Holding Device for Holding a Magnetizable Substrate during Processing of a Substrate Surface of the Substrate

Abstract

The invention relates to a holding device (2) for holding a magnetizable substrate (8) during machining of at least one substrate surface, in particular of a magnetizable tool to be machined, comprising a magnetic holding unit (4) arranged at the end for fixing the substrate (8) at the end by forming a magnetic field, a receiving unit (6) arranged on the holding unit (4) for receiving the substrate (8), a replaceable adapter unit (10) arranged within the receiving unit (6) for guiding and shielding the substrate (8), the adapter unit (10) having at least one recess (12) for the feedthrough of the substrate (8), the substrate (8) being fixable within the holding device (2) in a laterally supported manner by means of the recess (12).

Claims

1-27. (canceled)

28. A holding device for holding a magnetizable substrate during machining of at least one substrate surface, comprising: a magnetic holding unit arranged at the end for fixing the substrate at the end via the generation of a magnetic field, a receiving unit arranged on the magnetic holding unit for receiving the substrate, a replaceable adapter unit arranged within the receiving unit for guiding and shielding the substrate, wherein the adapter unit has at least one recess for the feedthrough of the substrate, wherein the substrate is fixable within the holding device in a laterally supported manner by means of the recess.

29. The holding device according to claim 28, wherein the receiving unit is shaped like a hollow cylinder and is arranged with respect to the replaceable adapter unit and the magnetic holding unit in such a way that a substrate can be arranged centrally within the receiving unit.

30. The holding device according to claim 28, wherein the replaceable adapter unit has at least one guide element for guiding the substrate, the recess for the feed-through of the substrate being arranged within the guide element.

31. The holding device according to claim 28, wherein the replaceable adapter unit has at least one second guide element for guiding the substrate.

32. The holding device according to claim 28, wherein the replaceable adapter unit has a spacing element for spacing the guide element.

33. The holding device according to claim 28, wherein the spacing element has a plurality of connecting pieces for at least force-fitting or form-fitting to at least the first guide element or the second or further guide element.

34. The holding device according to claim 28, wherein that the spacing element is shaped like a hollow cylinder and is symmetrically arranged within the receiving unit.

35. The holding device according to claim 28, wherein the replaceable adapter unit has a fixing element for fixing the replaceable adapter unit within the receiving unit.

36. The holding device according to claim 28, wherein the magnetic holding unit has a magnet which is completely enclosed within the magnetic holding unit.

37. The holding device according to claim 28, wherein the permanent magnet is arranged within the magnetic holding unit in such a way that a material thickness of at least 0.5 mm of the magnetic holding unit is arranged between the permanent magnet and the receiving unit arranged directly on the magnetic holding unit.

38. The holding device according to claim 28, wherein a protective cover is provided for protecting the substrate which can be arranged inside the holding device.

39. The holding device according to claim 28, wherein the protective cover comprises a second opening for detecting an orientation of a substrate arrangeable in the holding device.

40. A system for at least transporting or processing a plurality of substrates, comprising: a plurality of holding devices for holding a substrate according to claim 28, a receiving unit for receiving the holding devices, wherein the plurality of holding devices are arranged within the receiving unit in such a way that, when a substrate is received separately, at least joint transport or joint processing of the plurality of substrates received can be carried out in each case within a holding device.

41. The system according to claim 40, wherein the receiving unit is formed in the form of a basket with a plurality of receiving elements for receiving the holding devices.

42. The system according to claim 40, wherein a transport box is provided for receiving the receiving unit, wherein the receiving unit can be fixed within the transport box by means of damping elements.

43. The system according to claim 40, wherein a rotatable translation unit is provided for translating the receiving unit for processing the substrates arranged within the holding devices of the receiving unit in an x, y and z direction.

44. A method for at least transporting or processing a plurality of substrates, comprising: Holding a plurality of substrates in one holding device each, Receiving the plurality of holding devices, each equipped with a substrate, into a receiving unit for receiving the holding devices, Performing at least common transport or common processing of the plurality of received substrates.

45. The method according to claim 40, wherein the holding devices are fastened in an at least form-fitting or force-fitting manner in receiving elements of the receiving unit before a joint transport of the substrates.

46. The method according to claim 40, wherein the holding devices in the receiving unit are transferred to a rotatable translation unit for translating the receiving unit before joint processing of the substrates.

47. The method according to claim 44, wherein at least a pretreatment or an aftertreatment or a surface treatment is provided.

Description

[0034] Further advantages, features and details of the invention will be apparent from the following description, in which embodiments of the invention are described in detail with reference to the drawings. In this connection, the features mentioned in the claims and in the description may each be essential to the invention individually or in any combination.

