Contacted multilayer diffractive optical element

Abstract

A contacted multilayer diffractive optical element having reduced wavelength dependency of diffraction efficiency, the contacted multilayer diffractive optical element facilitating processing in manufacture and being suitable for an infrared optical system, and an infrared optical system and an image pickup apparatus using the diffractive optical element. In order to achieve the above object, a contacted multilayer diffractive optical element comprises a first layer consisting of a first chalcogenide glass material and a second layer consisting of a second chalcogenide glass material, the first chalcogenide glass material and the second chalcogenide glass material satisfying a predetermined conditional expression and being in contact with and stacked on each other, and a diffraction grating structure in a surface of the contact therebetween, and an infrared optical system and an image pickup apparatus comprising the contacted multilayer diffractive optical element are provided.

Claims

1. A contacted multilayer diffractive optical element comprising a first layer consisting of a first chalcogenide glass material and a second layer consisting of a second chalcogenide glass material, the first chalcogenide glass material and the second chalcogenide glass material satisfying Expression (1) below and Expression (2) below, the first layer and the second layer being in contact with and stacked on each other, and a diffraction grating structure prescribed by Expression (i) below in a surface of the contact therebetween,
n1<n2(1),
1<2(2), and where n1 is a refractive index of the first chalcogenide glass material for a light ray having a wavelength .sub.1, n2 is a refractive index of the second chalcogenide glass material for the light ray having the wavelength .sub.1, 1 is an Abbe number of the first chalcogenide glass material for the light ray having the wavelength .sub.1, 2 is an Abbe number of the second chalcogenide glass material for the light ray having the wavelength .sub.1, (r) is a phase difference function, r is a length from an optical axis in a radial direction, each of .sub.2, .sub.4, .sub.6 . . . is an arbitrary coefficient, m is a diffraction order, .sub.1 is an arbitrary wavelength of no less than 1 m and no more than 18 m, and is a design wavelength and is an arbitrary wavelength of no less than 1 m and no more than 18 m, wherein a composition of the first chalcogenide glass material is a mixture comprising at least S and Sn, wherein a composition of the second chalcogenide glass material is a mixture comprising at least As and Se, wherein the composition of the first chalcogenide glass material is no less than 2 mol % and no more than 25 mol % of any one or more of Ge and Ga, no less than 6 mol % and no more than 38 mol % of any one or more of Sb and Bi, no less than 1 mol % and no more than 25 mol % of any one or more of Sn and an alloy of Sn and Zn, and no less than 58 mol % and no more than 80 mol % of any one or more of S, a mixture of S and Se, a mixture of S and Te, and a mixture of S, Se, and Te; and the composition of the second chalcogenide glass material is no less than 22 mol % and no more than 73 mol % of Se, and no less than 3 mol % and no more than 50 mol % of As.

2. The contacted multilayer diffractive optical element according to claim 1, wherein a glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is no less than 10 C.

3. The contacted multilayer diffractive optical element according to claim 1, wherein a glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is no less than 10 C.

4. The contacted multilayer diffractive optical element according to claim 1, wherein a thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass material is within 10010.sup.7/ C.

5. The contacted multilayer diffractive optical element according to claim 1, wherein a diffraction step height is no less than 0.01 mm and no more than 1.50 mm.

6. The contacted multilayer diffractive optical element according to claim 1, wherein the first chalcogenide glass material and the second chalcogenide glass material are contacted with and stacked on each other by molding.

7. The contacted multilayer diffractive optical element according to claim 1, wherein each of the first chalcogenide glass material and the second chalcogenide glass material is a chalcogenide glass material satisfying Expression (3) below:
0.025+2.6<(n1)/+n<0.028+2.9(3), where n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I 2.50<n<3.00, is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I, 20<<600, and is an arbitrary numerical value satisfying 1.5>>5.0.

8. The contacted multilayer diffractive optical element according to claim 1, wherein each of the first chalcogenide glass material and the second chalcogenide glass material is a chalcogenide glass material satisfying Expression (4) below:
0.024+2.4<(n1)/+n<0.025+2.7(4), where n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I, 2.50<n<2.80, is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I, 50<<600, and is an arbitrary numerical value satisfying 1.5>>5.0.

9. The contacted multilayer diffractive optical element according to claim 1, wherein each of the first chalcogenide glass material and the second chalcogenide glass material is a chalcogenide glass material satisfying Expression (5) below:
0.036+2.3<(n1)/+n<0.039+2.5(5), where n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I, 2.40<n<2.60, is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I, 50<<600, and is an arbitrary numerical value satisfying 1.5>>5.0.

10. The contacted multilayer diffractive optical element according to claim 1, wherein each of the first chalcogenide glass material and the second chalcogenide glass material is a chalcogenide glass material satisfying Expression (6) below:
0.035+2.3<(n1)/+n<0.028+2.9(6), where n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I, 2.40<n<3.00, is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I, 20<<600, and is an arbitrary numerical number satisfying 1.5>>5.0.

11. The contacted multilayer diffractive optical element according to claim 1, wherein the second chalcogenide glass material contains no more than 20 mol % of at least one Ge, Te, Sb, and Sn.

12. An infrared optical system comprising the contacted multilayer diffractive optical element according to claim 1.

13. An image pickup apparatus comprising an infrared optical system including the contacted multilayer diffractive optical element according to claim 1.

14. The contacted multilayer diffractive optical element according to claim 2, wherein a glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is no less than 10 C.

15. The contacted multilayer diffractive optical element according to claim 2, wherein a thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass material is within 10010.sup.7/ C.

16. The contacted multilayer diffractive optical element according to claim 2, wherein a diffraction step height is no less than 0.01 mm and no more than 1.50 mm.

17. The contacted multilayer diffractive optical element according to claim 3, wherein a thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass material is within 10010.sup.7/ C.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1(a) is a schematic diagram illustrating an example cross-sectional configuration of a contacted multilayer diffractive optical element according to an embodiment of the present invention;

(2) FIG. 1(b) is a schematic diagram illustrating an example cross-sectional shape of a diffraction grating structure represented in an isophase-difference coordinate system;

(3) FIGS. 2(a1)-(b3) are schematic diagrams illustrating an example of a method for manufacturing a contacted multilayer diffractive optical element according to the present embodiment;

(4) FIG. 3 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 1 (solid line) and a single-layer diffractive optical element (dotted line);

(5) FIG. 4 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 2 (solid line) and a single-layer diffractive optical element (dotted line);

(6) FIG. 5 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 3 (solid line) and a single-layer diffractive optical element (dotted line);

(7) FIG. 6 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 4 (solid line) and a single-layer diffractive optical element (dotted line);

(8) FIG. 7 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 5 (solid line) and a single-layer diffractive optical element (dotted line);

(9) FIG. 8 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 6 (solid line) and a single-layer diffractive optical element (dotted line);

(10) FIG. 9 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 7 (solid line) and a single-layer diffractive optical element (dotted line);

(11) FIG. 10 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 8 (solid line) and a single-layer diffractive optical element (dotted line);

(12) FIG. 11 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 9 (solid line) and a single-layer diffractive optical element (dotted line);

(13) FIG. 12 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 10 (solid line) and a single-layer diffractive optical element (dotted line); and

(14) FIG. 13 is a diagram indicating wavelength dependency of diffraction efficiency of each of a contacted multilayer diffractive optical element according to Example 11 (solid line) and a single-layer diffractive optical element (dotted line).

