Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus

Abstract

The sputtering cathode has a tubular shape having a pair of long sides facing each other in cross-sectional shape, has a sputtering target whose erosion surface faces inward, and a magnetic circuit is provided along the sputtering target. The pair of long sides are constituted by rotary targets each having a cylindrical shape. The rotary target is internally provided with a magnetic circuit and configured to allow the flow of cooling water. The magnetic circuit is provided parallel to the central axis of the rotary target and has a rectangular cross-sectional shape having a long side perpendicular to the radial direction of the rotary target.

Claims

1. A sputtering cathode assembly, comprising: a pair of long-side portions each comprising a hollow cylindrical sputtering target supported by a shaft for rotation about a longitudinal central axis thereof, with the long-side portions being arranged parallel to each other and opposing each other across an interior region of the sputtering cathode assembly; a pair of short-side portions, with each of the pair of short-side portions extending between the pair of long-side portions near respective ends thereof and being arranged perpendicularly to the long-side portions and opposing each other across the interior region of the sputtering cathode assembly, the short-side portions each having a rectangular cross-section taken at a lengthwise central portion thereof; a long-side permanent magnet disposed within the hollow cylindrical sputtering target comprising each of the long-side portions, with each of the long-side permanent magnets extending lengthwise within its associated hollow cylindrical sputtering target with a north pole disposed toward one side of the associated hollow cylindrical sputtering target and a south pole disposed toward an opposite side of the associated hollow cylindrical sputtering target; a set of short-side permanent magnets associated with each of the short-side portions on a side thereof that is distal relative to the interior region of the sputtering cathode assembly, with 1) a first short-side permanent magnet of each set having a north pole that faces the associated short-side portion and a south pole that faces away from the associated short-side portion, and 2) a second short-side permanent magnet of each set having a south pole that faces the associated short-side portion and a north pole that faces away from the associated short-side portion; and a magnetically conductive yoke associated with each set of short-side permanent magnets, with the magnetically conductive yoke extending between the poles of the first and second short-side permanent magnets of each set that face away from the associated short-side portion; wherein A) 1) the north poles of the long-side permanent magnets and, collectively, the short-side permanent magnets that have their north poles facing their associated short-side portions are all disposed toward a first, upper side of the sputtering cathode assembly; and 2) the south poles of the long-side permanent magnets and, collectively, the short-side permanent magnets that have their south poles facing their associated short-side portions are all disposed toward a second, lower side of the sputtering cathode assembly; or B) 1) the south poles of the long-side permanent magnets and, collectively, the short-side permanent magnets that have their south poles facing their associated short-side portions are all disposed toward the first, upper side of the sputtering cathode assembly; and 2) the north poles of the long-side permanent magnets and, collectively, the short-side permanent magnets that have their north poles facing their associated short-side portions are all disposed toward the second, lower side of the sputtering cathode assembly.

2. The sputtering cathode assembly according to claim 1, wherein the long-side permanent magnets are supported for rotation relative to the longitudinal central axes of the hollow cylindrical sputtering targets.

3. The sputtering cathode assembly according to claim 2, wherein the long-side permanent magnets are supported for rotation independently of rotation of the hollow cylindrical sputtering targets.

4. The sputtering cathode assembly according to claim 1, wherein ends of the short-side portions are shaped to conform to the respective ends of the hollow cylindrical sputtering targets.

5. The sputtering cathode assembly according to claim 4, wherein ends of the short-side portions are concavely rounded in a manner that corresponds to the cylindrical shape of the hollow cylindrical sputtering targets.

6. The sputtering cathode assembly according to claim 4, wherein ends of the hollow cylindrical sputtering targets are chamfered and the respective ends of the short-side portions are correspondingly chamfered.

7. The sputtering cathode assembly according to claim 1, further comprising a first anode disposed near the second, lower side thereof.

8. The sputtering cathode assembly according to claim 1, further comprising a light-blocking shield disposed near the first, upper side thereof.

9. The sputtering cathode assembly according to claim 8, wherein the light-blocking shield is formed from a conductor and is electrically connected to the first anode so as to function as a second anode.