[0035] It shows:

[0036] FIG. 1 a schematic representation of a holding device according to the invention for holding a magnetizable substrate in a spatial view,

[0037] FIG. 2 a schematic representation of a holding device according to the invention as shown in FIG. 1 in a sectional view,

[0038] FIG. 3 a schematic representation of a part of a holding device according to the invention for holding a magnetizable substrate in a spatial view,

[0039] FIG. 4 a schematic representation of the part of a holding device according to the invention for holding a magnetizable substrate according to FIG. 3 in a sectional view,

[0040] FIG. 5 a schematic representation of a further part of the holding device according to the invention for holding a magnetizable substrate in a spatial view,

[0041] FIG. 6 a schematic representation of the further part of a holding device according to the invention for holding a magnetizable substrate according to FIG. 5 in a sectional view,

[0042] FIG. 7 a schematic representation of a system according to the invention for transporting and/or processing a plurality of substrates in a spatial representation,

[0043] FIG. 8 a schematic representation of the individual steps/stages of a process according to the invention for transporting and/or processing a plurality of substrates.

[0044] FIG. 1 shows a schematic representation of a holding device 2 according to the invention for holding a magnetizable substrate 8 (not shown here) in a spatial view.

[0045] The holding device 2 comprises a magnetic holding unit 4 arranged at the end for fixing the substrate 8 at the end by forming a magnetic field, a receiving unit 6 arranged on the holding unit 4 for receiving the substrate 8, and a replaceable adapter unit 10 arranged inside the receiving unit 6 for guiding and shielding the substrate 8. The adapter unit 10 also has a recess 12 for the substrate 8 to feed through, it being possible to fix the substrate 8 in a laterally supported manner inside the holding device 2 by means of the recess 12.

[0046] The receiving unit 6 is shaped like a hollow cylinder and is arranged relative to the replaceable adapter unit 10 and the magnetic holding unit 4 in such a way that a substrate 8 can be arranged centrally within the receiving unit 6. In this case, the receiving unit 6 has recesses 14 for contacting the substrate 8, which are presently arranged symmetrically within the receiving unit 6 and are formed in the form of cutouts 14 arranged on the longitudinal side. It is understood that an asymmetrical arrangement of the recesses 14 within the receiving unit 6 can also be provided.

[0047] The replaceable adapter unit 10 further comprises a first and a second guide element 16, 16′ for guiding the substrate 8, which each have a recess 12 for the feedthrough of the substrate 8, which recess 12 is arranged centrally within the guide element 16, 16′ in the present case. Likewise, a decentralized arrangement of the recess 12 within the guide element 16, 16′ could also be provided here. The guide element 16, 16′ are presently designed/configured in the form of guide discs. Furthermore, the replaceable adapter unit 10 comprises a spacing element 18 for spacing the guide element 16 or the guide element 16, 16′, wherein the spacing element 18 is presently arranged directly between the first and second guide element 16, 16′. The spacing element 18 also has recesses 14 for contacting the substrate 8, which completely overlap with the recesses 14 of the receiving unit 6.

[0048] Furthermore, the adapter unit 10 comprises a fixing element 20 for fixing the adapter unit 10 within the receiving unit 6, wherein the fixing element 20 is presently formed in the form of a clamping ring.

[0049] FIG. 2 shows a schematic representation of the holding device 2 according to the invention for holding a magnetizable substrate 8 according to FIG. 1 in a sectional view.

[0050] According to this sectional view, it can be seen in addition to the arrangement in FIG. 1 that the magnetic holding unit 4 has a magnet 22 which is completely encapsulated within the holding unit 4. This magnet 22 can in particular be in the form of a permanent magnet and be encapsulated within the holding unit 4.

[0051] FIG. 3 shows a schematic representation of a part of a holding device 2 according to the invention for holding a magnetizable substrate 8 in a spatial view.

[0052] FIG. 3 shows the receiving unit 6 according to the invention with the symmetrically arranged recesses 14 formed in the form of longitudinal cutouts, which are clearly visible in this illustration, and the holding unit 4 arranged below the receiving unit 6.

[0053] FIG. 4 shows a schematic representation of the part of the holding device 2 according to the invention for holding a magnetizable substrate 8 according to FIG. 3 in a sectional view.

[0054] In this sectional view, in addition to the longitudinal recesses 14 of the holding unit 6 according to FIG. 4, the permanent magnet 22 arranged inside the holding unit 4 can be seen in particular.

[0055] FIG. 5 shows a schematic representation of a further part of the holding device 2 according to the invention for holding a magnetizable substrate 8 in a spatial view.

[0056] This further part of the holding device 2 according to the invention here concerns the adapter unit 10 according to the invention, which is shown here separately from the receiving unit 6 according to the invention. According to FIG. 5, the structure of an adapter unit 10 according to the invention is shown here as an example, comprising a first and a further guide element 16, 16′, which are arranged above and below the spacing element 18, respectively.