DESCRIPTION OF THE INVENTION

(15) An embodiment of each of a contacted multilayer diffractive optical element, an infrared optical system and an image pickup apparatus according to the present invention will be described in turn below.

(16) 1. Contacted Multilayer Diffractive Optical Element

(17) 1-1. Basic Structure

(18) FIG. 1(a) schematically illustrates a cross-section of a contacted multilayer diffractive optical element 100 according to the present embodiment. The contacted multilayer diffractive optical element 100 illustrated in FIG. 1 includes a first layer 10 consisting of a first chalcogenide glass material and a second layer 20 consisting of a second chalcogenide glass material, the first chalcogenide glass material and the second chalcogenide glass material satisfying Expression (1) below and Expression (2) below, the first layer 10 and the second layer 20 being in contact with and stacked on each other, and a diffraction grating structure 30 prescribed by Expression (i) below in a surface of the contact therebetween.
n1<n2(1)
1<2(2)
(r)=(.sub.2r.sup.2+.sub.4r.sup.4+.sub.6r.sup.6+ . . . )m/(i)

(19) wherein

(20) n1 is a refractive index of the first chalcogenide glass material for a light ray of a wavelength .sub.I,

(21) n2 is a refractive index of the second chalcogenide glass material for the light ray of the wavelength .sub.I,

(22) 1 is an Abbe number of the first chalcogenide glass material for the light ray of the wavelength .sub.I,

(23) 2 is an Abbe number of the second chalcogenide glass material for the light ray of the wavelength .sub.I,

(24) (r) is a phase difference function,

(25) r is a length from an optical axis in a same radial direction,

(26) each of .sub.2, .sub.4, .sub.6 . . . is an arbitrary coefficient,

(27) m is a diffraction order,

(28) .sub.I is an arbitrary wavelength of no less than 1 m and no more than 18 m, and

(29) is a design wavelength and is an arbitrary wavelength of no less than 1 m and no more than 18 m.

(30) Here, as described above, .sub.I is an arbitrary wavelength of no less than 1 m and no more than 18 m, and is preferably a usable wavelength region of the contacted multilayer diffractive optical element, for example, no less than 2 m and no more than 15 m or no less than 8 m and no more than 14 m. In the present embodiment, it is assumed that .sub.I=, but .sub.I may be a wavelength that is different from the design wavelength .

(31) Here, an Abbe number .sub.I for a light ray of a wavelength .sub.I is defined by the following expression:
.sub.I=(n.sub.I1)/(n.sub.Jn.sub.K)

(32) where n.sub.I, n.sub.J and n.sub.K are respective refractive indexes for light rays of wavelengths .sub.I, .sub.J and .sub.K, .sub.I, .sub.J and .sub.K are each an arbitrary wavelength of no less than 1 m and no more than 18 m, and are in a relationship of .sub.J<.sub.I<.sub.K. For each of .sub.I, .sub.J, .sub.K, an arbitrary wavelength can be employed as long as such arbitrary wavelengths satisfy the above conditions. In the present embodiment, it is assumed that .sub.I=10 m, .sub.J=9 m and .sub.K=11 m.

(33) Since chalcogenide glass materials transmit infrared rays, the contacted multilayer diffractive optical element 100 including the first layer 10 consisting of the first chalcogenide glass material and the second layer 20 consisting of the second chalcogenide glass material, the first layer 10 and the second layer 20 being stacked on each other, is suitable for an infrared optical system. Also, the first chalcogenide glass material and the second chalcogenide glass material are materials that satisfy Expression (1) and Expression (2) below and are different from each other in refractive index and dispersion. The first layer 10 and the second layer 20 consisting of these chalcogenide glass materials being brought into contact with each other via the diffraction grating structure 30 enables obtainment of the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency for a light ray in an infrared wavelength region. Also, the chalcogenide glass materials are materials that can easily be molded, and the diffraction grating structure can be formed by molding. Thus, in comparison with a case where a diffraction grating structure is formed by, e.g., cutting, processing in manufacture is easy, and also, mass production is possible. Therefore, the contacted multilayer diffractive optical element 100 according to the present embodiment enables provision of the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency, the contacted multilayer diffractive optical element 100 facilitating processing in manufacture and being suitable for an infrared optical system.

(34) (1) Diffraction Grating Structure

(35) First, a cross-sectional shape of the contacted multilayer diffractive optical element 100 according to the present embodiment will be described. A phase difference function takes the form of a high-order polynomial like Expression (i) above for a radial direction. Here, for simplicity of description, where a coordinate system in which a radial direction is indicated in units of phase difference function is used, as illustrated in FIG. 1(b), a shape of diffraction steps has a periodic structure in which cross-sections of the respective diffraction steps (orbicular zones) are each shown by a same sawtooth shape. In this case, it is preferable that a diffraction step height where an optical path length difference provided by adjacent orbicular zones at the design wavelength is 1 be no less than 0.01 mm and no more than 1.50 mm. Setting the diffraction step height where the optical path length difference provided by the adjacent orbicular zones at the design wavelength is 1 to be no less than 0.01 mm and no more than 1.50 mm facilitates reduction in wavelength dependency of diffraction efficiency. Concurrently with this, the diffraction grating structure 30 can easily be formed in the surface of the contact between the first chalcogenide glass material and the second chalcogenide glass material. In other words, there are some cases such as a case where the diffraction grating structure 30 is formed directly in the contact surface and a case where the diffraction grating structure 30 is formed by, e.g. molding using a mold, but in any of these cases, if a height of each diffraction step falls within the aforementioned range, machining for forming the diffraction grating structure 30 is easy. However, the optical path length difference is not limited to 1 and may be no less than 0.6 and no more than 1.4, and a height of each diffraction step actually formed in a diffractive surface (diffraction step height) only needs to be no less than 0.02 mm and no more than 1.20 mm.

(36) Here, for, e.g., optimization of wavelength dependency of diffraction efficiency, a specific shape of each diffraction step illustrated in FIG. 1(b) can arbitrarily be changed. Arbitrarily changing e.g., a width, the height and an inclination angle of each diffraction step according to, e.g., the design wavelength and the refractive index of two chalcogenide glass materials stacked enables reduction in wavelength dependency of diffraction efficiency in a wider wavelength range in the infrared wavelength region. Also, in the example illustrated in FIG. 1(b), where represented in an isophase-difference coordinate system, the respective diffraction steps have a same sawtooth shape in cross-section; however, the shape in cross-section of the diffraction steps is not limited to this shape. For example, from among the diffraction steps provided in the contact surface, some diffraction steps may be different from the other diffraction steps in any one or more of the width, the height and the inclination angle. Making a shape of some diffraction steps be a shape that is different from a shape of the other diffraction steps may enable further reduction in wavelength dependency of diffraction efficiency.