10. A shared-target sputtering cathode assembly, comprising: a left long-side portion, a right long-side portion, and a central long-side portion, with each long-side portion comprising a hollow cylindrical sputtering target supported by a shaft for rotation about a longitudinal central axis thereof, with the long-side portions being arranged parallel to each other and with the left long-side portion opposing the central long-side portion across a left interior region of the sputtering cathode assembly and the right long-side portion opposing the central long-side portion across a right interior region of the sputtering cathode assembly; a first pair of short-side portions, with each of the first pair of short-side portions extending between the left long-side portion and the central long-side portion near respective ends thereof and being arranged perpendicularly to the left and central long-side portions and opposing each other across the left interior region of the sputtering cathode assembly, the first pair of short-side portions each having a rectangular cross-section taken at a lengthwise central portion thereof; a second pair of short-side portions, with each of the second pair of short-side portions extending between the right long-side portion and the central long-side portion near respective ends thereof and being arranged perpendicularly to the right and central long-side portions and opposing each other across the right interior region of the sputtering cathode assembly, the second pair of short-side portions each having a rectangular cross-section taken at a lengthwise central portion thereof; first and second long-side permanent-magnet members disposed within respective ones of the hollow cylindrical sputtering target comprising each of the left and right long-side portions, with each of the first and second long-side permanent-magnet members extending lengthwise within its associated hollow cylindrical sputtering target with a north pole disposed toward one side of the associated hollow cylindrical sputtering target and a south pole disposed toward an opposite side of the associated hollow cylindrical sputtering target; a third long-side permanent-magnet member disposed within the hollow cylindrical sputtering target comprising the central long-side portion, with the third long-side permanent-magnet member extending lengthwise along its associated hollow cylindrical sputtering target with a north pole disposed toward one side of the associated hollow cylindrical sputtering target and a south pole disposed toward an opposite side of the associated hollow cylindrical sputtering target; a first pair of sets of short-side permanent magnets associated with respective ones of the first pair of short-side portions on sides thereof that are distal relative to the left interior region of the sputtering cathode assembly, with 1) a first short-side permanent magnet of each set among said first pair of sets having a north pole that faces the associated short-side portion and a south pole that faces away from the associated short-side portion, and 2) a second short-side permanent magnet of each set among said first pair of sets having a south pole that faces the associated short-side portion and a north pole that faces away from the associated short-side portion; a second pair of sets of short-side permanent magnets associated with respective ones of the second pair of short-side portions on sides thereof that are distal relative to the right interior region of the sputtering cathode assembly, with 1) a first short-side permanent magnet of each set among said second pair of sets having a north pole that faces the associated short-side portion and a south pole that faces away from the associated short-side portion, and 2) a second short-side permanent magnet of each set among said second pair of sets having a south pole that faces the associated short-side portion and a north pole that faces away from the associated short-side portion; a first pair of magnetically conductive yokes, with 1) one magnetically conductive yoke among said first pair of magnetically conductive yokes being associated with each set of short-side permanent magnets among said first pair of sets of short-side permanent magnets, and 2) with each magnetically conductive yoke among said first pair of magnetically conductive yokes extending between the poles of the first and second short-side permanent magnets of a respective set of short-side permanent magnets, among the first pair of sets of short-side permanent magnets, that face away from the associated short-side portion; and a second pair of magnetically conductive yokes, with 1) one magnetically conductive yoke among said second pair of magnetically conductive yokes being associated with each set of short-side permanent magnets among said second pair of sets of short-side permanent magnets, and 2) with each magnetically conductive yoke among said second pair of magnetically conductive yokes extending between the poles of the first and second short-side permanent magnets of a respective set of short-side permanent magnets, among the second pair of sets of short-side permanent magnets, that face away from the associated short-side portion; wherein A) 1) the north poles of the first, second, and third long-side permanent magnet members and, collectively, the short-side permanent magnets that have their north poles facing their associated short-side portions are all disposed toward a first, upper side of the sputtering cathode assembly; and 2) the south poles of the first, second, and third long-side permanent magnet members and, collectively, the short-side permanent magnets that have their south poles facing their associated short-side portions are all disposed toward a second, lower side of the sputtering cathode assembly; or B) 1) the south poles of the first, second, and third long-side permanent magnet members and, collectively, the short-side permanent magnets that have their south poles facing their associated short-side portions are all disposed toward the first, upper side of the sputtering cathode assembly; and 2) the north poles of the first, second, and third long-side permanent magnet members and, collectively, the short-side permanent magnets that have their north poles facing their associated short-side portions are all disposed toward the second, lower side of the sputtering cathode assembly.

11. The shared-target sputtering cathode assembly according to claim 10, wherein the third long-side permanent magnet member comprises a pair of separate magnets located on opposite sides of the longitudinal central axis of the hollow cylindrical sputtering target comprising the central long-side portion and extending longitudinally along the hollow cylindrical sputtering target comprising the central long-side portion.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0047] FIG. 1 This is a longitudinal sectional view showing a sputtering device according to a first embodiment of this invention.

[0048] FIG. 2 This is a plan view showing a sputtering cathode assembly in the sputtering device according to the first embodiment of this invention.

[0049] FIG. 3 This is a longitudinal sectional view showing the manner in which plasma is generated near the surface of each sputtering target in the sputtering device according to the first embodiment of this invention.

[0050] FIG. 4 This is a plan view showing the manner in which plasma is generated near the surface of each sputtering target in the sputtering device according to the first embodiment of this invention.

[0051] FIG. 5 This is a longitudinal sectional view showing a method of forming a thin film on a substrate with the sputtering device according to the first embodiment of this invention.

[0052] FIG. 6 This is a longitudinal sectional view showing a method of forming a thin film on a substrate with the sputtering device according to the first embodiment of this invention.

[0053] FIG. 7 This is a longitudinal sectional view showing a method of forming a thin film on a substrate with the sputtering device according to the first embodiment of this invention.

[0054] FIG. 8 This is a longitudinal sectional view showing a method of forming a thin film on a substrate with the sputtering device according to the first embodiment of this invention.

[0055] FIG. 9 This is a longitudinal sectional view showing a method of forming a thin film on a substrate with the sputtering device according to the first embodiment of this invention.

[0056] FIG. 10 This is a plan view showing the structure of a sputtering cathode and an anode as an example of the sputtering device according to the first embodiment of this invention.

[0057] FIG. 11 This is a plan view showing a sputtering cathode constituting a sputtering cathode assembly in a sputtering device according to a second embodiment of this invention.

[0058] FIG. 12 This is a longitudinal sectional view showing a sputtering device according to a third embodiment of this invention.

[0059] FIG. 13 This is a plan view showing a sputtering cathode assembly in a sputtering device according to the third embodiment of this invention.

[0060] FIG. 14 This is a longitudinal sectional view showing a sputtering device according to a fourth embodiment of this invention.

[0061] FIG. 15 This is a plan view showing a sputtering cathode in a sputtering device according to the fourth embodiment of this invention.

[0062] FIG. 16 This is a cross-sectional view along the line W-W in FIG. 15.

[0063] FIG. 17 This is a cross-sectional view serving to describe the angles of inclination of permanent magnets provided within the rotary targets of a sputtering cathode in the sputtering device according to the fourth embodiment of this invention.

[0064] FIG. 18 This is a plan view showing a sputtering cathode in a sputtering device according to a fifth embodiment of this invention.

[0065] FIG. 19 This is a longitudinal sectional view showing a sputtering device according to a sixth embodiment of this invention.

[0066] FIG. 20 This is a plan view showing a sputtering cathode in the sputtering device according to the sixth embodiment of this invention.

[0067] FIG. 21 This is a longitudinal sectional view showing a sputtering device according to a seventh embodiment of this invention.

