LOW-NOISE MULTI AXIS MEMS ACCELEROMETER

Abstract

The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.

Claims

1. A two-axis MEMS accelerometer, comprising: a substrate, which defines a substrate plane; a proof mass; and two or more comb capacitors comprising moveable comb electrodes extending from the proof mass and stationary comb electrodes anchored to the substrate; wherein each comb capacitor comprises: a first set of moveable comb teeth that extend away from the proof mass in a first direction along a capacitor axis of the comb capacitor, the capacitor axis being parallel to the substrate plane; a second set of moveable comb teeth that extend away from the proof mass in a second direction, opposite the first direction, along the capacitor axis; a first set of stationary comb teeth opposite to and interdigitated with the first set of moveable comb teeth, wherein the first set of stationary comb teeth extend towards the proof mass in the second direction; and a second set of stationary comb teeth opposite to and interdigitated with the second set of moveable comb teeth, wherein the second set of stationary comb teeth extend towards the proof mass in the first direction; wherein movement of the proof mass in the first direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move closer together and causes the second set of moveable comb teeth and second set of stationary teeth to move further apart, and wherein movement of the proof mass in the second direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move further apart and the second set of moveable comb teeth and second set of stationary teeth to move closer together.

2. The two-axis MEMS accelerometer of claim 1, wherein movement of the proof mass in the first direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move closer together by a first distance and causes the second set of moveable comb teeth and second set of stationary teeth to move further apart by the first distance, and wherein movement of the proof mass in the second direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move further apart by a second distance and the second set of moveable comb teeth and second set of stationary teeth to move closer together by the second distance.

3. The two-axis MEMS accelerometer of claim 1, wherein movement of the accelerometer in a third direction along a transverse axis, parallel to the substrate plane and perpendicular to the capacitor axis, causes both the first moveable comb electrodes and first stationary comb electrodes and the second moveable comb electrodes and second stationary comb electrodes to move further apart, and wherein movement of the accelerometer in a fourth direction, opposite to the third direction, along the transverse axis causes both the first moveable comb electrodes and first stationary comb electrodes and the second moveable comb electrodes and second stationary comb electrodes to move closer together.

4. The two-axis MEMS accelerometer of claim 1, wherein a first comb capacitor of the at least two comb capacitors is configured such that its capacitor axis lies along or parallel to a first axis, which is parallel to the substrate plane, and wherein a second comb capacitor of the at least two comb capacitors is configured such that its capacitor axis lies along or parallel to a second axis, which is parallel to the substrate plane and perpendicular to the first axis.

5. The two-axis MEMS accelerometer of claim 1, wherein the comb capacitors are configured in pairs, and wherein the comb capacitors in each pair are mirror-images of each other reflected about an axis of reflection parallel to and equidistant to the capacitor axes of the pair of comb capacitors.

6. The two-axis MEMS accelerometer of claim 4, comprising four comb capacitors arranged into two pairs, wherein axes of reflection of each pair intersect at the center of the substrate.

7. The two-axis MEMS accelerometer of claim 1, wherein the stationary electrodes are anchored to the substrate at or close to the center of the substrate.

8. The two-axis MEMS accelerometer of claim 1, wherein the proof mass extends around the perimeter of the comb capacitors, such that the comb capacitors are located on the interior of the proof mass.

9. The two-axis MEMS accelerometer of claim 8, wherein the proof mass is connected by springs to a plurality of suspenders, wherein the suspenders are anchored at or close to the center of the substrate.

10. The two-axis MEMS accelerometer of claim 9, wherein the proof mass is connected to the suspenders by four springs, wherein each spring is connected to the proof mass at an interior corner of the proof mass.

11. The two-axis MEMS accelerometer of claim 10, wherein the springs are configured in two pairs, and wherein the springs of each pair of springs are connected at a middle point of the spring.

12. The two-axis MEMS accelerometer of claim 1, wherein the stationary comb electrodes are anchored to the substrate at a plurality of anchor points, and wherein the proof mass comprises a central portion which is located interior to the anchor points.

13. The two-axis MEMS accelerometer of claim 12, wherein the proof mass further comprises arm portions which extend towards the exterior of the MEMS accelerometer from the central portion, wherein the moveable comb electrodes are disposed on the arm portions.

14. The two-axis MEMS accelerometer of claim 13, wherein the proof mass is connected to anchor points on the substrate by a plurality of springs which extend around the outside of the proof mass and comb capacitors.

