HETEROGENEOUS WET SYNTHESIS PROCESS FOR PREPARATION OF HIGH PURITY TUNGSTEN PENTAHALIDE

Abstract

Synthesis of tungsten pentahalide compositions having low impurity profiles are disclosed. The specific impurity profile permits deposition of high purity tungsten-containing films using vapor deposition processes or other semiconductor manufacturing processes without introduction of performance-impacting contaminants.

Claims

1. A method of synthesizing a WX.sub.5-containing composition, wherein X is Cl or Br, the method comprising reacting approximately 1 molar equivalent of a tungsten hexahalide with approximately 0.4 to approximately 0.6 molar equivalents of a disilane in a water reactive solvent to form a reaction mixture containing tungsten pentahalide and a halosilane by-product.

2. The method of claim 1, wherein the tungsten pentahalide is WCl.sub.5.

3. The method of claim 1, wherein the disilane has the formula Si.sub.2R.sub.6, with each R independently being H, a C1-C4 hydrocarbyl group, or a halide.

4. The method of claim 3, wherein the disilane is Si.sub.2Me.sub.6.

5. The method of claim 1, further comprising adding the tungsten hexahalide to the water reactive solvent, wherein the water reactive solvent comprises the halosilane by-product, to form a suspension prior to the reacting step.

6. The method of claim 5, wherein the reacting step occurs when the disilane is added to the suspension.

7. The method of claim 1, further comprising isolating the tungsten pentahalide from the reaction mixture by evaporating the halosilane by-product to produce an isolated WX.sub.5-containing composition.

8. The method of claim 7, wherein the isolated WX.sub.5-containing composition comprises between approximately 95% w/w WCl.sub.5 and approximately 100% WCl.sub.5.

9. The method of claim 7, further comprising sublimating the isolated WX.sub.5-containing composition to produce the WX.sub.5-containing composition.

10. The method of claim 9, wherein the WX.sub.5-containing composition comprising between approximately 0% to approximately 0.00002% by weight (0-200 ppb) of each of Al, Ti, V, Cr, Fe, Ni, Cu, and Mo.

11. The method of claim 1, further comprising isolating the tungsten pentahalide from the reaction mixture by filtration to produce an isolated WX.sub.5-containing composition.

12. The method of claim 11, wherein the isolated WX.sub.5-containing composition comprises between approximately 95% w/w WCl.sub.5 and approximately 100% WCl.sub.5.

13. The method of claim 11, further comprising sublimating the isolated WX.sub.5-containing composition to produce the WX.sub.5-containing composition.

14. The method of claim 13, wherein the WX.sub.5-containing composition comprising between approximately 0% to approximately 0.00002% by weight (0-200 ppb) of each of Al, Ti, V, Cr, Fe, Ni, Cu, and Mo.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0214] For a further understanding of the nature and objects of the present invention, reference should be made to the following detailed description, taken in conjunction with the accompanying drawing wherein:

[0215] FIG. 1 is a schematic diagram of an apparatus in which the disclosed synthesis methods may be performed;

[0216] FIG. 2 is a ThermoGravimetric Analysis (TGA) plot illustrating the percentage of weight loss upon temperature increase of WCl.sub.4, WCl.sub.5, and a controlled mixture of the two;

[0217] FIG. 3 is a ThermoGravimetric Analysis/Differential Thermal Analysis (TGA/DTA) plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product of Example 1 before sublimation;

[0218] FIG. 4 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product of Example 1 after sublimation;

[0219] FIG. 5 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product of Example 4;

[0220] FIG. 6 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product of Example 5;

[0221] FIG. 7 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the product of Comparative Example 1; and

[0222] FIG. 8 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the product of Comparative Example 2.

DESCRIPTION OF PREFERRED EMBODIMENTS

[0223] Methods for preparing WX.sub.5-containing compositions at high purity levels are disclosed. The disclosed heterogeneous wet synthesis methods produce the WX.sub.5-containing composition from tungsten (VI) halides. The disclosed methods produce products having purities suitable for use in semiconductor processing. The disclosed methods do not require complicated apparatus.

[0224] Both methods described herein minimize the formation of over-reduced by-products, such as Tungsten (IV) halide (i.e., WX.sub.4). Additionally, both methods operate under atmospheric pressure and at low temperatures. At these temperature and pressure conditions, tungsten halides are at least partially present as solids in the solvent and the reactions take place as a heterogeneous mixture.

Olefin Reaction

[0225] Tungsten hexahalide (i.e., WX.sub.6) is added to a reactor. WCl.sub.6 and WBr.sub.6 are commercially available. A solvent is added to form a heterogeneous mixture at a temperature ranging from approximately 10 C. to approximately 70 C. An olefin is added to the mixture. The mixture is stirred to form a stirred heterogeneous mixture at a speed sufficient to maintain any solids in suspension. The WX.sub.5-containing composition is isolated from the stirred mixture.

[0226] The reactions are described in the following equations:

2 WX.sub.6(s)+C.sub.nR.sub.2n(l).fwdarw.2 WX.sub.5 (s)+C.sub.nR.sub.2nX.sub.2 (l)

2 WX.sub.6 (s)+C.sub.nR.sub.2n-2 (l).fwdarw.2 WX.sub.5 (s)+C.sub.nR.sub.2n-2X.sub.2 (l)

2 WX.sub.6 (s)+C.sub.nR.sub.2n-2 cyclic (l).fwdarw.2 WX.sub.5 (s)+C.sub.nR.sub.2n-2X.sub.2 cyclic (l)

2 WX.sub.6 (s)+C.sub.nR.sub.2n-2 cyclic (l).fwdarw.2 WX.sub.5 (s)+C.sub.nR.sub.2n-4X.sub.2 cyclic (l)

2 WX.sub.6 (s)+C.sub.nR.sub.2n-6 cyclic (l).fwdarw.2 WX.sub.5 (s)+C.sub.nR.sub.2n-6X.sub.2 cyclic (l)

Wherein l=liquid; s=solid; X=Cl or Br; each R is independently H or C1-C4 hydrocarbyl, preferably H or Me; and n=5-11, provided that n6 for cyclic C.sub.nR.sub.2n-4

[0227] The tungsten (VI) halide may be added to a reactor containing the solvent or vice versa. In other words, the order of addition is not important. The solvent may be added to a reactor containing the tungsten (VI) halide to form a suspension at a temperature ranging from approximately 10 C. to approximately 70 C., preferably ranging from approximately 15 C. to approximately 28 C. The reactant, tungsten (VI) halide, will remain at least partially solid, producing a suspension in the solvent during the reaction. The pressure in the reactor is preferably around atmospheric pressure (approximately 91 kPa to approximately 112 kPa). The ratio of solvent to tungsten (VI) halide is chosen from the range of approximately 3 mL to approximately 20 mL of solvent per approximately 1 g of tungsten (VI) halide, preferably approximately 3 mL to approximately 10 mL of solvent per approximately 1 g of tungsten (VI) halide.

[0228] As tungsten halides may degrade to tungsten oxyhalides, other tungsten halides, and/or tungsten oxides, care must be taken to ensure that the tungsten halide reactant has a purity ranging from approximately 90% mol/mol to approximately 100% mol/mol. Preferably, the tungsten halide has a purity ranging from approximately 95% mol/mol to approximately 100% mol/mol, and more preferably from approximately 99% mol/mol to approximately 100% mol/mol. One of ordinary skill in the art will recognize that the tungsten halide reactant purity may be determined at least by using UV/VIS spectroscopy. See, e.g., Thom-Csanyi et al., Journal of Molecular Catalysis 65 (1991) pp. 261-267. One of ordinary skill in the art would also recognize that the tungsten (VI) halide may be purified using sublimation, when necessary.

[0229] Tungsten halide reactants containing tungsten oxyhalides, other tungsten halides, and/or tungsten oxides content lead to low yields of Tungsten (V) halides. Therefore, the tungsten oxyhalides, other tungsten halides, and tungsten oxides contents in the tungsten (VI) halide reactant may range from approximately 0% mol/mol to approximately 10% mol/mol, preferably from approximately 0% mol/mol to approximately 5% mol/mol, and more preferably from approximately 0% mol/mol to approximately 1% mol/mol.

[0230] The solvent may be a hydrocarbon, halo-hydrocarbon, halocarbon (acyclic or cyclic), or mixtures thereof. Preferably, the anhydrous solvent is a halo-hydrocarbon or halocarbon. Applicants believe that aliphatic halohydrocarbon solvents facilitate formation of the desired tungsten pentahalide product.

