Spray device and spray nozzle body

Abstract

The present invention relates to a spray of microjets emanating at an inclined angle from nozzles comprised in a substantially planar membrane layer. A spray nozzle unit for spraying a plurality of fluidic microjets from a pressurized liquid comprises a substantially planar (semiconductor) support having an upstream surface and a downstream surface, and a spray membrane layer arranged on the downstream surface of the support. The spray membrane layer comprises a plurality of nozzle orifices each configured for spraying a fluidic microjet in a Rayleigh regime. Thee support defines a cavity extending from the upstream surface to the spray membrane layer. The cavity is in fluid communication with each one of the nozzle orifices for supplying the pressurized liquid to the nozzle orifices. A position of the nozzle orifices, seen along a direction perpendicular to the downstream surface, is offset in respect of a centre of the cavity. At least two of the nozzle orifices exhibit a different offset in respect of the centre of the cavity.

Claims

1. A spray device, for spraying a liquid microjet spray, comprising a spray nozzle unit, said spray nozzle unit comprising at least one spray nozzle having a chamber for receiving a pressurized liquid therein and having a perforated nozzle wall for releasing a microjet spray of said liquid, wherein said spray nozzle is formed by a nozzle body, comprising a support body with a cavity that opens at a main surface of said support body, said support body being covered by a membrane layer at said main surface and said membrane layer being provided with at least one nozzle orifice throughout a thickness of said membrane layer at an area of said cavity to form a nozzle membrane that is in liquid communication with said cavity wherein said at least one nozzle orifice comprises at least one deflecting nozzle orifice, releasing said microjet under a deflected angle along a jet line that is directed away from an imaginary transverse center line of said deflecting nozzle orifice, and wherein said deflecting nozzle orifice is in open communication with a liquid flow channel that has a lateral asymmetrical flow profile in terms of a liquid flow resistance from said cavity towards said nozzle orifice.

2. The spray device according to claim 1, wherein said deflecting nozzle orifice has a diameter that is larger than twice a thickness of the membrane.

3. The spray according to claim 1, wherein said nozzle membrane comprises a central region at the area of said cavity and a peripheral region between said central region and an edge of said cavity, and wherein said deflecting nozzle orifice is located within said peripheral region.

4. The spray device according to claim 1, wherein said deflecting nozzle orifice is positioned adjacent to a peripheral wall of said cavity at a distance between a center of said deflecting nozzle orifice and said peripheral wall that is less than three times a diameter of said deflecting nozzle orifice.

5. The spray device according to claim 1, wherein said deflecting nozzle orifice has a diameter larger than 10% of a diameter of said cavity.

6. The spray device according to claim 1, wherein said cavity is configured to impose a lateral impulse on said liquid in said liquid flow channel that is conveyed to the liquid while forming the microjet.

7. The spray device according to claim 6, wherein said cavity comprises at least one lateral extension at said main surface that is shallower than said cavity, said membrane comprising said deflecting nozzle orifice at the area of said extension.

8. The spray device according to claim 7, wherein said extension has a width between 0.3 and 3 times a diameter of said deflecting nozzle orifice and a length between 0.5 and 5 times a diameter of said deflecting nozzle orifice.

9. The spray device according to claim 7, wherein said extension has a depth that is between 0.3 to 3 times a diameter of said deflecting nozzle orifice.

10. The spray device according to claim 7, wherein said support body has been etched to form said at least one lateral extension of said cavity.

11. The spray device according to claim 7, wherein said deflecting nozzle orifice comprises a plurality of angularly distributed deflecting nozzle orifices, wherein said at least one lateral extension of said cavity comprises a ring-shaped extension along a periphery of said cavity, and wherein said ring-shaped extension is in liquid communication with said plurality of angularly distributed deflecting nozzle orifices.

12. The spray device according to claim 7, wherein said at least one lateral extension of said cavity comprises a plurality of angularly distributed local extensions of said cavity, each being in liquid communication with at least one deflecting nozzle orifice of said plurality of angularly distributed deflecting nozzle orifices.

13. The spray device according to claim 1, wherein said deflecting orifice has a non-axi symmetrical shape having a wider part and a narrower part, and wherein said wider part of said deflecting nozzle orifice faces away from an edge wall of said cavity.

14. The spray device according to claim 1, comprising at least one liquid barrier that is at least partly positioned in said liquid flow channel towards said nozzle orifice, said at least one barrier being provided asymmetrically with respect to said nozzle orifice.

15. The spray device according to claim 14, wherein said barrier comprises at least one rim that extends from said membrane to inside said flow channel.

16. The spray device according to claim 14, wherein said at least one barrier leaves a gap for liquid passage of between 50 nanometers and 5 micrometers.

17. The spray device according to claim 14, wherein said at least one barrier is provided along a linear, multi-linear or curvilinear contour around said deflecting nozzle orifice, said contour being open at a side of said orifice that is directed to a center of said cavity.

18. The spray device according to claim 1, wherein said cavity is ring-shaped, and wherein said deflecting nozzle orifice comprises groups of orifices that are distributed along an outer periphery of said ring-shaped cavity.

19. The spray device according to claim 1, wherein said spray nozzle is provided with filtration means which comprise a filtration plate that is in liquid communication with said cavity and that is provided onto an upstream surface of said support body.

20. The spray device according to claim 1, wherein said deflecting nozzle orifice has a diameter of between 0.4 and 20 microns.

21. The spray device according to claim 1, wherein air diffusor means are provided downstream of said nozzle, said air diffusor means being configured to reduce a velocity of the liquid microjet that emanates from said nozzle, wherein said air diffusor means are conically or trumpet shaped and comprise at least one air inlet opening.

22. The spray device according to claim 1, wherein the liquid is a cosmetic liquid or a wafer cleaning liquid, wherein said spray nozzle has a microjet divergence angle greater than 10.

23. The spray device according to claim 1, wherein said cavity has a circular or polygonal cross-section at said main surface, and wherein said at least one deflecting nozzle orifice comprises a set of a number of deflecting nozzle orifices that are angularly distributed along at least a part of a peripheral edge of said cavity.