15. The two-axis MEMS accelerometer of claim 14, wherein each spring comprises an outer portion that extends from an anchor point around the perimeter of the proof mass and comb capacitors to a middle portion, and an inner portion that extends away from the middle portion around the perimeter of the proof mass and comb capacitors towards a connection point on the proof mass, to which the inner portion of the spring is connected.

16. The two-axis MEMS accelerometer of claim 15, wherein the accelerometer comprises two pairs of springs and two spring anchor points located on opposite sides of the proof mass, wherein one spring from each pair extends from each spring anchor point such that the outer portions of the springs extend in opposite directions away from the spring anchor point and such that the middle portions of the springs in each pair are adjacent, wherein the middle portions of each pair of springs are connected.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0031] FIG. 1 is a schematic drawing of a MEMS accelerometer according to a first embodiment of the invention.

[0032] FIG. 2 is a schematic drawing of a MEMS accelerometer according to a second embodiment of the invention.

[0033] FIG. 3 is a schematic drawing of a MEMS accelerometer according to a third embodiment of the invention.

[0034] FIG. 4 is a schematic drawing of a MEMS accelerometer according to a fourth embodiment of the invention.

DETAILED DESCRIPTION

[0035] FIG. 1 shows a schematic drawing of a 2-axis MEMS accelerometer 100 according to the present invention. The view of FIG. 1 is taken through the middle of the structure layer of the MEMS accelerometer 101, i.e. a plane that intersects the structural components of the accelerometer. The structural components are generally formed by subtractive processes (e.g. etching) from a substrate formed from material such as silicon, leaving behind the remaining substrate, which lies below the components depicted in FIG. 1. The components which lie above and separated from the substrate form the structure layer, which is generally arranged in a plane parallel to the plane of the remaining substrate (also referred to as the substrate plane). The substrate is fixed to the accelerometer package, i.e. the surrounding frame and protective elements.

[0036] The structure layer includes a proof mass 101, which extends around the perimeter of the device, i.e. extends around the other components of the MEMS accelerometer 100. The proof mass 101 is coupled via springs 102 and arms 103 to anchor points 104. Anchor points 104 are fixed to the substrate (not shown) which lies below the proof mass 101 and other components shown in FIG. 1. The arms 103 are relatively stiff, compared to springs 102, and thus provide essentially fixed points (i.e. fixed relative to the substrate) to which the springs 102 are connected at one end. The springs 102 permit movement of the proof mass 101 within a plane parallel to the substrate plane, but resist movement of the proof mass 101 in directions perpendicular to the substrate plane, i.e. into or out of the plane of the page in FIG. 1.

[0037] The proof mass 101 also includes comb electrodes 105a-d and 106a-d, which, together with comb electrodes 107a-d and 108a-d form comb capacitors which can be used to measure movement of the proof mass in the X-Y plane. Electrodes 107a-d and 108a-d are connected by rigid structures to further anchor points, which, like anchor points 104, are fixed to the substrate. As the proof mass 101 moves in the X-Y plane relative to the substrate, i.e. when the MEMS accelerometer experiences acceleration, the distance between the teeth of the comb electrodes in each comb capacitor changes in response and according to the acceleration. The capacitance of the comb capacitors, which is related to the distance between the comb teeth, therefore changes as the proof mass 101 moves relative to the substrate. By measuring the change in capacitance, the acceleration can be measured.

[0038] Using a single proof mass for both sense axes provides significantly improves noise performance. The extent to which the proof mass moves under acceleration is proportional to the force exerted on the proof mass, and is thus proportional to both the inertial mass of the proof mass and the acceleration. Thus, the larger the mass, the bigger the force and the larger the deflection of the proof mass under acceleration for a given stiffness of spring 102. A larger deflection leads to a larger change in capacitance which is more easily measure and provides more robust noise performance by both improving the signal to noise ratio in the electronics of the MEMS accelerometer. Furthermore, a higher mass reduces the effect of thermal noise, whereby movement of the proof mass is caused by factors other than the external acceleration of the MEMS accelerometer, such as gas pressure inside the accelerometer package. Increasing the size of the proof mass (and thus increasing its inertial mass) thereby significantly improves the noise performance of the MEMS accelerometer by simultaneously diminishing the effects of both of these sources of noise.

