Normally-closed flow rate control valve

Abstract

A flow rate control valve includes a base block and a valve opening/closing mechanism. The base block is provided with a valve chamber in which a valve seat through which a liquid raw material L flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed. The valve opening/closing mechanism includes a slide bearing part, a support post part, a piezoelectric actuator part, and a valve-actuating part. The slide bearing part is installed on the base block 1 and is provided with a bearing. The support post part includes a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction.

Claims

1. A normally-closed flow rate control valve, comprising: a base block provided with a valve chamber in which a valve seat through which a liquid raw material flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed; and a valve opening/closing mechanism that performs opening/closing drive of the diaphragm, wherein the valve opening/closing mechanism includes: a slide bearing part installed on the base block and provided with a bearing; a support post part including a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction; a piezoelectric actuator part provided between the slide bearing part and the support post part, the piezoelectric actuator part including a piezoelectric element that expands by application of voltage, and presses up the support post part in such a direction as to separate the support post part from the diaphragm with respect to the slide bearing part as a reference; and a valve-actuating part that is provided from the support post part toward the diaphragm and that performs opening/closing drive of the diaphragm along up-and-down movement of the support post part, the support post of the support post part is made of a low thermal expansion member, the slide bearing part includes a bearing lower part that is bottomed and that has an opened upper face, and a bearing upper part that is screwed movably forward and backward in the bearing lower part and that is provided with the bearing in which the support post is inserted, the support post part includes the support post, an upper end support member that is provided on an upper end of the support post and on which an upper end of the piezoelectric actuator part is abutted, and a lower end support member provided between the bearing upper part and the bearing lower part, and an elastic member is installed between the bearing upper part and the lower end support member.

2. The normally-closed flow rate control valve according to claim 1, wherein the base block includes a base block lower part including the valve chamber formed therein, and a base block upper part on which the slide bearing part is provided, and at least one of a cooling space and a cooling fin is disposed in the base block upper part.

3. The normally-closed flow rate control valve according to claim 1, wherein the valve-actuating part includes a plunger provided from the support post part toward the diaphragm, a protective plate that is in planar contact with an upper surface of the diaphragm, and a steel ball provided between the plunger and the protective plate.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is as follows. FIG. 1(a) is a longitudinal cross-sectional view when no voltage is applied, and FIG. 1(b) is a longitudinal cross-sectional view when voltage is applied, according to one embodiment of the present invention.

(2) FIG. 2 is a longitudinal cross-sectional view in which no load is applied on an elastic member and the elastic member is in an initial state of assembly, according to one embodiment of the present invention shown in FIG. 1.

(3) FIG. 3 is as follows. FIG. 3(a) is a view along arrows W-W in FIG. 1(b), FIG. 3(b) is a view along arrows X-X in FIG. 1(b), FIG. 3(c) is a view along arrows Y-Y in FIG. 1(b), and FIG. 3(d) is a view along arrows Z-Z in FIG. 1(b).

(4) FIG. 4 is as follows. FIG. 4(a) is a partially enlarged view of a valve chamber in which a diaphragm in FIG. 1 is in a closed state, and FIG. 4(b) is a partially enlarged view of the valve chamber in which the diaphragm in FIG. 1 is in an opened state.

DESCRIPTION OF EMBODIMENTS

(5) Hereinafter, the present invention will be described in detail according to illustrated embodiments. A flow rate control valve A of a liquid raw material vaporization device includes a base block 1 and a valve opening/closing mechanism 10.

(6) In the present embodiment, the base block 1 includes two blocks: a base block lower part 1a and a base block upper part 1b.

(7) The base block lower part 1a includes a first lower part Tal, and a second lower part 1a2 mounted on the first lower part 1a1.

(8) A valve chamber 4 is a space part having a circular shape in a planar view and is provided between the first lower part 1a1 and the second lower part 1a2. The valve chamber 4 is divided in a liquid-tight manner into an upper part and a lower part by a diaphragm 5 described below, and the lower part on the first lower part Tal side is referred to as valve chamber lower part 4a and the upper part on the second lower part 1a2 side is referred to as valve chamber upper part 4b, with the diaphragm 5 as the boundary. Since the valve chamber 4 is divided in a liquid-tight manner into the upper part and the lower part, a liquid raw material L never leaks from the valve chamber lower part 4a to the valve chamber upper part 4b.

