SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID SOLID MATERIAL CONTAINER IS FILLED WITH A SOLID MATERIAL

Abstract

A solid material container 1 for gasifying and supplying a solid material 25 stored therein has a metal outer unit 21 and a metal inner unit 22. The inner unit 22 is contained inside the outer unit 21, projections 31 are formed inside the outer unit 21, and a bottom section of the inner unit 22 has an inner section fitting section, which removably fits onto the projections 31 with the outer unit 21.

Claims

1. A solid material container for gasifying and supplying a solid material contained therein, comprising a solid material discharge pipe which discharges a vapor of the solid material out of the solid material container, a metal outer unit, and a metal inner unit, wherein the inner unit is contained inside the outer unit and protrusions are formed on the inside of the outer unit, and a bottom section of the inner unit has an inner section fitting section which removably fits onto the protrusions with the outer unit.

2. The solid material container as claimed in claim 1, further comprising a lid unit disposed on top of the inner unit, wherein the lid unit has at least one upper ventilation section through which the vapor of the solid material flows.

3. The solid material container as claimed in claim 2, wherein the lid unit has a lid section fitting section which removably fits onto the top of the inner unit.

4. The solid material container claim 1, wherein the inner unit has inner unit side walls and an inner unit bottom section, and the inner unit side walls have a bottom section fitting section which removably fits onto the inner unit bottom section.

5. The solid material container of claim 4, wherein an inner section bottom plate is disposed in the inner unit bottom section, and the inner unit bottom plate has one or more bottom ventilation sections through which the carrier gas passes.

6. The solid material container as claimed in claim 5, wherein the inner unit side walls have plate section top surface fitting sections which removably fit onto a bottom plate top surface section disposed on the top surface of the inner unit bottom plate, and the inner unit bottom section has a plate section bottom surface fitting section which removably fits with a bottom plate bottom surface fitting section disposed on a bottom surface of the inner unit bottom plate.

7. The solid material container of claim 6, wherein the inner unit has a plurality of trays which are disposed at predetermined intervals vertically and which are filled with the solid material.

8. The solid material container as claimed in claim 7, wherein the plurality of trays comprise at least one first tray which has an outer supporting section on side edges thereof and is smaller than the inner dimension of the outer unit, and at least one second tray, which has an inner supporting section in a central section thereof and is smaller than the outer dimension of the first tray for forming an outer flow path, wherein the first tray is disposed so as to form an overlapping vertical stack with a neighboring second tray, and a fluid flow path is provided between the first tray and the second tray passing through the outer flow path.

9. The solid material container according to claim 8, wherein the first tray has an outer supporting section top fitting section provided to the top of the outer supporting section, and an outer supporting section bottom fitting section provided to the bottom of the outer supporting section, the second tray has an inner supporting section top fitting section provided to the top of the inner supporting section, and an inner supporting section bottom fitting section provided to the bottom of the inner supporting section, the outer supporting section top fitting section of at least one of the first trays is removably fitted so as to be stacked on the outer supporting section bottom fitting section of at least one of the vertically neighboring first trays, and the inner supporting section top fitting section of at least one of the first trays is removably fitted so as to be stacked on the inner supporting section bottom fitting section of at least one of the vertically neighboring first trays.

10. A solid material product in which a solid material fills the solid material container as claimed in claim 1.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0066] For a further understanding of the nature and objects for the present invention, reference should be made to the following detailed description, taken in conjunction with the accompanying drawings, in which like elements are given the same or analogous reference numbers and wherein:

[0067] FIG. 1 is a view showing an example of a configuration of a solid material container;

[0068] FIG. 2 is a view showing an example of a configuration of a solid material container;

[0069] FIG. 3 is a view showing an example of a configuration of a lid unit of he solid material container;

[0070] FIG. 4 is a view showing an example of a configuration of a lid unit of he solid material container;

[0071] FIG. 5 is a view showing an example of a configuration of a solid material container;

[0072] FIG. 6 is a view showing an example of a configuration of a solid material container;

[0073] FIG. 7 is a view showing an example of a configuration of a solid material container;

[0074] FIG. 8 is a view showing an example of a configuration of a solid material container;

[0075] FIG. 9 is a view showing an example of a configuration of a solid material container;

[0076] FIG. 10 is a view of an example of a configuration of a first tray and a second tray; and

[0077] FIG. 11 is a view showing an example of a configuration of a solid material container.

DESCRIPTION OF PREFERRED EMBODIMENTS

[0078] Several embodiments of the present invention are described below. The embodiments described below describe examples of the present invention. The present invention is not limited in any way to the following embodiments, and includes variations implemented without departing from the scope of the present invention. Note that all the configurations described below are not necessarily essential configurations of the present invention.

Embodiment 1

[0079] A solid material container 1 according to Embodiment 1 is described below, with reference to FIG. 1. The solid material container 1 is a solid material container for gasifying and supplying a solid material 25 contained therein.

[0080] The solid material container 1 has a carrier gas introduction pipe 11 which introduces a carrier gas into the solid material container 1, a solid material discharge pipe 12 which discharges vapor of the solid material 25 out of the solid material container 1, an outer unit 21, and an inner unit 22 which is filled with the solid material 25.

[0081] Projections 31 are formed on the inside of the outer unit 21 and a bottom section of the inner unit 22 has inner unit fitting sections 32 which removably fit with the projections 31 to the outer unit 21.

[0082] The inner unit 22 is contained inside the outer unit 21.

