Deterministic frequency tuning of quantum dots in photonic crystal membranes using micro-laser processing

Abstract

Emission frequency of quantum dots in a photonic crystal membrane can be tuned by laser light treatment. For example, a focused laser can heat InAs quantum dots embedded within a <200 nm photonic crystal GaAs membrane. At temperatures above about 600 C., indium atoms from the quantum dots and gallium atoms from the membrane interdiffuse, alloying the quantum dots with the surrounding membrane. This causes the quantum dots to become more gallium rich, which shifts the emission to higher frequencies.

Claims

1. A method of tuning quantum dot emission frequency, comprising: providing a plurality of quantum dots embedded in a photonic crystal membrane; conducting laser light treatment by directing laser light at one or more of the quantum dots, thereby causing a permanent shift in an emission frequency of the one or more quantum dots; and measuring the emission frequency of the one or more quantum dots following the laser light treatment and optionally conducting laser light treatment again.

2. The method of claim 1, wherein the quantum dots comprise InAs and the membrane comprises GaAs.

3. The method of claim 1, wherein the shift is of greater than 5 meV.

4. The method of claim 1, wherein the photonic membrane comprises a thermal bottleneck structure configured to regulate thermal diffusion.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 illustrates a distribution of emission energies of quantum dots.

(2) FIG. 2 shows an exemplary photonic crystal membrane diode with embedded quantum dots and a corresponding emission spectrum.

(3) FIG. 3 illustrates an example of laser annealing to tune individual quantum dots. Local laser heating causes an interdiffusion of gallium and indium atoms, changing individual quantum dot band gaps.

(4) FIGS. 4A and 4B are enlarged and labeled views, respectively, of a scanning electron microscope image of a photonic crystal membrane with embedded InAs quantum dots and thermal bottlenecks to enable low annealing laser powers. This structure contains cavities and a waveguide, ingredients for on-chip photonic networks.

(5) FIG. 5A shows an example of the tuning of the emissions from three QDs to the same frequency. FIG. 5B shows the tuning of the emission frequency of a quantum dot in a photonic crystal waveguide. X0: neutral exciton and X-, X2-, X3-: single, double, and triple charge states.

DETAILED DESCRIPTION

(6) Definitions

(7) Before describing the present invention in detail, it is to be understood that the terminology used in the specification is for the purpose of describing particular embodiments, and is not necessarily intended to be limiting. Although many methods, structures and materials similar, modified, or equivalent to those described herein can be used in the practice of the present invention without undue experimentation, the preferred methods, structures and materials are described herein. In describing and claiming the present invention, the following terminology will be used in accordance with the definitions set out below.

(8) As used herein, the singular forms a, an, and the do not preclude plural referents, unless the content clearly dictates otherwise.

(9) As used herein, the term and/or includes any and all combinations of one or more of the associated listed items.

(10) As used herein, the term about when used in conjunction with a stated numerical value or range denotes somewhat more or somewhat less than the stated value or range, to within a range of 10% of that stated.

(11) Overview

(12) Described herein is a device and technique that can be used to permanently change individual QD emission frequencies within photonic crystal membrane diodes. Micro-laser processing tunes the emission frequency of individual QDs that are embedded in photonic crystal membrane diodes. A laser is focused down to a 1 m spot with a power that is sufficient to raise the temperature of the GaAs membrane to >600 C. The indium atoms in the InAs QDs and the gallium atoms in the GaAs membrane diffuse at these temperatures, which increases the QD bandgap and blue shifts the emission frequency of the QDs. A key feature of this technique is that it can be performed in situ on QDs that are integrated in on-chip photonic network architectures.

(13) It may be desirable to perform the tuning process in a cold environment, such as about 5 to 10 degrees Kelvin. After a period of annealing, the wavelength of the quantum dot emission can be measured and, if necessary to reach a desired result, additional annealing performed on the same quantum dot.

(14) The frequency tuning can be long range (>5 meV) and permanent. The micro-laser processing technique can be performed in situ on QDs embedded in photonic membrane structures that are integrated on-chip to form distributed networks, which reduces fabrication and processing overhead.

(15) The diode structure of the membranes enables controlled charging of the QDs with either electrons or holes, which can be used to create spin qubits. In embodiments, photonic membranes are designed to regulate thermal diffusion which enables controlled micro-laser heating of the environment of the QDs.

EXAMPLES

(16) Proof of concept experiments were performed using self-assembled InAs QDs grown in GaAs photonic crystal membrane diodes. The GaAs photonic crystal membranes were designed to enable temperatures greater than 600 C. at moderate laser powers to mitigate runaway nonlinear processes. This was achieved by confining the heat by incorporating thermal bottlenecks between the photonic crystal membranes and the surrounding substrate. Controlled frequency tuning of QDs was achieved by successive exposures of a heating laser. See FIGS. 4A-5B. This demonstrated the capability of the technique to tune different QDs to the same frequency in different photonic crystal membrane diodes.

(17) A photonic crystal membrane that controls thermal diffusion enables a stable approach to the annealing temperature by increasing the laser power. FIG. 4 shows an exemplary such membrane. This involves creating thermal bottlenecks between the membrane and the surrounding GaAs substrate by introducing gaps between the membrane and substrate. Introducing drain lines in the photonic crystal waveguide/cavity structure is one way to accomplish this bottleneck. After the sample is fabricated, it is mounted in a micro-optics set up, where a laser is focused to a 1 m spot with a power 1-20 mW (spot size and power depend on the membrane size and geometry, as well as the lateral position of the quantum dot within the membrane).

Further Embodiments

(18) Instead of using photonic crystal membranes with defect resonators and waveguides, other architectures such as microdisk resonators connected with bridge waveguides could be used.

(19) While the proof of concept employed InAs/GaAs semiconductors, the technique could be extended to other QD semiconductor systems.

(20) Instead of using this to create on-chip networks of single photon sources for quantum information technologies, the same device and technique can be used for creating classical photonic information processing networks such as a network of quantum dot lasers.

(21) Concluding Remarks

(22) Although the present invention has been described in connection with preferred embodiments thereof, it will be appreciated by those skilled in the art that additions, deletions, modifications, and substitutions not specifically described may be made without departing from the spirit and scope of the invention. Terminology used herein should not be construed as being means-plus-function language unless the term means is expressly used in association therewith.