Terminal assembly structure of MEMS microphone
10827282 ยท 2020-11-03
Assignee
Inventors
Cpc classification
B81B7/0077
PERFORMING OPERATIONS; TRANSPORTING
H01L2924/00014
ELECTRICITY
B81B2207/012
PERFORMING OPERATIONS; TRANSPORTING
H04R1/04
ELECTRICITY
B81B2201/0257
PERFORMING OPERATIONS; TRANSPORTING
H01L2224/48155
ELECTRICITY
H01L2224/48137
ELECTRICITY
H01L2924/00014
ELECTRICITY
International classification
H04R1/04
ELECTRICITY
B81B7/00
PERFORMING OPERATIONS; TRANSPORTING
Abstract
The present disclosure provides a terminal assembly structure of a MEMS microphone, including a signal let out board disposed at a terminal and a silicon microphone disposed on the signal let out board. The silicon microphone includes a housing, a substrate forming an accommodation space with the housing, an MEMS chip and a waterproof member. The substrate is configured with a sound inlet connected to the outside. The waterproof member is sandwiched between the MEMS chip and the substrate. A position where the signal let out board corresponds to the silicon microphone is configured with an accommodation hole. The housing is accommodated in the accommodation hole. The substrate abuts a surface of the signal let out board and covers the accommodation hole. A surface of the substrate where the housing is assembled, is provided with at least one pad electrically connected with the signal let out board.
Claims
1. A terminal assembly structure of a MEMS (Microelectro Mechanical System) microphone, comprising: a signal let out board disposed on a terminal and a silicon microphone disposed on the signal let out board, the silicon microphone comprising a housing, a substrate which forms an accommodation space cooperatively with the housing, an ASIC (Application Specific Integrated Circuit) chip and an MEMS chip both accommodated in the accommodation space, the ASIC chip being electrically connected to the substrate, the ASIC chip being electrically connected to the MEMS chip, a sound inlet communicated to outside of the MEMS microphone is configured at a position of the substrate corresponding to the MEMS chip, wherein the silicon microphone further comprises a waterproof member accommodated in the accommodating space and covering the sound inlet, the waterproof member is sandwiched between the MEMS chip and the substrate, an accommodation hole is configured at a position of the signal let out board corresponding to the silicon microphone, the housing is accommodated in the accommodation hole, the substrate abuts a surface of the signal let out board and covers the accommodation hole, at least one pad is configured on a surface of the substrate Where the housing is assembled, and the at least one pad is electrically connected to the signal let out board.
2. The terminal assembly structure of the MEMS microphone according to claim 1, wherein the waterproof member has a mesh structure.
3. The terminal assembly structure of the MEMS microphone according to claim 2, wherein the waterproof member is a silicon chip.
4. The terminal assembly structure of the MEMS microphone according to claim 2, wherein the waterproof member is a poly tetra fluoro ethylene (PTFE) film.
5. The terminal assembly structure of the MEMS microphone according to claim 1, wherein a plurality of pads are configured on the surface of the substrate, the plurality of pads are disposed at both sides of the housing, and aligned along the length direction of edges of the two sides of the housing.
6. The terminal assembly structure of the MEMS microphone according to claim 1, wherein the ASIC chip is electrically connected to the substrate by a gold wire, and the ASCI chip is electrically connected to the MEMS chip by a gold wire.
7. The terminal assembly structure of the MEMS microphone according to claim 1, wherein the substrate is a printed circuit board.
8. The terminal assembly structure of the MEMS microphone according to claim 1, wherein the housing is a metal housing.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) In order to describe technical solutions in the embodiments of the present disclosure more clearly, accompany drawings used to describe the embodiments are briefly illustrated below. It is evident that the drawings in the following description are only some embodiments of the present disclosure. For those skilled in the art, in a case where no inventive effort is made, other drawings may be obtained according to these drawings.
