Systems and methods for the patterning of material substrates
10838406 ยท 2020-11-17
Assignee
Inventors
Cpc classification
G05B19/4155
PHYSICS
International classification
Abstract
A system includes a computing device that generates at least one process script for the modification to a glass ceramic substrate and at least one pattern script that corresponds to the process script. The computing device also merges the process script with the pattern script and generates a plurality of command signals that are based on the merged process and pattern scripts. An energy source generates a plurality of light beams based on the generated command signal(s). A waveform apparatus generates at least one waveform signal to customize the generated light beams based on the generated command signal(s). At least one modulating component modulates the generated light beams based on generated command signal(s). An optical assembly is configured to apply the modulated plurality of light beams to the glass ceramic substrate. At least one motion stage encoder is configured to provide at least one three dimensional (3D) coordinate position of the optical assembly with respect to the motion control drive in order to coordinate application of the modulated light beams with a predefined spatial location.
Claims
1. A modification assembly comprising: a computing device configured to: generate at least one process script for the modification to at least one material substrate; generate at least one pattern script that corresponds to the at least one process script, for the modification to the at least one material substrate; merge the generated at least one process script with the corresponding generated at least one pattern script; and generate a plurality of command signals that are based on the merged generated at least one process script and the corresponding generated at least one pattern script, wherein the at least one command signal includes one or more pulse scripts and corresponding 3D coordinates, and wherein the one or more pulse scripts and the corresponding 3D coordinates are associated with a 3D pattern element of the modification to the at least one material substrate; an energy source configured to couple to said computing device, wherein said energy source is further configured to generate a plurality of light beams based on at least one of the plurality of command signals; a motion control drive configured to couple to said computing device and said energy source, wherein said motion control drive is further configured to generate a waveform type indicator based on the at least one of the plurality of command signals; a waveform apparatus configured to couple to said computing device, said energy source, and said motion control drive, wherein said waveform apparatus is further configured to generate at least one waveform signal based on the at least one of the generated plurality of command signals and the waveform type indicator; at least one modulating component configured to couple to said computing device, said energy source, said motion control drive, and said waveform generator, wherein said at least one modulating component is further configured to modulate the generated plurality of light beams with the at least one waveform signal based on the at least one of the plurality of command signals; an optical assembly configured to couple to the at least one modulating component, said optical assembly is further configured to apply the modulated plurality of light beams to the at least one material substrate; and at least one motion stage encoder configured to couple to said motion control drive and said optical assembly, wherein said motion stage encoder is further configured to provide at least one three dimensional (3D) coordinate position of said optical assembly with respect to said motion control drive in order to coordinate application of the modulated plurality of light beams with a predefined spatial location; and a spectrometer configured to be coupled to said computing device, wherein said spectrometer is further configured to: detect whether the application of the modulated plurality of light beams to the at least one material substrate has resulted in the 3D pattern element of the modification associated with the at least one command signal; and transmit to said computing device at least one signal representative of the application of the modulated plurality of light beams to the at least one material substrate resulting in the 3D pattern element of the modification associated with the at least one command signal; and wherein said computing device is further configured to: provide at least one command signal associated with a different 3D pattern element of the modification to the material substrate; or generate at least one updated pattern script and at least one updated process script.
2. The modification assembly of claim 1, wherein said motion control drive is further configured to generate the waveform type indicator when the at least one 3D coordinate position of the optical assembly matches the 3D coordinates of the at least one command signal.
3. The modification assembly of claim 1, wherein the one or more pulse scripts included in the at least one command signal are based, at least in part, on at least one property of the at least one material substrate.
4. The modification assembly of claim 1, wherein the at least one 3D coordinate position is a series of signal pulses delineating the progression of a predefined distance along a 3D tool path geometry of the modification to the at least one material substrate.