24. The spray device according to claim 23, wherein at least one further set of deflecting spray nozzle orifices is angularly distributed along at least a part of said peripheral edge of said cavity.

25. The spray device according to claim 1, wherein said nozzle membrane is configured to bend during operation from a substantially flat initial state to an at least partly more curved profile under pressure while releasing said microjet spray, and wherein said at least one nozzle orifice is located adjacent to a point of inflection in said more curved profile of said nozzle membrane.

26. The spray device according to claim 25, wherein said nozzle membrane is configured to bend in that said membrane is corrugated, comprising at least one corrugation along a periphery of said cavity.

27. The spray device according to claim 26, wherein said membrane comprises at least two laterally spaced corrugations along the periphery of said cavity, and wherein said deflecting nozzle orifice is positioned in between adjacent corrugations.

28. The spray device according to claim 25, wherein said nozzle membrane is configured to bend in that said membrane is provided with at least one deflecting nozzle orifice that is elongated and allows said membrane to deflect along an edge of said elongated nozzle orifice.

29. The spray device according to claim 1, wherein an exposed surface of said spray nozzle is hydrophobic at least at an area adjacent to said at least one nozzle orifice.

30. The spray device according to claim 1, wherein said support body comprises a plurality of cavities that are distributed at said main surface.

31. The spray device according to claim 1, wherein said support body comprises a semiconductor body.

32. The spray device according to claim 1, wherein said membrane layer comprises a ceramic layer.

33. The spray device according to claim 1, wherein said deflecting nozzle orifice extends partly beyond an edge of said cavity and partly over said cavity.

34. The spray device according to claim 1, further comprising a liquid supply system for supplying a pressurized liquid to said cavity of at least one spray nozzle.

35. The spray device according to claim 16, wherein said at least one barrier surrounds said deflecting nozzle orifice substantially along a semi-circular arc that subscribes an angle of between 120 and 330 degrees around said deflecting nozzle orifice.

36. The spray device according to claim 16, wherein said barrier is spaced from said deflecting nozzle orifice over a distance that is less than 25% a diameter of said deflecting nozzle orifice.

37. The spray device according to claim 1, wherein said at least one nozzle orifice comprises at least one orifice that has a perimeter elevated above the surrounding surface of the membrane that enables jetting.

38. The spray device according to claim 1, wherein said at least one deflecting nozzle orifice comprises at least two deflecting nozzle orifices, releasing said microjet under a deflected angle along a jet line that is directed away from an imaginary transverse center line of the respective orifice, and wherein the jet lines of said at least two deflecting nozzle orifices intersect one another to cause said emanating microjets to collide during operation.

39. The spray device according to claim 38, wherein said membrane comprises at least one third deflecting nozzle orifice, releasing said microjet under a non-deflected angle along a jet line that is directed along an imaginary transverse center line of said third deflecting nozzle orifice, and wherein the jet lines of said at least two nozzle orifices intersect with said jet line of said third deflecting nozzle orifice to cause said emanating microjets to collide during operation.

40. The spray device according to claim 1, wherein micro-valve means are present upstream of said deflecting nozzle orifice, said micro-valve means comprising a micro-valve disc in close proximity of a micro-valve seat, said micro-valve disc resting on said micro-valve seat in a normally closed state and lifting from said seat once an upstream pressure threshold is exceeded to open a liquid passage between said micro-valve disc and said micro-valve seat towards said liquid flow channel.

41. The spray device according to claim 40, wherein said nozzle membrane constitutes one of said micro-valve seat and said micro-valve disc.

42. The spray device according to claim 1, wherein said at least one deflecting nozzle orifice comprises at least two deflecting nozzle orifices, releasing said microjet under a deflected angle along a jet line that is directed away from an imaginary transverse center line of the respective deflecting nozzle orifice, and wherein said at least two deflecting nozzle orifices have a different lateral cross section.

43. The spray device according to claim 42, wherein said at least one deflecting nozzle orifice comprises at least two groups of deflecting nozzle orifices, each one releasing a microjet under a common deflected angle along a jet line that is directed away from an imaginary transverse center line of the respective deflecting nozzle orifice, and wherein the deflecting nozzle orifices within each of said at least two groups of deflecting nozzle orifices feature a common lateral cross section that is distinct from a common lateral cross section of the orifices in the other of said at least two groups of deflecting nozzle orifices.

44. The spray device according to claim 1, wherein said deflecting orifice has a triangular lateral cross-section.

45. The nozzle body as applied in the spray device according to claim 1.

46. The spray device according to claim 5, wherein said deflecting nozzle orifice has a diameter larger than 25% of the diameter of said cavity.

47. The spray device according to claim 13, wherein said deflecting orifice has an oval, tear, moon, V or U shape.

48. The spray device according to claim 31, wherein said support body comprises a silicon body.

49. The spray device according to claim 32, wherein said membrane layer comprises a ceramic layer having a thickness that is less than 2 microns.

50. The spray device according to claim 49, wherein said membrane layer comprises a silicon nitride layer.

51. The spray device according to claim 32, wherein said membrane layer comprises a silicon nitride layer.

52. The spray device according to claim 35, wherein said at least one barrier surrounds said deflecting nozzle orifice substantially along a semi-circular arc that subscribes an angle of between 180 and 260 degrees around said deflecting nozzle orifice.

53. The spray device according to claim 36, wherein said barrier is spaced from said deflecting nozzle orifice over a distance that is less than 10% a diameter of said deflecting nozzle orifice.

54. The spray device according to claim 37, wherein said perimeter has a height between 10% and 50% of a diameter of the nozzle orifice.

55. The spray device according to claim 4, wherein said deflecting nozzle orifice is positioned adjacent to a peripheral wall of said cavity at a distance between a center of said deflecting nozzle orifice and said peripheral wall that is less than a diameter of said deflecting nozzle orifice.

56. The spray device according to claim 1, wherein said deflecting nozzle orifice has a diameter that is larger than four times the thickness of the membrane.

