Control method for multi-phase winding deflection scanning device

Abstract

The present invention discloses a control method for a multi-phase winding deflection scanning device, comprising: defining a rectangular coordinate system where deflection scanning tracks are located; sequentially decomposing the deflection scanning tracks into finite point rectangular coordinate data; translating the rectangular coordinate data into corresponding point resultant exciting current data; decomposing the resultant exciting current data into n-phase winding exciting current data; and translating the n-phase winding exciting current data into corresponding n-phase control instruction electrical signals and outputting same to a drive power supply, amplifying the output electrical signals by the drive power supply and providing same for the multi-phase winding deflection scanning device as exciting current.

Claims

1. A control method for a multi-phase winding deflection scanning device, comprising: step 1: defining a coordinate axis; step 2: discretizing and digitizing a deflection scanning track of the multi-phase winding deflection scanning device (3), obtaining rectangular coordinate data (x, y) of finite scanning points on the deflection scanning track, and saving the data; step 3: translating the rectangular coordinate data (x, y) of the scanning points on the deflection scanning track into resultant exciting current data (I.sub.d, I.sub.q), where I.sub.d represents direct axis component data, and I.sub.q represents quadrature axis component data; step 4: decomposing the resultant exciting current data (I.sub.d, I.sub.q) into n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n according to a definite rule; step 5: generating n-phase control instruction electrical signals I.sub.1*, I.sub.2*, . . . , I.sub.n* according to the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n; and step 6: generating n-phase exciting current according to the n-phase control instruction electrical signals I.sub.1*, I.sub.2*, . . . , I.sub.n*, wherein the multi-phase winding deflection scanning device (3) achieves the function of controlling the deflection scanning track.

2. The control method for a multi-phase winding deflection scanning device according to claim 1, wherein a control system for the multi-phase winding deflection scanning device controls a deflection scanning track of a charged particle beam, the control system for the multi-phase winding deflection scanning device comprising a central controller (1), a drive power supply (2), and a multi-phase winding deflection scanning device (3), wherein the central controller (1) is connected with the drive power supply (2), and the drive power supply (2) is connected with the multi-phase winding deflection scanning device (3); the multi-phase winding deflection scanning device (3) is mounted at the outlet end of a charged particle beam generator (4); a charged particle beam (41) generated by the charged particle beam generator (4) is projected onto a work scanning plane (5) by the deflection scanning device (3), to form the deflection scanning track on the work scanning plane (5); the drive power supply (2) generates n-phase exciting current according to the n-phase control instruction electrical signals I.sub.1*, I.sub.2*, . . . , I.sub.n* transmitted by the central controller (1), so that the multi-phase winding deflection scanning device (3) controls the spot center of the charged particle beam (41) on the work scanning plane (5) to be offset to the rectangular coordinate system (x, y) position.

3. The control method for a multi-phase winding deflection scanning device according to claim 2, wherein the step 1 is specifically implemented as follows: adjusting the position of the deflection scanning device (3), so that the winding of the 1.sup.st phase controls the deflection scanning track of the spot center of the charged particle beam (41) on the work scanning plane (5) to be coincide with the x axis of the rectangular coordinate system and consistent with same in the forward direction, wherein the axis of the winding of the 1.sup.st phase is defined as a direct axis on the cross section of the deflection scanning device (3), when looking additionally distributed n1 phases of winding from the projection on the work scanning plane (5), the n1 phases of winding are defined as the 2.sup.nd, 3.sup.rd, . . . , n.sup.th phases of winding of the deflection scanning device (3) in sequence in the counterclockwise direction of the winding of the 1.sup.st phase; when the resultant exciting current is zero, the position of the spot center of the charged particle beam (41) projected on the work scanning plane (5) is defined as the origin (0, 0) of the rectangular coordinate system on the work scanning plane (5).

4. The control method for a multi-phase winding deflection scanning device according to claim 1, wherein the step 3 is specifically implemented as follows: proportionally converting, by the central controller, the rectangular coordinate data (x, y) of the deflection scanning track point into corresponding point resultant exciting current data (I.sub.d, I.sub.q),
I.sub.d=x
I.sub.q=y(1) where is set as a constant.

