Semi-finished Product for the Construction of a Gyroscope and Gyroscope Including the Semi-finished Product

Abstract

A semi-finished product for the realization of a gyroscope, including: a single package and a single substrate on which it is attached; a super luminescent diode with a polarized light source; a PIC in which a waveguide group is made of an optical coupling device arranged for coupling the light source with the PIC; wherein on the PIC at least one photodiode is formed or hybridized in order to receive a return light beam from the PIC.

Claims

1. A semi-finished product for the realization of a gyroscope comprising the following components; a super-luminescent diode-type polarized light source; an optical medium of the “photonic integrated circuit” type in which a group of waveguides is defined in which a photo-diode (PD) is formed or hybridized; an optical coupling device arranged to couple the light source with the optical medium; and a single substrate on which exclusively the components are attached.

2. A semi-finished product according to claim 1, wherein said single submount is configured so as to define a Thermo Electric Cooler, in order to guarantee a common temperature for all components of the semi finished product and wherein the semi-finished product further comprises a single package placed for enclosing and sealing the single substrate with said components and wherein said optical medium comprises an optical interface, by means of a joint by fusion, at the input and output towards a MIOC (Multifunctional Integrated Optical Circuit).

3. Semi-finished product according to claim 1wherein the group of waveguides and the optical coupling device are arranged in such a way to maintain unchanged a polarization state of the light beam generated by the light source.

4. Semi-finished product according to claim 1, wherein said PIC includes: an input port intended to receive a light beam generated by said light source through said optical coupling device; (OC), at least one output&input port intended to be coupled to at least one MIOC, at least one output port operatively associated with a corresponding photodiode.

5. Semi-finished product according to claim 4, wherein said PIC defines: at least a second beam splitter arranged to define said input port, said output&input port and said output port; or at least a first beam splitter and two second splitters wherein the first beam splitter defines said input port and is operatively associated with the two second beam splitters and each of the second beam splitters are arranged to define said at least one output&input port and said at least one exit port; at least a first beam splitter and three second beam splitters wherein the first beam splitter defines said input port and is operatively associated with the three second beam splitters and each of the second beam splitters are arranged to define said at least one exit & entry port and said at least one exit port.

6. Semi-finished product according to claim 1, wherein said single substrate is made of a ceramic material.

7. Semi-finished product according to claim 1, wherein said SLED is capable of generating a light beam with a wavelength of about 1550 nm.

8. Semi-finished product according to claim 7, wherein said fiber-array is metalized.

9. Semi-finished product according to claim 1, wherein said optical coupling device consists in the ordered sequence of the following components: a collimating lens; an optical isolator; a focalizing lens; mutually coupled in air, with the light source and with the optical medium.

10. Semi-finished product according to claim 1, wherein said optical medium made either of germanium-doped silicon or of LNOI.

11. Gyroscope comprising a semi-finished product according to claim 1 and at least one MIOC (Multifunctional integrated optical circuit) and a respective fiber-optic multi-turns coil (coil) and in which said at least one MIOC and said respective multi-turns coil is external with respect to said single package and is optically coupled with the semi-finished product by means of fiber-array fibers.

12. Gyroscope according to claim 11, wherein said at least one MIOC comprises means for beam dividing (Splitter), for polarizing it and modulating its phase.

13. Gyroscope according to claim 11, wherein said MIOC has a respective package, which is distinct and separated from said package of the semi finished product.

14. Method of manufacturing a semi-finished product and related gyroscope comprising the following steps: attachment, of a sub-layer inside an open package; hanging, of a PIC, in which waveguides and cavities for photodetctors have been previously made, on the substrate attachment of the SLED on the substrate; hanging, of photodiodes in the relative cavities of the PIC; wire bonding of electrical contacts; active alignment and bonding of a FA (Fiber Array) to the output & input port of the PIC waveguide; active alignment and gluing on the substrate (TEC) of an optical coupling device; and at the end of the previous steps: fastening a lid to create a closed package.

15. The method of claim 14, further comprising the step of: attachment of the optical isolator on the substrate.

Description

BRIEF DESCRIPTION OF THE FIGURES

[0037] Further objects and advantages of the present invention will become clear from the following detailed description of an example of its embodiment (and its variants) and from the annexed drawings given purely for explanatory and non-limiting purposes, in which:

[0038] FIG. 1 shows a schematic plan view of a device according to the prior art, modified so as to make a comparison of the prior art with the present invention;

[0039] FIG. 2 shows a schematic plan view of an example of a device according to the present invention ;

[0040] FIG. 3 shows a side view of the same example of the device of FIG. 2.

[0041] The same reference numbers and letters in the Figures identify the same elements or components.

[0042] In the context of this description, the term “second” component does not imply the presence of a “first” component. These terms are in fact used as labels to improve clarity and should not be understood in a limiting way.

[0043] The elements and characteristics shown in the various preferred embodiments, including the drawings, can be combined with each other without however departing from the scope of the present application as described below.