[0083] In FIG. 1, the projections 31 are formed on the bottom section of the inside of the outer unit 21, but they may also be formed on side surfaces of the inside of the outer unit 21. The projections 31 may be round or rectangular pillar-shaped protrusions formed on the inside of the outer unit 21, and they may be protrusions formed as a ring on the bottom section of the inside of the outer unit 21, The projections 31 may also be recesses formed on the inside of the outer unit 21.

[0084] The inner unit fitting sections 32 may be formed so as to removably fit onto the projections 31, and if the projections 31 are protrusions, then the inner unit fitting sections 32 may be recesses. If the projections 31 are recesses, then the inner unit fitting sections 32 may be protrusions.

[0085] With the solid material container 2, the outer unit 21 and the inner unit 22 are secured by fitting onto the projections 31.

[0086] Therefore, scattering of the solid material 25 filling the inner unit 22 between the outer unit 21 and the inner unit 22 can be minimized, because the inner unit 22 does not shift or tilt inside the outer unit 21.

[0087] Furthermore, scratching of the outer unit 21 and the inner unit 22 due to the inner unit 22 shifting inside the outer unit 21 can be prevented.

[0088] There is a clearance of about 1 mm between the inner unit 22 and the outer unit 21, but the clearance may have any width. It is possible to provide a clearance which takes into account thermal expansion of the materials used in the inner unit 22 and the outer unit 21 at the temperature at which the solid material container 1 is used. If there is no thermal expansion to take into account, then it is also possible for there to be no clearance.

[0089] The vapor of the solid material 25 may be discharged from the solid material container 1 just as vapor by applying vacuum depressurization after the solid material container 1, or a carrier gas may be introduced into the solid material container 1 and the vapor of the solid material 25 may be discharged accompanied by the carrier gas.

[0090] Note that in this specification, the inner unit 22 includes a section where the solid material 25 fills the inner unit 22 and a space where the inner unit 22 is not filled with the solid material 25, and the outer unit 21 includes a section where the inner unit is contained, and a space where the inner unit 22 is not contained.

[0091] The outer unit 21 need only have a capacity capable of containing the inner unit 22, and may be cylindrical or cubed. The outer unit 21 is made out of metal.

[0092] The carrier gas introduction pipe 11 and the solid material discharge pipe 12 need only be pipes which allow gas to pass therethrough, and may be made out of metal.

[0093] If the outer unit 21, the inner unit 22, the carrier gas introduction pipe 11 and the solid material discharge pipe 12 are made out of metal, they may be made out of, but not limited to, stainless steel, aluminum, aluminum alloys, copper, or copper alloys, for example. Examples of products in common circulation include, but are not limited to, Inconel, Monel, and HasteHoy,

[0094] The solid material 25 may be a precursor used in depositing a semiconductor layer. The solid material 25 may be the precursor itself, or the solid material 25 carried on a carrier body such as beads, etc. The solid material 25 may be in a solid state when being filled, it may be a solid material 25 when the solid material container is being transported, and it may be in a liquid state when being filled or when being heated after being filled. There is no particular limitation on the solid material 25, which may be a material including a compound selected from the group consisting of an organic compound, an organic metal compound, a metal halide, and mixtures of these. It may be AlCl.sub.3, HfCl.sub.4, WCl.sub.5, WCl.sub.5, NbF.sub.5, TiF.sub.4, XeF.sub.2, or carboxylic acid anhydride, for example.

[0095] The solid material product is obtained by filling the solid material container 1 with the solid material 25.

[0096] The carrier gas is not limited to any particular gas, and may be nitrogen, argon, helium, dry air, or hydrogen, or a combination thereof. An inert gas which does not cause a chemical reaction with the solid material 25 is selected.

[0097] The inner unit 22 has a volume capable of being contained in the outer unit 21, and is the section where the solid material 25 can be filled. The inner unit 22 has a bottom section and side surfaces, and an opening through which the solid material 25 is filled. In the inner unit 22 shown in FIG. 1 the bottom section and the side surfaces are formed as a single unit, but it is also possible to dispose the bottom section and the side surfaces of the inner unit separately but without gaps therebetween, and adhere the separate bottom section and the side surfaces together.

[0098] In the solid material container 1 shown in FIG. 1, the inner unit 22 is fitted into the outer unit 21 and the inner unit 22 is filled with the solid material 25. Thereafter, the lid of the outer unit 21, having the carrier gas introduction pipe 11 is closed. The lid of the outer unit 21 may be secured with screws 91. The solid material product is obtained by filling the solid material container 1 with the solid material 25.

[0099] The carrier gas introduced through the carrier gas introduction pipe 11 is fed to the bottom section of the inner unit 22 through an outlet of the carrier gas introduction pipe 11. The carrier gas thus fed comes in contact with the solid material 25 filling the inner unit 22 and is discharged through the solid material discharge pipe 12, accompanied by the vapor of the solid material 25.

[0100] With this configuration, the solid material container 1 having the inner unit 22 inside can stop the solid material filling the inner unit 22 from scattering out of the inner unit 22 so readily.

Embodiment 2

[0101] A solid material container 2 according to Embodiment 2 is described below, with reference to FIG. 2. Elements having the same reference numerals as in the solid material container 1 in Embodiment 1 perform the same functions, and therefore descriptions thereof are omitted.

[0102] The solid material container 2 according to Embodiment 2 further has a lid unit 23 disposed on top of the inner unit 22, and the lid unit 23 has a plurality of upper ventilation sections 41 through which the vapor of the solid material 25 passes.

