ReRAM programming method including low-current pre-programming for program time reduction

Abstract

A method for programming a resistive random-access memory (ReRAM) cell includes passing a first current through the ReRAM device for a first period of time, the first current selected to create a leakage path through the ReRAM device, and after passing the first current through the ReRAM device passing a second current through the ReRAM device for a second period of time shorter than the first period of time, the second current selected to create a current path having a desired resistance through the leakage path through the ReRAM device.

Claims

1. A method for programming a resistive random-access memory (ReRAM) cell including a ReRAM memory device, the method comprising: selecting a ReRAM device to be programmed, the ReRAM device including two conductive electrodes separated by layer of a solid electrolyte material, one of the two conductive electrodes serving as an ion source; generating a pre-programming pulse for a first period of time that passes a first current through the selected ReRAM device for the first period of time, the first current limited to a first magnitude selected to create a leakage path through the solid electrolyte layer of the selected ReRAM device, the leakage path formed from a series of one or more discontinuities in the solid electrolyte material; and after the first period of time has terminated, generating a programming pulse that passes a second current limited to a second magnitude greater than the first magnitude through the selected ReRAM device for a second period of time shorter than the first period of time, the second magnitude selected to create a current path through the selected ReRAM device, the current path including a conductive filament that extends at least partially along the leakage path.

2. The method of claim 1 further comprising: determining resistance of the selected ReRAM device after passing the second current through the selected ReRAM device for the second period of time; and repeating passing the second current through the selected ReRAM device only if the determined resistance of the selected ReRAM device is higher than a predetermined threshold value.

3. The method of claim 1 wherein the first period of time is in the range of from about 10 Sec to about 1 mSec and the second period of time is in the range of from about 1 Sec to about 10 Sec.

4. The method of claim 3 wherein the first period of time is about 100 Sec and the second period of time is about 1 Sec.

5. The method of claim 1 wherein the first magnitude is between about 1 A and about 100 A.

6. The method of claim 1 wherein the second magnitude is between about 100 A and about 1 mA.

7. A method for programming a resistive random-access memory (ReRAM) cell including a ReRAM device and at least one select transistor connected in series between a bit line and a source line, the ReRAM device including two conductive electrodes separated by layer of a solid electrolyte material, one of the two conductive electrodes serving as an ion source, the at least one select transistor having a gate connected to a word line, the method comprising: applying a programming potential between the bit line and the source line; applying a pre-programming voltage pulse to the word line, the pre-programming voltage pulse turning on the at least one select transistor to cause a pre-programming current limited to a first magnitude to flow through the ReRAM device, the first magnitude selected to create a leakage path through the solid electrolyte layer, the leakage path formed from a series of one or more discontinuities in the solid electrolyte material; applying a programming voltage pulse to the word line after applying the pre-programming voltage pulse to the word line, the programming voltage pulse having a magnitude higher than the pre-programming voltage pulse, the programming voltage pulse turning on the at least one select transistor to cause a programming current limited to a second magnitude higher than the first magnitude to flow through the ReRAM device, the second magnitude selected to create a current path having a desired resistance across the ReRAM cell, the current path including a conductive filament that extends at least partially along the leakage path; and wherein the pre-programming voltage pulse has a width larger than the programming voltage pulse.

8. The method of claim 7 further comprising: (a) determining the resistance of the ReRAM cell after the end of the programming voltage pulse; (b) if the determined resistance of the ReRAM cell is higher than a predetermined threshold, applying an additional programming voltage pulse to the word line and repeating step (a); (c) if the determined resistance of the ReRAM cell is no higher than the predetermined threshold, terminating the method.

9. The method of claim 7 wherein the pre-programming voltage pulse has a width in the range of from about 10 Sec to about 1 mSec and the programming voltage pulse has a width in the range of from about 1 Sec to about 10 Sec.

10. The method of claim 7 wherein the pre-programming voltage pulse has a width of about 100 Sec and the programming voltage pulse has a width of about 1 Sec.

