Chip Packaging Structure and Related Inner Lead Bonding Method
20200335474 ยท 2020-10-22
Inventors
- Ying-Chen Chang (Hsinchu County, TW)
- Po-Chi Chen (Hsinchu County, TW)
- Kuo-Wei Tseng (Hsinchu County, TW)
Cpc classification
H01L2224/13021
ELECTRICITY
H01L2224/0401
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/81193
ELECTRICITY
H01L2224/16238
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/05567
ELECTRICITY
H01L2224/81805
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2224/16014
ELECTRICITY
H01L2224/16113
ELECTRICITY
H01L2224/13007
ELECTRICITY
H01L2224/13019
ELECTRICITY
H01L23/49811
ELECTRICITY
H01L2224/16013
ELECTRICITY
International classification
Abstract
A chip packaging structure includes a chip and a film substrate. The chip is formed with a gold bump, and the film substrate is formed with an inner lead, wherein the gold bump includes a first bonding surface and a plurality of side walls. The gold bump is electrically connected to the inner lead through a eutectic material coverage layer, and the first bonding surface and at least one of the plurality of side walls are covered by the eutectic material coverage layer.
Claims
1. A lead bonding method for a chip packaging structure, wherein the chip packaging structure comprises a chip and a film substrate, comprising: making a first bonding surface of a gold bump of the chip contact with a lead of the film substrate; heating the gold bump and the lead up to a temperature range to form a eutectic material coverage between the gold bump and the lead; and holding on for a predetermined period to make a first bonding surface, a second bonding surface and at least one of a plurality of side walls of the gold bump covered by the eutectic material coverage.
2. The lead bonding method of claim 1, further comprising: forming the gold bump on the chip; and forming the lead on the film substrate.
3. The lead bonding method of claim 1, wherein the lead and the gold bump extend along a first direction, the gold bump contacts with the lead toward a second direction, a width of the gold bump and a width of the lead are sizes along a third direction, and the first direction, the second direction and the third direction are perpendicular to one another.
4. The lead bonding method of claim 3, wherein the width of the gold bump is smaller than or equal to the width of the lead the gold bump.
5. The lead bonding method of claim 3, wherein the width of the gold bump is greater than the width of the lead.
6. The lead bonding method of claim 1, wherein the lead comprises a second bonding surface, the second bonding surface faces toward the first bonding surface of the gold bump, and the eutectic material coverage covers the second bonding surface.
7. The lead bonding method of claim 6, wherein the second bonding surface and the first bonding surface are parallel to a first plane, projections of the second bonding surface and the first bonding onto the first plane are partially or completely overlapped, the plurality of side walls is parallel to a second plane, and the first plane is perpendicular to the second plane.
8. The structure of claim 3, wherein the second bonding surface and the first bonding surface are parallel to a first plane, the plurality of side walls is parallel to a second plane, the first plane is perpendicular to the second plane, and the plurality of side walls comprises: a first side wall connected to the first bonding surface, perpendicular to the first bonding surface and the third direction; and a second side wall connected to the first bonding surface, perpendicular to the first bonding surface and the third direction, and the first side wall and the second side wall are covered by the eutectic material coverage.
9. The lead bonding method of claim 8, wherein the gold bump comprises: a third side wall connected to the first bonding surface, the first side wall and the second side wall, perpendicular to the first bonding surface and the first direction, and covered by the eutectic material coverage.
10. The lead bonding method of claim 1, wherein the temperature range is from 400 to 500 Celsius degrees.
11. The lead bonding method of claim 1, wherein the predetermined period is from 0.1 to 2 seconds.
12. The lead bonding method of claim 1, wherein the first bonding surface and the at least one of the plurality of side walls are covered by the eutectic material coverage by a capillary effect, and a maximum width of the gold bump is smaller than a width of the lead.
13. A chip packaging structure made by the lead bonding method of claim 1.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0028]
[0029] The gold bump 21 extends along the Y direction and incudes a first bonding surface 211 and a plurality of side walls. Each of the plurality of side walls is connected to the first bonding surface 211 and is surfaces of the gold bump 21. The lead 22 is extended along the Y direction and includes a second bonding surface 221. The first bonding surface 211 of the gold bump 21 faces the second bonding surface 221 of the lead 22 to bond the gold bump 21 and the lead 22.