5. The control method for a multi-phase winding deflection scanning device according to claim 1, wherein the step 4 is specifically implemented as follows: decomposing, by the central controller (1), the resultant exciting current data (I.sub.d, I.sub.q) obtained in the step 3 into the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n according to the circular scanning track principle or 2n-regular-polygon scanning track principle.

6. The control method for a multi-phase winding deflection scanning device according to claim 1, wherein the step 5 is specifically implemented as follows: inputting, by the central controller (1), the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n obtained in the step 4 into an n-channel D/A converter respectively to convert same into corresponding n-phase control instruction electrical signals I.sub.1*, I.sub.2*, . . . , I.sub.n*, and transmitting the electrical signals to the instruction signal input end of a corresponding n-phase drive circuit in the drive power supply (2) respectively.

7. The control method for a multi-phase winding deflection scanning device according to claim 1, wherein the step 6 is specifically implemented as follows: receiving, by the drive power supply (2), the n-phase control instruction electrical signals I.sub.1*, I.sub.2*, . . . , I.sub.n* and transmitting same to the n-phase drive circuit in the drive power supply (2), linearly amplifying, by the n-phase drive circuit, the electrical signals, and then transmitting same to corresponding phase deflection scanning winding of the multi-phase winding deflection scanning device (3) as the exciting current respectively.

8. The control method for the multi-phase winding deflection scanning device according to claim 5, wherein in the step 4, the specific process of decomposing the resultant exciting current data (I.sub.d, I.sub.q) into the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n according to the circular deflection scanning track principle is as follows: step 411: defining the serial number of phases of the n-phase winding of the multi-phase winding deflection scanning device (3); step 412: according to symmetrical distribution characteristics, acquiring the included angle .sub.k between the axis of each phase of winding on the cross section of the multi-phase winding deflection scanning device (3) and the direct axis, and the exciting current unit space vector e.sup.j.sup.k on the axis of each phase of winding; step 413: according to the rectangular coordinate data (x, y) of the spot center of the charged particle beam (41) offset on the work scanning plane (5), obtaining the required resultant exciting current data (I.sub.d, I.sub.q); step 414: according to the resultant exciting current data (I.sub.d, I.sub.q), obtaining amplitude I of the resultant exciting current space vector {right arrow over (I)} and an included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis; and step 415: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on the circular deflection scanning track which uses the amplitude I of the resultant exciting current space vector {right arrow over (I)} as radius, establishing one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n.

9. The control method for the multi-phase winding deflection scanning device according to claim 5, wherein in the step 4, the specific process of decomposing the resultant exciting current data (I.sub.d, I.sub.q) into the n-phase winding exciting current data I.sub.1, I.sub.2, . . . , I.sub.n according to the 2n-regular-polygon deflection scanning track principle is as follows: step 421: defining the serial number of phases of the n-phase winding of the multi-phase winding deflection scanning device (3); step 422: according to symmetrical distribution characteristics, acquiring the included angle .sub.k between the axis of each phase of winding on the cross section of the multi-phase winding deflection scanning device (3) and the direct axis, and the exciting current unit space vector e.sup.j.sup.k on the axis of each phase of winding; step 423: defining axis number for the axis of each phase of winding in the forward and backward directions, wherein 2n virtual axis numbers are defined for the n-phase winding in total; equally dividing the cross section of the multi-phase winding deflection scanning device (3) into 2n sectors, and defining sector number for each of the sectors; and obtaining a correlation between the sectors and the virtual axes; step 424: according to the rectangular coordinate data (x, y) of the spot center of the charged particle beam (41) offset on the work scanning plane (5), obtaining the required resultant exciting current data (I.sub.d, I.sub.q); step 425: according to the resultant exciting current data (I.sub.d, I.sub.q), obtaining amplitude I of the resultant exciting current space vector {right arrow over (I)}, and an included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis; step 426: according to the included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis, judging that the resultant exciting current space vector {right arrow over (I)} is located in the p.sup.th sector, and further obtaining an included angle between the resultant exciting current space vector {right arrow over (I)} and the bisector of the p.sup.th sector; Step 427: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point of the 2n-regular-polygon deflection scanning track on an edge vector {right arrow over (I)}.sub.p, in the p.sup.th sector, according to the included angle between the resultant exciting current space vector {right arrow over (I)} and the bisector of the p.sup.th sector in which the resultant exciting current space vector is located, obtaining the exciting current components of the resultant exciting current space vector {right arrow over (I)} on the n virtual axes adjacent to the p.sup.th sector in the p.sup.th sector; and step 428: naturalizing the exciting current components on the n virtual axes into corresponding exciting current components on the n-phase winding, thereby establishing one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the n-phase winding exciting current data.

