DEVICE AND COMPONENT FOR GENERATING A HIGH VOLTAGE OR HIGH FIELD STRENGTH

Abstract

An apparatus (100) for generating a high voltage or high field strength and a component (200) for generating a high voltage or high field strength are disclosed. A means (20) that is provided in a defined area (23) of the cylindrical and dielectric housing (11) or the sleeve (202) of the component (200). The means (20) ensures that, in a space (15) of the defined area (23), between the piezoelectric transformer (1) and an inner wall (14) of the dielectric housing (11), an essentially symmetrical field distribution (16) prevails. Even with an external influence (80), the field distribution (16) is influenced in such a way that an ignition field strength in space (15) of the defined area (23) is avoided.

Claims

1. A device (100) for generating a high voltage or high field strength, comprising: a piezoelectric transformer (1) with an input region (2) and an output region (3); a cylindrical, dielectric housing (11) surrounds the piezoelectric transformer (1) along its longitudinal direction (L); a contact (8) of a first side face (6) and a second side surface (7) of the input area (2) of the piezoelectric transformer (1) are connected via electrical lines (13); and a means (20) provided in a region (23) of the cylindrical and dielectric housing (11), starting from an output-side end face (10A) of the piezoelectric transformer (1), and which extends at least partially in the longitudinal direction (L) along the output region (3) and covering the output-side end face (10A) of the piezoelectric transformer (1), so that in a space (15) of the region (23) between the piezoelectric transformer (1) and an inner wall (14) of the dielectric housing (11) a substantially symmetrical field distribution (16) is maintained, even with an external influence (80), wherein a field distribution (16) is influenced in such a way that an ignition field strength in the space (15) of the area (23) is avoided.

2. The device (100) according to claim 1, wherein the means (20) is a cup-shaped cap (30) with a bottom (31) and a radially circumferential edge (32), wherein the bottom (31) covers the output-side end face (10A) of the piezoelectric transformer (1) and the radially circumferential edge (32) extends in the direction of the longitudinal axis (L) along the region (23).

3. The device (100) according to claim 2, wherein the cup-shaped cap (30) is mounted on an output-side end (17) of the cylindrical housing (11) such that the radially circumferential edge (32) of the cap (30), encloses the cylindrical housing (11) in the area (23) and the bottom (31) of the cap (30) is opposite the output-side end face (10A) of the piezoelectric transformer (1), and the cup-shaped cap (30) closes the output-side end (17) of the cylindrical housing (11).

4. The device (100) according to claim 3, wherein a further cap (40) is provided at an input-side end (18) of the cylindrical housing (11) such that a radially circumferential edge (42) of the further cap (40) encloses the cylindrical housing (11), and a bottom (41) of the further cap (40) is opposite an input side end face (10E) of the piezoelectric transformer (1), and the further cap (40) closes the input end (18) of the cylindrical housing (11).

5. The device (100) according to claim 1, wherein control electronics (12) are connected to the contact (8) of the first side face (6) and the second side surface (7) for supplying the piezoelectric transformer (1) with alternating voltage.

6. The device (100) according to claim 1, wherein the means (20) is a cup-shaped cap (30) and is provided at an output-side end (17) of the cylindrical housing (11) such that the radially circumferential edge (32) of the cap (30) is embedded in the dielectric material of the cylindrical housing (11) in the region (23), and the bottom (31) of the cap (30) is opposite the output-side end face (10A) of the piezoelectric transformer (1), and the cup-shaped cap (30) closes the outlet end (17) of the cylindrical housing (11).

7. The device (100) according to claim 6, wherein the cylindrical housing (11) on an outer wall (19) has at least in the input region (2) a conductive cladding (19) which is at ground potential (35).

8. The device (100) according to claim 1, wherein the means (20) comprises the cup-shaped cap (30) and a plurality of capacitive elements (26) which are embedded in the material of the cylindrical housing (11) in the region (23), the cup-shaped cap (30) is attached to an output-side end (17) of the cylindrical housing (11), so that the radially circumferential edge (32) of the cap (30) is embedded in the dielectric material of the cylindrical housing (11) in the area (23) and the bottom (31) of the cap (30) is opposite the output-side end face (10A) of the piezoelectric transformer (1), and the cup-shaped cap (30) closes the output-side end (17) of the cylindrical housing (11).

9. The device (100) according to claim 8, wherein the cylindrical housing (11) on an outer wall (19) has at least in the input region (2) a conductive cladding (19) which is at ground potential (35).