[0103] The lid unit 23 is disposed so as to prevent the solid material 25 filling the inner unit 22 from scattering between the outer unit 21 and the inner unit 22 by covering the opening on the top of the inner unit 22. If the inner unit 22 is cylindrical, the lid unit 23 is disk-shaped.

[0104] One or more upper ventilation sections 41 through which the vapor of the solid material 25 passes are disposed in the lid unit 23. The vapor of the solid material 25 may be accompanied by a carrier gas. The upper ventilation sections 41 may be any shape through which gas can pass, such as slit-shaped or in the shape of cylindrical holes. As shown in FIG. 3, there may be a showerhead arrangement in which a plurality of cylindrical holes are arranged a predetermined intervals.

[0105] The lid unit 23 may be a flat disk as shown in FIG. 3, or it may be Petri-dish-shaped, with a raised surrounding edge 23A as shown in FIG. 4. If it is Petri-dish-shaped, then it is possible for a fitting section (not shown in the drawings) to be formed on a bottom edge 23B of the surrounding edge 23A of the lid unit 23 allowing removable fitting with the top of the inner unit 22.

[0106] The lid unit 23 of the solid material container 2 has a lid unit fitting section 33 which removably fits onto the top of the inner unit 22. There is no particular limitation on the shape of the fitting sections, but if the top of the inner unit 22 is convex, then the lid unit fitting section 33 may be made concave, so as to allow fitting therebetween. If the top of the inner unit 22 is concave, then the lid unit fitting section 33 may be formed so as to be convex, thereby allowing fitting therebetween. In FIG. 2, the center of the lid unit 23 is formed circularly thicker (reference numeral 34 in FIG. 2) around the inner edges of the cylindrical inner unit 22 and the outer edges of the lid unit 23 (reference numeral 33 in the drawing FIG. 2) are formed thinner, thereby forming the lid unit fitting section 33 and allowing fitting onto the top of the inner unit 22.

[0107] The carrier gas introduced through the carrier gas introduction pipe 11 is fed to the bottom section of the inner unit 22 through an outlet of the carrier gas introduction pipe 11. The carrier gas thus fed comes in contact with the solid material 25 filling the inner unit 22, passes through the upper ventilation sections 41 disposed in the lid unit 23 accompanied by the vapor of the solid material 25, and is discharged through the solid material discharge pipe 12.

[0108] In the solid material container 2 described above, the opening of the inner unit 22 which is filled with the solid material 25 is covered by the lid unit 23, making it possible to minimize scattering of the solid material 25 out of the inner unit 22.

Embodiment 3

[0109] A solid material container 3 according to Embodiment 3 is described below, with reference to FIG. 5. Elements having the same reference numerals as in the solid material container 1 in Embodiment 1 and the solid material container 2 in Embodiment 2 perform the same functions, and therefore descriptions thereof are omitted.

[0110] The inner unit 22 of the solid material container 3 according to Embodiment 3 has inner unit side walls 22A and an inner unit bottom plate 22B, the inner unit side walls 22A having a bottom section fitting section 22C which removably fits onto the inner unit bottom plate 22B.

[0111] The inner unit side walls 22A and the inner unit bottom plate 22B are made separately, so machining is easier than when forming the inner unit 22 which is a single unit. In FIG. 5, steps are formed in the inner unit bottom plate 22B, and the inner unit side walls 22A are disposed so as to fit into the steps. The inner unit side walls 22A and the inner unit bottom plate 22B are fitted in the bottom section fitting section 22C, and therefore the solid material 25 filling the inner unit 22 does not leak out of the inner unit 22. The inner unit side walls 22A and the inner unit bottom plate 22B can be adhered together. Note that in FIG. 5, an enlarged view of the vicinity of the bottom section fitting section 22C is given. In order to make the enlarged view easier to see, the inner unit side walls 22A, the inner unit bottom plate 22B, and the outer unit 21 are grayed out or cross-hatched.

[0112] The shape of the fitting section 22C is not limited to a step shape. For example, recesses can be provided to the inner unit bottom plate 22B, and protrusions, which are the bottom section fitting section 22C, can be formed in the inner unit bottom plate 22B so as to fit into the recesses.

Embodiment 4

[0113] A solid material container 4 according to Embodiment 4 is described below, with reference to FIG. 6. Elements having the same reference numerals as in the solid material containers 1-3 in Embodiments 1-3 perform the same functions, and therefore descriptions thereof are omitted.

[0114] An inner unit bottom plate 42 is disposed in the bottom section of the inner unit 22 of the solid material container 4 according to Embodiment 4, and the inner unit bottom plate 42 has one or more bottom ventilation sections 43 through which carrier gas flows.

[0115] The inner unit bottom plate 42 is disposed a predetermined distance away from the inner unit bottom plate 22B. The predetermined distance may be any distance allowing the carrier gas to flow therethrough, and may be between 1 mm and 30 mm, inclusive, for example. The inner unit bottom plate 42 may be secured to the inner unit side walls 22A.

[0116] The inner unit bottom plate 42 may be a flat disk or it may be shaped like a Petri-dish with a raised surrounding edge. If the inner unit bottom plate 42 has a surrounding edge, the inner unit bottom plate 42 may be disposed such that this surrounding edge is disposed on the inner unit bottom plate 22B (see FIG. 7).

