Manipulator arm, manipulator and carrying device

Abstract

A manipulator arm includes at least one arm body for carrying a to-be-carried object. The arm body is provided with a suction plate for sucking the to-be-carried object, and the suction plate is provided with a plurality of vacuum suction holes. The plurality of vacuum suction holes are uniformly distributed in the entire suction plate.

Claims

1. A manipulator arm, comprising at least one arm body for carrying a to-be-carried object, wherein the arm body is provided with a suction plate for sucking the to-be-carried object, and the suction plate is provided with a plurality of vacuum suction holes; wherein the plurality of vacuum suction holes are uniformly distributed in the entire suction plate; the arm body further comprises a vacuum cavity connected to the plurality of vacuum suction holes; and the arm body further comprises a plurality of channels each in communication the vacuum cavity; the plurality of channels are communicated with the plurality of vacuum suction holes in a one-to-one manner.

2. The manipulator arm according to claim 1, wherein, the suction plate is an anti-static plate made of an anti-static material.

3. The manipulator arm according to claim 1, wherein, a width of the suction plate on the arm body is identical to a width of the arm body.

4. The manipulator arm according to claim 1, wherein, a diameter of the vacuum suction hole is in the range of 0.1 mm0.5 mm.

5. The manipulator arm according to claim 4, wherein a distance between two adjacent vacuum suction holes is in the range of 5 mm10 mm.

6. The manipulator arm according to claim 1, wherein, a distance between two adjacent vacuum suction holes is in the range of 5 mm10 mm.

7. The manipulator arm according to claim 1, wherein, the plurality of vacuum suction holes is uniformly distributed in a matrix on the suction plate.

8. The manipulator arm according to claim 1, wherein, the arm body is a carbon fiber arm body made of a carbon fiber material.

9. A manipulator, comprising the manipulator arm according to claim 1.

10. The manipulator according to claim 9, wherein the manipulator arm is arranged on a body.

11. A carrying device, comprising the manipulator according to claim 9.

12. The manipulator arm according to claim 1, wherein the suction plate is stacked on the arm body.

13. The manipulator arm according to claim 1, wherein the arm body includes a first surface, and each of the plurality of channels extends from the first surface of the arm body inwardly to communicate with the vacuum cavity; the suction plate includes a first surface and an opposite second surface; each of the plurality of vacuum suction holes extends from first surface of the suction plate to the second surface of the suction plate; the first surface of the arm body is in contact with the first surface of the suction plate.

14. The manipulator arm according to claim 13, wherein all of the plurality of vacuum suction holes are communicated with each other only through the vacuum cavity and the plurality of channels in the arm body.

15. The manipulator arm according to claim 13, wherein each of the plurality of vacuum suction holes is communicated with the vacuum cavity through only one channel that corresponding to the each of the plurality of vacuum suction holes.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a side view showing a manipulator arm carrying a substrate provided by some embodiments of the present disclosure;

(2) FIG. 2 is a front view showing a structure of a manipulator provided by some embodiments of the present disclosure;

(3) FIG. 3 is a front view showing a manipulator carrying a substrate provided by some embodiments of the present disclosure;

(4) FIG. 4 is a schematic section view along line A-A in FIG. 2 of the manipulator arm provided by some embodiments of the present disclosure;

(5) FIG. 5 is a schematic view showing a carrying device provided by some embodiments of the present disclosure.

DETAILED DESCRIPTION

(6) In order to make the objects, the technical solutions and the advantages of the embodiments of present disclosure more clear, the embodiments of the present disclosure will be described hereinafter in a clear and complete manner in conjunction with the drawings of the embodiments of the present disclosure. Certainly, the following embodiments are merely a part of, rather than all of, the embodiments of the present disclosure, and based on these embodiments of the present disclosure, a person skilled in the art may obtain other embodiments, which also fall within the protection scope of the present disclosure.

(7) In order to solve the technical problem in the related art that the flexible substrate deforms when the manipulator picks and places the flexible substrate, the present disclosure provides a manipulator arm capable of picking-and-placing the flexible substrate better during manufacturing of the flexible substrate to reduce deformation and increase the product yield.

(8) As shown in FIG. 1 to FIG. 3, a manipulator arm provided by the present disclosure includes at least one arm body 100 for carrying a to-be-carried object, wherein the arm body 100 is provided with a suction plate 200 for sucking the to-be-carried object, and the suction plate 200 is provided with a plurality of vacuum suction holes 300.