10. The device (100) according to claim 1, wherein the means (20) comprises the cup-shaped cap (30) and a plurality of resistive and/or capacitive fillers (27) with which the material of the cylindrical housing (11) is filled in the area (23), wherein the cup-shaped cap (30) is provided at an outlet end (17) of the cylindrical housing (11), so that the radially circumferential edge (32) of the cap (30) is embedded in the dielectric material of the cylindrical housing (11) in the area (23) and the bottom (31) of the cap (30) is opposite to the output-side end face (10A), of the piezoelectric transformer (1), and the cup-shaped cap (30) closes the output-side end (17) of the cylindrical housing (11).

11. The device (100) according to claim 10, wherein the cylindrical housing (11) on an outer wall (19) has at least in the input region (2) a conductive cladding (19) which is at ground potential (35).

12. The device (100) according to claim 1, wherein the means (20) is the cup-shaped cap (30), which is attached to an output-side end (17) of the cylindrical housing (11) in such a way that the radially circumferential edge (32) of the cap (30) is embedded in the dielectric material of the cylindrical housing (11) in the region (23) and is designed to widen out starting from the bottom (30), and the bottom (31) of the cap (30) is coupled with the end face on the output side (10A) of the piezoelectric transformer (1) via a permanently elastic element (25), and the cup-shaped cap (30) closes the output end (17) of the cylindrical housing.

13. The device (100) according to claim 12, wherein the cylindrical housing (11) on an outer wall (19) has at least in the input region (2) a conductive cladding (19) which is at ground potential (35).

14. A device or component for generating a high voltage or high field strength comprises: a cylindrical sleeve made from dielectric material; a piezoelectric transformer, arranged concentrically in the axial direction in the sleeve; a cap which is attached to an output end of the sleeve in such a way that an output side end face of the piezoelectric transformer bears on the cap; a further cap which is attached to an input-side end of the sleeve in such a way that an input-side end face of the piezoelectric transformer bears on the further cap; and an elastic element, provided in the cap and the further cap, wherein in both of which the piezoelectric transformer is held.

15. The device or component according to claim 14, wherein in each case an electrical line of each contact of the piezoelectric transformer is guided through the dielectric sleeve of the component.

16. The device or component according to claim 14, wherein the dielectric sleeve has formed at the output side and the input side, a radially circumferential shoulder on which the cap and the further cap abuts and thus provides a defined positioning of the cap and the further cap on the dielectric sleeve.

17. The device or component according to claim 14, wherein at least one passage is formed in the dielectric sleeve, via which pressure, temperature or moisture compensation can be carried out.

18. The device or component according to claim 14, wherein a plasma is formed after the cap, which follows the output end of the sleeve and the output side end face of the piezoelectric transformer, outside of the cylindrical and dielectric sleeve.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In the following, exemplary embodiments are intended to explain the invention and its advantages with reference to the attached figures. The size relationships in the figures do not always correspond to the real size relationships, since some shapes are simplified, and other shapes are shown enlarged in relation to other elements for better illustration. Reference is made to the accompanying drawings in which:

[0043] FIG. 1 shows a prior art piezoelectric transformer in a perspective view;

[0044] FIG. 2 is a graphic representation of the formation of the high voltage on the output end face of the piezoelectric transformer;

[0045] FIG. 3 is a schematic representation of a conventional wiring of the piezoelectric transformer;

[0046] FIG. 4 is a schematic representation of the field distribution of the electric field caused by an external influence on the conventional arrangement of the piezoelectric transformer in a housing;

[0047] FIG. 5 is a schematic representation of the field distribution of the electric field caused by an external influence on the inventive arrangement of the piezoelectric transformer in a housing;

[0048] FIG. 6 is a schematic representation of the device for generating a high voltage or high field strength, with a means is provided in the output area which is suitable for capacitive field control;

[0049] FIG. 7 is a schematic representation of the device for generating a high voltage or high field strength, with a means provided in the output area which is suitable for refractive field control with a highly refractive dielectric;

[0050] FIG. 8 is a schematic representation of the device for generating a high voltage or high field strength, with a means provided in the output area which is suitable for resistive and/or capacitive field control via a degree of filling in the housing;

[0051] FIG. 9 is a schematic representation of the device for generating a high voltage or high field strength, wherein a means provided in the output area, which is suitable for geometric field control;

[0052] FIG. 10 is a perspective view of a device for generating a high voltage or high field strength;

[0053] FIG. 11 is a sectional view of the device for generating a high voltage or high field strength along the section line A-A shown in FIG. 10; and,

[0054] FIG. 12 is a perspective sectional view of the device for generating a high voltage or high field strength.

DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION

[0055] Identical reference numerals are used for identical or identically acting elements of the invention. Furthermore, for the sake of clarity, only reference numerals are shown in the individual figures which are necessary for the description of the respective figures.

[0056] FIG. 1 shows a piezoelectric transformer 1 in a perspective view. According to a possible embodiment, the piezoelectric transformer 1 can be used in a device for generating non-thermal atmospheric pressure plasma P. Although the description below relates to the generation of non-thermal atmospheric pressure plasma P in relation to the various embodiments, this should not be interpreted as a limitation of the invention. A high voltage or a high electric field can also be generated with the device 1 according to the invention or the component 200 (see FIG. 10-1) according to the invention. An AC voltage is considered to be a high voltage at a voltage of >1 kV, typically >3 kV and in many cases also >10 kV. A field strength >1 kV/mm is considered to be a large field strength.

[0057] A piezoelectric transformer 1 is a design of a resonance transformer, which is based on piezoelectricity and, in contrast to the conventional magnetic transformers, represents an electromechanical system. The piezoelectric transformer 1 is, for example, a transformer of the Rosen-Type.

[0058] The piezoelectric transformer 1 has an input region 2 and an output region 3, the output region 3 adjoining the input region 2 in a longitudinal direction Z. In the input area 2, the piezoelectric transformer 1 has electrodes 4 to which an alternating voltage can be applied. The electrodes 4 extend in the longitudinal direction Z of the piezoelectric transformer 1. The electrodes 4 are alternately stacked with a piezoelectric material 5 in a stacking direction X which is perpendicular to the longitudinal direction Z. The piezoelectric material 5 is polarized in the stacking direction X.

[0059] The electrodes 4 are arranged in the interior of the piezoelectric transformer 1 and are also referred to as internal electrodes. The piezoelectric transformer 1 has a first side surface 6 and a second side surface 7, which lies opposite the first side surface 6. A first outer electrode 8 is arranged on the first side surface 6. A second outer electrode 8 (not shown here) is arranged on the second side surface 7. The inner electrodes 4 are alternately electrically connected to one another in the stacking direction X, either with the first outer electrode 8 or the second outer electrode 8.

[0060] FIG. 3 shows a schematic representation of a conventional circuit for the piezoelectric transformer 1. The input area 2 can be controlled with a low alternating voltage by means of control electronics 12 which is applied between the electrodes 4 (see FIG. 1) of the input area 2. Due to the piezoelectric effect, the AC voltage applied on the input side is first converted into a mechanical vibration. The frequency of the mechanical vibration is essentially dependent on the geometry, the mechanical structure and the material of the piezoelectric transformer 1. The input region 2 of the piezoelectric transformer 1 is connected to the ground potential 35.

[0061] The output region 3 is of a piezoelectric material 9 and is free of internal electrodes 4. The piezoelectric material 9 in the output region 3 is polarized in the longitudinal direction Z. The piezoelectric material 9 of the output region 3 can be the same material as the piezoelectric material 5 of the input region 2. It is possible as well that the piezoelectric materials 5 and 9 differ in their direction of polarization. In the output region 3, the piezoelectric material 9 is shaped into a single monolithic layer which is polarized completely in the longitudinal direction Z. The piezoelectric material 9 has only a single polarization direction in the output region 3.

[0062] If an alternating voltage is applied to the electrodes 4 in the input region 2, a mechanical wave is formed within the piezoelectric material 5 and 9, which generates an output voltage due to the piezoelectric effect in the output region 3. FIG. 2 shows a graphic representation of the formation of the high voltage on the output side end face 10A of the output region 3 of the piezoelectric transformer 1. As can be seen from the illustration in FIG. 2, an electrical voltage is thus generated in the output region 3 which increases towards the output side end face 10A of the piezoelectric transformer 1. The electrical voltage is thus generated between the output side end face 10A and the end of the electrodes 4 of the input region 2. A high voltage is therefore present at the output side end face 10A. This also creates a high potential difference between the output-side end face 10A and the surroundings of the piezoelectric transformer 1, which is sufficient to generate a strong electric field that ionizes a process medium or the surrounding air. It is also possible to generate radicals, excited molecules or atoms in the plasma.