5. A system comprising: a glass ceramic (GC) substrate; and a modification assembly positioned proximate to said GC substrate, wherein said modification assembly comprises: a computing device configured to: generate at least one process script for the modification to at least one material substrate, generate at least one pattern script that corresponds to the at least one process script, for the modification to the at least one material substrate; merge the generated at least one process script with the corresponding generated at least one pattern script; and generate a plurality of command signals that are based on the merged generated at least one process script and the corresponding generated at least one pattern script, wherein the at least one command signal includes one or more pulse scripts and corresponding 3D coordinates, and wherein the one or more pulse scripts and the corresponding 3D coordinates are associated with a 3D pattern element of the modification to the GC substrate; an energy source configured to couple to said computing device, wherein said energy source is further configured to generate a plurality of light beams based on at least one of the plurality of command signals; a motion control drive configured to couple to said computing device and said energy source, wherein said motion control drive is further configured to generate a waveform type indicator based on the at least one of the plurality of command signals; a waveform apparatus configured to couple to said computing device, said energy source, and said motion control drive, wherein said waveform apparatus is further configured to generate at least one waveform signal based on the at least one of the generated plurality of command signals and the waveform type indicator; at least one modulating component configured to couple to said computing device, said energy source, said motion control drive, and said waveform generator, wherein said at least one modulating component is further configured to modulate the generated plurality of light beams with the at least one waveform signal based on the at least one of the plurality of command signals; an optical assembly configured to couple to the at least one modulating component, said optical assembly is further configured to apply the modulated plurality of light beams to the GC substrate; and at least one motion stage encoder configured couple to said motion control drive and said optical assembly, wherein said motion stage encoder is further configured to provide at least one three dimensional (3D) coordinate position of said optical assembly with respect to said motion control drive in order to coordinate application of the modulated plurality of light beams with a predefined spatial location; a spectrometer configured to be coupled to said computing device, wherein said spectrometer is further configured to: detect whether the application of the modulated plurality of light beams to the GC substrate has resulted in the 3D pattern element of the modification associated with the at least one command signal; and transmit to said computing device at least one signal representative of the application of the modulated plurality of light beams to the GC substrate resulting in the 3D pattern element of the modification associated with the at least one command signal; and wherein said computing device is further configured to: provide at least one command signal associated with a different 3D pattern element of the modification to the GC substrate; or generate at least one updated pattern script and at least one updated process script.
6. The modification assembly of claim 5, wherein said motion control drive is further configured to generate the waveform type indicator when the at least one 3D coordinate position of the optical assembly matches the 3D coordinates of the at least one command signal.
7. The modification assembly of claim 5, wherein the one or more pulse scripts included in the at least one command signal are based, at least in part, on at least one property of the GC substrate.
8. The modification assembly of claim 5, wherein the at least one 3D coordinate position is a series of signal pulses delineating the progression of a predefined distance along a 3D tool path geometry of the modification to the GC substrate.
9. A method for modifying at least one material substrate, said method comprising: generating at least one process script, via a computing device, to modify the at least one material substrate; generating at least one pattern script that corresponds to the at least one process script, via the computing device, to modify the at least one material substrate; merging the generated at least one process script with the corresponding generated at least one pattern script; generating a plurality of command signals that are based on the merged generated at least one process script and the corresponding generated at least one pattern script, wherein the plurality of command signals includes one or more pulse scripts and corresponding 3D coordinates, and wherein the one or more pulse scripts and 3D coordinates are associated with a 3D pattern element of the modification; generating a plurality of light beams, via an energy source, based on at least one of the plurality of command signals; generating a waveform type indicator, via a motion control drive, based on the at least one of the plurality of command signals; generating at least one waveform signal, via a waveform apparatus, based on the at least one of the plurality of command signals; modulating the generated plurality of light beams with the at least one waveform signal, via a modulating component, based on the at least one of the plurality of command signals; applying the modulated plurality of light beams to a GC substrate, via an optical assembly; providing, via a motion stage encoder, at least one three dimensional (3D) coordinate position of the optical assembly with respect to the motion control drive in order to coordinate application of the modulated plurality of light beams with a predefined spatial location; and detecting, via a spectrometer, that the application of the modulated plurality of light beams to the GC substrate has resulted in the 3D pattern element of the modification associated with the plurality of command signals; transmitting, via the spectrometer, to said computing device at least one signal representative of the application of the modulated plurality of light beams to the GC substrate resulting in the 3D pattern element of the modification associated with the at least one command signal; and at least one of: providing, by said computing device, at least one command signal associated with a different 3D pattern element of the modification; or generating, by said computing device, at least one updated pattern script and at least one updated process script.