(9) In above solutions, the manipulator arm is provided with the flat suction plate 200 to suck the to-be-carried object, and the to-be-carried object may be a substrate for display, a panel film material, etc. When using the manipulator arm provided by the present disclosure to pick and place a to-be-carried object, for example, a flexible substrate 10, since there are many vacuum suction holes 300 on the suction plate 200, a relatively small vacuum pressure may be used to suck the flexible substrate 10 such that the local deformation of the flexible substrate 10 will become small. In addition, since the flexible substrate 10 is supported by the suction plate 200, an overall deformation of the flexible substrate 10 will also become small in comparison with the related arts, thus reducing damages of a thin film transistor (TFT) caused by the deformation or defects generated by the cracking of a thin film encapsulation (TFE) film layer and increasing the product yield of the flexible substrate 10.

(10) According to a manipulator arm provided by the present disclosure in some embodiments, optionally, the suction plate 200 is an anti-static plate made of an anti-static material, and the arm body 100 is a carbon fiber arm body 100 made of a carbon fiber material.

(11) According to the above solutions, the suction plate 200 is made of an anti-static material, which provides an anti-static effect.

(12) In addition, according to a manipulator arm provided by the present disclosure in some embodiments, optionally, a width of the suction plate 200 on the arm body 100 is identical to a width of the arm body 100.

(13) According to the above solutions, the width of the suction plate 200 may be designed to be identical to the width of the corresponding arm body 100 to increase a contact area between the suction plate 200 and the flexible substrate 10.

(14) It should be understood that, in practical applications, a size of the suction plate 200 may also be adjusted according to practical requirements.

(15) In addition, according to a manipulator arm provided by the present disclosure in some embodiments, optionally, an aperture of the vacuum suction hole 300 is in the range of 0.1 mm0.5 mm With the above solutions, since the size of the vacuum suction hole 300 is small, the deformation of the substrate 10 may further be reduced. Certainly, it should be understood that, the above-provided structure is merely an optional structure of the vacuum suction hole 300, and the specific size of the vacuum suction hole 300 in practical applications is not limited herein.

(16) In addition, according to a manipulator arm provided by the present disclosure in some embodiments, optionally, a distance between two adjacent vacuum suction holes 300 distributed on the suction plate 200 is in the range of 5 mm10 mm. In the above solutions, the number of the openings on the suction plate 200 is determined according to a distance between openings which is in the range of 5 m10 mm, and an opening size is in the range of 0.1 mm0.5 mm Certainly, it should be understood that, the above-provided structure is merely an optional structure of the vacuum suction hole 300, and the specific distance between the vacuum suction holes 300 in practical applications is not limited herein.

(17) In addition, according to a manipulator arm provided by the present disclosure in some embodiments, optionally, as shown in FIG. 2, the plurality of vacuum suction holes 300 is distributed in a matrix on the suction plate 200. According to the above solutions, since the vacuum suction holes 300 on the suction plate 200 are uniformly distributed in a matrix, when picking and placing the flexible substrate 10, a relatively uniform suction force is applied to the flexible substrate 10. It should be understood that, the specific distribution of the vacuum suction holes 300 in practical applications is not limited herein.

(18) In addition, according to a manipulator arm provided by the present disclosure in some embodiments, as shown in FIG. 4, the arm body 100 further includes a vacuum cavity 400 connected to the plurality of vacuum suction holes 300. By arranging a vacuum cavity 400 on the arm body 100 for vacuumizing, which is in communication with the plurality vacuum suction holes 300 using this vacuum cavity 400 to make the vacuum suction holes 300 suck and fix the substrate 10.

(19) In addition, the present disclosure further provides in some embodiments a manipulator, including the above-mentioned manipulator arm. FIG. 2 shows a manipulator 1000 provided by the present disclosure in some embodiments, including a body 1100 and the above-mentioned manipulator arm. As shown in FIG. 2, the manipulator arm is arranged on the body 1100.

(20) In addition, the present disclosure further provides in some embodiments a carrying device including the above-mentioned manipulator. FIG. 5 shows a carrying device 2000 provided by the present disclosure in some embodiments, including the manipulator 1000.

(21) The above are merely the optional embodiments of the present disclosure. It should be noted that, a person skilled in the art may make improvements and replacements without departing from the technical principle of the present disclosure, and these improvements and replacements shall also fall within the protection scope of the present disclosure.