Transparent rare earth aluminum garnet ceramics

11053166 ยท 2021-07-06

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Abstract

Provided is a transparent rare earth aluminum garnet ceramic that has a highlight transmission rate and can be mass produced. The transparent rare earth aluminum garnet ceramic is represented by general formula R.sub.3Al.sub.5O.sub.12 (R is an element selected from the group consisting of rare earth elements having an atomic number of 65 to 71) and includes Si and Y as sintering aids, or is represented by general formula R.sub.3Al.sub.5O.sub.12 (R is an element selected from the group consisting of rare earth elements having an atomic number of 65 to 70) and includes Si and Lu as sintering aids.

Claims

1. A transparent rare earth aluminum garnet ceramic represented by molecular formula R.sub.3Al.sub.5O.sub.12 wherein R is an element selected from the group consisting of rare earth elements having an atomic number of 65 to 70, and wherein the transparent rare earth aluminum garnet ceramic comprises at least two sintering aids comprising Si and Lu, and wherein the transparent rare earth aluminum garnet ceramic contains 5 ppm by mass to 250 ppm by mass of Si in terms of metal and 20 ppm by mass to 600 ppm by mass of Lu in terms of metal.

Description

DESCRIPTION OF EMBODIMENTS

(1) Preferred embodiments of the present invention will now be described on the basis of specific examples, but various modifications and changes may be made without departing from the technical scope of the present invention, and it goes without saying that the present invention is not limited to the following examples.

EXAMPLES

Example 1

(2) (Preparation of Material)

(3) Terbium oxide having a purity of 99.9% or more was dissolved in nitric acid to prepare a terbium nitrate solution having a concentration of 1 mol/L. Aluminum chloride having a purity of 99.9% or more was dissolved in ultrapure water to prepare an aluminum chloride solution having a concentration of 1 mol/L. Next, 300 mL (milliliters) of the above terbium nitrate solution, 500 mL of the above aluminum chloride solution, and 150 mL of an aqueous ammonium sulfate solution having a concentration of 1 mol/L were mixed, and ultrapure water was further added to give a total volume of 10 L of the mixed liquid. While the obtained mixed liquid was stirred, an aqueous ammonium hydrogen carbonate solution having a concentration of 0.5 mol/L was added dropwise at a rate of 5 mL/min until the pH reached 8.0, and the whole was allowed to stand under stirring at room temperature for 2 days. After the 2-day standing, suction filtration and washing with ultrapure water were repeated several times, and the product was placed in a dryer at 150 C. and dried for 2 days. The resulting precursor powder was placed in an alumina crucible and was calcined in an electric furnace at 1,200 C. for 3 hours. Through the above procedure, a terbium aluminum garnet (TAG) material powder (purity: 99.9% by mass or more) having a specific surface area of 6.0 m.sup.2/g was prepared.

(4) (Molding and Sintering)

(5) To 75 g of the prepared TAG material powder, 50 g of ethanol as a solvent, 0.75 g of polyvinyl alcohol (PVA) as a binder, 0.75 g of polyethylene glycol (PEG) as a plasticizer, and 0.375 g of stearic acid as a lubricant were added. Next, SiO.sub.2 and Y.sub.2O.sub.3 as sintering aids were added to the TAG material powder so as to give a Si content of 100 ppm by mass and a Y content of 200 ppm by mass relative to the sintered compact in terms of metal, giving a mixed material. The mixed material was further mixed with a nylon pot and nylon balls by a ball mill for 100 hours, giving a mixed powder. The mixed powder was spray dried by a spray dryer, giving dried spherical granules. The dried spherical granules were placed in a mold with a diameter of 5 mm, then was subjected to primary molding at a pressure of 20 MPa, and was molded by cold isostatic pressing (CIP) at a pressure of 125 MPa, giving a molded article having a relative density of 59.8% determined by the Archimedes method. The molded article was heated to 600 C. at a temperature increase rate of 10 C./h and was maintained at 600 C. for 20 hours to remove the solvent, the plasticizer, and the lubricant. In order to sufficiently remove the solvent and the like, the molded article was further heated to 1, 100 C. and was maintained at 1, 100 C. for 10 hours. Next, the molded article was burned in a vacuum furnace at a burning temperature of 1,600 C. for 8 hours, and then was cooled to room temperature, giving a transparent rare earth aluminum garnet ceramic (Tb.sub.3Al.sub.5O.sub.12, having a solid cylindrical shape with a diameter of 3 mm and a length of 25 mm). The vacuum in the vacuum furnace was 10.sup.1 Pa, the temperature increase rate during the burning was 300 C./h, and the temperature drop rate was 300 C./h.

