Alternating phase shift mask

Abstract

An alternating phase-shifting mask (Alt-PSM) comprising a 0 phase portion having a first width and a 180 phase portion having a second width greater than the first width. Example differences between the width of the 180 phase portion and the 0 phase portion may be 10 nm, 15 nm, or 20 nm. An Alt-PSM having phase portions of different widths can have an aerial image intensity transmission graph that is symmetric, for example, at 0.2-0.3 intensity.

Claims

1. An alternating phase-shifting mask (Alt-PSM) for one isolated feature, the Alt-PSM comprising a stepped phase transition edge defined by only one 0 phase portion and only one 180 phase portion, the only one 0 phase portion having a first width and a first thickness and the only one 180 phase portion having a second width and a second thickness, the second width no greater than 1 micrometer and greater than the first width, and the second thickness less than the first thickness.

2. The Alt-PSM of claim 1, wherein the second width is at least 10 nm greater than the first width.

3. The Alt-PSM of claim 1, wherein the second width is at least 20 nm greater than the first width.

4. The Alt-PSM of claim 1, wherein the second width is at least 30 nm greater than the first width.

5. The Alt-PSM of claim 1, wherein the second width is at least 2% greater than the first width.

6. The Alt-PSM of claim 1, wherein the second width is at least 2.5% greater than the first width.

7. The Alt-PSM of claim 1, wherein a ratio of the second width to the first width is at least 1.02.

8. The Alt-PSM of claim 1, wherein a ratio of the second width to the first width is at least 1.025.

9. The Alt-PSM of claim 1, wherein a ratio of the second width to the first width is at least 1.03.

10. The Alt-PSM of claim 1, wherein each of the first width and the second width are less than 1 micrometer.

11. An alternating phase-shifting mask (Alt-PSM) for one isolated feature, the Alt-PSM comprising only one 0 phase portion having a first width and a first thickness adjoining only one 180 phase portion having a second width greater than the first width and a second thickness less than the first thickness, the only one 0 phase portion and the only one 180 phase portion forming a stepped phase transition edge, each of the first width and the second width no greater than 1 micrometer, with the Alt-PSM providing an aerial image intensity graph at the stepped phase transition edge that is symmetrical at 0.2-0.3 intensity.

12. The Alt-PSM of claim 11 that provides an aerial image intensity graph that is symmetrical within the entire range of 0.2-0.3 intensity.

13. The Alt-PSM of claim 11 that provides an aerial image intensity graph that is symmetrical at at least one value within 0.2-0.3 intensity.

Description

BRIEF DESCRIPTIONS OF THE DRAWINGS

(1) FIG. 1A is a schematic side view of an example mask geometry of an Alt-PSM mask; FIG. 1B is an aerial image intensity graph for the Alt-PSM of FIG. 1A.

(2) FIG. 2A is a schematic side view of an example mask geometry of an Alt-PSM mask according to the present disclosure; FIG. 2B is a schematic top view of the Alt-PSM of FIG. 2A; FIG. 2C is an aerial image intensity graph for the Alt-PSM of FIGS. 2A and 2B.

(3) FIG. 3 is a schematic side view of features of an example photolithograph process utilizing an Alt-PSM and a trim mask.

(4) FIG. 4 is an aerial image intensity graph of an example Alt-PSM mask.

DETAILED DESCRIPTION

(5) An ongoing desire to have more densely packed integrated devices has resulted in changes to the photolithography process in order to form smaller individual feature sizes. The minimum feature size or critical dimension (CD) obtainable by a process is determined approximately by the formula CD=k.sub.1*/NA, where k.sub.1 is a process-specific coefficient, is the wavelength of applied light/energy, and NA is the numerical aperture of the optical lens as seen from the substrate or wafer.

(6) For fabrication of dense features with a given value of k.sub.1, the ability to project a usable image of a small feature onto a wafer is limited by the wavelength and the ability of the projection optics to capture enough diffraction orders from an illuminated mask. When either dense features or isolated features are made from a photomask or a reticle of a certain size and/or shape, the transitions between light and dark at the edges of the projected image may not be sufficiently sharply defined to correctly form target photoresist patterns. This may result, among other things, in reducing the contrast of aerial images and also the quality of resulting photoresist profiles. As a result, features 150 nm or below in size may need to utilize phase shifting techniques to enhance the image quality at the wafer, e.g., sharpening edges of features to improve resist profiles.

(7) Phase-shifting generally involves selectively changing phase of part of the energy passing through a photomask/reticle so that the phase-shifted energy is additive or subtractive with unshifted energy at the surface of the wafer. By carefully controlling the shape, location, and phase shift angle of mask features, the resulting photoresist patterns can have more precisely defined edges.

(8) Phase shifts may be obtained in a number of ways. For example, one process known as attenuated phase shifting utilizes a layer of non-opaque material that causes light passing through the material to change in phase compared to light passing through transparent parts of the mask.