57. The spray device according to claim 23, wherein at least one further set of deflecting nozzle orifices is angularly distributed along at least a part of said peripheral edge of said cavity at a distance from said edge that is between one and three times said diameter of said deflecting nozzle orifice.

58. The spray device according to claim 1, wherein said support body comprises a plurality of cavities that are distributed angularly at said main surface, each one of said cavities being spanned by a nozzle membrane having at least one deflecting nozzle orifice.

59. The spray device according to claim 1, wherein said cavity has a circular or polygonal cross-section at said main surface, and wherein said at least one deflecting nozzle orifice comprises a set of a number of deflecting nozzle orifices that are angularly distributed along at least a part of a peripheral edge of said cavity at a distance from said edge that is less than a diameter of an orifice.

60. A spray device, for spraying a liquid, comprising a spray nozzle unit, said spray nozzle unit comprising at least one spray nozzle having a chamber for receiving a pressurized liquid therein and having a perforated nozzle wall for releasing a microjet spray that is composed of a plurality of microjets of said liquid, wherein said spray nozzle is formed by a nozzle body, comprising a support body with a cavity that opens at a main surface of said support body, said support body being covered by a substantially planar membrane layer at said main surface and said membrane layer being provided with a plurality of nozzle orifices throughout a thickness of said membrane layer at an area of said cavity to form a nozzle membrane that is in liquid communication with said cavity, wherein said nozzle orifices each release a microjet of said plurality of microjets, wherein said plurality of nozzle orifices comprises at least one deflecting nozzle orifice, releasing a respective microjet of said plurality of microjets under a deflected angle along a jet line that is directed away from an imaginary center line of said at least one deflecting nozzle orifice, said center line extending transverse to said substantially planar membrane layer, and wherein said at least one deflecting nozzle orifice is in open communication with a liquid flow channel that has a lateral asymmetrical flow profile in terms of a liquid flow resistance from said cavity towards said nozzle orifice.

Description

DESCRIPTION OF THE DRAWING

(1) FIG. 1 is a perspective view of a spray nozzle unit according to the invention carrying a spray nozzle body in its centre;

(2) FIG. 2 is a cross-section of a first embodiment of a spray nozzle body of a spray nozzle as applied in the spray nozzle unit of FIG. 1;

(3) FIG. 3 shows the dependence between the inclination angle and the distance between the edge wall and the nozzle;

(4) FIG. 4 is an embodiment of a spray nozzle with an array of cavities;

(5) FIG. 5 is an embodiment of a spray nozzle with a nozzle orifice having a direct boundary with an edge wall;

(6) FIG. 6 shows the dependence between the inclination angle and the size of the nozzle orifice;

(7) FIG. 7 represents a fluid simulation of a cylindrical cavity with a round membrane;

(8) FIG. 8 is an embodiment of a spray nozzle with a fluidic channel directly underneath and parallel to the nozzle membrane;

(9) FIG. 9 is a fluid simulation showing a large angle of inclination of the emanating jet;

(10) FIG. 10 is an embodiment in which a width of the lateral fluidic channel is relatively small and comparable to the nozzle orifice diameter;

(11) FIG. 11 is an embodiment having a number of angularly distributed nozzle orifices;

(12) FIG. 12 shows the effect of a possible bending of the nozzle membrane;

(13) FIG. 13 is an embodiment having a nozzle orifice extending over the support body;

(14) FIG. 14 shows a further embodiment of the nozzle according to the invention;

(15) FIG. 15 shows a further embodiment of the nozzle according to the invention;

(16) FIG. 16 shows a further embodiment of the nozzle according to the invention;

(17) FIG. 17 shows a single rectangular protrusion or rim shaped barrier adjacent the nozzle orifice;

(18) FIG. 18 alternative embodiments of the barrier shown in FIG. 17;

(19) FIG. 19 shows a double rectangular protrusion or rim shaped barrier adjacent the nozzle orifice;

(20) FIG. 20 shows a further embodiment of the nozzle according to the invention;

(21) FIG. 21 shows a further embodiment of the nozzle according to the invention;

(22) FIG. 22 shows non-circular orifices that are placed close to the wall of the cavity;

(23) FIG. 23 shows local betiding of the membrane;

(24) FIG. 24 shows a further embodiment of the nozzle according to the invention;

(25) FIG. 25 is a special embodiment with two or more deflecting jets that collide;

(26) FIG. 26 is a preferred embodiment with two or more deflecting jets that collide;

(27) FIG. 27 is a graph showing that the deflection angle to be dependent on the thickness of the membrane;

(28) FIG. 28 is a graph showing that the deflection angle to be dependent on the height of a harrier and the shape of the barrier;

(29) FIG. 29 is a graph showing that the deflection angle to be dependent on the extent of a circular harrier adjacent the orifice; and

(30) FIG. 30 is a graph showing that the deflection angle to be dependent or the distance between a barrier and the orifice.

(31) It should be noticed that the figures are drawn schematically and not to scale. In particular, certain dimensions may be exaggerated to a higher or lesser extent in order to improve the overall intelligibility. Corresponding parts are denoted by a same reference sign throughout the drawing

(32) A first embodiment of a spray nozzle unit 1 and a cross section of the spray nozzle that is applied in said unit is shown in FIGS. 1 and 2. The spray nozzle and spray nozzle unit are intended for a spray device for spraying at least one fluidic microjet 2 at an inclined angle relative to a centre line of a nozzle orifice. The spray nozzle comprises a substantially planar support body 11 made from silicon, glass, plastic or photosensitive polymer with a thickness of between 50 and 675 micrometer having at least one cavity 5 with a diameter w of typically 10-100 micrometer extending from a first main (downstream) surface 7 to a second main (upstream) surface 6 thereof. A thin membrane layer 4 made typically from a thin film ceramic material like (poly) silicon, silicon nitride, silicon oxide or silicon carbide forms a nozzle membrane that is suspended over the cavity 5 and that has at least one nozzle orifice 9 with diameter typically between 0.5 and 20 micrometer in fluid communication with said cavity. The cavity 5 and said nozzle orifice 9 form a geometrically defined asymmetric fluid flow resistance as said nozzle orifice 9 is positioned near an edge wall 10, i.e perimeter, of said cavity, in particular at a distance (d) less than one to three times the diameter of the nozzle orifice. This causes the microjet (2) to emit at an inclined angle () with respect to the substantial planar membrane layer (4). A centre of the cavity may be understood as a centre seen in the lateral direction, i.e. in a direction parallel to the downstream surface of the membrane layer.