(2)
(3)
(4)
DETAILED DESCRIPTION
(5) The technical solutions in embodiments of the present disclosure will be clearly and completely described with reference to the accompany drawings of the present disclosure. It is evident that the embodiments described are only some rather than all embodiments of the present disclosure. Based on the embodiments of the present disclosure, all other embodiments obtained by skilled persons in the art without making any inventive effort fall into the disclosure of protection by the present disclosure.
(6) With reference to
(7) The signal let out board 1 is disposed at a terminal, and the silicon microphone 2 is disposed on the signal let out board 1.
(8) The housing 21 and the substrate 22 form an accommodation space 210. The housing 21 is a metal housing, and the substrate 22 is a printed circuit board.
(9) The ASIC chip 23 and the MEMS chip 24 are accommodated in the accommodation space 210.
(10) The ASIC chip 23 is electrically connected to the substrate 22, and the ASIC chip 23 and the MEMS chip 24 are electrically connected. Specifically, the ASIC chip 23 is electrically connected to the substrate 22 through a gold wire 28, and the ASIC chip 23 is electrically connected to the MEMS chip 24 through a gold wire 28.
(11) The sound inlet 25 is configured at a position of the substrate 22 corresponding to the MEMS chip 24, and communicated to outside.
(12) The waterproof member 26 is accommodated in the accommodating space 210 and covers the sound inlet 25, the waterproof member 26 being sandwiched between the MEMS chip 24 and the substrate 22, the waterproof member 26 connecting the MEMS chip 24 and the substrate 22.
(13) The waterproof member 26 is a mesh component with waterproof and dustproof function, and formed between the substrate 22 and the MEMS chip 24 through semiconductor mounting process. A material for the waterproof member 26 may be a high temperature resistant silicon chip, or a high impact drop resistant poly tetra fluoro ethylene (PTFE) film.
(14) The at least one pad 27 are disposed on a surface of the substrate 22 where the housing 21 is disposed. The at least one pad 27 is electrically connected to the signal let out board 1. Specifically, the at least one pad 27 can be adhered to the signal let out board 1 by the solder paste 29.
(15) In this embodiment, there are a plurality of pad 27 which are is disposed at both sides of the housing 21, and aligned along the length direction of edges of the two sides of the housing 21.
(16) The accommodation hole 11 is configured at a position of the signal let out board 1 corresponds to the silicon microphone 1. The housing 21 is accommodated in the accommodation hole 11, and the substrate 22 abuts a surface of the signal let out board 1 and covers the accommodation hole 11.
(17) The accommodation hole 11 is a through hole or a blind hole, configured to accommodate the housing 21.
(18) With reference to
(19) Compared with the related art, the terminal assembly structure of the MEMS microphone provided in the present disclosure has the following advantages:
(20) (1) Due to that a pad and a housing are disposed on the same surface of a substrate, substrate processing and package testing of the silicon microphone applied in the present disclosure are universal in existing processing with no bottleneck, thereby the terminal assembly structure of present disclosure can be mass produced and marketed with no delay;
(21) (2) Due to that a silicon microphone with such structure can be directly adhered onto a signal let out board of a terminal device after being adhered to the pad by solder paste, it ensures that a sound inlet of the silicon microphone is directly opposite to a sound hole of the signal board, so that sound can be directly transmitted into the silicon microphone without loss;
(22) (3) Due to that a silicon microphone with such structure can be adhered onto a signal let out board of a terminal device after being adhered to the pad by solder paste, the silicon microphone is embedded inside the signal let out board, which can reduce the overall height of the silicon microphone and signal let out board to the utmost and ensure that the smart terminal device is characterized by being even thinner.
(23) (4) Due to that a waterproof member between the substrate and the MEMS chip is added by the bonding process, waterproof and dustproof capabilities of the silicon microphone can be greatly improved, and application range of an existing silicon microphone is greatly extended.
(24) The above-described are only embodiments of the present disclosure. It shall be noted that skilled persons in the related art may make improvements without departing from the concept of the present disclosure. All these improvements fall into the protection scope of the present disclosure.