[0117] The carrier gas introduced through the carrier gas introduction pipe 11 is fed from the outlet side end of the carrier gas introduction pipe 11 towards the inner unit bottom plate 22B, passes through the bottom ventilation sections 43 in the inner unit bottom plate 42, and comes in contact with the solid material 25 filling the inner unit 22.

[0118] The bottom ventilation sections 43 need only have a shape allowing the carrier gas to pass therethrough, e.g., a slit shape, and one or more cylindrical holes may be disposed. The carrier gas fed out of the carrier gas introduction pipe 11 is dispersed by passing through the bottom ventilation sections 43, and can therefore come in contact with the solid material 25 more uniformly.

Embodiment 5

[0119] A solid material container 5 according to Embodiment 5 is described below, with reference to FIG. 8. Elements having the same reference numerals as in the solid material containers 1-4 in Embodiments 1-4 perform the same functions, and therefore descriptions thereof are omitted.

[0120] The inner unit side walls 22A of the solid material container 5 according to Embodiment 5 has a plate section top surface fitting section 51 which removably fits with a bottom plate top surface fitting section 52 disposed on the top surface of the inner unit bottom plate 42. The inner unit bottom plate 22B has a plate section bottom surface fitting section 54 which removably fits with a bottom plate bottom surface fitting section 53 which is disposed on the bottom surface of the inner unit bottom plate 42. An enlarged view of the vicinity of the bottom plate top surface fitting section 52 is shown at bottom left. Note that to make the enlarged view easier to see, spaces are included between the inner unit side walls 22A and the inner unit bottom plate 42 and between the inner unit bottom plate 42 and the inner unit bottom plate 22B, but in reality these sections are in contact with each other.

[0121] The bottom plate top surface fitting section 52 need only be formed so as to be removably fitted onto the plate section top surface fitting section 51. If the bottom plate top surface fitting section 52 is a protrusion, the plate section top surface fitting section 51 may be a recess. If the bottom plate top surface fitting section 52 is a recess, then the plate section top surface fitting section 51 may be a protrusion.

[0122] Similarly, the bottom plate bottom surface fitting section 54 need only be formed so as to be removably fitted onto the plate section bottom surface fitting section 53. If the bottom plate bottom surface fitting section 54 is a protrusion, the plate section bottom surface fitting section 53 may be a recess. If the bottom plate bottom surface fitting section 54 is a recess, then the plate section bottom surface fitting section 53 may be a protrusion.

[0123] In the solid material container 5 according to Embodiment 5, the carrier gas is introduced through the carrier gas introduction pipe 11, and is fed from the outlet end of the carrier gas introduction pipe 11 to the inner unit bottom plate 22B. The carrier gas passes through the bottom ventilation sections 43 of the inner unit bottom plate 42 and comes in contact with the solid material 25 filling the inner unit 22,

[0124] The carrier gas fed out of the carrier gas introduction pipe 11 is dispersed by passing through the bottom ventilation sections 43, and can therefore come in contact with the solid material 25 more uniformly.

[0125] The inner unit bottom plate 22B is fitted into and affixed to the outer unit 21 by the projections 31.

[0126] The inner unit bottom plate 42 is affixed to the inner unit bottom plate 22B by the plate section bottom surface fitting section 53 and the bottom plate bottom surface fitting section 54 being fitted into each other.

[0127] The inner unit side walls 22A is affixed to the inner unit bottom plate 42 by the plate section top surface fitting section 51 being fitted to the bottom plate top surface fitting section 52.

[0128] Therefore, in the outer unit 21, the inner unit side walls 22A, the pipe cover unit 24 (not shown), the inner unit bottom plate 42, and the inner unit bottom plate 22B, which make up the inner unit 22, are fixed so as not to shift, preventing the solid material 25 from scattering out of the inner unit 22 into the outer unit 21.

Embodiment 6

[0129] A solid material container 6 according to Embodiment 6 is described below, with reference mainly to FIG. 9. Elements having the same reference numerals as in the solid material containers 1-5 in Embodiments 1-5 perform the same functions, and therefore descriptions thereof are omitted.

[0130] The solid material container 6 according to Embodiment 6 has first trays 61 and second trays 62 which are disposed at fixed intervals vertically and are filled with the solid material 25.

[0131] The first trays 61 have an outer supporting section 61A on side edges (indicated by the cross-hatching in FIG. 11). The outer dimension of the first trays 61 is smaller than the inner dimension of the outer unit 21.

[0132] As shown in FIG. 11, the second trays 62 have an inner supporting section 62A (indicated by the shading in FIG. 11). The outer dimension of the second trays 62 is configured so as to be smaller than the outer dimension of the first trays 61 so as to form an outer flow path 71 (see FIG. 10).

[0133] The first trays 61 are disposed so as to form a vertical overlapping stack with the second trays 62.

[0134] FIG. 10 is an enlarged view of part of the left-hand side of he inner structure of FIG. 9.

[0135] A fluid flow path is provided between the first trays 61 and the second trays 62, along the outer flow path 71.

[0136] The first tray 61(a)) disposed on top has an outer supporting section top fitting section 61B(a) provided on top of an outer supporting section 61A(a), and an outer supporting section bottom fitting section 61C(a) which is provided to the bottom of the outer supporting section 61A(a).

[0137] The first tray 61(b) disposed on the bottom has an outer supporting section top fitting section 61B(b) provided on top of an outer supporting section 61A(b), and an outer supporting section bottom fitting section 61C(b) which is provided to the bottom of an outer supporting section 61A(b).