Description

DESCRIPTION OF DRAWINGS

(1) To more clearly describe the technical solution in the embodiments of the present invention or in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be simply presented below. Apparently, the drawings in the following description are merely the embodiments of the present invention, and for those ordinary skilled in the art, other drawings can also be obtained according to the provided drawings without contributing creative labor.

(2) FIG. 1 is a flow chart of a control method for a multi-phase winding deflection scanning device provided by the present invention;

(3) FIG. 2 is a structural schematic diagram of a control system for a multi-phase winding deflection scanning device provided by the present invention;

(4) FIG. 3 is a block diagram showing a step of decomposing phase winding exciting current according to the circular deflection scanning track principle provided by the present invention;

(5) FIG. 4 is a block diagram showing a step of decomposing phase winding exciting current according to the 2n-regular-polygon deflection scanning track principle provided by the present invention;

(6) FIG. 5 is a schematic diagram showing a p.sup.th sector of decomposing phase winding exciting current of odd phase according to the 2n-regular-polygon deflection scanning track principle provided by the present invention;

(7) FIG. 6 is a schematic diagram showing a p.sup.th sector of decomposing phase winding exciting current of even phase according to the 2n-regular-polygon deflection scanning track principle provided by the present invention;

(8) FIG. 7 is a schematic diagram of a sector of a 3-phase winding deflection scanning device in an embodiment provided by the present invention;

(9) FIG. 8 is a schematic diagram of a sector of a 4-phase winding deflection scanning device with in an embodiment provided by the present invention;

(10) FIG. 9 is a schematic diagram of a sector of a 5-phase winding deflection scanning device in an embodiment provided by the present invention;

(11) in FIG. 2: 1Central controller; 2Drive power supply; 3Deflection scanning device; 4Charged particle beam generator; 41Charged particle beam; 5Work scanning plane.

DETAILED DESCRIPTION

(12) The technical solutions in the embodiments of the present invention will be clearly and fully described below in combination with the drawings in the embodiments of the present invention. Apparently, the described embodiments are merely part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those ordinary skilled in the art without contributing creative labor will belong to the protection scope of the present invention.

(13) Embodiments of the present invention disclose a control method for a multi-phase winding deflection scanning device. The resultant magnetomotive force of the deflection scanning device is decomposed into the magnetomotive force components of each phase of winding according to a definite rule, one-to-one correspondence between the resultant exciting current space vector and the component exciting current of each phase is established, and corresponding the exciting current of each phase of winding is formed, controlling the deflection scanning of the charged particle beam.

(14) When the number of phases of winding of the deflection scanning device 3 reaches a certain value, increasing the number of phases is no longer obvious to improving the uniformity of the magnetic field, the larger the number of phases, the more complicated the drive circuit. In engineering, in general, the winding of the general deflection scanning device 3 includes less than 8 phases, and most multi-phase winding structures are 3-phase or 4-phase winding structures. The control steps of embodiments are identical, as shown in FIG. 1, are different in method of evaluating phase exciting current.

Embodiment 1

(15) The included angles between the axes of 3 phases of winding on the cross section of the 3-phase winding deflection scanning device and the direct axis are

(16) $0,\frac{2}{3}\mathrm{and}\frac{4}{3}$
respectively, and the included angle .sub.k between every two axes of all phases of winding is an integer multiple of

(17) $={}_{k+1}-{}_k=\frac{2}{3}.$
It is assumed that the resultant exciting current space vector required for the charged particle beam 41 to offset a certain displacement from the original position (0, 0) is

(18) $\stackrel{.fwdarw.}{I}=I_d+j{I}_q=\stackrel{.fwdarw.}{I}{e}^j={\stackrel{.fwdarw.}{I}}_1+{\stackrel{.fwdarw.}{I}}_2+{\stackrel{.fwdarw.}{I}}_3=I_1{e}^{j0}+I_2{e}^{j\frac{2}{3}}+I_3{e}^{j\frac{4}{3}}.$