(9) A liquid raw material introduction passage 6 through which the liquid raw material L delivered from a storage tank (not shown) passes is formed in the first lower part 1a1, and communicates with a valve seat 3 accommodated in a valve seat accommodating hole 4s, through the valve seat accommodating hole 4s that is formed so as to be recessed in a bottom part of the valve chamber lower part 4a, in the present embodiment. The valve seat accommodating hole 4s having a circular shape in a planar view is formed so as to have such a depth as to allow a seat part 3a of the valve seat 3 to be fitted therein. A ring-shaped projecting ridge part 4t is protrusively formed around the valve seat accommodating hole 4s. A bottom part of the valve seat accommodating hole 4s is formed lower by one stage than the ring-shaped projecting ridge part 4t.

(10) A liquid raw material supply path 9 for supplying the liquid raw material L, which has flowed into the valve chamber lower part 4a of the valve chamber 4, to a vaporizing chamber 100 of a vaporizer (not shown) connected to the flow rate control valve A is provided so as to extend from the bottom part of the valve chamber lower part 4a toward a side face of the first lower part 1a1. In the present embodiment, the liquid raw material introduction passage 6 communicates with the valve seat 3 through the valve seat accommodating hole 4s, and the liquid raw material supply path 9 opens to the bottom part of the valve chamber lower part 4a. Although not shown, conversely, a passage opened to the bottom part of the valve chamber lower part 4a may be a liquid raw material introduction passage, and a passage communicating with the valve seat 3 may be a liquid raw material supply path and may be connected to the vaporizing chamber.

(11) The valve chamber upper part 4b is provided in the second lower part 1a2. A plunger guide hole 4h is drilled in a ceiling part of the valve chamber upper part 4b, and a plunger 51 of the valve opening/closing mechanism 10 is guided so as to slide upward/downward therein.

(12) The diaphragm 5 is formed of a disk-shaped elastic thin plate having a concentrically projecting ridge formed therein, and a center portion thereof is flat-plate-shaped and serves as a valve part 5a that is brought into contact with or separated from the valve seat 3, and an outer circumferential portion thereof is held in a liquid-tight manner between the first lower part 1a1 and the second lower part 1a2. In a state in which no pressing force is applied to the valve part 5a, the valve part 5a at the center of the diaphragm 5 is separated from an opening/closing port 3k of the valve seat 3 with tension of the diaphragm 5 as shown in FIG. 4(b), and assembly is performed in this state. As described below, when the valve part 5a is pressed by a valve-actuating part 50 that is a part of the valve opening/closing mechanism 10, the valve part 5a is brought into contact with the opening/closing port 3k of the valve seat 3 to close the opening/closing port 3k of the valve seat 3 as shown in the FIG. 4(a). As described below, a pressing force F during closing is adjusted according to a deformation amount, based on a length over which a bearing upper part 21 is screwed into a bearing lower part 25 in the slide bearing part 20, by which an elastic member 60 placed at this portion is deformed. The pressing force F from the plunger 51 is removed due to an expansion action (voltage application) of a piezoelectric element 45, this separates the valve part 5a at the center of the diaphragm 5 from the opening/closing port 3k of the valve seat 3 due to returning tension of the diaphragm 5, and the valve part 5a is opened, so that the valve seat 3 is released from closing.

(13) The base block upper part 1b is mounted on the base block lower part Ta. The base block upper part 1b of the present embodiment is formed from a plurality of post members (here, three post members) installed so as to stand at intervals from each other, and a disk-shaped cooling fin 8 is installed at a middle part thereof. A space between the post members is a cooling space R. Cross-sectional areas of the post members are smaller than that of the second lower part 1a2, and thus conduction of heat from the second lower part 1a2 is inhibited here. In addition, heat from the base block lower part 1a side is dissipated and radiant heat from the base block lower part 1a side is inhibited, by the cooling fin 8. Accordingly, in conjunction with the cooling space R, the cooling fin 8 inhibits thermal influence from the base block lower part 1a side on the valve opening/closing mechanism 10.