[0138] The second tray 62(a) disposed on top has an inner supporting section top fitting section 62B(a) provided on top of an inner supporting section 62A(a), and an inner supporting section bottom fitting section 62C(a) which is provided to the bottom of the inner supporting section 62A(a).

[0139] The second tray 62(b) disposed on the bottom has an inner supporting section top fitting section 62B(b) provided on top of an inner supporting section 62A(b), and an inner supporting section bottom fitting section 62C(b) which is provided to the bottom of the inner supporting section 62A(b).

[0140] The outer supporting section top fitting section 61B(b) of the bottom first tray 61(b) is removably fitted so as to be stacked on the outer supporting section bottom fitting section 61C(a) of at least one of the vertically neighboring first trays 61(a)) so as to be stacked. The shape of the outer support section top fitting section 61B(a) or 61B(b) may be a circular or squared protrusion or recess. The outer supporting section bottom fitting section 61C(a) may be any shape which allows fitting with the shape of the outer supporting section top fitting section 61B(b), and may be a round or squared recess or protrusion.

[0141] The inner supporting section top fitting section 62B(b) of the bottom second tray 62(b) is removably fitted so as to be stacked on the inner supporting section bottom fitting section 62C(a) of at least one of the vertically neighboring second trays 62(a) so as to be stacked. The shape of the inner support section top fitting section 62B(a) or 62B(b) may be a circular or squared protrusion or recess. The inner supporting section bottom fitting section 62C(a) may be any shape which allows fitting with the shape of the inner supporting section top fitting section 62B(b), and may be a round or squared recess or protrusion.

[0142] The first trays 61 and the second trays 62 are alternatingly stacked from the bottom upward in this order: first tray 61(b), second tray 62(b), first tray 61(a)), and second tray 62(a).

[0143] The second tray 62 at the very bottom is fixed in a predetermined location inside the outer unit 21 by being removably fitted to the projections 31 provided to the bottom surface of the outer unit 21 (see FIG. 9).

[0144] The bottommost first tray 61(b) is fixed in a predetermined location inside the outer unit 21 by being removably fitted to another of the projections 31 provided to the surrounding edge of the bottom section of the outer unit 21 (see FIG. 9).

[0145] Gas flow in the solid material container 6 is described next, with reference mainly to FIG. 9,

[0146] The carrier gas is introduced into the solid material container 6 through the carrier gas introduction pipe 11, The carrier gas introduction pipe 11 is made out of metal but is covered by the pipe cover unit 24 formed by stacking the inner supporting sections 62A (see FIG. 11) of the second trays 62, and therefore the solid material 25 does not come in contact with the carrier gas introduction pipe 11 which is made out of metal.

[0147] The carrier gas supplied through the outlet end of the carrier gas introduction pipe 11 passes through a flow path 81 provided to the bottom of the inner supporting section 62A of the bottommost second tray 62, and enters a bottom space 82 of the bottommost second tray 62. Thereafter, the carrier gas passes through the outer flow path (71 in FIG. 10) and enters the second trays 62,

[0148] The carrier gas, which has passed over the solid material 25 filling the second trays 62 flows into the first trays 61 along the inner supporting section 62A of the second trays 62. The carrier gas which has flowed into the first trays 61 flows over the solid material 25 filling the first trays 61 and flows into the first trays 61 via the outer flow path 71. The carrier gas thus alternatingly passes through the first trays 61 and the second trays 62, through the upper ventilation sections 41, and is discharged through the solid material discharge pipe 12,

[0149] In FIG. 9, the lid unit 23 is removably fitted onto the outer support section bottom fitting section 61B (see FIG. 10) of the first trays 61, The center of the lid unit 23 has the upper ventilation sections 41 so as to form a fluid flow path with the inner supporting sections 62A (see FIG. 10) of the second trays 62.

[0150] The solid material container 6 has the lid unit 23, but the lid unit 23 may also not be used.

[0151] Even in cases where the solid material container 6 does not have the lid unit 23, the same function as the lid 23 can be played by not filling the uppermost tray (the tray located on top, be it one of the trays 61 or one of the trays 62) with the solid material.

EXAMPLES

Example 1

[0152] Using the solid material container 4 according to Embodiment 4, a solid material product was made, using aluminum chloride as the solid material.

[0153] The material of the outer unit 21 and the inner unit side walls 22A, the inner unit bottom plate 22B, and the inner unit bottom plate 42 which make up the inner unit 22 is stainless steel (SUS 316L).

[0154] The outer dimensions of the outer unit 21 in the solid material container 4 are a diameter of 200 mm and a height of 185 mm. The outer dimensions of the inner unit 22 are 186 mm and a height of 132 mm.

[0155] Aluminum chloride having a purity of 99.999% was used for the aluminum chloride. 1.1 kg of the aluminum chloride was filled.

[0156] Inside a glove box having a nitrogen atmosphere, the inner unit 22 contained in the outer unit 21 was filled with the aluminum chloride, and the lid unit 23 was closed. The outer unit 21 was sealed with the screws 91, and a solid material product in which the solid material container 4 was filled with aluminum chloride was obtained. The solid material product was removed from the glove box, and the solid material container 4 was placed in a vehicle and transported 200 km to see how the aluminum chloride scattered. After transportation, the solid material container 4 was opened inside a glove box with a nitrogen atmosphere and the interior was observed.

