METHOD AND MANIPULATION DEVICE FOR HANDLING SAMPLES

Abstract

An assembly is provided including a manipulation device and a cooling unit. The manipulation device includes a holder for samples and a thermal mass member which is arranged in thermal contact with the holder. The manipulation device is configured to place the manipulation device in a heat exchange position wherein the in thermal mass member is in thermal contact with the cooling unit, and to move the manipulation device from the heat exchange position to a manipulation position wherein the thermal mass member is thermally separated from the cooling unit. An inspection apparatus of focused ion beam apparatus is also provided including such an assembly, and a method of using such an assembly.

Claims

1-14. (canceled)

15. An assembly comprising: a manipulation device; and a cooling unit, wherein the manipulation device comprises a holder for samples and a thermal mass member which is arranged in thermal contact with the holder, wherein the manipulation device is configured to place the manipulation device in a heat exchange position wherein the thermal mass member is in thermal contact with the cooling unit, and to move the manipulation device from the heat exchange position to a manipulation position wherein the thermal mass member is thermally separated from the cooling unit, wherein the thermal mass member comprises a first heat transfer surface, and the cooling unit comprises a second heat transfer surface, wherein the first heat transfer surface and the second heat transfer surface are solid, wherein the assembly is configured such that in the heat exchange position, the first heat transfer surface is configured to abut against the second heat transfer surface, such that the first heat transfer surface is arranged in thermal contact with the second heat transfer surface.

16. The assembly according to claim 15, wherein a thermal capacity of the thermal mass member is configured to substantially maintain a low temperature of the holder during a manipulation of the samples at the manipulation position.

17. The assembly according to claim 15, wherein the manipulation device comprises one or more actuators for moving the holder, and a thermal insulating member, wherein the thermal insulating member is arranged between the one or more actuators and the holder.

18. The assembly according to claim 15, wherein the thermal mass member is arranged between the thermal insulating member and the holder.

19. The assembly according to claim 15, wherein the thermal mass member comprises a cavity which is at least partially filled with a phase change material, wherein the phase change material comprises a phase change at a predetermined low temperature suitable for substantially preventing a change in morphology of the sample or a sample surrounding material.

20. The assembly according to claim 19, wherein the phase change material comprises a phase changed from solid to liquid at said predetermined low temperature, preferably wherein the phase change material comprises a phase change at a temperature below a point where the morphology of ice changes.

21. The assembly according to claim 19, wherein the cavity is configured to enclose the phase change material.

22. An inspection system and/or a focused ion beam system, wherein the system comprises a sample compartment which is configured to substantially enclose a sample, wherein the sample compartment comprises an assembly according to claim 15, wherein the assembly is at least partially arranged inside the sample compartment.

23. The inspection system and/or focused ion beam system according to claim 22, wherein the cooling unit is arranged against or in a wall of the sample compartment.

24. The inspection system and/or focused ion beam system according to claim 22, wherein the system comprises a sample holding unit, wherein the cooling unit is connected to the sample holding unit or wherein the cooling unit is an integral part of the sample holding unit.

25. The inspection system and/or focused ion beam system according to claim 22, wherein the system comprises an electron microscope.

26. The inspection system and/or focused ion beam system according to claim 22, wherein the sample compartment comprises a vacuum chamber.

27. A method for using an assembly according to claim 15, the method comprising the steps of: arranging the manipulation device in a heat exchange position in which the first heat transfer surface is configured to abut against the second heat transfer surface and the thermal mass member is in thermal contact with the cooling unit at least via said first and second heat transfer surfaces, and moving the manipulation device from the heat exchange position to a manipulation position in which the thermal mass member is thermally separated from the cooling unit.

