Component Carrier With Deformed Layer for Accommodating Component

Abstract

A component carrier which includes a stack having at least one electrically conductive layer structure and/or at least one electrically insulating layer structure, a deformed layer connected to and/or forming part of the stack and being bent so as to define accommodation volumes for components, and the components, wherein each of the components is accommodated in a respective one of the accommodation volumes.

Claims

1. A component carrier, comprising: a stack including at least one electrically conductive layer structure and/or at least one electrically insulating layer structure; a deformed layer connected to and/or forming part of the stack and being bent so as to define accommodation volumes for components; and the components, wherein each of the components is accommodated in a respective one of the accommodation volumes.

2. The component carrier according to claim 1, further comprising at least one of the following features: wherein the deformed layer is a thermo-deformed layer; wherein the deformed layer comprises at least one of a group consisting of resin, in particular epoxy resin, resin with reinforcing particles, epoxy derivatives, polyimide, polyamide, and liquid crystal polymer; wherein different accommodation volumes have different shapes and/or different dimensions.

3. The component carrier according to claim 1, wherein the stack comprises a support body having recesses; wherein the deformed layer is attached to the support body and is bent to extend into the recesses so that the accommodation volumes are at least partially arranged in the recesses of the support body.

4. The component carrier according to claim 3, further comprising at least one of the following features: wherein the deformed layer covers horizontal surface portions and vertical sidewall portions of the support body; wherein the deformed layer bridges the recesses without contact to the support body in the recesses; at least one further component arranged in a cavity defined between a bottom of the deformed layer and sidewalls of one of the recesses of the support body, wherein in particular one of the components in one of the accommodation volumes and the at least one further component are arranged above each other separated by the deformed layer.

5. The component carrier according to claim 1, further comprising at least one of the following features: wherein the components are arranged side by side; wherein the deformed layer consists of electrically insulating material; wherein shape and dimensions of at least one of the components substantially corresponds to shape and dimensions of an assigned one of the accommodation volumes; wherein at least one of the accommodation volumes is delimited on one side of the deformed layer and at least one other of the accommodation volumes is delimited on an opposing other side of the deformed layer; wherein the deformed layer is deformed for delimiting an accommodation volume configured to correspond to a shape of a component to be accommodated in the accommodation volume, in particular is deformed with a rectangular wave shape; wherein the deformed layer is bent so as to define a two-dimensional array of accommodation volumes for components, wherein in particular the two-dimensional array comprises at least two accommodation volumes arranged along a length direction and at least two accommodation volumes arranged along a width direction of the deformed layer, in particular arranged in rows and columns, and/or wherein in particular the two-dimensional array comprises at least one first accommodation volume accommodating at least one heat removal component and comprises at least one second accommodation volume accommodating at least one heat generating component; wherein the components are in particular selected from a group consisting of an electronic component, an electrically non-conductive and/or electrically conductive inlay, a heat transfer unit, a light guiding element, an energy harvesting unit, an active electronic component, a passive electronic component, an electronic chip, a storage device, a filter, an integrated circuit, a signal processing component, a power management component, an optoelectronic interface element, a voltage converter, a cryptographic component, a transmitter and/or receiver, an electromechanical transducer, an actuator, a microelectromechanical system, a microprocessor, a capacitor, a resistor, an inductance, an accumulator, a switch, a camera, an antenna, a magnetic element, a further component carrier, and a logic chip; wherein at least one of the at least one electrically conductive layer structure comprises at least one of a group consisting of copper, aluminum, nickel, silver, gold, palladium, and tungsten, any of the mentioned materials being optionally coated with supra-conductive material such as graphene; wherein at least one of the at least one electrically insulating layer structure comprises at least one of a group consisting of resin, in particular reinforced or non-reinforced resin, for instance epoxy resin or bismaleimide-triazine resin, FR-4, FR-5, cyanate ester, polyphenylene derivate, glass, prepreg material, polyimide, polyamide, liquid crystal polymer, epoxy-based build-up material, polytetrafluoroethylene, a ceramic, and a metal oxide; wherein the component carrier is shaped as a plate; wherein the component carrier is configured as one of a group consisting of a printed circuit board, and a substrate, or a preform thereof; wherein the component carrier is configured as a laminate-type component carrier.

6. A method of manufacturing a component carrier, the method comprising: providing a stack including at least one electrically conductive layer structure and/or at least one electrically insulating layer structure; deforming a deformable layer to thereby form a deformed layer which defines at least one accommodation volume for at least one component, in particular a plurality of accommodation volumes for a plurality of components; accommodating each of the at least one component in a respective one of the at least one accommodation volume.

7. The method according to claim 6, further comprising at least one of the following: thermo-deforming the deformable layer to thereby define the at least one accommodation volume; deforming the deformable layer to thereby form a plastically deformed layer; deforming the deformable layer by applying mechanical pressure and heat.

8. The method according to claim 6, further comprising: deforming the deformable layer by applying a deforming force by a deforming body which includes a base and one or more protrusions extending from the base and defining the at least one accommodation volume, wherein in particular the method comprises deforming the deformable layer by pressing the one or more protrusions onto a front side of the deformable layer while a back side of the deformable layer is pressed partially onto a support body and partially into one or more recesses of the support body, which one or more recesses correspond to the at least one accommodation volume.