[0157] No attachment of the aluminum chloride was observed when the inner surfaces of the outer unit were inspective visually. No aluminum chloride was observed between the outer unit 21 and the inner unit 22, either. A small amount of aluminum chloride was observed to be attached to the inside of the lid unit 23. There was no change in the weight of the aluminum chloride filling the inner unit following transportation.

Comparison Example 1

[0158] A solid material container was created using a container having the same structure as in Example 1 but lacking the projections 31 and the inner unit fitting sections 32, and using aluminum chloride as the solid material. The outer dimensions of the outer unit 21 in the solid material container 4 are a diameter of 200 mm and a height of 185 mm. The outer dimensions of the inner unit 22 are 186 mm and a height of 132 mm.

[0159] Aluminum chloride having a purity of 99.999% was used for the aluminum chloride. 1.1 kg of the aluminum chloride was filled.

[0160] Inside a glove box having a nitrogen atmosphere, the inner unit 22 contained in the outer unit 21 was filled with the aluminum chloride, and the lid unit 23 was closed. The outer unit 21 was sealed with the screws 91, and a solid material product in which the solid material container 4 was filled with aluminum chloride was obtained. The solid material product was removed from the glove box, and the solid material container 4 was placed in a vehicle and transported 200 km to see how the aluminum chloride scattered.

[0161] When the inner surfaces of the outer unit were observed, a large amount of the aluminum chloride inside the inner unit 22 had entered into the space between the inner unit 22 and the outer unit 21.

[0162] Of the 1.1 kg of aluminum chloride filling the inner unit 22, only 1.02 kg was left in the inner unit 22 after being transported 200 km.

Example 2

[0163] Using a solid material container which was the same as in Example 1, was filled with the same amount (1.1 kg) of the aluminum chloride, which was the same solid material, and was transported under the same transportation conditions, a supply test of the aluminum chloride vapor was carried out.

[0164] Specifically, the solid material container 4, which had been transported 200 km, was heated to 130 C., a carrier gas was introduced, and the aluminum chloride vapor was discharged from the solid material container 4. Nitrogen gas was used as the carrier gas, with a flow rate of 500 SCCM.

[0165] The aluminum chloride vapor was discharged until the remainder of the solid material 25 in the solid material container 4 was 10% of the original filling amount (i.e., until only 110 g of the aluminum chloride remained in the solid material container 4). Thereafter, the solid material container 4 was cooled to 25 C., and the interior was visually inspected inside a glove box with a nitrogen atmosphere.

[0166] When the inner surfaces of the outer unit were visually observed, no aluminum chloride was found between the inner unit and the outer unit.

[0167] The aluminum chloride remaining in the inner unit was white, and no corrosion was visually observed. Moreover, the aluminum chloride remaining in the inner unit had a uniform thickness.

[0168] As a result, it is likely that in Example 2 the aluminum chloride vapor was accompanied by the carrier gas uniformly, without the solid material tilting inside the container or scattering out of the inner unit during transportation or usage.

Comparison Example 2

[0169] As in Comparison Example 1, using a solid material container was used which was the same container, but lacking the projections 31 and the inner unit fitting sections 32, was filled with the same amount (1.1 kg) of aluminum chloride, which is the same solid material, and transported under the same transportation conditions, an aluminum chloride vapor supply test was carried out. Specifically, the solid material container 4, which had been transported 200 km, was heated to 130 C., a carrier gas was introduced, and the aluminum chloride vapor was discharged from the solid material container 4. Nitrogen gas was used as the carrier gas, with a flow rate of 500 SCCM.

[0170] The aluminum chloride vapor was discharged until the remainder of the solid material 25 in the solid material container 4 was 10% of the original filling amount (i.e., until only 110 g of the aluminum chloride remained in the solid material container 4). Thereafter, the solid material container 4 was cooled to 25 C., and the interior was visually inspected inside a glove box with a nitrogen atmosphere.

[0171] When the inner surfaces of the outer unit were inspected visually, approximately 20 g of a gray solid substance was found between the outer unit and the bottom section of the inner unit. The solid material container 4 is heated from the outside by an electric heater, so the outer unit, which comes directly in contact with the heater, gets hotter than the inner unit. Accordingly, in Comparison Example 2, it is thought that the aluminum chloride spilled out of the inner unit into the bottom section of the outer unit, and this spilled aluminum chloride was excessively heated, resulting in corrosion or denaturing.

[0172] Furthermore, the aluminum chloride remaining in the inner unit had collected on one side of the inner unit. It is conceivable that the aluminum chloride collected in the inner unit during transportation, and that the aluminum chloride was vaporized while being heated in this uneven manner. It is conjectured that because the carrier gas was introduced with the aluminum chloride collected on one side, contact between the carrier gas and the aluminum chloride was inadequate under conditions of reduced remaining amount.

Example 3

[0173] Using the solid material container 6 according to Embodiment 6, a solid material product was made, using aluminum chloride as the solid material.

[0174] The material of the outer unit 21 and the first trays 61 and the second trays 62 making up the inner unit 22 was stainless steel (SUS 316L).

[0175] The outer dimensions of the outer unit 21 in the solid material container 6 are a diameter of 200 mm and a height of 310 mm. The outer dimensions of the inner unit 22 are 186 mm and a height of 274 mm.

[0176] All the first trays and the second trays were filled with a total of 6.01 kg of the aluminum chloride.

[0177] When the outer unit 21, which had been transported 200 km as in Example 1, was visually inspected, no attachment of the aluminum chloride was found. No aluminum chloride was found between the outer unit 21 and the first trays 61 or the second trays 62. A very small amount of aluminum chloride was found on the ceiling of the outer unit 21.

