Capillary sensor tube flow meters and controllers
10908005 ยท 2021-02-02
Assignee
Inventors
Cpc classification
G01F1/6847
PHYSICS
G01F5/005
PHYSICS
International classification
G01F1/684
PHYSICS
G01F15/02
PHYSICS
Abstract
Capillary-type mass flow meters and controllers are described that employ temperature sensor hardware providing boundary conditions as necessary for direct computation of mass flow rate. The approach offers dramatically improved operable range and other potential benefits as compared to known systems.
Claims
1. A thermal mass flow meter or controller apparatus comprising: a flow body including a laminar flow element; a capillary sensor tube received within a compartment, having an inlet at an inlet of the laminar flow element and an outlet at an outlet of the laminar flow element such that pressure drop across the laminar flow element and the sensor tube are equal; at least one self-heated temperature sensor coiled around the capillary tube; at least two additional temperature sensors comprising an upstream additional temperature sensor (T.sub.1) positioned on or adjacent to the sensor tube from adjacent to the at least one self-heated temperature sensor to adjacent to an upstream edge of the compartment and an intermediate additional temperature sensor (T.sub.3) positioned adjacent to an inner wall of the compartment; and a computer processor configured to determine total mass flow rate (q.sub.m, tot) in real time for a metered or controlled gas selectable from a pure gas and a gas mixture, the metered or controlled gas being different than a reference gas used for calibration, using: the pressure drop to link flow through the sensor tube (q.sub.m) to the total mass flow rate, and an output from each temperature sensor, wherein output from at least the T.sub.1 and T.sub.3 sensors define boundary conditions for solving a system of linear equations.
2. The apparatus of claim 1, wherein the T.sub.3 sensor is positioned adjacent to the at least one self-heated sensor.
3. The apparatus of claim 1, having an Extended Range for sensor tube mass flow rate (q.sub.m) calculation of about three times that of a Linear Range.
4. The apparatus of claim 3, wherein the q.sub.m calculation in the Extended Range is up to about 3 E-7 kg/s for air.
5. The apparatus of claim 3, wherein the q.sub.m calculation in the Extended Range is within about +/2% error.
6. The apparatus of claim 5, wherein the q.sub.m calculation in the Extended Range is within about +/1% error.
7. The apparatus of claim 1, wherein the pure gas or gas mixture is selectable from hydrogen, helium, methane, SF.sub.6, argon and air.
8. The apparatus of claim 1, wherein the computer processor is configured for calculation of the total mass flow rate q.sub.m,tot with flow calibration data for air or nitrogen only.
9. The apparatus of claim 1, further comprising a pressure sensor with a port located adjacent an inlet plenum of the flow body.
10. The apparatus of claim 1, comprising two self-heated temperature sensors.
11. The apparatus of claim 1, further comprising a downstream additional temperature sensor (T.sub.2) positioned on or adjacent to the sensor tube from adjacent to the at least one self-heated temperature sensor to adjacent to a downstream edge of the compartment.
12. The apparatus of claim 11, wherein the computer processor is configured to determine q.sub.m, tot using an output from the T.sub.2 sensor as a second boundary condition for the calculation.
13. The apparatus of claim 11, further comprising a fourth additional temperature sensor (T.sub.4) positioned adjacent to an inner wall of the flow body.
14. The apparatus of claim 13, wherein the computer processor is configured to determine q.sub.m, tot using an output from each temperature sensor.
15. The apparatus of claim 13, wherein the T.sub.4 sensor is positioned adjacent an inlet plenum of the flow body.
16. The apparatus of claim 13, wherein the T.sub.4 sensor comprises an elongate probe inserted into the flow body.
17. The apparatus of claim 16, wherein the T.sub.4 sensor comprises proximal and distal temperature sensor elements T.sub.4 and T.sub.4.
18. The apparatus of claim 1, wherein the microprocessor is configured for the q.sub.m calculation without using a K-factor or a K-function.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The details of the subject matter set forth herein, both as to its structure and operation, may be apparent by study of the accompanying figures, in which like reference numerals refer to like parts. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the subject matter. Moreover, all illustrations are intended to convey concepts, where relative sizes, shapes and other detailed attributes may be illustrated schematically rather than literally or precisely.