[0068] FIG. 22 This is a perspective view showing a sputtering target in a sputtering cathode in the sputtering device according the seventh embodiment of this invention.

[0069] FIG. 23 This is a schematic drawings showing voltage pulse waveforms for a pulse power supply in a sputtering device according to an eighth embodiment of this invention.

MODE FOR CARRYING OUT THE INVENTION

[0070] Hereafter, modes for carrying out the invention (hereinafter referred to as embodiments) will be described with reference to the drawings.

First Embodiment

[0071] [Sputtering Device]

[0072] FIGS. 1 and 2 are a longitudinal cross-sectional view and a plan view showing a sputtering device according to the first embodiment, which show the configuration in the vicinity of a sputtering cathode assembly provided inside a vacuum vessel of the sputtering device. FIG. 1 is a cross-sectional view along the line X-X in FIG. 2.

[0073] As shown in FIG. 1 and FIG. 2, in this sputtering device, a plurality of sputtering cathodes are arranged in parallel on a horizontal plane, and a sputtering cathode assembly is formed by these sputtering cathodes. The number of sputtering cathodes constituting the sputtering cathode assembly is selected as appropriate, in accordance with the size of the substrate on which the film is to be formed, the method with which the film is to be formed, and the like. In FIG. 1 and FIG. 2, only one mutually adjacent pair of sputtering cathodes 1 and 2 is shown, by way of example, but the there is no limitation to this. The spacing between the sputtering cathodes 1 and 2 is selected as appropriate, in accordance with the size of the substrate on which the film is to be formed and the method with which the film is to be formed. If three or more sputtering cathodes constitute the sputtering cathode assembly, the spacing between the sputtering cathodes is generally equal, but this does not necessarily have to be equal, and in such cases, the spacing is selected as required.

[0074] The sputtering cathode 1 has: a sputtering target 10 having a rectangular tubular shape having a rectangular cross-section and erosion surfaces facing inward, permanent magnets 20 provided outside the sputtering target 10, and a yoke 30 provided outside the permanent magnets 20. The sputtering target 10, the permanent magnets 20, and the yoke 30 form the sputtering cathode 1. The sputtering cathode 1 is generally fixed to the vacuum vessel in an electrically insulated manner. A magnetic circuit is formed by the permanent magnets 20 and the yoke 30. The polarities of the permanent magnets 20 are as shown in FIG. 1, but the polarities may also be respectively the exact opposites. A cooling backing plate is preferably provided between the sputtering target 10 and the permanent magnets 20, and cooling water, for example, flows in a flow path provided inside the backing plate. An anode 40 having an L-shaped cross-section is provided in the vicinity of the lower end of a rectangular parallelepiped space surrounded by the sputtering target 10 so that the erosion surface of the sputtering target 10 is exposed. This anode 40 is generally connected to the grounded vacuum vessel. Furthermore, a light blocking shield 50 having an L-shaped cross-section is provided in the vicinity of the upper end of the rectangular parallelepiped space surrounded by the sputtering target 10 so that the erosion surface of the sputtering target 10 is exposed. The light blocking shield 50 is formed from a conductor, and typically from a metal. The light blocking shield 50 also serves as an anode and is generally connected to the grounded vacuum vessel, in the same manner as the anode 40. An auxiliary magnetic pole 55 having an L-shaped cross section is provided between the light blocking shield 50 and the sputtering target 10, so as to expose the erosion surface of the sputtering target 10. The auxiliary magnetic pole 55 serves to prevent magnetic force lines formed by the magnetic circuit, which is formed by the permanent magnets 20 and the yoke 30, from leaking into the space above the sputtering cathode 1, where the film formation is to be performed, and the arrangement of this magnetic pole is selected so as to cancel out magnetic force lines that leak above the sputtering cathode 1.

[0075] The sputtering cathode 2 is the same as the sputtering cathode 1 except that the polarities of the permanent magnets 20 are opposite to the polarities of the permanent magnets 20 of the sputtering cathode 1 as shown in FIG. 1. The same is true in cases where there are other sputtering cathodes, with a pair of mutually adjacent sputtering cathodes being mutually identical, except that the permanent magnets 20 have mutually opposite polarities, and having a mutually identical orientation. Since the polarities of the permanent magnets 20 in the pair of mutually adjacent sputtering cathodes are thus mutually opposite, due to the magnetic force lines formed by the magnetic circuits, which are formed by the permanent magnets 20 and the yokes 30, when a pair of AC sputtering powers are applied to both sputtering cathodes, as shown in FIG. 1, plasma moving to the adjacent electrode is confined to the space below the sputtering cathode assembly, and plasma leakage to the space in which the film formation above the sputtering cathode assembly is performed can be effectively prevented. Further, a separate auxiliary magnetic pole may be used in the lower space to make the plasma movement to the adjacent sputtering cathode more effective.

[0076] As shown in FIG. 2, where a is the distance between a pair of mutually facing long-side portions of the sputtering target 10 of each sputtering cathode constituting the sputtering cathode assembly, and b is the distance between a pair of mutually facing short-side portions of the sputtering target 10, b/a is selected to be 2 or more, and is generally selected to be 40 or less, but is not limited thereto. a is generally selected from 50 mm to 150 mm, but is not limited to this thereto.

[0077] As shown in FIG. 1, in this sputtering device, film formation is performed on a substrate S (film-receiving body), which is held by a non-illustrated predetermined transport mechanism, in a space above the sputtering cathode assembly. The film formation may be performed while the substrate S is being moved with respect to the sputtering targets 10 of the sputtering cathodes, in a direction traversing the long-side portions of the sputtering targets 10, typically in a direction parallel to the upper end faces of the sputtering targets 10 and perpendicular to the long-side portions of the sputtering targets 10, and typically at a constant speed, or may be performed in a stationary state with the substrate S stationary above the sputtering cathode assembly. The width of the film formation region on the substrate S, in the direction parallel to the long-side portion of the sputtering target 10, is selected to be less than b so that, during film formation, this lies between the pair of mutually facing short-side portions on the inside of the sputtering target 10. If the film formation is to be performed on the entire surface of the substrate S, the width of the film formation region of the substrate S coincides with the width of the substrate S. The substrate S may basically be of any kind, and is not particularly limited. The substrate S may be in the form of a long film, wound on a roll, as used in so-called roll-to-roll processes.