(37) (2) Molding

(38) A method for manufacturing the contacted multilayer diffractive optical element 100 is not specifically limited; however, as described above, chalcogenide glass materials are generally materials that can easily be molded, and thus, it is preferable to manufacture the contacted multilayer diffractive optical element 100 by means of molding. For example, the following method can be employed. Here, the below description will be provided conveniently assuming that a softening point, etc., (including a softening point, a glass transition point and a glass deformation point; the same applies hereinafter) of the first chalcogenide glass material is higher than a softening point, etc., of the second chalcogenide glass material. First, the first chalcogenide glass material (10) is pressed to a mold 50 to form the first layer 10 consisting of the first chalcogenide glass material, the first layer 10 having a predetermined shape including the diffraction grating structure 30 (see FIG. 2(a1)). Next, using the first layer 10 as a part of the mold (see FIG. 2(a2)), the second chalcogenide glass material (20) is pressed to the first layer 10 to bring the second chalcogenide glass material into contact with the first layer 10 and transfer the diffraction grating structure 30 to the second chalcogenide glass material (20). Consequently, the contacted multilayer diffractive optical element 100 according to the present embodiment including the first layer 10 consisting of the first chalcogenide glass material and the second layer 20 consisting of the second chalcogenide glass material, the first layer 10 and the second layer 20 being in contact with and stacked on each other, and the diffraction grating structure 30 in a surface of the contact therebetween (see FIG. 2(a3)) can be obtained. However, if the softening point, etc., of the second chalcogenide glass material is higher than the softening point, etc., of the first chalcogenide glass material, the order is reversed. In other words, the second chalcogenide glass material is pressed to the mold 50 and then the first chalcogenide glass material is pressed to the second chalcogenide glass material to bring both chalcogenide glass materials into contact with each other.

(39) Employment of such method makes it easy to form the diffraction grating structure 30 in a surface of the contact between the first layer 10 consisting of the first chalcogenide glass material and the second layer 20 consisting of the second chalcogenide glass material, and enables provision of favorable contact between both chalcogenide glass materials. Also, mass production of the contacted multilayer diffractive optical element 100 is facilitated. However, as described above, the method for manufacturing the contacted multilayer diffractive optical element 100 is not specifically limited. For example, the contacted multilayer diffractive optical element 100 may be manufactured by, e.g., forming the diffraction grating structure 30 in each of the first chalcogenide glass material and the second chalcogenide glass material in advance by means of, e.g., ultraprecision machining and bonding or joining the first chalcogenide glass material and the second chalcogenide glass material to each other with respective diffractive surfaces including the respective diffraction grating structures 30 formed therein (see (b1), (b2) and (b3) in FIG. 2) as a surface of the contact therebetween. Also, it is possible that the diffraction grating structure 30 is formed in advance in the first chalcogenide glass material, the second chalcogenide glass material (20) is pressed to the first layer 10 to bring the second chalcogenide glass material into contact with the first layer 10 and transfer the diffraction grating structure 30 to the second chalcogenide glass material (20).

(40) 1-2. Chalcogenide Glass Material

(41) Next, the first chalcogenide glass material and the second chalcogenide glass material will be described. In the contacted multilayer diffractive optical element 100 according to the present embodiment, the first chalcogenide glass material and the second chalcogenide glass material only need to satisfy Conditional Expression (1) and Conditional Expression (2) above, and as long as Conditional Expression (1) and Conditional Expression (2) are satisfied, are not limited in physical property and composition. However, from the perspective of obtaining a contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency, the contacted multilayer diffractive optical element 100 facilitating processing in manufacture and being suitable for an infrared optical system, it is preferable that the first chalcogenide glass material and the second chalcogenide glass material form a combination that satisfies the below conditions from the aspect of physical properties and the aspect of composition.

(42) 1-2-1. Physical Properties

(43) It is preferable that a combination of the first chalcogenide glass material and the second chalcogenide glass material be a combination that satisfies at least any one of the below thermal properties and optical properties.

(44) (1) Thermal Properties

(45) i) Glass Transition Point Temperature Difference

(46) It is preferable that a glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material be no less than 10 C. Where the glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material be no less than 10 C., from among both chalcogenide glass materials, a chalcogenide glass material whose glass transition point temperature is higher can easily be maintained in a glass state even if the other chalcogenide glass material having a lower glass transition point is softened. Thus, the contacted multilayer diffractive optical element 100 according to the present embodiment can be manufactured by means of molding such as illustrated in FIG. 2, and thus processing in manufacture is facilitated.

(47) If the glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is less than 10 C., it is difficult to, while one chalcogenide glass material is kept in the glass state, soften other chalcogenide glass material when the one chalcogenide glass material is brought into contact with and stacked on the other chalcogenide glass material by means of molding. Thus, the diffraction grating structure fails to be maintained, and therefore, it is necessary to employ a method, other than molding, in stacking the first chalcogenide glass material and the second chalcogenide glass material on each other in contact with each other. If the first layer 10 consisting of the first chalcogenide glass material and the second layer 20 consisting of the second chalcogenide glass material are stacked on each other in contact with each other by means of a method other than molding, it is necessary to form the diffraction grating structure 30 in advance in each of the first chalcogenide glass material and the second chalcogenide glass material and then bond both chalcogenide glass materials to each other via an adhesive. Provision of an adhesive between the first chalcogenide glass material and the second chalcogenide glass material is unfavorable because Conditional Expression (1) and Conditional Expression (2) fail to be satisfied.

(48) From the above perspective, it is more preferable that the glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material be no less than 30 C. If the glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is no less than 30 C., when the first chalcogenide glass material and the second chalcogenide glass material are stacked on each other in contact with each other by means of molding, while one chalcogenide glass material is maintained in a glass state, the other chalcogenide glass material can be brought into contact with and stacked on the one chalcogenide glass material, further facilitating maintenance of the diffraction grating structure 30 formed in the surface of the contact. Thus, processing in manufacturing the contacted multilayer diffractive optical element 100 is more facilitated.

(49) Glass transition point temperatures of chalcogenide glass materials are roughly 90 C. to 400 C. No specific upper limit of the glass transition point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is provided, but is properly no more than 250 C.

(50) ii) Glass Deformation Point Temperature Difference

(51) It is preferable that a glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material be no less than 10 C. As in the case of the glass transition point temperature difference, if the glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is no less than 10 C., the first chalcogenide glass material and the second chalcogenide glass material can be brought into contact with and stacked on each other by means of molding, and the diffraction grating structure 30 can easily be provided in the surface of the contact.

(52) From the above perspective, as in the case of the glass transition point temperature difference, it is more preferable that the glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material be no less than 30 C. Also, as in the case of the glass transition point temperature difference, no specific upper limit of the glass deformation point temperature difference between the first chalcogenide glass material and the second chalcogenide glass material is provided, but is properly no more than 250 C.

(53) iii) Thermal Expansion Coefficient Difference

(54) It is preferable that a thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass material be within 10010.sup.7/ C. If the thermal expansion coefficient difference falls within such range, the first chalcogenide glass material and the second chalcogenide glass material can be brought into contact with and stacked on each other by means of molding and the diffraction grating structure 30 can easily be provided in the surface of the contact. Also, as long as the thermal expansion coefficient difference falls within the range, even when an atmospheric temperature changes, favorable contact between the first chalcogenide glass material and the second chalcogenide glass material can be maintained.

(55) On the other hand, if the thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass exceeds 10010.sup.7/ C., that is, if the thermal expansion coefficient difference becomes large, when an atmospheric temperature changes, the diffraction grating structure 30 provided in the surface of the contact changes, unfavorably resulting in decrease in contact with the other chalcogenide glass material.

(56) From the above perspective, it is more preferable that the thermal expansion coefficient difference between the first chalcogenide glass material and the second chalcogenide glass material be within 8010.sup.7/ C.

(57) (2) Optical Properties

(58) Next, selection of the first chalcogenide glass material and the second chalcogenide glass material will be described from the optical perspective. It is preferable that any one conditional expression of Conditional Expression (3), Conditional Expression (4) and Conditional Expression (5) indicated below be satisfied in addition to Conditional Expression (1) and Conditional Expression (2).

