REFLECTIVE FPM USING A PARABOLIC MIRROR

Abstract

The present disclosure relates to a reflective FPM using a parabolic mirror, and particularly to a reflective FPM using a parabolic mirror including: a first illuminator having a first panel that is provided with numerous LED light sources and composed of a first LED array irradiating a plurality of first LED beams to a measurement object sequentially at different angles through an objective lens; a second illuminator having a second panel that is provided with numerous LED light sources and composed of a second LED array irradiating a plurality of second LED beams to the measurement object sequentially at different angles, following irradiation from the first illuminator; a parabolic mirror reflecting each of second beams generated from the second illuminator, allowing being incident on the measurement object; a lens configured to collect a beam from the measurement object to which the first and second LED beams were irradiated; and a photodetector receiving light from the lens and acquires images for each of a plurality of first and second beams.

Claims

1. A reflective FPM using a parabolic mirror comprising: a first illuminator having a first panel that is provided with numerous LED light sources and composed of a first LED array irradiating a plurality of first LED beams to a measurement object sequentially at different angles through an objective lens; a second illuminator having a second panel that is provided with numerous LED light sources and composed of a second LED array irradiating a plurality of second LED beams to the measurement object sequentially at different angles, following irradiation from the first illuminator; a parabolic mirror reflecting each of second beams generated from the second illuminator, allowing being incident on the measurement object; a lens configured to collect a beam from the measurement object to which the first and second LED beams were irradiated; and a photodetector receiving light from the lens and acquires images for each of a plurality of first and second beams.

2. The reflective FPM using a parabolic mirror of claim 1, wherein the first panel is a plate shape, the LED array is a ring shape, arranged at a center point of the first panel and spaced apart from each other at a predetermined distance in a circumferential direction with reference of the center point of the first panel, and the first ring-shaped LED array is arranged in plural numbers, spaced at a certain distance in a radius direction.

3. The reflective FPM using a parabolic mirror of claim 2, wherein the second panel is a ring shape with a central hole, the second LED array is a ring shape, spaced from each other at a predetermined distance in a circumferential direction with reference of a center point of the second panel, and the second ring-shaped LED array is arranged in plural numbers, spaced at a certain distance in a radius direction.

4. The reflective FPM using a parabolic mirror of claim 3, further comprising an LED control portion controls that the first LED light source positioned at the center point of the first panel irradiates a beam, and then starting with the light sources on the first LED array having a smaller radius, the light sources irradiate beams sequentially, followed by controlling that starting with the light sources on the second LED array having a smaller radius, the light sources irradiate beams sequentially, and the photodetector acquires images for the respective beams.

5. The reflective FPM using a parabolic mirror of claim 4, further comprising an analysis unit that calculates a synthetic image having phase information of the measurement object by placing each of the images in a spectral domain and stitching.

6. The reflective FPM using a parabolic mirror of claim 1, the first beam is irradiated from the first illuminator, passes through an optical system and reflected by a beam splitter, and then is incident on the measurement object through an objective lens.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings of this specification exemplify a preferred embodiment of the present disclosure, and helps more clearly understanding the spirit of the present disclosure along with the following detailed description. Thus, it will be understood that the present disclosure is not limited to only contents illustrated in the accompanying drawings:

[0023] FIG. 1 shows a schematic view of a transmissive FPM system.

[0024] FIG. 2 shows a spectrum of a measurement object.

[0025] FIG. 3 shows a schematic view of a prior transmissive FPM system.

[0026] FIG. 4 shows a magnified view of a dark-field LED array panel part of FIG. 3.

[0027] FIG. 5 shows a photograph of the dark field LED array panel.

[0028] FIG. 6 shows a schematic view of a reflective FPM using a parabolic mirror according to an embodiment of the present invention.

[0029] FIG. 7 shows a schematic view of a reflective FPM using a parabolic mirror when a beam is irradiated from a bright field illuminator according to an embodiment of the present disclosure.

[0030] FIG. 8 shows a schematic view of a reflective FPM using a parabolic mirror when a beam is irradiated from a dark field illuminator according to an embodiment of the present disclosure.

[0031] FIG. 9 shows a plan view of an LED panel of a bright field illuminator according to an embodiment of the present disclosure.

[0032] FIG. 10 shows a schematic view of a measurement object, a dark field illuminator, a parabolic mirror and an objective lens according to an embodiment of the present disclosure.