[0030] For example, the second bonding surface 221 of the lead 22 faces a Z direction to bond with the first bonding surface 211 of the gold bump 21.
[0031] The pad 201 is electrically connected to the die 200 and used as a signal path of the die 200. The die 200 is covered by the passivation layer 202, wherein the passivation layer 202 is formed with a passivation opening 203 used as a connection path between the pad 201 and the gold bump 21. Noticeably, compared with the passivation opening 103 of
[0032] A eutectic material coverage (EMC) 24 is formed between the gold bump 21 and the lead 22, a part of the gold bump 21 and a part of the lead 22 may be combined with the eutectic material coverage 24 through heating up for a period to form alloys of eutectic material, gold and copper (lead). Since the first bonding surface 211 of the gold bump 21 is approximated as a plane and the hollow 213 may be filled up by the eutectic material coverage 24, the gold bump 21 may be electrically connected to the lead 22 through the eutectic material coverage 24, and the first bonding surface 211, the second bonding surface 221 and at least one of the plurality of side walls are covered by the eutectic material coverage 24.
[0033] The plurality of side walls of the gold bump 21 includes a first side wall 212 L and a second side wall 212 R. The first side wall 212 L and the second side wall 212 R are parallel to a YZ plane, and perpendicular to the first bonding surface 221 (e.g., the XY plane) and an X direction. The first side wall 212 L and the second side wall 212 R are covered by the eutectic material coverage 24. In such a structure, the bonding between the gold bump 21 and the lead 22 is resistive to a force along the X direction to enhance bonding strength.
[0034] The plurality of side walls of the gold bump 21 further includes a third side wall 212 B parallel to the XZ plane, and perpendicular to the first bonding surface 221 and the Y direction. The third side wall 212 B is covered by the eutectic material coverage 24. In such a structure, the bonding between the gold bump 21 and the lead 22 is resistive to a force along the Y direction to enhance bonding strength.
[0035] When bonding the gold bump 21 and the lead 22, the first bonding surface 211 of the gold bump 21 is made to contact with the second bonding surface 221 of the lead 22, then the gold bump 21 and the lead 22 are heated up to a temperature range for forming the eutectic material coverage 24 between the gold bump and the lead, and finally the gold bump 21 and the lead 22 are held on contacted for a predetermined period to make the first bonding surface 211, the second bonding surface 221 and at least one of the plurality of side walls 212 L, 212 R and 212 B covered by the eutectic material coverage 24. In one embodiment, the temperature range is from 400 to 500 Celsius degrees, the predetermined period is from 0.1 to 2 seconds. Since the first bonding surface 211 of the gold bump 21 is approximated to a plane and the small hollow 213 may be filled up by the eutectic material coverage 24, the bonding strength may be ensured by contacting the first bonding surface 211 with the second bonding surface 221.
[0036] The width W21 of the gold bump 21 and the width W22 of the lead 22 respectively refer to the sizes of the lead 22 and the gold bump 21 along the X direction, wherein the X, Y, and Z directions are perpendicular to each other. In one embodiment, the width W21 of the gold bump 21 may be smaller than or equal to the width W22 of the lead 22, which allows the chip packaging structure 2 to perform lead bonding without applied stress.
[0037] In the chip packaging structure 1 of
[0038] The chip packaging structure 2 of the present invention performs lead bonding to the bonding gold bump 21 and the lead 22 by making the eutectic material coverage 24 cover the first bonding surface 211, the second bonding surface 221 and at least one of the plurality of side walls 212 L, 212 R and 212 B. Therefore, by making the first bonding surface 211 of the gold bump 21 contact with the second bonding surface 221 of the lead 22 is enough for performing lead bonding, and there is no need to apply stress for embedding the lead 22 into the gold bump 21. As a result, bonding stress and pressure analysis is avoided to effectively simplify process steps, and structure damage due to applying stress can be prevented, so as to realize non-embedded bonding.