[0231] Furthermore, the solvent must be a liquid at the reaction temperature and pressure. Therefore, the selected solvent remains a liquid at temperatures ranging between 10 C. and the boiling point of the olefin at atmospheric pressure. The solvent must also be dry (anhydrous) in order to prevent the formation of oxygenated species, such as tungsten oxides or oxyhalides. One of ordinary skill in the art would recognize the methods required to prepare an anhydrous solvent. The solvent may contain between approximately zero ppmv and approximately 100 ppmv moisture. Preferably, the solvent contains between approximately zero ppmv and approximately 10 ppmv moisture.

[0232] Exemplary solvents include dichloromethane, chloroform, trichlorofluoromethane, Dichlorodifluoromethane, 1,2-dichloroethane, 1,1-dichloroethane, 1-chloro-2-fluoroethane, 1,1,1-trichloroethane, 1,1,2-trichloroethane, 2-chloro-1,1-difluoroethane, 1,1-dichloro-1-fluoroethane, 1,1-Dichloro-1,2-difluoroethane, 1,1-Dichloro-2,2-difluoroethane, 1,2-Dichloro-1,2-difluoroethane, 1,2-Dichloro-1,1-difluoroethane, 1,1,2-Trichloro-1-fluoroethane, 1,1,2-Trichloro-1,2-difluoroethane, 1,2-Dichlorotetrafluoroethane, 2-chloro-1,1,1-trifluoroethane, 1,1,2-Trichloro-2-fluoroethane, 1-chloro-1,1,2,2-tetrafluoroethane, 1,2,2-Trichloro-1,1-difluoroethane, 1,1,2,2-Tetrachlorofluoroethane, 1-Bromo-2-chloro-1,1,2-trifluoroethane, 2-Bromo-2-chloro-1,1,1-trifluoroethane, 1,1,1-Trichloro-2,2,2-trifluoroethane, 1,1,2-Trichloro-1,2,2-trifluoroethane, Tetrachloro-1,2-difluoroethane, Tetrachloro-1,1-difluoroethane, 1-chloropropane, 2-chloropropane, 3,3-Dichloro-1,1,1,2,2-pentafluoropropane, 1,2-Dichloro-1,2,2,3,3-pentafluoropropane, 1-chlorobutane, chloroform, 2-chlorobutane, 2-methylbutane, 2,2-dimethylbutane, 2,3-dimethylbutane, pentane, 2-methylpentane, 3-methylpentane, 2,2-dimethylpentane, 2,3-dimethylpentane, 2,4-dimethylpentane, hexane, cyclohexane, octane, ethylbenzene, chlorobenzene, xylenes, or combinations thereof. These solvents are commercially available or may be synthesized by methods known in the art.

[0233] Preferably, the solvent is a low boiling point solvent because it is easier to remove by vacuum at the end of the synthesis process. The boiling point of the solvent is preferably below the melting point of any of the reactants or products. For example, the boiling point of the solvent is preferably below its approximately 240 C. melting point of tungsten pentachloride for the synthesis of tungsten pentachloride, and more preferably below 200 C. Exemplary low boiling point solvents include pentane, hexane, dichloromethane, 1,2-dichloroethane, trichlorofluoromethane, 1,1-dichloro-1-fluoroethane, 1,1,1-trichloro-2,2,2-trifluoroethane, 1,1,2-trichloro-1,2,2-trifluoroethane, and combinations thereof. More preferably, the low boiling point solvent is an aliphatic halohydrocarbon, such as dichloromethane, 1,2-dichloroethane, trichlorofluoromethane, 1,1-dichloro-1-fluoroethane, 1,1,1-trichloro-2,2,2-trifluoroethane, 1,1,2-trichloro-1,2,2-trifluoroethane, and combinations thereof.

[0234] An olefin having the formula C.sub.nR.sub.2n-2, C.sub.nR.sub.2n-4, cyclic C.sub.nR.sub.2n-2, cyclic C.sub.nR.sub.2n-4, cyclic C.sub.nR.sub.2n-6, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=4-11, provided that n is not 6 for cyclic C.sub.nR.sub.2n-4, is added to the reactor containing the tungsten (VI) halide/solvent suspension to produce a mixture at a temperature ranging from approximately 10 C. to approximately 70 C., preferably ranging from approximately 10 C. to approximately 28 C., and more preferably at approximately room temperature (i.e., approximately 20 C. to approximately 27 C.). Preferably, the reaction is not or only slightly exothermic and therefore the reaction temperature is maintained at or close to the original addition temperature. The olefin may be added as a liquid or gas. When the olefin is a gas, a solvent capable of dissolving the gaseous olefin must be selected. Once again, the olefin should be anhydrous and preferably contains between approximately zero ppmv and approximately 100 ppmv moisture to prevent the formation of oxygenated species, such as tungsten oxides or oxyhalides. The pressure in the reactor preferably remains around atmospheric pressure for safety and cost reasons. However, one of ordinary skill in the art will recognize that the reaction may also be performed in a pressure reactor without deviating from the teachings herein.

[0235] Exemplary olefins having the formula C.sub.nR.sub.2n, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=4-11, include 1-pentene, 2-methyl-1-butene, trans-2-pentene, cis-2-pentene, 1-2-methyl-2-butene, 3,3-dimethyl-1-butene, 4-methyl-1-pentene, 3-methyl-1-pentene, 2,3-dimethyl-1-butene, 4-methyl-cis-2-pentene, 4-methyl-trans-2-pentene, 2-methyl-1-pentene, 1-hexene, 2-ethyl-1-butene, cis-3-hexene, trans-3-hexene, 2-methyl-2-pentene, 3-methyl-trans-2-pentene, trans-2-hexene, cis-2-hexene, 3-methyl-cis-2-pentene, 4,4,-dimethyl-1-pentene, 2,3-dimethyl-2-butene, 4,4-dimethyl-trans-2-pentene, 3,3-dimethyl-1-pentene, 2,3,3-trimethyl-1-butene, 4,4-dimethyl-cis-2-pentene, 3,4-dimethyl-1-pentene, 2,4-dimethyl-2-pentene, 3-methyl-1-hexene, 2,3-dimethyl-1-pentene, 3-ethyl-1-pentene, 5-methyl-1-hexene, 5-methyl-trans-2-hexene, 2-methyl-3-hexene, 4-methyl-1-hexene, 3,4-dimethyl-2-pentene, 4-methyl-cis-2-hexene, 4-methyl-trans-2-hexene, 2-ethyl-3-methyl-1-butene, 5-methyl-cis-2-hexene, 2-methyl-1-hexene, 3-methyl-trans-3-hexene, 1-heptene, 3-methyl-trans-2-hexene, 2-ethyl-1-pentene, 3-methyl-cis-3-hexene, 2-methyl-2-hexene, cis-3-heptene, 5-3-ethyl-2-pentene, 2,3-dimethyl-2-pentene, trans-2-heptene, cis-2-heptene, 2,2-dimethyl-trans-3-hexene, 2,4,4-trimethyl-1-pentene, 2,5-dimethyl-3-hexene, 5,5-dimethyl-1-hexene, 2-isopropyl-3-methyl-1-butene, 3,4,4-trimethyl-1-pentene, 3,5-dimethyl-1-hexene, 3,3-dimethyl-1-hexene, 5,5-dimethyl-trans-2-hexene, 2,4,4-trimethyl-2-pentene, 3,3,4-trimethyl-1-pentene, 2,2-dimethyl-cis-3-hexene, 4,4-dimethyl-2-hexene, 5,5-dimethyl-cis-2-hexene, 4,4-dimethyl-1-hexene, 3-ethyl-4-methyl-1-pentene, 2,4-dimethyl-trans-3-hexene, 2,3,4-trimethyl-1-pentene, 2,3,3-trimethyl-1-pentene, 4,5-dimethyl-1-hexene, 2,4-dimethyl-cis-3-hexene, 3,3-dimethyl-2-ethyl-1-butene, 3-ethyl-2-methyl-1-pentene, 4,5-dimethyl-2-hexene, 2-ethyl-4-methyl-1-pentene, 3-ethyl-1-hexene, 2,3-dimethyl-1-hexene, 2,4-dimethyl-4-hexene, 3-methyl-1-heptene, 2,4-dimethyl-1-hexene, 3-methyl-1-heptene, 2,4-dimethyl-1-hexene, 2,5-dimethyl-1-hexene, 3-ethyl-3-methyl-1-pentene, 3,4-dimethyl-1-hexene, 3,4,4,-trimethyl-2-pentene, 3,5-dimethyl-2-hexene, 2-methyl-3-heptene, 5-methyl-3-heptene, 2,5-dimethyl-2-hexene, 2-ethyl-3-methyl-1-pentene, 4-methyl-1-heptene, 6-methyl-3-heptene, 4-ethyl-2-hexene, 2-isopropyl-1-pentene, 5-methyl-1-heptene, 4-methyl-2-heptene, 2,3-dimethyl-3-hexene, 4-methyl-2-octene, 4-ethyl-4-methyl-trans-2-pentene, 3-ethyl-4-methyl-cis-2-pentene, 3,4-dimethyl-2-hexene, 3-ethyl-3-hexene, 2,3,4-trimethyl-2-pentene, 6-methyl-2-heptene, 2-n-propyl-1-pentene, 5-methyl-2-heptene, 2-methyl-1-heptene, 2-ethyl-1-hexene, 4-methyl-3-heptene, 3-ethyl-2-hexene, 3-methyl-3-heptene, 1-octene, trans-4-octene, 3-methyl-2-heptene, trans-4-octene, 3-methyl-2-heptene, cis-4-octene, 2,3-dimethyl-2-hexene, 3,4-dimethyl-trans-3-hexene, 6-methyl-1-heptene, cis-3-octene, trans-3-octene, 2-methyl-2-heptene, trans-2-octene, cis-2-octene, 2,6-dimethyl-2-heptene, 2-methyl-4-octene, 7-methyl-3-octene, 2-methyl-2-octene, 4-nonene, 1-nonene, 2-nonene, 5-decene, 1-decene, 4-decene, 2-undecene, 5-undecene, 1-undecene, 1-dodecene, and combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art. One of ordinary skill in the art will further recognize that aromatics, terpenes, ethylidene, isopropenyl, and bicyclics may also be used as the olefin without departing from the teachings herein.