9. The method according to claim 8, further comprising at least one of the following: inserting each of the at least one component in a respective one of the at least one accommodation volume so that each component is also inserted at least partially into a respective one of the one or more recesses of the support body; at least partially filling gaps between the deformed layer and the support body with filling medium, in particular by laminating at least one of the at least one electrically insulating layer structure to the deformed layer and the support body.

10. The method according to claim 6, wherein accommodating the at least one component in the at least one accommodation volume is carried out so that upper surfaces of the at least one component and of the deformed layer are aligned with one another.

11. The method according to claim 6, further comprising: attaching the at least one component on a carrier plate and subsequently approaching the carrier plate to the deformed layer so that each of the at least one component attached to the carrier plate is accommodated in a respective one of the at least one accommodation volume.

12. The method according to claim 11, further comprising: attaching at least one further component on a further carrier plate and subsequently approaching the further carrier plate to a back side of the deformed layer so that each of the at least one further component attached to the further carrier plate is accommodated in a respective one of at least one further accommodation volume on the back side of the deformed layer.

13. The method according to claim 12, further comprising at least one of the following: at least partially filling gaps between the deformed layer, the at least one component and the at least one further component by a filling medium, in particular by molding; inserting a structure comprising the deformed layer, the at least one component and the at least one further component into a cavity formed in the stack.

14. The method according to claim 6, further comprising: deforming the deformable layer to thereby form the deformed layer which defines a two-dimensional array of accommodation volumes comprising at least two accommodation volumes extending along a first direction perpendicular to a stacking direction of the stack and having at least two accommodation volumes extending along a second direction perpendicular to the first direction and perpendicular to the stacking direction of the stack, wherein in particular the method comprises deforming the deformable layer to thereby form the deformed layer so that the two-dimensional array of accommodation volumes includes at least one accommodation volume above and at least one accommodation volume below the deformed layer.

15. The method according to claim 7, further comprising: using an at least partially uncured material, in particular B-stage resin, for the thermo-deformable layer, wherein in particular the method comprises curing the at least partially uncured material of the thermo-deformable layer to thereby fill an empty space within the component carrier during curing.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0055] FIG. 1 illustrates a cross-sectional view of a component carrier according to an exemplary embodiment of the invention.

[0056] FIG. 2. FIG. 3, FIG. 4, FIG. 5, FIG. 6, FIG. 7, FIG. 8, FIG. 9 to FIG. 10 illustrate views of structures obtained during carrying out a method of manufacturing a component carrier with embedded component(s) according to an exemplary embodiment of the invention.

[0057] FIG. 11 illustrates a cross-sectional view of a component carrier according to another exemplary embodiment of the invention.

[0058] FIG. 12, FIG. 13 to FIG. 14 illustrate cross-sectional views of structures obtained during carrying out methods of manufacturing component carriers with embedded components according to exemplary embodiments of the invention.

[0059] FIG. 15, FIG. 16 to FIG. 17 illustrate cross-sectional views of component carriers with embedded components according to exemplary embodiments of the invention.

[0060] FIG. 18, FIG. 19, FIG. 20, FIG. 21, FIG. 22 to FIG. 23 illustrate views of structures obtained during carrying out a method of manufacturing a component carrier, shown in FIG. 1, with embedded components according to another exemplary embodiment of the invention.

[0061] FIG. 24 and FIG. 25 illustrate cross-sectional views of component carriers according to exemplary embodiments of the invention.

[0062] FIG. 26, FIG. 27, FIG. 28 to FIG. 29 illustrate cross-sectional views of structures obtained during carrying out a method of manufacturing a component carrier with embedded components according to another exemplary embodiment of the invention.

[0063] FIG. 30 illustrates a cross-sectional view of a component carrier according to another exemplary embodiment of the invention.

[0064] FIG. 31, FIG. 32 to FIG. 33 illustrate cross-sectional views of pre-forms of component carriers with embedded components according to exemplary embodiments of the invention.

[0065] FIG. 34 illustrates a plan view of a component carrier according to a preferred embodiment of the invention in which a two-dimensionally deformed layer defines a plurality of cavities distributed over a length direction and over a width direction for accommodating a plurality of components in a two-dimensional way.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[0066] The illustrations in the drawings are schematically presented. In different drawings, similar or identical elements are provided with the same reference signs.

[0067] Before referring to the drawings, exemplary embodiments will be described in further detail, some basic considerations will be summarized based on which exemplary embodiments of the invention have been developed.

[0068] According to an exemplary embodiment of the invention, a high dense and flexible embedding of components may be accomplished, in particular using thermoforming and/or transfer embedding. More specifically, electric structures can also be thermoformed together with mold structures, for instance on one side. It may for example be possible to apply electrically conductive features, and then carry out a pressing process.

[0069] Embedding a high number of components with different sizes and shapes is conventionally a challenge. Indeed, when creating through cavities and embedding components which have different height, the control of the filling process may be poor. Also, the process of electrically contacting such embedded components (for instance by the formation of copper filled laser vias) may be difficult when the height and therefore distance of the components from an upper main surface of the component carrier are different. Also, with such designs, panels may present warped shapes as the resin or adhesive distribution may be also poor.

