DEVICE FOR SEALING TWO SPACES FILLED WITH DIFFERENT FLUIDS IN A MEMS SENSOR SYSTEM

Abstract

A sealing device for sealing a space filled with a fluid in a MEMS sensor system. The sealing device includes a sealing unit, the sealing unit encompassing a channel, which is connected to the one space, and a sealing element for sealing the channel being situated in the channel in such a way that the channel and/or the sealing element are/is designed in such a way that the sealing element is sealingly fixed in the channel via a mechanical clamping.

Claims

1-11. (canceled)

12. A sealing device for sealing a space filled with a fluid in a MEMS sensor system, the sealing device comprising: a sealing unit encompassing a channel, which is connected to the space, and a sealing element, configured to seal the channel, situated in the channel in such a way that the channel and/or the sealing element is configured in such a way that the sealing element is sealingly fixed in the channel via a mechanical clamping, the channel including a recess for partially accommodating the sealing element in a section adjacent to the sealing element.

13. The sealing device as recited in claim 12, wherein the channel and the sealing element are configured in such a way that the sealing element is sealingly situated in the channel using an at least partial form fit.

14. The sealing device as recited in claim 13, wherein a wall thickness of the channel is established to form the at least partial form fit.

15. The sealing device as recited in claim 12, wherein the sealing element has a lesser elasticity than at least the section of the channel adjacent to the sealing element.

16. The sealing device as recited in claim 15, wherein the sealing element is made of metal, in particular steel, and/or the channel is made of plastic.

17. The sealing device as recited in claim 12, wherein the sealing element is sphere-shaped and the channel includes a circular cross section.

18. The sealing device as recited in claim 12, wherein the sealing unit includes an insertion chamfer, which is adapted to the sealing element and is in the shape of a funnel.

19. The sealing device as recited in claim 17, wherein a diameter of the sphere is greater than a diameter of the channel.

20. A pressure sensor, comprising: a sensor element situated in a space at least partially surrounded by a fluid; and a sealing unit, the space sealed using the sealing unit, the sealing unit encompassing a channel, which is connected to the space, and a sealing element, configured to seal the channel, situated in the channel in such a way that the channel and/or the sealing element is configured in such a way that the sealing element is permanently sealingly fixed in the channel via a mechanical clamping, the channel including a recess for partially accommodating the sealing element in a section adjacent to the sealing element.

21. The pressure sensor as recited in claim 20, wherein the pressure sensor is for use in an air conditioning system in a vehicle.

22. A method for permanently sealing two spaces filled with different fluids in a MEMS sensor system, the method comprising the following steps: providing a fluid connection to a closed space; placing a sealing unit in the fluid connection, the sealing unit including a channel, which is connected to the space; inserting a sealing element into the channel; and fixing the sealing element in the channel to seal the channel via a mechanical clamping.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0028] FIG. 1 schematically shows a device according to one specific example embodiment of the present invention in cross section.

[0029] FIG. 2 schematically shows one portion of a pressure sensor according to one specific example embodiment of the present invention in cross section.

[0030] FIG. 3 schematically shows steps of a method according to one specific example embodiment of the present invention.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

[0031] FIG. 1 shows a device according to one specific example embodiment of the present invention in cross section.

[0032] FIG. 1 shows, in detail, a device 1 for sealing two spaces 2, 3 filled with different fluids. Spaces 2, 3 are fluidically connected to each other via a channel 5 of a sealing unit 4. A sphere 6, whose diameter 10 is greater than inner diameter 11 of channel 5, is inserted into channel 5. Sphere 6 is made of metal; channel 5 is made of plastic. Wall thickness 5 of channel 5 is selected in such a way or channel 5 is designed in such a way that a portion of an elastic deformation of channel 5 is made possible in area 5a of the position of sphere 6. As a result, a relaxation of the plastic, i.e., a recontraction of channel 5 after the insertion of sphere 6, is made possible, which provides a form fit of sphere 6 with channel 5. Additionally, in order to support the form fit, a recess 7, designed, for example, in the shape of a circle segment, may be situated in area 5a of the desired fixation position of sphere 6 in channel 5. This recess 7 makes it possible for sphere 6 to be additionally held in its axial position within channel 5 when acted upon by pressure.

[0033] At the upper end of channel 5 in FIG. 1, an insertion chamfer 8 is situated, which is designed in the shape of a funnel and is utilized for providing a simple insertion of sphere 6 into channel 5. In this case, the angle of funnel-shaped insertion chamfer 8 is approximately 45, the height of the funnel, i.e., parallel to the axis of channel 5, being approximately 25% with respect to the overall length of channel 5. The press-in depth of sphere 6 into channel 5 is approximately 50% of the overall length of channel 5. Wall thickness 5 in relation to inner diameter 11 is approximately 33%. Overall, each of the pieces of information may be appropriately adapted or modified depending on the requirements, for example, with respect to materials or the like. Deviations of up to 75%, in particular up to 50%, preferably up to 25%, may take place in each case.

[0034] FIG. 2 shows one portion of a pressure sensor according to one specific example embodiment of the present invention in cross section.

[0035] FIG. 2 shows, in detail, device 1 according to FIG. 1 situated in an oil reservoir module 100 of a pressure sensor 100. Specifically, an oil frame 102 is situated, which includes a space 2, which is utilized as an oil reservoir. On the one hand, a sensor element in the form of a PorSi chip 101PorSi refers to porous siliconis connected to this space 2; on the other hand, a sealing unit 4 is situated on the side of space 2 facing away from sensor element 101 in order to seal space 2 and includes a channel 5, which is closed with the aid of a sphere 6 made of steel and, in this way, seals space 2, the oil reservoir, with respect to a second space 3.

[0036] FIG. 3 shows steps of a method according to one specific example embodiment of the present invention.

[0037] FIG. 3 shows, in detail, a method for sealing two spaces filled with different fluids in a MEMS sensor system.

[0038] In a first step S1, a provision of a fluid connection to a closed space takes place. In a second step S2, a placement of a sealing unit in the fluid connection takes place, the sealing unit including a channel, which is connected to the space. In a third step S3, an insertion of a sealing element into the channel takes place. In a fourth step S4, a fixation of the sealing element in the channel takes place in order to seal the channel via a mechanical clamping.

[0039] In summary, at least one of the specific embodiments of the present invention has at least one of the following advantages: [0040] Physical separation of a sensor element and a refrigerant medium [0041] Cost-effective manufacture [0042] Implementation of a pressure sensor including a PorSi sensor element for air conditioning systems [0043] Simple, reliable sealing [0044] Permanent sealing

[0045] Although the present invention was described on the basis of preferred exemplary embodiments, it is not limited thereto. Instead, the present invention is modifiable in various ways.