit board of claim 19, wherein at least some of the plurality of protrusions are the particles.
Description
DESCRIPTION OF DRAWINGS
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MODES OF THE INVENTION
(16) While the present invention is open to various modifications and alternative embodiments, specific embodiments thereof will be described and shown by way of example in the drawings. However, it should be understood that there is no intention to limit the present invention to the particular embodiments disclosed, and, on the contrary, the present invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention.
(17) It should be understood that, although the terms including ordinal numbers such as first, second, and the like may be used herein to describe various elements, the elements are not limited by the terms. The terms are used only for the purpose of distinguishing one element from another. For example, without departing from the scope of the present invention, a second element could be termed a first element, and similarly a first element could be also termed a second element. The term and/or includes any one or all combinations of a plurality of associated listed items.
(18) It is to be understood that terms used herein are for the purpose of description of particular embodiments and not for limitation. A singular expression includes a plural expression unless the context clearly indicates otherwise. It will be further understood that the terms comprises and/or comprising, when used in this specification, specify the presence of stated features, integers, steps, operations, elements, components, and/or groups thereof but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
(19) Unless defined otherwise, all the terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. It will be further understood that the terms, such as those defined in commonly used dictionaries, should be interpreted as having meanings that are consistent with their meanings in the context of the relevant art and should not be interpreted in an idealized or overly formal sense unless expressly defined otherwise herein.
(20) It will be understood that when an element such as a layer, film, region, or substrate is referred to as being on another element, it can be directly on another element or intervening elements may also be present. In contrast, when an element is referred to as being directly on another element, there are no intervening elements present.
(21) Hereinafter, embodiments will be described in detail with reference to the accompanying drawings, and the same or corresponding elements will be given the same reference numbers regardless of drawing symbols, and redundant descriptions will be omitted.
(22)
(23) Referring to
(24) A plurality of protrusions 122 are formed on both surfaces of the insulating layer 120. A plurality of recesses 112 are formed in a surface of both surfaces of the first metal layer 110 on which the insulating layer 120 is disposed. A plurality of recesses 132 are formed in a surface of both surfaces of the second metal layer 130 on which the insulating layer 120 is disposed. In the present specification, the recess may be used interchangeably with a groove.
(25) At least portions of each of the plurality of protrusions 122 formed in the insulating layer 120 may be disposed in at least a portion of each of the plurality of recesses 112 formed in the first metal layer 110 and in at least a portion of each of the plurality of recesses 132 formed in the second metal layer 130.
(26) Here, the insulating layer 120 may include particles in which an inorganic filler is coated with a resin. In this case, the inorganic filler may include a boron nitride agglomerate, and the boron nitride agglomerate may be an agglomerate in which a plurality of plate-shaped boron nitride compounds agglomerate together, and the resin may be an epoxy resin.
(27) The particle may have a spherical shape having a diameter ranging from 20 m to 400 m. At least some of the particles may protrude from a surface of the cured insulating layer 120 to form protrusions.
(28) According to the embodiments of the present invention, the recesses 112 and 132 are preformed in one surface of the first metal layer 110 and one surface of the second metal layer 130 to accommodate the protrusions of the insulating layer 120. To this end, the shape and size of the recesses 112 and 132 formed in one surface of the first metal layer 110 and one surface of the second metal layer 130 may correspond to the shape of the protrusion 122.
(29) As described above, when the protrusions 122 of the insulating layer 120, that is, the particles, are accommodated in the recesses 112 and 132 preformed in the first metal layer 110 and the second metal layer 130, the first metal layer 110 and the second metal layer 130 may be in direct contact with the particles included in the insulating layer 120 to increase contact areas between the insulating layer 120 and the first and second metal layers 110 and 130. Accordingly, the circuit board 100 may have high heat conductivity. In addition, since grooves for accommodating the protrusions 122 of the insulating layer 120 are preformed in the first metal layer 110 and the second metal layer 130, in a pressing process for bonding the first metal layer 110, the insulating layer 120, and the second metal layer 130, it is possible to inhibit the first metal layer 110 and the second metal layer 130 from being torn, it is possible to inhibit the boron nitride agglomerate from being broken, and it is possible to minimize stepped portions being formed on the surfaces of the first metal layer 110 and the second metal layer 130 due to the protrusions of the insulating layer 120.
(30) In this case, a thickness of the insulating layer 120 may be 1 to 2 times and preferably 1 to 1.8 times a D50 of the particle. D50 may means a particle diameter corresponding to a weight percentage of 50%, that is, a particle diameter corresponding to 50% of passed mass percentage in a particle size distribution curve and may refer to an average particle diameter.