[0070] In order to overcome the aforementioned and/or other shortcomings, exemplary embodiments of the invention provide an embedding process which is in particular appropriate for highly flexible, reliable and dense embedding tasks. An exemplary embodiment is based on both thermoforming and transfer embedding processes to ensure an accurate control of the cavities or accommodation volumes and the components' positioning.

[0071] In particular, embedding components in deep cavities defined by a deformed layer instead of through cavities can be a highly appropriate solution to overcome issues related to shape and height non-uniformity of different components. Such a manufacturing architecture may also allow controlling the amount of the filling material in order to control the panel's warpage.

[0072] Exemplary embodiments of the invention in particular provide a possibility of creating the mentioned depth cavities and how to assemble to components inside the correspondingly formed accommodation volumes. Indeed, by using a thermoforming process on a prepreg, resin or epoxy derivative basis such as an epoxy-based build-up film using a thermoforming matrix and a core with cavities, it is easily possible to create a depth cavity with accurately controlled dimensions. However, any other thermo-deformable material can be used.

[0073] By controlling the thermoforming temperature, speed and pressure according to an exemplary embodiment, the depth of the cavity can be controlled without letting the material reach its fluid zone. Using this technique, the shapes of the cavities can be flexible. In particular, it may be possible to create deep cavities for thick components, small cavities for small components with also the possibility to create two cavities, one on the front and the other on the back side in case of thick cores. In particular in case of double-sided cavities, another accommodation volume can be used also on the back side.

[0074] According to an exemplary embodiment, a registration process for aligning may be carried out after thermoforming. For example, a skiving process or another process can be used to expose alignments markers on a core once thermoforming is done.

[0075] When the one or more cavities have been obtained, an embedding process can be performed using transfer embedding. For example, the components to be embedded may be assembled on a rigid sticky board using local coordinates of the core alignments markers in order to ensure high registration accuracy. For example, the thermoforming material (i.e. a thermo-deformable layer) may be an at least partially uncured material (such as a B-stage material) which may be used for filling gaps when the temperature exceeds a curing temperature or a glass temperature. Consequently, filling and fixing can be carried out at the same time.

[0076] According to still another exemplary embodiment, double-sided embedding may be accomplished, for instance using the deformed layer. Another rigid board with assembled components can be used for the back side ensuring a high density and also advantageously avoiding the warpage of the panel.

[0077] According to an exemplary embodiment, an alignment procedure for transfer embedding can use an image correlation architecture. Such an architecture can even correct alignment errors from previous processes. For example, a camera may scan an area or several areas with multiple components, cavities and alignment markers. Then the scanned image may be compared to the scaled original design. By optimizing the adjusted images, the alignment may be highly accurate for subsequent processes, such as laser processing. To provide such a system, a software and camera may be implemented. They can be included in a lay-up station design.

[0078] Once the transfer is completed, curing can be done by heating and pressing the whole system. As the components may be stuck to the board, controlled height and positions may be ensured for the subsequent processing (for instance laser processing, imaging, etc.). As filling may be done using a prepreg in an exemplary embodiment of the invention, there is no additional material that could induce for instance mismatch or voluminous shrinkage. Therefore, a high reliability can be ensured.

[0079] Next, support removal will be described. Once the curing is finished, the support can be peeled off using low shear stress. Then, the panel may proceed to a pressing procedure.

[0080] An embedding architecture according to an exemplary embodiment of the invention may allow obtaining a high degree of design freedom. In particular, the embedding can be done at advanced steps. More specifically, the embedding can be done at advanced steps during the component carrier (in particular printed circuit board, PCB) production (any layer or multi-layer, both is possible in different embodiments). In particular, the embedding can not only be done on a core layer, but also later on after buildup of further electrically conductive and/or electrically insulating layer structures. It is also possible to perform double-sided embedding.

[0081] An exemplary embodiment of the invention provides a process for depth cavity formation and filling using thermoforming. Advantageously, double-sided embedding may be carried out in one procedure. In terms of productivity, a highly automated and integrated embedding architecture may be provided. A corresponding procedure may involve less handling and risk for failure. Beyond this, a high time-saving may be accomplished.

[0082] In terms of reliability, exemplary embodiments of the invention may provide an accurate cavity processing and an easy and reliable filling. Moreover, an accurate placement of components may be ensured. Furthermore, a proper control of the components may be achieved. Apart from this, the embedding stress level may be low. Advantageously, a bubble free filling process may be carried out, and warpage may be kept very small.

[0083] Furthermore, the architecture of exemplary embodiments of the invention may provide the opportunity to embed in any manufacturing procedure of the entire process. Beyond this, the manufacturing architecture according to an exemplary embodiment supports a wide range of core thickness and components heights. Moreover, exemplary embodiments render it possible to embed in different cavity shapes (for instance depth cavities shaped as blind hole, through cavities shaped as through hole, cavities formed using a release layer with intentionally poor adhesion properties relative to surrounding component carrier material). Other exemplary embodiments allow embedding components with different components sizes (in particular different component heights) in the same core and with the same pressing cycle. Moreover, exemplary embodiments provide the possibility of flexibly supporting different kinds of build-ups. Exemplary embodiments of the invention are compatible with mass production volumes on industrial scale and involve less handling than conventional approaches as well as a high degree of automation.