(33) The orifice 9 is a-centrally positioned, i.e. it is positioned with an offset in respect of the centre of the cavity 5, seen along the downstream surface. The flow path towards said orifice also has an a-centrical, i.e. asymmetrical flow profile in terms of flow resistance. This results in a microjet 2 emanating from said orifice under an angle of deflection relative to a centre line of said orifice. FIG. 3 depicts the dependence of the inclination angle with respect to the distance d between the edge wall 10 and the edge of a nozzle 9 with a diameter of 4 micron in a cavity 5 having a diameter w of 40 micron (see FIG. 2). Shifting the nozzle more than 3 micron from the edge already gives a steep decrease of the inclination angle, from 8 to less than 2.

(34) In FIG. 4 an embodiment of a spray nozzle with an array of cavities 5 each with a diameter of typically between 10 and 100 micrometer and a distance between adjacent cavities of 5 to 200 micrometer is shown enabling different inclination angles of the microjets 2 that are dependent on the distance d of the orifices with respect to the edge walls 10 of the fluid cavities 5. Each orifice is provided with a different offset in respect of the corresponding cavity. As the offsets differ, the angles of ejection of the microjets also differ.

(35) Membrane layers for spraying can be made with known micro machining techniques. A mono crystalline silicon wafer with thickness of typically between 100 and 675 micron is provided to form a membrane layer support body. Using Low Pressure Chemical Vapour Deposition a layer of low stress silicon nitride with a thickness of 0.5-1.5 micron is grown on said support body to form a membrane layer. With a suitable mask a photo lacquer pattern with 4.5 micron, typically between 0.5 and 20 micron, orifices at the front side of the wafer and a pattern with 40 micron, typically between 10 and 100 micron, diameter openings at the back side, that register i.e. correspond with said at least one opening at said front side, is being exposed and developed. With the aid of anisotropic reactive ion etching at least one opening with a diameter of 4.5 micron, typically between 0.5 and 20 micron, and a length of 1 micron, typically between 0.5 and 1.5 micron, is etched in the silicon nitride layer to create at least one nozzle orifice.

(36) With the use of deep reactive ion etching a cavity with a diameter of 40 micron, typically between 10 and 100 micron, and a length of 200 micron, typically between 100 and 675 micron, is made in the silicon wafer, forming the support body. The membrane layer extending over the cavity and comprising said at least one orifice forms a nozzle membrane that is suspended over the cavity. A freely suspended, hanging nozzle membrane having a circular cross section with a diameter of 40 micron and being made of a 1 micron thick silicon rich silicon nitride layer, can easily withstand spray pressures of 100-150 bar.

(37) In FIG. 5 another embodiment of a spray nozzle with a nozzle orifice 9 having a direct boundary 28 with the edge wall 10 in a cylindrical cavity 5 with a diameter of 40 micron. The observed inclination angle is found to be dependent on the size of the nozzle orifice 9 as presented in FIG. 6. An inclination angle larger than 5 is found when the diameter of the nozzle orifice 9 is larger than 10% of the cavity diameter w. An inclination angle larger than 10 is found when the diameter of the nozzle orifice 9 is larger than 25% of the cavity diameter w.

(38) In FIG. 7 a fluid simulation is presented of a cylindrical cavity with a round membrane layer having a diameter of 40 micron and a thickness of 1 micron. In the membrane layer a number of nozzle orifices with a diameter of 4 micron have been placed showing different spray inclination angles depending on the offset and the distance to the edge wall and also depending on the relative position of adjacent nozzle orifices. In FIG. 7 a (virtual lateral and parallel to the membrane layer) channel with a height comparable with the diameter of the nozzle orifice can be discerned, enabling a lateral impulse contribution of the fluid that is passing through the nozzle orifice.

(39) When the fluid is flowing parallel to the nozzle membrane just before it is jetted via the nozzle it will have a specific lateral impulse (mass density times lateral velocity) upon flowing through the nozzle orifice. When the fluid passes the nozzle it will also acquire a vertical impulse (mass density times vertical velocity) with respect to the membrane layer. When the membrane layer is relatively thin a major part of the lateral impulse will also be transferred to the jet emanating from the nozzle. The jet inclination angle will then be determined by the ratio of the transferred lateral and vertical impulse, typically the ratio should be larger than 0.1 and preferably larger than 0.2. The closer the orifice is positioned near the edge wall of the cavity the larger the residual lateral impulse of the microjet, and the more oblique is the angle of inclination. The lateral impulse is defined as the mean lateral impulse of the fluid near the nozzle exit, and to be more precise the lateral impulse as averaged over a virtual lateral channel with a channel height equal to the diameter of the nozzle orifice and having a boundary with the nozzle membrane, for cases in which the total height of the lateral channel is much larger than the diameter of the nozzle orifice.

(40) It will be clear that with a single membrane layer membrane many different layouts are possible for the placement of the nozzle orifices on the nozzle membrane. With preference in a round membrane the orifices are angularly distributed and can comprise a first set of angular distributed nozzles adjacent to the cavity wall, a second set of angular distributed nozzles with a distance to the cavity wall of approximately two times the nozzle orifice diameter, and a further set of angular distributed nozzles more inwards to the membrane.