[0078] [Film Forming Method Using the Sputtering Device]

[0079] Before film formation, the substrate S is located at a position sufficiently far from the top of the space surrounded by the sputtering target 10.

[0080] After the vacuum vessel is evacuated to a high vacuum by a vacuum pump, Ar gas is introduced, as a sputtering gas, into the space surrounded by the sputtering target 10, and an AC voltage necessary for plasma generation is applied between the anodes 40 and the sputtering cathodes 1 and 2, from a predetermined power supply. Typically, the anodes 40 are grounded, and a high AC voltage (for example, 400 V) is applied between the sputtering cathode 1 and the sputtering cathode 2. Thus, while a negative high voltage is applied to the sputtering cathode 1, a plasma 60 is generated in the vicinity of the surface of the sputtering target 10, which circulates along the inner surface of the sputtering target 10, as shown in FIGS. 3 and 4. The plasma 60 is not generated while a negative high voltage is not applied to the sputtering cathode 1. Furthermore, while a negative high voltage is applied to the sputtering cathode 2, a plasma 60 is generated in the vicinity of the surface of the sputtering target 10 of the sputtering cathode 2, which circulates along the inner surface of the sputtering target 10 of the sputtering cathode 2. The plasma 60 is not generated while a negative high voltage is not applied to the sputtering cathode 2. As shown in FIG. 3 and FIG. 4, as a result of sputtering the sputtering target 10 with Ar ions in the plasma 60 circulating along the inner surface of the sputtering target 10, atoms comprised by the sputtering target 10 are ejected upward from the space surrounded by the sputtering target 10. At this time, atoms are ejected from all parts of the erosion surface of the sputtering target 10 near the plasma 60, but atoms that are ejected from the erosion surface of the short side portion of the inside of the sputtering target 10 are essentially not used for film formation. Therefore, horizontal shielding plates may be provided above the sputtering target 10 so as to shield both end portions, in the long side direction, of the sputtering target 10, so that atoms ejected from the erosion surfaces of the short-side portions of the sputtering target 10 do not reach the substrate S during film formation. Alternatively, the width b of the sputtering target 10 in the longitudinal direction may be made sufficiently greater than the width of the substrate S, so that atoms ejected from the erosion surfaces on the short-side portions of the sputtering target 10 do not reach the substrate S during film formation. As shown in FIG. 5, as a result of some of the atoms ejected from the sputtering target 10 being shielded by the light blocking shield 50, sputtered particle fluxes 70, 80 are produced from the erosion surfaces of the long-side portions of the sputtering target 10. The sputtered particle fluxes 70, 80 have substantially uniform intensity distributions in the longitudinal direction of the sputtering target 10. Meanwhile, while a negative high voltage is applied to the sputtering cathode 2, a plasma 60 is generated in the vicinity of the surface of the sputtering target 10, which circulates along the inner surface of the sputtering target 10, as shown in FIGS. 3 and 4, and as a result, sputtering is performed by the sputtered particle fluxes 70, 80. The plasma 60 is not generated while a negative high voltage is not applied to the sputtering cathode 1, and sputtering does not occur. That is to say, as can be understood from the foregoing description, the sputtering cathode 1 and the sputtering cathode 2 are used alternately.

[0081] First, a case in which film formation is performed while moving the substrate S will be described.

[0082] When stable sputtered particle fluxes 70, 80 from the sputtering targets 10 of the sputtering cathodes 1, 2 have been produced, film formation is performed with the sputtering particle fluxes 70, 80, while moving the substrate S with respect to the sputtering target 10 of the sputtering cathode 1 at a constant speed, in the direction traversing the long-side portions of the sputtering target 10. When the substrate S moves above the space surrounded by the sputtering target 10, first, the sputtered particle flux 70 is incident on the substrate S, and film formation begins. FIG. 6 shows the situation at the point in time when the leading edge of the substrate S has approached above the vicinity of the center of the space surrounded by the sputtering target 10. At this point in time, the sputtered particle flux 80 does not contribute to film formation. When the substrate S moves further, and the sputtered particle flux 80 is incident thereon, the sputtered particle flux 80 also contributes to film formation, in addition to the sputtered particle flux 70. When the substrate S moves further and reaches the sputtering cathode 2, film formation is similarly carried out by the sputtered particle fluxes 80 and 70 produced with the sputtering target 10 of the sputtering cathode 2. FIG. 7 shows the situation in which the substrate S has moved further so as to have moved directly above the sputtering cathode assembly. As shown in FIG. 7, the sputtered particle fluxes 70, 80 produced with the sputtering targets 10 of the sputtering cathodes 1 and 2 are incident on the substrate S, whereby film formation is performed. The substrate S is moved in this manner while film formation is performed. Then, as shown in FIG. 8, the substrate S is fully distanced from above the sputtering cathode assembly, moving to a position at which the sputtered particle fluxes 70 and 80 are not incident on the substrate S. A thin film F is formed on the substrate S in this manner.

[0083] Next, a case in which film formation is performed without moving the substrate S, which is to say, a case in which static film formation is performed, will be described.

