Method and setup for growing bulk single crystals
11591712 · 2023-02-28
Assignee
Inventors
- Christo Guguschev (Berlin, DE)
- Mario Brutzam (Berlin, DE)
- Darrell Schlom (Ithaca, NY, US)
- Hanjong Paik (Ithaca, NY, US)
Cpc classification
C30B15/10
CHEMISTRY; METALLURGY
C30B11/002
CHEMISTRY; METALLURGY
C30B15/14
CHEMISTRY; METALLURGY
C30B29/68
CHEMISTRY; METALLURGY
C30B11/003
CHEMISTRY; METALLURGY
International classification
C30B15/14
CHEMISTRY; METALLURGY
C30B29/68
CHEMISTRY; METALLURGY
C30B15/10
CHEMISTRY; METALLURGY
C30B11/00
CHEMISTRY; METALLURGY
Abstract
The invention relates to a method for growing a bulk single crystal, wherein the method comprises the steps of inserting a starting material into a crucible, melting the starting material in the crucible by heating the starting material, arranging a thermal insulation lid at a distance above a melt surface of said melt such that at least a central part of the melt surface is covered by the lid, and growing the bulk single crystal from the melt by controllably cooling the melt with the thermal insulation lid arranged above the melt surface.
Claims
1. A single crystalline Ba.sub.2ScNbO.sub.6 substrate having a diameter in lateral extent that is equal to or larger than 6 mm.
2. A (multi)layer structure comprising the single crystalline Ba.sub.2ScNbO.sub.6 substrate of claim 1 and one or more crystal layers grown on said Ba.sub.2ScNbO.sub.6 substrate.
3. The (multi)layer structure of claim 2, wherein the one or more crystal layers comprise a perovskite, preferably at least one of the perovskites BaSnO.sub.3, LaInO.sub.3, BiScO.sub.3, PbZrO.sub.3, SrZrO.sub.3, SrHfO.sub.3, PrInO.sub.3, LaScO.sub.3, SrSnO.sub.3, BaHfO.sub.3, LaLuO.sub.3, CeLuO.sub.3, PrLuO.sub.3, NdLuO.sub.3, CeYbO.sub.3, PrYbO.sub.3, or BaZrO.sub.3, and/or the one or more crystal layers comprise at least one of the perovskite solid solutions PbZr.sub.1-xTi.sub.xO.sub.3 (PZT), PbCa.sub.1-xTi.sub.xO.sub.3 (PCT), or Ba.sub.1-xSr.sub.xSnO.sub.3, wherein x is a number between 0 and 1, and/or the one or more crystal layers comprise at least one of the relaxor-ferroelectric solid solutions PbMg.sub.1/3Nb.sub.1/2O.sub.3—PbTiO.sub.3 (PMN-PT), PbZn.sub.1/3Nb.sub.2/3O.sub.3—PbTiO.sub.3 (PZN-PT), and PbIn.sub.1/2Nb.sub.1/2O.sub.3—PbMg.sub.1/3Nb.sub.2/3O.sub.3—PbTiO.sub.3 (PIN-PMN-PT).
4. The (multi)layer structure of claim 2, wherein one of the one or more crystal layers is a BaSnO.sub.3 crystal layer that is grown directly on the Ba.sub.2ScNbO.sub.6 substrate, the BaSnO.sub.3 crystal layer having an average threading dislocation density of less than 10.sup.8 dislocations per cm.sup.2 and/or an electron mobility larger than 190 cm.sup.2V.sup.−1s.sup.−1 and/or a full width at half maximum (FWHM) of its rocking curve that is less than or equal to 23 arcsec (0.006°).
5. An electronic device comprising a (multi)layer structure according to claim 2.
6. A method for fabricating a Ba.sub.2ScNbO.sub.6 substrate according to claim 1 from a bulk Ba.sub.2ScNbO.sub.6 single crystal having a cross-sectional area that is equal to or larger than 6 mm×6 mm, wherein the method comprises the steps of inserting a starting material comprising at least Ba, Sc, Nb and O into a crucible, melting the starting material in the crucible by heating the starting material, arranging a thermal insulation lid at a distance above a melt surface of said melt such that at least a central part of the melt surface is covered by the lid, and growing the bulk Ba.sub.2ScNbO.sub.6 single crystal from the melt by controllably cooling the melt with the thermal insulation lid arranged above the melt surface such that the bulk Ba.sub.2ScNbO.sub.6 single crystal has a cross-sectional area that is equal to or larger than 6 mm×6 mm.
7. The method according to claim 6, wherein the cooling of the melt is passively controlled by reducing heat provided by a heating element over a predefined period of time and/or actively controlled.
8. The method according to claim 6, wherein the distance at which the thermal insulation lid is arranged above the melt surface of said melt is between 1 mm and 100 mm.
9. The method according to claim 8, wherein the distance at which the thermal insulation lid is arranged above the melt surface of said melt is between 5 mm and 20 mm.