(19) The exciting current component of each phase is decomposed according to the circular deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a circular deflection scanning track of which the radius is I, according to equation (2), calculating amplitude I of the resultant exciting current space vector {right arrow over (I)} and calculating the included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis (d axis), according to equation (3), obtaining the exciting current components

(20) $I_1=\frac{2I}{3}\cos ,I_2=\frac{2I}{3}\cos \left(-\frac{2}{3}\right)\mathrm{and}{I}_3=\frac{2I}{3}\cos \left(-\frac{4}{3}\right)$
of the 1.sup.st, 2.sup.nd and 3.sup.rd phases of winding respectively, thereby establishing one one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2 and I.sub.3 of 3 phases of winding of the deflection scanning device 3. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is 1.5L, and the maximum square scanning area is

(21) $\frac{1.5L}{\sqrt{2}}\frac{1.5L}{\sqrt{2}}1.06L1.06L,$
while the maximum circular scanning diameter of the 2-phase winding deflection scanning device is L, and the maximum square scanning area is LL.

(22) The exciting current component of each phase is decomposed according to the 6n-regular polygon deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a certain 6n-regular polygon deflection scanning track. The space resultant exciting current field on the cross section of the deflection scanning device is divided into 6 sectors, each sector occupying

(23) $\frac{}{3}$
angle, as shown in FIG. 7. According to equation (2), equation (5) and equation (7), another one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2, I.sub.3 of 3 phases of winding of the deflection scanning device 3 can be established, see Table 1 for details. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is

(24) 0$\cot \frac{}{6}L=\sqrt{3}L1.73L,$
and the maximum square scanning area is

(25) $\frac{\sqrt{3}L}{\sqrt{2}}\frac{\sqrt{3}L}{\sqrt{2}}1.22L1.22L.$

(26) TABLE-US-00001 TABLE 1 Sector Sector Bisector No. area angle I.sub.1 I.sub.2 I.sub.3 1 $0<\frac{}{3}$ $\frac{}{6}$ $-\frac{}{3}$ $\frac{\sqrt{3}}{3}I\cos$ I sin $-\frac{\sqrt{3}}{3}I\cos$ 2 $\frac{}{3}<\frac{2}{3}$ $\frac{3}{6}$ $-\frac{3}{6}$ I sin 0$\frac{\sqrt{3}}{3}I\cos$ $-\frac{\sqrt{3}}{3}I\cos$ 3 $\frac{2}{3}<$ $\frac{5}{6}$ $-\frac{5}{6}$ $-\frac{\sqrt{3}}{3}I\cos$ $\frac{\sqrt{3}}{3}I\cos$ I sin 4 $<\frac{4}{3}$ $\frac{7}{6}$ $-\frac{7}{6}$ 0$-\frac{\sqrt{3}}{3}I\cos$ I sin $\frac{\sqrt{3}}{3}I\cos$ 5 $\frac{4}{3}<\frac{5}{3}$ $\frac{9}{6}$ $-\frac{9}{6}$ I sin $-\frac{\sqrt{3}}{3}I\cos$ $\frac{\sqrt{3}}{3}I\cos$ 6 $\frac{5}{3}<2$ $\frac{11}{6}$ $-\frac{11}{6}$ 0$\frac{\sqrt{3}}{3}I\cos$ $-\frac{\sqrt{3}}{3}I\cos$ I sin

Embodiment 2

(27) The included angles between the axes of 4 phases of winding on the cross section of the 4-phase winding deflection scanning device and the direct axis are

(28) $0,\frac{}{4},\frac{}{2}\mathrm{and}\frac{3}{4}$
respectively, and the included angle .sub.k between every two axes of all phases of winding is an integer multiple of

(29) $={}_{k+1}-{}_k=\frac{}{4}.$
It is assumed that the resultant exciting current space vector required for the charged particle beam 41 the offset a certain displacement from the original position (0, 0) is

(30) $\stackrel{.fwdarw.}{I}=I_d+j{I}_q=\stackrel{.fwdarw.}{I}{e}^j={\stackrel{.fwdarw.}{I}}_1+{\stackrel{.fwdarw.}{I}}_2+{\stackrel{.fwdarw.}{I}}_3+{\stackrel{.fwdarw.}{I}}_4=I_1{e}^{j0}+I_2{e}^{j\frac{}{4}}+I_3{e}^{j\frac{}{2}}+I_4{e}^{j\frac{3}{4}}.$