(41) In optional cases when a large amount of nozzle orifices are needed, e.g. more than ten or twenty it is likewise possible to make more than one free hanging membrane in the nozzle support body (see also FIG. 4). Such free hanging membranes themselves can then be angularly distributed on the membrane layer, and the location of the orifices on each of the membranes can be chosen that a maximum amount of diverging jets can be obtained. Also in optional cases the cavity of the support body is ring shaped, and also the nozzle membrane that is suspended over the cavity is ring shaped. This is advantageous when a large number of orifices is needed for high throughput spraying at a large pressure. The pressure strength of the ring shaped membrane is strongly determined by the inner width of the ring, which can be chosen to be e.g. 40 micron whereas the total outer diameter of the ring can be several hundreds of microns.

(42) In FIG. 8 another embodiment of a spray nozzle is depicted comprising a fluidic channel 32 directly underneath and parallel to the nozzle membrane (44) with a mean diameter between 0.3 to 3 times the mean diameter of the orifice and a length between 0.5 to 5 times the mean diameter of the orifice. The fluidic channel 32 enables a lateral impulse contribution of the fluid that is passing through the nozzle orifice. The entrance of the fluidic channel 32 has preferably a very sharp, well-defined edge of 70-100 degrees.

(43) In FIG. 9 a fluid simulation is presented clearly showing that a large angle of inclination of the emanating jet is attainable with this measure according to the invention. Many embodiments are possible, such as choosing a cavity edge wall 10 that is positively tapering towards the nozzle orifice 9. It will be clear that many measures to increase the lateral impulse in combination with a thin nozzle membrane are possible to yield large inclination angles. Very large inclination angles (>10-20) can thus be obtained when the lateral channel over a specific length beneath the nozzle membrane has a height comparable or smaller than the nozzle orifice diameter.

(44) With preference the width of the lateral fluidic channel 32 is also chosen small and comparable to the nozzle orifice diameter, see FIG. 10. The smaller the lateral channel and the smaller the nozzle orifice length the larger the inclination angle is observed. For example a jet inclination angle of 37 has been obtained with a spray device having a nozzle orifice with a diameter of 4 micron, a length of 0.7 micron connected to a lateral fluidic channel with a height of 1 micron, a length of 8 micron and a width of 5 micron (FIG. 10). A number of angular distributed nozzle orifices 9 with such fluidic channels 32 is depicted in FIG. 11.

(45) The effect of a possible bending of the nozzle membrane is depicted in FIG. 12. As can be noticed bending over an angle adds to the inclination angle of the jet to give a total deflection over an angle of +.

(46) In some cases it may be desirable to construct a nozzle orifice having a cross section plane at the second main surface substantially offset from the substantially flat membrane layer, especially in cases when a number of different angles of inclination are needed in one spray nozzle unit. Some nozzles can then be constructed according to one of the above said embodiments, and some according to the latter mentioned substantially offset condition.

(47) An embodiment (see FIG. 13) is characterized in that the nozzle orifice 9 extends over the support body 11, while the support body 11 is locally etched beneath said extension 37 of said nozzle orifice 9 to a depth between 0.3 to 3 times the mean diameter of the orifice creating an orifice for spraying at least one fluidic microjet 2 at an inclined angle.

(48) In a further embodiment (see FIG. 14) of the nozzle according to the invention the membrane layer comprises a multilayer sandwich of a first silicon nitride layer 40 with a thickness of typically 0.5-1.5 micrometer, a silicon oxide layer 42 with a thickness of typically 0.5-5 micrometer and a second silicon nitride layer 43 with a thickness of typically 0.5-5 micrometer. The membrane layer is provided with an orifice 9 that extends partly over the support body 11 and partly within the cavity 5 that is provided in said support body. The orifice 9 comprises a cavity 39 that is formed in said multilayer membrane layer with the first silicon nitride layer 40 having an extension 41 over the cavity 39 with diameter 10-100 micrometer and a length of 100-675 micrometer and with the cavity 39 extending through the first silicon nitride layer (40) with an opening diameter that is smaller than or equal to the cavity 39 diameter and the silicon oxide layer 42 and with a second silicon nitride layer 43, in which the orifice 9 with diameter of 0.5-20 micrometer is etched through extending in the silicon oxide layer 42.

(49) Another embodiment of a spray nozzle membrane forming itself a significant contribution to the lateral impulse of the emanating jet is depicted in FIG. 15. Here a geometrically asymmetric fluid flow resistance inside the nozzle membrane itself is created, such that the liquid flowing through the orifice near the edge wall of said cavity has a lower velocity than the liquid through the same orifice near the middle of the nozzle membrane, which enables to emit at a specific inclination angle with respect to the membrane layer. With preference a cross section of said nozzle orifice is oval, tear, moon, V or U shaped. Also is depicted in FIG. 15 a nozzle membrane that has one symmetrically shaped orifice in the middle of the nozzle membrane to allow jetting without any inclination.

(50) Another embodiment is shown in FIG. 16, adjacent to a nozzle orifice one or more protrusions or rim shaped barriers 50 are provided. The barrier typically has a rim height of between 1 and 10 micrometer, a rim length of typically the nozzle diameter and a width of typically 0.2-5 micrometer. Such a barriers appears to influence the flow profile and significantly change the impulse direction and deflection angle of the emanating jet.

(51) A single rectangular protrusion or rim shaped barrier may be present on one side of the nozzle orifice, as shown in FIG. 17, but more than one barrier may also be present at more sides adjacent the nozzle orifice. Examples of such embodiments are shown in FIG. 18. The barrier 50 may be rectangular but also shapes such as semi-circular that closely fits around a orifice 9 are possible (FIG. 18).

(52) The length and the height of these protrusions or rim shaped barriers will influence the deflection angle of the jet. Some results showing the relation between the declination angle and these properties of the barrier, such as the shape and height, are shown in FIG. 28 for a nozzle membrane with a diameter of 50 m, an orifice having a diameter 4.5 m, and a rim shaped barrier with a varying shape and height placed at about 0.75 m from the edge of the orifice. The fluid is water at a pressure of 7 bar with a flow rate of 1.33 ml/hr and the membrane has a thickness of 850 nanometer.