(9) Another technique is known as alternating phase shift, where the transparent mask material (e.g., quartz or SiO.sub.2) is sized (e.g., etched) to have different depths. The depths are selected to cause a desired relative phase difference in light passing through the different depths. The resulting mask is referred to as an alternating phase shift mask or alternating phase shifting mask, both of which are referred to herein as Alt-PSM. The portion of the Alt-PSM having the thicker depth is referred to as the 0 phase portion, while the portion of the Alt-PSM having the lesser depth is referred to as the 180 phase portion, as the depth difference allows the light to travel half of the wavelength in the transparent material, generating a phase difference of 180 between 0 and 180 portions.

(10) An Alt-PSM can be used for patterning extremely narrow features; however, the intrinsic phase termination issues make some designs difficult, even with an Alt-PSM. To address this, in one implementation, a combination of an Alt-PSM and a chrome-on-glass trim mask (referred to as a trim mask) may be used. In another implementation, a second Alt-PSM with reversed phase may be exposed after a first exposure, thus utilizing a double exposure technique.

(11) As the feature size reduces, the imbalance of transmission intensity between the 0 and 180 phase portions results in significant CD variation and placement errors for the photoresist pattern.

(12) The technology disclosed herein involves an Alt-PSM and photolithography method using that Alt-PSM to reduce and essentially eliminate the transmission intensity issue by providing an Alt-PSM that has dimensions that compensate for the asymmetric intensity, resulting in symmetrical transmission on the left and right resist edges.

(13) FIG. 1A shows a conventional Alt-PSM 100 in a side view. The Alt-PSM 100 has a first portion 101 that is a 0 phase portion and a second portion 102 that is a 180 phase portion, both which provide 100% light transmission. The numeral 104 identifies the phase transition edge from the 0 phase portion 101 to the 180 phase portion 102. The 180 phase portion 102 is where the material forming the Alt-PSM 100 (e.g., quartz or SiO.sub.2) has been etched away leaving a thinner area than in the 0 phase portion 101 where material has not been etched away. An example for the Alt-PSM 100 has both the 0 phase portion 101 and the 180 phase portion 102 having a width W in the y-direction of approximately 2 micrometers (m). Similarly, the Alt-PSM 100 has the depth (in the x-direction) for both the 0 phase portion 101 and the 180 phase portion 102 being the same, in the range of submicron to tens of microns.

(14) The optical path for the 180 phase portion 102 is different than the 0 phase portion 101, due to the difference in thickness. The effect of the difference in the optical path results in a phase shift. The image transferred onto a wafer can have high intensity in most areas, while at the phase transition edge 104, where the phase shift occurs from the 0 phase portion 101 to the 180 phase portion 102, the light intensity drops.

(15) FIG. 1B is an aerial image intensity graph, illustrating the light transmission intensity through the Alt-PSM 100. As seen, there is little or essentially no light transmission at the phase transmission edge 104. Generally, it is at this location that the resulting device is formed. The light intensity curve for the 0 phase portion 101 is different from that for the 180 phase portion 102 due to the difference in thickness of the mask material (e.g., quartz, SiO.sub.2) at the two phase portions 101, 102. As explained above, to compensate for this asymmetry, a double exposure technique is used, either with a second, trim mask or by reversing the Alt-PSM for a second exposure.

(16) To avoid the need for a second exposure in order to balance light intensity, the physical configuration of the Alt-PSM is modified from that conventionally known. FIGS. 2A and 2B show an Alt-PSM 200 according to the present disclosure, with FIG. 2A being a side view and FIG. 2B being a top down view. Similar to the conventional Alt-PSM 100, the Alt-PSM 200 has a first portion 201 that is a 0 phase portion and a second portion 202 that is a 180 phase portion, both which provide light transmission therethrough. The numeral 204 identifies the phase transition edge from the 0 phase portion 201 to the 180 phase portion 202. The 0 phase portion 201 has a width w.sub.1 in the y-direction and the 180 phase portion 202 has a width w.sub.2. Unlike a conventional Alt-PSM, w.sub.1 and w.sub.2 are not equal; that is, w.sub.2 is greater than w.sub.1. Additionally, unlike a conventional Alt-PSM, w.sub.1 and w.sub.2 are submicron or close to submicron; that is, w.sub.1 and w.sub.2 are no greater than 1 micrometer in some implementations.

(17) Having the widths of the two portions different, specifically, having w.sub.2 greater than w.sub.1, adjusts the aerial image intensity curve in a manner so that the resulting light intensity curve for the 0 phase portion 201 is the same as the light intensity curve for the 180 phase portion 202.

(18) The width w.sub.2 of 180 phase portion 202, in some implementations, is at least 10 nm greater than the width w.sub.1 of 0 phase portion 201, in some implementations at least 15 nm greater, in other implementations at least 20 nm greater, and in some implementations as much as 30 nm greater.