[0236] Exemplary olefins having the formula C.sub.nR.sub.2n-2, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=4-11, include 1,4-pentadiene, 2-methyl-1,3-butadiene, 3-methyl-1-2-butadiene, 1,3-pentadiene (piperylene), 1-trans-3-pentadiene, 1-cis-3-pentadiene, 1,2-pentadiene, 2,3-pentadiene, 3-methyl-1,4-pentadiene, 2-methyl-1,4-pentadiene, 1,5-hexadiene, trans-1,3-hexadiene, 2,3-hexadiene, 2,3-dimethyl-1,3-butadiene, 4-methyl-1,2-pentadiene, 2-methyl-2,3-pentadiene, 1,4-hexadiene, 2-ethyl-1,3-butadiene, 1,2-hexadiene, 4-methyl-1,3-pentadiene, 3-methyl-1,3-pentadiene, 3-methyl-1,2-pentadiene, 2,4-hexadiene, 2-methyl-1,5-hexadiene, 4,4-dimethyl-1,2-pentadiene, 2,4-dimethyl-2,3-pentadiene, 5-methyl-1,4-hexadiene, 2-methyl-1,5-hexadiene, 2,4-dimethyl-1,3-pentadiene, methyl-1,2-hexadiene, 1,4-heptadiene, 3,3-dimethyl-1,5-hexadiene, 3,4-dimethyl-1,5-hexadiene, 1,2-heptadiene, 2-methyl-2,4-hexadiene, 3-methyl-2,4-hexadiene, 2,4-heptadiene, 4-methyl-1,3-hexadiene, 3-methyl-1,5-heptadiene, 2,4-dimethyl-2,4-hexadiene, 6-methyl-2,4-heptadiene, 6-methyl-1,3-heptadiene, 2,5-dimethyl-1,3-hexadiene, 2,5-dimethyl-1,5-hexadiene, 2-methyl-1,3-heptadiene, 4-methyl-2,4-heptadiene, 3-methyl-2,4-heptadiene, 3,5-dimethyl-2,4-heptadiene, 2,4-octadiene, 2,5-dimethyl-2,5-hexadiene, 2,6-dimethyl-2,4-heptadiene, 2,6-dimethyl-1,3-heptadiene, 2,6-dimethyl-1,5-heptadiene, 1,8-nonadiene, 3,6-dimethyl-2,4-heptadiene, 2,6-dimethyl-2,5-heptadiene, 2,7-nonadiene, 4,4-dimethyl-1,7-octadiene, 4,5-dimethyl-2,6-octadiene, 3,6-dimethyl-2,6-octadiene, 2,6-dimethyl-2,7-octadiene, 2,4-dimethyl-2,4-octadiene, 2,7-dimethyl-2,6-octadiene, 3,7-dimethyl-2,4-octadiene, 2,6-dimethyl-2,6-octadiene, and combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art.

[0237] Exemplary olefins having the formula C.sub.nR.sub.2n4, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=4-11, include trans-1,3,5-hexatriene, cis-1,3,5-hexatriene, and combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art.

[0238] Exemplary olefins having the formula cyclic C.sub.nR.sub.2n-2, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=4-11, include 3-methylcyclobutene, cyclopentene, methylcyclobutene, 3-methylcyclopentene, 4-methylcyclopentene, 1-methylcyclopentene, cyclohexene, 3,3-dimethylcyclopentene, 1,3-dimethylcyclopentene, 1,4-dimethylcyclopentene, 3-ethylcyclopentene, 4-methylcyclohexene, 3-methylcyclohexene, 1,2-dimethylcyclopentene, 4-ethylcyclopentene, 1-ethylcyclopentene, 1,5,5-trimethylcyclopentene, 1-methylcyclohexene, cycloheptene, 4,4-dimethylcyclohexene, 3,3-dimethylcyclohexene, 1,2,3-trimethylcyclopentene, 1,4-dimethylcyclohexene, 1,5-dimethylcyclohexene, 4-vinylcyclohexene, 4-ethylcyclohexene, 4-ethylcyclohexene, 1,6-dimethylcyclohexene, 3-ethylcyclohexene, 1,2,3,3-tetramethylcyclopentene, 1-ethylcyclohexene, 1,2-dimethylcyclohexene, 1-methylcycloheptene, 1,5,5-trimethylcyclohexene, 1,4,4-trimethylcyclohexene, 1,5,6-trimethylcyclohexene, cyclooctatetraene, 1,3,5-trimethylcyclohexene, cyclooctene, 1,4,5-trimethylcyclohexene, 1-vinylcyclohexene, 1,6,6-trimethylcyclohexene, 1-ethyl-4-methylcyclohexene, 1,2,3-trimethylcyclohexene, 1-ethyl-5-methylcyclohexene, allylcyclohexene, 1,4,4-trimethylcycloheptene, cis-cyclodecene, and combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art.

[0239] Exemplary olefins having the formula cyclic C.sub.nR.sub.2n-4, wherein each R is independently H or a C1-C4 hydrocarbyl group and n=5 or 7-11, provided that n6, include cyclopentadiene, 1,3-cycloheptadiene, 1,4-cycloheptadiene, 1,4-cyclooctadiene, 1,5-cyclooctadiene, 4-methyl-3,5-octadiene, 7-methyl-2,4-octadiene, or combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art.

[0240] Exemplary olefins having the formula cyclic C.sub.nR.sub.2n-6, wherein each R is independently H or a C1-C3 hydrocarbyl group and n=7-11, include 1,3,5-cycloheptatriene, 1,3,5-cyclooctatriene, and combinations thereof. These olefins are either commercially available or may be synthesized by methods known in the art.

[0241] Preferably the olefin has a boiling point between approximately room temperature and 70 C. Exemplary olefins having this boiling point include 1,4-pentadiene, 1-pentene, 2-methyl-1-butene, 3-methylcyclobutene, 2-methyl-1,3-butadiene, trans-2-pentene, cis-2-pentene, 1-methylcyclobutene, 2-methyl-2-butene, 3-methyl-1-2-butadiene, cyclopentadiene, 1,3-pentadiene (piperylene),3,3-dimethyl-1-butene, 1-trans-3-pentadiene, 1-cis-3-pentadiene, cyclopentene, 1,2-pentadiene, 2,3-pentadiene, 4-methyl-1-pentene, 3-methyl-1-pentene, 3-methyl-1,4-pentadiene, 2,3-dimethyl-1-butene, 2,3-dimethyl-2-butene, 2-methyl-1,4-pentadiene, 4-methyl-cis-2-pentene, 4-methyl-trans-2-pentene, 1,5-hexadiene, 2-methyl-1-pentene, 1-hexene, 2-ethyl-1-butene, trans-1,3-hexadiene, 3-methylcyclopentene, cis-3-hexene, trans-3-hexene, 2-methyl-2-pentene, trans-2-hexene, cis-2-hexene, 1,4-hexadiene, and combinations thereof.

[0242] Even more preferably, the anhydrous olefin is selected from cis/trans 2-pentene, 1-pentene, 1-hexene, 1,5-hexadiene, 2-methyl-1,3-butadiene, 2,3-dimethyl-2-butene, 3,3-dimethyl-1-butene, 4-methyl-1-pentene, cyclopentene, or combinations thereof.