[0084] Component carriers manufactured according to exemplary embodiments of the invention have a high reliability and allow obtaining a high yield. Moreover, a high flexibility for build-ups and designs can be achieved. Space requirements can be relaxed. Furthermore, exemplary embodiments may enable to embed different component heights.

[0085] Other exemplary embodiments provide the possibility to embed one or more components on both sides of a deformable or deformed layer. In a high-density embedding embodiment, multiple components may be embedded in the same cavity. Moreover, there is the possibility of a fan-out on both sides of the deformed layer. A high accuracy and registration can be ensured by exemplary embodiments of the invention.

[0086] In exemplary embodiments, there is a large freedom to select materials and component sizes, while high reliable embedded packages may be formed. It may also be possible in exemplary embodiments to embed components of different sizes and/or of different shapes in the same stack (in particular core).

[0087] In another embodiment, molding can be used for embedding components additionally or alternatively to the above-described thermo-deforming concept.

[0088] FIG. 1 illustrates a cross-sectional view of a component carrier 100 according to an exemplary embodiment of the invention.

[0089] The component carrier 100 according to FIG. 1 is configured as a plate-shaped laminate-type component carrier, more specifically as a printed circuit board (PCB). The component carrier 100 comprises a laminated stack 102 comprising electrically conductive layer structures 104 and electrically insulating layer structures 106. For instance, the electrically insulating layer structures 106 may comprise resin (such as epoxy resin), optionally with reinforcing particles (such as glass fibers or glass spheres). The electrically conductive layer structures 106 may comprise patterned metal layers (in particular patterned copper foils) and vertical through connections (in particular copper filled laser vias). In the shown embodiment, a recess or cavity is delimited by the stack 102 in an interior thereof.

[0090] A thermo-deformed layer 108 of the component carrier 100 is accommodated in the above-mentioned recess or cavity of the stack 102 and is plastically deformed. The thermo-deformed layer 108 is bent with a rectangular wave shape so as to define multiple accommodation volumes 110, each accommodating a respective one of multiple electronic components 112 such as semiconductor chips. For example, the deformed layer 108 may the made of epoxy resin or polyimide. Preferably, the deformed layer 108 consists of a homogeneous dielectric or electrically insulating material with constant thickness. In view of its dielectric properties, the deformed layer 108 also contributes to the electric isolation between the different components 112. As can be taken from FIG. 1, different ones of the components 112 have different shapes and different dimensions corresponding to different shapes and different dimensions of different accommodation volumes 110.

[0091] The various components 112 are arranged side by side, i.e. laterally juxtaposed. Moreover, the components 112 are arranged for being located alternatingly above the deformed layer 108 and below the deformed layer 108, respectively. Upper main surfaces of the components 112 which are embedded above the deformed layer 108 are aligned with each other and with the upper main surface of the deformed layer 108. Correspondingly, lower main surfaces of the components 112 which are accommodated below the deformed layer 108 are aligned with each other and with the lower main surface of the deformed layer 108. As a result, a highly compact component carrier 100 is obtained with high mechanical integrity. Furthermore, the formation of electrically conductive contacts (schematically shown for one of the components 112 in FIG. 1 as copper filled laser via 141) for contacting (in particular one or more pads, not shown, on) upper main surfaces of the components 112 above the deformed layer 108 is simplified, because correspondingly formed vertical through connections (see reference numeral 141) extend to the same vertical thickness for all of these components 112 above the deformed layer 108. Also electrically contacting lower main surfaces of the components 112 below the deformed layer 108 is simplified by the described aligned configuration, because correspondingly formed vertical through connections (not shown) extend up to the same vertical thickness for all of these components 112 below the deformed layer 108.

[0092] During a manufacturing process, the deformed layer 108 may be plastically deformed by a corresponding thermal and mechanical treatment so as to assume the rectangular wave shape shown in FIG. 1. By taking this measure, accommodation volumes 110 (compare also FIG. 3) may be defined exclusively by the shape of the deformed layer 108. Due to the shown wave shape, accommodation volumes 110 are delimited above and below the deformed layer 108. After inserting (and optionally adhering) the components 112 in the various accommodation volumes 110, the so obtained body may be inserted into the cavity in the stack 102 and may be interconnected with the stack 102 by lamination of layer structures 104, 106 on the top side and on the bottom side of the deformed layer 108 and of the accommodated components 112 and on the top side and the bottom side of the inner layer structures 104, 106 defining the cavity in the stack 102.

[0093] FIG. 2 to FIG. 10 illustrate views of structures obtained during carrying out a method of manufacturing a component carrier 100 with embedded components 112 according to an exemplary embodiment of the invention.

[0094] Referring to FIG. 2, a planar and still plastically deformable layer 108 (which may hence be still uncured) is shown which will be deformed during the manufacturing method to thereby form the deformed layer 108 of FIG. 1.