(53) The deflection angle is proportional to the barrier height and levels of when the height becomes equal to the orifice diameter of, in this embodiment, 4.5 micron (cf. FIG. 28). Both the straight barrier and the semi-circular (180) barrier are placed as closely as possible near or around the orifice edge. The deflection of a straight wall barrier is about half the deflection of a semi-circular barrier, if both barriers have equal height. The optimum barrier height is between 10% and 100% of the orifice diameter, in particular between 50% and 80% of the orifice diameter.

(54) The deflection angle appears also proportional to the size of the circular arc of the barrier, as shown in FIG. 29. The height of the circular arc barrier is 4 m and the barrier is placed at the edge of an orifice with a diameter of 4.5 m. The deflection angle is optimum in a circular arc range of 120-330, or more particular between 180 and 260.

(55) The deflection angle decreases with increasing distance between the semi-circular barrier and the round shaped orifice, as shown in FIG. 30. For larger orifices the deflection angle decreases slower with increasing distance between the barrier and the orifice (with similar flow speeds). Preferably the distance between the orifice and the semi-circular barrier is less than 25% the orifice diameter, in particular less than 10% of the orifice diameter.

(56) Another preferred embodiment is shown in FIG. 19, where the cavity 5 with a typical diameter of 10-90 micrometer is smaller than the nozzle membrane 44 with a typical diameter of 30-100 micrometer, leaving a recessed area 55 with a typical height ranging of 0.5-10 micrometer and a typical length of 0.5-20 micrometer at which the nozzle orifice 9 with a diameter 0.5-15 micrometer is placed at a position between the edge of the cavity 5 and the edge of the nozzle membrane and rim shaped barriers (50) are created at the recessed area 55 around the nozzle orifice to direct the liquid from the cavity and resulting in an inclined jet emanating from the nozzle orifice.

(57) Rim shaped barriers may be fixed at the nozzle membrane as in the embodiment shown in FIGS. 16 and 21, leaving a gap 60 typically varying between 50 nanometre and 1.5 micron between the barrier 50 and nozzle support body 11. Such a barrier 50 may also be fixed at the support body 11 as shown in FIG. 20. The gap 60 decouples the nozzle membrane 44 from the support body 11 and greatly reduces stress points near these rim shaped barriers 50 to the nozzle membrane 44 resulting in a very high pressure strength of the nozzle membrane 44 such that the membrane typically can withstand pressures of 150-200 bars for a silicon nitride membrane with a diameter of 50 micron. In any case it is preferential to have a void free and obstacle free membrane edge that is circular shaped.

(58) A preferred embodiment of a spray nozzle unit with rim shaped barriers may lead to jet deflection angles that are much larger than without the rim shaped barrier. Moreover the presence of rim shaped barriers leads to less pressure losses in the spray nozzle unit than for embodiments without rim shaped barriers for a given deflection angle.

(59) Another embodiment of a spray nozzle membrane is shown in FIG. 22 where a non-circular orifice is placed closely to the wall of the cavity. The long elongated orifice with a length at least twice the width of the orifice has a more asymmetrical flow pattern than a circular orifice with the same orifice surface area in case the orifices are placed with the same distance between the nozzle membrane edge and nozzle orifice edge, which is typically less than 3 times a diameter of the nozzle orifice, and thus the jet emanating from the elongated orifice has more inclination than the circular pore. A further advantage of long elongated orifices in a nozzle membrane is the fact that the local bending of the membrane is deviating from the normal bending curve of a membrane giving the emanating jet additional inclination, as shown in FIG. 23.

(60) Another preferred embodiment of a spray nozzle membrane is shown in FIG. 24, where one or more nozzle orifices 9 are placed in between two adjacent corrugation zones 48, 49. The corrugation zones have a width of typically 2.5-5 micrometer and a height of typically 1-5 micrometer. The outer corrugation zone is placed on or near the edge 10 of the membrane 44 at a distance of typically 0-10 micrometer.

(61) A special embodiment of a nozzle according to the invention is shown in FIG. 25. In this embodiment two or more deflecting nozzle orifices 9 are positioned in such a way that two or more deflecting jets 2 will collide above the nozzle membrane 44 in a point or spot of intersection. If the velocity and kinetic energy of the jets is sufficiently high the collision of the jets will create droplets that are much smaller than the diameter of the nozzle orifice 9. This means that relatively large nozzle orifices 9 are allowed to generate a spray with a specific droplet size and size distribution. Larger nozzle orifices are less sensitive for clogging than smaller orifices.

(62) Two or more deflecting jets that collide can also be obtained with two or more orifices in the same membrane through use of barriers as depicted in FIG. 16. It is also conceivable within the scope of the invention that two or more different liquids collide above the nozzle body. To that end the present embodiment may be provided with two or more separate cavities with separate means for supply of the subject liquids. This collision technology has many applications, especially in the field of collision of liquids with low stress materials, such as liquids containing bio-active material like peptides, vesicles and cells. Because the orifices can be made relatively large, whereas its depth relatively small, the passage of the vulnerable liquids are under mild low shear conditions. Applications are in fast 3D printing techniques, tissue engineering and similar applications.

(63) FIG. 26 shows a preferred embodiment of the nozzle according to the invention having two or more deflecting nozzle orifices 9 that are positioned in such a way that they will release two or more deflecting jets 2 under a deflected angle such that they will collide above the nozzle membrane 44 in a point or spot of intersection. This embodiment further comprises a central nozzle orifice 9 that emanates a microjet 2 without deflection from a centre line of said orifice such that also this microjet 2 will cross the point or spot of intersection of the other microjets 2. This central microjet delivers a momentum at the point of intersection that is directed away from the main surface of the membrane thereby dragging the droplets with it. This counteracts droplets from being cast towards the membrane surface.

(64) Another embodiment is characterized in that a first zone of said second main surface of said membrane layer which surrounds said nozzle orifice is at least partly hydrophobic. This nozzle orifice is self-cleaning.

(65) Another embodiment is characterized in that the spray nozzle unit comprises at a main surface of said membrane layer an air diffusor, capable in reducing the vertical velocity of the jet exiting the nozzle orifice, wherein the air diffusor is conically or trumpet shaped with at least one air inlet opening at a height near the membrane layer.