(59) i) Conditional Expression (1)

(60) Conditional Expression (1) is as described above. In other words, a condition that the refractive index (n1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is lower than the refractive index (n2) of the second chalcogenide glass material for the light ray of the wavelength .sub.I is provided. As long as the refractive indexes (n1, n2) of the first chalcogenide glass material and the second chalcogenide glass material satisfy Conditional Expression (1), numerical values of the refractive indexes (n1, n2) are not specifically limited.

(61) ii) Conditional Expression (2)

(62) Conditional Expression (2) is also as described above. In other words, the condition that the Abbe number (1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is lower than the Abbe number (2) of the second chalcogenide glass material for the light ray of the wavelength .sub.I is provided. Here, as long as the Abbe numbers (1, 2) of the first chalcogenide glass material and the second chalcogenide glass material satisfy Conditional Expression (2), numerical values of the Abbe numbers (1, 2) are not specifically limited. However, from the perspective of reducing wavelength dependency of diffraction efficiency in a wider wavelength range, the Abbe number (1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is preferably no more than 250, more preferably no more than 230.

(63) iii) Conditional Expression (3) First, Conditional Expression (3) will be described.

(64) It is preferable that the first chalcogenide glass material and the second chalcogenide glass material each satisfy Conditional Expression (3) in addition to Conditional Expression (1) and Conditional Expression (2) above.
0.025+2.6<(n1)/+n<0.028+2.9 (3)

(65) However, in the expression (3) above,

(66) n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(67) 2.50<n<3.00,

(68) is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(69) 20<<600, and

(70) is an arbitrary numerical value satisfying 1.5<<5.0.

(71) Selection of the first chalcogenide glass material and the second chalcogenide glass material from among materials satisfying Conditional Expression (1) and Conditional Expression (2) and also satisfying Conditional Expression (3) enables provision of the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency in a wider wavelength range in the infrared wavelength region. Thus, decrease in amount of light attributable to wavelength dependency of diffraction efficiency can more effectively be suppressed. Also, since an amount of diffracted light of an order that is not the design order (undesirable diffracted light) decreases, e.g., generation of an unwanted diffraction flare can be suppressed. Therefore, use of the contacted multilayer diffractive optical element 100 satisfying such conditions enables provision of a smaller infrared optical system having higher imaging performance.

(72) If Conditional Expression (3) is satisfied, the Abbe number (1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is more preferably no more than 200, even more preferably no more than 100.

(73) iv) Conditional Expression (4)

(74) Next, Conditional Expression (4) will be described. It is preferable that the first chalcogenide glass material and the second chalcogenide glass material each satisfy Conditional Expression (4) indicated below in addition to Conditional Expression (1) and Conditional Expression (2) above.
0.024+2.4<(n1)/+n<0.025+2.7 (4)

(75) However, in Conditional Expression (4),

(76) n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(77) 2.50<n<2.80,

(78) is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(79) 50<<600, and

(80) is an arbitrary numerical value satisfying 1.5<<5.0.

(81) Selection of the first chalcogenide glass material and the second chalcogenide glass material from among materials satisfying Conditional Expression (1) and Conditional Expression (2) and also satisfying Conditional Expression (4) enables provision of effects that are similar to those in the case of Conditional Expression (3). In other words, the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency in a wider wavelength range in the infrared wavelength region can be provided, and decrease in amount of light attributable to wavelength dependency of diffraction efficiency can more effectively be suppressed, and e.g., generation of an unwanted diffraction flare attributable to undesirable diffracted light can be suppressed. Therefore, use of the contacted multilayer diffractive optical element 100 satisfying such conditions enables provision of a smaller infrared optical system having higher imaging performance.

(82) If Conditional Expression (4) is satisfied, as described above, the Abbe number (1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is more preferably no more than 250, even more preferably no more than 230.

(83) v) Conditional Expression (5)

(84) Next, Conditional Expression (5) will be described. It is preferable that the first chalcogenide glass material and the second chalcogenide glass material each satisfy Conditional Expression (5) indicated below in addition to Conditional Expression (1) and Conditional Expression (2).
0.036+2.3<(n1)/+n<0.039+2.5 (5)

(85) However, in Conditional Expression (5),

(86) n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(87) 2.40<n<2.60,

(88) is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(89) 50<<600, and

(90) is an arbitrary numerical value satisfying 1.5<<5.0.

(91) Selection of the first chalcogenide glass material and the second chalcogenide glass material from among materials satisfying Conditional Expression (1) and Conditional Expression (2) and also satisfying Conditional Expression (5) enables provision of effects that are similar to those in the case of Conditional Expression (3). In other words, the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency in a wider wavelength range in the infrared wavelength region can be provided, and decrease in amount of light attributable to wavelength dependency of diffraction efficiency can more effectively be suppressed, and e.g., generation of an unwanted diffraction flare attributable to undesirable diffracted light can be suppressed. Therefore, use of the contacted multilayer diffractive optical element 100 satisfying such conditions enables provision of a smaller infrared optical system having higher imaging performance.

(92) If Conditional Expression (5) is satisfied, the Abbe number (1) of the first chalcogenide glass material for the light ray of the wavelength .sub.I is more preferably no more than 220.

(93) Next, Conditional Expression (6) will be described. It is preferable that the first chalcogenide glass material and the second chalcogenide glass material each satisfy Conditional Expression (6) indicated below in addition to Conditional Expression (1) and Conditional Expression (2) above.
0.035+2.3<(n1)/+n<0.028+2.9 (6)

(94) However, in Conditional Expression (6),

(95) n is a refractive index of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(96) 2.40<n<3.00,

(97) is an Abbe number of the chalcogenide glass material for the light ray of the wavelength .sub.I,

(98) 20<<600, and

(99) is an arbitrary numerical value satisfying 1.5<<5.0.

(100) Selection of the first chalcogenide glass material and the second chalcogenide glass material from among materials satisfying Conditional Expression (1) and Conditional Expression (2) and also satisfying Conditional Expression (6) enables provision of effects that are similar to those in the case of Conditional Expression (3). In other words, the contacted multilayer diffractive optical element 100 having reduced wavelength dependency of diffraction efficiency in a wider wavelength range in the infrared wavelength region can be provided, and decrease in amount of light attributable to wavelength dependency of diffraction efficiency can more effectively be suppressed, and e.g., generation of an unwanted diffraction flare attributable to undesirable diffracted light can be suppressed. Therefore, use of the contacted multilayer diffractive optical element 100 satisfying such conditions enables provision of a smaller infrared optical system having higher imaging performance.

(101) 1-2-2. Composition

(102) Next, compositions of the first chalcogenide glass material and the second chalcogenide glass material will be described. It is preferable that the first chalcogenide glass material and the second chalcogenide glass material satisfy any one composition condition of first to third composition conditions indicated below.

(103) (1) First Composition Condition

(104) As a first composition condition, it is preferable that the first chalcogenide glass material and the second chalcogenide glass material have the compositions below.

(105) Composition of the First Chalcogenide Glass Material:

(106) no less than 2 mol % and no more than 25 mol % of any one or more of Ge and Ga,

(107) no less than 6 mol % and no more than 38 mol % of any one or more of Sb and Bi,

(108) no less than 1 mol % and no more than 25 mol % of any one or more of Sn and Zn, and

(109) no less than 58 mol % and no more than 80 mol % of any one or more of S, Se and Te.

(110) Composition of the Second Chalcogenide Glass Material:

(111) no less than 22 mol % and no more than 73 mol % of Se, and

(112) no less than 3 mol % and no more than 50 mol % of As.