(14) A through-hole 8h in which the plunger 51, which is a part of the valve-actuating part 50, is inserted is drilled at the center of the cooling fin 8. An outer diameter of the cooling fin 8 is formed to be at least larger than that of the second lower part 1a2 of the base block lower part Ta, so that radiant heat from the base block lower part 1a side to the valve opening/closing mechanism 10 is interrupted.

(15) The valve opening/closing mechanism 10 includes the slide bearing part 20, a support post part 30, a piezoelectric actuator part 40 including the piezoelectric element 45, the valve-actuating part 50, and the elastic member 60. The valve opening/closing mechanism 10 has a function for performing precise and quick transmission of expansion/contraction of the piezoelectric element 45 to precisely and quickly perform opening/closing of the diaphragm 5. Therefore, the valve opening/closing mechanism 10 of the flow rate control valve A of the present invention is structured so as to minimize occurrence of an error due to thermal influence. Specifically, in conjunction with the above-described heat-insulating structure, a support post 31 having a low linear expansion coefficient is used, and expansion/contraction of the piezoelectric element 45 is directly transmitted to the diaphragm 5, whereby precise and quick valve opening/closing can be performed in the present invention.

(16) The slide bearing part 20 includes the bearing upper part 21 and the bearing lower part 25.

(17) The bearing lower part 25 is a bottomed cylindrical member having an opened upper face, and has a female thread formed on an upper part of the inner circumferential surface, and a through-hole 25h drilled at the center of a bottom part. The bearing lower part 25 is mounted on the base block upper part 1b.

(18) The bearing upper part 21 is a columnar block, an element accommodating hole 22 having an opened upper face is drilled at the center of the bearing upper part 21, and a plurality of support post holding holes 23 (three support post holding holes in the present embodiment) are provided at the periphery of the element accommodating hole 22 so as to penetrate in the up-down direction. In the present embodiment, the support post holding holes 23 are formed at equal angular intervals on one circumference, and bearings 24 are respectively set therein. The support post 31 is inserted in the bearing 24. The bearing upper part 21 has a male thread formed on a lower part of an outer circumference and can thus be screwed movably forward and backward in the bearing lower part 25, and an insertion allowance with which the bearing upper part 21 is inserted into the bearing lower part 25 can be adjusted.

(19) In a bottom part of the element accommodating hole 22 of the bearing upper part 21, a steel ball fixing hole 21k is drilled, and a second steel ball P2 that makes point contact with a bottom part of the piezoelectric element 45 described below and that serves as a measure for expansion/contraction of the piezoelectric element 45 is fitted in the steel ball fixing hole 21k. On the opposite side (lower surface) of the bottom part of the element accommodating hole 22, a spring upper part holding hole 21h is formed so as to be recessed.

(20) The support post part 30 includes a plurality of the support posts 31 (three support posts 31 in the present embodiment), an upper end support member 33 mounted to upper parts of the support posts 31, and a lower end support member 37 mounted to lower parts of the support posts 31.

(21) Each support post 31 is a columnar member in which a metal (e.g., iron-nickel alloy: invar) having a linear expansion coefficient close to zero is used. The support post 31 is inserted in the bearing 24 of the slide bearing part 20 and slides smoothly in the up-down direction.

(22) The upper end support member 33 includes a disk-shaped upper end support plate 34, and supplementary posts 35 installed so as to be hung from a lower surface of the upper end support plate 34 and respectively correspond to the support posts 31, and the upper ends of the support posts 31 are screwed to the lower ends of the supplementary posts 35. A female thread hole 34h for a fixing screw 36 is formed at the center of the upper end support plate 34. The length of each support post 31 is much longer than that of the supplementary post 35, and thus thermal expansion of the supplementary post 35 in the length direction is negligible (although not shown, the supplementary post 35 may be omitted, and the support post 31 may be directly screwed to the upper end support plate 34).