11. The method of claim 7 wherein the first magnitude is between about 1 A and about 100 A.

12. The method of claim 7 wherein the second magnitude is between about 100 A and about 1 mA.

13. In an array of resistive random-access memory (ReRAM) memory cells each including a ReRAM device having two conductive electrodes separated by layer of a solid electrolyte material, one of the two conductive electrodes serving as an ion source, a method for programming comprising: simultaneously passing a first pre-programming current through the ReRAM device in each of a selected first plurality of ReRAM memory cells for a first period of time, some of the ReRAM cells in the selected first plurality of ReRAM memory cells to be programmed in a subsequent programming step and others of the ReRAM cells in the selected first plurality of ReRAM cells not to be programmed in a subsequent programming step, the first pre-programming current limited to a first magnitude selected to create a leakage path through the solid electrolyte layer of each ReRAM device in the selected first plurality of ReRAM memory cells, the leakage path formed from a series of one or more discontinuities in the solid electrolyte material; selecting a second plurality of ReRAM memory cells, the second plurality being a subset of the first plurality of ReRAM memory cells and including only those ones of the first plurality of cells that are to be programmed in the subsequent programming step; and after passing the first pre-programming current through the ReRAM device in each of the selected first plurality of ReRAM memory cells, performing the subsequent programming step by simultaneously passing a programming current through the ReRAM device in each of the second plurality of ReRAM memory cells for a second period of time shorter than the first period of time, the programming current limited to a second magnitude greater than the first magnitude, the second magnitude selected to create a current path having a desired resistance across the ReRAM cell, the current path including a conductive filament that extends at least partially along the leakage path.

14. The method of claim 13, wherein the second magnitude is selected to create a current path through the ReRAM device in each of the selected first plurality of ReRAM memory cells.

15. The method of claim 13 wherein selecting at least one ReRAM memory cell comprises applying a programming potential between a bit line connected to the at least one ReRAM memory cell and a source line connected to the at least one ReRAM memory cell.

16. The method of claim 13 wherein: the simultaneous passing of the pre-programming current through the ReRAM device in each of the selected first plurality of ReRAM memory cells for the first period of time comprises turning on at least one select transistor connected in series with each ReRAM device by applying a first gate potential to the at least one select transistor, the applied first gate potential limiting the pre-programming current to the first magnitude; and the simultaneous passing of the programming current through the ReRAM device in each of the second plurality of ReRAM memory cells for the second period of time comprises turning on the at least one select transistor by applying a second gate potential to the at least one select transistor, the second gate potential being larger than the first gate potential and limiting the programming current to the second magnitude.

17. The method of claim 13 wherein the first period of time is in the range of from about 10 Sec to about 1 mSec and the second period of time is in the range of from about 1 Sec to about 10 Sec.

18. The method of claim 13 wherein the first period of time is about 100 Sec and the second period of time is about 1 Sec.