[0095] For deforming the deformable layer 108 by applying a deforming force, the deformable layer 108 is sandwiched between a deforming body 122 and a support body 114. The deforming body 122, which is arranged on top of the deformable layer 108, comprises a plate shaped base 124 andin the shown embodiment twoprotrusions 126 extending from the base 124 downwardly towards the deformable layer 108. The shape of the protrusions 126 contributes to the definition of shape and dimension of the accommodation volumes 110. Descriptively speaking, the protrusions 126 form a matrix with component shape, i.e. with the shape of the components 112 to be accommodated in the accommodation volumes 110 to be formed. The support body 114, which is arranged on bottom of the deformable layer 108, comprises an electrically insulating layer structure 106 (for instance a core of fully cured FR4 material) provided within the shown embodiment tworecesses 116 which are reconfigured as through holes. As can be taken from FIG. 2, the positions of the protrusions 126 are aligned to the positions of the through holes 116 in a vertical direction.

[0096] Deforming the deformable layer 108 to convert the latter into the deformed layer 108 may then be accomplished by pressing the protrusions 126 onto a front side of the deformable layer 108 while a back side of the deformable layer 108 is pressed partially onto the support body 114 and partially into the recesses 116 of the support body 114. These recesses 116 correspond to the formed accommodation volumes 110.

[0097] Thus, thermoforming of the deformable layer 108 is carried out for depth cavity creation, i.e. for the formation of the various accommodation volumes 110. For this purpose, the material of the deformable layer 108 may be a material with thermo-forming abilities such as prepreg, ABF, resin, etc. A thermo-forming matrix which is here denoted as deforming body 122 may be made for example by modelling, machining or assembly of dummy components on a stiff board. The support body 114 may be embodied as a core or a multi-layer with cavities as the recesses 116.

[0098] In an embodiment, in which the support body 114 remains part of the readily manufactured component carrier 100, the support body 114 may form part of the stack 102 as shown in FIG. 1. In other embodiments, it is possible that the support body 114 is only a temporary support body which is removed before completing the formation of the component carrier 100 and therefore does not form part of the readily manufactured component carrier 100 in such an embodiment.

[0099] Referring to FIG. 3, an arrangement is shown which is the result of the procedure described referring to FIG. 2 when the deforming body 122 has been moved downwardly (compare reference numeral 170 of FIG. 2) so that the deformable layer 108 is engaged and thereby deformed between the deforming body 122 and the support body 114. Alternatively, the support body 114 may be moved upwardly while the deforming body 122 remains stationary, or both the deforming body 122 and the support body 114 may be moved in opposite directions to engage the deformable layer 108 in between. The procedure of deforming the deformable layer 108 by applying mechanical pressure may beoptionally, but preferablyaccompanied by heat to further promote thermo-deformation.

[0100] As shown in FIG. 3, the deformed layer 108 deformed as a result of the described procedure is attached to the support body 114 and is bent to extend into the recesses 116. Thus, the accommodation volumes 110 are partially arranged in the recesses 116 of the support body 114. Thus, the deformed layer 108 covers horizontal surface portions and vertical sidewall portions of the support body 114. Furthermore, the deformed layer 108 bridges the recesses 116 without contact to the support body 114 in the recesses 116.

[0101] In other words, depth cavities in form of accommodation volumes 110 are obtained after thermoforming. Preferably, the material of the deformed layer 108 may stay in an at least partially uncured state (for instance in a B-stage) so that it may be advantageous used for filling gaps in a subsequent lamination procedure.

[0102] Advantageously, the deformed layer 108 provides accommodation volumes 110, 110 above the deformed layer 108 and facing away from the support body 114 as well as an accommodation volume 110 below the deformed layer 108 and facing towards the support body 114. While the accommodation volumes 110, 110 are delimited exclusively by the de-formed layer 108, the accommodation volume 110 is delimited partially by the deformed layer 108 and partially by the support body 114. In particular, a double-sided cavity configuration is formed by the accommodation volumes 110, 110. Relatively shallow components 112 may be placed in these accommodation volumes 110, 110. In contrast to this, a relatively thick component 112 may be placed in accommodation volume 110.

[0103] Referring to FIG. 4, it is shown how the components 112 can be assembled in the accommodation volumes 110 by transfer embedding.

[0104] As can be taken from reference numeral 172, the shown component 112 may be attached by a sampling head 173 on a sticky surface of a carrier plate 132.

[0105] Reference numeral 174 shows core preparation as described above referring to FIG. 2 and FIG. 3. Skiving may be used to expose inner alignment markers (not shown in FIG. 4) of the illustrated layer stack.

[0106] Reference numeral 176 illustrates schematically that a system for data and information exchange, alignment, etc. may coordinate the described procedures. In particular, it is possible to use local alignment markers on the core-type support body 114 for assembly on a rigid board.

[0107] Reference numeral 178 illustrates how a loading system 181 operates the carrier plate 132 with the adhered components 112 for placing each of the components 112 into a respective one of the accommodation volumes 110. This can be accomplished for all components 112 to be arranged on one side of the deformed layer 108 in a common single simultaneous procedure. Thus, each of these components 112 is inserted in a respective one of the accommodation volumes 110.

[0108] FIG. 5 and FIG. 6 show image correlation during transfer embedding. Image correlation occurs for the components 112 versus alignment markers 180 and cavities/accommodation volumes 110. FIG. 5 shows a first global alignment. FIG. 6 shows a multiple area scan using a camera illustrated schematically with reference numeral 182.