(31) The exciting current component of each phase is decomposed according to the circular deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a circular deflection scanning track of which the radius is I, according to equation (2), calculating amplitude I of the resultant exciting current space vector {right arrow over (I)} and calculating the included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis (d axis), according to equation (3), obtaining the exciting current components

(32) $I_1=\frac{I}{2}\cos ,I_2=\frac{I}{2}\cos \left(-\frac{}{4}\right),I_3=\frac{I}{2}\sin \mathrm{and}{I}_2=\frac{I}{2}\sin \left(-\frac{}{4}\right)$
of the 1.sup.st, 2.sup.nd, 3.sup.rd, and 4.sup.th phases of winding respectively, thereby establishing one one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2, I.sub.3 and I.sub.4 of 4 phases of winding of the deflection scanning device 3. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is 2L, and the maximum square scanning area is

(33) $\frac{2L}{\sqrt{2}}\frac{2L}{\sqrt{2}}1.41L1.41L.$

(34) The exciting current component of each phase is decomposed according to the 8n-regular polygon deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a certain 8n-regular polygon deflection scanning track. The space resultant exciting current field on the cross section of the deflection scanning device is divided into 8 sectors, each sector occupying

(35) $\frac{}{4}$
angle, as shown in FIG. 8. According to equation (4), equation (6) and equation (8), another one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2, I.sub.3 and I.sub.4 of 4 phases of winding of the deflection scanning device 3 can be established, see Table 2 for details. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is

(36) $\cot \frac{}{8}L2.41L,$
and the maximum square scanning are is

(37) $\cot \frac{}{8}\frac{L}{\sqrt{2}}\cot \frac{}{8}\frac{L}{\sqrt{2}}1.70L1.70L.$

(38) TABLE-US-00002 TABLE 2 Sector Sector Bisector No. area angle I.sub.1 I.sub.2 I.sub.3 I.sub.4 1 0$-\frac{}{8}<\frac{}{8}$ 0 $I\cos \tan \frac{}{8}$ $I\cos \tan \frac{}{8}$ I sin $-I\cos \tan \frac{}{8}$ 2 $\frac{}{8}<\frac{3}{8}$ $\frac{}{4}$ $-\frac{}{4}$ $I\cos \tan \frac{}{8}$ $I\cos \tan \frac{}{8}$ $I\cos \tan \frac{}{8}$ I sin 3 00$\frac{3}{8}<\frac{5}{8}$ 01$\frac{}{2}$ 02$-\frac{}{2}$ I sin 03$I\cos \tan \frac{}{8}$ 04$I\cos \tan \frac{}{8}$ 05$I\cos \tan \frac{}{8}$ 4 06$\frac{5}{8}<\frac{7}{8}$ 07$\frac{3}{4}$ 08$-\frac{3}{4}$ 09$-I\cos \tan \frac{}{8}$ I sin 0$I\cos \tan \frac{}{8}$ $I\cos \tan \frac{}{8}$ 5 $\frac{7}{8}<\frac{9}{8}$ $-I\cos \tan \frac{}{8}$ $-I\cos \tan \frac{}{8}$ I sin $I\cos \tan \frac{}{8}$ 6 $\frac{9}{8}<\frac{11}{8}$ $\frac{5}{4}$ $-\frac{5}{4}$ $-I\cos \tan \frac{}{8}$ 0$-I\cos \tan \frac{}{8}$ $-I\cos \tan \frac{}{8}$ I sin 7 $\frac{11}{8}<\frac{13}{8}$ $\frac{3}{2}$ $-\frac{3}{2}$ I sin $-I\cos \tan \frac{}{8}$ $-I\cos \tan \frac{}{8}$ $-I\cos \tan \frac{}{8}$ 8 $\frac{13}{8}<\frac{15}{8}$ $\frac{7}{4}$ 0$-\frac{7}{4}$ $I\sin$ I sin $-I\cos \tan \frac{}{8}$ $-I\cos \tan \frac{}{8}$

Embodiment 3

(39) The included angles between the axes of 5 phases of winding on the cross section of the 5-phase winding deflection scanning device and the direct axis are