DETAILED DESCRIPTION OF EXAMPLES OF EMBODIMENT

[0044] FIG. 2 shows an example of embodiment of the FOG device object of the present invention.

[0045] The FOG device, object of the present invention, comprises [0046] a Lsour polarized light source preferably of the SLED type, optically coupled with [0047] a WG waveguide by means of [0048] an OC optical coupling device arranged to couple the

[0049] Lsour source with the WG waveguide, which are interconnected by means of a PIC photonic integrated circuit (Photonic Integrated Circuit) on which the above components are formed/connected to realize a portion of a FOG fiber-optical gyroscope (Fiber Optic Gyroscope).

[0050] It is worth noting that the FOG gyroscope, in operating conditions, comprises the semi-finished S device and at least one MIOC, with a relative multi-turns coil, operatively connected to the device S.

[0051] The optical coupling device OC consists of the following components: [0052] a Clens collimating lens, which is coupled with [0053] an Isol optical isolator, which in turn is coupled with [0054] a Flens focusing lens which is coupled with the wave guide.

[0055] The SLED source is coupled to the Clens collimating lens, whereas the Flens focusing lens is coupled to the waveguide by creating an operational sequence of components, necessary to adapt the near-field mode of the SLED luminescent source to the near-field mode of the WG waveguide.

[0056] There are two possible versions of the OC optical coupling device: the first one provides an optical isolator with relative input and output lenses which collimate and focus, thus avoiding possible instability of the SLED caused by back-reflections, due to the fact that the optical isolator allows only the unidirectional propagation of the optical signal. An alternative to this solution is represented by the insertion of a mode-converter, achievable with a surface aspherical lens to reduce the aberrations, which is inserted between the SLED and the input to the integrated waveguide.

[0057] The WG waveguide comprises an optical input - input port - defined by a first MMI 1×3 splitter (beam splitter) and three second MMI 1×2 splitters operatively coupled with the first splitter.

[0058] The second MMI 1×2 splitters are configured to connect the first MMI 1×3 splitter with a relative MIOC and this latter with a relative hybridized or realized in the FOG-PIC PD photodiode.

[0059] The optical signal after passing through the MMI 1x3 is divided into three equal light beams and subsequently each of the three light beams is addressed to a respective MIOC. The second splitters divide the light beam returning from the MIOC by directing half of it to a relative PD photodiode.

[0060] It is evident that the second splitters propagate the light signals returning from the MIOC both towards the relative PD photodiode and back towards the same Lsour source. Especially when the intensity of the light signal is relevant, the isolator isolates the light source from these signals.

[0061] Preferably, the FOG gyroscope includes three MIOCs with three relative multi-turns optical fibers coils so as to form a triaxial gyroscope.

[0062] Therefore, an output and input port is defined in the PIC in order to couple the same PIC to at least one MIOC.

[0063] Each MIOC has two fiber outputs which are operatively connected to the opposite ends of a multi-turns fiber coil, and then the two optical signals are injected onto both ends of a coil, by running on it clockwise and counterclockwise. After passing through the detection coil, the waves in the clockwise and counterclockwise direction, recombine themselves in MIOC and the interference signal so generated is subsequently detected by the respective photodiode after its propagation up to the respective MMI 1×2 optical splitter.

[0064] In a rotary reference system, an event known as the Sagnac effect causes the effective optical path through the circuit to increase in one direction of travel in the coil and to decrease for the other one.

[0065] The resulting phase shift between the two optical components at the output is formulated as follows:

[00001]$\phi =\frac{2\pi RL}{\lambda c}\Omega$

where R is the radius of the optical fiber coil, L is the total length of the fiber in the circuit, λ is the wavelength of the vacuum of the source radiation, c is the speed of light and Ω is the rotation speed. The phase ϕ is known as the Sagnac phase shift. In order to achieve a high degree of accuracy, the two paths experienced by the two optical beams must be identical when the gyroscope is in a stationary, non-rotating reference system, that is, the system must show reciprocity. From the present description it is evident that the propagation of the light signals exiting the PIC takes place by means of an optical fiber, therefore for all the components described above as operationally interconnected this occurs by means of a suitable optical fiber.

[0066] The output of the MMI 1×2 is coupled to a Fiber Array - defining an output and input port being crossed by the light signal in both directions - with three channels made of polarization-maintaining optical fibers, these three fibers being joined to the input fiber of three MIOCs (Multifunctional Integrated Optical Circuit), one MIOC for each axis. Each MIOC has two fiber outputs which are spliced to the fiber coil outputs, so that the two optical signals are input signals of the optical fiber coil.

[0067] Preferably, the waveguide technology used to realize the device of the present invention is based on germanium-doped silicon base. The base material of the waveguide Ge:SiO2 and the coating layer are deposited and modeled. The manufacture is performed on silicon wafers with silicon oxide acting as a lower coating. The interferometer sensor defined by the PD photodiode is directly integrated on the chip, preferably, by means of a hybrid integration platform.