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DETAILED DESCRIPTION
(7) Various exemplary embodiments are described below. Reference is made to these examples in a non-limiting sense, as it should be noted that they are provided to illustrate more broadly applicable aspects of the devices, systems and methods. Various changes may be made to these embodiments and equivalents may be substituted without departing from the true spirit and scope of the various embodiments. In addition, many modifications may be made to adapt a particular situation, material, composition of matter, process, process act(s) or step(s) to the objective(s), spirit or scope of the present invention. All such modifications are intended to be within the scope of the claims made herein.
(8) Before the present subject matter is described in detail, it is to be understood that this disclosure is not limited to the particular example embodiments described, as such may, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting, since the scope of the present disclosure will be limited only by the appended claims.
(9) All features, elements, components, functions, and steps described with respect to any embodiment provided herein are intended to be freely combinable and substitutable with those from any other embodiment. If a certain feature, element, component, function, or step is described with respect to only one embodiment, then it should be understood that that feature, element, component, function, or step can be used with every other embodiment described herein unless explicitly stated otherwise. This paragraph therefore serves as antecedent basis and written support for the introduction of claims, at any time, that combine features, elements, components, functions, and steps from different embodiments, or that substitute features, elements, components, functions, and steps from one embodiment with those of another, even if the following description does not explicitly state, in a particular instance, that such combinations or substitutions are possible. Express recitation of every possible combination and substitution is overly burdensome, especially given that the permissibility of each and every such combination and substitution will be readily recognized by those of ordinary skill in the art upon reading this description.
(10) That said,
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(12) In contrast (and as further elaborated upon below), the subject embodiments offer an increased q.sub.mc.sub.p range that is roughly 3-fold from that shown from about 0.0001 to about 0.003 (watt/K). As such, the performance of the subject hardware and associated programming for calculation is literally off the chart.
(13) Such improved range (and rangeability) is achievable in the current approach because the existing reliance on linearity and/or associated multi-gas and/or multi-point calibration is eliminated. Rather, mass flow rate (as summarized above or otherwise) is directly calculated using so-called additional temperature sensors as further described.
(14) In performing the calculations, non-linear aspects of performance are accounted for in the calculations (rather than employed in defining a limited working range as in existing systems). The calculations for such an approach are accomplished by accounting for the energy paths for the system. A mathematical model of the subject system(s) is based on computing the desired quantity of q.sub.m from the first law of thermodynamics (conservation of energy) for the included capillary sensor tube and the gas flowing therein.
(15) The overall model, in connection with the additional non-heated temperature sensors discussed further below, accounts for all (or at least all of the important) paths of heat flow in the system, including the I.sup.2R-type heat input due to current (I) flowing through the self-heated temperature sensor(s) for the sensor tube. Per above, the model may link q.sub.m to q.sub.m, tot by accounting for P.
(16) The model for determining q.sub.m and/or q.sub.m, tot can be generated using differential equations, nodal methods or finite element methods such as Computational Flow Dynamics (CFD) and/or other suitable methods compatible with computing q.sub.m for each associated data point in real time (e.g., within about 2 seconds and more preferably about 1 second or less). The associated computer program may incorporate an accessible library of gas properties facilitating computation of q.sub.m for a variety of different pure gases or gas mixtures.
(17) In one embodiment of the model, a system of linear equations is generated in which T.sub.1 and T.sub.2 temperature sensor measurements (the first two additional sensors discussed below) provide boundary conditions for solving the system of equations using know techniques. Potential advantages (realized as discussed in charts below) of such an approach over known technology may include: increased accuracy of measuring q.sub.m and calculation of q.sub.m,tot for MFMs and/or MFCs; management of (or correction for) change in process gas temperature and pressure; management of (or correction for) changes in external gas (typically, air) temperature; correction of non-linearity of output (increasing both accuracy and the mass flow range of the instrument); correction for imbalance (inequality) for capillary tube inlet and outlet temperatures (e.g., T.sub.1 and T.sub.2) due to heating from an electromagnetic control valve and/or purging in MFCs; reducing the number of data points (thus time and cost) required for flow calibrating an instrument; providing multi-gas function, wherein the instrument can be flow calibrated with a reference, or surrogate, gas (such as air or nitrogen) and be applied to another gas, without need for flow calibrating for the other gas (i.e., eliminating or taking the place, in-effect, of the so-called K-factor or K-function for other gasses, but more accurately); and correction for the difference in gas properties flowing through the bypass and the capillary sensor tube.