(40) $0,\frac{2}{5},\frac{4}{5},\frac{6}{5}\mathrm{and}\frac{8}{5}$
respectively, and the included angle .sub.k between every two axes of all phases of winding is an integer multiple of

(41) $={}_{k+1}-{}_k=\frac{2}{5}.$
It is assumed that the resultant exciting current space vector required for the charged particle beam 41 to offset a certain displacement from the original position (0, 0) is

(42) $\stackrel{.fwdarw.}{I}=I_d+{\mathrm{jI}}_q=\stackrel{.fwdarw.}{I}{e}^i={\stackrel{.fwdarw.}{I}}_1+{\stackrel{.fwdarw.}{I}}_2+{\stackrel{.fwdarw.}{I}}_3+{\stackrel{.fwdarw.}{I}}_4+{\stackrel{.fwdarw.}{I}}_5=I_1{e}^{j0}+I_2{e}^{j\frac{2}{5}}+I_3{e}^{j\frac{4}{5}}+I_4{e}^{j\frac{6}{5}}+I_5{e}^{j\frac{8}{5}}.$

(43) The exciting current component of each phase is decomposed according to the circular deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a circular deflection scanning track of which the radius is I, according to equation (2), calculating amplitude I of the resultant exciting current space vector {right arrow over (I)} and calculating the included angle between the resultant exciting current space vector {right arrow over (I)} and the direct axis (d axis), according to equation (3), obtaining the exciting current components

(44) $I_1=\frac{2I}{5}\cos ,I_2=\frac{2I}{5}\cos \left(-\frac{2}{5}\right),I_3=\frac{2I}{5}\cos \left(-\frac{4}{5}\right),I_3=\frac{2I}{5}\cos \left(-\frac{6}{5}\right)\mathrm{and}{I}_5=\frac{2I}{5}\cos \left(-\frac{8}{5}\right)$
of the 1.sup.st, 2.sup.nd, 3.sup.rd, 4.sup.th and 5.sup.th phases of winding respectively, thereby establishing one one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2, I.sub.3, I.sub.4 and I.sub.5 of 5 phases of winding of the deflection scanning device 3. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is 2.5L, and the maximum square scanning area is

(45) $\frac{2.5L}{\sqrt{2}}\frac{2.5L}{\sqrt{2}}1.76L1.76L.$

(46) The exciting current component of each phase is decomposed according to the 10n-regular polygon deflection scanning track principle: taking the end of the resultant exciting current space vector {right arrow over (I)} as one point on a certain 10n-regular polygon deflection scanning track. The space resultant exciting current field on the cross section of the deflection scanning device is divided into 10 sectors, each sector occupying

(47) $\frac{}{5}$
angle, as shown in FIG. 9. According to equation (2), equation (5) and equation (7), another one-to-one correspondence between the resultant exciting current space vector {right arrow over (I)} and the component exciting current I.sub.1, I.sub.2, I.sub.3, I.sub.4 and I.sub.5 of 5 phases of winding of the deflection scanning device 3 can be established, see Table 3 for details. If the length of the phase winding scanning line is L, then the maximum circular scanning diameter is

(48) 0$\cot \frac{}{10}L3.07L,$
and the maximum square scanning area is

(49) $\cot \frac{}{10}\frac{L}{\sqrt{2}}\cot \frac{}{10}\frac{L}{\sqrt{2}}2.17L2.17L.$

