Electroless copper plating polydopamine nanoparticles
10760162 ยท 2020-09-01
Assignee
Inventors
- Siyuan Ma (Vestal, NY, US)
- Liang Liu (Vestal, NY, US)
- Vadim Bromberg (Niskayuna, NY, US)
- Timothy Singler (Binghamton, NY, US)
Cpc classification
C23C18/1608
CHEMISTRY; METALLURGY
C23C18/2086
CHEMISTRY; METALLURGY
C23C18/1893
CHEMISTRY; METALLURGY
H05K2203/0786
ELECTRICITY
C23C18/1851
CHEMISTRY; METALLURGY
B41M3/006
PERFORMING OPERATIONS; TRANSPORTING
H05K1/097
ELECTRICITY
H05K2203/1173
ELECTRICITY
C23C18/2006
CHEMISTRY; METALLURGY
H05K3/1275
ELECTRICITY
International classification
H05K3/18
ELECTRICITY
B41M3/00
PERFORMING OPERATIONS; TRANSPORTING
C23C18/16
CHEMISTRY; METALLURGY
Abstract
Aqueous dispersions of artificially synthesized, mussel-inspired polydopamine nanoparticles were inkjet printed on flexible polyethylene terephthalate (PET) substrates. Narrow line patterns (4 m in width) of polydopamine resulted due to evaporatively driven transport (coffee ring effect). The printed patterns were metallized via a site-selective Cu electroless plating process at a controlled temperature (30 C.) for varied bath times. The lowest electrical resistivity value of the plated Cu lines was about 6 times greater than the bulk resistivity of Cu. This process presents an industrially viable way to fabricate Cu conductive fine patterns for flexible electronics at low temperature, and low cost.
Claims
1. A method for forming a conductive trace on a substrate wettable with a volatile liquid, comprising: providing a suspension of catalytic nanoparticles in the volatile liquid, the catalytic nanoparticles comprising a catalyst for electroless plating; selectively depositing the suspension of catalytic nanoparticles in the volatile liquid on the substrate by printing a line in a pattern having edges, wherein at least a portion of the substrate remains un-wet by the volatile liquid; drying the volatile liquid, to form a pattern of catalytic nanoparticles on the substrate, by evaporation of the volatile liquid to redistribute the catalytic nanoparticles according to the coffee ring effect to induce a higher concentration of catalytic nanoparticles in a first region on the substrate at the edges of the printed line and a sparse distribution of catalytic nanoparticles at a second region between the edges of the printed line, and wherein the un-wet portion of the substrate in a third region lacks catalytic nanoparticles; and selectively electroless plating the nanoparticles, to form a conductive metal pattern corresponding to a distribution of the formed pattern of catalytic nanoparticles in the first region, a non-conductive metal pattern corresponding to the distribution of the formed pattern of catalytic nanoparticles in the second region, and an absent metal pattern the third region.
2. The method according to claim 1, wherein the substrate comprises at least one of a polyimide sheet and glass.
3. The method according to claim 1, wherein the catalytic nanoparticles comprise polydopamine.
4. The method according to claim 1, wherein the suspension of catalytic nanoparticles is selectively deposited by a method selected from the group consisting of inkjet printing, lithography, and a pad printing process.
5. The method according to claim 1, wherein said drying comprises evaporating the volatile liquid in the suspension at an exposed surface in air.
6. The method according to claim 1, wherein the electroless plating comprises plating the catalytic nanoparticles with at least one of silver and copper.
7. The method according to claim 1, wherein the electroless plating forms a pair of separated conductive traces at the edges of an inkjet printed line of the catalytic nanoparticles.
8. The method according to claim 1, wherein the electroless plating comprises electroless copper plating, resulting in at least one continuous reduced copper trace on the substrate.
9. A patterned substrate having a conductive trace on a substrate wettable with a volatile liquid, formed by a method comprising: selectively depositing a suspension of catalytic nanoparticles in the volatile liquid, the catalytic nanoparticles comprising a catalyst for electroless plating, on the substrate by printing a line in a pattern having edges, wherein at least a portion of the substrate remains un-wet by the volatile liquid; drying the volatile liquid, to form a pattern of catalytic nanoparticles on the substrate, by evaporation of the volatile liquid to redistribute the catalytic nanoparticles according to the coffee ring effect to induce a higher concentration of catalytic nanoparticles in a first region on the substrate at the edges of the printed line and a sparse distribution of catalytic nanoparticles at a second region between the edges of the printed line, and wherein the un-wet portion of the substrate in a third region lacks catalytic nanoparticles; and selectively electroless plating the nanoparticles, to form a conductive metal pattern corresponding to a distribution of the formed pattern of catalytic nanoparticles in the first region, a non-conductive metal pattern corresponding to the distribution of the formed pattern of catalytic nanoparticles in the second region, and an absent metal pattern the third region.
10. The patterned substrate according to claim 9, wherein the substrate comprises at least one of a polyimide sheet and glass.
11. The patterned substrate according to claim 9, wherein the catalytic nanoparticles comprise polydopamine.
12. The patterned substrate according to claim 9, wherein the suspension of catalytic nanoparticles is selectively deposited by a method selected from the group consisting of inkjet printing, lithography, and a pad printing process.
13. The patterned substrate according to claim 9, wherein the electroless plating comprises plating the catalytic nanoparticles with at least one of silver and copper.
14. The patterned substrate according to claim 9, wherein the selectively depositing the suspension of catalytic nanoparticles comprises inkjet printing a line, to form a pair of separated conductive traces at the edges of the inkjet printed line.
15. The patterned substrate according to claim 9, wherein the electroless plating comprises electroless copper plating, resulting in at least one continuous reduced copper trace on the substrate.
16. A method for forming a conductive trace on a substrate, comprising: providing a suspension of catalytic nanoparticles adapted for electroless plating in a volatile liquid; depositing the suspension of catalytic nanoparticles on the substrate in a wetting pattern, wherein at least a portion of the substrate remains dry and absent catalytic nanoparticles; drying the volatile liquid, to selectively form a pattern of catalytic nanoparticles on the substrate corresponding to the wetting pattern, and having an inhomogeneous distribution of catalytic nanoparticles due to redistribution of the catalytic nanoparticles during the drying, comprising a dense region of catalytic nanoparticles at edges of the wetting pattern, and a sparse distribution of catalytic nanoparticles between the edges of the wetting pattern, and a region that remained dry outside the wetting pattern without catalytic nanoparticles; and electroless plating the catalytic nanoparticles, to form a conductive metal pattern corresponding to the inhomogeneous distribution of the catalytic nanoparticles, comprising a conductive metallized region corresponding to the dense region, and a non-conductive region corresponding to the sparse distribution, separating portions of the conductive metallized region.
17. The method according to claim 16, wherein the catalytic nanoparticles comprise polydopamine.
18. The method according to claim 16, wherein the suspension of catalytic nanoparticles is selectively deposited by a method selected from the group consisting of inkjet printing, lithography, and a pad printing process.
19. The method according to claim 16, wherein the electroless plating comprises plating the catalytic nanoparticles with at least one of silver and copper.
20. The method according to claim 19, wherein the electroless plating forms a pair of separated conductive traces at the edges of an inkjet printed line of the catalytic nanoparticles.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Example 1
(13) PDA-NP was synthesized according to a published protocol (27) with minor modification. The ink was formulated by mixing PDA-NP with distilled deionized (DI) water at a concentration of 0.25 wt % followed by 10 min ultrasonication (3510, Branson). The particle size distribution and zeta potential were characterized by dynamic light scattering (DLS) (ZetasizerNano, Malvern). The PDA-NP average diameter was about 34055 nm. The zeta potential of PDA-NP was measured as 31.00.5 mV, indicative of good stability of the ink dispersion. Particle precipitation was not observed over a 30-day period.
(14) The viscosity and surface tension were measured as 1.00.1 mPa.Math.s by a rotary viscometer (TA1000, TA Instruments) and 72.10.1 mN/m by a bubble tensiometer (BP100, Kruss), respectively. These values were close to those of pure water due to the very small PDA-NP loading.
(15)
(16) A single-nozzle inkjet printer was used to print the PDA-NP suspension onto plasma-treated PET substrates (Melinex ST506, Dupont) to form arrays of five lines. After printing and solvent evaporation, PDA-NPs assembled into a pair of continuous lines with a minimal amount of non-continuous deposition within the region between the line pair (
(17) A potential mechanism of PDA-induced ELP has been suggested to involve the electrostatic interaction of metallic ions with surface catechol groups of PDA followed by catechol oxidation to quinone and reduction of metallic ions to elemental metal (26). The newly deposited elemental metal further catalyzes the redox reaction for continuous deposition. In this study, Cu ELP was performed by immersing the printed PDA patterns in a chemical bath at 30 C. for different durations.
(18) The morphology of the printed twin line before and after the plating process was characterized by scanning electron microscopy (SEM) (Supra 55VP, Zeiss) from both top and cross-sectional perspectives. For the as-deposited lines, each twin line typically consists of a single-particle thick PDA-NP structure. After 15 min of Cu ELP, a layer of Cu was plated on top of the PDA-NPs with some penetration into the interstitial space of the PDA-NP layer (
(19)
(20) Cu thickness was measured by the analysis of the cross-sectional SEM images. The thickness value is exhibited in
(21) The electrical resistance of each array of plated lines was assessed by a method we previously reported (28, 30). The average resistance of each twin line after ELP processes is shown in
(22)
(23) Materials composition was confirmed by X-ray diffraction (XRD) (XDS2000, Scintag) as shown in
(24)
(25) The bending robustness of Cu patterns was assessed using a cyclic bending test. During each cycle, the substrate was cyclically bent between concave and convex geometries with known radius of curvature (2.5 mm or 5 mm). The number of cycles ranged from 1000 to 10000, while the bending frequency was maintained at 100 cycles/min. The resistance of each line versus number of bending cycles is shown in
(26) The adhesion of the plated metal lines was assessed qualitatively by a tape peel test. Briefly, a tape (Scotch600, 3M) was carefully adhered to the patterns and subsequently removed by peeling it off parallel to the substrate. Then the remaining patterns were observed by an optical microscope (AxioObserver Al, Zeiss). The plated lines (15 min Cu ELP) demonstrate good adhesion on PET substrates (
(27)
(28)
(29) Therefore, fine lines of Cu with low electrical resistivity were fabricated by sequential inkjet printing of an aqueous dispersion of mussel-inspired poly(dopamine) nanoparticles and site-selective electroless plating. The process forms Cu lines with thickness linearly dependent on plating time, and with an electrical resistivity 6 times that of bulk Cu. The resistance of the Cu lines does not change significantly with cyclic bending characterized by a 5 mm bending radius. While resistance of Cu lines is subject to increase over long-time storage, probably because of oxidation, the conductivity observed is reasonably stable for at least one month, giving reasonable time to manufacture a complete system and protect the lines from further degradation. This process demonstrates a simple, low temperature and low-cost method of fabricating fine conductive Cu patterns for flexible electronics applications.
Example 2
(30) Materials
(31) Dopamine hydrochloride (98.5%, Sigma Aldrich), Tris (99.9%, Sigma Aldrich), 2-propanol (99.5%, Fisher Scientific), silver nitrate (99%, Sigma Aldrich), ethylenediamine (98% m Fisher Scientific), potassium sodium tartrate tetrahydrate (99%, Fisher Scientific), 3,5-diiodotyrosine (99%, Sigma Aldrich), copper chloride dehydrate (99%, Fisher Scientific), ethylenediamine (99%, Fisher Scientific), ascorbic acid (99%, Fisher Scientific), potassium bromide (99%, Fisher Scientific), cobalt chloride hexahydrate (98%, Fisher Scientific), 2,2-Bipyridal (98%, Fisher Scientific), hydrochloric acid aqueous solution (1M, Sigma Aldrich) and sodium hydroxide (99%, Fisher Scientific) were used as received. Water was distilled subsequent to deionization (DI) prior to use.
(32) Polydopamine Nanoparticle (PDA-NP) Synthesis
(33) PDA-NP powder was synthesized according to a published protocol (27) with minor modification. Tris was dissolved in distilled DI water at 10 mM to form 250 ml solution to which 2-propanol was subsequently added. Magnetic stirring was applied at 300 rpm for 30 min to ensure a uniform mixture. 125 mg dopamine chloride was added to this mixture, and keeps being stirred at the same condition for 72 hrs to form the PDA-NP suspension. Purification was necessary to remove excessive reactant and Tris. This was achieved by eight cycles of 10,000 rpm centrifugation (5810R, Eppendorf) for 10 min at 23 C., decantation of upper liquid and re-dispersion of settled solid in fresh distilled DI water by vigorous shaking. The synthesized PDA-NP was dried under a mild nitrogen stream overnight.
(34) PDA-NP Diameter Characterization
(35) The PDA-NP diameter was characterized by dynamic light scattering (DLS). The result is shown in
(36) Substrate Preparation
(37) PET (Melinex ST 506, Dupont) substrates thoroughly rinsed by copious water and 2-proponal alternatively. The substrate surfaces were processed by oxygen plasma to improve hydrophilicity using a plasma treatment system (PE200-RIE, PlasmaEtch). Before plasma generation, the chamber was vacuumed to less than 5 mtorr. Then ultra-high pure oxygen was introduced to the chamber at flow rate of 20 sccm while maintaining the final pressure at 100 mtorr. After the flow rate and pressure were stabilized for 10 min, oxygen plasma was generated at 100 W radio frequency (13.56 Hz) power for 1 min. The auto-tuning network was used to ensure the maximum reflected power less than 1 W along the entire plasma duration. The substrates were used immediately after plasma processing.
(38) Drop-On-Demand (DOD) Inkjet Printing Process
(39) The DOD inkjet printing system used in this study is a custom-designed apparatus with a single piezoelectric printing nozzle of 80 m orifice diameter (Microfab). The nozzle is actuated by a waveform generator (JetDrive III, Microfab) and positioned by a computer-controlled x-y stage (MX80L, Parker). Drop formation was observed along an optical axis perpendicular to the nozzle with a camera (Sensicam QE, Cooke Corp.) to maintain drop diameter (552 m), speed (10.2 m/s), and ensure absence of satellites. Drop frequency was controlled at 100 Hz by adjusting the frequency of the waveform generator. The centre-to-centre distance between two adjacent printed droplets was fixed at 502 m and controlled by the speed of the inkjet nozzle over the substrate (5 mm/s). The printed line length was controlled at 6 mm. Five lines were printed to form an array. And four arrays were on each substrate.
(40) Electroless Plating (ELP) Process
(41) Distilled DI water used for Cu ELP process was deoxygenated by bubbling nitrogen gas over 24 hrs. The Cu ELP bath comprises aqueous solutions of 50 mM copper chloride dehydrate, 600 mM ethylenediamine, 150 mM cobalt chloride hexahydrate, 0.04 mM potassium bromide and 0.04 mM 2,2-Bipyridal. The PH value of the as-prepared bath was adjusted to 9.40.1 by adding appropriate amounts of sodium hydroxide and hydrochloric acid solutions. During plating, the bath PH was maintained within the range 9.4 and 9.5 by adding hydrochloric acid at 0.2 ml/min with a syringe pump. The ELP solution temperature was controlled at 30 C. using a water bath. The solutions were mechanical stirred at 100 rpm during the entire plating period.
(42) Electrical Resistance Characterization
(43) The resistance of each array of printed and plated silver lines was facilitated by depositing two silver electrodes at the ends of the array such that the printed lines spanned a fixed distance (4 mm) between the electrodes. One electrode pair was deposited over each line array by shadow sputtering silver through machined aluminium mask (
(44) The sputter deposition process was carried out with a magnetron sputtering system (CRC-600, Torr International) in DC mode. The deposition was controlled at 50 W with a flow rate of 100 sccm Argon resulting in 1.510.sup.2 torr working chamber pressure. Electrodes of 200 nm thickness were deposited after 3 min sputtering.
(45) The typical surface temperature of a deposited silver electrode was measured as 29 C. by a thermocouple immediately after the chamber was vented with nitrogen gas to atmospheric pressure (4 min venting process). It is unlikely that the actual surface temperature during sputter deposition was significantly higher than the measured value so as to have a measurable effect on the structure and electrical performance properties of the printed and plated silver lines.
(46) After electrodes deposition, a four-point-probe method was used to measure the resistance value. Each twin line resistance value can be calculated by sequentially cut a twin and recording the updated resistance value using a parallel resistor model.
Example 3
(47) Polydopamine nanoparticles (PDA-NP) were synthesized according to Yan et al. (27). PDA-NPs were generated by initiating dopamine self-polymerization in a water-isopropanol mixture which was buffered by Tris. The average size of PDA-NP was measured with a dynamic light scattering (DLS) system (zetasizer-nano, Malvern) to be 33855 nm. The as-synthesized PDA-NP powder was dispersed in distilled deionized (DI) water at 1% wt by 10 min agitation by ultra-sonication. The viscosity and surface tension of the PDA-NP ink were measured as 1.00.1 mPas and 72.30.1 mN/m using a cone-plate rheometer (AR1000, Texas Instrument) and bubble pressure tensiometer (BP100, Kruss), respectively
(48) pH buffer agent Tris was dissolved in distilled deionized (DI) water at 10 mM to form 250 mL solution to which 80 mL of 2-propanol was subsequently added. 125 mg dopamine chloride was added to this mixture, and agitated by magnetic stirring at 300 rpm for 72 hrs to form the PDA-NP suspension. Purification of the suspension was necessary to remove excess reactants and Tris buffer. This was accomplished by three cycles of centrifugation (3500 rpm for 1 hr at 23 C.) and re-dispersion of settled particulate matter in distilled DI water via vigorous shaking. The synthesized PDA-NP was dried under a stream of nitrogen. The ink was prepared by mixing the PDA-NP dry powder with distilled DI water followed by 10 min ultrasonication. All chemicals were purchased from Sigma Aldrich (USA) and used as received.
(49) The size distribution of PDA-NP was characterized by dynamic light scattering (Zetasizer-nano, Malvern). A representative size distribution of a 1% wt sample of ink is shown in
(50) Glass microscope slides (2947, Corning) were used as substrates and were prepared as follows. All substrates were immersed in a Micro-90 (Cole-Palmer) aqueous solution (1% v) and underwent ultrasonic agitation for 12 min. Copious rinsing with distilled DI was followed by drying under a nitrogen stream. The substrate surface was then processed using argon gas plasma treatment (PE200-RIE, PlasmaEtch) to increase surface hydrophilicity. The plasma parameters were controlled at 100 mtorr pressure and 100 sccm flow rate argon with 100 W radio frequency (13.56 Hz) power for 3 min. The substrates were used immediately after plasma treatment.
(51) The inkjet printing apparatus (30) consists of a single piezoelectric inkjet nozzle (80 m diameter, Microfab) actuated by a waveform generator (JetDrive III, Microfab) and positioned via a computer-controlled x-y stage (MX80L, Parker). Drop formation was observed along an optical axis perpendicular to the nozzle with a video microscope (Sensicam QE, Cooke Corp.) to maintain drop diameter (552 m), speed (10.2 m/s), and ensure absence of satellites. Drop frequency was controlled at 100 Hz by adjusting the frequency of the waveform generator. The center-to-center spacing between two adjacent printed drops was fixed at 502 m and controlled by the traverse speed of the inkjet nozzle over the substrate (5 mm/s). To visualize materials deposition process along with evaporation, a top-view camera (Kodak ES 1.0) and a bottom-view microscope (AxioObserver Al, Zeiss) were equipped.
(52) The electroless plating process followed a published report (11). An aqueous bath consisted of 3.0 mM silver nitrate, 18 mM ethylenediamine, 35 mM potassium sodium tartarate and 0.04 mM 3,5-diiodotyrosine. The bath temperature was maintained at 30 C. Agitation was applied at 100 rpm with mechanical stirring during the entire plating process.
(53)
(54) A single-nozzle inkjet printer was used to print the PDA-NP suspension onto plasma-processed glass substrates (2947, Corning) to form arrays of five lines, as shown in
(55) Ag deposition onto the printed pattern can be achieved by simple immersion into a silver salt solution such as silver nitrate (AgNO.sub.3) (26). However, an ELP process that includes an additional reducing agent is necessary to ensure the rapid formation of a continuous and sufficiently thick metal layer. A potential mechanism of PDA-induced ELP has been suggested to involve the electrostatic interaction of metallic ions with surface catechol groups of PDA followed by catechol oxidation to quinone and reduction of metallic ions to elemental metal. The newly deposited elemental metal further catalyzes the redox reaction for continuous deposition. In this study, Ag ELP was performed by immersing the printed PDA patterns in a chemical bath at 30 C. for different durations.
(56) The morphology of the printed lines before and after the plating process was characterized by optical microscopy (Axio Imager, Zeiss) and scanning electron microscopy (SEM) (Supra 55VP, Zeiss). Top and cross-sectional views show that for the as-deposited lines, each set of twin lines consists of closely-packed PDA-NP structure that is 1-2 particles thick (
(57) Cross-sectional SEM images were also analyzed to measure the Ag thickness on each twin line and interline region as a function of metal plating time. Plating times shorter than 1 hr did not yield accurate thickness measurements of the interline region due to its discontinuity. In general, the Ag growth rate at the twin lines is linear and larger in comparison to that of the interline region (
(58) The electrical resistance of Ag-plated lines was measured using a line scratching technique (74, 75). Briefly, a pair of Ag electrodes was sputtered through a mask over each line array so that the lines spanned the distance between electrodes. Four-point-probe measurements were carried out to determine the total resistance of the five lines. Each line was carefully cut by a needle attached to a micro-positioner and the new resistance value recorded. Under the assumption that each line array is a parallel resistor network, this method allowed measuring the average resistance of each cut line. As
(59) For electroless plating time t.sub.plating<58 min, only the pair of twin lines is conductive. The measured resistance (R.sub.m) is expressed as:
(60)
(61) For t.sub.plating58 min, both twin lines and the interline region are conductive so that the measured resistance is:
(62)
(63) where .sub.i, W.sub.i and .sub.i are the interline region's resistivity, width and thickness, respectively.
(64) The procedure used to measure .sub.i independent of .sub.t is demonstrated as follows. First, the combined resistance R.sub.m was measured, then the twin lines were mechanically sequentially scratched off and the new resistance R*.sub.m recorded. With the measured width of interline region (W*.sub.i) and its resistance (R*.sub.m), the resistivity of the interline region is:
(65)
(66) Substituting Eq. 4 into Eq. 3, .sub.t can be written as:
(67)
(68) The term W may be replaced by W2W.sub.t where W is the width of the entire line.
(69) The electrical resistivity of plated lines of silver was estimated based on two observed structural regimes: i) for plating times shorter than 58 min, a twin-line structure consisting of two parallel conductors with no electrical contribution from the interline region and ii) a three parallel-conductor model for t58 min (
.sub.t=2R.sub.tW.sub.t/L.sub.t=2R.sub.tW.sub.t.sub.i//.sub.iL(W2W.sub.t)R.sub.t),
(70) where .sub.i is the resistivity of the interline region; R the measured resistance of an individual line (a pair of twin lines plus the interline region); W the entire line width and .sub.i the Ag thickness at the interline area).
(71) Crystallographic analysis of the deposited Ag was performed by X-ray Diffraction (XRD) (Equinox 2000, Inel) on each array. Diffraction patterns after different plating times are displayed for in
(72) In conclusion, Ag lines of high electrical conductivity were fabricated by sequential inkjet printing of mussel-inspired poly(dopamine) nanoparticle ink and Ag electroless plating. The process yields silver lines with thickness linearly dependant on plating time and electrical conductivity of 5 that of bulk silver. The conductive path could be adjusted between the twin lines and entire structures by controlling the ELP time, which opens an opportunity for resolution control of printed conductive structures. This process demonstrates a simple, low-temperature and low-cost method of fabricating conductive paths for flexible electronics applications.
(73) There has thus been shown and described novel communications devices and systems and methods which fulfil various objects and advantages sought therefor. Many changes, modifications, variations, combinations, subcombinations and other uses and applications of the subject invention will, however, become apparent to those skilled in the art after considering this specification and the accompanying drawings which disclose the preferred embodiments thereof. All such changes, modifications, variations and other uses and applications which do not depart from the spirit and scope of the invention are deemed to be covered by the invention, which is to be limited only by the claims which follow.
REFERENCES
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