[0084] In this case, it is assumed that the substrate S has a size that covers a plurality of sputtering cathodes, as shown in FIG. 9. A shutter (not shown) for preventing the sputtered particle fluxes 70, 80 from being incident on the substrate S can be inserted in the space between the substrate S and the sputtering cathodes. At a point in time at which, with the shutter inserted into the space between the substrate S and the sputtering cathodes, stable sputtered particle fluxes 70 and 80 are produced from the sputtering cathodes, the shutter is moved out of the space between the substrate S and the sputtering cathodes. At this point in time, the sputtered particle fluxes 80 and 70 are incident on the substrate S, and film formation begins. By performing sputtering in this manner for the required time, a thin film F is formed on the substrate S by way of static film formation. Here, the distance between the opposed target surfaces, the distance between the end of target and the substrate, and the spacing between adjacent cathodes are set to optimum values.

[0085] [Example of the Sputtering Cathode and Anode in the Sputtering Device]

[0086] As shown in FIG. 10, the sputtering target 10 is formed from four plate-shaped sputtering targets 10a, 10b, 10c, and 10d, the permanent magnet 20 is formed from four plate-shaped or rod-shaped permanent magnets 20a, 20b, 20c, and 20d, and the yoke 30 is formed from four plate-shaped yokes 30a, 30b, 30c, and 30d. Backing plates 90a, 90b, 90c, and 90d are respectively inserted between the sputtering targets 10a, 10b, 10c, and 10d and the permanent magnets 20a, 20b, 20c, and 20d. The distance between the sputtering target 10a and the sputtering target 10c is 80 mm, the distance between the sputtering target 10b and the sputtering target 10d is 200 mm, and the height of the sputtering targets 10a, 10b, 10c, and 10d is 80 mm.

[0087] Four plate-shaped anodes 100a, 100b, 100c, and 100d are provided outside of the yokes 30a, 30b, 30c, and 30d. The anodes 100a, 100b, 100c, and 100d are connected to a grounded vacuum vessel, together with an anode 40.

[0088] As described above, according to the first embodiment, a plurality of sputtering cathodes having the sputtering target 10 with a rectangular tubular shape having a rectangular cross-section, and having erosion surfaces facing inward, are arranged in parallel on a horizontal plane, and the polarities of the permanent magnets 20 of two mutually adjacent sputtering cathodes are mutually opposite, whereby the following various advantages can be obtained. That is to say, because sputtering can be performed using a plurality of sputtering cathodes 1 arranged in parallel, the thin film F can be formed on a substrate S having a large area, at a high speed. Furthermore, the plasma 60 can be generated circulating around the inner surface of the sputtering target 10 on the erosion surface side of the sputtering target 10. Therefore, since the density of the plasma 60 can be increased, the film forming speed can be sufficiently increased. Further, since the location at which the majority of the plasma 60 is generated is limited to the vicinity of the surface of the sputtering target 10, in combination with the provision of the light blocking shield 50, the possibility of damage occurring due to the irradiation of the substrate S with light emitted from the plasma 60 can be minimized. Furthermore, the magnetic force lines generated by the magnetic circuit, which is formed by the permanent magnets 20 and the yoke 30, are basically restricted to the sputtering cathode, and moreover, the polarities of the permanent magnets 20 of the two mutually adjacent sputtering cathodes are mutually opposite, and the auxiliary magnetic pole 55 is provided, whereby, among the magnetic force lines generated by the magnetic circuit, the downwardly oriented magnetic force lines are confined in the space below the sputtering cathode assembly, and are not oriented toward the substrate S, as shown in FIG. 1, and there is no risk of the substrate S being damaged by the plasma 60 or electron rays. Furthermore, since the film formation is carried out using the sputtered particle fluxes 70, 80 produced with the pair of mutually facing long-side portions of the sputtering target 10, damage due to bombardment of the substrate S by reflected high energy particles of the neutral sputtering gas can be minimized. Further, because the sputtered particle fluxes 70, 80 produced with the pair of mutually facing long-side portions of the sputtering target 10 have a uniform intensity distribution in a direction parallel to the long-side portions, in combination with performing film formation while moving the substrate S at a constant speed in a direction traversing these long-side portions, for example, in a direction perpendicular to these long-side portions, variations in the film thickness of the thin film F formed on the substrate S can be reduced and, for example, variations in the film thickness can be reduced to 5% or less. The sputtering device is preferably used in film formation for electrode materials or the like, in the manufacture of various devices such as semiconductor devices, organic solar cells, inorganic solar cells, liquid crystal displays, organic EL displays, films and the like.

Second Embodiment

[0089] [Sputtering Device]

[0090] The sputtering device according to the second embodiment differs from the sputtering device according to the first embodiment in that the sputtering target 10 shown in FIG. 11 is used. That is to say, as shown in FIG. 11, the sputtering target 10 includes a pair of parallel mutually facing long-side portions and semicircular portions connected to the long-side portions. The permanent magnet 20 provided outside the sputtering target 10 and the yoke 30 provided outside the permanent magnet 20 have the same shape as the sputtering target 10. The configuration of the sputtering device is otherwise the same as that of the sputtering device according to the first embodiment.

[0091] [Film Forming Method Using the Sputtering Device]

[0092] The film forming method using this sputtering device is the same as that of the first embodiment.

[0093] Advantages similar to those of the first embodiment can be obtained with the second embodiment.

Third Embodiment

[0094] [Sputtering Device]

[0095] FIGS. 12 and 13 are a longitudinal sectional view and a plan view showing a sputtering device according to the third embodiment, and show the configuration in the vicinity of a sputtering cathode assembly provided inside a vacuum vessel of the sputtering device. FIG. 12 is a cross-sectional view along the line Y-Y in FIG. 13.

[0096] As shown in FIG. 12 and FIG. 13, in this sputtering device, a plurality of sputtering cathodes are arranged in parallel on a vertical plane, and a sputtering cathode assembly is formed from these sputtering cathodes. The number of sputtering cathodes constituting the sputtering cathode assembly is selected as appropriate, in accordance with the required film forming speed and the like. In FIG. 12 and FIG. 13, only one mutually adjacent pair of sputtering cathodes 1 and 2 is shown, by way of example, but the there is no limitation to this. The spacing between the sputtering cathodes 1 and 2 is selected as appropriate so that a film can be formed by sputtering, not only with the sputtering cathode 1, but also with the sputtering cathode 2, in the space above the sputtering cathode assembly. If three or more sputtering cathodes constitute the sputtering cathode assembly, the spacing between the sputtering cathodes is generally equal, but this does not necessarily have to be equal, and in such cases, the spacing is selected as required. Other aspects of the sputtering device are the same as those of the first embodiment.