[0109] FIG. 7 illustrates shift/rotation correction using adaptive alignment. Shift and rotation are indicated by reference numeral 184.

[0110] In the framework of the described manufacturing method, it is furthermore possible that a correction procedure is carried out during which a design can be updated by shifting and rotating each component 112 according to scanned values. It is furthermore possible to subsequently drill and expose according to an updated design.

[0111] FIG. 8 illustrates scanned images at layup, FIG. 9 shows an original design and FIG. 10 shows a design after correlation.

[0112] FIG. 11 illustrates a cross-sectional view of a component carrier 100 according to another exemplary embodiment of the invention. The embodiment of FIG. 11 (which may be denoted as a double-sided design at advanced layer step) shows that the described embedding concept allows a high degree of design freedom. Thus, the embedding of components 112 can be carried out at advanced steps. More specifically, the embedding can also be done at advanced procedures during the manufacture of the component carrier 100, for instance after further build up on a central core. It is also possible to perform double-sided embedding.

[0113] FIG. 12 to FIG. 14 illustrate cross-sectional views of structures obtained during carrying out methods of manufacturing component carriers 100 with embedded components 112 according to exemplary embodiments of the invention.

[0114] Referring to FIG. 12, a component carrier 100 or a pre-form thereof is shown which can be obtained based on a manufacturing method as described referring to FIG. 4. Thereafter, an uncured layer structure of filling medium 130 (for instance a prepreg sheet) may be placed on bottom of the obtained structure. The resulting arrangement may be sandwiched between a (preferably stiff) bottom plate 186 and a (preferably stiff) top plate 188. The uncured layer structure of filling medium 130 andoptionally, but preferablyalso the preferably still at least partially uncured deformed layer 108 may be cured by being pressed between plates 186, 188 (preferably accompanied by the application of heat). As a result, the filling medium 138 and preferably also the deformed layer 108 may be cured by melting and re-solidifying so as to fill gaps 128. By taking this measure, the gaps 128 between the deformed layer 108, the support body 114 and the components 112 may be filled partially or entirely with filling medium 130 and optionally by flowing medium of the deformed layer 108. As an alternative to the described lamination procedure, the filling medium 130 may also be a mold compound configured for filling gaps 128 by molding.

[0115] In one embodiment, the bottom plate 186 and the top plate 188 may be pressing plates for laminating the layer structure of filling medium 130 and the arrangement of support body 114, deformed layer 108 and components 112 together. In this embodiment, plates 186, 188 may then be removed and hence do not form part of the readily manufactured component carrier 100.

[0116] In another embodiment, the bottom plate 186 and the top plate 188 may be made of component carrier material (such as a core, a copper foil, a prepreg sheet, etc.) and may therefore form part of the readily manufactured component carrier 100.

[0117] As can be taken from FIG. 12, shape and dimensions of each of the components 112 substantially corresponds to shape and dimensions of an assigned one of the accommodation volumes 110.

[0118] The embodiment of FIG. 12 relates to a single side transfer embedding architecture adding filling material in form of filling medium 130 to flow into gaps 128 in the layer arrangement.

[0119] Referring to FIG. 13, the shown manufacturing method differs from the manufacturing method according to FIG. 12 in that bottom plate 186 is not embodied as a planar plate but comprises a protrusion 198 at a top surface thereof facing the deformed layer 108. Descriptively speaking, bottom plate 186 functions in FIG. 13 as a second matrix having a reversed design. In other words, it is possible to equip bottom plate 186 with a dummy component.

[0120] Referring to FIG. 14, an embodiment will be described providing a double-sided embedding. The embodiment according to FIG. 14 differs from the manufacturing method according to FIG. 12 in particular in that bottom plate 186 is not embodied as a planar plate but comprises a protrusion 198 at a top surface thereof facing the deformed layer 108 as well as an attached further component 118 to be inserted into recess 116 which is delimited between a bottom side of the deformed layer 108 and sidewalls of the support body 114. Descriptively speaking, the bottom plate 186 with protrusion 198 and further component 118 is configured as a matrix with a real component (in form of further component 118) and a dummy component (in form of protrusion 198). Thus, the component carrier 100 manufactured according to FIG. 14 comprises further component 118 arranged in a cavity 120 defined between a bottom of the deformed layer 108 and sidewalls of one of the recesses 116 of the support body 114. As a result, one of the components 112 in one of the accommodation volumes 110 above the deformed layer 108 on the one hand and the further component 118 below the deformed layer 108 on the other hand are arranged above each other separated by the deformed layer 108. In other words, the component carrier 100 according to FIG. 14 not only comprises components 112 on the front side of the deformed layer 108, but also a further component 118 on the back side of the deformed layer 108.

[0121] FIG. 15 to FIG. 17 illustrate cross-sectional views of component carriers 100 with embedded components 112 according to exemplary embodiments of the invention.

[0122] Referring to FIG. 15, a component carrier 100 according to an exemplary embodiment of the invention is shown which can be manufactured in accordance with FIG. 12. The embodiment of FIG. 15 uses a depth cavity for transfer embedding. It is possible to provide a fan-out on the top side as the position of the components 112 is well defined.

[0123] Referring to FIG. 16, a component carrier 100 according to an exemplary embodiment of the invention is shown which can be manufactured in accordance with FIG. 13. This embodiment shows an even thinner build-up.