(31) When the thickness of the insulating layer 120 is less than one times of the D50 of the particle, the insulating layer 120 may not be formed to be thick enough to accommodate the particles, and thus, the particles may not be uniformly distributed. When the thickness of the insulating layer 120 exceeds twice the D50 of the particle, an amount of the particles protruding from the surface of the insulating layer 120 is reduced. Thus, contact areas between the insulating layer 120 and the first and second metal layers 110 and 130 may be reduced to lower heat conductivity.
(32) In order to manufacture such a substrate, referring to
(33) According to the embodiments of the present invention, the plurality of recesses 112 formed in the first metal layer 110 and the plurality of recesses 132 formed in the second metal layer 130 may have preformed to have certain patterns.
(34)
(35) Referring to
(36) For example, referring to
(37) Alternatively, referring to
(38) Alternatively, referring to
(39)
(40) Referring to
(41)
(42) Referring to
(43) Even in the embodiment of
(44)
(45) Referring to
(46) Referring to
(47) Referring to
(48) When the bottom surface 910 of the recess 112 or 132 has a concave shape, the recess 112 or 132 may stably accommodate a protrusion 122, and contact areas between the protrusion 122 and the recesses 112 and 132 may be widened, thereby increasing heat conductivity.
(49) Meanwhile, according to the embodiments of the present invention, the width W of the recesses 112 and 132 may range from 1 to 1.8 times, preferably range from 1 to 1.4 times, and more preferably range from 1 to 1.2 times a D50 of a particle. A ratio D/W of the depth D to the width W of the recesses 112 and 132 may range from 0.2 to 0.3 and preferably range from 0.2 to 0.25. When the width W of the recesses 112 and 132 is less than one times of the D50 of the particle, the protrusion 122 of the insulating layer 120 may not be easily disposed in the recesses 112 and 132. Thus, due to the recesses 112 and 132, rather, pores may be formed, and heat conductivity may be lowered. When the width W of the recesses 112 and 132 exceeds 1.8 times a D50 of an inorganic filler, one or more particles may be disposed to be recessed in the recesses 112 and 132. When a recess in which one particle is accommodated and a recess in which one or more particles are accommodated are non-uniformly disposed, a measured thermal conductivity deviation may appear to be great, which may affect reliability of a product.
(50) As described above, the insulating layer 120 according to the embodiments of the present invention includes particles in which an inorganic filler is coated with a resin. Here, the resin may include an epoxy compound and a curing agent. In this case, the curing agent may be included at 1 to 10 parts by volume with respect to 10 parts by volume of the epoxy compound. In the present specification, an epoxy compound may be used interchangeably with an epoxy-based resin.
(51) Here, the epoxy compound may include at least one selected from among a crystalline epoxy compound, an amorphous epoxy compound, and a silicon epoxy compound.
(52) The crystalline epoxy compound may include a mesogen structure. A mesogen is a basic unit of a liquid crystal and includes a rigid structure.
(53) The amorphous epoxy compound may be a conventional amorphous epoxy compound having two or more epoxy groups in a molecule, for example, a glycidyl ether compound derived from bisphenol A or bisphenol F.
(54) Here, the curing agent may include at least one selected from among an amine-based curing agent, a phenol-based curing agent, an acid anhydride-based curing agent, a polymercaptan-based curing agent, a polyaminoamide-based curing agent, an isocyanate-based curing agent, and a block isocyanate-based curing agent and may use a mixture of two or more curing agents.
(55) The inorganic filler may include boron nitride agglomerates in which a plurality of plate-shaped boron nitride compounds agglomerate together.
(56) That is, Monomer 1 is as follows.
(57) ##STR00002##
(58) Here, one of R.sup.1, R.sup.2, R.sup.3, and R.sup.4 may be hydrogen (H), the remainder thereof may each be selected from the group consisting of C.sub.1-C.sub.3 alkyl, C.sub.2-C.sub.3 alkene, and C.sub.2-C.sub.3 alkyne, and R.sup.5 may be a linear, branched, or cyclic divalent organic linker having one to twelve carbon atoms.
(59) In one embodiment, among R.sup.1, R.sup.2, R.sup.3, and R.sup.4, one of the remainder excluding H may be selected from C.sub.2-C.sub.3 alkene, and another one and still another one of the remainder may be selected from C.sub.1-C.sub.3 alkyl. For example, the polymer according to the embodiments of the present invention may include Monomer 2 below.
(60) ##STR00003##
(61) Alternatively, among R.sup.1, R.sup.2, R.sup.3, and R.sup.4, the remainder excluding H may be differently selected from the group consisting of C.sub.1-C.sub.3 alkyl, C.sub.2-C.sub.3 alkene, and C.sub.2-C.sub.3 alkyne.