10. The method according to claim 8, wherein the thermal insulation lid is arranged at a distance of 10 mm above the melt surface.
11. The method according to claim 6, wherein the starting material is compacted before melting and preferably before inserting the starting material in the crucible.
12. The method according to claim 6, wherein the crucible is arranged in an inert gas atmosphere.
13. The method according to claim 12, wherein the crucible is arranged in an inert gas atmosphere of argon or nitrogen.
14. The method according to claim 6, wherein the starting material additionally comprises MgO and/or CaO at a content of less than 5 mol % and the resulting bulk Ba.sub.2ScNbO.sub.6 single crystal is doped with Mg and/or Ca.
15. The method according to claim 6, additionally comprising separating the bulk Ba.sub.2ScNbO.sub.6 single crystal from a multicrystalline or polycrystalline matrix that at least partly surrounds the Ba.sub.2ScNbO.sub.6 single crystal.
16. The method according to claim 6, additionally comprising cutting a slice of the bulk Ba.sub.2ScNbO.sub.6 single crystal.
17. The method according to claim 16, additionally comprising fabricating a Ba.sub.2ScNbO.sub.6 substrate from the slice having a diameter in lateral extent that is equal to or larger than 6 mm.
18. A bulk Ba.sub.2ScNbO.sub.6 single crystal having a cross-sectional area that is equal to or larger than 6 mm×6 mm.
19. The bulk Ba.sub.2ScNbO.sub.6 single crystal of claim 18, having cubic symmetry and a lattice parameter of 412 pm.
20. The bulk Ba.sub.2ScNbO.sub.6 single crystal of claim 18, having a melting point at 2165 +/−30° C. in inert gas atmosphere at ambient pressure.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) In the following, preferred embodiments of the invention will be described with reference to the figure. In the figures:
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DETAILED DESCRIPTION
(13)
(14) In a first step S1, a starting material is inserted into a crucible. The starting material is provided in dried powder form with a purity of 99.99%. In various other embodiments of the method the starting material comprises impurities in the 1% range and dopants in the 5% range. It is advantageous if before inserting the starting material into the crucible a powder mixture is produced from the starting material, e.g., including weighing, mixing and calcining the powders of the different chemical species.
(15) Here, the starting material is inserted into the crucible as a loose powder. Before melting the loose powder can be compacted inside the crucible. However, in various other embodiments it is preferred that the starting material is compacted before inserting into the crucible. Compacting the starting material before inserting the starting material into the crucible is often preferred because it allows the crucible to be filled more efficiently with starting material and also enables the starting material in the crucible to be more efficiently melted.
(16) The starting material can comprise, e.g., oxygen in combination with a cation species that can assume multiple oxidation states. In particular, it is preferred if the starting material comprises at least Ba, Sc, Nb and O.
(17) After inserting, the starting material is melted in step S2 in the crucible by heating the starting material, e.g., with a heating element. If the starting material is inserted into the crucible in compacted form, e.g., in the form of a cylindrical bar, the bar sinks to the lower part of the crucible while melting.
(18) After melting the starting material to a melt, a thermal insulation lid is arranged in step S3 at a distance above a melt surface of said melt to block radiation emitted from the melt surface. In particular, the thermal insulation lid is arranged above the melt surface such that at least a central part of the melt surface is covered by the lid. Preferably, the lid is arranged close to the melt surface, e.g. within the range of 1 mm and 10 mm. However, in various embodiments it is beneficial if the thermal insulation lid is arranged above the melt surface at a distance between 1 mm and 100 mm. The thermal insulation lid can also be arranged above the melt or unmolten starting material before melting the starting material or while melting the starting material in further embodiments.
(19) With the thermal insulation lid arranged at a distance above the melt surface a bulk single crystal is grown from the melt in step S4. Hereby, crystals nucleate at the crucible wall and grain-selection and continuous grain enlargement towards the central part of the crucible occur such that the bulk single crystal grows from the crucible wall towards the central region of the crucible.
(20) Crystal growth is achieved by controllably cooling the melt with the thermal insulation lid arranged above the melt surface. Controllably cooling the melt can be performed passively, e.g., by reducing the heat provided by a heating element over a predefined period of time and/or can be performed actively, e.g., by directing an inert gas flux onto the melt surface.
(21) While conducting the steps of the method for growing a bulk single crystal as described above, preferably, the crucible is arranged in an inert gas atmosphere, e.g., argon or a nitrogen atmosphere, preferably, under ambient pressure.
(22)
(23) In the growth method represented by the flow diagram of
(24) The starting material held in the crucible is then melted in step B2 by heating the starting material. For melting the starting material to a melt, the crucible is heated at least to the melting temperature of a bulk Ba.sub.2ScNbO.sub.6 single crystal. To be well above the melting temperature of a bulk Ba.sub.2ScNbO.sub.6 single crystal the crucible can be heated, e.g., to a temperature of 2200° C.