[0243] The molar ratio of the tungsten (VI) halide to the anhydrous olefin is between 0.5:1 and 2:1 and preferably between 1:1 and 1.8:1. However, as demonstrated in the following examples, a large excess of olefin leads to low tungsten (V) halides yields and formation of unwanted by-products. Therefore, the molar ratio of Tungsten (VI) halide to the anhydrous olefin is preferably 0.6:1 to 1.8:1. As further demonstrated in the following examples, a slight excess of olefin leads to the complete conversion to the lower valence tungsten halides (V or lower) which are more suitable for separation by sublimation. Therefore, the molar ratio of tungsten (VI) halide to anhydrous olefin is more preferably 0.6:1 to 1.8:1.

[0244] The mixture is stirred for approximately 10 min to approximately 48 hours at a temperature range of approximately 10 C. to approximately the boiling point of the olefin or solvent, preferably from approximately 10 C. to approximately 50 C., and more preferably at approximately room temperature. The reaction mixture is stirred using a stirrer and at a speed sufficient to maintain any solid reactant or product in suspension. For larger batches, a double bladed stirrer may be required to maintain the solid reactants in suspension. For example, in a 22 L reactor, the stirrer may spin at a range of approximately 50 rpm to approximately 500 rpm, preferably from approximately 150 rpm to approximately 300 rpm. One of ordinary skill in the art will recognize that the reactor size and shape will dictate the speed needed to maintain the solid reactants in suspension. The mixture produced comprises tungsten (IV) halide, tungsten (V) halide, unreacted Tungsten (VI) halide, all suspended in the mixture, the solvent in liquid form, haloalkanes, and possible impurities.

[0245] After reaction, the reaction product may be isolated from the mixture by evaporating the volatiles, such as the solvent or any other volatile components of the mixture. The mixture may be stirred in vacuo. The mixture may also be warmed to temperatures ranging from approximately 30 C. to below the boiling point of the solvent. In another alternative, the mixture may be stirred in vacuo and warmed. The resulting solid product is a mixture of the WCl.sub.5 with any unreacted WCl.sub.6 and overreacted WCl.sub.4.

[0246] Alternatively, the reaction mixture may be filtered to remove the solvent, the by-products and impurities. Typical filters include glass or polymer frit filters. The WX5-containing composition may then be purified by successive washings with a rinse solvent and dried by vacuo. Once again, the rinse solvent must be dry (anhydrous) in order to prevent the formation of oxygenated species, such as tungsten oxides or oxyhalides. The rinse solvent may contain between approximately zero ppm and approximately 100 ppm moisture. Preferably, the rinse solvent contains between approximately zero ppm and approximately 10 ppm moisture.

[0247] In another alternative, the reaction mixture may be filtered to remove the solvent, by-products, and impurities and rinsed, as above, followed by vacuum evaporation of any remaining volatiles components

[0248] The rinse solvent may be the same or different from the reaction solvents disclosed above. Exemplary rinse solvents include dichloromethane, chloroform, 1-chloropropane, 2-chloropropane, 1-chlorobutane, 2-chloro-butane, pentane, heptane, octane, ethylbenzene, xylenes. Preferably, the rinse solvent is halogen containing solvents and low boiling points solvents because the removal by high vacuum will be facilitated. Other rinse solvents having properties similar to dichloromethane are also preferable in the disclosed methods.

[0249] The isolated WX.sub.5-containing composition comprises between approximately 60% w/w to approximately 100% w/w WX.sub.5.

Silane Reaction

[0250] Alternatively, disilane or polysilane may be used in place of the olefin. The reactions are described in the following equations:

2 WX.sub.6 (s)+Si.sub.2R.sub.6 (l).fwdarw.2 WX.sub.5 (s)+2 SiR.sub.3X (l)

(2n2) WX.sub.6 (s)+Si.sub.nR.sub.2n+2 (g, l or s).fwdarw.(2n2) WX.sub.5 (s)+2 SiR.sub.3X (l)+(n2) SiR.sub.2X.sub.2 (l)

wherein g=gas; l=liquid; s=solid; X=Cl or Br; each R is independently H, a C1-C4 hydrocarbyl group, preferably H or Me, or a halide; and n=3-8. No more than 3 Rs should be a halide. One of ordinary skill in the art will recognize that the required molar concentration of the polysilane will be less than the required molar concentration of the disilane. More particularly, the molar ratio of the polysilane having the formula Si.sub.nR.sub.2n+2 to the tungsten (VI) hexahalide will be between approximately 2/(5n5):1 and approximately 3/(5n5):1. For example, Si.sub.3Me.sub.8 requires half the molar concentration of Si.sub.2Me.sub.6; Si.sub.4Me.sub.10 requires the molar concentration of Si.sub.2Me.sub.6; etc.

[0251] Tungsten hexahalide (i.e., WX.sub.6) is added to a reactor. WCl.sub.6 and WBr.sub.6 are commercially available. The disilane is added to form a heterogeneous mixture at a temperature ranging from approximately 10 C. to approximately 50 C. The mixture is stirred to form a stirred heterogeneous mixture at a speed sufficient to maintain any solids in suspension. For example, in a 22 L reactor, the stirrer may spin at a speed ranging from approximately 50 rpm to approximately 500 rpm, preferably from approximately 150 rpm to approximately 300 rpm. The solid tungsten halide product is isolated from the stirred mixture

[0252] As in the olefin reaction, care must be taken to ensure that the tungsten halide reactant has a purity ranging from approximately 90% mol/mol to approximately 100% mol/mol. Preferably, the tungsten halide has a purity ranging from approximately 95% mol/mol to approximately 100% mol/mol, and more preferably from approximately 98% mol/mol to approximately 100% mol/mol. Similarly, the tungsten oxyhalides, other tungsten halides, and tungsten oxides contents in the tungsten (VI) halide reactant may range from approximately 0% mol/mol to approximately 10% mol/mol, preferably from approximately 0% mol/mol to approximately 5% mol/mol, and more preferably from approximately 0% mol/mol to approximately 1% mol/mol.

[0253] The tungsten (VI) halide may be added to a reactor containing the disilane or polysilane or vice versa. In other words, the order of addition is not important with regard to the final product. However, adding the tungsten (VI) halide to the disilane or polysilane may lower the yield of the WX.sub.5-containing composition and produce over-reduced by-products. The disilane or polysilane may be added to a reactor containing the tungsten (VI) halide to form a suspension at a temperature ranging from approximately 10 C. to approximately 50 C., preferably ranging from approximately 15 C. to approximately 28 C. As the reaction is exothermic, external cooling may be used to maintain the temperature below 50 C. The tungsten (VI) halide reactant will remain at least partially solid, producing a suspension in the disilane or polysilane during the reaction. The pressure in the reactor is preferably around atmospheric pressure (approximately 91 kPa to approximately 112 kPa).

[0254] The ratio of the tungsten (VI) halide to the disilane ranges from approximately 0.4 molar equivalents to approximately 0.6 molar equivalents of disilane per approximately 1 molar equivalent of tungsten (VI) halide, preferably from approximately 0.45 molar equivalents to approximately 0.55 molar equivalents of disilane per approximately 1 molar equivalent of tungsten (VI) halide. One of ordinary skill in the art will recognize that the appropriate stoichiometric molar ratio for reactions using polysilanes will be the disilane molar concentration divided by the number of SiSi bonds in the corresponding polysilane. For example, the ratio of trisilane to tungsten (VI) halide is chosen from the range of approximately 0.2 molar equivalents to approximately 0.3 molar equivalents of trisilane per approximately 1 molar equivalent of tungsten (VI) halide, preferably from approximately 0.22 molar equivalents to approximately 0.28 molar equivalents of trisilane per approximately 1 molar equivalent of tungsten (VI) halide; and the ratio of tetrasilane to tungsten (VI) halide is chosen from the range of approximately 0.13 molar equivalents to approximately 0.2 molar equivalents of tetrasilane per approximately 1 molar equivalent of tungsten (VI) halide, preferably from approximately 0.15 molar equivalents to approximately 0.18 molar equivalents of tetrasilane per approximately 1 molar equivalent of tungsten (VI) halide.