(62) As described above, when the polymer according to the embodiments of the present invention is applied on agglomerates, in which plate-shaped boron nitride compounds agglomerate together, and fills at least some of pores in the agglomerate, an air layer in the agglomerate may be minimized to increase heat conductivity performance of the agglomerate, and a bonding force between the boron nitride compounds may be increased to inhibit the agglomerate from being broken. When a coating layer is formed on the agglomerates in which the plate-shaped boron nitride compounds agglomerate together, the formation of a functional group may be facilitated. When the functional group is formed on the coating layer of the agglomerate, an affinity with a resin may be increased.
(63) In this case, the polymer according to the embodiments of the present invention may be formed from a reaction between polysilazane (PSZ) of Formula 1 and aminosilane.
(64) ##STR00004##
(65) Here, one of R.sup.1, R.sup.2, R.sup.3, and R.sup.4 is H, the remainder thereof are selected from the group consisting of C.sub.1-C.sub.3 alkyl, C.sub.2-C.sub.3 alkene, and C.sub.2-C.sub.3 alkyne, and n is an positive integer.
(66) In this case, among R.sup.1, R.sup.2, R.sup.3, and R.sup.4, the remainder excluding H may be selected from the group consisting of C.sub.1-C.sub.3 alkyl, C.sub.2-C.sub.3 alkene, and C.sub.2-C.sub.3 alkyne.
(67) In one embodiment, among R.sup.1, R.sup.2, R.sup.3, and R.sup.4, one of the remainder excluding H may be selected from C.sub.2-C.sub.3 alkene, and another one and still another one of the remainder may be selected from C.sub.1-C.sub.3 alkyl. For example, among R.sup.1, R.sup.2, R.sup.3, and R.sup.4, one of the remainder excluding H may be CHCH.sub.2, and another one and still another one of the remainder may be CH.sub.3.
(68) In this case, a thickness of the coating layer 84 formed on the boron nitride agglomerate 80 may range from 1 m to 2 m. When the thickness of the coating layer is less than 1 m, an amino group may not be sufficiently formed on the coating layer, and thus, peel strength may be lowered. When the thickness of the coating layer exceeds 2 m, the boron nitride agglomerates may agglomerate together, and thus, heat conductivity may be lowered.
(69) Here, an insulating layer according to the embodiments of the present invention may include a resin in an amount ranging from 15 vol % to 35 vol % and preferably in an amount ranging from 20 vol % to 30 vol % and an inorganic filler in an amount ranging from 65 vol % to 85 vol % and preferably in an amount ranging from 70 vol % to 80 vol %. When the resin and the inorganic filler are included in such numerical ranges, a resin composition having excellent heat conductivity and stability at room temperature may be obtained. In particular, when the inorganic filler including the boron nitride agglomerate according to one embodiment of the present invention is included in an amount exceeding 85 vol %, a content of the resin may be relatively reduced, and thus, fine pores may be formed between particles. Accordingly, rather, heat conductivity may be lowered, and peel strength and flexural strength may be lowered. In addition, when the inorganic filler including the boron nitride agglomerate according to one embodiment of the present invention is included in an amount less than 65 vol %, heat conductivity may be lowered.
(70) Meanwhile, a substrate according to embodiments of the present invention may be applied to a light-emitting element as well as a printed circuit board.
(71)
(72) Referring to
(73) Hereinafter, the present invention will be described in more detail using Examples and Comparative Examples.
Examples 1-1 to 1-3
(74) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %. The insulating layer in a particle state, in which a D50 is 300 m, was stacked at a thickness of 500 m.
(75) In Examples 1-1 and 1-2, each recess was formed to have a hexagonal shape as in a structure shown in
Comparative Examples 1-1 to 1-4
(76) In Comparative Example 1-1, an insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a recess is not formed, a 0.3 mm thick second copper layer in which a recess is not formed was stacked on the insulating layer, and then, heating and pressing were performed thereon.
(77) In Comparative Examples 1-2 to 1-8, an insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %. The insulating layer in a particle state, in which a D50 is 300 m, was stacked at a thickness of 500 m.
(78) In Comparative Example 1-2, each recess was formed to have a hexagonal shape as in a structure shown in
(79) Table 1 shows a width W, a depth D, thermal conductivity, and a heat conductivity deviation of the recesses of Examples 1-1 to 1-3, and Table 2 shows a width W, a depth D, thermal conductivity, and a heat conductivity deviation of the recesses of Comparative Examples 1-1 to 1-8.