[0178] There was no change in the weight of the aluminum chloride filling the inner unit fallowing transportation.

Comparison Example 3

[0179] A solid material product was made using a container having the same structure as in Example 3, but lacking the projections 31, the inner unit fitting sections 32, the fitting sections for fitting neighboring first trays together, and the fitting sections for fitting neighboring second trays together, and using aluminum chloride as the solid material.

[0180] A solid material product in which the first trays and the second trays of the unit 22 contained in the outer unit 21 were filled with 6.02 kg of the aluminum chloride inside a glove box having a nitrogen atmosphere, was obtained. The solid material product was removed from the glove box, and the solid material container 6 was placed in a vehicle and transported 200 km to see how the aluminum chloride scattered.

[0181] When the inner surfaces of the outer unit were observed, a large amount of the aluminum chloride inside the inner unit 22 had entered into the space between the outer unit 21 and the first trays and the second trays, A large amount of aluminum chloride was attached to the inside of the ceiling of the outer unit 21.

[0182] Of the 6.00 kg of aluminum chloride filling the inner unit 22, only 5.68 kg was left in the inner unit 22 after being transported 200 km.

[0183] On the basis of the results in Example 1 and Comparison Example 1, the structure of the solid material 6 container in which the inner unit and the outer unit are fitted together by the projections and the inner unit fitting sections was found to be able to minimize scattering of the solid material 25 out of the inner unit.

[0184] Similarly, on the basis of the results of Example 2 and Comparison Example 2, the structure in which the inner unit and the outer unit are fitted together with the projections and the inner unit fitting sections, the first trays are fitted together, and the second trays are fitted together was found to be able to minimize scattering of the solid material 25 from the first trays and the second trays.

Example 4

[0185] Using a solid material container which was the same as in Example 3, was filled with the same amount (6.01 kg) of the aluminum chloride, which was the same solid material, and was transported under the same transportation conditions, a supply test of the aluminum chloride vapor as in Example 2 was carried out.

[0186] Specifically, the solid material container, which had been transported 200 km, was heated to 130 C., a carrier gas was introduced, and the aluminum chloride vapor was discharged from the solid material container 4. Nitrogen gas was used as the carrier gas, with a flow rate of 500 SCCM. The total flow rate of the carrier gas and the solid material vapor discharged from the solid material container was measured using a mass flow meter provided to the back end of the solid material discharge pipe.

[0187] The aluminum chloride vapor was discharged until the remainder of the solid material in the solid material container was 10% of the original filling amount (i.e., until only 600 g of the aluminum chloride remained in the solid material container). Thereafter, the solid material container was cooled to 25 C., and the interior was visually inspected inside a glove box with a nitrogen atmosphere.

[0188] The flow rate as measured by the mass flow meter was constant from when starting the solid material vapor supply until when only approximately 10% of the solid material remained.

[0189] When the inner surfaces of the outer unit were visually observed, no aluminum chloride was found between the inner unit and the outer unit.

[0190] All the first trays were fitted into neighboring first trays above and below, and there were no trays with visually observable gaps. Similarly, all the second trays were fitted into neighboring second trays above and below, and there were no trays with visually observable gaps.

[0191] Almost no aluminum chloride remained in the lower first trays and the lower second trays.

[0192] A small amount of the aluminum chloride remained in the upper first trays and the upper second trays. The aluminum chloride on the trays remained uniformly in the first trays and the second trays, and there was no uneven distribution seen inside the trays.

[0193] The aluminum chloride remaining in first trays and the second trays was white, and no corrosion was visually observed.

[0194] As a result, it is likely that in Example 4 the aluminum chloride vapor was accompanied by the carrier gas uniformly, without the solid material tilting inside the container or scattering out of the inner unit during transportation or usage.

Comparison Example 4

[0195] As in Comparison Example 3, using a solid material container was used which was the same container, but lacking the projections 31, the inner unit fitting sections 32, the fitting sections for fitting together neighboring first trays, the fitting sections for fitting together neighboring second trays, and was filled with the same amount (1.1 kg) of aluminum chloride, which is the same solid material, and transported under the same transportation conditions, an aluminum chloride vapor supply test was carried out.

[0196] Specifically, the solid material container, which had been transported 200 km, was heated to 130 C., a carrier gas was introduced, and the aluminum chloride vapor was discharged from the solid material container 4. Nitrogen gas was used as the carrier gas, with a flow rate of 500 SCCM. The total flow rate of the carrier gas and the solid material vapor discharged from the solid material container was measured using a mass flow meter provided to the back end of the solid material discharge pipe.

[0197] The aluminum chloride vapor was discharged until the remainder of the solid material in the solid material container was 10% of the original filling amount (i.e., until only 600 g of the aluminum chloride remained in the solid material container). Thereafter, the solid material container was cooled to 25 C., and the interior was visually inspected inside a glove box with a nitrogen atmosphere.

[0198] The flow rate as measured by the mass flow meter displayed a gradual falling tendency from when starting the solid material vapor supply until when only approximately 10% of the solid material remained.

[0199] When the inner surfaces of the outer unit were inspected visually, a large amount of a solid substance was found between the outer unit and the bottom section of the inner unit.

[0200] Attachment of the aluminum chloride was found between the outer unit and the inner unit.

[0201] The solidified aluminum chloride was attached in gaps created between the edges of the first trays above and below.

[0202] The second trays were stacked vertically.