[0255] A disilane or polysilane having the formula Si.sub.2R.sub.6, Si.sub.nR.sub.2n+2, or Si.sub.nR.sub.2n, wherein each R is independently H or a C1-C4 hydrocarbyl group, or a halide, and n=3-8, is added to the reactor containing the tungsten (VI) halide to produce a mixture at a temperature ranging from approximately 10 C. to approximately 50 C., preferably ranging from approximately 10 C. to approximately 28 C., and more preferably at approximately room temperature (i.e., approximately 20 C. to approximately 27 C.). The disilane or polysilane may be added as a gas, liquid, or solid. When the disilane or polysilane is a gas, the gas may be captured or dissolved in a solvent prior to introduction into the reactor. Alternatively, the gas disilane or polysilane may be bubbled into a tungsten (VI) halide/solvent mixture. When the disilane or polysilane is a solid, a solvent capable of dissolving or suspending the disilane or polysilane may also be used. The disilane or polysilane and any solvents should be anhydrous and preferably contain between approximately zero ppmv and approximately 100 ppmv moisture to prevent the formation of oxygenated species, such as tungsten oxides or oxyhalides. The pressure in the reactor preferably remains around atmospheric pressure for safety and cost reasons. However, one of ordinary skill in the art will recognize that the reaction may also be performed in a pressure reactor without deviating from the teachings herein.

[0256] Exemplary disilanes having the formula Si.sub.2R.sub.6, wherein each R is independently H, a C1-C4 hydrocarbyl group, or a halide, include Si.sub.2Me.sub.6, Si.sub.2HMe.sub.5, Si.sub.2H.sub.2Me.sub.4, Si.sub.2H.sub.3Me.sub.3, Si.sub.2H.sub.4Me.sub.2, Si.sub.2Me.sub.5Cl, Si.sub.2Me.sub.5Br, Si.sub.2HMe.sub.4Cl (Me.sub.2HSiSiMe.sub.2Cl), Si.sub.2HMe.sub.4Br (Me.sub.2HSiSiMe.sub.2Br), Si.sub.2Me.sub.4CH.sub.2Cl, Si.sub.2H.sub.6, Si.sub.2Cl.sub.2Me.sub.4, Si.sub.2Br.sub.2Me.sub.4, Si.sub.2Cl.sub.3Me.sub.3, Si.sub.2Br.sub.3Me, Si.sub.2Et.sub.6, Si.sub.2MeEt.sub.5, Si.sub.2Me.sub.5Et.sub.5, Si.sub.2H.sub.2Me.sub.2Et.sub.2 (Me.sub.2HSiSiHEt.sub.2), Si.sub.2H.sub.2Me.sub.3.sup.iPr (Me.sub.2HSiSiHMe.sup.iPr), Si.sub.2HMe.sub.4.sup.iPr (Me.sub.2HSiSiMe.sub.2.sup.iPr), Si.sub.2Me.sub.5.sup.iPr, Si.sub.2H.sub.2Me.sub.2.sup.iPr.sub.2, Si.sub.2Me.sub.3.sup.iPr.sub.3, Si.sub.2Me.sub.4.sup.iPr.sub.2, Si.sub.2HMe.sub.2.sup.iPr.sub.3 (Me.sub.3SiSiH.sup.iPr.sub.3), Si.sub.2HMe.sub.2.sup.iPr.sub.3 (Me.sub.2HSiSi.sup.iPr.sub.3), Si.sub.2H.sub.2.sup.iPr.sub.4 (.sup.iPr.sub.2HSiSiH.sup.iPr.sub.2), Si.sub.2HMeEt.sup.iPr.sub.3 (MeEtHSiSi.sup.iPr.sub.3), Si.sub.2H.sub.2Me.sub.2Pr.sub.2, MeHSi(CH.sub.2).sub.nSiHMe (n=1-4), and combinations thereof.

[0257] Exemplary polysilanes having the formula Si.sub.nR.sub.2n+2 or Si.sub.nR.sub.2n, wherein each R is independently H, a C1-C4 hydrocarbyl group, or a halide, and n=3-8, include trisilane Si.sub.3R.sub.8, tetrasilane Si.sub.4R.sub.10, pentasilane Si.sub.5R.sub.12, and cyclosilanes with the formula Si.sub.nR.sub.2n, such as Si.sub.3Me.sub.8 (Me.sub.3Si-Me.sub.2SiSiMe.sub.3), Si.sub.3H.sub.2Me.sub.6 (Me.sub.2HSi-Me.sub.2SiSiHMe.sub.2; Me.sub.3Si-Me.sub.2SiSiH.sub.2Me), Si.sub.3H.sub.3Me.sub.5 (Me.sub.3Si-Me.sub.2SiSiH.sub.3), Si.sub.3H.sub.3Me.sub.4Cl (ClMe.sub.2Si-Me.sub.2SiSiH.sub.3), Si.sub.4Me.sub.10 (Me.sub.3Si-Me.sub.2SiSiMe.sub.2-SiMe.sub.3), Si.sub.4H.sub.6Me.sub.10 (H.sub.3Si-Me.sub.2SiSiMe.sub.2-SiH.sub.3), Si.sub.5Me.sub.12, Si.sub.5H.sub.2Me.sub.4, Si.sub.3H.sub.2Me.sub.4 (1,1,2,2-tetramethyl-cyclotrisilane), Si.sub.6Me.sub.12 (dodecamethyl-cyclohexasilane), and combinations thereof.

[0258] A solvent may also be used in the disilane reaction. For example, the tungsten hexahalide and a solvent may be added to a reactor to form a suspension and the disilane or polysilane added to the suspension. Alternatively, the disilane or polysilane may be dissolved or suspended in the same or a different solvent. In another alternative, a solvent may be used with both the tungsten hexahalide and the disilane or polysilane. The solvent may be the same as or different from the halosilane by-product. Suitable solvents include: [0259] i) halo-silanes: R.sub.3SiX, R.sub.2SiX.sub.2, RSiX.sub.3, SiX.sub.4, wherein each R independently=C1-C4 alkyl or hydrogen and X=Cl and Br. Exemplary halo-silane solvents include, but are not limited to, Me.sub.2SiHCl, Me.sub.3SiCl, Me.sub.2EtSiCl, Et.sub.2MeSiCl, Et.sub.3SiCl, Me.sub.2PrSiCl, Me.sub.2SiHBr, Me.sub.3SiBr, Me.sub.2EtSiBr, Et.sub.2MeSiBr, Et.sub.3SiBr, Me.sub.2PrSiBr, Me.sub.2SiCl.sub.2, MeEtSiCl.sub.2, Et.sub.2SiCl.sub.2, Me.sub.2SiBr.sub.2, MeEtSiBr.sub.2, Et.sub.2SiBr.sub.2, MeSiCl.sub.3, EtSiCl.sub.3, iPrSiCl.sub.3, MeSiBr.sub.3, EtSiBr.sub.3, PrSiBr.sub.3, SiCl.sub.4, SiBr.sub.4, and combinations thereof; [0260] ii) halo-alkanes: RX, with R>C3 and X=F; Cl, Br, I. Exemplary halo-alkane solvents include, but are not limited to, C.sub.4H.sub.9X, C.sub.5H.sub.11X, C.sub.7H.sub.13X, and combinations thereof; [0261] iii) halo-cycloalkane: RX, with R>C5 and X=F; Cl, Br, I. Exemplary halo-cycloalkane solvents include, but are not limited to, C.sub.5H.sub.9X, C.sub.6H.sub.11X, C.sub.7H.sub.13X, and combinations thereof; [0262] iv) RX.sub.2, with R>C1 and X=F; C, Br, I. Exemplary RX.sub.2 solvents include, but are not limited to, CH.sub.2Cl.sub.2, CH.sub.2ClBr, CH.sub.2ClI, C.sub.2H.sub.4Cl.sub.2, C.sub.2H.sub.4ClF, and combinations thereof; [0263] v) RX.sub.n, with R>C1, X=F, C, Br, I, and n=3 or 4. Exemplary RX.sub.n solvents include, but are not limited to, CHCl.sub.3, CHClF.sub.2, CHCl.sub.2F, CClF.sub.3, and combinations thereof; [0264] vi) halo-arene: (ArX, with Ar=phenyl or substituted phenyl ring with a formula as R.sub.5Ph-X, each R may be independently H, C1-C4 alkyl, or halide (F, Cl, Br, I), and X=F, C, Br, I. Exemplary halo-arene solvents include, but are not limited to, Me-C.sub.6H.sub.5X, C.sub.6H.sub.4X.sub.2, and combinations thereof; [0265] vii) or any combinations thereof.
Preferably, the X halide in the solvent is the same as the X halide in the reactants and products, but one of ordinary skill in the art will recognize that any CX bond is very strong and will not break and contaminate the reactants or products. As a result, the X halide in any CX containing solvents may differ from the X halide in the reactants and products.