[0039] However, using a single proof mass for both sense axes results in the proof mass being free to move along both sense axes X and Y, depicted in FIG. 1. The capacitance of conventional comb capacitors, which are often used to measure movement of the proof mass in prior art accelerometers, is affected not only by the distance between the teeth of the comb capacitors, but also the extent to which the teeth overlap. Movement of the proof mass along both axes therefore causes changes in the capacitance, which makes it difficult to determine the acceleration along each axis independently. In order to solve this problem, the MEMS accelerometer of the present invention uses a new arrangement of electrodes in each comb capacitor in order to passively eliminate changes in capacitance caused by movement along the non-sense axis.

[0040] In the device of FIG. 1, two comb capacitors for measuring movement of the proof mass 101 along the X axis are shown, along with two comb capacitors for measurement movement of the proof mass 101 along the Y axis (the sense axis of the capacitor, also referred to as the capacitor axis). The first Y axis capacitor is formed from movable electrodes 105a, 105b and stationary electrodes 107a, 107b (stationary as in stationary relative to the substrate). The first moveable electrode 105a includes comb teeth that extend away from the proof mass 101 in a first direction parallel to the substrate plane and perpendicular to the Y-axis (i.e. perpendicular to the sense axis), towards the middle of the accelerometer. The comb teeth of a second moveable electrode 105b extend from a symmetrically opposite side of proof mass 101 in a second direction, opposite to the first direction, towards the middle of the accelerometer. The first stationary electrode 107a and second stationary electrode 107b extend from a rigid structure formed that is located between the moveable electrodes 105a, 105b. The first stationary electrode's 107a comb teeth extend towards the first moveable electrode 105a and are interdigitated with the comb teeth of the first moveable electrode 105a. The second stationary electrode's 107b comb teeth extend towards the second moveable electrode 105b and are interdigitated with the comb teeth of the second moveable electrode 105b. The two sets of electrodes 105a, 107a and 105b, 107b form a single capacitor that has mirror symmetry between electrodes.

[0041] This arrangement of electrodes means that movement of proof mass 101 in the first direction (i.e. towards the right of the page, as shown in FIG. 1) causes the first moveable electrode 105a and first stationary electrode 107a to move closer together in the direction parallel to the comb fingers, and causes the second moveable electrode and second stationary electrode to move further apart by the same amount. Thus, the increase in capacitance of the electrode pair 105a, 107a caused by the increased area of overlap between the electrodes offset by an equal decrease in capacitance of the electrode pair 105b, 107b caused by the decreased area of overlap between those electrodes. Similarly, movement of the proof mass in the second direction (i.e. to the left of the page, as shown in FIG. 1) causes the area of overlap between the first moveable electrode 105a and first stationary moveable electrode 107a to decrease and causes the area of overlap between the second moveable electrode 105a and second stationary electrode 107b to move increase by the same amount. The increase or decrease in capacitance caused by any change in the area of overlap between the first pair of electrodes 105a, 107a is therefore always offset by an equal decrease or increase in capacitance caused by the equal and opposite change in overlap between the second pair of electrodes 105b, 107b. In this way, the accelerometer shown in FIG. 1 passively compensates for cross-axis error, i.e. changes in the capacitance caused by movement perpendicular to the sense axis.

[0042] It will be appreciated that the key principle is the equal and opposite change of area of overlap of the pairs of electrodes that form the capacitor, which is a result of using at least two moveable electrodes with comb teeth extending in opposite directions and at least two corresponding stationary electrodes with comb teeth extending in opposite directions. The precise arrangement of electrodes shown in FIG. 1 (or any other figure) is not essential. For example, the positions of the stationary electrodes 107a, 107b between the moveable electrodes 105a, 105b could be reversed such that the moveable electrodes 105a, 105b are located between the stationary electrodes 107a, 107b instead. The arrangement depicted in FIG. 1 is advantageous because it allows a single anchor point to be used for both stationary electrodes 107a, 107b, which eliminates movement of the stationary electrodes relative to one another due to deformations of the accelerometer, e.g. due to thermal stress or vibrations.

[0043] Opposite to the capacitor formed from electrodes 105a, 105b, 107a and 107b is a second Y-axis sense capacitor formed from electrodes 105c, 105d, 107c and 107d. The second Y axis sense capacitor is formed in the same manner as the first capacitor formed from electrodes 105a, 105b, 107a and 107b; however, the second capacitor is a mirror image of the first capacitor about the X-axis, such that as the comb teeth of the first capacitor move closer together due to movement along the Y-axis, the comb teeth of the second capacitor move further apart and vice versa. This enables differential capacitive measurements to be used to determine the extent of the movement of the proof mass 101 and therefore determine the external acceleration.