[0039]
[0040] In detail, the surface of the gold bump 21 is rough to be a non-smooth surface, the capillary effect happens when the eutectic material coverage 24 in liquid state is formed on the surface of the gold bump 21, and the eutectic material coverage 24 in liquid state flows toward the side walls 212 R, 212 L and 212 B of the gold bump 21 and the extended area 211 E of the first bonding surface 211 to increase an area of the eutectic material coverage 24 and the bonding strength of the lead 22 and the gold bump 21. Further, since the area of the eutectic material coverage 24 covering the gold bump 21 is increased, a hardness of the gold bump 21 is also increased to mitigate deformation to the gold bump 21 after the bonding process and reduce short risk. Meanwhile, interface impedance between the lead 22 and the gold bump 21 decreases as the area of the eutectic material coverage 24 increases to improve conductivity between the lead 22 and the gold bump 21. Moreover, thermal expansion effect becomes less significant when the size of the gold bump 21 is decreased, which increases packaging tolerance and yield rate.
[0041] As can be seen from
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[0045] According to
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[0047] Compare
[0048] In addition, the width of the gold bump 21 is smaller than the width of the gold bump 11 (i.e., the sizes along the X direction), and the height of the lead 22 is greater than the height of the lead 12 (i.e., the sizes along the Z direction), which saves material usages (e.g., gold and copper) to make the chip packaging structure 2 more cost competitive. The height of the lead 22 is smaller than the height of the lead 12 (i.e., the sizes along the Z direction), and thus a distance between the lead 22 and the chip 20 is greater than a distance between the lead 12 and the chip 10, which reduces short risk due to test key burr when the chip packaging structure 2 is performing packaging test.
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[0050]
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[0052] A eutectic material coverage 34 is formed between the gold bump 31 and the lead 32, and a part of the gold bump 31 and a part of the lead 32 may be combined with the eutectic material coverage 34 through heating up for a period to form alloys of eutectic material. The gold bump 31 may be electrically connected to the lead 32 through the eutectic material coverage 34, and the first bonding surface 311, the second bonding surface 321 and at least one of the plurality of side walls 33 are covered by the eutectic material coverage 34.
[0053] Noticeably, a width W31 of the gold bump 31 and a width W32 of the lead 32 are sizes along the X direction. In this embodiment, the width W31 of the gold bump 31 is greater than the width W32 of the lead 32. By properly controlling a difference between the widths W31 and W32, the non-embedded bonding may be realized to make the first bonding surface 311, the second bonding surface 321 and at least one of the plurality of side walls 313 L and 313 R covered by the eutectic material coverage 34.
[0054] Production processes regarding the chip packaging structure 2 or 3 may be summarized into a lead bonding process 130, as shown in
[0055] Step 1300: Form a gold bump on a chip, the gold bump is formed with a first bonding surface and a plurality of side walls.
[0056] Step 1301: Form a lead on a film substrate, the lead is formed with a second bonding surface.
[0057] Step 1302: Make the first bonding surface of the gold bump contact the second bonding surface of the lead.
[0058] Step 1303: Heat the gold bump and the lead up to a temperature range (400-500 Celsius degrees) to forma eutectic material coverage between the gold bump and the lead.
[0059] Step 1304: Hold on for a predetermined period (0.1-2 seconds) to make the first bonding surface, the second bonding surface and at least one of the plurality of side walls covered by the eutectic material coverage.
[0060] Detailed operations of the lead bonding process 130 may be obtained by referring to descriptions of
[0061] To sum up, The present invention utilizes a capillary effect happened to the eutectic material coverage 24 formed on the surface of the gold bump, which allows the eutectic material coverage flowing to the bonding surface and at least one side walls of the gold bump without any applied stress to increase the area of eutectic material coverage. Therefore, the present invention realizes non-embedded bonding to improve bonding strength between the lead and the gold bump, reduce bonding impedance, enhance resistance to deformation, ensure structure intactness, and reduce short risk. Moreover, in the chip packaging structure of the present invention, the sizes of the lead and the gold bump are decreased to realize fine pitch, improve potting glue fluidity, increase space for heat dissipation, save material usage, increase packaging precision (tolerance) and decrease short risk due to test pin burr.
[0062] Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.