[0203] Aluminum chloride remained in the lower and upper first trays and the lower and upper second trays, and was unevenly distributed inside the trays.

[0204] On the basis of these results, it is thought that the first trays moved inside the outer unit, and neighboring upper and lower first trays shifted, causing the aluminum chloride filling at least the first trays to scatter out of the first trays. Moreover, when the first trays shifted, this created gaps between the outer unit and the first trays, and it is thought that there was inadequate contact between the carrier gas and the aluminum chloride due to the carrier gas flowing through those gaps. Part of the carrier gas passing through the lower first trays and the lower second trays flowed into the space between the first trays and the outer unit through those gaps, and the amount of carrier gas flowing into the upper first trays and the upper second trays fell. Furthermore, because of the uneven distribution of the aluminum chloride inside the trays, it is thought that there were places where the aluminum chloride remained in the trains and places where the solid material did not remain, exposing the metal surface of the trays, once the remaining amount had fallen. Therefore, contact between the solid material and the carrier gas flowing over the trays was inadequate. Accordingly, it is thought that the flow rate measured by the mass flow meter fell.

[0205] From the above results, it was found that securing the outer unit and the inner unit (or trays) by fitting them together is effective in minimizing the phenomenon of solid material scattering out of the inner unit (or trays). It was also found that it is effect to dispose the trays without gaps therebetween by fitting them together in a solid material container having an inner unit in which a plurality of trays are disposed, in order to achieve uniform discharge of solid material vapor.

EXPLANATION OF THE REFERENCE NUMERALS

[0206] 1. Solid material container

[0207] 2. Solid material container

[0208] 3. Solid material container

[0209] 4. Solid material container

[0210] 5. Solid material container

[0211] 6. Solid material container

[0212] 11. Carrier gas introduction pipe

[0213] 12. Solid material discharge pipe

[0214] 21. Outer unit

[0215] 22. Inner unit

[0216] 22A. Inner unit side walls

[0217] 22B. Inner unit bottom section

[0218] 22C. Bottom section fitting section

[0219] 23. Lid unit

[0220] 23A. Raised surrounding edge

[0221] 23B. Bottom edge

[0222] 24. Pipe cover unit

[0223] 25. Solid material

[0224] 31. Projections

[0225] 32. Inner unit fitting sections

[0226] 33. Lid unit fitting section

[0227] 41. Upper ventilation sections

[0228] 42. Inner unit bottom plate

[0229] 43. Bottom ventilation sections

[0230] 51. Plate section top surface fitting section

[0231] 52. Bottom plate top surface fitting section

[0232] 53. Plate section bottom surface fitting section

[0233] 54. Bottom plate bottom surface fitting section

[0234] 61. First trays

[0235] 61(a). First tray

[0236] 61(b). First tray

[0237] 61A. Outer supporting section

[0238] 61A(a). Outer supporting section

[0239] 61A(b). Outer supporting section

[0240] 61B. Outer supporting section top surface fitting section

[0241] 61B(a). Outer supporting section top fitting section

[0242] 61B(b). Outer supporting section top fitting section

[0243] 61C. Outer supporting section bottom surface fitting section

[0244] 61C(a). Outer supporting section bottom fitting section

[0245] 61C(b). Outer supporting section bottom fitting section

[0246] 62. Second trays

[0247] 62(a). Second trays

[0248] 62(b). Second trays

[0249] 62A. Inner supporting section

[0250] 62A(a). Inner supporting section

[0251] 62A(b). Inner supporting section

[0252] 62B. Inner supporting section top surface fitting section

[0253] 62B(a). Inner supporting section top fitting section

[0254] 62B(b). Inner supporting section top fitting section

[0255] 62C. Inner supporting section bottom surface fitting section

[0256] 62C(a). Inner supporting section bottom fitting section

[0257] 62C(b). Inner supporting section bottom fitting section

[0258] 71. Outer flow path

[0259] 81. Flow path

[0260] 82. Bottom space

[0261] 91. Screws

[0262] While the invention has been described in conjunction with specific embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art in light of the foregoing description. Accordingly, it is intended to embrace all such alternatives, modifications, and variations as fall within the spirit and broad scope of the appended claims. The present invention may suitably comprise, consist or consist essentially of the elements disclosed and may be practiced in the absence of an element not disclosed, Furthermore, if there is language referring to order, such as first and second, it should be understood in an exemplary sense and not in a limiting sense. For example, it can be recognized by those skilled in the art that certain steps can be combined into a single step.

[0263] The singular forms a, an and the include plural referents, unless the context clearly dictates otherwise,

[0264] Comprising in a claim is an open transitional term which means the subsequently identified claim elements are a nonexclusive listing (i.e., anything else may be additionally included and remain within the scope of comprising). Comprising as used herein may be replaced by the more limited transitional terms consisting essentially of and consisting of unless otherwise indicated herein,

[0265] Providing in a claim is defined to mean furnishing, supplying, making available, or preparing something. The step may be performed by any actor in the absence of express language in the claim to the contrary,

[0266] Optional or optionally means that the subsequently described event or circumstances may or may not occur. The description includes instances where the event or circumstance occurs and instances where it does not occur.

[0267] Ranges may be expressed herein as from about one particular value, and/or to about another particular value. When such a range is expressed, it is to be understood that another embodiment is from the one particular value and/or to the other particular value, along with all combinations within said range.

[0268] All references identified herein are each hereby incorporated by reference into this application in their entireties, as well as for the specific information for which each is cited.