19. The method of claim 13 wherein the first magnitude is between about 1 A and about 100 A.

20. The method of claim 13 wherein the second magnitude is between about 100 A and about 1 mA.

21. In an array containing rows and columns of ReRAM memory cells, each column of memory cells including ReRAM memory cells formed from a ReRAM device in series with at least one select transistor between a column bit line and a column source line, each row of memory cells including a word line coupled to the gate of the at least one select transistor, a programming circuit comprising: a bit line decoder coupled to each of the bit lines in the array; a word line decoder coupled to each of the word lines in the array; a source line driver coupled to common source line in the array; a memory controller coupled to the bit line decoder, the word line decoder, and the source line driver, the memory controller configured to address ReRAM cells in the array and to program selected ReRAM cells in the array by controlling the bit line decoder, the word line decoder and the source line driver to pass a pre-programming current through selected ReRAM devices in each of a selected first plurality of ReRAM memory cells for a first period of time, some of the ReRAM cells in the selected first plurality of ReRAM memory cells to be programmed in a subsequent programming step and others of the ReRAM cells in the selected first plurality of ReRAM cells not to be programmed in a subsequent programming step, the pre-programming current limited to a magnitude selected to create a leakage path through the solid electrolyte layer in each of the ReRAM devices of the selected first plurality of ReRAM memory cells, the leakage path formed from a series of one or more discontinuities in the solid electrolyte material, the memory controller configured to select a second plurality of ReRAM memory cells, the second plurality being a subset of the first plurality of ReRAM memory cells and including only those ones of the first plurality of cells that are to be programmed in the subsequent programming step, and after passing the pre-programming current through the selected ReRAM devices performing the subsequent programming step by passing a programming current through the selected second plurality of ReRAM devices for a second period of time shorter than the first period of time, the programming current limited to a magnitude selected to create a current path through the selected-second plurality of ReRAM devices, the current path including a conductive filament that extends at least partially along the leakage path.

22. The programming circuit of claim 21 wherein the memory controller is further configured to erase the selected ReRAM cells in the array by controlling the bit line decoder, the word line decoder and the source line driver to pass an erase current in a direction opposite the first and second currents through the selected ReRAM devices, the erase current limited to a magnitude selected to remove the current path through the selected ReRAM devices.

23. The programming circuit of claim 21 wherein the memory controller is further configured to control the common source driver to apply ground potential to the common source line during programming and reading and to apply an erase potential to the common source line during erasing.

Description

BRIEF DESCRIPTION OF THE DRAWING FIGURES

(1) The invention will be explained in more detail in the following with reference to embodiments and to the drawing in which are shown:

(2) FIG. 1 is a simplified schematic diagram of a representative ReRAM memory cell;

(3) FIG. 2 is a graph showing a representative prior-art ReRAM programming IV curve;

(4) FIG. 3 is a schematic diagram of a representative prior-art array of ReRAM memory cells;

(5) FIG. 4 is a graph of voltage vs. time showing a simplified representation of a ReRAM programming event;

(6) FIG. 5 is a graph of voltage vs. time showing a typical multi-pulse ReRAM programming potential interleaved with read pulses;

(7) FIG. 6 is a graph showing a distribution of the number of programming pulses needed as a function of the number of programming cycles using the programming pulse sequence of FIG. 5;

(8) FIG. 7A is a graph of voltage vs. time showing the first step of an illustrative two-step ReRAM programming process in accordance with an aspect of the present invention;

(9) FIG. 7B is a graph of voltage vs. time showing the second step of an illustrative two-step ReRAM programming process in accordance with an aspect of the present invention;

(10) FIG. 8A is a graph of voltage vs. time showing representative word line, bit line, and source line potentials applied during an illustrative program, read and verify portion of a two-step ReRAM programming process in accordance with an aspect of the present invention;

(11) FIG. 8B is a graph of voltage vs. time showing representative word line, bit line, and source line potentials applied during an illustrative erase, read and verify portion of a two-step ReRAM programming process in accordance with an aspect of the present invention;

(12) FIG. 9 is a graph showing a distribution of the number of programming pulses needed as a function of the number of programming cycles using the programming pulse sequence of the present invention;

(13) FIG. 10 is a bar graph illustrating the potential time savings obtained by employing the programming methods in accordance with an aspect of the present invention;

(14) FIG. 11 is a flow diagram showing an illustrative programming method in accordance with an aspect of the present invention;

(15) FIG. 12 is a flow diagram showing another illustrative programming method in accordance with an aspect of the present invention; and

(16) FIGS. 13 and 14 are flow diagrams showing in more detail the performance of certain processes of FIGS. 11 and 12.

DETAILED DESCRIPTION

(17) Persons of ordinary skill in the art will realize that the following description is illustrative only and not in any way limiting. Other embodiments will readily suggest themselves to such skilled persons.