10. The method of claim 9, wherein the waveform type indicator is generated when the current 3D coordinate position of the optical assembly matches the 3D coordinates of the at least one command signal.
11. The method of claim 9, wherein the one or more pulse scripts included in the at least one command signal are based, at least in part, on at least one property of the at least one material substrate.
12. The method of claim 9, wherein the at least one motion stage encoder provides the current 3D coordinate position of the optical assembly as a series of signal pulses delineating the progression of a predefined distance along a 3D tool path geometry of the modification.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
(6) The embodiments described herein enable the in-situ patterning of material substrates, such as GC substrates, with various phases, such that the GC substrate can be imbued with various functionalities and can create complex highly integrated systems within the GC substrate. Such systems can include photonic, bionic, and electronic systems among others. The embodiments described herein include, for example, the use of laser scripted pulse modulation techniques to directly transform the amorphous phases of the GC matrix into discrete etchable (soluble) phases, thus inducing site-selective phase conversion during the laser patterning process. Such techniques enable for the control and definition of variations in the electrical and optical character, mechanical compliance, and chemical solubility of the GC substrate. The laser genotype modulation approach can be translated to other photo-structurable GCs and a wide array of other related materials, including organic-inorganic hybrids and mixed composites.
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(8) In some embodiments, system 100 includes a computing device 106 that can be, for example, a desktop computer, laptop, mobile device, tablet, thin client, or other device having a communications interface (not shown) that can communicate with other components of system 100, as explained in more detail below with respect to
(9) In some embodiments, motion control apparatus 108 includes motion control drives 110 and a motion control stage 112. Motion control apparatus 108 is coupled to a first synch circuit 114 that is coupled to a delay generator 115 and to a detection device, such as a spectrometer 116. In some embodiments, first synch circuit 114 can be any suitable commercially available circuit that is programmed to control the timing of signals being channeled through system 100 based on information received from computing device 106. In some embodiments, spectrometer 116 can be any suitable commercially available spectrometer, detection device, sensing element or similar monitoring instrument.
(10) In some embodiments, motion control apparatus 108 is coupled to a second synch circuit 120 that is coupled to a waveform generator 124 and a master oscillator delay generator 126. In some embodiments, waveform generator 124 can be any suitable commercially available arbitrary waveform generator. Second synch circuit 120 can also be any suitable commercially available circuit that is programmed to control the timing of signals. In some embodiments, an energy source, such as a laser 130, is coupled to master oscillator delay generator 126. In some embodiments, laser 130 can be any suitable laser that is configured to generate a plurality of pulsed light beams. In some embodiments, other types of energy sources can be used instead of lasers, such as electron beams, x-rays, proton beams, and lamp and arc sources.
(11) In some embodiments, waveform generator 124 is also coupled to an amplifier 136 and motion control apparatus 108 is coupled to an amplifier 140. In some embodiments, amplifiers 136 and 140 are each configured to alter any signals received therein. The signals can be altered according to a transfer function, such as to apply a gain factor to multiply the voltage or current or numerically digitized amplitude of the signals received therein to generate modified output signals, such as an amplified signal.
(12) In some embodiments, system 100 also includes one or more modulating devices or components, such as a first electro-optic (EO) modulator cell 142 and a second EO modulator cell 144. First EO modulator cell 142 is coupled to amplifier 136 in some embodiments. Second EO modulator cell 144 is coupled to an optical assembly 160 that includes an optical device, such as a lens or mirror 162, and a focusing conduit 164 to focus the light beams that go through lens 162 onto material substrate 102. For example, in some embodiments, the light beams are focused onto at least a portion of top exterior surface 165, bottom exterior surface 166, and/or side exterior surface 167. In some embodiments, when other types of energy sources are used instead of laser 130, they can be modulated by devices other than EO cell modulators 142 and 144 to generate scripts of the other energy types, such as electron scripts, proton scripts, x-ray scripts etc. Motion control stage 112 is coupled to optical assembly 160 and is configured to monitor the position of optical assembly 160 so as to continuously output the position of optical assembly 160 to the motion control drives 110. Motion control stage 112 may include a motion stage encoder (not shown) to encode the position of optical assembly 160, as discussed in more detail below.