(113) Here, the second chalcogenide glass material may contain no more than 20 mol % of at least any one of Ge, Te, Sb and Sn in addition to Se and As above.

(114) However, each of the above compositions is one in which a composition ratio of each element in the entire composition is expressed in a molar ratio (mol %), and the first chalcogenide glass material only needs to contain any one or more of Ge and Ga, any one or more of Sb and Bi, any one or more of Sn and Zn and any one or more of S, Se and Te within the respective composition ratios and may contain another element. The same applies to the second chalcogenide glass material. Also, the same applies to a second composition condition.

(115) If the first chalcogenide glass material and the second chalcogenide glass material have the above compositions, Conditional Expression (1), Conditional Expression (2) and Conditional Expression (3) described above are satisfied. Also, conditions relating to physical properties (thermal properties and optical properties) are also satisfied, enabling provision of the aforementioned effects.

(116) (2) Second Composition Conditions

(117) As the second composition condition, it is preferable that the first chalcogenide glass material and the second chalcogenide glass material have the compositions below.

(118) Composition of the First Chalcogenide Glass Material:

(119) no less than 50 mol % and no more than 75 mol % of Se,

(120) no less than 10 mol % and no more than 38 mol % of Ge, and

(121) no less than 2 mol % and no more than 25 mol % of Sb.

(122) Composition of the Second Chalcogenide Glass Material:

(123) no less than 40 mol % and no more than 60 mol % of Se, and

(124) no less than 30 mol % and no more than 50 mol % of Ge.

(125) Here, the second chalcogenide glass material may contain no more than 20 mol % of As in addition to Se and Ge above.

(126) If the first chalcogenide glass material and the second chalcogenide glass material have the above compositions, Conditional Expression (1), Conditional Expression (2) and Conditional Expression (4) described above are satisfied. Also, conditions relating to physical properties (thermal properties and optical properties) are also satisfied, enabling provision of the aforementioned effects.

(127) (3) Third Composition Condition

(128) As a third composition condition, it is preferable that the first chalcogenide glass material and the second chalcogenide glass material have the compositions below.

(129) Composition of First Chalcogenide Glass Material:

(130) no less than 40 mol % and no more than 70 mol % of Se,

(131) no less than 15 mol % and no more than 40 mol % of Ge, and

(132) no less than 5 mol % and no more than 30 mol % of any one or more of Sb and As.

(133) Composition of Second Chalcogenide Glass Material:

(134) no less than 40 mol % and no more than 65 mol % of Se,

(135) no less than 20 mol % and no more than 50 mol % of As, and

(136) no less than 5 mol % and no more than 15 mol % of Ge.

(137) If the first chalcogenide glass material and the second chalcogenide glass material have the above compositions, Conditional Expression (1), Conditional Expression (2) and Conditional Expression (5) described above are satisfied. Also, conditions relating to physical properties (thermal properties and optical properties) are also satisfied, enabling provision of the aforementioned effects.

(138) 2. Infrared Optical System

(139) Next, an embodiment of an infrared optical system according to the present invention will be described. The infrared optical system according to the present embodiment only needs to include the contacted multilayer diffractive optical element 100 described above, and is not specifically limited in terms of the rest of configuration. For example, the infrared optical system can be configured by the contacted multilayer diffractive optical element 100 alone or a combination of the contacted multilayer diffractive optical element 100 and one or more optical elements (e.g., an infrared transmitting lens), and may be configured as a single focus lens whose focal length is fixed or a variable-focal-length lens whose focal length is variable. According to the infrared optical system, use of the contacted multilayer diffractive optical element 100 enables favorable correction of, e.g., chromatic aberration, and high imaging performance can be achieved with a smaller number of optical elements. Concurrently with this, decrease in amount of light attributable to wavelength dependency of diffraction efficiency can be suppressed. Also, since the infrared optical system can be configured by a small number of optical elements, infrared absorption in the respective optical elements can be suppressed. Therefore, a smaller and brighter infrared optical system having high imaging performance can be provided.

(140) 3. Image Pickup Apparatus

(141) Next, an embodiment of an image pickup apparatus according to the present invention will be described. The image pickup apparatus according to the present embodiment includes an infrared optical system including the contacted multilayer diffractive optical element 100 described above. For example, the image pickup apparatus can include the infrared optical system, and e.g., an infrared sensor provided on the image plane side of the infrared optical system, the infrared sensor converting an infrared optical image formed by the infrared optical system into an electrical signal. The image pickup apparatus according to the present invention includes the infrared optical system including the contacted multilayer diffractive optical element 100 described above and thus can provide a clearly outlined subject image by means of infrared light even in night time or bad weather and is suitable for, e.g., an image pickup apparatus for monitoring. Furthermore, the image pickup apparatus according to the present invention is suitable for a medical diagnostic imaging apparatus to be used in a test for, e.g., lung cancer.

(142) Next, the present invention will be described in detail indicating examples and comparative examples. However, the present invention is not limited the below examples.

Example 1

(143) In Example 1, a contacted multilayer diffractive optical element according to the present invention was manufactured by the method using a mold, which is illustrated in FIG. 2, using a first chalcogenide glass material and a second chalcogenide glass material having the below physical properties and compositions.

(144) [First Chalcogenide Glass Material] (IIR-SF1 Manufactured by Isuzu Glass Ltd.)

(145) i) Physical Properties

(146) Thermal properties: glass transition point of 233 C., glass deformation point of 253 C., softening point of 278 C., thermal expansion coefficient of 15610.sup.7/ C.

(147) Optical properties: refractive index (n1) of 2.724, Abbe number (1) of 64

(148) Here, the refractive index is a value for a light ray of a wavelength of 10 m (.sub.I=10 m). As mentioned above, the Abbe number is a value where it is assumed that .sub.I=10 m, .sub.J=9 m and .sub.K=11 m. The same applies to the below examples.

(149) ii) Composition (SSbSnGe)

(150) S: 65 mol %

(151) Sb: 30 mol %

(152) Sn: 3 mol %

(153) Ge: 2 mol %

(154) [Second Chalcogenide Glass Material] (C-1 Manufactured by Amorphous Materials Inc.)

(155) i) Physical Properties

(156) Thermal properties: glass transition point of 167 C., glass deformation point of 188 C., softening point of 209 C., thermal expansion coefficient of 23010.sup.7/ C.

(157) Optical properties: refractive index (n2) of 2.8051, Abbe number of 384

(158) ii) Composition (AsSeTe)

(159) As: 40 mol %

(160) Se: 40 mol %

(161) Te: 20 mol %

(162) [Diffraction Surface Data]

(163) Design wavelength (blaze wavelength): 10 m

(164) Design order m: 1

(165) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.125 mm

(166) Diffraction step height where the optical path length difference is 0.6: 0.075 mm

(167) Diffraction step height where the optical path length difference is 1.4: 0.175 mm

(168) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.075 mm to 0.175 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(169) In FIG. 3, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 1 is indicated by a solid line. In FIG. 3, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As illustrated in FIG. 3, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 2

(170) In Example 2, a contacted multilayer diffractive optical element according to the present invention was manufactured using a first chalcogenide glass material (IIR-SF1 manufactured by Isuzu Glass Ltd.) that is the same as that in Example 1 in such a manner that is similar to that of Example 1 except use of a second chalcogenide glass material having the below physical properties and composition.

(171) [Second Chalcogenide Glass Material] (IRG23 Manufactured by SCHOTT AG)

(172) i) Physical Properties

(173) Thermal properties:

(174) glass transition point of 275 C., glass deformation point of 295 C., softening point of 305 C., thermal expansion coefficient of 13410.sup.7/ C.