[0063] In this way, the piezoelectric transformer 1 generates a high electrical field that is able to ionize gases or liquids by electrical excitation. Atoms or molecules of the respective gas or liquid are ionized and form a plasma P. Ionization occurs whenever the electric field strength on the surface of the piezoelectric transformer 1 exceeds the ignition field strength of the plasma P. The ignition field strength of a plasma P is the field strength that is required to ionize the atoms or molecules or to generate radicals, excited molecules or atoms (not shown here).

[0064] FIG. 4 shows a schematic representation of a field distribution 16 of isopotential lines 16I of the electric field with an external influence 80 on the conventional arrangement of the piezoelectric transformer 1. The piezoelectric transformer 1 is surrounded by a housing 11, the piezoelectric transformer 1, with the input region 2 and the output region 3, extends along its longitudinal direction L in the cylindrical, dielectric housing 11. In the conventional arrangement of the piezoelectric transformer 1, the external influence 80 influences the isopotential lines 16I in a space 15 between the piezoelectric transformer 1 and an inner wall 14 of the dielectric housing 11 in such a way that the distance between the isopotential lines 16I is reduced, which increases the risk there is that the ignition field strength is reached within space 15. The ignition of the plasma in space 15 can damage the piezoelectric transformer 1.

[0065] FIG. 5 shows a schematic representation of the field distribution 16 of the electrical field with an external influence 80 on the arrangement of the piezoelectric transformer 1 in the cylindrical housing 11. For this purpose, there is a means 20, which in the embodiment shown here is a cup-shaped cap 30, which is attached to an output side end 17 (see FIG. 4) of the cylindrical housing 11. The cap 30 is provided in a region 23 of the cylindrical and dielectric housing 11, which extends, at least partially, in the longitudinal direction L along the output region 3, starting from an output side end face 10A of the piezoelectric transformer 1 on the output side. The cap 30 consists of a base 31 which covers the output side end face 10A of the piezoelectric transformer 1 and a radially circumferential edge 32 which extends in the direction of the longitudinal axis L along the region 23.

[0066] For reasons of symmetry and to close the housing 11, a further cap 40 can be attached to an input side end 18 (see FIG. 4) of the cylindrical housing 11. The further cap 40 also has a radially circumferential edge 42 and a bottom 41. The bottom 41 of the further cap 40 lies opposite an input side end face 10E of the piezoelectric transformer 1. The further cap 40 closes the input end 18 of the cylindrical housing 11.

[0067] The illustration in FIG. 5 shows that an external influence 80, which is approximated to the housing 11 in the area 23, does not result in any compression of the isopotential lines 16I in the space 15 by the means 20, here the cap 30. The space 15 lies in the area 23 between the piezoelectric transformer 1 and an inner wall 14 of the dielectric housing 11. Outside the housing 11, the isopotential lines 16I are compressed by the external influence, so that the ignition field strength is reached there. Ignition of a plasma P in this area 23 does not have a disruptive effect on the piezoelectric transformer 1 in the interior of the housing (not shown here).

[0068] FIG. 6 shows a schematic representation of the device 100 for generating a non-thermal atmospheric pressure plasma P. In the output area 3 of the device 100, a means 20 is provided which is suitable for capacitive field control in the output area 3 of the device 100. As shown in FIGS. 6 to 8, the piezoelectric transformer 1, which has an input region 2 and an output region 3, extends in a cylindrical, dielectric housing 11. The piezoelectric transformer 1 is thus surrounded along its longitudinal direction L by a cylindrical, dielectric housing 11. A control electronics 12 of the device 100 is provided for supplying the piezoelectric transformer 1 with AC voltage and is connected by electrical lines 13 with an outer electrode 8 on a first side surface 6 of the input area 2 (not shown) and an outer electrode 8 on a second side surface 7 of the input area 2 (not shown). As already mentioned in the description of FIG. 2, a high voltage forms on the output side end face 10A of the piezoelectric transformer 1.

[0069] A means 20 is provided in the area 23 of the cylindrical and dielectric housing 11 for field control. The means 20 is arranged such that it extends in the longitudinal direction L along the output region 3, starting from an output side end face 10A of the piezoelectric transformer 1. In this embodiment, the means 20 comprises a pot-shaped cap 30 with a base 31 and a radially circumferential edge 32. The base 31 covers the output side end face 10A of the piezoelectric transformer 1. The radially circumferential edge 32 extends in the direction of the longitudinal axis L along the region 23. Furthermore, in this embodiment, the means 20 comprises a plurality of capacitive elements 26 which are embedded in the region 23 of the cylindrical housing 11. The cup-shaped cap 30 is attached to an output-side end 17 of the cylindrical housing 11, so that the radially circumferential edge 32 of the cap 30 is embedded in the dielectric material of the cylindrical housing 11 in the region 23 and the bottom 31 of the cap 30 of the output-side end face 10A is opposite of the piezoelectric transformer 1. The cup-shaped cap 30 closes the output side end 17 of the cylindrical housing 11.