(13) Spectrometer 116 is positioned proximate to material substrate 102 such that a sensing element or a transducer 172 of spectrometer 116 is coupled to at least a portion of material substrate 102. Spectrometer 116 is also coupled to computing device 106. In some embodiments, spectrometer 116 is configured to detect various aspects of the modification being performed on material substrate 102.
(14) During operation of system 100, photons are administered in discrete and pre-defined packets, synchronized with the modification pattern and geometry, to create a tapestry or mosaic of material states on material substrate 102 with different phases, compositions, and functionalities. For example, as explained in more detail below with respect to
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(16) Hardware unit 225 also includes a system memory 232 that is coupled to processor 230 via a system bus 234. Memory 232 can be a general volatile RAM. For example, hardware unit 225 can include a 32 bit microcomputer with 2 Mbit ROM and 64 Kbit RAM, and/or a few GB of RAM. Memory 232 can also be a ROM, a network interface (MC), and/or other device(s).
(17) In some embodiments, computing device 200 can also include at least one media output component or display interface 236 for use in presenting information to a user. Display interface 236 can be any component capable of conveying information to a user and may include, without limitation, a display device (not shown) (e.g., a liquid crystal display (LCD), an organic light emitting diode (OLED) display, or an audio output device (e.g., a speaker or headphones)). In some embodiments, computing device 300 can output at least one desktop, such as desktop 240. Desktop 240 can be an interactive user environment provided by an operating system and/or applications running within computing device 200, and can include at least one screen or display image, such as display image 242. Desktop 240 can also accept input from a user in the form of device inputs, such as keyboard and mouse inputs. In some embodiments, desktop 240 can also accept simulated inputs, such as simulated keyboard and mouse inputs. In addition to user input and/or output, desktop 240 can send and receive device data, such as input and/or output for a FLASH memory device local to the user, or to a local printer.
(18) In some embodiments, display image 242 can be presented to a user on computer displays of a remote terminal (not shown). For example, computing device 200 can be connected to one or more remote terminals (not shown) or servers (not shown) via a network (not shown), wherein the network can be the Internet, a local area network (LAN), a wide area network (WAN), a personal area network (PAN), or any combination thereof, and the network can transmit information between computing device 300 and the remote terminals or the servers, such that remote end users can access the information from computing device 200.
(19) In some embodiments, computing device 200 includes an input or a user interface 250 for receiving input from a user. User interface 250 may include, for example, a keyboard, a pointing device, a mouse, a stylus, a touch sensitive panel (e.g., a touch pad or a touch screen), a gyroscope, an accelerometer, a position detector, and/or an audio input device. A single component, such as a touch screen, may function as both an output device of the media output component and the input interface. In some embodiments, mobile devices, such as tablets, can be used.
(20) Computing device 200, in some embodiments, can include a database 260 within memory 232, such that various information can be stored within database 260. Alternatively, in some embodiments, database 260 can be included within a remote server (not shown) with file sharing capabilities, such that database 260 can be accessed by computing device 200 and/or remote end users. In some embodiments, a plurality of computer-executable instructions can be stored in memory 232, such as one or more computer-readable storage media 270 (only one being shown in
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(22) At least some of the above-referenced components and/or devices of system 100 (shown in
(23) In some embodiments, networks 313 and pathways 315 are designed as diffractive optical elements that are configured for far-infrared and terahertz applications. Networks 313 and pathways 315 can be laser-written phase structures, that include pure lithium metasilicate crystallites that have been formed in the glass in situ. Thus, the material substrate 102 can be patterned as, for example, an optically-active region, by controlling the optical character of the GC substrate during laser photo-modulation.