[0266] A halide X from WX.sub.6 cleaves the SiSi bond of the disilane or polysilane to produce a halosilane by-product. The halosilane by-product from the disilane or linear polysilane reactants is R.sub.3SiX, wherein each R is independently H, a C1-C4 hydrocarbyl group, or a halide, and X is from the WX.sub.6 reactant. Exemplary R.sub.3SiX halosilane by-products include, but are not limited to, Me.sub.3SiCl, Me.sub.3SiBr, Et.sub.3SiCl, Et.sub.3SiBr, iPr.sub.3SiCl, iPr.sub.3SiBr, Me.sub.2SiHCl, or Me.sub.2SiHBr. The halosilane by-product from linear or cyclic polysilanes is R.sub.2SiX.sub.2, wherein each R is independently H, a C1-C4 hydrocarbyl group, or a halide. Exemplary R.sub.2SiX.sub.2 halosilane by-products include, but are not limited to Me.sub.2SiCl.sub.2, Me.sub.2SiBr.sub.2, Et.sub.2SiCl.sub.2, Et.sub.2SiBr.sub.2, iPr.sub.2SiCl.sub.2, iPr.sub.2SiBr.sub.2, MeSiHCl.sub.2, or MeSiHBr.sub.2. The halosilane by-products from polysilane reactants may include both R.sub.3SiX and R.sub.2SiX.sub.2.

[0267] The halosilane by-product may also be used as a solvent for the synthesis process. The Me.sub.3SiX halosilane by-products have a low boiling point, making subsequent removal easy (i.e., 57 C. for Me.sub.3SiCl and 79 C. for Me.sub.3SiBr).

[0268] Applicants have surprisingly discovered that the halosilane by-product may help lower the amount of impurities in the final WCl.sub.5 product. The halosilane by-product is water reactive and acts as a self-drying solvent, which keeps the reaction media moisture free. In addition, the halosilane by-product reacts and removes any tungsten oxyhalides. Applicants further believe that the Me.sub.3SiX halosilane by-product may scavenge some of the elemental impurities. As shown in the Examples that follow, the disilane reaction produces higher purity WX.sub.5 products than the olefin reaction.

[0269] The mixture is stirred for approximately 10 min to approximately 48 hours at a temperature range of approximately 10 C. to approximately the boiling point of the halosilane by-product, preferably from approximately 10 C. to approximately 50 C., and more preferably at approximately room temperature. The reaction mixture is stirred using a stirrer and at a speed sufficient to maintain any solid reactant or product in suspension. For larger batches, a double bladed stirrer may be required to maintain the solid reactants in suspension. The mixture produced comprises tungsten (IV) halide, tungsten (V) halide, unreacted Tungsten (VI) halide, all suspended in the halosilane by-product in liquid form, and possible impurities.

[0270] The concentration of the disilane or polysilane in the halosilane by-product may be monitored to monitor progress of the reaction. The reaction is complete when all of the disilane or polysilane reactant is consumed.

[0271] When the disilane or polysilane and halosilane by-product are both liquids, such as Si.sub.2Me.sub.6 and Me.sub.3SiX, the process does not require the use of a solvent. More particularly, WX.sub.5 may be synthesized without the use of any hydrocarbons or chloroalkanes, further minimizing potential sources of contaminants or additional hazardous materials, like volatile organic compounds or carcinogens.

[0272] After reaction, the reaction product may be isolated from the mixture by evaporating the halosilane by-product. The mixture may be stirred in vacuo. The mixture may also be warmed to temperatures ranging from approximately 30 C. to below the melting point of the tungsten chlorides. In another alternative, the mixture may be stirred in vacuo and warmed. The resulting solid product is a mixture of the WCl.sub.5 with any unreacted WCl.sub.6 and overreacted WCl.sub.4.

[0273] Alternatively, the reaction mixture may be filtered to remove the halosilane by-products and impurities. Typical filters include glass or polymer frit filters. Larger scale filtering processes use polymer filter bags, such as those sold by Rosedale Products, Inc. or Pall Corp. Tungsten (V) halide may then be purified by successive washings with a rinse solvent and dried by vacuo. The halosilane by-product may be used as the rinse solvent. Once again, the rinse solvent must be dry (anhydrous) in order to prevent the formation of oxygenated species, such as tungsten oxides or oxyhalides. The rinse solvent may contain between approximately zero ppm and approximately 100 ppm moisture. Preferably, the rinse solvent contains between approximately zero ppm and approximately 10 ppm moisture.

[0274] In another alternative, the reaction mixture may be filtered to remove the halosilane by-product and impurities and rinsed, as above, followed by vacuum evaporation of any remaining volatiles components.

[0275] Applicants have surprisingly discovered that the silane reaction produces a high quantity of WX.sub.5 in the isolated WX.sub.5-containing composition. More particularly, the isolated WX.sub.5-containing composition comprises between approximately 85% w/w to approximately 100% w/w WX.sub.5, preferably between approximately 90% w/w and approximately 100% w/w WX.sub.5, and more preferably between approximately 95% w/w and approximately 100% WX.sub.5. This is surprising because Traven et al. disclose a similar process that quickly converts WCl.sub.6 to WCl.sub.4. Izvestiya Akademii Nauk SSR, Seriya Khimicheskaya (1975) 7, p. 1681 (32% conversion after 5 minutes). One of ordinary skill in the art having Traven et al. before them would not expect the change in stoichiometry and solvent to produce high yields of the 1.sup.st reduction product, WX.sub.5.

[0276] The Tungsten (V) halide reaction product from either synthesis process may be further purified by sublimation under reduced pressure at temperatures below the melting point of the desired product. For example, WCl.sub.5 may be purified by sublimation under vacuum at temperatures below approximately 248 C., and more preferably below approximately 220 C. Unreacted Tungsten (VI) halide, over-reduced tungsten (IV) halide, and other impurities may be removed by sublimation.

[0277] The purified Tungsten (V) halide has a purity ranging from approximately 96% mol/mol to approximately 100% mol/mol, preferably from approximately 98% mol/mol to approximately 100% mol/mol. The purified Tungsten (V) halide preferably has between the detection limit and 100 ppb of each potential metal contaminant (e.g., at least Al, Ca, Cr, Cu, Fe, Mg, Ni, K, Na, Ti, Zn, etc.). Suitable sublimation methods include fractional sublimation. The fractional sublimation may be performed at high temperatures and sub-atmospheric pressure.

[0278] As shown in the following Examples, Applicants have surprisingly discovered that the impurity profile from the disilane synthesis is very low. More particularly, prior to sublimation, the WCl.sub.5 reaction product contains less than 150 ppbw of Al, Ca, and TI; less than 1000 ppbw of Li, Mn, and Zn; less than 10,000 ppbw Cr, Mo, and Na; and less than 20,000 ppbw Fe. Sublimation further reduces the impurities to less than 150 ppbw for Al, Ca, Cr, Fe, Li, Mn, Na, Tl, and Zn and less than 200 ppbw Mo.

[0279] In contrast, even after sublimation, the amount of Cr, Fe, Mo, Na, and Zn remaining in the WCl.sub.5 produced by the olefin method remains between approximately 100 ppbw to approximately 6000 ppbw.

[0280] One of ordinary skill in the art will recognize the sources for the components of the systems used to practice the disclosed methods. Preferably the components are made of corrosion resistant materials, including but not limited to glass, glass or polymer coated stainless steel, fluoropolymers such as perfluoroalkoxy alkane (PFA) and polytetrafluoroethylene (PTFE), etc.

[0281] The product may be analyzed by Ultraviolet-Visible (UV-VIS) spectroscopy, Fourier Transform InfraRed (FTIR) spectroscopy, ThermoGravimetric Analysis-Differential Thermal Analysis (TGA-DTA), Differential Scanning Calorimetry (DSC), X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), elemental analysis, and other analytical technique

[0282] In the examples that follow, the purity of the WX.sub.5-containing composition was determined using TGA-DTA. One of ordinary skill in the art will recognize that TGA is just one of many analysis techniques that may be utilized to determine purity.

[0283] Applicants have further determined that aluminum pans are not suitable for TGA analysis of the WX.sub.5-containing composition. Instead, alumina pans were used for all TGA analysis (i.e., alumina=aluminum oxide).

[0284] TGA is a thermal analysis technique which measures the amount and rate of change in the weight of a material as a function of temperature or time in a controlled atmosphere. DTA measures the temperature differences between a sample and inert reference undergoing identical thermal cycles. DSC is similar to DTA and measures the difference in the amount of heat required to increase the temperature of a sample and a reference as a function of temperature. These thermal analytical techniques may identify characteristic melting and sublimation points, phase transitions and decompositions. TGA measurements are also used to predict thermal stability up to elevated temperatures and to determine the composition of materials by studying the loss of solvents and/or volatile compounds for example; species or impurities contained in the sample are released during the weight loss event in the TGA. TGA curves may also show the presence of impurities.