(6) (Measurement of Extinction Ratio and Scattering Coefficient)

(7) Both end faces of the ceramic were mirror polished with a diamond slurry (without an anti-reflective coating layer). When the transparent rare earth aluminum garnet ceramic of the present invention is, for example, used as a Faraday rotator for an optical isolator, an anti-reflective coating is preferably provided. The extinction ratios and the scattering coefficients of the ceramic having a solid cylindrical shape with a diameter of 3 mm and a length of 20 mm prepared as above were determined at a wavelength of 1,064 nm (YAG laser) and a wavelength of 633 nm (HeNe laser). In the measurement of the extinction ratio, a polarizer was placed on each side of the ceramic, then the transmitted light amount was measured without application of a magnetic field, next one polarizer was rotated 90 degrees, and the extinction ratio was calculated from the ratio of a maximum value and a minimum value of the transmitted light amount.

(8) (Calculation of Scattering Coefficient and Extinction Ratio)

(9) The scattering coefficient was calculated by expression (1), and the extinction ratio was calculated by expression (3). For all the samples, the measurement methods and the calculation methods of the scattering coefficient and the extinction ratio are the same.
Scattering coefficient=[(theoretical transmission rate of TAG)((W.sub.2/W.sub.1)100)]/sample length (cm)(1)

(10) W.sub.1: laser intensity value without ceramic in optical path

(11) W.sub.2: laser intensity value with ceramic placed in optical path
Theoretical transmission rate of TAG=[((R1).sup.2/(R+1).sup.2)1].sup.2100(2)
(at a wavelength of 1,064 nm, the refractive index R is 1.844, and the theoretical transmission rate of TAG is 83.2%)
(at a wavelength of 633 nm, the refractive index R is 1.863, and the theoretical transmission rate of TAG is 82.7%)
Extinction ratio=10log.sub.10(W.sub.4/W.sub.3)(3)

(12) W.sub.3: the minimum value of laser intensity during rotation of polarizer with ceramic in optical path

(13) W.sub.4: the maximum value of laser intensity during rotation of polarizer with ceramic placed in optical path

Examples 2 to 13 and Comparative Example 1

(14) The same procedure as in Example 1 was performed except that the contents of Si and Y relative to the sintered compact in terms of metal were changed, giving transparent rare earth aluminum garnet ceramics of Examples 2 to 13 and Comparative Example 1. The contents (ppm by mass) of Si and Y, the extinction ratios, and the scattering coefficients of the ceramics of Examples 1 to 13 and Comparative Example 1 are shown in Table 1.

(15) TABLE-US-00001 TABLE 1 Content Extinction ratio (dB) Scattering coefficient (%/cm) (ppm by Measurement Measurement Measurement Measurement Sample mass) wavelength wavelength wavelength wavelength No. Si Y 633 nm 1064 nm 633 nm 1064 nm Remarks 1 2 50 26 28 0.7 0.5 Example 2 2 5 50 31 31 0.4 0.3 Example 3 3 50 50 32 33 0.4 0.2 Example 4 4 100 10 27 30 0.9 0.3 Example 5 5 100 20 31 32 0.3 0.2 Example 6 6 100 50 33 34 0.3 0.2 Example 7 7 100 100 34 34 0.3 0.2 Example 8 8 100 200 35 35 0.3 0.2 Example 1 9 100 500 32 32 0.3 0.2 Example 9 10 100 600 30 31 0.4 0.3 Example 10 11 100 750 27 29 0.9 0.5 Example 11 12 250 50 33 35 0.3 0.2 Example 12 13 500 50 24 26 0.8 0.7 Example 13 14 100 0 26 30 0.9 0.3 Comparative Example 1

(16) As shown in Table 1, in Comparative Example 1 where the ceramic did not contain Y, the extinction ratio was 30 dB or less, and the scattering coefficient was not small. In Example 2 having a Si content of 2 ppm by mass, Example 5 having a Y content of 10 ppm, Example 11 having a Y content of 750 ppm, and Example 13 having a Si content of 500 ppm by mass, the extinction ratio was 30 dB or less, and the scattering coefficient was not small. Based on Table 1, when having a Si content of 5 ppm by mass to 250 ppm by mass and a Y content of 20 ppm by mass to 600 ppm by mass, the ceramic can achieve an extinction ratio of 30 dB or more and a scattering coefficient of 0.4%/cm or less at wavelengths 633 nm and 1,064 nm.

Examples 14 to 19

(17) The same procedure as in Example 1 was performed except that the element Tb was replaced with Dy, Ho, Er, Tm, Yb, or Lu, giving transparent rare earth element aluminum garnet ceramics of Examples 14 to 19. The extinction ratios and the scattering coefficients of the ceramics of Examples 14 to 19 are shown in Table 2. When a specific absorption was observed at a wavelength 633 nm or 1,064 nm, the extinction ratio and the scattering coefficient were not measured.