(18) The programming methods of the present invention may be practiced on memory cells like the memory cell 10 depicted in FIG. 1 and arrays of memory cells like the array 30 depicted in FIG. 3. Persons of ordinary skill in the art will appreciate that the principles of the present invention apply to cells and array architectures other than the ones depicted in FIG. 1 and FIG. 3.

(19) In FIG. 4, it can be seen that within one program (set) pulse, there are two different programming stages, a low current stage, during time period T.sub.stress, indicated at reference numeral 44, during which a leakage path (a path formed from a series of one or more discontinuities in the solid electrolyte material that will define the location of the conductive path in the form of a filament) forms, and a high current stage, during time periods T.sub.form and T.sub.soak, indicated at reference numeral 46, where the current path in the form of a continuous filament of metal ions from the ion source forms and is then stabilized. The methods of the present invention take advantage of this characteristic. In accordance with the present invention, a ReRAM cell programming process is divided into two controlled stages. During a first stage, referred to herein as a pre-program stage, a low-current-limited programming voltage pulse is provided, and during a second separate stage following the first stage, a high-current-limited programming voltage pulse is provided.

(20) The current level during the two programming stages is limited by the voltage used to drive the gate(s) of the access transistor(s) of the ReRAM cell. In the ReRAM memory cell of FIG. 1, two transistors 14 and 16 are used. The first stage, shown in FIG. 7A, may be referred to herein as a pre-program stage and the separate second stage, shown in FIG. 7B may be referred to herein as a program stage. The pre-program stage passes a first current through the ReRAM device for a first period of time. The first current is current limited to a magnitude selected to create a leakage path through the ReRAM device and can be performed using a single pulse having a pulse width T1, which should be long enough to pre-program the slowest bits. It has been found that a pre-program pulse in the 100 to about 1 mS range, e.g., about 100 s in one embodiment, can be satisfactory for this purpose. The voltage VWL1 presented on the word line (WL) 22 to the gate(s) of the select transistors (e.g, 14 and 16) is selected to limit the first current, i.e. the pre-programming current to between about 1 A to about 100 A to flow through the ReRAM device. The particular value chosen in any instance will depend on the geometry and materials used to fabricate the ReRAM device.

(21) The second stage may similar to that employed in the prior art as seen at the right side of FIG. 4, which can employ multiple pulses (FIG. 5) having pulse widths T2, with verify read pulses following each programming pulse as illustrated in FIG. 5 by program pulses 40 and read verify pulses 42. The voltage VWL2 presented on the word line (WL) 22 to the gate(s) of the select transistors (e.g, 14 and 16) is selected to limit a programming current to between about 100 A to about 1 mA to flow through the ReRAM device. The particular value chosen in any instance will depend on the geometry and materials used to fabricate the ReRAM device. The current through the ReRAM device increases rapidly during the time period T.sub.form and then is relatively constant (limited by the select transistors 34 and 36 responsive to VWL2) during the time period T.sub.soak when the current path of the filament is being stabilized. The second stage is distinguished from the prior art programming in that in most cases the period T.sub.stress has already been accounted for in the pre-programming stage. The current limit is selected so as to program the cells to have a resistance less than a predetermined threshold, it being understood that not all device will necessarily be successfully programmed.

(22) FIG. 8A shows the bit line (VBL), word line (VWL), and source line (SL) voltages applied for a two-stage programming cycle in accordance with the present invention. A read cycle is performed after the programming pulse to measure the resistance of the programmed ReRAM cell, or compare the resistance of the programmed ReRAM cell with a predetermined threshold. In general, we will use the term determine the resistance to indicate that either the resistance is measured, or the resistance is compared with a predetermined threshold. The dashed lines indicate additional program and read resistance-determining pulses that may be necessary if the ReRAM resistance does not decrease to an acceptable level after the first programming pulse has been applied.