(175) Optical properties: refractive index (n2) of 2.7869, Abbe number of 337

(176) ii) Composition (GeAsSeTe)

(177) Ge: 30 mol %

(178) As: 13 mol %

(179) Se: 32 mol %

(180) Te: 25 mol %

(181) [Diffraction Surface Data]

(182) Design wavelength : 10 m

(183) Design order m: 1

(184) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.160 mm

(185) Diffraction step height where the optical path length difference is 0.6: 0.096 mm

(186) Diffraction step height where the optical path length difference is 1.4: 0.224 mm

(187) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.096 mm to 0.224 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(188) In FIG. 4, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 2 is indicated by a solid line. In FIG. 4, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As illustrated in FIG. 4, in the case of Example 2, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 3

(189) In example 3, a contacted multilayer diffractive optical element according to the present invention was manufactured using a first chalcogenide glass material (IIR-SF1 manufactured by Isuzu Glass Ltd.) that is the same as that in Example 1 in such a manner that is similar to that of Example 1 except use of a second chalcogenide glass material having the below physical properties and composition.

(190) [Second Chalcogenide Glass Material] (IG6 Manufactured by VITRON Spezialwerkstoffe GmbH)

(191) i) Physical Properties

(192) Thermal properties:

(193) glass transition point of 180 C., glass deformation point of 185 C., softening point of 217 C., thermal expansion coefficient 20710.sup.7/ C.

(194) Optical properties: refractive index (n2) of 2.7781, Abbe number of 317

(195) ii) Composition (SeAs)

(196) Se: 60 mol %

(197) As: 40 mol %

(198) [Diffraction Surface Data]

(199) Design wavelength : 10 m

(200) Design order m: 1

(201) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.188 mm

(202) Diffraction step height where the optical path length difference is 0.6: 0.113 mm

(203) Diffraction step height where the optical path length difference is 1.4: 0.263 mm

(204) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.113 mm to 0.263 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(205) In FIG. 5, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 3 is indicated by a solid line. In FIG. 5, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 5, in the case of Example 3, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 4

(206) In Example 4, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material and a second chalcogenide glass material having the physical properties and compositions below.

(207) [First Chalcogenide Glass Material] (IRG203 Manufactured by Hubei New Huaguang Information Materials Co., Ltd.)

(208) i) Physical Properties

(209) Thermal properties:

(210) glass transition point of 266 C., glass deformation point of 285 C., softening point of 304 C., thermal expansion coefficient of 15710.sup.7/ C.

(211) Optical properties: refractive index (n1): 2.5886, Abbe number of 125

(212) ii) Composition (SeGeSb)

(213) Se: 65 mol %

(214) Ge: 20 mol %

(215) Sb: 15 mol %

(216) [Second Chalcogenide Glass Material] (IG4 Manufactured by VITRON Spezialwerkstoffe GmbH)

(217) i) Physical Properties

(218) Thermal properties:

(219) glass transition point of 205 C., glass deformation point of 225 C., softening point of 245 C., thermal expansion coefficient of 20410.sup.7/ C.

(220) Optical properties: refractive index (n2) of 2.6084, Abbe number of 345

(221) ii) Composition (SeAsGe)

(222) Se: 50 mol %

(223) As: 40 mol %

(224) Ge: 10 mol %

(225) [Diffraction Surface Data]

(226) Design wavelength : 10 m

(227) Design order m: 1

(228) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.507 mm

(229) Diffraction step height where the optical path length difference is 0.6: 0.304 mm

(230) Diffraction step height where the optical path length difference is 1.4: 0.710 mm

(231) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.304 mm to 0.710 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(232) In FIG. 6, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 4 is indicated by a solid line. In FIG. 6, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 6, in the case of Example 4, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 5

(233) In Example 5, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material and a second chalcogenide glass material having the physical properties and compositions below.

(234) [First Chalcogenide Glass Material] (IRG25 Manufactured by SCHOTT AG)

(235) i) Physical Properties

(236) Thermal properties:

(237) glass transition point of 275 C., glass deformation point of 285 C., softening point of 315 C., thermal expansion coefficient of 14010.sup.7/ C.

(238) Optical properties: refractive index (n1) of 2.6032, Abbe number of 220

(239) ii) Composition (SeGeSb)

(240) Se: 60 mol %

(241) Ge: 28 mol %

(242) Sb: 12 mol %

(243) [Second Chalcogenide Glass Material] (Mixture Obtained by Mixing IRG23 Manufactured by SCHOTT AG and IRG24 Manufactured by SCHOTT AG at a Weight Ratio of 5:95)

(244) i) Physical Properties

(245) Thermal Properties:

(246) glass transition point of 253 C., glass deformation point of 273 C., softening point of 283 C., thermal expansion coefficient of 20810.sup.7/ C.

(247) Optical properties: refractive index (n2): 2.6178, Abbe number of 350

(248) ii) Composition (SeAsGeTe)

(249) Se: 49 mol %

(250) As: 39 mol %

(251) Ge: 11 mol %

(252) Te: 1 mol %

(253) [Diffraction Surface Data]

(254) Design wavelength : 10 m

(255) Design order m: 1

(256) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.686 mm

(257) Diffraction step height where the optical path length difference is 0.6: 0.412 mm

(258) Diffraction step height where the optical path length difference is 1.4: 0.960 mm

(259) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.412 mm to 0.960 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(260) In FIG. 7, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 5 is indicated by a solid line. In FIG. 7, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 7, in the case of Example 5, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 6

(261) In Example 6, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material and a second chalcogenide glass material having the physical properties and compositions below.

(262) [First Chalcogenide Glass Material] (SIG2 Manufactured by Sunny Japan Co., Ltd.)

(263) i) Physical Properties

(264) Thermal properties:

(265) glass transition point of 262 C., glass deformation point of 283 C., softening point of 304 C., thermal expansion coefficient of 16110.sup.7/ C.

(266) Optical properties: refractive index (n1) of 2.586, Abbe number of 209

(267) ii) Composition (SeGeSb)

(268) Se: 65 mol %

(269) Ge: 20 mol %

(270) Sb: 15 mol %

(271) [Second Chalcogenide Glass Material] (IRG24 Manufactured by SCHOTT AG)

(272) i) Physical Properties

(273) Thermal properties:

(274) glass transition point of 205 C., glass deformation point of 225 C., softening point of 245 C., thermal expansion coefficient of 20410.sup.7/ C.

(275) Optical properties: refractive index (n2) of 2.609, Abbe number of 358

(276) ii) Composition (SeAsGe)

(277) Se: 50 mol %

(278) As: 40 mol %

(279) Ge: 10 mol %

(280) [Diffraction Surface Data]

(281) Design wavelength : 10 m

(282) Design order m: 1

(283) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.432 mm

(284) Diffraction step height where the optical path length difference is 0.6: 0.259 mm

(285) Diffraction step height where the optical path length difference is 1.4: 0.605 mm

(286) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.259 mm to 0.605 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(287) In FIG. 8, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 6 is indicated by a solid line. In FIG. 8, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 8, in the case of Example 6, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 7

(288) In Example 7, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material and a second chalcogenide glass material having the physical properties and compositions below.

(289) [First Chalcogenide Glass Material] (IRG201 Manufactured by Hubei New Huaguang Information Materials Co., Ltd.)

(290) i) Physical Properties

(291) Thermal properties:

(292) glass transition point of 362 C., glass deformation point of 385 C., softening point of 410 C., thermal expansion coefficient of 11710.sup.7/ C.