(18) TABLE-US-00002 TABLE 2 Extinction ratio (dB) Scattering coefficient (%/cm) Measurement Measurement Measurement Measurement Sample wavelength wavelength wavelength wavelength No. Ceramic 633 nm 1064 nm 633 nm 1064 nm Remarks 15 Dy.sub.3Al.sub.5O.sub.12 35 0.3 Example 14 16 Ho.sub.3Al.sub.5O.sub.12 35 0.2 Example 15 17 Er.sub.3Al.sub.5O.sub.12 35 0.2 Example 16 18 Tm.sub.3Al.sub.5O.sub.12 35 35 0.3 0.2 Example 17 19 Yb.sub.3Al.sub.5O.sub.12 35 0.3 Example 18 20 Lu.sub.3Al.sub.5O.sub.12 35 35 0.3 0.2 Example 19

(19) As shown in Table 2, Tm.sub.3Al.sub.5O.sub.12 of Example 17 and Lu.sub.3Al.sub.5O.sub.12 of Example 19 achieve an extinction ratio of 35 dB and a scattering coefficient of 0.3%/cm or less at wavelengths of 633 nm and 1,064 nm.

Examples 20 to 25

(20) The same procedure as in Example 1 was performed except that the pressure at the time of molding by CIP was changed to alter the relative density of the molded article by the Archimedes method, giving transparent rare earth aluminum garnet ceramics of Examples 20 to 25. The molding pressures by CIP, the relative densities, the extinction ratios, and the scattering coefficients of the ceramics of Examples 20 to 25 are shown in Table 3.

(21) TABLE-US-00003 TABLE 3 Extinction ratio (dB) Scattering coefficient (%/cm) Molding Relative Measurement Measurement Measurement Measurement Sample pressure density wavelength wavelength wavelength wavelength No. (MPa) (%) 633 nm 1064 nm 633 nm 1064 nm Remarks 21 30 48.3 24 25 2.0 1.5 Example 20 22 50 50.7 25 27 1.2 1.1 Example 21 23 85 53.9 28 29 1.0 0.8 Example 22 24 100 55.3 34 34 0.4 0.3 Example 23 25 130 60.5 35 35 0.3 0.2 Example 24 26 150 63.2 35 35 0.3 0.2 Example 25

(22) As shown in Table 3, in Examples 20, 21, and 22 having a relative density of 48.3 to 53.9(%), the extinction ratio was 29 dB or less, and the scattering coefficient was not small. In contrast, in Examples 23, 24, and 25 having a relative density of 55.3 to 63.2(%), the extinction ratio was 34 dB or more, and the scattering coefficient was 0.4%/cm or less at wavelengths of 633 nm and 1,064 nm.

Examples 26 to 35

(23) The same procedure as in Example 1 was performed except that the burning temperature and the burning time were changed, giving transparent rare earth aluminum garnet ceramics of Examples 26 to 35. The burning temperatures, the burning times, the average crystal grain sizes, the extinction ratios, and the scattering coefficients of the ceramics of Examples 26 to 35 are shown in Table 4. The burning time is the holding time at a burning temperature. No dense ceramic was obtained at a burning temperature of 1,300 C., and thus the extinction ratio and the scattering coefficient were not measured. The average crystal grain sizes in Table 4 are numerical values calculated by the expression described in paragraph 0011.

(24) TABLE-US-00004 TABLE 4 Average Extinction ratio Scattering coefficient crystal (dB) (%/cm) Burning Burning grain Measurement Measurement Measurement Measurement Sample temperature time size wavelength wavelength wavelength wavelength No. ( C.) (h) (m) 633 nm 1064 nm 633 nm 1064 nm Remarks 27 1300 8 0.4 Example 26 28 1400 8 0.6 18 21 5.0 3.5 Example 27 29 1500 8 0.8 32 30 0.4 0.4 Example 28 30 1600 0.2 0.6 23 25 2.2 1.6 Example 29 31 1600 0.5 1.2 30 30 0.4 0.4 Example 30 32 1600 1 2.0 31 31 0.4 0.4 Example 31 33 1600 5 7.2 33 35 0.4 0.3 Example 32 34 1650 8 15 35 35 0.3 0.2 Example 33 35 1700 8 30 34 35 0.3 0.2 Example 34 36 1750 8 35 27 29 1.0 0.8 Example 35

(25) As shown in Table 4, in Example 27 in which the burning temperature was 1,400 C., Example 29 in which the burning time was 0.2 hour at 1,600 C., and Example 35 in which the burning temperature was 1,750 C., the extinction ratio was 29 dB or less, and the scattering coefficient was not small. In contrast, in Examples 28 and 30 to 34 in which the burning temperature was 1,500 to 1,700 C. and the burning time was 0.5 to 8 hours, the extinction ratio was 30 dB or more, and the scattering coefficient was 0.4%/cm or less at wavelengths 633 nm and 1,064 nm.