(18) Such improvement(s) is/are realized in connection with variously adding temperature sensors (T.sub.1, T.sub.2, T.sub.3 and/or T.sub.4 as discussed below) using RTDs, thermocouples or another temperature sensor type to the architecture of existing capillary-tube thermal MFMs or MFCs.
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(21) So-called dead air in the compartment space provides a stable insulation layer of gas (air) so that the chamber acts as a type of cocoon environment for the capillary sensor tube and its T.sub.up and T.sub.dn sensors. A lower portion (or legs 102a, 102b) of the sensor tube may be secured in a sensor block 110. A tight fit (e.g., by clamping, a press fit, a shrink fit or otherwise) is advantageously provided between these members for good thermally-conductive contact (that may be enhanced by means of heat-conductive epoxy, grease, or other such compound applied in the tube/block interfaces).
(22) Such contact thermally shorts-out conduction resistance of adjacent portions of the sensor tube to that of the sensor block in and around their zones of contact. A T.sub.1 sensor is shown positioned in sensor block 110 adjacent to an upstream (i.e., relative to gas flow) edge 112a that the block defines for compartment 106. A T.sub.2 sensor is positioned in block 110 adjacent to a downstream edge 112b thereof.
(23) Yet, it is possible to locate these temperature sensors otherwise. For example, the T.sub.1 and T.sub.2 sensor positions or locations shown are further along the length of the sensor tube and still provide boundary conditions to the model. These positions may be moved closer still (i.e., up to directly adjacent or nearly touching) the T.sub.up and T.sub.dn sensors, respectively, and allow for an operable system as described.
(24) A third additional temperature sensor (T.sub.3) may be provided in the wall of block 104. Like the other so-called additional temperature sensors T.sub.1, T.sub.2, and/or T.sub.4, the temperature sensor T.sub.3 may be any type ranging from an RTD winding, a thin-film sensor, thermocouple, etc. The T.sub.3 sensor is shown located at or adjacent an inner wall 114 of block 104. Effectively, it measures the air temperature within the cocoon with this placement. However, it may be placed elsewhere, but preferably near (e.g., across from or adjacent) the self-heated sensor(s) as shown.
(25) A fourth temperature sensor (T.sub.4) may be located in flow body block 120 adjacent to or in the region of its inlet plenum 122. As such, it will register the capillary tube inlet 116 (vs. outlet or exit 118) gas temperature, effectively the same as that of the gas in the bypass laminar flow element 124.
(26) Each of the so-called additional sensors can be fit (and optionally potted, such as with heat conductive epoxy) into holes in the respective block (or other ancillary pieces) where they are located.
(27) In any case, the system may include a device housing 130. An on-board microprocessor 132 and memory 134 for storing the subject computer programming may be set within housing 130, as well as a display 136 for various use communication and/or system output.
(28) With the additional temperature sensors shown (i.e., T.sub.1, T.sub.2, T.sub.3 and/or T.sub.4), the microprocessor (or other possible computer implementation as noted below) uses the associated sensor output and flow calibration data with a temperature difference output between the T.sub.dn and T.sub.up sensors to calculate gas q.sub.m and q.sub.m tot. Other approaches are possible as well. In one example T.sub.1, T.sub.2, T.sub.3 and/or T.sub.4 are used with a single self-heated body or sensor with essentially the same boundary-condition and thermodynamics based approach used to calculate mass flow rate.
(29) Results of such calculation may be output in the form of a control signal for a MFC valve, a readout (e.g., shown on display 136) of total mass flow rate, q.sub.m, tot, cumulative total mass flow rate or some other value, indication (e.g., an alarm) or other control signal. Any associated calculation advantageously compensates for changes in gas temperature, gas pressure, and outside (ambient) temperature and gas selection.