[0285] FIG. 2 is a TGA plot illustrating the percentage of weight loss upon temperature increase of WCl.sub.4, WCl.sub.5, and a controlled mixture of the two. As shown in FIG. 2, the presence of WCl.sub.4 in WCl.sub.5 caused a step feature ranging from approximately 250 C. to approximately 390 C. and an increase in the total amount of residue. The differences in the TGA curves may be quantified by weight loss measurements, comparison with mass loss of pure standards (e.g. WCl.sub.4, WCl.sub.6), or using TGA derivatives. Derivative TGA curves are useful to distinguish overlapped mass loss events, to identify a trend and maximum rate of mass loss processes, and also to identify a small mass loss steps. Thus, application of first (DTG), second (2DTG), and third (3DTG) derivatives of the TGA curves allows monitoring and identification of small amounts of impurities in tungsten halides producing strongly overlapped features on the TGA curves. Using this simple and rapid technique, data from TGA/DTA can be used to identify qualitatively and to determine quantitatively the amount of common impurities in tungsten chlorides including but not limited to WCl.sub.4, WCl.sub.5, and WCl.sub.6.

[0286] The weight loss measurement in the region specific to the impurity may be quantified. The size and position of any feature (dip or step) on the TGA trace due to the presence of the impurity maybe measured and correlated to the amount of the impurity (%) in the sample. The weight loss for analyzed samples may be compared with that of a standard (e.g. pure WCl.sub.4, WCl.sub.5), and the concentration of WCl.sub.4, WCl.sub.6, and other impurities established by application of any available mathematical method.

[0287] FIG. 1 is a diagram of an exemplary system suitable to perform the disclosed methods. One of ordinary skill in the art will recognize that additional components may be included without departing from the teachings herein. More particularly, the reactor 10 may include any monitors needed to monitor the reaction, such as pressure, temperature, etc. Air may be removed from various parts of the system (e.g., reactor 10) by an inert gas 2, such as nitrogen, argon, etc. The inert gas 2 may also serve to pressurize the solvent stored in vessel 5, rinse solvent stored in vessel 3, and/or olefin or disilane stored in vessel 4 to permit its delivery to reactor 10. One of ordinary skill in the art will recognize that only vessel 3 or 5 will be needed when the solvent and rinse solvent are the same.

[0288] The reactor 10 is maintained at the desired temperature by a jacket 11. The jacket 11 has an inlet 21 and an outlet 22. Inlet 21 and outlet 22 may be connected to a heat exchanger/chiller 23 and/or pump (not shown) to provide recirculation of the cooling fluid. Nitrogen, refrigerated ethanol, an acetone/dry ice mixture, silicone oils, or other heat transfer agents such as monoethylene glycol (MEG) may be used to cool various parts of the system (e.g., jacket 11). The cooling medium (not shown) in jacket 11 may also be replaced by a heating medium (not shown) when needed, for example, to evaporate the solvent and isolate the reaction product. One of ordinary skill in the art will recognize that replacement of the cooling medium will not be necessary if the cooling medium is also capable of acting as a heating medium (e.g., MEG). Instead, the temperature of the medium may be changed via, for example, heat exchanger. The temperature is monitored with a probe 29.

[0289] One of ordinary skill in the art will recognize that the jacket 11 may not require inlet 21 and outlet 22 If the batch size is small enough and the mixing time short enough because the thermal fluid may maintain its temperature for the duration of the reaction. Alternatively, the jacket 11 may not be required if the batch size is small enough and the mixing time long enough because heat may be vented to the atmospheric environment during the reaction. In another alternative, the temperature of the reactor 10 may be maintained using a cold finger, cooling foil, or other temperature control mechanisms in addition to or replacing the jacket 11.

[0290] The reactants (solvent stored in vessel 5, Tungsten (VI) halide stored in vessel 1, and olefin/disilane stored in vessel 4) are added to reactor 10 via lines 6, 7, and 8, respectively. One of ordinary skill in the art will recognize that solid reactants may alternatively be added to the reactor 10 using addition funnels or other solid movement tools. One of ordinary skill in the art will further recognize that lines 6, 7, and/or 8 may further comprise additional equipment that adds the reactants and/or solvents to the vessel 10 in a controllable manner, such as gauges, glass addition funnels, calibrated follow meters, piston metering pumps, etc.

[0291] The reactants may be mixed in the reactor by an agitator 12 turned by motor 13 to form mixture 14. The mixing is performed under an inert atmosphere at approximately atmospheric pressure. After suitable mixing, the mixture 14 may be stirred in vacuo to remove the volatiles which are trapped in cold trap 27 connected to a vacuum pump 28. Once the volatiles are evaporated, the solid products may be removed from the reactor 10 under inert atmosphere prior to performance of the next process steps.

[0292] Instead of evaporation in vacuo, the mixture 14 may be removed from reactor 10 via drain 15 through a container 18 connected to a filter 17. In this embodiment, reactor 10 will most likely be located above filter 17 to best use the benefits of gravity. The inert gas 2 may be used to help move the mixture 14 into the drain 15. Alternatively, the mixture 14 may be removed from the reactor 10 using any slurry movement tools, such as a slurry pump (not shown), to move the mixture 14 into the filter 17. As the tungsten halide (not shown) is suspended in the mixture 14, clogging of the reactor 10 is not a problem. The rinse solvent stored in vessel 3 can be added to the reactor 10 via line 9 after the filtration process in order to remove residual products, by-products, and/or impurities.

[0293] The solid product will be collected in container 16, such as a glass bottle, and transported to a new location prior to performance of the next process steps. Alternatively, the mixture may immediately be directed to a pot 19, without passing though the filter 17.

[0294] Once again, vessel 18 may be transported to a new location prior to performance of the next process steps. The product may be transferred from vessel 18 to a sublimator (not shown) for further purification.

[0295] One of ordinary skill in the art will recognize that the exemplary system may include many additional elements that are not described in order to provide a simplified view of the system. For example, one of ordinary skill in the art will recognize that the gases may be introduced into the reactor through a pressure valve and mass flow controller. Additionally, one of ordinary skill in the art will recognize that additional valves, pumps, and flow controllers may be located at various other locations without departing from the teachings herein.

EXAMPLES

[0296] The following non-limiting examples are provided to further illustrate embodiments of the invention. However, the examples are not intended to be all inclusive and are not intended to limit the scope of the inventions described herein.

Example 1. Synthesis of Tungsten Pentachloride from Hexamethyldisilane

[0297] 4900 g WCl.sub.6 and 12 kg of trimethylsilyl chloride (TMS-Cl) were charged into a 22 L reactor and the mixture was stirred at 150 rpm. With external cooling, hexamethyldisilane (HMDS) 870 g was added slowly over a period of 3.5 hrs, during which the reaction mixture temperature increased from room temperature to about 50 C. The mixture was stirred for another 1.5 hrs to allow cooling below 35 C. The mixture was then filtered and the collected solid was washed with 3 Kg of TMS-Cl, followed by solvent removal and drying under vacuum. The solid WCl.sub.5 product was purified using sublimation.

[0298] The purity of the reaction product was assessed by thermogravimetric analysis (TGA). A typical pure tungsten (V) pentachloride displays a smooth evaporation with a step feature of 1-2% and a residue of <1%. An increase of the step feature indicates an overreduction to tungsten (IV) tetrachloride. The absence of the step shows the presence of unreacted tungsten (VI) hexachloride. A right shift of the overall evaporation curve can also be associated with the presence of tungsten (VI) hexachloride at high levels.

[0299] FIG. 3 is the ThermoGravimetric Analysis/Differential Thermal Analysis (TGA/DTA) plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product before sublimation. The amount of residue of the step (4%) shows the presence of overreduced tungsten (IV) tetrachloride. The step shows that there is little to no tungsten (VI) hexachloride. As a result, approximately 96% WCl.sub.5 was formed by this reaction.

[0300] FIG. 4 is a TGA/DTA plot illustrating the percentage of weight loss (TGA) or the differential temperature (DTA) upon temperature increase of the WCl.sub.5 product after sublimation. The amount of residue of the step (1.2%) shows that the overreduced tungsten (IV) tetrachloride has been significantly reduced by sublimation. As a result, approximately 99% WCl.sub.5 was obtained after sublimation.

[0301] Sublimation of the reaction product may be used to further purify the WCl.sub.5 product.