[0070] All of the embodiments of the device 100 shown in FIGS. 6 to 9 have a conductive cladding 29 on an outer wall 19 of the cylindrical housing 11, which is formed at least in the entrance area 2 (not shown). The conductive cladding 29 is connected to ground potential 35 via electrical lines 34. The control electronics 12 are connected to the external electrodes 8 (not shown here) of the input region 2 of the piezoelectric transformer 1 via a corresponding electrical line 13. Due to the high voltage generated on the output side end face 10A of the piezoelectric transformer 1, the plasma P is formed in the longitudinal direction L at the bottom 31 of the cap 30.

[0071] FIG. 7 shows a schematic representation of the device 100 for generating a non-thermal atmospheric pressure plasma P, a means 20 being provided in the exit area 3 which is suitable for refractive field control. For this purpose, the means 20 consists of a housing 11, which is made of a highly refractive dielectric. In addition, the means 20 comprises a cup-shaped cap 30, which is attached to the outlet-side end 17 of the cylindrical housing 11. The radially circumferential edge 32 of the cap 30 is embedded in the dielectric material of the cylindrical housing 11 in a defined area 23. The bottom 31 of the cap 30 is coupled to the end face 10A of the piezoelectric transformer 1 on the output side via a permanently elastic element 25. The cup-shaped cap 30 closes the output-side end 17 of the cylindrical housing 11. All other elements of the device 100 have already been mentioned in the description of FIG. 6.

[0072] FIG. 8 shows a schematic illustration of a further possible embodiment of the device 100 for generating a non-thermal atmospheric pressure plasma P. For this purpose, a means 20 is provided in the exit area 3, by means of which the field distribution 16 (see FIG. 5) of isopotential lines 16I of the electric field passes through an external influence 80 can be kept substantially constant. The means 20 effects a resistive and/or capacitive field control, which is regulated by resistive and/or capacitive fillers 27 in the material of the housing 11 in the exit area 3. The filling of the material of the housing 11 is restricted to the area 23. Here too, the means 20 comprises a cup-shaped cap 30, which is attached to the outlet-side end 17 of the cylindrical housing 11. The radially circumferential edge 32 of the cap 30 is embedded in the dielectric material of the cylindrical housing 11. The bottom 31 of the cap 30 lies opposite the output side end face 10A of the piezoelectric transformer 1 on the output side. The cup-shaped cap 30 closes the output-side end 17 of the cylindrical housing 11.

[0073] FIG. 9 shows a schematic representation of another embodiment of the device 100 according to the invention for generating a non-thermal atmospheric pressure plasma P. For this purpose, a means 20 is provided in the output area 3, which is designed in such a way that it is suitable for a geometric field control. In this embodiment, the means 20 is the cup-shaped cap 30, which is attached to the outlet-side end 17 of the cylindrical housing 11. The radially circumferential edge 32 of the cap 30 is embedded in the dielectric material of the cylindrical housing 11 in the region 23. The edge 32 is designed in such a way that it extends from the bottom 31. Here too, the bottom 31 of the cap 30 lies opposite the output side end 10A of the piezoelectric transformer 1. The cup-shaped cap 30 closes the output-side end 17 of the cylindrical housing 11.

[0074] FIG. 10 shows a perspective view of a component 200 for generating a non-thermal atmospheric pressure plasma P. The component 200 can be used in the device 100 according to the invention for generating a non-thermal atmospheric pressure plasma P. The component 200 comprises a cylindrical, dielectric sleeve 202, which is closed by a cap 30 at the output-side end 17 (not shown here) and by a further cap 40 at the input-side end 18 (not shown here). In each case one electrical line 13 of each outer electrode 8 of the piezoelectric transformer 1 (see FIGS. 11 and 12) is led to the outside through the dielectric sleeve 202 of the component 200.