(30) Regardless, use of the four additional temperature sensors noted above (i.e., T.sub.1, T.sub.2, T.sub.3 and/or T.sub.4) provides for an extremely complete mathematical model. In this model: T.sub.1 measures the inlet-side temperature of the gas and the capillary sensor tube at a given position, providing a boundary condition for the mathematical model; T.sub.2 measures the exit or outlet-side temperature of the capillary sensor tube at a given location, providing another boundary condition for the model; T.sub.3 measures the temperature of the cocoon wall, affected by ambient temperature (and the self-heated RTD windings), providing information for calculating heat lost by the sensor tube to the outside environment; and T.sub.4 measures the temperature of the gas in the inlet plenum, optionally providing information for correcting for changes in the properties of the gas flowing through the system (e.g., c.sub.p). However, embodiments hereof may use only a selection of these sensors. The reasons for selection will vary, with some set forth below.
(31) At minimum, T.sub.1 is provided. For some uses, the measurement of T.sub.1 may be taken as equivalent to the T.sub.2 boundary condition in the model (e.g., because of overriding heat conduction in block 110 under certain circumstances). Likewise, it may be possible in some cases to define reproducible correlations linking T.sub.2, T.sub.3 and T.sub.4 to T.sub.1 (i.e., T.sub.2=f(T.sub.1), T.sub.3=f(T.sub.1) and T.sub.4=f(T.sub.1)).
(32) Moreover, a useful system might employ T.sub.1 and T.sub.2 with T.sub.up and T.sub.dn. Another embodiment may employ T.sub.1 and T.sub.3 as the additional sensors. Yet another permutation may employ T.sub.1 and T.sub.4. Likewise, T.sub.1 T.sub.3 and T.sub.4 can be used together with T.sub.up and/or T.sub.dn. So too can T.sub.1, T.sub.2 and T.sub.3. Such systems are intended to be covered, even if they do not offer the full range of functionality of systems with all of T.sub.1, T.sub.2, T.sub.3, T.sub.4, T.sub.up and T.sub.dn.
(33) Other sensor hardware options are possible as well.
(34)
EXAMPLES
(35) Using the T.sub.up, T.sub.dn and T.sub.1 though T.sub.4 temperature sensor data and solving the system according to thermodynamic principles of heat transfer (i.e., conduction, convection and radiation), and accounting for gas selection, gas pressure, gas temperatures, other gas properties and the thermal expansion of mechanical parts, data was produced according to the following examples. Per chart 40 in
(36) Recall, however, that other MFMs and MFCs set their operating range allowing up to 3% error. Thus, the subject Extended Range herein is not only larger, but provides greater accuracy. If less accuracy is necessary (e.g., within about +/2% error), then the Extended Range of the subject embodiments may be regarded as significantly greater than a three times (3) improvement over existing systems.
(37) In chart 50,
(38) Computer Hardware
(39) The calculation or processes carried out in connection with the embodiments herein may be implemented or performed with a general purpose processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any combination thereof designed to perform the functions described herein. A general purpose processor may be a microprocessor, but in the alternative, the processor may be any conventional processor, controller, microcontroller, or state machine. The processor can be part of a computer system that also has a user interface port that communicates with a user interface, and which receives commands entered by a user, has at least one memory (e.g., hard drive or other comparable storage, and random access memory) that stores electronic information including a program that operates under control of the processor and with communication via the user interface port, and a video output that produces its output via any kind of video output format, e.g., VGA, DVI, HDMI, DisplayPort, or any other form.
(40) A processor may also be implemented as a combination of computing devices, e.g., a combination of a DSP and a microprocessor, a plurality of microprocessors, one or more microprocessors in conjunction with a DSP core, or any other such configuration. These devices may also be used to select values for devices as described herein. The camera may be a digital camera of any type including those using CMOS, CCD or other digital image capture technology.