[0124] Referring to FIG. 17, a component carrier 100 according to an exemplary embodiment of the invention is shown which can be manufactured in accordance with FIG. 14. A particularly high component density can be obtained in this embodiment. Furthermore, the use of both sides for fan-out is possible.

[0125] FIG. 18 to FIG. 23 illustrate views of structures obtained during carrying out a method of manufacturing a component carrier 100, shown in FIG. 1, with embedded components 112 according to another exemplary embodiment of the invention.

[0126] Referring to FIG. 18, a continuous planar thin film of thermo-deformable material is shown as deformable layer 108.

[0127] Referring to FIG. 19, a thermo-deformed layer 108 is shown which can be manufactured by plastically deforming the deformable layer 108 of FIG. 18 by heating and mechanically bending. As a result, accommodation volumes 110, each configured for accommodating a respective component 112, can be obtained on both opposing main surfaces of the deformed layer 108. As shown in FIG. 19, some of the accommodation volumes 110 are delimited on an upper side of the deformed layer 108 and other ones of the accommodation volumes 110 are delimited on a lower side of the deformed layer 108. The deformed layer 108 is deformed with a rectangular wave shape. Alternatively, it is also possible that the deformed layer 108 is deformed in a concave deep cavity or any other geometry depending on the cavity form used for accommodating the component 112 to be inserted properly. For instance, such cavities may be cavities for a 3D sensor, may be an antenna cavity, etc.

[0128] Referring to FIG. 20, components 112 are attached on a lower main surface of a planar carrier plate 132. Further components 118 are attached on an upper main surface of a further carrier plate 134. The further carrier plate 134 also comprises protrusions 198 which may also be denoted as dummy components.

[0129] Referring to FIG. 21, the deformed layer 108 is sandwiched between the carrier plate 132 and the further carrier plate 134 equipped with the components 112, 118 as shown in FIG. 20. Subsequently, the carrier plate 132 is approached to the deformed layer 108 by moving the carrier plate 132 in a downward direction so that each of the components 112 attached to the carrier plate 132 is accommodated in a respective one of the accommodation volumes 110. Correspondingly, the further carrier plate 134 is approached to a back side of the deformed layer 108 so that each of the further components 118 attached to the further carrier plate 134 is accommodated in a respective one of further accommodation volumes 110 on the back side of the deformed layer 108. As a result of this procedure, the arrangement of FIG. 21 is obtained.

[0130] Referring to FIG. 22, the shown structure 133 is obtained by removing the carrier plate 132 and the further carrier plate 134.

[0131] Referring to FIG. 23, the structure 133 comprising the deformed layer 108, the components 112, the further components 118 and optionally a filling medium 130 is inserted into a cavity 120 formed in a stack 102 (for instance embodied as shown in FIG. 1). In order to obtain the component carrier 100 of FIG. 1, further layer structures 104, 106 can be laminated on top and bottom of the obtained structure.

[0132] The passive array of FIG. 22 can be used as a final package or a package to be embedded in stack 102 (as shown in FIG. 23). With the described embodiments, a high embedding density may be achieved. The components 112, 118 inside can form a functional module. The final package can have a copper structuring (fan-out) on one or both sides. The passive array may be symmetrical with high dimensional stability. The components 112, 118 can have laser connections on both sides, wherein the component position is well controlled. An optionally used molding material can be used for other protection purposes (for instance shielding).

[0133] FIG. 24 illustrates a cross-sectional view of a component carrier 100 according to another exemplary embodiment of the invention.

[0134] The embodiment of FIG. 24 comprises a thermo-deformed layer 108 being substantially U-shaped in the shown cross-sectional view. As a result, a component 112 can be accommodated in an accommodation volume 110 delimited by the U-shaped thermo-deformed layer 108. In the shown embodiment, a further component 112 is embedded directly in another cavity formed in an electrically insulating layer structure 106.

[0135] FIG. 25 illustrates a cross-sectional view of a component carrier 100 according to still another exemplary embodiment of the invention.

[0136] The embodiment of FIG. 25 comprises a cup-shaped thermo-deformed layer 108 in which a correspondingly shaped component 112 is embedded. The arrangement of deformed layer 108 and component 112 may be, in turn, embedded in a cavity of an electrically insulating layer structure 106.

[0137] FIG. 26 to FIG. 29 illustrate cross-sectional views of structures obtained during carrying out a method of manufacturing a component carrier 100 with embedded components 112 according to another exemplary embodiment of the invention.

[0138] Referring to FIG. 26, first components 112 to be accommodated are arranged on a first handling body 187 or matrix, whereas second components 112 to be accommodated are arranged on a second handling body 189 or matrix. The deformed layer 108 defining accommodation volumes 110 may be arranged within cup-shaped first handling body 187 so as to accommodate the first components 112 in accommodation volumes 110 arranged on the bottom surface of the deformed layer 108. Components 112 attached on a lower main surface of the plate-shaped second handling body 189 may then be accommodated in accommodation volumes 110 on the top side of the deformed layer 108 by connecting the handling bodies 187, 189. The deformed layer 108 may be a thermoformed sheet. For instance, the components 112 may be printed circuit boards or modules.