(23) Similar to the upper end support plate 34, the lower end support member 37 is a disk-shaped member and has mounting holes drilled so as correspond to the support posts 31, and the lower ends of the support posts 31 are screwed to the mounting holes, respectively. A protrusion 37t for pressing the plunger 51 is protrusively formed at the center of a lower surface of the lower end support member 37. The protrusion 37t is inserted in the through-hole 25h of the bearing lower part 25. In addition, a spring lower part holding hole 37h is formed so as to be recessed at the center of an upper surface of the lower end support member 37 while being aligned with the spring upper part holding hole 21h of the bearing upper part 21. The elastic member 60 is provided between the spring upper part holding hole 21h and the spring lower part holding hole 37h, and a screwing allowance with which the bearing upper part 21 is screwed into the bearing lower part 25 is adjusted such that a predetermined elastic force is produced. As described below, the elastic force is associated with a valve seat closing force (pressing force F) of the diaphragm 5 (the spring upper part holding hole 21h and the spring lower part holding hole 37h are for determining a position of the elastic member 60, but are allowed to be omitted).

(24) The piezoelectric actuator part 40 includes the piezoelectric element 45, and a ball guide 41 mounted to the upper end of the piezoelectric element 45.

(25) The piezoelectric element 45 has a length that rapidly changes according to the magnitude of the applied voltage, an expansion length thereof is zero when the applied voltage is zero, and the higher the applied voltage is, the larger the expansion length is. The length of the piezoelectric element 45 is denoted by T when the voltage applied to the piezoelectric element 45 is zero, and elongation of the piezoelectric element 45 is denoted by t when voltage is applied. Here, a reference surface M for measurement of elongation of the piezoelectric element 45 is a bottom surface of the piezoelectric element 45.

(26) As described below, the position of the reference surface M of the piezoelectric element 45 is adjusted such that, when the expansion length t of the piezoelectric element 45 is zero (i.e., applied voltage is zero), the diaphragm 5 is pressed with an optimal elastic force by the elastic member 60, thereby closing the opening/closing port 3k of the valve seat 3 with the reliable and appropriate pressing force F.

(27) The piezoelectric element 45 has an extremely fast response speed with respect to applied voltage, and even if the voltage applied to the piezoelectric element 45 is set so as to have a pulse shape at very short time intervals, the expansion length t can be rapidly changed according to the applied voltage.

(28) Between the lower end surface (reference surface M) of the piezoelectric element 45 and a bottom surface of the element accommodating hole 22 of the bearing upper part 21, the second steel ball P2 for point contact between both the surfaces is provided so as to be fitted in the steel ball fixing hole 21k.

(29) The ball guide 41 is a columnar member mounted to the upper end of the piezoelectric element 45, and a positioning hole 42 in which a first steel ball P1 is to be fitted is drilled at the center of the ball guide 41. The fixing screw 36 is screwed in the female thread hole 34h at the center of the upper end support plate 34. The first steel ball P1 that is mounted to the lower end of the fixing screw 36 to be inserted is located directly above the positioning hole 42, and the fixing screw 36 is screwed in the female thread hole 34h at the center of the upper end support plate 34 with a clearance G larger than the screwed length of the bearing upper part 21 described below. The clearance G is expressed by a distance between contact points of the first steel ball P1 and the positioning hole 42. The mounted elastic member 60 has a free length, and the length is denoted by S1 (FIG. 2).

(30) An initial state of the flow rate control valve A configured as above is a state in which the length of the elastic member 60 is the free length S1 as shown in FIG. 2, and the elastic member 60 is placed, in this state, between the spring upper part holding hole 21h of the bearing upper part 21 and the spring lower part holding hole 37h of the lower end support member 37. At this time point, the bearing upper part 21 is screwed in the bearing lower part 25 as described above. On the other hand, the diaphragm 5 is not deformed and is separated from a seat surface of the valve seat 3 with tension thereof, and the opening/closing port 3k is in an opened state.

(31) The valve-actuating part 50 is abutted on the diaphragm 5 to cause an opening/closing action of the diaphragm 5, and corresponds to the plunger 51, a third steel ball P3, and a protective plate 52 in the present embodiment.

(32) The third steel ball P3 is fixed to the lower end of the plunger 51 and is abutted on the protective plate 52.

(33) The protective plate 52 is a circular metal plate and has a hemispherical recess in which the lower portion of the third steel ball P3 is fitted at the center of an upper surface, and the lower surface of the protective plate 52 is flat and located so as to make surface contact with the valve part 5a at the center of the diaphragm 5. The depth of the recess is smaller than a radius of the third steel ball P3, there is a gap between a lower surface of the plunger 51 and an upper surface of the protective plate 52, and the pressing force F applied to the plunger 51 is perpendicularly applied to the protective plate 52 via the third steel ball P3. Since the lower surface of the protective plate 52 is flat and makes surface contact with the valve part 5a at the center of the diaphragm 5, the surface pressure is low, and the valve part 5a is protected by the protective plate 52 and is not deformed.