(19) In other implementations, the width w.sub.2 of 180 phase portion 202 is at least 2% greater than the width w.sub.1 of 0 phase portion 201, in some implementations at least 2.5% greater and in other implementations at least 3% greater.

(20) In other implementations, the ratio of the width w.sub.2 of 180 phase portion 202 to the width w.sub.1 of 0 phase portion 201, is at least 1.02, and in other implementations at least 1.03 or at least 1.04.

(21) An example Alt-PSM 200 has a width w.sub.1 of 0 phase portion 201 of 595 nm and a width w.sub.2 of 180 phase portion 202 of 610 nm. In this example, w.sub.2 is 15 nm greater than w.sub.1, w.sub.2 is 2.5% greater than w.sub.1, and the ratio of w.sub.2:w.sub.1 is 1.025.

(22) Another example Alt-PSM 200 has a width w.sub.1 of 0 phase portion 201 of 745 nm and a width w.sub.2 of 180 phase portion 202 of 765 nm. In this example, w.sub.2 is 20 nm greater than w.sub.1, w.sub.2 is 2.65% greater than w.sub.1, and the ratio of w.sub.2:w.sub.1 is 1.027.

(23) Both the 0 phase portion 201 and the 180 phase portion 202 have a depth D in the x-direction. This depth D can be in the range of submicron to tens of microns.

(24) FIG. 2C is an aerial image intensity graph for the light transmission intensity through the Alt-PSM 200 having different width phase portions 201, 202. There is little or essentially no light transmission at the phase transmission edge 204. Having the width w.sub.2 for the 180 phase portion 202 greater than the width w.sub.1 for the 0 phase portion 201 the correct amount, a symmetrical light intensity curve can be obtained. By having a symmetrical light intensity curve, use of double exposure techniques for the purpose of balancing the light can be eliminated.

(25) In some implementations, a trim mask may nevertheless be used with the Alt-PSM of the present disclosure to further define the edges. Trim masks and their use are known; for example, U.S. Pat. No. 9,341,939 to Yu et al. describes trim masks and uses thereof. In general, the trim mask is used with the Alt-PSM, with either the trim mask centered with the Alt-PSM or with an offset overlap of the trim mask in relation to the Alt-PSM.

(26) The Alt-PSM and the trim mask are exposed by placing the Alt-PSM and the trim mask between the light source and a wafer where a photoresist pattern is desired. In order to pattern small features, an Alt-PSM can be exposed, and subsequently a trim mask is exposed to finalize a target area and remove unwanted large features.

(27) FIG. 3 illustrates an assembly 300 for a photolithography process, the assembly including an Alt-PSM 310 having portions of different width, such as Alt-PSM 200 of FIGS. 2A and 2B, and a trim mask 320, both which are positioned between a light source 330 and a substrate (e.g., wafer) 340. The Alt-PSM 310 has a 0 phase portion 311, a 180 phase portion 312, and a phase transition edge 314. The trim mask 320 may be formed from two different materials, e.g., chromium (Cr) and quartz or glass, a non-light transmissive material 320a (e.g., opaque) and a light transmissive material 320b. The center of the trim mask 320, in some implementations particularly, the non-light transmissive material 320a, is aligned with the phase transition edge 314 of the Alt-PSM 310 along the y-axis.

(28) FIG. 4 is an aerial image intensity graph for the light transmission intensity through an Alt-PSM according to this disclosure having different width phase portions. The light intensity curve is essentially symmetrical for the two phase portions, the 0 phase portion and the 180 phase portion; that is, the light intensity curve is essentially symmetrical about the phase shift edge defining the two phase portions. In some implementations, the light intensity curve is symmetrical within the area of 0.2 to 0.3 light transmission (when the highest point of the curve is normalized to 1.0 light transmission). In some implementations, the light transmission curve is symmetrical for the entire range of 0.2 to 0.3. In yet other implementations, the light transmission curves for both phase portions are essentially the same.

(29) The above specification and examples provide a complete description of the structure and use of exemplary implementations of the invention. The above description provides specific implementations. It is to be understood that other implementations are contemplated and may be made without departing from the scope or spirit of the present disclosure. The above detailed description, therefore, is not to be taken in a limiting sense. While the present disclosure is not so limited, an appreciation of various aspects of the disclosure will be gained through a discussion of the examples provided.

(30) Unless otherwise indicated, all numbers expressing feature sizes, amounts, and physical properties are to be understood as being modified by the term about, whether or not the term about is immediately present. Accordingly, unless indicated to the contrary, the numerical parameters set forth are approximations that can vary depending upon the desired properties sought to be obtained by those skilled in the art utilizing the teachings disclosed herein.

(31) As used herein, the singular forms a, an, and the encompass implementations having plural referents, unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term or is generally employed in its sense including and/or unless the content clearly dictates otherwise.

(32) Since many implementations of the invention can be made without departing from the spirit and scope of the invention, the invention resides in the claims hereinafter appended. Furthermore, structural features of the different implementations may be combined in yet another implementation without departing from the recited claims.