[0139] Referring to FIG. 27, a structure 133 resulting from the above-described connection procedure is shown after having removed handling bodies 187, 189.

[0140] Referring to FIG. 28, the structure 133 may be additionally embedded in a through cavity 193 of a core 191.

[0141] Referring to FIG. 29, one or more further electrically conductive layer structures 104 and/or one or more further electrically insulating layer structures 106 may be connected to an upper and/or lower main surface of the structure obtained by the embedding procedure shown in FIG. 26. Thus, a further build up may be carried out, if desired.

[0142] FIG. 30 illustrates a cross-sectional view of a component carrier 100 according to another exemplary embodiment of the invention. Such an embodiment may be denoted as an X-in-board structure. For instance, one of the shown components 112 may be a power component (for instance manufactured in PCB technology or as a module). It is also possible that the other of the shown components 112 is a signal component (for instance manufactured in PCB technology or as a module).

[0143] FIG. 31 to FIG. 33 illustrate cross-sectional views of preforms of component carriers 100 with embedded components 112 according to exemplary embodiments of the invention.

[0144] Referring to FIG. 31, an embodiment is shown in which the components 112 to be accommodated in the accommodation volumes 110 of the deformed layer 108 may be assembled chips with copper pillars 195.

[0145] Referring to FIG. 32, an embodiment is shown in which the components 112 to be accommodated in the accommodation volumes 110 of the deformed layer 108 may form part of an assembled PCB or core 191.

[0146] Referring to FIG. 33, depth cavities are formed as accommodation volumes 110 by attaching a deformed layer 108 to a core 191 or PCB.

[0147] FIG. 34 illustrates a plan view of a component carrier 100 according to a preferred embodiment of the invention in which a two-dimensionally deformed layer 108 defines a plurality of cavities 110 distributed over a length direction 183 and a width direction 185 for accommodating a plurality of components 112 in a two-dimensional way.

[0148] According to FIG. 34, the deformed layer 108 is bent so as to define a two-dimensional array of accommodation volumes 110 for components 112. The two-dimensional array comprises accommodation volumes 110 arranged along length direction 183 and comprises accommodation volumes 110 arranged along width direction 185 of the deformed layer 108. The two-dimensional array has peripheral accommodation volumes 110 on the top side and on the bottom side of FIG. 34 for accommodating heat removal components 112 (such as copper inlays). Central accommodation volumes 110 accommodate heat generating components 112 (such as semiconductor chips) in between the heat removal components 112. In order to manufacture the component carrier 100 according to FIG. 34, deformable layer 108 may be deformed to thereby form the deformed layer 108 which defines the illustrated two-dimensional array of accommodation volumes 110 comprising accommodation volumes 110 extending along the length direction 183 perpendicular to a stacking direction of the stack 102 and accommodation volumes 110 extending along the width direction 185 perpendicular to the length direction 183 and also perpendicular to the stacking direction of the stack 102. In the shown embodiment, the stacking direction is oriented perpendicular to the paper plane of FIG. 34.

[0149] Although not shown, the method may comprise deforming the deformable layer 108 to thereby form the deformed layer 108 so that the two-dimensional array of accommodation volumes 110 comprises one or more accommodation volumes 110 above and one or more accommodation volumes 110 below the deformed layer 108 (for instance in a similar way as shown in FIG. 31 to FIG. 33, but in two perpendicular directions). Alternatively, all accommodation volumes 110 may be formed on the same side of the deformed layer 108.

[0150] Descriptively speaking, the component carrier 100 shown in FIG. 34 may be configured as a PCB modularization. Components 112 may be thermal modules, whereas components 112 may be functional modules of the same or different designs. For instance, the components 112 may have different functions (for instance power related functions, signal transmission functions, etc.). Each of the components 112 can be a printed circuit board (PCB), an IC (integrated circuit) substrate, a substrate like PCB (SLP), an any-layer-structure, etc. The various components 112 may have different design capabilities, such as different line-space properties, different copper thickness, etc.

[0151] Summarizing, component carriers according to exemplary embodiments may have significant advantages in terms of process, design and use of materials. More specifically, advantages encompass a high density and flexibility, but also a high flexibility in terms of functionality. What concerns density and flexibility, advantages of exemplary embodiments of the invention are high density packaging, low routing density, dimensional stability (in particular strongly suppressed warpage), symmetrical design (it is for instance possible to use dummy components), flexible morphologies, suitability for X-in-board solutions, suitability for module embedding, possibility to use a PCB or a core as matrix, and the possibility to use double-sided processes. What concerns advantages in terms of flexibility with a focus on functionality, sealing and shielding may be obtained (for instance with magnetic or mechanical solutions), epoxy mold compounds may be used (which may simplify interaction with semiconductor dies), photo-imageable materials may be used to build connections, no interactions with PCB processes may occur (which results in a flexible selection of materials), and the possibility to use sheets or liquid resins.

[0152] It should be noted that the term comprising does not exclude other elements or steps and the article a or an does not exclude a plurality. Also, elements described in association with different embodiments may be combined.

[0153] Implementation of the invention is not limited to the preferred embodiments shown in the figures and described above. Instead, a multiplicity of variants is possible which use the solutions shown and the principle according to the invention even in the case of fundamentally different embodiments.