[0057] In this case, the spacing element 18 likewise has symmetrically arranged recesses 14 arranged longitudinally, which in particular ensure direct contacting of a substrate 8 arranged within the adapter unit 10 in the course of processing, for example by means of cleaning liquids, drying air, coating agents and the like. In addition, the recesses 12 arranged symmetrically within the guide element 16, 16′ in the present case for the feedthrough of a substrate 8 to be held can be seen. The fixing element 20 arranged above the guide element 16 serves in particular to fix the adapter unit 10 within the receiving unit 6 and is formed in the present case in the form of a clamping ring which permits in particular a structurally simple fixing of the adapter unit 10 within the receiving unit 6.

[0058] Furthermore, it can be seen according to FIG. 5 that the spacing element 18 has connecting tabs 17 for force-fitting and/or form-fitting to the first and or the second of the further guide element 16, 16′, which is intended in particular to ensure a particularly simple connection between one or more guide element 16, 16′ with the present spacing element 18.

[0059] FIG. 6 shows a schematic representation of the further part of the holding device 2 according to the invention for holding a magnetizable substrate 8 according to FIG. 5 in a sectional view.

[0060] According to this sectional view, in addition to the improved visibility of the plurality of connecting tabs 17 arranged on the spacing element 18 for force-fitting and/or form-fitting with the guide element 16, 16′, the permanent magnet 22 arranged inside the holding unit 4 can also be seen.

[0061] FIG. 7 shows a schematic representation of a system 1 according to the invention for transporting and/or processing a plurality of substrates 8 in a spatial representation.

[0062] The system 1 according to the invention comprises a plurality of holding devices 2 described above for holding a substrate 8 and a holding unit 30 for holding the holding devices 2, the plurality of holding devices 2 being arranged within the holding unit 30 in such a way that, when a substrate 8 is held separately, joint transport and/or joint processing of the plurality of held substrates 8 can be carried out in each case within a holding device 2.

[0063] The receiving unit 30 is formed in the present case in the form of a basket and has a plurality of receiving elements 32 for receiving the holding devices 2, by means of which the holding devices 2 can preferably be fastened in a form-fitting and/or force-fitting manner in the receiving elements 32. In addition, the receiving unit 30 is presently arranged in a transport box 34 for receiving the receiving unit 30, the receiving unit 30 being fixed in this case by means of damping elements 36 within the transport box 34. The damping elements 36 can preferably be formed in the form of foam inserts or the like.

[0064] The holding devices 2 arranged within the receiving unit 30 are further protected via protective covers 24, which have a first opening 26 via which the protective cover 24 can be fastened on one side to a receiving unit 4 of a subject holding device 2. Moreover, the protective covers 24 comprise a second opening 26′ for detecting an orientation of a substrate 8 arrangeable in the holding device 2.

[0065] FIG. 8 shows a schematic representation of the individual steps of a method according to the invention for transporting and/or processing a plurality of substrates 8.

[0066] In this case, the method comprises the steps/stages of receiving 50 a plurality of substrates 8 in a respective holding device 2, receiving 52 the plurality of holding devices 2 equipped with a respective substrate 8 in a receiving unit 30 for receiving the holding devices 2, and carrying out 54 a common transport and/or a common processing of the plurality of received substrates 8.

[0067] By means of the holding device 2 according to the invention or the system 1 and method according to the invention for transporting and/or processing a plurality of substrates 8, it is possible in particular that the use of a holding device 2 according to the invention completely eliminates the handling of individual tools during transport and processing operations and thus considerably reduces the risk of damage to the substrates 8. In addition, the use of a holding device 2 according to the present invention enables a particularly precise arrangement of the substrates 8, which allows a particularly precise processing of the substrates 8. Furthermore, by using the present holding device 8, in particular by means of the replaceable adapter unit 10 according to the invention, one and the same holding device 2 is suitable for the use of a plurality of different substrates 8 by merely modifying or replacing the adapter unit 10, which enormously reduces the necessary diversity of variants of present holding devices 2.

LIST OF REFERENCE SIGNS

[0068] 1 System for transporting and/or processing a plurality of substrates [0069] 2 Holding device [0070] 4 Magnetic holding unit [0071] 6 Receiving unit [0072] 8 Substrate (not explicitly shown here) [0073] 10 Adapter unit [0074] 12 Recess for the feedthrough of a substrate [0075] 14 Recess [0076] 16 First guide means/element [0077] 16′ Second/further guide means/element [0078] 17 Connection piece [0079] 18 Spacing means/element [0080] 20 Fixing means/element [0081] 22 Permanent magnet [0082] 24 Protective cover [0083] 26 Opening [0084] 26′ Second opening [0085] 30 Receiving unit [0086] 32 Receiving element [0087] 34 Transport box [0088] 36 Damping element [0089] 50 Picking up a plurality of substrates in each holding device [0090] 52 Receiving the plurality of holding devices, each equipped with a substrate, into a receiving unit [0091] 54 Performing common transport and/or common processing of the plurality of substrates received.