(50) TABLE-US-00003 TABLE 3 Sector Sector Bisector No. area angle I.sub.1 I.sub.2 1 $0<\frac{}{5}$ $\frac{}{10}$ $-\frac{}{10}$ $\cos \tan \frac{}{10}$ $I\cos \tan \frac{}{10}$ 2 $\frac{}{5}<\frac{2}{5}$ $\frac{3}{10}$ $-\frac{3}{10}$ 0$I\cos \tan \frac{}{10}$ $I\cos \tan \frac{}{10}$ 3 $\frac{2}{5}<\frac{3}{5}$ $\frac{5}{10}$ $-\frac{5}{10}$ I sin $I\cos \tan \frac{}{10}$ 4 $\frac{3}{5}<\frac{4}{5}$ $\frac{7}{10}$ $-\frac{7}{10}$ $-I\cos \tan \frac{}{10}$ 0$\cos \tan \frac{}{10}$ 5 $\frac{4}{5}<$ $\frac{9}{10}$ $-\frac{9}{10}$ $-I\cos \tan \frac{}{10}$ I sin 6 $<\frac{6}{5}$ $\frac{11}{10}$ $-\frac{11}{10}$ $-I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 7 0$\frac{6}{5}<\frac{7}{5}$ $\frac{13}{10}$ $-\frac{13}{10}$ $-I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 8 $\frac{7}{5}<\frac{8}{5}$ $\frac{15}{10}$ $-\frac{15}{10}$ I sin $-I\cos \tan \frac{}{10}$ 9 $\frac{8}{5}<\frac{9}{5}$ 0$\frac{17}{10}$ $-\frac{17}{10}$ $I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 10 $\frac{9}{5}<2$ $\frac{19}{10}$ $-\frac{19}{10}$ $I\cos \tan \frac{}{10}$ I sin Sector No. I.sub.3 I.sub.4 I.sub.5 1 $-I\cos \tan \frac{}{10}$ $-I\sin$ I sin 2 I sin 0$-I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 3 $I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 4 $\cos \tan \frac{}{10}$ I sin $-I\cos \tan \frac{}{10}$ 5 $I\cos \tan \frac{}{10}$ $I\cos \tan \frac{}{10}$ $-I\cos \tan \frac{}{10}$ 6 00$I\cos \tan \frac{}{10}$ 01$I\cos \tan \frac{}{10}$ I sin 7 I sin 02$I\cos \tan \frac{}{10}$ 03$I\cos \tan \frac{}{10}$ 8 04$-I\cos \tan \frac{}{10}$ 05$I\cos \tan \frac{}{10}$ 06$I\cos \tan \frac{}{10}$ 9 07$-I\cos \tan \frac{}{10}$ I sin 08$I\cos \tan \frac{}{10}$ 10 09$-I\cos \tan \frac{}{10}$ 0$-I\cos \tan \frac{}{10}$ $I\cos \tan \frac{}{10}$

(51) The present invention has the following beneficial effects that:

(52) 1. The phase winding exciting current is decomposed according to the circular deflection scanning track principle, if the amplitude of the resultant exciting current is

(53) $\frac{n}{2}$
times the amplitude of the exciting current of each phase of winding, then the maximum circular scanning diameter of the resultant exciting current space vector is nI.sub.vmax, and the maximum square scanning edge length of the resultant exciting current space vector is

(54) $\frac{\sqrt{2}n}{2}{I}_{\mathrm{vmax}}.$

(55) 2. The phase winding exciting current is decomposed according to the 2n-regular-polygon deflection scanning track principle, if the maximum deflection scanning track of the resultant exciting current space vector is a 2n-regular-polygon with the edge length of 2I.sub.vmax, then the maximum circular scanning diameter of the resultant exciting current space vector is

(56) $2I_{\mathrm{vmax}}\cot \frac{}{2n},$
and the maximum square scanning edge length of the resultant exciting current space vector is

(57) $\sqrt{2}{I}_{\mathrm{vmax}}\cot \frac{}{2n}.$

(58) 3. A bigger scanning circle and square can be obtained by decomposing the phase winding exciting current according to the 2n-regular-polygon deflection scanning track principle than decomposing the phase winding exciting current according to the circular deflection scanning track principle, being beneficial to giving full play to the performance of the multi-phase winding deflection scanning device.

(59) 4. One-to-one correspondence is established between the resultant exciting current space vector and the component exciting current of each phase, which plays a key bridge role for the digital control of the multi-phase winding deflection scanning device, and provides guarantee for accurate correction of astigmatism caused by deflection scanning.

(60) Each embodiment in the description is described in a progressive way. The difference of each embodiment from each other is the focus of explanation. The same and similar parts among all of the embodiments can be referred to each other. For the device disclosed by the embodiments, because the device corresponds to a method disclosed by the embodiments, the device is simply described. Refer to the description of the method part for the related part.

(61) The above description of the disclosed embodiments enables those skilled in the art to realize or use the present invention. Many modifications to these embodiments will be apparent to those skilled in the art. The general principle defined herein can be realized in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principle and novel features disclosed herein.