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(25) Based on the input, in step 404, computing device 106 generates one or more process scripts. In step 406, computing device 106 generates one or more pattern scripts that correspond to the process scripts. In some embodiments, the process scripts include different or discrete genotype pulse scripts or sequences, wherein each of the individual pulse sequences are based on nascent material properties of material substrate 102 and are designed to elaborate or express specific modifications in material substrate 102. The process scripts include all relevant laser material processing parameters that will be applied to material substrate 102 during the modification, and each pulse script or sequence may correspond to an element or feature of the modification. The corresponding pattern scripts, in some embodiments, represent the laser machining code and contain the three-dimensional (3D) (or beyond) Cartesian coordinate information for the tool path geometry. In other words, in some embodiments, each pattern script includes the 3D Cartesian coordinate information for the element or feature of the corresponding process script.
(26) In some embodiments, the pulse scripts can be tailored and designed to elicit a diverse array of material modifications and inductions from the macroscale to the nanoscale. Such material modification and inductions include, but are not limited to, physical effects, such as patterning, structuring, texturing, morphology and topography, compaction and densification, mechanical strength and compliance. Chemical effects are also included, such as phase change, composition and stoichiometry, ferroelectric, pyroelectric and piezoelectric behavior, magnetic induction and electrical conductivity.
(27) In step 408, computing device 106 merges the process script(s) with the pulse script(s). For example, in some embodiments, the process script(s) are merged synchronously with the corresponding pulse script(s). Computing device 106, in some embodiments, is enabled to generate the process and pulse scripts and conduct the merging by being configured or having a processer, such as processor 230 (shown in
(28) In step 410, for example, computing device 106, generates a plurality of command signals that are based on the merged process and pattern scripts. In step 412, computing device 106 transmits the generated command signals to other components and/or devices of system 100. In some embodiments, the command signals can be transmitted simultaneously to each of the other components. Alternatively, in other embodiments, the command signals can be transmitted in a sequential order, such as numerical order, to the other components. In some embodiments, the command signals are representative of the various functions that each of the other components are to perform to ensure the desired modification is performed onto material substrate 102 based on the merged pattern script(s) and the process script(s). For example, the command signals can be representative of various functions that each of the other components are to perform to facilitate a modification that includes a pattern on at least a portion of a surface, such as top exterior surface 165, of material substrate 102. In some embodiments, each command signal is representative of the various functions that each of the other components are to perform to ensure that an element of the desired modification is performed onto the material substrate 102. The modification can also include patterns that are discretely spaced or separated (as shown in
(29) For example, in step 414, motion control drive 110 (shown in
(30) In step 416, the motion control stage 112 determines the current position of the optical assembly 160 as a set of 3D Cartesian coordinates. The motion control stage 112 then transmits the coordinates, encoded as a series of pulses by the motion stage encoder, to the motion control drives 110. In some embodiments, the motion control stage 112 may continuously delineate the progression of a predefined distance along the three-dimensional tool path pattern.
(31) In step 418, motion control drive 110 determines the 3D Cartesian coordinates of an element of the desired modification based on the received command signal. Motion control drive 110 receives the current position of the optical assembly 160 from the motion stage encoder 112 and compares the current position of the optical assembly 160 to the coordinates of the current element of the desired modification. If the coordinates match, motion control drive 110 generates at least one output that provides instructions for the type of pulse script (a type indicator) in the pulse scripts to be used for the modification to material substrate 102, wherein the instructions are based on the command signal that is received. For example, in some embodiments, the instructions can be instructions on how to modulate the pulse scripts for the intended modification. In step 420, motion control drive 110 transmits the type indicator signal representative of the output to waveform generator 124 (shown in
(32) In step 422, waveform generator 124 receives the type indicator signal and synthesizes the pulse scripts based on the output. In some embodiments, such as in step 424, the newly synthesized pulse scripts are transmitted to amplifier 136 (shown in
(33) In step 430, laser 130 (shown in
(34) After receiving the pulse scripts and the light beams, first EO modulator cell 142 transmits the output pulse scripts and newly modulated light beams to second EO modulator cell 144 (shown in
(35) In step 440, second EO modulator cell 144 transmits the light beams combined with the further modulated output pulse scripts to optical assembly 160 (shown in
(36) In some embodiments, the modification being done to material substrate 102 can be monitored in real-time. For example, in step 444, spectrometer 116 (shown in
(37) Based on the foregoing, waveform generator 124 enables the creation of a plurality of voltage scripts that can be used for the customization of the light beams that are used. Moreover, motion control apparatus 108 enables controlling the delivery and/or spatial location of each of the pulse sequences. As such, intercommunication link between, for example, modulator cells 142 and 144 and motion control apparatus 108 is based on a series of signal pulses generated from the motion stage encoders (not shown) that delineate the progression of a predefined distance along the 3D tool path pattern.