(66) Another embodiment is characterized in that the spray nozzle unit comprises at least one nozzle orifice with a perimeter slightly elevated above the surrounding surface of the membrane that enables jetting, in which said perimeter particularly has a height between 10% and 50% of a diameter of the nozzle orifice.

(67) Another embodiment is characterized in that the spray nozzle unit is provided with filtration means which comprise a filtration plate which is in fluid communication with said cavity at said first main surface side of said membrane layer support body.

(68) Although the invention has been described hereinbefore with reference to a number of certain embodiments, it will be understood that the invention is by no means restricted to these embodiments. Instead numerous embodiments and variations are feasible for a skilled person without departing from the scope and spirit of the invention.

(69) Particularly the skilled person will appreciate that the following special embodiments emerge from the scope and spirit of the present invention:

Particular Embodiments of the Invention

(70) 1. A spray device, for spraying a fluidic microjet spray, comprising a spray nozzle unit, said spray nozzle unit comprising at least one spray nozzle having a chamber for receiving a pressurized fluid therein and having a perforated nozzle wall for releasing a microjet spray of said fluid, characterized in that said spray nozzle is formed by a nozzle body, comprising a support body with at least one cavity that opens at a main surface of said support body, said support body being covered by a membrane layer at said main surface and said membrane layer being provided with at least one nozzle orifice throughout a thickness of said membrane layer at an area of said cavity to form a nozzle membrane at each of said at least one cavity that is in fluid communication with the respective cavity, in that said at least one nozzle orifice comprises at least one deflecting nozzle orifice, releasing said microjet under a deflected angle that is directed away from an imaginary centre line of said orifice, and in that said at least one deflecting nozzle orifice is in open communication with a fluidic flow channel that has a lateral asymmetrical flowprofile in terms of a fluid flow resistance from said cavity towards said nozzle orifice.

(71) 2. Spray device according to embodiment 1, characterized in that said nozzle membrane comprises a central region at the area of said cavity and a peripheral region between said central region and an edge of said cavity, and in that at least one deflecting nozzle orifice is located within said peripheral region.

(72) 3. Spray device according to embodiment 1 or 2, characterized in that at least one deflecting nozzle orifice is positioned near a peripheral wall of said cavity, in particular at a distance between a centre of said deflecting nozzle orifice and said peripheral wall that is less titan three times a diameter of said nozzle orifice, and preferably less than said diameter of said nozzle orifice.

(73) 4. Spray device according to embodiment 1, 2 or 3, characterized in that said at least one deflecting nozzle orifice has a diameter larger than 10% of a diameter of said cavity and particularly has a diameter larger than 25% of the diameter of said cavity.

(74) 5. Spray device according to any of the preceding embodiments, characterized in that said cavity is configured to impose a lateral impulse on said fluid in said fluidic flow channel that is conveyed to the liquid while forming the microjet.

(75) 6. Spray device according to embodiment 5, characterized in that said said cavity comprises at least one relatively shallow lateral extension at said main surface, said membrane comprising at least one deflecting orifice at the area of said extension.

(76) 7. Spray device according to embodiment 6, characterized in that said extension generally has a width between 0.3 and 3 times a diameter of said deflecting orifice and a length between 0.5 and 5 times a diameter of said orifice.

(77) 8. Spray device according to embodiment 6 or 7, characterized in that said extension generally has a depth that is between 0.3 to 3 times a diameter of said orifice.

(78) 9. Spray device according to anyone of embodiment 6, 7 or 8, characterized in that said support body has been locally etched to form said at least one lateral extension of said cavity.

(79) 10. Spray device according to embodiment 6, 7 or 8, characterized in that said a least one lateral extension of said cavity comprises a substantially ring-shaped extension along a periphery of said cavity in fluid communication with a plurality of angularly distributed deflecting nozzle orifices.

(80) 11. Spray device according to embodiment 6, 7 or 8, characterized in that said a least one lateral extension of said cavity comprises a plurality of angularly distributed local extensions of said cavity, each being in fluid communication with at least one deflecting nozzle orifice.

(81) 12. A spray device according to any of the preceding embodiments, characterized in that said at least one deflecting orifice has a non-axi symmetrical shape having a wider part and a narrower part, particularly an oval, tear, moon, V or U shape, and in that said wider part of said nozzle orifice faces away from an edge wall of said cavity.

(82) 13. Spray device according to anyone of the preceding embodiments characterized by comprising at least one fluid barrier near said at least one deflecting orifice that is at least partly positioned in said fluidic flow channel towards said nozzle orifice, said at least one barrier being provided assymetrically with respect to said nozzle orifice.

(83) 14. Spray device according to embodiment 13, characterized in that said barrier comprises at least one rim that extends from said membrane to inside said flow channel.

(84) 15. Spray device according to embodiment 13 or 14, characterized in that said at least one barrier leaves a gap for fluidic passage of between 50 nanometer and 5 micrometer.

(85) 16. Spray device according to embodiment 13, 14 or 15, characterized in that said at least barrier is provide along a lineair, multi-linear or curvalinar contour around said deflecting nozzle, said contour being open at a side of said orifice that is directed to a centre of said cavity.

(86) 17. Spray device according to anyone of the preceding embodiments, characterized in that said cavity is generally ring-shaped, and in that said at least one deflecting nozzle orifice comprises groups of orifices that are distributed along an outer periphery of said generally ring-shaped cavity.

(87) 18. Spray device according to anyone of the preceding embodiments, characterized in that said spray nozzle is provided with filtration means which comprise a filtration plate that is in fluid communication with said cavity and that is provided onto an upstream surface of said support body.

(88) 19. Spray device according to anyone of the preceding embodiments, characterized in that said at least one deflecting nozzle orifice has a diameter of between 0.4 and 20 micron.

(89) 20. Spray device according to anyone of the preceding embodiments, characterized in that air difussor means are provided downstream of said nozzle, said air diffusor means being onfigured to reduce a velocity of the fluidic microjet that emanates from said nozzle, wherein said air diffusor means are conically or trumpet shaped and comprise at least one air inlet opening.