28. The method according to claim 27, when using an assembly wherein the thermal mass member comprises a cavity which is at least partially filled with a phase change material, wherein the phase change material comprises a phase change at a predetermined low temperature suitable for substantially preventing a change in morphology of the sample or a sample surrounding material, wherein the method comprises the step of: cooling the second heat transfer surface to a temperature at or below said predetermined low temperature.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The invention will be elucidated on the basis of an exemplary embodiment shown in the attached drawings, in which:

[0031] FIG. 1 schematically shows a first example of an assembly of the present invention in the heat exchange position,

[0032] FIG. 2 schematically shows the assembly of FIG. 1 in a manipulation position,

[0033] FIGS. 3A and 3B schematically show various side views of a second example of an assembly according to the present invention, and

[0034] FIG. 4 schematically shows a third example of an assembly according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0035] FIG. 1 schematically shows an assembly comprising a manipulation device 1 and a cooling unit 2. The manipulation device 1 comprises a holder 3 for samples and a thermal mass member 4 which is arranged in thermal contact with the holder 3. In this example, the holder 3 is configure as a pair of tweezers, however other known holders for holding or manipulating a sample or a part thereof can also be applied in the manipulation device 1. The thermal mass member is fixedly connected to the holder.

[0036] The manipulation device 1 comprises one or more actuators 5 for moving the holder 3, and an arm 6. The arm 6 is arranged between the one or more actuators 5 and the holder 3. Preferably the arm 6 comprises a thermal insulating member which allows to thermally insulate the holder 3 from the one or more actuators 5. In particular, the thermal mass member 4 is arranged between the arm 6 and the holder 3. As schematically shown in FIG. 1, the arm 6 is arranged directly adjacent to the thermal mass member 4.

[0037] In the present example, the thermal mass member 4 is made of a material with a high heat capacity. It turns out that the thermal mass member 4 can be made out of a large variety of materials. The most important factor is that the thermal conductivity of the material. This thermal conductivity needs to be high enough to ensure the cooling down of the thermal mass member 4 down to the cryogenic temperatures within a reasonable short time duration. Preferably the thermal mass member 4 is at least partially made from metal material, such as copper or aluminum, have both a high heat capacity and a high thermal conductivity.

[0038] The thermal mass member 4 comprises a first heat transfer surface 41, and the cooling unit 2 comprises a second heat transfer surface 21. The assembly is configured such that in the heat exchange position the first heat transfer surface 41 is arranged in thermal contact with the second heat transfer surface 21, as schematically shown in FIG. 1. In this position, the first heat transfer surface 41 and second heat transfer surface 21 are configured to provide a heat transfer between the cooling unit 2 and the thermal mass member 4. In the example of FIG. 1, the first heat transfer surface 41 abuts against the second heat transfer surface 21, when the manipulation device 1 is in the heat exchange position.

[0039] When the manipulation device 1 in the heat exchange position of FIG. 1, the thermal mass member 4 is in thermal contact with the cooling unit 2, and the cooling unit 2 can actively cool the thermal mass member 4 and also the holder 3 which is in thermal contact with the thermal mass member 4. After the holder 3 and the thermal mass member 4 have been cooled down to a desired temperature, for example down to a cryogenic temperature, the manipulation device 1 is ready for handling a cryogenic sample.

[0040] Accordingly, the manipulation device 1 can be moved to a manipulation position, as schematically shown in FIG. 2. When the manipulation device 1 is moved away from the manipulation position, the thermal mass member 4 is thermally separated from the cooling unit 2, and the manipulation device 2 can substantially freely move for handling and/or holding the cryogenic sample 12 using the holder 3.

[0041] As shown in FIG. 2, when the manipulation is moved away from the cooling unit 2 and/or is moved to or is in a manipulation position, the manipulation device 1, in particular the holder 3 for samples is separated from the cooling unit 2. Accordingly, the manipulation device 1 can move substantially freely, because the manipulation device 1 is not connected to the cooling unit 2 by means of a heat transfer member, such as a braid. Due to the thermal mass member 2, an increase in temperature of the holder 3 is at least reduced, preferably is substantially prevented, when the holder 3 is thermally separated from the cooling unit 2, for example when handling a sample. Due to the thermal mass member 3, a braid for thermally connecting the holder 3 with the cooling unit 2 can be omitted.