(23) The pre-program and program periods may have different granularities in that the number of cells simultaneously subjected to the pre-programming pulses may be larger than the number of cells simultaneously subjected to the programming pulses due to the much lower currents drawn by each cell during the pre-programming period. The cells subject to simultaneous programming in each programming group are thus a subset of the cells subject to simultaneous pre-programming. This feature of the present invention allows significant programming time reduction at the array level.

(24) Due to the much higher current drawn during the programming stage, the number of ReRAM memory cells programmed during the program stage is less than the number of ReRAM memory cells pre-programmed during the pre-program stage. The pulse width of the program pulses can be 1 s, 2 s or even longer, based on array characterization optimization results.

(25) Referring now to FIG. 8B, a graph of voltage vs. time shows representative word line, bit line, and source line potentials applied during an illustrative erase, read and verify erase process in accordance with an aspect of the present invention. As will be appreciated by persons of ordinary skill in the art from a comparison of FIGS. 8A and 8B, the polarities of the applied bit line and source line voltages are reversed during the erase process.

(26) FIG. 9 is a predictive plot showing the number of required programming pulses vs. the number of programming cycles for a single ReRAM memory cell and shows the effectiveness of the new scheme in program time reduction. The program time reduction is seen by a comparison of the prior art repetitive programming pulses of FIGS. 4 and 5 where each pulse has a duration of T.sub.set (including T.sub.stress+T.sub.form+T.sub.soak) with the present invention in accordance with FIG. 7B where each programming pulse has a duration of T.sub.form+T.sub.soak. As shown in FIG. 9, using the methods of the present invention, a statistically large number of ReRAM memory cells may be successfully programmed with a single pulse following a pre-program pulse. If a large enough sample of ReRAM cells is included in the population represented in FIG. 9, eventually an outlier cell that does not program on the first programming cycle will appear. Additional programming pulses may be provided to account for the occasional ReRAM memory cell that does not adequately program during the first programming pulse. Using prior-art programming methods, a single bit can consume over 100 program pulses as was shown in FIG. 6. FIG. 6 further demonstrates that the required number of program pulses can vary as a function of accumulated program/erase cycles, sometimes requiring over 100 pulses.

(27) Referring now to FIG. 10 another comparison may be made between the programming methods of the prior art and the programming methods in accordance with the present invention. FIG. 10 is a bar graph that presents a comparison of entire chip programming time for 1 giga bit array being programmed with the y-axis reflecting time.

(28) Two cases are depicted in FIG. 10. On the left, two bars (A and B) represent a first case of entire chip programming times for an integrated circuit having a 100 mA chip power budget. Bar A represents prior-art programming time and Bar B represents the programming time for the programming process in accordance with the present invention. On the right, two bars (C and D) represent a second case of entire chip programming times for an integrated circuit having a 200 mA chip power budget. Bar C represents prior-art programming time and Bar D represents the programming time for the programming process in accordance with the present invention. The times depicted in FIG. 10 do not include read verify time.

(29) In the second case representing an integrated circuit having double the power budget of the first case (200 mA vs. 100 mA) the availability of twice the programming current means that twice as many ReRAM cells may be simultaneously pre-programmed using the present invention and that twice as many ReRAM cells may be simultaneously programmed using the two-stage programming process of the present invention when compared to the prior art

(30) From FIG. 10 it may be seen that using the programming methods in accordance with the present invention, the entire-chip programming time is much less than the prior-art entire-chip programming time.

(31) By using the lower current limited pre-program pulse in accordance with the present invention, the filament starts to form in the ReRAM device right after the higher programming pulse is applied, in most cases. Since T.sub.form is a very short time period, the soaking time T.sub.soak is almost equal to the entire programming pulse width.

(32) Referring now to FIG. 11, a flow chart shows an illustrative method 50 in accordance with the present invention. Method 50 may be performed by memory controller 32. In the embodiment depicted in FIG. 11, the pre-programming is applied to all of the ReRAM cells on the chip prior to starting a regular programming process. The method starts at reference numeral 52.