(34) The upper end of the plunger 51 is abutted on the protrusion 37t of the lower end support member 37, and moves in the up-down direction along up-and-down movement of the protrusion 37t. The plunger 51 is inserted in the through-hole 8h of the cooling fin 8 and the plunger guide hole 4h of the second lower part 1a2.

(35) As the elastic member 60, a compression coil spring is used in the present embodiment. Spring members other than the compression coil spring may also be used.

(36) The elastic member 60 is deformed from the initial state to obtain an appropriate valve closing force (pressing force F) of the diaphragm 5. Specifically, in the initial state (FIG. 2), when the bearing upper part 21 is screwed to advance downward in the bearing lower part 25, the lower end support member 37 is pressed down via the elastic member 60, so that the protrusion 37t of the lower end support member 37 presses the plunger 51 down. Since the plunger 51 is in contact with the diaphragm 5 in an opened state via the third steel ball P3 and the protective plate 52, the diaphragm 5 is pressed and is deformed toward the valve seat 3.

(37) When screwing of the bearing upper part 21 is continued, the diaphragm 5 is deformed so as to be eventually brought into contact with the valve seat 3, and the deformation of the diaphragm 5 stops in this state. At this time point, since the diaphragm 5 is simply in contact with the valve seat 3, liquid leakage is caused when pressure is received from the liquid raw material introduction passage 6. Therefore, in this state, the bearing upper part 21 is further continuously screwed. When screwing of the bearing upper part 21 is further continued, only the elastic member 60 is deformed, to gradually increase the pressing force F for pressing the valve seat 3 from the diaphragm 5. Then, when the diaphragm 5 is in a closed state with such the pressing force F as to prevent liquid leakage from the valve seat 3, screwing of the bearing upper part 21 is stopped, and then fixing is performed with a double nut or the screw part is fixed with an adhesive, for example. Accordingly, the bearing upper part 21 and the bearing lower part 25 are integrated, and setting of the deformation amount of the elastic member 60 ends. The length of the elastic member 60 at this time is denoted by S2 (FIG. 1(a)).

(38) The first steel ball P1 of the fixing screw 36 is spaced apart from the positioning hole 42 of the ball guide 41 while sufficiently maintaining the clearance G during screwing of the bearing upper part 21 in the bearing lower part 25, and thus is not in contact with the positioning hole 42 even after the setting of the deformation amount of the elastic member 60 ends.

(39) After the setting of the deformation amount ends, fastening is performed until the first steel ball P1 of the fixing screw 36 is bought into contact with the ball guide 41. At this time, excessive fastening changes the deformation amount of the elastic member 60 and causes liquid leakage, and thus the fastening amount is such an amount as to simply bring the first steel ball P1 into contact with the ball guide 41.

(40) Accordingly, the flow rate control valve A functions as a normally-closed flow rate control valve. Specifically, the diaphragm 5 is deformed with the elastic force (pressing force F) of the elastic member 60, so that the valve seat 3 is normally closed.

(41) Next, an action of the flow rate control valve A of the present invention will be described. The flow rate control valve A is incorporated into a publicly known semiconductor manufacturing system and used, for example. The flow rate control valve A is connected to a storage tank (not shown) and receives supply of the liquid raw material L from the storage tank. The supplied liquid raw material L is delivered to the valve seat 3 through the liquid raw material introduction passage 6.

(42) In a normally-closed state in FIG. 1(a), the valve seat 3 is closed by the diaphragm 5 and stopped at the opening/closing port 3k. When an operation of vaporizing the liquid raw material L starts, voltage is applied to the piezoelectric element 45. The piezoelectric element 45 rapidly elongates upward with respect to the reference surface M according to the applied voltage, and the upper end support plate 34 is pressed up via the fixing screw 36 by the elongation amount. Such elongation is denoted by t. Accordingly, the support posts 31, and the lower end support member 37 provided to the lower end of the support posts 31 are rapidly moved upward by the amount (elongation t), and the elastic member 60 is compressed (by elongation t) by being pressed by the bearing upper part 21 fixed to the bearing lower part 25 as above. The length of the compressed elastic member 60 is denoted by S3 (FIG. 1(b)).