[0097] [Film Forming Method Using the Sputtering Device]

[0098] After the vacuum vessel is evacuated to a high vacuum by a vacuum pump, Ar gas is introduced as a sputtering gas into the space surrounded by the sputtering target 10, and a high DC voltage necessary for plasma generation is generally applied between the anode 40 and the sputtering cathodes from a predetermined power supply. Generally, the anode 40 is grounded and a negative high voltage (for example, 400 V) is applied to the sputtering cathodes. As a result, in the same manner as shown in FIG. 3 and FIG. 4, plasma 60 is generated in the vicinity of the surface of the sputtering target 10, circulating along the inner surface of the sputtering target 10.

[0099] Before film formation, the substrate S is located at a position sufficiently far from the top of the space surrounded by the sputtering target 10.

[0100] As a result of sputtering of the sputtering target 10 with Ar ions in the plasma 60 circulating along the inner surface of the sputtering target 10 of each sputtering cathode, atoms comprised by the sputtering target 10 are ejected upward from the space surrounded by the sputtering targets 10. At this time, atoms are ejected from all parts of the erosion surface of the sputtering target 10 near the plasma 60, but atoms that are ejected from the erosion surface of the short side portions of the inside of the sputtering target 10 are essentially not used for film formation. Therefore, horizontal shielding plates may be provided above the sputtering target 10 so as to shield both end portions, in the long side direction, of the sputtering target 10, so that atoms ejected from the erosion surfaces of the short-side portions of the sputtering target 10 do not reach the substrate S during film formation. Alternatively, the width b of the sputtering target 10 in the longitudinal direction may be made sufficiently greater than the width of the substrate S, so that atoms ejected from the erosion surface of the short-side portion of the sputtering target 10 do not reach the substrate S during film formation. In the same manner as shown in FIG. 5, as a result of some of the atoms ejected from the sputtering target 10 being shielded by the light blocking shields 50, sputtered particle fluxes 70, 80 are produced from the erosion surface of the long-side portions of the sputtering target 10. The sputtered particle fluxes 70, 80 have substantially uniform intensity distributions in the longitudinal direction of the sputtering target 10.

[0101] When stable sputtering particle fluxes 70, 80 are produced from the sputtering cathodes, a film is formed by the sputtered particle fluxes 70, 80, while moving the substrate S with respect to the sputtering targets 10, at a constant speed, in the direction traversing the long-side portions of the sputtering targets 10. When the substrate S moves above the space surrounded by the sputtering target 10, first, the sputtered particle flux 70 is incident on the substrate S, and film formation begins. At the point in time when the leading edge of the substrate S has approached above the vicinity of the center of the space surrounded by the sputtering target 10, the sputtered particle flux 80 does not contribute to film formation. When the substrate S moves further, and the sputtered particle flux 80 is incident thereon, the sputtered particle flux 80 also contributes to film formation, in addition to the sputtered particle flux 70. When the substrate S is moved directly above the space surrounded by the sputtering target 10, the sputtered particle fluxes 70, 80 are incident on the substrate S, whereby film formation is performed. The substrate S is moved further in this manner while film formation is performed. Then, the substrate S is fully distanced from above the space surrounded by the sputtering target 10, moving to a position at which the sputtered particle fluxes 70 and 80 are not incident on the substrate S. A thin film F is formed on the substrate S in this manner.

[0102] According to the third embodiment, a plurality of sputtering cathodes having the sputtering target 10 with a rectangular tubular shape having a rectangular cross-section, and having erosion surfaces facing inward are arranged in parallel on a vertical plane, and the polarities of the permanent magnets 20 of two mutually adjacent sputtering cathodes are mutually opposite, whereby the following various advantages can be obtained. That is to say, because sputtering can be performed using a plurality of sputtering cathodes arranged in parallel on a vertical plane, the thin film F can be formed on the substrate S, at a high speed. Furthermore, the plasma 60 can be generated circulating around the inner surface of the sputtering target 10 on the erosion surface side of the sputtering target 10. Therefore, since the density of the plasma 60 can be increased, the film forming speed can be sufficiently increased. Further, since the location at which the majority of the plasma 60 is generated is limited to the vicinity of the surface of the sputtering target 10, in combination with the provision of the light blocking shield 50, the possibility of damage occurring due to the irradiation of the substrate S with light emitted from the plasma 60 can be minimized. Furthermore, the magnetic force lines generated by the magnetic circuit, which is formed by the permanent magnets 20 and the yoke 30, are basically restricted to the sputtering cathode, and moreover, the polarities of the permanent magnets 20 of the two mutually adjacent sputtering cathodes are mutually opposite, and the auxiliary magnetic pole 55 is provided, whereby, among the magnetic force lines generated by the magnetic circuit, the downwardly oriented magnetic force lines are confined to the space in the vicinity of the sputtering cathode assembly, and are not oriented toward the substrate S, as shown in FIG. 12, and there is no risk of the substrate S being damaged by the plasma 60 or electron rays. Furthermore, since the film formation is carried out using the sputtered particle fluxes 70, 80 produced with the pair of mutually facing long-side portions of the sputtering target 10, damage due to bombardment of the substrate S by reflected high energy particles of the neutral sputtering gas can be minimized. Further, because the sputtered particle fluxes 80, 70 produced with the pair of mutually facing long-side portions of the sputtering target 10 have a uniform intensity distribution in a direction parallel to the long-side portions, in combination with performing film formation while moving the substrate S at a constant speed in a direction traversing these long-side portions, for example, in a direction perpendicular to these long-side portions, variations in the film thickness of the thin film F formed on the substrate S can be reduced and, for example, variations in the film thickness can be reduced to 5% or less. The sputtering device is preferably used in film formation for electrode materials or the like, in the manufacture of various devices such as semiconductor devices, organic solar cells, inorganic solar cells, liquid crystal displays, organic EL displays, films and the like.

