Blower
10738773 ยท 2020-08-11
Assignee
Inventors
Cpc classification
F04B43/023
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B43/046
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B39/123
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B39/121
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B43/0054
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B53/10
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B53/16
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B45/047
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
International classification
F04B39/12
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B45/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B53/10
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B45/047
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B43/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B53/16
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B43/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
A piezoelectric blower includes a first valve, a first housing, a vibrating plate, a piezoelectric element, a second housing, and a second valve. The first housing forms, together with the vibrating plate, a first blower chamber. A first top plate portion includes a first vent hole that allows an inside of the first blower chamber to communicate with an outside of the first blower chamber. The second housing forms, together with an actuator, a second blower chamber. A second top plate portion includes a second vent hole that allows an inside of the second blower chamber to communicate with an outside of the second blower chamber. The vibrating plate includes an opening portion and a third vent hole, the opening portion allowing an outer periphery of the first blower chamber and an outer periphery of the second blower chamber to communicate with each other.
Claims
1. A blower comprising: an actuator including a vibrating portion and a driving member, the vibrating portion including a first principal surface and a second principal surface, the driving member being provided on at least one of the first principal surface and the second principal surface of the vibrating portion, the driving member causing the vibrating portion to undergo bending vibration; and a housing including a first top plate portion, a second top plate portion, and a side wall portion, the first top plate portion forming, together with the actuator, a first blower chamber and including a first vent hole, the second top plate portion forming, together with the actuator, a second blower chamber and including a second vent hole, the side wall portion connecting the first top plate portion to the vibrating portion and connecting the second top plate portion to the vibrating portion, wherein the vibrating portion includes a plurality of opening portions allowing an outer periphery of the first blower chamber and an outer periphery of the second blower chamber to communicate with each other, the plurality of opening portions surrounding the first blower chamber and the second blower chamber, and wherein the side wall portion includes a plurality of third vent holes allowing the outer periphery of the first blower chamber and the outer periphery of the second blower chamber to communicate with an outside of the housing, and wherein each third vent hole communicates with the first blower chamber and the second blower chamber indirectly via an associated opening port, and wherein each third vent hole extends circumferentially about a central axis of the blower a first distance, and each opening portion extends circumferentially about the central axis a second distance that is longer than the first distance.
2. The blower according to claim 1, wherein each third vent hole is provided in a region of the side wall portion surrounding the vibrating portion, and allows its associated opening portion and the outside of the housing to communicate with each other.
3. The blower according to claim 1, wherein a first valve preventing a gas from flowing into the first blower chamber from an outside of the first blower chamber is provided at the first vent hole.
4. The blower according to claim 1, wherein a second valve preventing the gas from flowing into the second blower chamber from an outside of the second blower chamber is provided at the second vent hole.
5. The blower according to claim 1, wherein the driving member is a piezoelectric member.
6. The blower according to claim 1, wherein the first top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
7. The blower according to claim 1, wherein the second top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
8. The blower according to claim 1, wherein a shortest distance a from a central axis of the first blower chamber to the outer periphery of the first blower chamber and a resonant frequency f of the vibrating plate satisfy a relationship of 0.8(k.sub.0c)/(2)af1.2(k.sub.0c)/(2), where an acoustic velocity of gas that passes through the first blower chamber is c, a Bessel function of the first kind is Jo(x), and ko is a value that satisfies a relationship of the Bessel function of the first kind in which Jo(ko)=0.
9. The blower according to claim 8, wherein a shortest distance from a central axis of the second blower chamber to the outer periphery of the second blower chamber is equal to the shortest distance a.
10. The blower according to claim 2, wherein a first valve preventing a gas from flowing into the first blower chamber from an outside of the first blower chamber is provided at the first vent hole.
11. The blower according to claim 2, wherein a second valve preventing the gas from flowing into the second blower chamber from an outside of the second blower chamber is provided at the second vent hole.
12. The blower according to claim 3, wherein a second valve preventing the gas from flowing into the second blower chamber from an outside of the second blower chamber is provided at the second vent hole.
13. The blower according to claim 2, wherein the driving member is a piezoelectric member.
14. The blower according to claim 3, wherein the driving member is a piezoelectric member.
15. The blower according to claim 4, wherein the driving member is a piezoelectric member.
16. The blower according to claim 2, wherein the first top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
17. The blower according to claim 3, wherein the first top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
18. The blower according to claim 4, wherein the first top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
19. The blower according to claim 5, wherein the first top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
20. The blower according to claim 2, wherein the second top plate portion undergoes bending vibration as the vibrating plate undergoes bending vibration.
21. The blower according to claim 1, wherein the plurality of third vent holes, the plurality of opening portions, and a main body of the vibrating portion are aligned such that a common plane passes through the plurality of third vent holes, the plurality of opening portions, and the main body.
22. The blower according to claim 1, wherein each third vent hole extends radially a third distance that is longer than the first distance, and each opening portion extends radially a fourth distance that is shorter than the second distance.
23. The blower according to claim 1, wherein each third vent hole intersects with a central portion of its associated opening portion.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
(1)
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(3)
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(5) Each of
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DETAILED DESCRIPTION OF THE DISCLOSURE
Embodiment of the Present Disclosure
(12) The piezoelectric blower 100 according to an embodiment of the present disclosure is described below.
(13)
(14) The piezoelectric blower 100 includes a first valve 80, the first housing 17, the vibrating plate 41, a piezoelectric element 42, a second housing 117, and a second valve 180 in that order from the top, and has a structure in which these components are successively placed upon each other.
(15) The vibrating plate 41 is disc-shaped, and is made of, for example, stainless steel (SUS). The thickness of the vibrating plate 41 is 0.6 mm. The vibrating plate 41 includes a first principal surface 40A and a second principal surface 40B.
(16) As shown in
(17) The piezoelectric element 42 is disc-shaped, and is made of, for example, a lead zirconate titanate ceramic. Electrodes are formed on two principal surfaces of the piezoelectric element 42. The piezoelectric element 42 is joined to the second principal surface 40B of the vibrating plate 41 at a side of a second blower chamber 131, and expands and contracts in accordance with an applied alternating voltage. Here, the vibrating portion 141, the connecting portion 142, and the piezoelectric element 42 form an actuator 50.
(18) The first housing 17 has a C-shaped cross section having an open bottom. The ends of the first housing 17 are joined to the first principal surface 40A of the vibrating plate 41. The first housing 17 is made of, for example, a metal.
(19) The first housing 17 forms, together with the vibrating plate 41, the column-shaped first blower chamber 31 such that the first blower chamber 31 is interposed therebetween in a thickness direction of the vibrating plate 41. The vibrating plate 41 and the first housing 17 are formed such that the first blower chamber 31 has a radius a. In the embodiment, the radius a of the first blower chamber 31 is 6.1 mm.
(20) The first blower chamber 31 refers to a space that exists inwardly from opening portions 62 (more precisely, a space that exists inwardly from a ring formed by connecting all of the opening portions 62) when the first principal surface 40A of the vibrating plate 41 is viewed from the front. Therefore, a region that exists inwardly from the opening portions 62 at the first principal surface 40A of the vibrating plate 41 (more precisely, a region that exists inwardly from the ring that is formed by connecting all of the opening portions 62) forms a bottom surface of the first blower chamber 31.
(21) The first housing 17 includes a disc-shaped first top plate portion 18 opposing the first principal surface 40A of the vibrating plate 41 and the disc-shaped first side wall portion 19 that is connected to the first top plate portion 18. A portion of the first top plate portion 18 forms a top surface of the first blower chamber 31.
(22) The first top plate portion 18 includes a column-shaped first vent hole 24 that allows a central portion of the first blower chamber 31 to communicate with the outside of the first blower chamber 31. The central portion of the first blower chamber 31 is a portion that overlaps the piezoelectric element 42 when the second principal surface 40B of the vibrating plate 41 is viewed from the front. In the present embodiment, the diameter of the first vent hole 24 is 0.6 mm. The first top plate portion 18 is provided with the first valve 80 that prevents gas from flowing into the first blower chamber 31 from the outside of the first blower chamber 31 through the first vent hole 24.
(23) The second housing 117 has a C-shaped cross section having an open top. The ends of the second housing 117 are joined to the second principal surface 40B of the vibrating plate 41. The second housing 117 is made of, for example, a metal.
(24) The second housing 117 forms, together with the actuator 50, the column-shaped second blower chamber 131 such that the second blower chamber 131 is interposed therebetween in the thickness direction of the vibrating plate 41. The vibrating plate 41 and the second housing 117 are formed such that the second blower chamber 131 has a radius a. In the embodiment, the radius a of the second blower chamber 131 is also 6.1 mm.
(25) The second blower chamber 131 refers to a space that exists inwardly from the opening portions 62 (more precisely, a space that exists inwardly from the ring formed by connecting all of the opening portions 62) when the second principal surface 40B of the vibrating plate 41 is viewed from the front. Therefore, a region that exists inwardly from the opening portions 62 at a second-vent-hole-124-side surface of the actuator 50 (more precisely, a region that exists inwardly from the ring that is formed by connecting all of the opening portions 62) forms a bottom surface of the second blower chamber 131.
(26) The second housing 117 includes a disc-shaped second top plate portion 118 opposing the second principal surface 40B of the vibrating plate 41 and the disc-shaped second side wall portion 119 that is connected to the second top plate portion 118. A portion of the second top plate portion 118 forms a top surface of the second blower chamber 131.
(27) The second top plate portion 118 includes a column-shaped second vent hole 124 that allows a central portion of the second blower chamber 131 to communicate with the outside of the second blower chamber 131. The central portion of the second blower chamber 131 is a portion that overlaps the piezoelectric element 42 when the second principal surface 40B of the vibrating plate 41 is viewed from the front. In the present embodiment, the diameter of the second vent hole 124 is 0.6 mm. The second top plate portion 118 is provided with the second valve 180 that prevents gas from flowing into the second blower chamber 131 from the outside of the second blower chamber 131 through the second vent hole 124.
(28) Here, as shown in
(29) As shown in
(30) As shown in
(31) In this embodiment, the piezoelectric element 42 corresponds to a driving member according to the present disclosure. The vibrating portion 141 and the connecting portion 142 correspond to a vibrating portion according to the present disclosure. The first side wall portion 19, the third side wall portion 143, and the second side wall portion 119 correspond to a side wall portion according to the present disclosure.
(32) The flow of air when the piezoelectric blower 100 operates is described below.
(33)
(34)
(35) Here, in
(36) A pressure change distribution u(r) shown in
(37)
(38) The relationship between radius aresonant frequency f and pressure amplitude in the second blower chamber 131 is substantially the same as the relationship between radius aresonant frequency f and pressure amplitude in the first blower chamber 31. This is shown in
(39) When, in the state shown in
(40) At the same time, due to pressure variations in the first blower chamber 31 resulting from the bending vibration of the vibrating plate 41, the first top plate portion 18 undergoes concentric bending vibration in the first-order mode as the vibrating plate 41 undergoes the bending vibration (in this embodiment, such that the vibration phase lags by 180 degrees).
(41) Due to pressure variations in the second blower chamber 131 resulting from the bending vibration of the vibrating plate 41, the second top plate portion 118 also undergoes concentric bending vibration in the first-order mode as the vibrating plate 41 undergoes the bending vibration (in this embodiment, such that the vibration phase lags by 180 degrees).
(42) By this, as shown in
(43) The radius a of the first blower chamber 31 and the resonant frequency f of the vibrating plate 41 satisfy the relationship of 0.8(k.sub.0c)/(2)af1.2(k.sub.0c)/(2). In addition, the radius a of the second blower chamber 131 and the resonant frequency f of the vibrating plate 41 also satisfy the relationship of 0.8(k.sub.0c)/(2)af1.2(k.sub.0c)/(2).
(44) In the embodiment, the resonant frequency f is 21 kHz. The acoustic velocity c of air is 340 m/s. k.sub.0 is 2.40. The Bessel function of the first kind J.sub.0(x) is expressed by the following numerical formula.
(45)
(46) The pressure change distribution u(r) of the points at the first blower chamber 31 is expressed by the formula u(r)=J.sub.0(k.sub.0r/a), where the distance from the central axis C of the first blower chamber 31 is r. In addition, the pressure change distribution u(r) of the points at the second blower chamber 131 is also expressed by the formula u(r)=J.sub.0(k.sub.0r/a).
(47) As shown in
(48) At this time, since the pressure at the central portion of the first blower chamber 31 is reduced, the first valve 80 is closed, and air that exists outside of the housing 90 and air in the second blower chamber 131 are sucked into the first blower chamber 31 through the third vent holes 162 and the opening portions 62. At this time, since the pressure at the central portion of the second blower chamber 131 is increased, the second valve 180 opens, and air in the central portion of the second blower chamber 131 is discharged to the outside of the second housing 117 through the second vent hole 124.
(49) As shown in
(50) At this time, since the pressure at the central portion of the first blower chamber 31 is increased, the first valve 80 opens, and air in the central portion of the first blower chamber 31 is discharged to the outside of the first housing 17 through the first vent hole 24. In addition, at this time, since the pressure at the central portion of the second blower chamber 131 is reduced, the second valve 180 is closed, and air that exists outside of the housing 90 and air in the first blower chamber 31 are sucked into the second blower chamber 131 through the third vent holes 162 and the opening portions 62.
(51) In the operation of the piezoelectric blower 100 above, as shown in
(52) Therefore, when the actuator 50 is driven, air at the outer periphery of the first blower chamber 31 and air at the outer periphery of the second blower chamber 131 move through the opening portions 62. Consequently, when the actuator 50 is driven, the pressure at the outer periphery of the first blower chamber 31 and the pressure at the outer periphery of the second blower chamber 131 cancel out through the opening portions 62, and are atmospheric pressure (node) at all times.
(53) Therefore, even if the outer periphery of the first blower chamber 31 and the outer periphery of the second blower chamber 131 communicate with the outside of the housing 90 through the large opening portions 62 and the third vent holes 162, the piezoelectric blower 100 can prevent a reduction in discharge pressure and discharge flow rate.
(54) The piezoelectric blower 100 is such that, when driving the actuator 50, air in the first blower chamber 31 sucked from the third vent holes 162 is discharged to the outside of the first housing 17 through the first vent hole 24, and air in the second blower chamber 131 sucked from the third vent holes 162 is discharged to the outside of the second housing 117 through the second vent hole 124.
(55) Therefore, the piezoelectric blower 100 having this structure can make the discharge flow rate per power consumption considerably higher than the discharge flow rate of the pump that is described in Patent Document 1 and that performs discharge from one vent hole (outlet).
(56) The piezoelectric blower 100 is capable of intercepting ultrasonic waves emitted from the piezoelectric element 42 by using the second housing 117.
(57) The plurality of third vent holes 162 are provided in the third side wall portion 143.
(58) Therefore, the shortest distance from the outer periphery of the first blower chamber 31 to each third vent hole 162 and the shortest distance from the outer periphery of the second blower chamber 131 to each third vent hole 162 are substantially equal to each other. Consequently, when the actuator 50 is driven, the pressure at the outer periphery of the first blower chamber 31 and the pressure at the outer periphery of the second blower chamber 131 both tend to become stable at atmospheric pressure (node).
(59) The piezoelectric blower 100 includes the first valve 80 and the second valve 180. Therefore, as shown in
(60) In the piezoelectric blower 100, since the first top plate portion 18 and the second top plate portion 118 vibrate as the vibrating plate 41 vibrates, it is possible to essentially increase vibration amplitude. Therefore, the piezoelectric blower 100 according to the present embodiment can further increase discharge pressure and discharge flow rate.
(61) When af=(k.sub.0c)/(2), a node F of vibration of the vibrating plate 41 coincides with a node of pressure vibration of the first blower chamber 31 and a node of pressure vibration of the second blower chamber 131, and pressure resonance occurs.
(62) Further, even when the relationship of 0.8(k.sub.0c)/(2)af1.2(k.sub.0c)/(2) is satisfied, the node F of vibration of the vibrating plate 41 substantially coincides with the node of pressure vibration of the first blower chamber 31 and the node of pressure vibration of the second blower chamber 131.
(63) The piezoelectric blower 100 is used for sucking a liquid having high viscosity, such as nasal mucus or phlegm. In order to prevent breakage of the piezoelectric element resulting from driving the piezoelectric element for a long time, the vibration speed of the piezoelectric element needs to be less than or equal to 2 m/s.
(64) In order to suck nasal mucus or phlegm, a pressure of 20 kPa or greater is required. Therefore, the piezoelectric blower 100 requires a pressure amplitude of 10 kPa/(m/s) or greater. As shown in
(65) Therefore, when the relationship of 0.8(k.sub.0c)/(2)af1.2(k.sub.0c)/(2) is satisfied, the piezoelectric blower 100 can realize high discharge pressure and high discharge flow rate from both the first vent hole 24 and the second vent hole 124.
(66) As shown in
(67) As shown by the dotted line and the solid line in
(68) Therefore, the number of zero crossover points of the vibration displacement of the vibrating plate 41 is equal to the number of zero crossover points of the pressure change at the first blower chamber 31 and the number of zero crossover points of the pressure change at the second blower chamber 131.
(69) Therefore, in the piezoelectric blower 100, when the vibrating plate 41 vibrates, a distribution of the displacements of the respective points on the vibrating plate 41 becomes a distribution that is close to the distribution of the pressure changes at the respective points at the first blower chamber 31 and the distribution of the pressure changes at the respective points at the second blower chamber 131.
(70) Therefore, the piezoelectric blower 100 is capable of transmitting vibration energy of the vibrating plate 41 to air in the first blower chamber 31 and the second blower chamber 131 almost without loss of the vibration energy of the vibrating plate 41. Consequently, the piezoelectric blower 100 can realize high discharge pressure and high discharge flow rate.
Other Embodiments
(71) Although, in the above-described embodiment, air is used as the fluid, the present disclosure is not limited thereto. The fluid may be a gas other than air.
(72) Although, in the above-described embodiment, the vibrating plate 41 is made of SUS, the present disclosure is not limited thereto. The vibrating plate 41 may be made of other materials, such as aluminum, titanium, magnesium, or copper.
(73) Although, in the above-described embodiment, the piezoelectric element 42 is provided as the driving source of the blower, the present disclosure is not limited thereto. For example, the piezoelectric element 42 may be formed as a blower that performs pumping by electromagnetic driving.
(74) Although, in the above-described embodiment, the piezoelectric element 42 is made of a lead zirconate titanate ceramic, the present disclosure is not limited thereto. For example, the piezoelectric element 42 may be made of piezoelectric materials of a non-lead piezoelectric ceramic such as a potassium sodium niobate based ceramic or an alkali niobate based ceramic.
(75) Although, in the above-described embodiment, a unimorph piezoelectric vibrator is used, the present disclosure is not limited thereto. A bimorph piezoelectric vibrator in which the piezoelectric element 42 is attached to each of two surfaces of the vibrating plate 41 may be used.
(76) Although, in the above-described embodiment, the disc-shaped piezoelectric element 42, the disc-shaped vibrating plate 41, and the disc-shaped first top plate portion 18, and the disc-shaped second top plate portion 118 are used, the present disclosure is not limited thereto. For example, they may have a rectangular or a polygonal shape.
(77) Although, in the above-described embodiment, the vibrating plate 41 undergoes concentric bending vibration, the present disclosure is not limited thereto. For implementation, the vibrating plate 41 may undergo bending vibration of a form other than concentric bending vibration.
(78) Although, in the above-described embodiment, the first top plate portion 18 and the second top plate portion 118 undergo concentric bending vibration as the vibrating plate 41 undergoes bending vibration, the present disclosure is not limited thereto. For implementation, only the vibrating plate 41 may undergo bending vibration, that is, the first top plate portion 18 and the second top plate portion 118 need not undergo bending vibration as the vibrating plate 41 undergoes bending vibration.
(79) Although, in the above-described embodiment, k.sub.0 is 2.40 or 5.52, the present disclosure is not limited thereto. k.sub.0 may be any value that satisfies the relationship of J.sub.0(k.sub.0)=0, such as 8.65, 11.79, or 14.93.
(80) Although, in the above-described embodiment, the piezoelectric element 42 is joined to the second principal surface 40B of the vibrating plate 41 at the side of the second blower chamber 131, the present disclosure is not limited thereto. For implementation, for example, the piezoelectric element 42 may be joined to the first principal surface 40A of the vibrating plate 41 at a side of the first blower chamber 31, or two piezoelectric elements 42 may be joined to the first and second principal surfaces 40A and 40B of the vibrating plate 41.
(81) In this case, the first housing 17 and the second housing 117 form, together with an actuator including at least one piezoelectric element 42 and the vibrating plate 41, a first blower chamber and a second blower chamber such that the first blower chamber is interposed between the first housing 17 and the actuator in the thickness direction of the vibrating plate 41 and such that the second blower chamber is interposed between the second housing 117 and the actuator in the thickness direction of the vibrating plate 41.
(82) Although, in the above-described embodiment, the vibrating plate of the piezoelectric blower undergoes bending vibration at the first-order mode frequency or the third-order mode frequency, the present disclosure is not limited thereto. For implementation, the vibrating plate may undergo bending vibration in a vibration mode of a third-order mode or a higher odd-order mode producing a plurality of vibration antinodes.
(83) Although, in the above-described embodiment, the first blower chamber 31 and the second blower chamber 131 are column-shaped, the present disclosure is not limited thereto. For implementation, the blower chambers may have the shape of a regular prism. In this case, instead of using the radius a of each blower chamber, the shortest distance a from the central axis of each blower chamber to the outer periphery of each blower chamber is used.
(84) Although, in the above-described embodiment, the first top plate portion 18 of the first housing 17 includes one circular first vent hole 24, and the second top plate portion 118 of the second housing 117 also includes one circular second vent hole 124, the present disclosure is not limited thereto. For implementation, for example, as shown in
(85) Although, in the above-described embodiment, the first valve 80 is provided at the first vent hole 24, and the second valve 180 is provided at the second vent hole 124, the present disclosure is not limited thereto. For implementation, the valve need not be provided.
(86) If the valve is not provided, when, as shown in
(87) Although, in the above-described embodiment, the third vent holes 162 are provided in the third side wall portion 143, the present disclosure is not limited thereto. For implementation, the third vent holes 162 may be formed in the first side wall portion 19 or the second side wall portion 119.
(88) Lastly, the description of the above-described embodiment is to be considered in all respects only as illustrative and not restrictive. The scope of the present disclosure is indicated by the claims rather than by the above-described embodiment. Further, all changes which come within the meaning and range of equivalency of the claims are to be embraced within the scope of the present disclosure. a radius C central axis F node 17 first housing 18 first top plate portion 19 first side wall portion 24 first vent hole 31 first blower chamber 40A first principal surface 40B second principal surface 41 vibrating plate 42 piezoelectric element 50 actuator 62 opening portion 80 first valve 90 housing 100 piezoelectric blower 117 second housing 118 second top plate portion 119 second side wall portion 124 second vent hole 131 second blower chamber 141 vibrating portion 142 connecting portion 143 third side wall portion 162 third vent hole 180 second valve 517 housing 524 vent hole 617 housing 624 vent hole 717 housing 724 vent hole 817 housing 824 vent hole