(25) After melting the starting material, a thermal insulation lid is arranged in step B3 at a distance above a melt surface of said melt to block radiation emitted from the melt surface. In particular, the thermal insulation lid is arranged above the melt surface such that at least a central part of the melt surface is covered by the lid. Preferably, the lid is arranged close to the melt surface, e.g., within the range of 1 mm and 10 mm. However, in various embodiments it is beneficial if the thermal insulation lid is arranged above the melt surface at a distance between 1 mm and 100 mm. The thermal insulation lid can also be arranged above the melt or unmolten starting material before melting the starting material or while melting the starting material in further embodiments.
(26) The melt held in the crucible is then controllably cooled—passively and/or actively—for growing B4 a bulk Ba.sub.2ScNbO.sub.6 single crystal from the melt. During growth of the bulk Ba.sub.2ScNbO.sub.6 single crystal the thermal insulation lid is arranged above the melt surface to block thermal radiation emitted from the melt surface and to produce a specific temperature distribution favouring crystal growth. Such a temperature distribution beneficial for crystal growth can include a temperature gradient with lower (colder) temperatures close to the crucible wall and higher (hotter) temperatures in the central part of the crucible.
(27) With the growth methods as described with respect to
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(29) The growth setup comprises a crucible 302 that is embedded in a thermal insulation 304. The thermal insulation 304 can comprise, e.g., ZrO.sub.2 and Al.sub.2O.sub.3. The crucible itself can be made of, e.g., iridium or platinum. Preferably, the crucible 302 has a cylindrical shape. However, the crucible 302 can also be realised in different shapes, e.g., the crucible 302 can have a hemispherical shape or the crucible 302 can be cube-shaped. With larger crucibles larger bulk single crystals can be grown. Thus, preferably for growing a bulk single crystal having a specific size a respective crucible is selected that also is not too large as too save energy needed for melting the starting material. For growing a bulk single crystal having a volume of about 15 mm×15 mm×15 mm (length×width×height), e.g., a crucible can be used having an inner diameter of 30 mm and a height of 50 mm.
(30) The crucible 302 is covered with a punched disc 303 that, preferably, is made of the same material as the crucible 302, e.g., iridium or platinum. The punched disc 303 serves for blocking thermal radiation emitted from the melt surface. The punched disc 303 is optional and is not mandatory for growing a bulk single crystal, e.g., by implementing one of the growth methods as described with respect to
(31) The growth setup 300 further comprises a heating element 306 that is arranged and configured for melting a starting material that is held in the crucible 302 and melted. In particular, the heating element 306 comprises an induction heating coil that is wrapped around the crucible 302. Thus, heating the starting material to a melt is accomplished by radio frequency (RF) induction mainly into the crucible and crucible lid.
(32) In the growth setup 300 a melt 308 is shown. At a distance above the melt 308 held inside the crucible 302 a thermal insulation lid 310 is arranged that at least partly covers part the surface of the melt 308. In particular, the thermal insulation lid 310 is arranged and configured for influencing and controlling the temperature distribution in the melt 308 held inside the crucible 302 to favor crystal growth from the crucible wall towards the crucible center. The thermal insulation lid 310 can comprise a shutter as described with respect to
(33) The thermal insulation lid 310 is attached to an arm 312 as a mounting with which the thermal insulation lid 310 can be lifted up or brought closer to the surface of the melt 308.
(34) The arm extends vertically though the hole of the punched disc 303 such that the thermal insulation lid attached to the arm can be lifted. For example, the arm can have a screw thread at its end outside the crucible and can moved manually. It is also possible that the arm can be lifted automatically, e.g., with an electrically driven motor that is connected to the arm.
(35) This growth setup is in particular useful for growing a bulk Ba.sub.2ScNbO.sub.6 single crystal, especially with the method described with respect to
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(37) The thermal insulation lid 400 having a shutter function as shown in
(38) Also a thermal insulation lid having a shutter function can have more perforations, perforations of different sizes and shapes and a plurality of perforations arranged in a different pattern. For example, in a pattern as shown in
(39) Here, the perforations 506, 508 are triangularly shaped with one of the vertices being the closest to the rim of the disks 502, 504. For a particular design of a temperature distribution of the melt it can be of advantage if each of the triangles are rotated by 180° such that the shortest edge is the closest to the rim of the disks 502, 504.
(40) In various other embodiments of a thermal insulation lid comprising a shutter, the shutter is implemented by one or more windows that can be opened or closed. By choosing an opening angle of the one or more windows the amount of thermal radiation emitted from the melt surface per time period can be controlled.
(41) It is also possible to implement a thermal insulation lid comprising a shutter by means of a thermal insulation lid having a plurality of perforations such that each can be closed by a corresponding lid. Such a lid for closing a plurality of perforations can also be made of one piece such that the plurality of perforations can be closed and opened in one step.
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(43) The region in a) surrounded by the white dashed lines represents the single crystal region of the bulk Ba.sub.2ScNbO.sub.6 single crystal. This bulk Ba.sub.2ScNbO.sub.6 single crystal shown in
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