Fourth Embodiment

[0103] [Sputtering Device]

[0104] FIGS. 14 and 15 are a longitudinal sectional view and a plan view showing a sputtering device according to the fourth embodiment, and show the configuration in the vicinity of a sputtering cathode provided inside a vacuum vessel of the sputtering device. FIG. 14 is a cross-sectional view along the line Z-Z in FIG. 15. FIG. 16 is a cross-sectional view along the line W-W in FIG. 15.

[0105] As shown in FIGS. 14, 15 and 16, the sputtering device has the sputtering target 10 having a rectangular tubular shape having a rectangular cross-sectional shape (or angular ring shape), and having erosion surfaces facing inward. A pair of mutually facing long-side portions of the sputtering target 10 each comprises cylindrical rotary targets 11, 12, and a pair of mutually facing short-side portions 13, 14 of the sputtering target 10 each have a rectangular cross-sectional shape. The rotary targets 11 and 12 are provided so as to be rotatable about the central axes thereof by a non-illustrated rotation mechanism. Specifically, the rotary targets 11 and 12 are provided with rotary shafts 11a and 12a at both ends thereof, and the rotary targets 11 and 12 are rotated as a result of the rotary shafts 11a and 12a being rotated by the rotation mechanism. The rotational directions of the rotary targets 11 and 12 may be the same as, or opposite to, each other, and are selected as necessary. This is configured so that cooling water can flow through the interior of the rotary cathodes 11, 12 allowing the rotary cathodes 11, 12 to be cooled during use. The short-side portions 13, 14 have heights that are approximately the same as the diameter of the rotary targets 11, 12, for example. Both ends of the short-side portions 13, 14 facing the rotary targets 11, 12 are concavely rounded, corresponding to the cylindrical shape of the rotary targets 11, 12, and are close thereto, to an extent such as does not present a hindrance to the rotation of the rotary targets 11, 12. Permanent magnets 111 and 112 are provided at the interior of the rotary targets 11, 12 at positions parallel to the central axis and radially offset from the central axis. The permanent magnets 111 and 112 have a rectangular cross-sectional shape, the long sides of which are perpendicular to the radial direction of the rotary targets 11 and 12. As shown in FIG. 17, where the angle of inclination of the short sides of the cross-sectional shape of the permanent magnets 111, 112, with respect to the plane including the central axis of the rotary targets 11, 12, is , is 0 degrees or more and less than 360 degrees, and the angle of inclination can be set to an any angle within this range so as to achieve a good balance between increased film forming speed and low damage. In FIG. 14, a case in which =0 degrees is shown as one example. The permanent magnets 111 and 112 are fixed to a member that is independent of the rotary targets 11 and 12 so that, when the rotary targets 11 and 12 rotate, they do not rotate together therewith. The polarities of the permanent magnets 111 and 112 are as shown in FIG. 14, but may be opposite. The permanent magnets 20 are provided on the outside of the pair of mutually facing short-side portions 13 and 14 of the sputtering target 10, and the yokes 30 are provided on the outside of the permanent magnets 20. The polarities of the permanent magnets 20 are as shown in FIG. 16, but the polarities may also be respectively the exact opposites. The sputtering targets 10, the permanent magnets 20, 111 and 112, and the yokes 30 form a sputtering cathode. The sputtering cathode is generally fixed to the vacuum vessel in an electrically insulated manner. A magnetic circuit is formed by the permanent magnets 111, 112, provided inside the rotary targets 11 and 12, the permanent magnets 20, and the yokes 30. Cooling backing plates are preferably provided between the short-side portions 13, 14 and the permanent magnets 20, and cooling water, for example, flows in flow paths provided inside the backing plates. An anode 40 is provided in the vicinity of the lower end of the space surrounded by the sputtering target 10 so that the erosion surface of the sputtering target 10 is exposed. This anode 40 is generally connected to the grounded vacuum vessel. Furthermore, a light blocking shield 50 having an L-shaped cross-section is provided in the vicinity of the upper end of the space surrounded by the sputtering target 10 so that the erosion surface of the sputtering target 10 is exposed. The light blocking shield 50 is formed from a conductor, and typically from a metal. The light blocking shield 50 also serves as an anode and is generally connected to the grounded vacuum vessel, in the same manner as the anode 40. The other aspects are the same as those of the first embodiment.

[0106] [Film Forming Method Using the Sputtering Device]

[0107] The film forming method using this sputtering device is the same as that of the first embodiment, except that sputtering is performed while rotating the rotary targets 11, 12 constituting the pair of mutually facing long-side portions of the sputtering target 10.

[0108] According to the fourth embodiment, in addition to the advantages similar to those of the first embodiment, the pair of mutually facing long-side portions of the sputtering target 10 comprise the rotary targets 11, 12, which allows for advantages in that the usage efficiency of the sputtering target 10 is high and film formation costs can be reduced.

Fifth Embodiment

[0109] [Sputtering Device]

[0110] As shown in FIG. 18, the sputtering device according to the fifth embodiment differs from the fourth embodiment in that both ends of the rotary targets 11, 12 are chamfered (the chamfer angle is, for example, 45 degrees with respect to the central axis of the rotary targets 11, 12), and both ends of the short-side portions 13,14 are also correspondingly chamfered at an angle. The other aspects are the same as those of the fourth embodiment.

[0111] [Film Forming Method Using the Sputtering Device]

[0112] The film forming method using this sputtering device is the same as that of the fourth embodiment.

[0113] Advantages similar to those of the fourth embodiment can be obtained with the fifth embodiment.