[0033] FIG. 11 shows a plan view of an LED panel of a dark field illuminator according to an embodiment of the present disclosure.

[0034] FIG. 12 shows a photograph of an LED panel of a dark field illuminator according to an embodiment of the present disclosure.

[0035] FIG. 13 shows a photograph of a parabolic mirror according to an embodiment of the present disclosure.

[0036] FIG. 14 shows a spectral domain of a measurement object measured according to an embodiment of the present disclosure.

[0037] FIG. 15 shows a high resolution image reconstructed at 200 μm of a scale bar, measured according to a test example of the present disclosure.

[0038] FIG. 16 shows a magnified view of element 1 in group 11 of FIG. 15, at 10 μm of a scale bar.

[0039] FIG. 17 shows a magnified view of element 1 in group 11 when a normal beam is irradiated, at 10 μm of a scale bar.

[0040] FIG. 18 shows an intensity profile in element 1 in group 11 of FIG. 16.

[0041] FIG. 19 shows a synthetic spectrum by FPM at a log scale measured according to a test example of the present disclosure.

REFERENCE NUMBERS

[0042] 1: Prior transmissive FPM [0043] 2: Measurement object [0044] 3: Prior reflective FPM [0045] 10: LED array [0046] 11: LED light source [0047] 20: Objective lens [0048] 30: Condenser lens [0049] 40: Photodetector [0050] 100: Reflective FPM using a parabolic mirror [0051] 110: A first illuminator (bright field illuminator) [0052] 120: A first panel (Bright field panel) [0053] 121: A first LED array (bright field LED array) [0054] 122: A first LED light source (bright field LED light source) [0055] 130: An optical system [0056] 131: A first lens [0057] 132: A field stop [0058] 133: A second lens [0059] 140: A beam splitter [0060] 150: A second illuminator (dark field illuminator) [0061] 160: A second panel (dark field panel) [0062] 161: A second LED array (dark field LED array) [0063] 162: A second LED light source (dark field LED light source) [0064] 170: Central hole [0065] 180: Parabolic mirror

DETAILED DESCRIPTION

Best Mode

[0066] Hereinafter, described is the configuration and function of a reflective FPM using a parabolic mirror according to an embodiment of the present disclosure.

[0067] Firstly, FIG. 6 shows a schematic view of a reflective FPM using a parabolic mirror 100 according to an embodiment of the present invention. Further, FIG. 7 a schematic view of the reflective FPM using a parabolic mirror 100 when a beam is irradiated from a bright field illuminator according to an embodiment of the present disclosure. Further, FIG. 8 shows a schematic view of the reflective FPM using a parabolic mirror 100 when a beam is irradiated from a dark field illuminator according to an embodiment of the present disclosure.

[0068] Further, FIG. 9 shows a plan view of an LED panel of a bright field illuminator according to an embodiment of the present disclosure. Further, FIG. 10 shows a schematic view of a measurement object, a dark field illuminator, a parabolic mirror and an objective lens according to an embodiment of the present disclosure.

[0069] FIG. 11 shows a plan view of an LED panel of a dark field illuminator according to an embodiment of the present disclosure, and FIG. 12 shows a photograph of an LED panel of a dark field illuminator according to an embodiment of the present disclosure.

[0070] FIG. 13 shows a photograph of a parabolic mirror according to an embodiment of the present disclosure.

[0071] Further, FIG. 14 shows a spectral domain of a measurement object measured according to an embodiment of the present disclosure.

[0072] As shown in FIGS. 6 to 8, it is seen that, in general, the reflective FPM using a parabolic mirror 100 includes a first illuminator 110 corresponding to a bright field illuminator, an objective lens 20, a second illuminator 150 corresponding to a dark field illuminator, a condenser lens 30, etc.

[0073] The first illuminator 110 includes a first panel 120, an optical system 130 and a beam splitter 140, wherein the first panel 120 includes a plurality of first LED arrays 121 that are arranged on the first panel (120) and have numerous first LED light sources 122.

[0074] As shown in FIG. 10, it is seen that the first panel 120 is a plate shape. The first LED array 121 is a ring shape, arranged at a center point of the first panel 120 and spaced apart from each other at a predetermined distance in a circumferential direction with reference of the center point of the first panel, and the first ring-shaped LED array 121 is arranged in plural numbers, spaced at a certain distance in a radius direction.