Example 2. Impurity Profile from Disilane Reaction

[0302] WCl.sub.5 samples were obtained from Example 1 before and after sublimation. The hydrolyzed WCl.sub.5 samples were directly injected for ionization in a nebulizer in an Inductively Coupled Plasma Mass Spectrometer (ICP-MS). The results were as follows:

TABLE-US-00001 Metals (in ppbw) Pre-sublimation Post sublimation Al 100 ND Sb ND ND As ND ND Ba ND ND Be ND ND Cd ND ND Ca 64 ND Cr 2500 ND Co ND ND Cu ND ND Ga ND ND Ge ND ND In ND ND Fe 18000 ND Pb ND ND Li 240 ND Mg 87 ND Mn 720 ND Mo 2200 190 Ni ND ND Nb ND ND K ND ND Ag ND ND Na 1300 ND Sr ND ND Tl 56 ND Sn ND ND Ti ND ND V ND ND Zn 220 ND Zr ND ND ND = None detected, Detector limit is below 50 ppbw.

Example 3

[0303] Additional WCl.sub.5 products were obtained from the disilane reactions after sublimation. The hydrolyzed WCl.sub.5 samples were directly injected for ionization in a nebulizer in an ICP-MS. The results were as follows:

TABLE-US-00002 Metals (in Batch Batch Batch Batch Batch Batch Batch Batch Batch ppbw) 1 2 3 4 5 6 7 8 9 Al ND ND ND ND ND 130 63 ND ND Sb ND ND ND ND ND ND ND ND ND As ND ND ND ND ND ND ND ND ND Ba ND ND ND ND ND ND ND ND ND Be ND ND ND ND ND ND ND ND ND Cd ND ND ND ND ND ND ND ND ND Ca ND ND ND ND ND ND ND ND ND Cr ND 51 ND ND ND ND ND ND ND Co ND ND ND ND ND ND ND ND ND Cu ND ND ND ND ND ND ND ND ND Ga ND ND ND ND ND ND ND ND ND Ge ND ND ND ND ND ND ND ND ND In ND ND ND ND ND ND ND ND ND Fe ND 120 ND ND ND ND ND ND 71 Pb ND ND ND ND ND ND ND ND ND Li ND ND ND ND ND 78 ND ND ND Mg ND ND ND ND ND ND ND ND ND Mn ND ND ND ND ND ND ND ND ND Mo 190 ND 120 130 ND 75 130 140 96 Ni ND ND ND ND ND ND ND ND ND Nb ND ND ND ND ND ND ND ND ND K ND ND ND ND ND ND ND ND ND Ag ND ND ND ND ND ND ND ND ND Na ND ND ND ND ND ND ND ND ND Sr ND ND ND ND ND ND ND ND ND Tl ND ND ND 78 ND ND 51 ND ND Sn ND ND ND ND ND ND ND ND ND Ti ND ND ND ND ND ND ND ND ND V ND ND ND ND ND ND ND ND ND Zn ND ND ND ND ND ND ND ND ND Zr ND ND ND ND ND ND ND ND ND ND = None detected, Detector limit is below 50 ppbw.

Example 4. Synthesis of Tungsten Pentachloride in 1-Chlorobutane with Stoichiometric Amounts of Cis/Trans-2-Pentene

[0304] Under an inert atmosphere, a reaction flask is charged with tungsten (VI) hexachlode (2.48 g; 0.007 mol). 1-chlorobutane (20 mL; 17.5 g; 0.189 mol) and cis/trans-2-pentene (0.46 g; 0.007 mol) are added to the reaction flask. The reaction mixture is stirred under inert atmosphere for 3 hours. The reaction may stop upon exhaustion of the cis/trans-2-pentene reactant but was stopped in this example by removing all volatiles under vacuum.

[0305] FIG. 5 is a TGA/DTA plot of the product of Example 4. The amount of residue of the step (4%) shows the presence of overreduced tungsten (IV) tetrachloride. These results demonstrate a smaller step as compared to those in the following comparative examples, showing the improved purity of crude tungsten (V) pentachloride using a stoichiometric amount of reactants and an aliphatic halohydrocarbon solvent. Sublimation of the reaction product may be used to further purify the WCl.sub.5 product.

Example 5. Synthesis of Tungsten Pentachloride in Dichloromethane with Close to Stoichiometric Amounts of Cis/Trans Pentene

[0306] Under inert atmosphere, a reaction flask is charged with tungsten (VI) hexachloride (9.9 g; 0.025 mol). Anhydrous CH.sub.2Cl.sub.2 (80 mL; 105 g; 1.5 mol) and cis/trans-2-pentene (1.84 g; 0.026 mol) are added to the reaction flask. The reaction mixture is stirred under inert atmosphere for 30 minutes. The reaction is stopped by removal of all volatiles under vacuum.

[0307] FIG. 6 is a TGA/DTA plot of the product of Example 5. The amount of residue of the step (6%) shows the presence of over-reduced tungsten (IV) tetrachloride.

Example 6. Olefin Synthesis Impurity Profile

[0308] WCl.sub.5 samples were obtained from Example 5 after sublimation. The hydrolyzed WCl.sub.5 samples were directly injected for ionization in a nebulizer in an ICP-MS. The results were as follows:

TABLE-US-00003 Metals Batch Batch Batch Batch Batch Batch Batch (in ppbw) 1 2 3 4 5 6 7 Al 1000 ND 210 ND ND 150 100 Sb ND ND ND ND ND ND ND As ND ND ND 270 110 ND ND Ba ND ND ND ND ND ND ND Be ND ND ND ND ND ND ND Cd ND ND ND ND ND ND ND Ca 160 ND 1800 ND ND 380 220 Cr 210 ND ND ND ND ND ND Co ND ND ND ND ND ND ND Cu ND ND ND ND ND ND ND Ga ND ND ND ND ND ND ND Ge ND ND ND ND ND ND ND In ND ND ND ND ND ND ND Fe 5100 2000 1500 ND ND 380 150 Pb ND ND ND ND ND ND 230 Li ND ND ND ND ND ND ND Mg 260 ND ND ND ND ND ND Mn ND ND ND ND ND ND ND Mo ND ND ND ND ND ND ND Ni 200 ND ND ND ND ND ND Nb 180 210 ND ND ND ND ND K 310 ND ND 1100 970 78 97 Ag ND ND ND ND ND ND ND Na 730 ND ND ND ND ND ND Sr ND ND ND 130 120 ND ND Tl ND 78 ND ND ND 91 74 Sn ND ND ND ND ND ND ND Ti ND ND ND ND ND ND ND V 61 ND ND ND ND ND ND Zn ND ND ND ND ND 3500 ND Zr ND ND ND ND ND ND ND ND = None detected, Detector limit is below 50 ppbw.
As can be seen from the comparison of Examples 2, 3, and 6, the WCl.sub.5 disilane synthesis produces significantly less impurities than the WCl.sub.5 olefin synthesis.

Comparative Example 1. Synthesis of Tungsten Pentachloride in Pentane with Excess of Cis/Trans Pentene

[0309] Under inert atmosphere, a reaction flask is charged with tungsten (VI) hexachloride (4.96 g; 0.013 mol). Anhydrous pentane (40 mL; 25 g; 0.35 mol) and cis/trans-2-pentene (2.10 g; 0.030 mol) are added to the reaction flask. The reaction mixture is stirred under inert atmosphere for 15 hours. The reaction is stopped by removal of all volatiles under vacuum.

[0310] FIG. 7 is a TGA/DTA plot of the product of Comparative Example 1. The absence of the step shows the presence of unreacted tungsten (VI) hexachloride along with a non-smooth evaporation seen by the right shift at the bottom half of the curve. This comparative example demonstrates that the aliphatic halohydrocarbon of Examples 1 and 2 yields a larger quantity of the desired product than reactions using hydrocarbons.

Comparative Example 2. Synthesis of Tungsten Pentachloride in Dichloromethane with Excess of Cis/Trans Pentene

[0311] Under inert atmosphere, a reaction flask is charged with tungsten (VI) hexachloride (9.9 g; 0.025 mol). Anhydrous CH.sub.2Cl.sub.2 (80 mL; 105 g; 1.5 mol) and cis/trans-2-pentene (17.5 g; 0.25 mol) are added to the reaction flask. The reaction mixture is stirred under inert atmosphere for 30 minutes. The reaction is stopped by removal of all volatiles under vacuum.

[0312] FIG. 8 is a TGA/DTA plot of the product of Comparative Example 2. The increased presence of the step (36%) shows the presence of over-reduced tungsten (IV) tetrachloride along with an increased residue. This comparative example demonstrates that a stoichiometric excess of olefin rapidly drives the reaction past the desired WCl.sub.5 product to the lower oxidation state WCl.sub.4.

[0313] While embodiments of this invention have been shown and described, modifications thereof may be made by one skilled in the art without departing from the spirit or teaching of this invention. The embodiments described herein are exemplary only and not limiting. Many variations and modifications of the composition and method are possible and within the scope of the invention. Accordingly the scope of protection is not limited to the embodiments described herein, but is only limited by the claims which follow, the scope of which shall include all equivalents of the subject matter of the claims.