(33) The pre-program stage is performed on a number of bits in parallel. The number of ReRAM cells to be simultaneously pre-programmed can be as many as the power budget allows and can be over 1 million. At reference numeral 54 a set of addresses of ReRAM memory cells to be pre-programmed is selected. The memory controller 54 of FIG. 3 directs the bit line decoder 34 and word line decoder 36 to address the selected cells. At reference numeral 56 a low-current-limited pre-programming pulse is applied to the selected ReRAM cells.

(34) At reference numeral 58 it is determined whether all of the ReRAM cells in the array have been pre-programmed. If not, the method returns to reference numeral 54 where another set of addresses of ReRAM memory cells to be pre-programmed is selected. If all of the ReRAM memory cells have been pre-programmed, the method proceeds to reference numeral 60 where a range of addresses of ReRAM memory cells to be programmed or erased is selected. For the programming stage, the number of ReRAM memory cells that may be simultaneously programmed or erased is significantly lower than the number of ReRAM memory cells to be simultaneously pre-programmed since programming and/or erasing requires much higher current per cell than pre-programming.

(35) The memory controller 32 of FIG. 3 directs the bit line decoder 34 and word line decoder 36 to address the selected cells. At reference numeral 62 the memory controller 52 controls the bit line decoder 34 and word line decoder 36 to drive the word lines to apply a high-current-limited programming pulse to ones of the selected ReRAM cells that are to be programmed. At reference numeral 64 the memory controller 32 controls the bit line decoder 34 and word line decoder 36 to apply a high-current erase pulse to ones of the selected ReRAM cells that are to be erased.

(36) At reference numeral 66 it is determined whether all of the ReRAM cells in the array have been programmed or erased. If not, the method returns to reference numeral 60 where another set of addresses of ReRAM memory cells to be programmed or erased is selected. If all of the ReRAM memory cells in the array have been programmed or erased, the method proceeds to reference numeral 68 where the method ends.

(37) Referring now to FIG. 12, a flow chart shows another illustrative method 70 in accordance with the present invention. Method 70 may be performed by memory controller 32. Unlike the method 50 of FIG. 11, which, to save a decision step, pre-programs all of the ReRAM cells at reference numerals 54 and 56 regardless of whether they are to be programmed or erased, in the embodiment depicted in FIG. 12, the pre-programming is data driven and is applied only to the ReRAM cells on the chip that are to be programmed or erased prior to starting a regular programming process. The method starts at reference numeral 72.

(38) As in the embodiment of FIG. 11, pre-programming is performed on a number of bits in parallel and the number of ReRAM cells to be simultaneously pre-programmed can be as many as the power budget allows and can be over 1 million. At reference numeral 74 a set of addresses of ReRAM memory cells to be pre-programmed is selected. This is a data-driven procedure that only selects ReRAM cells that are to be programmed and ignores ReRAM memory cells that are to be erased. The memory controller 32 of FIG. 3 directs the bit line decoder 34 and word line decoder 36 to address the selected ReRAM memory cells. At reference numeral 76 a low-current pre-programming pulse is applied to the selected ReRAM cells.

(39) At reference numeral 78 it is determined whether all of the ReRAM cells in the array that are designated to be programmed have been pre-programmed. If not, the method returns to reference numeral 74 where another set of addresses of ReRAM memory cells to be pre-programmed is selected. If all of the ReRAM memory cells have been pre-programmed, the method proceeds to reference numeral 80 where a range of addresses of ReRAM memory cells to be programmed or erased is selected. For the process of programming, the number of ReRAM memory cells to be simultaneously programmed or erased is significantly lower than the number of ReRAM memory cells to be simultaneously pre-programmed since programming and erasing requires much higher current per cell than pre-programming Thus, the ReRAM memory cells to be simultaneously programmed or erased is a subset of the simultaneously pre-programmed ReRAM memory cells.

