Sonic sensors and packages

Abstract

Embodiments relate to integrated sonic sensors having a transmitter, a receiver and driver electronics integrated in a single, functional package. In one embodiment, a piezoelectric signal transmitter, a silicon microphone receiver and a controller/amplifier chip are concomitantly integrated in a semiconductor housing. The semiconductor housing, in embodiments, is functional in that at least a portion of the housing can comprise the piezoelectric element of the transmitter, with an inlet aperture opposite the silicon microphone receiver.

Claims

1. A semiconductor chip package comprising: a controller; a semiconductor microphone; and a housing for at least one semiconductor chip, wherein at least a portion of an outer cover portion of the housing is configured as a sound generator to generate and transmit sound waves based on electrical signals provided by an integrated circuit of the at least one semiconductor chip, without the sound waves passing through an aperture in the housing, wherein the sound generator and the controller are intergrated in a single semiconductor chip, which is intergrated in the housing with the semiconductor microphone.

2. The semiconductor chip package of claim 1, wherein the housing further includes a sound inlet portion configured to transmit sound from external to the semiconductor chip package to the semiconductor microphone provided within the semiconductor chip package.

3. The semiconductor chip package of claim 1, wherein the sound generator functions as a membrane.

4. The semiconductor chip package of claim 1, wherein the sound generator is a piezoelectric layer.

5. The semiconductor chip package of claim 2, wherein the semiconductor microphone is a microelectromechanical system (MEMS) microphone.

6. The semiconductor chip package of claim 2, wherein the sound generator, the semiconductor microphone, and the controller are separate devices.

7. A semiconductor chip package, comprising: a controller; a semiconductor microphone; and a housing for at least one semiconductor chip, wherein at least a portion of the housing is configured as a sound generator to generate and transmit sound waves based on electrical signals provided by an integrated circuit of the at least one semiconductor chip, without the sound waves passing through an aperture in the housing, wherein the housing further includes a sound inlet portion configured to transmit sound from external to the semiconductor package to the semiconductor microphone provided within the semiconductor chip package, wherein the sound generator, the semiconductor microphone, and the controller are concomitantly integrated in a single semiconductor chip, which is integrated in the housing.

8. The semiconductor chip package of claim 1, further comprising: a receiver, wherein the housing comprises the sound generator and the receiver.

9. The semiconductor chip package of claim 1, further comprising: a receiver comprised within the outer cover portion of the housing.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The invention may be more completely understood in consideration of the following detailed description of various embodiments of the invention in connection with the accompanying drawings, in which:

(2) FIG. 1 is a diagram of a sensor system according to an embodiment.

(3) FIG. 2 is a diagram of a cover of a package of a sensor system according to an embodiment.

(4) FIG. 3 is a diagram of a sensor system according to an embodiment.

(5) While the invention is amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit the invention to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

DETAILED DESCRIPTION

(6) Embodiments relate to integrated ultrasonic sensors having a transmitter, a receiver and driver electronics integrated in a single, functional package. In one embodiment, a piezoelectric signal transmitter, a silicon microphone receiver and a controller/amplifier chip are concomitantly integrated in a semiconductor housing. In embodiments, the transmitter, receiver and controller can be integrated as three separate devices, or one or more of the devices can be integrated in a single chip. The semiconductor housing, in embodiments, is functional in that at least a portion of the housing can comprise the piezoelectric element of the transmitter, with an inlet aperture opposite the silicon microphone receiver.

(7) Referring to FIGS. 1 and 2, an integrated ultrasonic sensor system 100 is depicted. Sensor system 100 comprises a housing 102, a controller/amplifier chip 104, a piezoelectric signal transmitter 106 and a silicon microphone receiver 108 such as a microelectromechanical system (MEMS) microphone. In other embodiments, sensor system 100 can comprise a supersonic sensor system, a sonar sensor system, a radar sensor system or some other suitable sensor system. In embodiments, transmitter 106, receiver 108 and controller 104 can be integrated as separate devices, or in other embodiments one or more of the devices can be integrated in a single chip. For example, in one embodiment, transmitter 106 and controller 104 can be integrated in a single chip, and then integrated in housing 102 with receiver 108.

