PRODUCTION DEVICE AND PRODUCTION METHOD OF ELECTRONIC GRADE HYDROGEN PEROXIDE AQUEOUS SOLUTION

Abstract

Disclosed is a production device and production method of an electronic grade hydrogen peroxide aqueous solution. An industrial grade hydrogen peroxide is subjected to rectification, reverse osmosis, ion exchange, and finally filtered through an ultrafiltration membrane, and an electronic grade hydrogen peroxide aqueous solution is obtained. Through the above-mentioned integrated design, the disclosure overcomes the problems of small yield and low purity in the prior art, and the method for producing electronic grade hydrogen peroxide has low energy consumption, low cost and high profit, and is suitable for continuous mass production.

Claims

1. A production device of an electronic grade hydrogen peroxide aqueous solution, comprising: a rectification device, a first delivery pump, a reverse osmosis device, a second delivery pump, an ion exchange device, a third delivery pump, an ultrapure filter device, a fourth delivery pump and a filling device connected by pipelines sequentially.

2. The production device of claim 1, wherein the filling device is a nitrogen sealing device.

3. The production device of claim 1, wherein the rectification device the reverse osmosis device, the ultrapure filter device and the filling device are lined with an HDPE layer.

4. The production device of claim 1, wherein the ion exchange device, the first delivery pump, the second delivery pump, the third delivery pump and the fourth delivery pump are lined with an PFA layer.

5. A method of producing the electronic grade hydrogen peroxide aqueous solution, comprising: (1) rectification: concentrating 27.5 wt % industrial grade hydrogen peroxide to 50 wt %70 wt % through rectification device; (2) reverse osmosis: mixing the 50 wt %70 wt % hydrogen peroxide obtained in the step (1) with 50 wt % industrial grade hydrogen peroxide, pumping the mixed hydrogen peroxide into the reverse osmosis device through the first, delivery pump, and obtaining 31 wt % crude electronic grade hydrogen peroxide by reverse osmosis; (3) ion exchange: transporting the 31 wt % crude electronic grade hydrogen peroxide obtained in step (2) to the ion exchange device through the second delivery pump, removing some impurities through the ion exchange device and obtaining preliminary purified electronic grade hydrogen peroxide; (4) ultrapure filtration: transporting the preliminary purified electronic grade hydrogen peroxide obtained in step (3) to the ultrapure filter device through the third delivery pump, obtaining 31 wt % electronic grade hydrogen peroxide by filtration, and transporting the 31 wt % electronic grade hydrogen peroxide to the filling device by the fourth delivery pump to store after filling.

6. The production method of claim 5, wherein the 50 wt %70 wt % industrial grade hydrogen peroxide produced by the reverse osmosis process in the step (2) is reused after adjusting the concentration of byproducts by adding high purity water.

7. The production method of claim 5, wherein the device is rinsed with high purity water before production and the high purity water is replaced by the 50 wt %70 wt % hydrogen peroxide.

8. The production method of claim 5, wherein a membrane of the reverse osmosis in the reverse osmosis device is one or more of aromatic polyamide membrane, polyamide piperazine membrane, polysulfone membrane, and polyvinyl chloride membrane.

9. The production method of claim 5, wherein a membrane of the ion exchange is a strong acidic cation exchange resin or a strong basic anion exchange resin of a copolymer of styrene and divinylbenzene containing sulfonic acid groups.

10. The production, method of claim 5, wherein a membrane of the ultrapure filtration is one or more of polytetrafluoroethylene membrane, polyvinylidene fluoride membrane, and PFA membrane.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following drawings that need to be used in the description of the embodiments or the prior art will briefly introduced. Obviously, the drawings in the following description are only embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the drawings disclosed without creative work.

[0021] FIG. 1 is a structural diagram of a production device of an electronic grade hydrogen peroxide aqueous solution of the present invention.

DETAILED DESCRIPTION OF EMBODIMENTS

[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

Embodiment 1

[0023] Referring to FIG. 1, a production device of an electronic grade hydrogen peroxide aqueous solution provided by the disclosure includes a rectification device 1, a first delivery pump 2, a reverse osmosis device 3, a second delivery pump 4, an ion exchange device 5, a third delivery pump 6, an ultrapure filter device 7, a fourth delivery pump 8 and a filling device 9 connected by pipelines sequentially.

[0024] The filling device 9 is a nitrogen sealing device. The rectification device 1, the reverse osmosis device 3, the ultrapure filter device 7 and the filling device 9 are lined with HDPE layer. The ion exchange device 5, the first delivery pump 2, the second delivery pump 4, the third delivery pump 6 and the fourth delivery pump 8 are lined with PFA layer.

[0025] A production method of the electronic grade hydrogen peroxide aqueous solution based on the above-mentioned production device is provided. The production method includes following steps.

(1) rectification: concentrating 27.5 wt % industrial grade hydrogen peroxide to 50 wt %70 wt % through rectification device;
(2) reverse osmosis: mixing the 50 wt %70 wt % hydrogen peroxide obtained in the step (1) with 50 wt % industrial grade hydrogen peroxide, pumping into the reverse osmosis device through the first delivery pump, and obtaining 31 wt % crude electronic grade hydrogen peroxide by reverse osmosis;
(3) ion exchange: transporting the 31 wt % crude electronic grade hydrogen peroxide obtained in step (2) to the ion exchange device through the second delivery pump, removing impurities through the ion exchange device and obtaining preliminary purified electronic grade hydrogen peroxide;
(4) ultrapure filtration: transporting the preliminary purified electronic grade hydrogen peroxide obtained in step (3) to the ultrapure filter device through the third delivery pump, obtaining 31 wt % electronic grade hydrogen peroxide by filtration, and transporting the 31 wt % electronic grade hydrogen peroxide to the filling device by the fourth delivery pump to store after filling.

[0026] In the step (2), the 50 wt %70 wt % industrial grade hydrogen peroxide produced by the reverse osmosis process in the step (2) is reused after adjusting the concentration of byproducts by adding high purity water.

[0027] The device is rinsed with high purity water before production and the high purity water is replaced by the 50 wt %70 wt % hydrogen peroxide.

[0028] A membrane of the reverse osmosis in the reverse osmosis device adopts one or more of aromatic polyamide membrane polyamide piperazine membrane, polysulfone membrane, and polyvinyl chloride membrane. A membrane of the ion exchange adopts a strong acidic cation exchange resin, or a strong basic anion exchange resin of a copolymer of styrene and divinylbenzene containing sulfonic acid groups. A membrane of the ultrapure filtration adopts one or more of polytetrafluoroethylene membrane, polyvinylidene fluoride membrane, and PFA membrane.

[0029] During the preparation process, G1 or G4 products are obtained by changing the reverse osmosis membrane material, the number of serial beds layers of the ion exchange resin bed and the type of the ion exchange resin.

[0030] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts among the various embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the method part.

[0031] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown in, this document, but should conform to the widest scope consistent with the principles and novel features disclosed in this document.