(38) In some embodiments, the line-by-line matching of the process script and the pattern script is similar to DNA base-pairing in molecular biology, permitting the delivery of discrete pre-defined laser pulse scripts to material substrate 102 on a per-spot basis with resolution below the diffraction limit of light. In some embodiments, the pulse scripts are configured to activate or alter material substrate's 102 native character. For example, material substrate 102 can be transformed to a specific phase or disposition based on the underlying and predetermined fundamental solid state physics and photochemistry. The final state of material substrate 102 can be controlled by thermal and non-thermal channels and realized through chemical pathways or physical pathways. From a single laser process script, which comprises individual genotype pulse scripts, multiple material substrate states and functionalities with high resolution can be defined.
(39) The individual pulse scripts can be based on the underlying chemical physics, solid state dynamics and photochemistry associated with the interactions between laser 130 and material substrate 102. The respective pulses in a sequence or script can be modulated in amplitude (intensity), pulse duration (pulse width), frequency (repetition rate), spatial profile (energy distribution) and polarization (electric-field orientation), or any combination thereof. In some embodiments, the pulse scripts are administered on a spot-by-spot basis, ensuring that each 3D pattern element or voxel receives the prescribed photon sequencing for the desired chemical or physical effect. The pulse scripts can be tailored and designed to elicit a diverse array of material substrate modifications and inductions from the macroscale to the nanoscale.
(40) In some embodiments, materials, such as material substrate 102, can be guided into discrete phases and physical dispositions so that electromechanical behavior is attained. Laser pulse-scripted processing, as described in diagram 400, enables the careful regulation of energy flow into the material system, enabling thermal and non-thermal channels to be accessed for defining the processing mechanisms and the final material state. The laser pulse sequences within a pulse script can be specially devised to account for incubation effects and other time-dependent phenomena associated with the continuous evolution in the material's properties as a result of the laser exposure. For example, changes in morphology and roughness can impact absorptivity and surface reflectivity, and alterations in composition and phase can affect heat capacity, thermal conductivity and diffusivity. The pulse sequencing can accommodate the material dynamics, enabling the controlled delivery of energy into the material system for achieving the desired phase outcome with spatially overlapped structural and chemical modifications.
(41) The ability to induce patterned, site-selective phase transformation and electromechanical activation in a GC substrate in a single step enables the rapid design of complex, highly integrated systems within the GC substrate. Such systems include photonic, bionic, and electronic systems among others. The embodiments described herein target the preparation of GC materials whose electrical and optical characteristics, mechanical compliance, and chemical solubility can be controllable through the laser modulation process. By controlling the photophysics and photochemistry of the GC during photo exposure, the invention enables specific silicate phases to be laser patterned into the glass matrix in situ.
(42) Exemplary embodiments of the systems and methods are described above in detail. The systems and methods are not limited to the specific embodiments described herein, but rather, components of the systems and/or steps of the method may be utilized independently and separately from other components and/or steps described herein. For example, the system may also be used in combination with other systems and methods, and is not limited to practice with only a system as described herein. Rather, the exemplary embodiment can be implemented and utilized in connection with many other systems.
(43) Although specific features of various embodiments of the invention may be shown in some drawings and not in others, this is for convenience only. In accordance with the principles of the invention, any feature of a drawing may be referenced and/or claimed in combination with any feature of any other drawing.
(44) This written description uses examples to disclose the invention, including the best mode, and also to enable any person skilled in the art to practice the invention, including making and using any devices or systems and performing any incorporated methods. The patentable scope of the invention is defined by the claims, and may include other examples that occur to those skilled in the art. Such other examples are intended to be within the scope of the claims if they have structural elements that do not differ from the literal language of the claims, or if they include equivalent structural elements with insubstantial differences from the literal language of the claims.