(8) In an embodiment, piezoelectric signal transmitter 106 comprises a cover portion 110 of housing 102. Cover portion 110 comprises an inlet aperture 112 arranged relative to silicon microphone receiver 108 and contacts 114, such as pins, pads or wires. The size, shape, configuration and/or placement of aperture 112 can vary in embodiments. For example, aperture 112 can be oblong or located in another position on cover portion 110, though in general aperture 112 is arranged relative to receiver 108 such that reflected signals can pass through aperture 112 to receiver 108. In embodiments, cover portion 110 can comprise a piezoelectric plastic foil, such as polyvinylidenfluorid (PVDF); ceramic, such as lead zirconate titanate (PZT); crystal; thin film; silicon; metal or some other suitable membrane material. To transfer the electric signal from chip 104 to cover portion 110, a contact can be provided between cover portion 110 and chip 104. The contact can be flexible, for example to address changes in the vertical distance between cover portion 110 and chip 104. The contact can comprise a zebra-flex, needle, spring, solder, wire or other suitable contact. In one embodiment, cover portion 110 comprises a metal and ceramic piezoelectric loudspeaker coupled to the remainder of housing 102, wherein a remainder of housing can comprise, for example, a dual small outline flat (DSOF) package.

(9) Cover portion 110, in cooperation with the other components of transmitter 108, emits ultrasonic or other sound signals. The emitted signals, such as signal pulses, can be reflected to system 100 by objects, passing through aperture 112 to be received by receiver 108. Receiver 108 and/or controller/amplifier chip 104, which can comprise an application-specific integrated circuit (ASIC) in an embodiment, can calculate a time of flight of the signal for distance determination relative to sensor system 100.

(10) The integration of transmitter 106 as the sonic generation element directly into cover portion 110 of a semiconductor chip package allows synergetic combination of the covering or protection function provided by cover portion 110 for the one or more semiconductor chips with the functionality of generating the sonic sound for operation of sensor system 100. In other words, the package not only provides the conventional coverage or protection but is further functionalized to provide additional functionality by being capable of producing sonic waves. This provides a miniaturized system by providing an integrated solution in which the package has the additional sonic generation function while also reducing manufacturing costs because no separate manufacturing steps are necessary and the housing together with the sonic generating element can be manufactured integrally. Cover portion 100 can for example include a multi-layer structure where one or more of the layers are sonic generating layers, for example piezoelectric layers, in embodiments.

(11) Another embodiment of a sensor system 200 is depicted in FIG. 3. Sensor system 200 comprises a housing 202, a controller/amplifier 204 such as an ASIC, a transmitter 206, a receiver 208, a cover portion 210 having an aperture 212, and contacts 214. In sensor system 200, housing 202 comprises two portions: a transmitter portion 216 and a receiver portion 218. Cover portion 210 also comprises two portions: a transmitter membrane portion 220 and a receiver portion 222. Transmitter membrane portion 220 and receiver portion 222 can comprise any of the materials and/or configurations discussed with respect to FIGS. 1 and 2. In one embodiment as depicted in FIG. 3, receiver portion 222 can comprise a metal lid that provides electrical shielding.

(12) Embodiments thus are related to miniaturized integrated sensor systems comprising microphones, ASICs and transmitters in a package, with a portion of the package being functional as part of the transmitter. Embodiments have applicability to vehicular and consumer applications, such as gaming, smart phone, tablet computer and other applications of distance/object detection. For example, the system can be implemented in a vehicle such as an automobile, a bicycle, an electric bicycle, a scooter, a SEGWAY, construction equipment and a boat, among others. The system can also be implemented in mobile/smart phone and handheld or console gaming systems, for example.

(13) Various embodiments of systems, devices and methods have been described herein. These embodiments are given only by way of example and are not intended to limit the scope of the invention. It should be appreciated, moreover, that the various features of the embodiments that have been described may be combined in various ways to produce numerous additional embodiments. Moreover, while various materials, dimensions, shapes, configurations and locations, etc. have been described for use with disclosed embodiments, others besides those disclosed may be utilized without exceeding the scope of the invention.

(14) Persons of ordinary skill in the relevant arts will recognize that the invention may comprise fewer features than illustrated in any individual embodiment described above. The embodiments described herein are not meant to be an exhaustive presentation of the ways in which the various features of the invention may be combined. Accordingly, the embodiments are not mutually exclusive combinations of features; rather, the invention may comprise a combination of different individual features selected from different individual embodiments, as understood by persons of ordinary skill in the art.

(15) Any incorporation by reference of documents above is limited such that no subject matter is incorporated that is contrary to the explicit disclosure herein. Any incorporation by reference of documents above is further limited such that no claims included in the documents are incorporated by reference herein. Any incorporation by reference of documents above is yet further limited such that any definitions provided in the documents are not incorporated by reference herein unless expressly included herein.

(16) For purposes of interpreting the claims for the present invention, it is expressly intended that the provisions of Section 112, sixth paragraph of 35 U.S.C. are not to be invoked unless the specific terms means for or step for are recited in a claim.