(43) When the protrusion 37t of the lower end support member 37 pressing the plunger 51 is moved upward according to the expansion of the piezoelectric element 45, the diaphragm 5 is deformed in a returning direction according to the upward movement, and the plunger 51 is pressed up and the opening/closing port 3k of the valve seat 3 is opened. At this time, a lower end of the elastic member 60 is held by the lower end support member 37, and thus the elastic force thereof is applied to the elongated piezoelectric element 45 via the support posts 31 but not applied to the diaphragm 5. Therefore, the diaphragm 5 is returned with its own tension in the returning direction and is separated from the valve seat 3. Thus, the separation width is equivalent to the above t. Subsequently, the liquid raw material L flows into the valve chamber lower part 4a through the opened opening/closing port 3k, and flows into the vaporizing chamber 100 of the vaporizer through the liquid raw material supply path 9 that is open to a bottom part of the valve chamber lower part 4a.

(44) To cause the valve seat 3 in this state to be in a closed state, the applied voltage to the piezoelectric element 45 is caused to be zero. When the applied voltage becomes zero, the length of the piezoelectric element 45 rapidly returns to an original length T. The lower end support member 37 of the support post part 30 is lowered according to the contraction, and presses the diaphragm 5 down via the plunger 51. The diaphragm 5 is pressed down with the pressing force F of the elastic member 60, to close the valve seat 3 as above. Accordingly, the liquid raw material L is delivered precisely at an indicated flow rate to the vaporizing chamber 100 without any time lag.

(45) In the above-described valve opening/closing operation, in the flow rate control valve A of the present invention, the base block lower part 1a and the valve opening/closing mechanism 10 are divided by the base block upper part 1b, and the cooling space R and the cooling fin 8 are provided in the base block upper part 1b. Thus, heat transferred from the base block lower part 1a side is dissipated by the cooling fin 8, and, at the same time, the base block upper part 1b is cooled with air in the cooling space R, and thus the valve opening/closing mechanism 10 receives no thermal influence from the base block lower part 1a provided with the valve chamber 4. In addition, the base block upper part 1b is formed from the plurality of post members each having a narrow cross section, whereby heat conduction from the base block lower part 1a is inhibited.

(46) The linear expansion coefficient of the piezoelectric element 45 is close to zero on the valve opening/closing mechanism 10 side, and is nearly equal to the linear expansion coefficient of an alloy used in the support posts 31, whereby the dimensional change t of the piezoelectric element 45 is precisely and rapidly transmitted to the diaphragm 5.

(47) In the present embodiment, although the plunger 51 and the third steel ball P3 are used as the valve-actuating part 50, the protrusion 37t may be used in place of the plunger 51 by elongating the protrusion 37t of the lower end support member 37, and the protrusion 37t and the third steel ball P3 may be used as the valve-actuating part 50.

REFERENCE SIGNS LIST

(48) A flow rate control valve F pressing force G clearance L liquid raw material M reference surface P1 to P3 first to third steel balls R cooling space S free length T initial length of piezoelectric element At elongation 1 base block 1a base block lower part 1a1 first lower part 1a2 second lower part 1b base block upper part 3 valve seat 3a seat part 3k opening/closing port 4 valve chamber 4a valve chamber lower part 4b valve chamber upper part 4h plunger guide hole 4s valve seat accommodating hole 4t ring-shaped projecting ridge part 5 diaphragm 5a valve part 6 liquid raw material introduction passage 8 cooling fin 8h through-hole 9 liquid raw material supply path 10 valve opening/closing mechanism 20 slide bearing part 21 bearing upper part 21h spring upper part holding hole 21k steel ball fixing hole 22 element accommodating hole 23 support post holding hole 24 bearing 25 bearing lower part 25h through-hole 30 support post part 31 support post 33 upper end support member 34 upper end support plate 34h female thread hole 35 supplementary post 36 fixing screw 37 lower end support member 37h spring lower part holding hole 37t protrusion 40 piezoelectric actuator part 41 ball guide 42 positioning hole 45 piezoelectric element 50 valve-actuating part 51 plunger 52 protective plate 60 elastic member 100 vaporizing chamber