[0075] FIG. 11 shows a sectional view of the component 200 for generating a non-thermal atmospheric pressure plasma P along the section line A-A shown in FIG. 10. A piezoelectric transformer 1 is arranged in the interior of the dielectric sleeve 202. The piezoelectric transformer 1 extends in the axial direction A in the sleeve 202 and is arranged concentrically in the sleeve 202. The piezoelectric transformer 1 is defined by the input area 2 and the output area 3. The cap 30 is attached to the outlet end 17 of the dielectric sleeve 202. The output-side end face 10A (not shown) of the piezoelectric transformer 1 bears against the cap 30. The further cap 40 is attached to the input end 18 of the sleeve 202. The input-side end face 10E (not shown) of the piezoelectric transformer 1 bears against the further cap 40. Each of the outer electrodes 8 of the piezoelectric transformer 1 is contacted by an electrical line 13. The electrical lines 13 are led out of the sleeve 202 of the component 200 and can be contacted by the control electronics 12 (see, for example, FIGS. 6-9).

[0076] As can be seen from FIG. 11 and the perspective sectional illustration of FIG. 12 of the component 200 for generating a non-thermal atmospheric pressure plasma P, a permanently elastic element 204 is provided in the cap 30 and the further cap 40. The piezoelectric transformer 1 is held in the sleeve 202 by the permanently elastic element 204 of the cap 30 and the further cap 40. The output side end face 10A of the piezoelectric transformer 1 bears against the cap 30 and the input side end face 10E of the piezoelectric transformer 1 bears against the further cap 40.

[0077] As can also be seen from FIGS. 11 and 12, a preferred embodiment of the invention, the dielectric sleeve 202 has a radially circumferential shoulder 206 on each side defined position on the sleeve 202. The cap 30 or the further cap 40 can be attached to the shoulder 206 and can thus be brought into a defined position on the sleeve 202. The dielectric sleeve 202, according to a possible embodiment, may have formed at least one passage 208 in the sleeve 202. A pressure, temperature or moisture balance can be carried out between the interior of the sleeve 202 and the surroundings of the component 200 via the passage 208.

[0078] The combination of the field control structure (at least the first cap 30 or the appropriately designed means 20) with the mechanical, for example the elastic mounting of the piezoelectric transformer 1 lead to a practical component 200. In this embodiment, the piezoelectric transformer 1 is glued into the cap 30 (field control cap) with a permanently elastic, electrically conductive element 204. Likewise, a thermal connection of the means 20 for field control or the cap 30 can be provided in order to dissipate heat loss from the piezoelectric transformer 1. The cooling via the cap 30 or the further cap 40 can be optimized, if the caps 30 or 40 are designed as metallic caps.

[0079] The cap 30 (field control structure) and the further cap 40 serve to encapsulate the piezoelectric transformer 1 in the sleeve 202 in order to achieve dust protection or protection against contact. Furthermore, the cap 30 or the means 20 (field control structure) lead to the reduction of the electromagnetic emission.

[0080] The invention has been described in terms of preferred embodiments. However, it is self-evident for a person skilled in the art that changes and modifications can be made without leaving the scope of protection of the protection Claims below.

LIST OF REFERENCE NUMBERS

[0081] 1 Piezoelectric transformer [0082] 2 Input region [0083] 3 Output region [0084] 4 Electrode [0085] 5 Piezoelectric material [0086] 6 First side surface [0087] 7 Second side surface [0088] 8 Outer electrode [0089] 9 Piezoelectric material [0090] 10A Output side end face [0091] 10E Input side end face [0092] 11 Cylindrical housing [0093] 12 Control electronics [0094] 13 Electrical line [0095] 14 Inner wall [0096] 15 Space [0097] 16 Field distribution [0098] 16I Isopotential line [0099] 17 Outlet-side end [0100] 18 Input end [0101] 19 Outer wall [0102] 20 Means [0103] 23 Defined area [0104] 25 Permanently elastic element [0105] 26 Capacitive element [0106] 27 Filler [0107] 29 Conductive cladding [0108] 30 Cap [0109] 31 Bottom [0110] 32 Radially circumferential edge [0111] 34 Electrical line [0112] 35 Ground potential [0113] 40 Further cap [0114] 41 Bottom [0115] 42 Radially circumferential edge [0116] 80 External influence [0117] 100 Device [0118] 200 Component [0119] 202 Dielectric sleeve [0120] 204 Permanently elastic element [0121] 206 Circumferential shoulder [0122] 208 Passage [0123] A Axial direction [0124] A-A Section line [0125] P Plasma [0126] X Stacking direction [0127] Z Longitudinal direction