[0044] Furthermore, a first X axis sense capacitor formed from electrodes 106a, 106b, 108a and 108b and a second X axis sense capacitor formed from electrodes 106c, 106d, 108c and 108d are provides in the same manner as described above for the Y axis sense capacitors, but rotated 90 degrees. Consequently, the four capacitors depicted in FIG. 1 allow for movement along the X and Y axes to be sensed independently, while allowing for a single proof mass to be used for both axes in order to improve noise performance.

[0045] Moreover, the arrangement of the stationary electrodes 107a-d and 108a-d shown in FIG. 1 allows for all of the stationary electrodes to be anchored close to the centre of the accelerometer, along with the anchor points connected to springs 102. This common placement of the anchor points at the centre of the MEMS accelerometer minimises relative movement of the electrodes 107a-d and 108a-d and the proof mass 101 due to vibration or thermal deformation, further improving the accuracy of the device.

[0046] FIG. 2 depicts a MEMS accelerometer 200 according to a second embodiment of the invention. The MEMS accelerometer 200 includes many of the same features as the MEMS accelerometer 100, for example the single proof mass 201 extending around the perimeter of the accelerometer and the mirrored cross-axis compensating capacitors are in essentially the same configuration in accelerometer 200 as in accelerometer 100 of FIG. 1. Furthermore, the central anchoring of all elements at anchoring point 204 is also present in the MEMS accelerometer of FIG. 2. However, unlike accelerometer 100, pairs of springs 202a, 202b and 202c, 202d, which connect the proof mass 201 to central anchoring point 204, are coupled together at a central point. Each spring 202a-d extends from a rigid structure connected to central anchor point 204 towards one of the interior corners of the proof mass 201, following a serpentine path which increases the length of the spring, thereby reducing its spring constant and allowing for greater movement of the proof mass 201 under acceleration. Springs 202a and 202b, which join adjacent corners of the proof mass 201 to the central anchor point 204 are coupled together at the mid-portions of the springs, where the springs 202a and 202b are closest together. This coupling reduces the ability of the proof mass to rotate within the X-Y plane. Such rotations may be caused by vibrations or other forces acting upon the proof mass which are not related to the linear acceleration along the sense axes. These rotations cause the electrodes of the sense capacitors to move and therefore cause the capacitance to change in a way that is unrelated to the linear X or Y axis acceleration of the device. Thus, minimising rotation of the proof mass 201 through the coupling of springs 202a, 202b and 202c, 202d further improves the accuracy of the device.

[0047] FIG. 3 depicts a MEMS accelerometer 300 according to a third embodiment of the invention. Like MEMS accelerometer 100 and MEMS accelerometer 200, accelerometer 300 includes a single proof mass 301, which is used to sense acceleration along both X and Y axes. Moveable electrodes attached to the proof mass 301 and stationary electrodes anchored to the substrate form four capacitors which passively eliminate cross-axis error, as in accelerometers 100 and 200. Accelerometer 300 differs in that the proof mass 301 forms a shuttle-like shape which is at least partially disposed in the middle of the accelerometer. From the central portion of the proof mass, four arms extend towards the outer perimeter of the accelerometer. The moveable electrodes which form the sense capacitors extend from these arms. Compared to the proof masses 101, 201 of accelerometers 100 and 200, the moment of inertia of the proof mass 301 is reduced. As a result, there is less mass for an external non-linear (i.e. rotational) acceleration to act upon, resulting in a smaller force to counteract the resistance to rotational motion provided by springs 302. The proof mass 301 is therefore less susceptible to rotational movement, improving accuracy of the accelerometer's measurements of linear acceleration along the X and Y axes.

[0048] Springs 302a-d extend around the outside of the proof mass from two centrally located anchor points. Each spring 302 is made up of an outer portion that extends from a rigid structure connected to the anchor point around to a middle portion, and an inner portion that extends away from the middle portion around the perimeter of the proof mass and comb capacitors towards a connection point on the proof mass, to which the inner portion of the spring is connected. Each pairs of springs 302a, 302b and 302c, 302d is coupled at the middle portion of both springs. Like the springs 202 in accelerometer 200, adjacent springs 302 are coupled in order to further reduce rotation of the proof mass.

[0049] FIG. 4 depicts a fourth embodiment of a MEMS accelerometer 400 according to the present invention. In comparison to the accelerometer 300 of FIG. 3, the accelerometer 400 differs only in that the anchor points for the springs 402a-d are located outside the springs. This arrangement is an alternative configuration to the arrangement shown in FIG. 3 and provides additional space inside the springs for the necessary electrical connections to the various components of the accelerometer.