(80) TABLE-US-00001 TABLE 1 Dimension Heat Heat Experiment Depth Width Pitch conductivity conductivity number Shape (D: m) (W: m) (P: m) D/W (W/mK) deviation Example Hexagonal 70 310 35 0.23 52.7 1.0 1-1 shape Example Hexagonal 130 520 5 0.25 53.1 2.8 1-2 shape Example Circular 70 310 35 0.23 48.7 2.5 1-3 shape
(81) TABLE-US-00002 TABLE 2 Dimension Heat Heat Experiment Depth Width Pitch conductivity conductivity number Shape (D: m) (W: m) (P: m) D/W (W/mK) deviation Comparative 35.8 3.1 Example 1-1 Comparative Hexagonal 30 207 55 0.15 39.6 1.1 Example 1-2 shape Comparative Rhombic 30 650 160 0.05 47.6 3.4 Example 1-3 shape Comparative Rhombic 60 700 170 0.09 45.6 3.7 Example 1-4 shape Comparative Circular 20 85 50 0.23 24.8 2.5 Example 1-5 shape Comparative Circular 60 180 16 0.33 37.3 2.6 Example 1-6 shape Comparative Circular 50 120 34 0.41 34.8 2.2 Example 1-7 shape Comparative Dot shape 33.5 310 36.3 4.1 Example 1-8
(82) Referring to Tables 1 and 2, it can be seen that Examples 1-1 to 1-3 satisfying conditions in which a recess is formed in a metal layer, a width of the recess is 1 to 1.8 times a D50 of a particle, and a ratio of a depth to a width of the recess ranges from 0.2 to 0.3 have high heat conductivity as compared with Comparative Example 1-1 in which a recess is not formed and Comparative Examples 1-2 to 1-8 in which a recess is formed but which do not satisfy conditions in which a width of the recess is 1 to 1.8 times a D50 of a particle and a ratio of a depth to a width of the recess ranges from 0.2 to 0.3.
(83) In addition, referring to Tables 1 and 2 and
(84) In addition, referring to Table 1 and
Examples 2-1 to 2-3
(85) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, was stacked at a thickness of 500 m. As in Example 1-1, each recess was formed to have a hexagonal shape as in a structure shown in
(86) In Example 2-1, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %. In Example 2-2, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 35 vol %, and a boron nitride agglomerate in an amount of 65 vol %. In Example 2-3, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 15 vol %, and a boron nitride agglomerate in an amount of 85 vol %.
Comparative Examples 2-1 and 2-2
(87) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, was stacked at a thickness of 500 m. As in Example 1-1, each recess was formed to have a hexagonal shape as in a structure shown in
(88) In Comparative Example 2-1, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 45 vol %, and a boron nitride agglomerate in an amount of 55 vol %. In Comparative Example 2-2, the insulating layer included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 5 vol %, and a boron nitride agglomerate in an amount of 95 vol %.
Comparative Examples 2-3 to 2-7
(89) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a recess is not formed, a 0.3 mm thick second copper layer in which a recess is not formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, was stacked at a thickness of 500 m.
(90) The insulating layer included an epoxy resin including a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8 and a boron nitride agglomerate. In Comparative Example 2-3, the insulating layer included a resin in an amount of 45 vol % and a boron nitride agglomerate in an amount of 55 vol %. In Comparative Example 2-4, the insulating layer included a resin in an amount of 35 vol % and a boron nitride agglomerate in an amount of 65 vol %. In Comparative Example 2-5, the insulating layer included a resin in an amount of 25 vol % and a boron nitride agglomerate in an amount of 75 vol %. In Comparative Example 2-6, the insulating layer included a resin in an amount of 15 vol % and a boron nitride agglomerate in an amount of 85 vol %. In Comparative Example 2-7, the insulating layer included a resin in an amount of 5 vol % and a boron nitride agglomerate in an amount of 95 vol %.
(91) Table 3 shows results of measuring heat conductivity and bond strength of substrates manufactured according to Examples 2-1 to 2-3, and Table 4 shows results of measuring heat conductivity and bond strength of substrates manufactured according to Comparative Examples 2-1 to 2-7.