[0075] Thus, through an LED control portion, a beam is irradiated sequentially from the first LED light source 122 positioned at the center point of the first panel 120 and then beams are irradiated from the light sources 122 on the first LED array 121 having a small radius.

[0076] A first beam irradiated from the first illuminator 110 passes through the optical system 130 formed with a first lens 131, a field stop 132 and a second lens 133 and then reflected by a beam splitter 140. This, as shown in FIGS. 6 and 7, passes the objective lens 20 and reflected on the measurement object 2 to form an image on a back focal plane of the objective lens 20. A beam for imaging pass through the beam splitter 140 and the condenser lens 30 in order and then is detected by the photodetector 40.

[0077] The photodetector 40 receives light from the condenser lens and acquires images for each of a plurality of the first beams.

[0078] Further, sequentially mad is irradiation from all of the first LED light sources 122 that are arranged in the first panel 120 to acquire an image, and then a second illuminator 150 is driven.

[0079] As shown in FIG. 9, the second illuminator 150 is a dark field illuminator, which reflects a second beam by a parabolic mirror 180 without passing thorough the objective lens 20, allowing being incident on the measurement object 2.

[0080] According to an embodiment of the present disclosure, even though a light source corresponds to the second LED light source 162 that is far from the measurement object 2, application of the parabolic mirror 180 makes intensity of light reaching the measurement object 2 uniform, thus allowing increasing a SNR and achieving high resolution as compared to the prior reflective FPM 3.

[0081] The second illuminator 150 includes a second panel 160 and the parabolic mirror 180. The second panel 160 is provided with a plurality of the second LED light sources 162 and formed with a plurality of second LED arrays 161 that irradiate a plurality of second LED beams to the measurement object 2 sequentially at different angles, after irradiation by the first illuminator 110.

[0082] As shown in FIGS. 11 and 12, the second panel 160 is formed in a planar ring shape on which a centric hole 170 is formed. The measurement object is positioned on the centric hole 170, as shown in FIG. 9.

[0083] Further, the second LED array 161 is a ring shape, spaced from each other at a predetermined distance in a circumferential direction with reference of a center point of the second panel 160 and this second ring-shaped LED array 161 is arranged in plural numbers, spaced at a certain distance in a radius direction.

[0084] Thus, an LED control portion controls that the light sources of the first illuminator 110 irradiate beams sequentially, and then starting with the light sources on the second LED array 161 having a smaller radius, the light sources irradiate beams sequentially.

[0085] Further, images by the respective light sources are detected in the photodetector.

[0086] That is, the images for the respective LED light sources of the first illuminator 110 and the second illuminator 150 are acquired. Further, as shown in FIG. 14, each of the images is positioned in a spectral domain.

[0087] Further, this undergoes stitching and thus a synthetic image having phase information is calculated. That is, the image undergoes IFT (Inversion Fourier Transform) to acquire a spectrum and then the phase information is acquired by converging phase through an overlapping region to generate the synthetic image having phase information.

Description of Embodiments

[0088] Hereinafter, described is a test result of a reflective FPM using a parabolic mirror according to the aforementioned embodiment of the present disclosure.

[0089] FIG. 15 shows a high resolution image reconstructed at 200 μm of a scale bar, measured according to a test example of the present disclosure. FIG. 16 shows a magnified view of an element 1 in group 11 of FIG. 15, at 10 μM of a scale bar. FIG. 17 shows a magnified view of an element 1 in group 11 when a normal beam is irradiated, at 10 μM of a scale bar. FIG. 18 shows an intensity profile in element 1 in group 11 of FIG. 16. Further, FIG. 19 shows a synthetic spectrum by FPM at a log scale measured according to a test example of the present disclosure.

[0090] In the test example of the present disclosure, used is a positive USAF-1951 resolution target coated with chromium in a quartz plate, consisting of group 4 through group 11. FIG. 7 Shows a high-resolution image intensity and a synthesized spectrum through the FPM reconstruction. FIG. 16 is a magnified view around the finest pattern. For comparison, FIG. 17 shows an image intensity in the same region when a normal beam is irradiated from an on-axis. FIG. 18 shows an intensity profile of element 1 in group 11 (488 nm period; 2,048 lp/mm), and it is clearly resolved in two perpendicular directions.

[0091] As shown in FIGS. 15 to 19, and particularly in FIG. 16, in conclusion, it is seen that a high resolution of about 250 nm or less is achieved through the reflective FPM using a parabolic mirror according to the embodiment of the present disclosure.