(90) 21. Spray device according to anyone of the preceding embodiments, wherein the liquid is a cosmetic liquid or a wafer cleaning liquid, characterized in that said spray nozzle has a microjet divergence angle greater than 10.

(91) 22. Spray device according to any of the preceding embodiments, characterized in that said cavity has a generally circular or polygonal cross-section at said main surface and in that said at least one deflecting nozzle orifice comprises a set of a number of deflecting nozzle orifices that are angularly distributed along at least a part of a peripheral edge of said cavity, in particular at a distance from said edge that is less than a diameter of an orific.

(92) 23. Spray device according to embodiment 22, characterized in that at least one further set of deflecting spray nozzele orifices is angularly distributed along at least a part of said peripheral edge of said cavity, particularly at a distance from said edge that is between one and three times said diameter of an orific.

(93) 24. Spray according to anyone of the preceding embodiments, characterized in that said nozzle membrane is configured to bend during operation from a substantially flat initial state to an at least partly curved profile under pressure while releasing said microjet spray, and in that said at least one nozzle orifice is located near a point of inflection in said curved profile of said nozzle membrane.

(94) 25. Spray device according to embodiment 24, characterized in that said nozzle membrane is configured to bend in that said membrane is corrugated, comprising at least one corrugation along a periphery of said cavity.

(95) 26. Spray device according to embodiment 25, characterized in that said membrane comprises at least two laterally spaced corrugations along the periphery of said cavity and in that said at least one deflecting orifice is positioned in between adjacent corrugations.

(96) 27. Spray device according to embodiment 24, characterized in that said nozzle membrane is configured to bend in that said membrane is provided with at least one deflecting nozzle orifice that is elongated and allows said membrane to deflect along an edge of said elongated nozzle orifice.

(97) 28. Spray device according to anyone of the preceding embodiments, characterized in that a bare surface of said spray nozzle is hydrophobic at least at an area adjacent said at least one nozzle orifice.

(98) 29. Spray device according to anyone of the preceding embodiments, characterized in that said support body comprises a plurality of cavities that are distributed at said main surface, particularly distributed angularly at said surface, each one of said cavities being spanned by a nozzle membrane having at least one deflecting nozzle orifice.

(99) 30. Spray device according to anyone of the preceding embodiments, characterized in that said support body comprises a semiconductor body, preferably a silicon body.

(100) 31. Spray device according to anyone of the preceding embodiments, characterized in that said membrane layer comprises a ceramic layer, particularly of a thickness that is generally less than 2 microns, more particularly a silicon nitride layer.

(101) 32. Spray device according to anyone of the preceding embodiments, characterized in that said deflecting orifice extends partly beyond an edge of said cavity and partly over said cavity.

(102) 33. Spray device according to anyone of the preceding embodiments, characterized by further comprising a liquid supply system for supplying a pressurized liquid to said cavity of at least one spray nozzle.

(103) 34. Spray device according to anyone of the preceding embodiments, characterized in that said membrane has a thickness less that 50% of a diameter of said orifice, particularly less that 25% of said diameter.

(104) 35. Spray device according to embodiment 16, characterized in that said at least one barrier surrounds said orifice substantially along a semi-circular arc that subscribes an angle of between 120 and 330 degrees, particularly of between 180 and 260 degrees, around said orifice.

(105) 36. Spray device according to embodiment 16, characterized in that said barrier is spaced from said orifice over a distance that is less than 25% a diameter of said orifice, particularly less than 10% of said diameter of said orifice.

(106) 37. Spray device according to anyone of the preceding embodiments, characterized in that the spray nozzle unit comprises at least one nozzle orifice with a perimeter slightly elevated above the surrounding surface of the membrane that enables jetting, in which said perimeter particularly has a height between 10% and 50% of a diameter of the nozzle orifice.

(107) 38. Spray device according to anyone of the preceding embodiments, characterized in that said membrane comprises at least two deflecting nozzle orifices, releasing said microjet under a deflected angle along a jet line that is directed away from an imaginary centre line of the respective orifice, and in that the jet lines of said at least two nozzle orifices intersect one another to cause said emanating microjets to collide during operation.

(108) 39. Spray device according to embodiment 38, characterized in that said membrane comprises at least one third nozzle orifice, releasing said microjet under a substantially non-deflected angle along a jet line that is directed along an imaginary centre line of said third orifice, and in that the jet lines of said at least two nozzle orifices intersect with said jet line of said third orifice to cause said emanating microjets to collide during operation.

(109) 40. Spray device according to any of the preceding embodiments, characterized in that micro-valve means are present upstream of said defelcting nozzle orifice, said valve means comprising a micro-valve disc in close proximity of a micro-valve seat, said micro-valve disc resting on said micro-valve seat in a normally closed state and lifting from said seat once an upstream pressure threshold is exceeded to open a fluid passage between said micro-valve disc and said micro-valve seat towards said fluidic flow channel.

(110) 41. Spray device according to embodiment 40, characterized in that said nozzle membrane constitutes one of said micro-valve seat and said micro-valve disc.

(111) 42. Spray device according to anyone of the preceding embodiments, characterized in that said membrane comprises at least two deflecting nozzle orifices, releasing said microjet under a deflected angle along a jet line that is directed away from an imaginary centre line of the respective orifice, and in that said at least two nozzle orifices have a mutually different lateral cross section.

(112) 43. Spray device according to embodiment 42, characterized in that said membrane comprises at least two groups of deflecting nozzle orifices, releasing said microjet under a common deflected angle along a jet line that is directed away from an imaginary centre line of the respective orifice, and in that the orifices within each of said at least two groups of nozzle orifices feature a substantially identical lateral cross section that is distinct from a lateral cross section of the orifices in the other of said at least two groups of deflecting nozzle orifices.

(113) 44. Spray device according to anyone of the preceding embodiments, characterized in that at least one of said deflecting orifices has a triangular lateral cross-section.

(114) 45. Spray nozzle body of the type as applied in the spray device according to anyone of the preceding embodiments.