(41) The steps of a method or algorithm described in connection with the embodiments disclosed herein may be embodied directly in hardware, in a software module executed by a processor, or in a combination of the two. A software module may reside in Random Access Memory (RAM), flash memory, Read Only Memory (ROM), Electrically Programmable ROM (EPROM), Electrically Erasable Programmable ROM (EEPROM), registers, hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art. An exemplary storage medium is coupled to the processor such that the processor can read information from, and write information to, the storage medium. In the alternative, the storage medium may be integral to the processor. The processor and the storage medium may reside in an ASIC. The ASIC may reside in a user terminal. In the alternative, the processor and the storage medium may reside as discrete components in a user terminal.
(42) In one or more exemplary embodiments, the functions described may be implemented in hardware, software, firmware, or any combination thereof. If implemented in software, the functions may be stored on, transmitted over or resulting analysis/calculation data output as one or more instructions, code or other information on a computer-readable medium. Computer-readable media includes both computer storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a computer. By way of example, and not limitation, such computer-readable media can comprise RAM, ROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, or any other medium that can be used to carry or store desired program code in the form of instructions or data structures and that can be accessed by a computer. The memory storage can also be rotating magnetic hard disk drives, optical disk drives, or flash memory based storage drives or other such solid state, magnetic, or optical storage devices. Also, any connection is properly termed a computer-readable medium. For example, if the software is transmitted from a website, server, or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital subscriber line (DSL), or wireless technologies such as infrared, radio, and microwave, then the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwave are included in the definition of medium. Disk and disc, as used herein, includes compact disc (CD), laser disc, optical disc, digital versatile disc (DVD), floppy disk and Blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers. Combinations of the above should also be included within the scope of computer-readable media.
(43) Operations as described herein can be carried out on or over a website. The website can be operated on a server computer or operated locally, e.g., by being downloaded to the client computer, or operated via a server farm. The website can be accessed over a mobile phone or a PDA, or on any other client. The website can use HTML code in any form, e.g., MHTML, or XML, and via any form such as cascading style sheets (CSS) or other.
(44) The computers described herein may be any kind of computer, either general purpose, or some specific purpose computer such as a workstation. The programs may be written in C, or Java, Brew or any other programming language. The programs may be resident on a storage medium, e.g., magnetic or optical, e.g. the computer hard drive, a removable disk or media such as a memory stick or SD media, or other removable medium. The programs may also be run over a network, for example, with a server or other machine sending signals to the local machine, which allows the local machine to carry out the operations described herein.
(45) Variations
(46) The subject methods, including methods of use and/or manufacture, may be carried out in any order of the events which is logically possible, as well as any recited order of events. Furthermore, where a range of values is provided, it is understood that every intervening value, between the upper and lower limit of that range and any other stated or intervening value in the stated range is encompassed within the invention. Also, it is contemplated that any optional feature of the inventive variations described may be set forth and claimed independently, or in combination with any one or more of the features described herein.
(47) Though the invention has been described in reference to several examples, optionally incorporating various features, the invention is not to be limited to that which is described or indicated as contemplated with respect to each variation of the invention. Various changes may be made to the invention described and equivalents (whether recited herein or not included for the sake of some brevity) may be substituted without departing from the true spirit and scope of the invention.
(48) Reference to a singular item includes the possibility that there are a plurality of the same items present. More specifically, as used herein and in the appended claims, the singular forms a, an, said, and the include plural referents unless specifically stated otherwise. In other words, use of the articles allow for at least one of the subject item in the description above as well as the claims below. It is further noted that the claims may be drafted to exclude any optional element. As such, this statement is intended to serve as antecedent basis for use of such exclusive terminology as solely, only and the like in connection with the recitation of claim elements, or use of a negative limitation.
(49) Without the use of such exclusive terminology, the term comprising in the claims shall allow for the inclusion of any additional elementirrespective of whether a given number of elements are enumerated in the claim, or the addition of a feature could be regarded as transforming the nature of an element set forth in the claims. Except as specifically defined herein, all technical and scientific terms used herein are to be given as broad a commonly understood meaning as possible while maintaining claim validity. Accordingly, the breadth of the different inventive embodiments or aspects described herein is not to be limited to the examples provided and/or the subject specification, but rather only by the scope of the issued claim language.