(293) Optical properties: refractive index (n1) of 2.498, Abbe number of 214

(294) ii) Composition (SeGeSb)

(295) Se: 55 mol %

(296) Ge: 33 mol %

(297) Sb: 12 mol %

(298) [Second Chalcogenide Glass Material] (IRG24 Manufactured by SCHOTT AG)

(299) i) Physical Properties

(300) Thermal properties:

(301) glass transition point of 205 C., glass deformation point of 225 C., softening point of 245 C., thermal expansion coefficient of 20410.sup.7/ C.

(302) Optical properties: refractive index (n2) of 2.609, Abbe number of 358

(303) ii) Composition (SeAsGe)

(304) Se: 50 mol %

(305) As: 40 mol %

(306) Ge: 10 mol %

(307) [Diffraction Surface Data]

(308) Design wavelength : 10 m

(309) Design order m: 1

(310) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.090 mm

(311) Diffraction step height where the optical path length difference is 0.6: 0.054 mm

(312) Diffraction step height where the optical path length difference is 1.4: 0.126 mm

(313) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.054 mm to 0.126 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(314) In FIG. 9, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 7 is indicated by a solid line. In FIG. 9, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 9, in the case of Example 7, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range albeit only slightly.

Example 8

(315) In Example 8, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material and a second chalcogenide glass material having the physical properties and compositions below.

(316) [First Chalcogenide Glass Material] (IIR-SF2 Manufactured by Isuzu Glass Ltd.)

(317) i) Physical Properties

(318) Thermal properties:

(319) glass transition point of 233 C., glass deformation point of 253 C., softening point of 278 C., thermal expansion coefficient of 15610.sup.7/ C.

(320) Optical properties: refractive index (n1) of 2.668, Abbe number of 65

(321) ii) Composition (GaSbSnS)

(322) Ga: 2 mol %

(323) Sb: 30 mol %

(324) Sn: 3 mol %

(325) S: 65 mol %

(326) [Second Chalcogenide Glass Material] (IRG204 Manufactured by Hubei New Huaguang Information Materials Co., Ltd.)

(327) i) Physical Properties

(328) Thermal properties:

(329) glass transition point of 167 C., glass deformation point of 207 C., softening point of 247 C., thermal expansion coefficient of 20510.sup.7/ C.

(330) Optical properties: refractive index (n2): 2.765, Abbe number of 316

(331) ii) Composition (SeAsSbSn)

(332) Se: 63 mol %

(333) As: 30 mol %

(334) Sb: 4 mol %

(335) Sn: 3 mol %

(336) [Diffraction Surface Data]

(337) Design wavelength : 10 m

(338) Design order m: 1

(339) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.100 mm

(340) Diffraction step height where the optical path length difference is 0.6: 0.060 mm

(341) Diffraction step height where the optical path length difference is 1.4: 0.140 mm

(342) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.060 mm to 0.140 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(343) In FIG. 10, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 8 is indicated by a solid line. In FIG. 10, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 10, in the case of Example 8, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 9

(344) In Example 9, a contacted multilayer diffractive optical element according to the present invention was manufactured using a first chalcogenide glass material (IIR-SF2 manufactured by Isuzu Glass Ltd.) that is the same as that in Example 8 in such a manner that is similar to that of Example 1 except use of a second chalcogenide glass material having the below physical properties and composition.

(345) [Second Chalcogenide Glass Material] (IG3 Manufactured by VITRON Spezialwerkstoffe GmbH)

(346) i) Physical Properties

(347) Thermal properties:

(348) glass transition point of 275 C., glass deformation point of 345 C., softening point of 415 C., thermal expansion coefficient of 13410.sup.7/ C.

(349) Optical properties: refractive index (n2) of 2.787, Abbe number of 325

(350) ii) Composition (GeAsSeTe)

(351) Ge: 33 mol %

(352) As: 13 mol %

(353) Se: 52 mol %

(354) Te: 25 mol %

(355) [Diffraction surface data]

(356) Design wavelength : 10 m

(357) Design order m: 1

(358) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.084 mm

(359) Diffraction step height where the optical path length difference is 0.6: 0.050 mm

(360) Diffraction step height where the optical path length difference is 1.4: 0.118 mm

(361) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.050 mm to 0.118 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(362) In FIG. 11, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 9 is indicated by a solid line. In FIG. 11, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 11, in the case of Example 9, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

Example 10

(363) In Example 10, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material (IIR-SF2 manufactured by Isuzu Glass Ltd.) that is the same as that in Example 8 and a second chalcogenide glass material (IRG23 manufactured by SCHOTT AG) that is the same as that in Example 2.

(364) [Second Chalcogenide Glass Material] (IRG23 Manufactured by SCHOTT AG)

(365) i) Physical Properties

(366) Thermal properties:

(367) glass transition point of 275 C., glass deformation point of 295 C., softening point of 305 C., thermal expansion coefficient of 13410.sup.7/ C.

(368) Optical properties: refractive index (n2) of 2.7869, Abbe number of 337

(369) ii) Composition (GeAsSeTe)

(370) Ge: 30 mol %

(371) As: 13 mol %

(372) Se: 32 mol %

(373) Te: 25 mol %

(374) [Diffraction Surface Data]

(375) Design wavelength : 10 m

(376) Design order m: 1

(377) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.084 mm

(378) Diffraction step height where the optical path length difference is 0.6: 0.050 mm

(379) Diffraction step height where the optical path length difference is 1.4: 0.118 mm

(380) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.050 mm to 0.118 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(381) In FIG. 12, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 10 is indicated by a solid line. In FIG. 12, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 12, in the case of Example 10, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

(382) Also, in the present example, the first chalcogenide glass material that is different from that in Example 2 is used, but the second chalcogenide glass material that is the same as that in Example 2 is used. While in the contacted multilayer diffractive optical element in Example 2, the diffraction step height where the optical path length difference provided by the adjacent orbicular zones at a design wavelength is 1 is 0.167 mm, in the contacted multilayer diffractive optical element in Example 10, as described above, the diffraction step height is 0.084 mm. In comparison with the first chalcogenide glass material (IIR-SF1) used in Example 2, the first chalcogenide glass material (IIR-SF2) used in Example 10 has high diffraction efficiency for first-order diffracted light in a wide range in a wavelength region of no less than 1 m and no more than 18 m. Thus, in comparison with the contacted multilayer diffractive optical element while diffraction efficiency that is equivalent to that in Example 2 is maintained, in the contacted multilayer diffractive optical element in Example 10, a step amount of diffraction steps was reduced. In other words, it has been confirmed that a proper combination of the first chalcogenide glass material and the second chalcogenide glass material enables reduction in step amount of diffraction steps and thus enables facilitation of machining and molding in forming diffraction steps.

Example 11

(383) In Example 11, a contacted multilayer diffractive optical element according to the present invention was manufactured in such a manner that is similar to that of Example 1 except use of a first chalcogenide glass material (IIR-SF2 manufactured by Isuzu Glass Ltd.) that is the same as that in Example 8 and a second chalcogenide glass material (C-1 manufactured by Amorphous Materials Inc.) that is the same as that in Example 1.

(384) [Second Chalcogenide Glass Material] (C-1 Manufactured by Amorphous Materials Inc.)

(385) i) Physical Properties

(386) Thermal properties: glass transition point of 167 C., glass deformation point of 188 C., softening point of 209 C., thermal expansion coefficient of 23010.sup.7/ C.