Examples 36 to 48

(26) The same procedure as in Example 1 was performed except that hot isostatic pressing (HIP) was performed after the burning step, giving transparent rare earth aluminum garnet ceramics of Examples 36 to 48. The temperatures and the pressures by HIP, the extinction ratios, and the scattering coefficients of the ceramics of Examples 36 to 48 are shown in Table 5. The treatment time of HIP was 3 hours.

(27) TABLE-US-00005 TABLE 5 Scattering coefficient Extinction ratio (dB) (%/cm) Measurement Measurement Measurement Measurement Sample Temperature Pressure wavelength wavelength wavelength wavelength No. ( C.) (MPa) 633 nm 1064 nm 633 nm 1064 nm Remarks 37 1250 196 35 35 0.3 0.2 Example 36 38 1350 100 38 38 0.2 0.1 Example 37 39 1350 150 38 38 0.2 0.1 Example 38 40 1450 100 40 41 0.2 0.1 Example 39 41 1450 150 41 42 0.2 0.1 Example 40 42 1550 100 43 44 0.2 0.1 Example 41 43 1550 150 44 45 0.1 0.1 Example 42 44 1600 40 35 35 0.3 0.2 Example 43 45 1650 100 45 47 0.1 0.1 Example 44 46 1650 150 46 48 0.1 0.1 Example 45 47 1700 100 44 46 0.2 0.1 Example 46 48 1700 150 42 43 0.2 0.1 Example 47 49 1750 100 25 28 0.8 0.6 Example 48

(28) As shown in Table 5, by HIP at a temperature of 1,250 to 1,700 C. at a pressure of 40 to 196 MPa for 3 hours (Examples 36 to 47), an extinction ratio of 35 dB or more and a scattering coefficient of 0.3%/cm or less at wavelengths 633 nm and 1,064 nm can be achieved. However, when HIP was performed at an excessively high temperature of 1,750 C. (Example 48), the extinction ratio was 28 dB or less, and the scattering coefficient was not small.

Examples 49 to 57 and Comparative Example 2

(29) The same procedure as in Example 1 was performed except that the contents of Si and Lu relative to the sintered compact in terms of metal were changed, giving transparent rare earth aluminum garnet ceramics of Examples 49 to 57 and Comparative Example 2. The contents (ppm by mass) of Si and Lu, the extinction ratios, and the scattering coefficients of the ceramics of Examples 49 to 57 and Comparative Example 2 are shown in Table 6.

(30) TABLE-US-00006 TABLE 6 Content Extinction ratio (dB) Scattering coefficient (%/cm) (ppm by Measurement Measurement Measurement Measurement Sample mass) wavelength wavelength wavelength wavelength No. Si Lu 633 nm 1,064 nm 633 nm 1,064 nm Remarks 50 2 50 25 27 0.9 0.6 Example 49 51 5 50 30 30 0.4 0.3 Example 50 52 100 10 28 30 0.9 0.4 Example 51 53 100 20 30 31 0.4 0.3 Example 52 54 100 100 34 34 0.3 0.2 Example 53 55 100 600 30 31 0.4 0.3 Example 54 56 100 750 27 28 0.9 0.4 Example 55 57 250 50 32 34 0.3 0.2 Example 56 58 500 50 25 27 0.9 0.6 Example 57 59 100 0 26 29 0.9 0.4 Comparative Example 2

(31) As shown in Table 6, in Comparative Example 2 where the ceramic did not contain Lu, the extinction ratio was 29 dB or less, and the scattering coefficient was not small. In Example 49 having a Si content of 2 ppm by mass, Example 51 having a Lu content of 10 ppm, Example 55 having a Lu content of 750 ppm, and Example 57 having a Si content of 500 ppm by mass, the extinction ratio was 30 dB or less, and the scattering coefficient was not small. Based on Table 1, when having a Si content of 5 ppm by mass to 250 ppm by mass and a Lu content of 20 ppm by mass to 600 ppm by mass, the ceramics can achieve an extinction ratio of 30 dB or more and a scattering coefficient of 0.4%/cm or less at wavelengths 633 nm and 1,064 nm.

INDUSTRIAL APPLICABILITY

(32) The transparent rare earth aluminum garnet ceramic of the present invention can be used as a Faraday rotator for an optical isolator.