Sixth Embodiment

[0114] [Sputtering Device]

[0115] FIGS. 19 and 20 are a longitudinal sectional view and a plan view showing a sputtering device according to a sixth embodiment, and show the configuration in the vicinity of a sputtering cathode provided inside a vacuum vessel of the sputtering device. FIG. 19 is a cross-sectional view along the line V-V in FIG. 20.

[0116] As shown in FIGS. 19 and 20, in this sputtering device, two of the sputtering targets 10 of the sputtering device according to the fourth embodiment are united, with one rotary target being shared, such that the sputtering targets are configured to have three rotary targets 15, 16, 17. The rotational directions of these rotary targets 15, 16, 17 may be the same as, or opposite to, each other, and are selected as necessary. The other aspects are the same as those of the fourth embodiment. Note that four rotary targets may be united, or five or more rotary targets may be united.

[0117] [Film Forming Method Using the Sputtering Device]

[0118] The film forming method using this sputtering device is the same as that of the fourth embodiment.

[0119] According to the sixth embodiment, in addition to the advantages similar to those of the fourth embodiment, advantages are possible in that film formation can be performed efficiently on a substrate S having a large area, and static film formation can also easily be performed. This sixth embodiment is particularly suitable for use in forming an electrode film adjacent to a silicon power generation layer or an organic power generation layer in the manufacture of a device such as a heterojunction silicon solar cell or an organic EL display.

Seventh Embodiment

[0120] [Sputtering Device]

[0121] FIG. 21 is a longitudinal sectional view showing a sputtering device according to a seventh embodiment, and shows the configuration in the vicinity of a sputtering cathode provided inside a vacuum vessel of the sputtering device. Furthermore, FIG. 22 is a perspective view showing the sputtering target 10.

[0122] As shown in FIGS. 21 and 22, the sputtering device has the sputtering target 10 having a rectangular tubular shape having a rectangular cross-sectional shape (or angular ring shape), and having erosion surfaces facing inward. A permanent magnet assembly 20 is provided on the outside of the sputtering target 10, and a yoke 30 is provided on the outside of the permanent magnet assembly 20. The sputtering target 10, the permanent magnet assembly 20, and the yoke 30 form a sputtering cathode. A pair of mutually facing long-side portions 18a and 18b of the sputtering target 10 are formed as mutually parallel flat plates. In contrast, a pair of mutually facing short-side portions 18c and 18d of the sputtering target 10 have shapes which are curved, with respect to a plane or curve including the pair of long-side portions 18a and 18b, forming a curved surface in which the erosion surface is twisted, from one side of the long-side portions 18a, 18b, resulting in a shape in central portions C1 and C2 of the short sides 18c, 18d which is perpendicular to the long-side portions 18a and 18b, in other words, which lies in a horizontal plane, and further extending to the other side of the long-side portions 18a, 18b, forming a curved surface in which the erosion surface is twisted. Other aspects are the same as those of the sputtering cathode in the first embodiment.

[0123] [Film Forming Method Using the Sputtering Device]

[0124] The film forming method using this sputtering device is the same as that of the first embodiment.

[0125] According to the seventh embodiment, in addition to advantages similar to those of the first embodiment, since the sputtering target 10 is formed in the shape described above, advantages are possible in that, when film formation is performed with the short-side portions 18c, 18d arranged in the vertical direction, foreign matter generated during film formation can be prevented from being deposited on the short-side portions 18c, 18d.

Eighth Embodiment

[0126] [Sputtering Device]

[0127] In the eighth embodiment, a pulse power source is used as a power source for applying a voltage required for sputtering between the sputtering cathode and the anode, in the sputtering devices according to the first to seventh embodiments. The voltage pulse waveform of this pulse power supply is shown in FIGS. 23A and B. As shown in FIGS. 23A and B, in this pulse power supply, a voltage pulse of 0 V, or a negative voltage V0, the absolute value of which is about 50 V or less, is applied at a high level, and a negative voltage VL, the absolute value of which is about 100 V or more, is applied at a low level, so that a positive voltage is not applied. By using a pulse waveform for the voltage applied to the sputtering cathode, some or all of the glow discharge during sputtering can be prevented from becoming an arc discharge.

[0128] According to the eighth embodiment, by using a pulse power supply that generates a voltage pulse having the waveform described above, the following advantages are possible. That is to say, according to the findings of the present inventor, if the high level of the voltage pulse is a positive voltage, damage is likely to occur to the substrate S and the thin film F formed on the substrate S, during film formation, as a result of bombarding the substrate S with Ar.sup.+ generated from the Ar gas that is used as a sputtering gas, but by not applying a positive voltage, with a high level voltage pulse of 0 V, or a negative voltage V.sub.0, the absolute value of which is about 50 V or less, and a low level voltage pulse of a negative voltage V.sub.L, the absolute value of which is about 100 V or more, such problems can be eliminated, and a high quality thin film F can be formed without damage. The eighth embodiment is particularly suitable for use in forming an electrode film adjacent to an organic film in the manufacture of an organic device such as an organic solar cell or an organic EL display.

[0129] Embodiments and examples of this invention have been specifically described above, but this invention is not limited to the aforementioned embodiments and examples, and various modifications are possible based on the technical ideas of this invention.

[0130] For example, the numerical values, materials, structures, shapes, and the like given in the aforementioned embodiments and examples are merely examples, and numerical values, materials, structures, shapes, and the like different from these may be used as necessary.

EXPLANATION OF THE SYMBOLS

[0131] 10, 10a, 10b, 10c, 10d: sputtering target; 11, 12, 15 to 17: rotary target; 20, 20a, 20b, 20c, 20d: permanent magnet; 30, 30a, 30b, 30c, 30d: yoke; 40: anode; 50: light blocking shield; 55: auxiliary magnetic pole; 60: plasma; 70, 80: sputtered particle flux; S: substrate.