(387) Optical properties: refractive index (n2) of 2.8051, Abbe number of 384

(388) ii) Composition (AsSeTe)

(389) As: 40 mol %

(390) Se: 40 mol %

(391) Te: 20 mol %

(392) [Diffraction Surface Data]

(393) Design wavelength : 10 m

(394) Design order m: 1

(395) Diffraction step height where an optical path length difference provided by adjacent orbicular zones at a design wavelength is 1: 0.073 mm

(396) Diffraction step height where the optical path length difference is 0.6: 0.044 mm

(397) Diffraction step height where the optical path length difference is 1.4: 0.102 mm

(398) However, since the optical path length difference and the diffraction step height are in proportion to each other, in the present example, as described above, the diffraction step height takes a value of 0.044 mm to 0.102 mm according to a value of 0.6 to 1.4 of the optical path length difference.

(399) In FIG. 13, wavelength dependency of diffraction efficiency of the contacted multilayer diffractive optical element according to Example 11 is indicated by a solid line. In FIG. 13, the dotted line indicates wavelength dependency of diffraction efficiency of a single-layer diffractive optical element consisting of the first chalcogenide glass material. As indicated in FIG. 13, in the case of Example 11, also, it can be seen that as a result of the first chalcogenide glass material and the second chalcogenide glass material being brought into contact with and stacked on each other via a diffraction grating structure, wavelength dependency of diffraction efficiency was improved in a wider wavelength range.

(400) In each of Examples 1 to 11 above, a contacted multilayer diffractive optical element in which contact between the first layer consisting of the first chalcogenide glass material and the second layer consisting of the second chalcogenide glass material is favorable was obtained by the method illustrated in FIG. 2. Also, the diffraction grating structure was formed in the surface of the contact by means of molding and thus, processing in manufacture was easy.

(401) Also, in the present example, the first chalcogenide glass material that is different from that in Example 1 is used, but the second chalcogenide glass material that is the same as that in Example 1 is used. While in the contacted multilayer diffractive optical element in Example 1, the diffraction step height where the optical path length difference provided by the adjacent orbicular zones at the design wavelength is 1 is 0.125 mm, in the contacted multilayer diffractive optical element in Example 11, as described above, the diffraction step height is 0.073 mm. As in the case of Example 10, in comparison with the contacted multilayer diffractive optical element in Example 1 while diffraction efficiency that is equivalent to that in Example 1 is maintained, a step amount of diffraction steps was reduced in the contacted multilayer diffractive optical element in Example 11.

(402) The compositions, the refractive indexes (n1), the Abbe numbers (1), the glass transition points, the glass deformation point, softening points, the thermal expansion coefficients of the first chalcogenide glass materials used in Examples 1 to 11 are arranged in Table 1. Also, the compositions, the refractive indexes (n2), the Abbe numbers (2), the glass transition points, the glass deformation points, the softening points and the thermal expansion coefficients of the second chalcogenide glass materials used in Examples 1 to 11 are arranged in Table 2. The refractive index differences n between the first chalcogenide glass materials and the second chalcogenide glass materials, the blaze wavelengths, the step heights where the optical path length difference provided by adjacent orbicular zones at the blaze wavelength is 1, the glass transition point differences, the glass deformation point differences, the softening point differences, the thermal expansion coefficients are arranged in Table 3.

(403) TABLE-US-00001 TABLE 1 n1 Glass Glass Thermal transition deformation Softening expansion Material point point point coefficient type Composition n1 1 ( C.) ( C.) ( C.) (10.sup.7/ C.) Example 1 IIR-SF1 Ge: 2 mol % 2.724 64 233 253 278 156 Example 2 Sb: 30 mol % Example 3 Sn: 3 mol % S: 65 mol % Example 4 IRG203 Se: 65 mol % 2.589 125 266 285 304 157 Ge: 20 mol % Sb: 15 mol % Example 5 IRG25 Se: 60 mol % 2.603 220 275 285 315 140 Ge: 28 mol % Sb: 12 mol % Example 6 SIG2 Se: 65 mol % 2.586 209 262 283 304 161 Ge: 20 mol % Sb: 15 mol % Example 7 IRG201 Se: 55 mol % 2.498 214 362 385 410 117 Ge: 33 mol % Sb: 12 mol % Example 8 IIR-SF2 Ga: 2 mol % 2.668 65 233 253 278 156 Example 9 Sb: 30 mol % Example 10 Sn: 3 mol % Example 11 S: 65 mol %

(404) TABLE-US-00002 TABLE 2 n2 Glass Glass Thermal transition deformation Softening expansion Material point point point coefficient type Composition n2 2 ( C.) ( C.) ( C.) (10.sup.7/ C.) Example 1 C-1 As: 40 mol % 2.805 384 167 188 209 230 Se: 40 mol % Te: 20 mol % Example 2 IRG23 Ge: 30 mol % 2.787 337 275 295 305 134 As: 13 mol % Se: 32 mol % Te: 25 mol % Example 3 IG6 Se: 60 mol % 2.778 317 180 185 217 207 As: 40 mol % Example 4 IG4 Se: 50 mol % 2.608 345 205 225 245 204 As: 40 mol % Ge: 10 mol % Example 5 IRG23/ Se: 49 mol % 2.618 350 253 273 283 208 IRG24 = As: 39 mol % 5/95 Ge: 11 mol % Te: 1 mol % Example 6 IRG24 Se: 50 mol % 2.609 358 205 225 245 204 Example 7 IRG24 As: 40 mol % 2.609 358 205 225 245 204 Ge: 10 mol % Example 8 IRG204 Se: 63 mol % 2.765 316 167 207 247 205 As: 30 mol % Sb: 4 mol % Sn: 3 mol % Example 9 IG3 Ge: 33 mol % 2.787 325 275 345 415 134 As: 13 mol % Se: 52 mol % Te: 25 mol % Example 10 IRG23 Ge: 30 mol % 2.787 337 275 295 305 134 As: 13 mol % Se: 32 mol % Te: 25 mol % Example 11 C-1 As: 40 mol % 2.805 384 167 188 209 230 Se: 40 mol % Te: 20 mol %

(405) TABLE-US-00003 TABLE 3 Glass Glass transition deformation Softening Thermal Blaze Step point point point expansion wavelength height difference difference difference coefficient n (m) (mm) ( C.) ( C.) ( C.) (10.sup.7/ C.) Example 1 0.081 10 0.125 66 65 69 74 Example 2 0.063 10 0.160 42 42 27 22 Example 3 0.054 10 0.188 53 68 61 51 Example 4 0.020 10 0.507 61 60 59 47 Example 5 0.015 10 0.686 22 12 32 68 Example 6 0.023 10 0.432 57 58 59 43 Example 7 0.111 10 0.090 157 160 165 87 Example 8 0.097 10 0.100 66 46 31 49 Example 9 0.119 10 0.084 42 92 137 22 Example 10 0.119 10 0.084 42 42 27 22 Example 11 0.137 10 0.073 66 65 69 74

INDUSTRIAL APPLICABILITY

(406) The present invention enables provision of a contacted multilayer diffractive optical element having reduced wavelength dependency of diffraction efficiency, the contacted multilayer diffractive optical element facilitating processing in manufacture and being favorable for an infrared optical system, and an infrared optical system and an image pickup apparatus using the diffractive optical element.

REFERENCE SIGNS LIST

(407) 10 . . . First layer 20 . . . Second layer 30 . . . Diffraction grating structure 100 . . . Contacted multilayer diffractive optical element . . . Inclination angle H . . . Blaze height W . . . Pitch