[0068] Therefore, each photodiode is coupled to a relative output port of the PIC.

[0069] With a dedicated process, developed for the integration of the PD, it is possible to create a cavity inside the chip housing the PD in the correct position, in order to align the waveguide with the sensitive area of the PD. The TEC, placed at the base of the chip, has preferably two functions: to achieve the thermal control by improving the thermal performance of the device and mechanically supporting all cited Lsour, OC, WG components.

[0070] Although the proposed structure is of multifunctional architecture, it is assembled through the automatic assembly line, and therefore it is economical in its implementation.

[0071] Preferably, the waveguide technology used to realize the device of the present invention is based on germanium-doped silicon, therefore, it is a passive waveguide, unlike the prior art in which the waveguide is active and therefore it is erbium-doped (Er.sup.+3), which leads to an enormous saving. The structure of the waveguides inside the chip is obtained by manufacturing on a known silicon wafer, preferably with a silicon oxide layer (Bottom Cladding), upon which the Ge:SiO2 (core) is deposited and finally BPTEOS, acronym for boron-phosphor-silicate glass (top cladding).

[0072] The Bottom and the Cladding have the function of confinement of the light beam, whereas the core has the function of transmitting the light beam.

[0073] The waveguides made on the chip, indicated with WG in FIG. 2 are continuous transmission means which do not require fusion joints between them, but only couplings at the input and output of WG.

[0074] At the input, the coupling in the guide is made in air, i.e. there is no mechanical connection between the OC coupling device and the guide, whereas at the output the optical coupling to one, two or three waveguides is realized through the use of an FA, an acronym for Fiber array. This last component is known per se and includes as many channels as the axes which the complete FOG gyroscope is expected to have. For example, if the gyroscope is monoaxial, then FA includes only one channel, and vice versa, if the gyroscope is triaxial, FA includes three channels. The three-channel FA is a single rigid block with three v-grooves in which three polarization-maintaining fibers are housed, aligned and bonded.

[0075] The manufacturing process of the semi-finished product with hybridized photodiodes comprises the steps indicated below: [0076] forming the waveguides, according to methods known per se, [0077] dry etching the recesses for the photodiodes and coupling facets.

[0078] Inside the PIC, the three PD photodiodes are preferably hybridized directly on the chip so creating a cavity inside the chip to house the three PDs and couple them to the WG waveguides as indicated in FIG. 1. Further steps for optimizing the quality of the chip facets are preferably obtained through the following processing steps: [0079] CMP (Chemical Mechanical Polishing) and Dicing (thinning) [0080] Lapping.

[0081] After having manufactured the PIC and improved the quality of the input and output facets, the realization of the semi-finished product preferably consists of the following steps: [0082] Die ATTACH of TEC inside the package [0083] DIE ATTACH of PIC on TEC [0084] DIE ATTACH of SLED on TEC [0085] DIE ATTACH of PDs in the cavities of PIC [0086] Wire bonding [0087] DIE ATTACH of the optical isolator on TEC [0088] Active alignment and bonding of FA at the output of WG [0089] Active alignment and bonding on TEC of Clens and Flens lenses [0090] Fixing a lid to make a closed package.

[0091] The semi-finished product thus formed is, by fusion splicing, coupled to MIOC of each one of the one or two or three axes.

[0092] The number of optical components is low, so it is easy to debug, robust and with high reliability, in fact for assembling a complete triaxial FOG with the introduction of the present invention, it is possible to reduce the number of junctions in total fusion just to 9, in the case of a triaxial gyroscope: [0093] A joint between FA of PIC and MIOC (considering three axes if the number of joints becomes equal to 3), [0094] Two joints between MIOC and the output fibers of each coil (by considering three axes, the number of joints becomes equal to 6).

[0095] All in all, for assembling a triaxial optical fiber gyroscope with the semi-finished product, it is therefore necessary to make only 9 joints.

[0096] The present invention also finds application in the space field, and its simple architecture with a reduced number of components simplifies the space use thanks to the realization of an airtight packaging and to the use of metalized optical fiber. A completely airtight system can be realized by using an FA with metalized optical fiber.

[0097] For space applications it is also important to take into account the RIA (Attenuation Induced by Radiations) which depends on the wavelength and is greater than the shortest wavelength, so therefore the use of a SLED source of about 1550 nm, rather than of a 980 nm laser, leads to reduction of RIA limits.

[0098] The performance of FOG realized by means of the S device described in the present invention are also improved thanks to the stability of PER (Polarization Extinction Ratio) as the operating temperature of the system changes, since the light at the output of SLED is polarized, and the chip, FA, MIOC and the coils are all devices used to maintain the polarization.

[0099] Implementation variants of the non-limiting example described are possible, without however departing from the scope of protection of the present invention, including all the embodiments equivalent for a person skilled in the art, according to the content of the claims.

[0100] From the above description the person skilled in the art is able to realize the object of the invention without introducing further construction details.