(92) TABLE-US-00003 TABLE 3 Heat conductivity Experiment number (W/mK) Bond strength (N) Example 2-1 52.7 49.3 Example 2-2 43.9 55.4 Example 2-3 55.4 37.4
(93) TABLE-US-00004 TABLE 4 Heat conductivity Experiment number (W/mK) Bond strength (N) Comparative Example 2-1 32.1 82.6 Comparative Example 2-2 78.6 12.1 Comparative Example 2-3 17.3 47.4 Comparative Example 2-4 29.9 31.9 Comparative Example 2-5 35.8 26.5 Comparative Example 2-6 40.3 19.1 Comparative Example 2-7 43.2 Unmeasurable
(94) Referring to Tables 3 and 4, it can be seen that when a metal layer, in which a recess is formed, is used, heat conductivity and bond strength are high throughout all composition ratios as compared with when a metal layer, in which a recess is not formed, is used.
(95) In addition, referring to Examples 2-1 to 2-3 and Comparative Examples 2-1 and 2-2, when a resin is included in an amount ranging from 15 vol % to 35 vol % and a boron nitride agglomerate is included in an amount ranging from 65 vol % to 85 vol %, it is possible to concurrently satisfy a condition in which heat conductivity is 40 W/mk or more and a condition in which bond strength is 35 N or more. In particular, as in Example 2-1, when a resin is included in an amount ranging from 20 vol % to 30 vol % and a boron nitride agglomerate is included in an amount ranging from 70 vol % to 80 vol %, it is possible to concurrently satisfy a condition in which heat conductivity is 50 W/mK or more and a condition in which bond strength is 40 N or more.
Examples 3-1 to 3-3
(96) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %. As in Example 1-1, each recess was formed to have a hexagonal shape as in a structure shown in
(97) In Example 3-1, an insulating layer was formed to have a thickness of 310 in Example 3-2, an insulating layer was formed to have a thickness of 500 and in Example 3-3, an insulating layer was formed to have a thickness of 600 m.
Comparative Examples 3-1 and 3-2
(98) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a plurality of recesses are formed, a 0.3 mm thick second copper layer in which a plurality of recesses are formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %. As in Example 1-1, each recess was formed to have a hexagonal shape as in a structure shown in
(99) In Comparative Example 3-1, an insulating layer was formed to have a thickness of 280 m, and in Comparative Example 3-2, an insulating layer was formed to have a thickness of 800 m.
Comparative Examples 3-3 to 3-7
(100) An insulating layer in a particle state was stacked on a 0.3 mm thick first copper layer in which a recess is not formed, a 0.3 mm thick second copper layer in which a recess is not formed was stacked on the insulating layer, and then, heating and pressing were performed thereon. In this case, the insulating layer in a particle state, in which a D50 is 300 m, included an epoxy resin, which includes a bisphenol A epoxy compound and diaminodiphenyl sulfone in an equivalence ratio of 1:0.8, in an amount of 25 vol %, and a boron nitride agglomerate in an amount of 75 vol %.
(101) In Comparative Example 3-3, an insulating layer was formed to have a thickness of 280 In Comparative Example 3-4, an insulating layer was formed to have a thickness of 350 m. In Comparative Example 3-5, an insulating layer was formed to have a thickness of 500 m. In Comparative Example 3-6, an insulating layer was formed to have a thickness of 600 m. In Comparative Example 3-7, an insulating layer was formed to have a thickness of 800 m.
(102) Table 5 shows results of measuring heat conductivity of substrates manufactured according to Examples 3-1 to 3-3, and Table 6 shows results of measuring heat conductivity of substrates manufactured according to Comparative Examples 3-1 to 3-7
(103) TABLE-US-00005 TABLE 5 Experiment number Heat conductivity (W/mK) Example 3-1 54.6 Example 3-2 52.7 Example 3-3 50.3
(104) TABLE-US-00006 TABLE 6 Experiment number Heat conductivity (W/mK) Comparative Example 3-1 35.2 Comparative Example 3-2 45.4 Comparative Example 3-3 18.7 Comparative Example 3-4 41.2 Comparative Example 3-5 35.8 Comparative Example 3-6 30.6 Comparative Example 3-7 22.9
(105) Referring to Tables 5 and 6, it can be seen that when a metal layer, in which a recess is formed, is used, heat conductivity is high throughout all thicknesses as compared with when a metal layer, in which a recess is not formed, is used.
(106) In addition, referring to Examples 3-1 to 3-3 and Comparative Examples 3-1 and 3-2, it can be seen that when a thickness of an insulating layer is 1 to 2 times a D50 of a particle, a thermal conductivity is 50 W/mK or more.
(107) Although the present invention has been described with reference to the exemplary embodiments of the present invention, those of ordinary skill in the art should understand that the present invention may be modified and changed in various ways within a scope that does not depart from the spirit and area of the present invention described in the claims below.
DESCRIPTIONS OF REFERENCE NUMERALS
(108) 100: substrate 110: first metal layer 120: insulating layer 130: second metal layer 112, 132: recess