(40) The memory controller 32 of FIG. 3 directs the bit line decoder 34 and word line decoder 36 to address the selected cells. At reference numeral 82 the memory controller 32 controls the bit line decoder 34 and word line decoder 36 to apply a high-current programming pulse only to ones of the selected ReRAM cells that are to be programmed. At reference numeral 84 the memory controller 32 controls the bit line decoder 34 and word line decoder 36 to apply a high-current erase pulse only to ones of the selected ReRAM cells that are to be erased.

(41) At reference numeral 86 it is determined whether all of the ReRAM cells in the array have been programmed or erased. If not, the method returns to reference numeral 80 where another set of addresses of ReRAM memory cells to be programmed or erased is selected. If all of the ReRAM memory cells in the array have been programmed or erased, the method proceeds to reference numeral 88 where the method ends.

(42) The method illustrated in FIG. 12 consumes less pre-programming time than does the method shown in FIG. 11. This is because the pre-programming process of reference numeral 76 is not applied to ReRAM memory cells that are to be erased.

(43) Referring now to FIG. 13, a flow chart shows a method 90 that depicts in more detail the performance of the processes shown at reference numeral 62 in FIG. 11 and reference numeral 82 in FIG. 12 in accordance with an aspect of the present invention. The method begins at reference numeral 92.

(44) At reference numeral 94 a programming pulse is applied to selected cells, and the select transistors are set to pass a programming current selected to form current path through the ReRAM device in the selected cells, i.e. the select transistors are set to provide a high current limit. At reference numeral 96 a read operation is performed to sense current drawn by the ReRAM cells to determine the resistance of the programmed ReRAM devices in the ReRAM memory cells.

(45) At reference numeral 98 the determined resistance is compared with a predetermined threshold. If the determined resistance of all of the ReRAM memory cells being programmed is less than the predetermined threshold amount, the method proceeds to reference numeral 100 where the method ends. If the determined resistance of one or more of the ReRAM memory cells being programmed is not less than the predetermined threshold amount, the method proceeds to reference numeral 102 where an additional programming pulse is applied to the ones of the ReRAM memory cells being programmed whose determined resistance was not below the predetermined threshold. For each of these memory cells the method loops through reference numerals 98 and 102 until their determined resistance is less than the predetermined threshold amount and the method ends at reference numeral 100. Those skilled in the art will recognize that determining the resistance and comparing the resistance with the predetermined threshold may be performed as a single comparison step without exceeding the scope. Impedance may be used in place of resistance without exceeding the scope.

(46) Referring now to FIG. 14, a flow chart shows a method 110 that depicts in more detail the performance of the processes shown at reference numeral 64 in FIG. 11 and reference numeral 84 in FIG. 12 in accordance with an aspect of the present invention. The method begins at reference numeral 112.

(47) At reference numeral 114 an erase pulse is applied to selected cells to pass erase current selected to remove the current path through the ReRAM device in the selected cells. At reference numeral 116 a read operation is performed to sense current drawn by the ReRAM cells to determine the resistance of the erased ReRAM devices in the ReRAM memory cells.

(48) At reference numeral 118 the determined resistance is compared with a predetermined threshold amount. If the determined resistance for all of the cells to be erased is greater the predetermined threshold amount, the method proceeds to reference numeral 120 where the method ends. If the determined resistance of one or more of the ReRAM memory cells is not greater than the predetermined threshold amount, the method proceeds to reference numeral 122 where an additional erase pulse is applied to the ones of the ReRAM memory cells whose resistance was not above the threshold to pass erase current selected to remove the current path through the ReRAM device in the selected cells to be erased. For each of these memory cells the method loops through reference numerals 118 and 122 until their resistance is greater than the predetermined threshold amount and the method ends at reference numeral 120. Those skilled in the art will recognize that determining the resistance and comparing the resistance with the predetermined threshold may be performed as a single comparison step without exceeding the scope. Impedance may be used in place of resistance without exceeding the scope.

(49) While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims.