Coated article with low-E coating having low visible transmission
10766808 ยท 2020-09-08
Assignee
Inventors
- Aritra Biswas (Ras Al Khaimah, AE)
- Bernd Disteldorf (Mettlach, DE)
- Rajendran Venkatesan (Ras Al Khaimah, AE)
Cpc classification
C03C17/3681
CHEMISTRY; METALLURGY
C03C17/3642
CHEMISTRY; METALLURGY
C03C17/3639
CHEMISTRY; METALLURGY
C03C17/3652
CHEMISTRY; METALLURGY
International classification
B32B15/04
PERFORMING OPERATIONS; TRANSPORTING
B32B17/06
PERFORMING OPERATIONS; TRANSPORTING
Abstract
This invention relates to a coated article including a low-emissivity (low-E) coating. In certain example embodiments, the low-E coating is provided on a substrate (e.g., glass substrate) and includes at least first and second infrared (IR) reflecting layers (e.g., silver based layers) that are spaced apart by contact layers (e.g., NiCr based layers) and a dielectric layer of or including a material such as silicon nitride. The dielectric layer is split by a layer of or including zirconium oxide, in order to improve durability. In certain example embodiments, the coated article has a low visible transmission (e.g., no greater than 60%, more preferably no greater than about 55%, and most preferably no greater than about 50%).
Claims
1. A coated article including a coating supported by a glass substrate, the coating comprising: first and second infrared (IR) reflecting layers comprising silver, the first IR reflecting layer being located closer to the glass substrate than is the second IR reflecting layer; a first contact layer comprising NiCr located over and directly contacting the first IR reflecting layer comprising silver; a dielectric layer comprising silicon nitride located over and directly contacting the first contact layer comprising NiCr; wherein the dielectric layer comprising silicon nitride is split by a nonabsorbing splitting dielectric layer comprising zirconium oxide ZrO.sub.2, so that the splitting dielectric layer comprising zirconium oxide ZrO.sub.2 is located between and contacting a first portion of the dielectric layer comprising silicon nitride and a second portion of the dielectric layer comprising silicon nitride; a second contact layer comprising NiCr located over and directly contacting the layer comprising silicon nitride; the second IR reflecting layer comprising silver located over and directly contacting the second contact layer comprising NiCr; a third contact layer comprising NiCr located over and directly contacting the second IR reflecting layer; and another dielectric layer comprising silicon nitride located over and directly contacting the third contact layer comprising NiCr.
2. The coated article of claim 1, further comprising a base layer comprising silicon nitride located between the glass substrate and the first IR reflecting layer.
3. The coated article of claim 2, wherein the base layer comprising silicon nitride is from 600-1,000 angstroms thick.
4. The coated article of claim 1, wherein the splitting dielectric layer comprising zirconium oxide ZrO.sub.2 has a thickness of from 70-120 angstroms.
5. The coated article of claim 1, wherein the first and second portions of the dielectric layer comprising silicon nitride are of the same thickness +/1-10%.
6. The coated article of claim 1, wherein the first and second portions of the dielectric layer comprising silicon nitride are each from 200-450 angstroms thick.
7. The coated article of claim 1, wherein the splitting dielectric layer comprising zirconium oxide ZrO.sub.2 is thinner than the first and second IR reflecting layers comprising silver.
8. The coated article of claim 1, wherein the splitting dielectric layer comprising zirconium oxide ZrO.sub.2 is at least 100 angstroms thinner than are each of the first and second portions of the layer comprising silicon nitride.
9. The coated article of claim 1, wherein the splitting layer comprising zirconium oxide consists essentially of ZrO.sub.2.
10. The coated article of claim 1, further comprising an overcoat layer comprising zirconium oxide located over and directly contacting the another dielectric layer comprising silicon nitride.
11. The coated article of claim 1, wherein the second IR reflecting layer comprising silver is thicker than is the first IR reflecting layer comprising silver.
12. The coated article of claim 1, wherein the coated article has a visible transmission, measured monolithically, of no greater than 60%.
13. The coated article of claim 1, further comprising an overcoat layer comprising zirconium oxide, wherein each of the first and second IR reflecting layers comprising silver is at least three times as thick as the overcoat layer.
14. The coated article of claim 1, wherein the splitting layer comprising zirconium oxide further comprises nitrogen.
15. The coated article of claim 1, wherein the second IR reflecting layer comprising silver is at least 10 angstroms () thicker than is the first IR reflecting layer comprising silver.
16. The coated article of claim 1, wherein the dielectric layer comprising silicon nitride that is located over and directly contacting the first contact layer comprising NiCr is amorphous.
17. The coated article of claim 1, wherein the first contact layer comprising NiCr is substantially metallic or metallic, and contains no more than about 5% (atomic %) oxygen.
18. The coated article of claim 1, wherein the second contact layer comprising NiCr is substantially metallic or metallic, and contains no more than about 5% (atomic %) oxygen.
19. The coated article of claim 1, wherein the third contact layer comprising NiCr is substantially metallic or metallic, and contains no more than about 5% (atomic %) oxygen.
20. The coated article of claim 1, wherein said first, second, and/or third contact layer(s) further contain(s) nitrogen.
21. The coated article of claim 1, wherein said coated article has a visible transmission of from 20-60% measured monolithically.
22. The coated article of claim 1, wherein said coated article is not thermally tempered and has a visible transmission of from 20-55% measured monolithically.
23. The coated article of claim 1, wherein the coated article is thermally tempered.
24. The coated article of claim 23, wherein the coated article is heat treated and has a glass side reflective E* value of no greater than 5.0 due to the heat treatment.
25. The coated article of claim 23, wherein the coated article is heat treated and has a glass side reflective E* value of no greater than 4.5 due to the heat treatment.
26. The coated article of claim 1, wherein the coating has a sheet resistance (R.sub.s) of less than or equal to 4.0 ohms/square.
27. The coated article of claim 1, wherein the splitting dielectric layer comprising zirconium oxide contains from 1-7% nitrogen (atomic %).
28. A IG window unit including the coated article of claim 1, and another glass substrate which is coupled to said coated article.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS OF THE INVENTION
(3) Coated articles herein may be used in applications such as IG window units, laminated window units (e.g., for use in vehicle or building applications), vehicle windows, monolithic architectural windows, residential windows, and/or any other suitable application that includes single or multiple glass substrates.
(4) In certain example embodiments of this invention, the coating includes a double-silver stack. Referring to
(5) In order to increase durability, along with optics and thermal properties, and avoid significant structural changes before and after HT, coated articles according to certain example embodiments of this invention have a center dielectric layer 14 of or including silicon nitride split by the layer of or including zirconium oxide 15, and lower contact layers 7, 17 are based on NiCr (as opposed to ZnO). It has also been found that using metallic or substantially metallic NiCr (possibly partly nitrided) for layer(s) 7, 11, 17 and/or 21 improves chemical, mechanical and environmental durability (compared to using ZnO lower contact layers below silver and/or highly oxided NiCr upper contact layers above silver). It has also been found that sputter-depositing silicon nitride inclusive layer 14 in an amorphous state, so that it is amorphous in both as-coated and HT states, helps with overall stability of the coating. For example, 5% HCl at 65 degrees C. for one hour will remove the coating of U.S. Pat. No. 7,521,096, whereas the coating shown in
(6) In certain example embodiments of this invention such as
(7)
(8) In monolithic instances, the coated article includes only one glass substrate 1 as illustrated in
(9) In certain example embodiments of this invention, one, two, three, or all four of contact layers 7, 11, 17, 21 may be of or include NiCr (any suitable ratio of Ni:Cr), and may or may not be nitrided (NiCrN.sub.x). In certain example embodiments, one, two, three or all four of these NiCr inclusive layers 7, 11, 17, 21 is substantially or entirely non-oxidized. In certain example embodiments, layers 7, 11, 17 and 21 may all be of metallic NiCr or substantially metallic NiCr (although trace amounts of other elements may be present). In certain example embodiments, one, two, three or all four of NiCr based layers 7, 11, 17, 21 may comprise from 0-10% oxygen, more preferably from 0-5% oxygen, and most preferably from 0-2% oxygen (atomic %). In certain example embodiments, one, two, three or all four of these layers 7, 11, 17, 21 may contain from 0-20% nitrogen, more preferably from 1-15% nitrogen, and most preferably from about 1-12% nitrogen (atomic %). NiCr based layers 7, 11, 17 and/or 21 may or may not be doped with other material(s) such as stainless steel, Mo, or the like. It has been found that the use of NiCr based contact layer(s) 7 and/or 17 under the silver-based IR reflecting layer(s) 9, 19 improves durability of the coated article (compared to if layers 7 and 17 were instead of ZnO).
(10) Dielectric layers 3, 14 (including 14a and 14b), and 24 may be of or include silicon nitride in certain embodiments of this invention. Silicon nitride layers 3, 14 and 24 may, among other things, improve heat-treatability of the coated articles and protect the other layers during optional HT, e.g., such as thermal tempering or the like. One or more of the silicon nitride of layers 3, 14, 24 may be of the stoichiometric type (i.e., Si.sub.3N.sub.4), or alternatively of the Si-rich type of silicon nitride in different embodiments of this invention. The presence of free Si in a Si-rich silicon nitride inclusive layer 3 and/or 14 may, for example, allow certain atoms such as sodium (Na) which migrate outwardly from the glass 1 during HT to be more efficiently stopped by the Si-rich silicon nitride inclusive layer(s) before they can reach silver and damage the same. Thus, it is believed that the Si-rich Si.sub.xN.sub.y can reduce the amount of damage done to the silver layer(s) during HT in certain example embodiments of this invention thereby allowing sheet resistance (R.sub.s) to decrease or remain about the same in a satisfactory manner. Moreover, it is believed that the Si-rich Si.sub.xN.sub.y in layers 3, 14 and/or 24 can reduce the amount of damage (e.g., oxidation) done to the silver and/or NiCr during HT in certain example optional embodiments of this invention. In certain example embodiments, when Si-rich silicon nitride is used, the Si-rich silicon nitride layer (3, 14 and/or 24) as deposited may be characterized by Si.sub.xN.sub.y layer(s), where x/y may be from 0.76 to 1.5, more preferably from 0.8 to 1.4, still more preferably from 0.82 to 1.2. Any and/or all of the silicon nitride layers discussed herein may be doped with other materials such as stainless steel or aluminum in certain example embodiments of this invention. For example, any and/or all silicon nitride layers 3, 14, 24 discussed herein may optionally include from about 0-15% aluminum, more preferably from about 1 to 10% aluminum, in certain example embodiments of this invention. The silicon nitride of layers 3, 14, 24 may be deposited by sputtering a target of Si or SiAl, in an atmosphere having argon and nitrogen gas, in certain embodiments of this invention. Small amounts of oxygen may also be provided in certain instances in any or all of the the silicon nitride layers.
(11) Dielectric non-absorbing layer 15 is preferably of or including zirconium oxide. The zirconium oxide in layer 15 may be ZrO.sub.2 or any other suitable stoichiometry. It has been found that provision of the zirconium oxide based layer 15 in a position to split the silicon nitride based layer 14 into two portions 14a and 14b results in improved durability. While layer 15 consists of, or consists essentially of, ZrO.sub.2 in preferred embodiments of this invention, it is possible that other materials may be present in the layer. For instance, layer 15 may be doped with other materials in certain example instances, such as nitrogen for instance. In certain example embodiments zirconium oxide layer 15 contains from about 0-10% nitrogen, more preferably from about 1-7% nitrogen.
(12) Infrared (IR) reflecting layers 9 and 19 are preferably substantially or entirely metallic and/or conductive, and may comprise or consist essentially of silver (Ag), gold, or any other suitable IR reflecting material. IR reflecting layers 9 and 19 help allow the coating to have low-E and/or good solar control characteristics.
(13) Other layer(s) below or above the illustrated coating may also be provided. Thus, while the layer system or coating is on or supported by substrate 1 (directly or indirectly), other layer(s) may be provided therebetween. Thus, for example, the coating of
(14) While various thicknesses and materials may be used in layers in different embodiments of this invention, example thicknesses and materials for the respective layers on the glass substrate 1 in the
Example Materials/Thicknesses; FIG. 1 Embodiment
(15) TABLE-US-00001 Layer Glass (1-10 Preferred Range More Preferred Example mm thick) () () () Si.sub.xN.sub.y (layer 3) 100-1100 600-1000 869 NiCr or NiCrN 10-70 40-65 54 (layer 7) Ag (layer 9) 80-170 100-145 115 NiCr or NiCrN 10-110 68-100 83 (layer 11) Si.sub.xN.sub.y (layer 14a) 100-700 200-450 295 ZrO.sub.2 (layer 15) 30-700 70-120 96 Si.sub.xN.sub.y (layer 14b) 100-700 200-450 295 NiCr or NiCrN 10-70 40-65 55 (layer 17) Ag (layer 19) 80-200 115-160 130 NiCr or NiCrN 10-70 40-65 54 (layer 21) Si.sub.3N.sub.4 (layer 24) 100-460 150-300 207 ZrO.sub.2 (layer 27) 20-85 25-55 44
(16) The lower and upper portions 14a and 14b of the silicon nitride based layer 14 are substantially the same physical thickness (the same thickness +/10%) in certain example embodiments of this invention, although they need not be in alternative embodiments of this invention. Moreover, in certain example embodiments of this invention the zirconium oxide layer 15 is thinner than both the silver layers 9, 19, and is also thinner than both of the silicon nitride layers 14a, 14b in certain example embodiments of this invention. In certain example embodiments of this invention, the zirconium oxide layer 15 is at least 10 angstroms () thinner than both the silver layers 9, 19, and is at least angstroms 100 angstroms thinner than both of the silicon nitride layers 14a, 14b in certain example embodiments of this invention.
(17) The second IR reflecting layer comprising silver 19 is at least as thick as the first IR reflecting layer comprising silver 9. In certain preferred embodiments, it has been found that surprisingly beneficial results can be achieved when the second IR reflecting layer comprising silver 19 is thicker than the first IR reflecting layer comprising silver 9, more preferably when second IR reflecting layer 19 is at least 10 angstroms () thicker (more preferably at least 20 angstroms thicker) than the first IR reflecting layer comprising silver 9.
(18) In certain example embodiments, the overcoat layer of or including zirconium oxide and/or zirconium oxynitride 27 is thinner than each of the IR reflecting layers 9, 19 comprising silver in the coating 30. In certain example embodiments of this invention, each of the IR reflecting layers comprising silver 9 and 19 is at least twice as thick, and more preferably at least three times as thick, as the layer 27 or including zirconium oxide and/or zirconium oxynitride.
(19) In certain example embodiments, the center silicon nitride based layer 14 total thickness (14a+14b) is thicker the silicon nitride layer 24 thickness, preferably by at least 100 angstroms, more preferably by at least 300 angstroms, and most preferably by 340 angstroms. In certain example embodiments, silicon nitride layer 3 is at least 200 angstroms thicker (more preferably at least 300 angstroms thicker) than each of silicon nitride layers 14a and 14b. Moreover, in certain example embodiments, each of the silicon nitride based layers 3, 14 and 24 is at least two times as thick as the zirconim oxide inclusive layer 27, more preferably at least three times as thick, and most preferably at least four or five times as thick.
(20) The coating 30 offers good durability and allows for lower inside and outside reflection compared to a single-silver based low-E coating. However, delta-E* values are typically in the 4-5 range. The coating, and coated articles including the coating, may be designed to appear light blue in transmission and reflection, but may become slightly more neutral after optional HT.
(21) In certain example embodiments of this invention, coated articles herein may have the following optical and solar characteristics set forth in Table 2 when measured monolithically (before and/or after optional HT). The sheet resistances (R.sub.s) herein take into account all IR reflecting layers (e.g., silver layers 9, 19). Note that before heat treatment means as annealed, but before high temperature heat treatment such as thermal tempering as described herein.
(22) TABLE-US-00002 Optical/Solar Characteristics (Monolithic - Before Heat Treatment) Characteristic General More Preferred Most Preferred R.sub.s (ohms/sq.): <=5.0 <=4.0 <=3.0 E.sub.n: <=0.08 <=0.05 <=0.04 T.sub.vis (Ill. C. 2): 30-63% 45-60% 50-59%
(23) TABLE-US-00003 Optical/Solar Characteristics (Monolithic - Post Heat Treatment) Characteristic General More Preferred Most Preferred R.sub.s (ohms/sq.): <=5.0 <=4.0 <=3.0 E.sub.n: <=0.08 <=0.05 <=0.04 T.sub.vis (Ill. C. 2): 30-63% 48-61% 52-60%
(24) It can be seen from the above that the heat treatment (e.g., thermal tempering) slightly increases the visible transmission of the coated article.
(25) In certain example laminated embodiments of this invention, coated articles herein which have been optionally heat treated to an extent sufficient for tempering, and which have been coupled to another glass substrate to form an IG unit, may have the above recited Optical/Solar characteristics in a structure as shown in
(26) While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.