[0042] FIGS. 1 and 2 also schematically show an inspection system and/or a focused ion beam system 10, with a sample holder 11. The system comprises a sample compartment 13 which is configured to substantially enclose a sample 12. The assembly is at least partially arranged inside the sample compartment 13.

[0043] In the example shown in FIGS. 1 and 2, the cooling unit 2 is arranged against or in a wall 14 of the sample compartment 13. The cooling unit 2 is arranged at a position in the sample compartment 13 such that the thermal mass member 3 can occasionally interface with the cooling unit 2, as shown in FIG. 1.

[0044] An example of an inspection system, is an electron microscope. Such an electron microscope may be provided with a focused ion beam system for machining the sample 12. In case the inspection system is an electron microscope, the sample compartment 13 is preferably a vacuum chamber.

[0045] When using the assembly of the invention, such a method comprises the steps of:

arranging the manipulation device 1 in a heat exchange position of FIG. 1, in which the thermal mass member 3 is in thermal contact with the cooling unit 4,
cooling down the thermal mass member 3 to a desired temperature or during at least a predetermined time, and
moving the manipulation device 1 from the heat exchange position of FIG. 1 to a manipulation position of FIG. 2, in which manipulation position the thermal mass member 3 is thermally separated from the cooling unit 2.

[0046] FIGS. 3A and 3B schematically show various side views of a second example of an assembly according to the present invention. The assembly comprises a manipulation device 21 and a cooling unit 31. The cooling unit 31 comprises a first part 311 which comprises a sample holding unit 29, and a second part 312 which is configured for cooling the thermal mass member 24 of the manipulation device 21. Preferably, the sample holding unit 29 is an integral part of the cooling unit 31.

[0047] Again, the manipulation device 21 comprises a holder 23 for samples and a thermal mass member 24 which is arranged in thermal contact with the holder 23. The manipulation device 21 comprises one or more actuators 25 for moving the holder 23, and an arm 26. The arm 26 is arranged between the one or more actuators 25 and the holder 23, and comprises a thermal insulating member which allows to thermally insulate the holder 23 from the one or more actuators 25.

[0048] FIGS. 3A and 3B also schematically show an inspection system and/or a focused ion beam system 30, which are configured for inspecting and/or processing a sample 32 on the sample holding unit 29. The system further comprises a sample compartment 33 which is configured to substantially enclose the sample 32. The assembly is at least partially arranged inside the sample compartment 33. The cooling unit 31 is arranged at a position in the sample compartment 33 such that the thermal mass member 24 can occasionally interface with the cooling unit 31, in particular the second part 312 thereof, as shown in FIG. 3B.

[0049] FIG. 4 schematically shows a third example of an assembly according to the present invention. The system as shown in FIG. 4 is largely the same as the system described in the first example above with reference to FIGS. 1 and 2. Accordingly in FIGS. 1, 2 and 4 the same features are provided with the same reference numbers.

[0050] The third example as shown in FIG. 4 differs from the first example, in that the thermal mass member 4 comprises a cavity 42 which is at least partially filled with a phase change material, for example with isopentane. A phase change material can store a large amount of heat energy during a phase change, such as from a solid to a liquid. Advantageously, large quantities of thermal energy can be stored at a relatively constant temperature where the phase change occurs. Thus the use of a phase change material in the cavity 42 of the thermal mass member 4 can provide temperature stabilization by storing large amounts of thermal energy without significantly changing the temperature.

[0051] As schematically indicated, the cavity 42 is preferably completely encloses the phase change material so that no phase change material can escape out of the cavity 42 into the sample compartment 13

[0052] It is to be understood that the above description is included to illustrate the operation of the preferred embodiments and is not meant to limit the scope of the invention. From the above discussion, many variations will be apparent to one skilled in the art that would yet be encompassed by the scope of the present invention.