Stirring device for treatment of photoresist settlement and photoresist tank

Abstract

Involved is the technical field of a stirring device, specifically a stirring device for treatment of photoresist settlement and a photoresist tank. The stirring device includes a sleeve shaft, an inner telescopic shaft, a stirring component, and a rotary rod, wherein, the rotary rod is mounted on an upper end of the sleeve shaft for driving the sleeve shaft to rotate; the stirring component is arranged on a lower end of the sleeve shaft and rotates with the sleeve shaft; and the inner telescopic shaft is arranged inside of the sleeve shaft and connected to the stirring component for controlling opening and closing of the stirring component. Stirring plates approach a bottom portion of the photoresist tank, at which moment manual control is adopted to control stirring of the stirring device upward from the bottom gradually, so as to achieve the objective of homogeneous component of the photoresist. The photoresist is stirred to be more homogeneous. A lot of manpower and material resources are saved. The stirring device enables high stirring speed and high safeness.

Claims

1. A stirring device, comprising: a sleeve shaft (13), an inner telescopic shaft (12), a stirring component, and a rotary rod (11), wherein the rotary rod (11) is mounted on an upper end of the sleeve shaft (13) for driving the sleeve shaft (13) to rotate; wherein the stirring component is mounted on a lower end of the sleeve shaft (13) and rotates with the sleeve shaft (13); and wherein the inner telescopic shaft (12) is mounted inside of the sleeve shaft (13) and connected to the stirring component for controlling opening and closing of the stirring component; wherein the stirring component comprises two stirring plates, a sum of width of the two stirring plates (16) and a diameter of the inner telescopic shaft (12) is smaller than a diameter of the sleeve shaft (13), the two stirring plates (16) and the inner telescopic shaft (12) are received in the sleeve shaft (13) when folded to fit to the inner telescopic shaft (12) such that the inner telescopic shaft (12) has a capability to be pulled out directly together with the stirring plates (16) from the sleeve shaft (13).

2. The stirring device according to claim 1, wherein the two stirring plates (16) which have a same structure and are symmetrically arranged, wherein the stirring plate (16) has one end in a semicircle shape and another end in a vertical shape; and wherein a groove (161) is provided on a side of an upper portion of the stirring plate (16), and is connected to the semicircle shape.

3. The stirring device according to claim 2, wherein the two stirring plates (16) show a horizontal straight line when they are pushed open.

4. The stirring device according to claim 1, wherein the sleeve shaft (13) is hollow cylindrical.

5. The stirring device according to claim 1, wherein openings are provided on two sides of a lower portion of the sleeve shaft (13) for the stirring component to be opened and closed, and torque transmission is formed between the stirring component and the openings during rotation.

6. The stirring device according to claim 5, wherein a movable coupling (14) is mounted to a lower end of the inner telescopic shaft (12); and wherein two connecting plates (15) are mounted in the openings, upper ends of the two connecting plates (15) being connected to the movable coupling (14) respectively, and lower ends of the two connecting plates (15) being connected to the stirring component respectively.

7. The stirring device according to claim 6, wherein the two connecting plates (15) are arranged in an inclined way.

8. The stirring device according to claim 6, wherein when the two stirring plates (16) are folded, the two stirring plates (16) and the two connecting plates (15) are arranged side-by-side along a direction perpendicular to a length direction of the two stirring plates (16), one stirring plate (16) is located at a first side of the two connecting plates (15), the other stirring plate (16) is located at a second side of the two connecting plates (15) opposite to the first side.

9. The stirring device according to claim 1, wherein height of the sleeve shaft (13) is smaller than that of the inner telescopic shaft (12).

10. The stirring device according to claim 1, wherein the rotary rod (11) is in a shape of transverse L.

11. The stirring device according to claim 1, wherein when the two stirring plates (16) are open, an end portion of the inner telescopic shaft (12) away from the rotary rod (11) is spaced apart from the two stirring plates (16).

12. A tank comprising an exit (22) constructed on a tank body (20), wherein a round mouth (21) for entry and exit of a stirring device is also constructed on the tank body (20); wherein the stirring device comprises a sleeve shaft (13), an inner telescopic shaft (12), a stirring component, and a rotary rod (11); and wherein the rotary rod (11) is mounted on an upper end of the sleeve shaft (13) for driving the sleeve shaft (13) to rotate; the stirring component is mounted on a lower end of the sleeve shaft (13) and rotates with the sleeve shaft (13); and the inner telescopic shaft (12) is mounted inside of the sleeve shaft (13) and connected to the stirring component for controlling opening and closing of the stirring component; wherein a sum of width of the two stirring plates (16) and a diameter of the inner telescopic shaft (12) is smaller than a diameter of the sleeve shaft (13), the two stirring plates (16) and the inner telescopic shaft (12) are received in the sleeve shaft (13) when folded to fit to the inner telescopic shaft (12) such that the inner telescopic shaft (12) has a capability to be pulled out directly together with the stirring plates (16) from tank when the sleeve shaft (13) is not pulled out.

13. The tank according to claim 12, wherein the stirring component comprises two stirring plates (16) which have a same structure and are symmetrically arranged; wherein one end of the stirring plate (16) is in a semicircle shape and another end thereof is in a vertical shape; and wherein a groove (161) is provided on a side of an upper portion of the stirring plate (16), and is connected to the semicircle shape.

14. The tank according to claim 13, wherein the two stirring plates (16) show a horizontal straight line when they are pushed open.

15. The tank according to claim 12, wherein the sleeve shaft (13) is hollow and cylindrical.

16. The tank according to claim 12, wherein openings are provided on two sides of a lower portion of the sleeve shaft (13) for the stirring component to be opened and closed, and torque transmission is formed between the stirring component and the openings during rotation.

17. The tank according to claim 16, wherein a movable coupling (14) is mounted on a lower end of the inner telescopic shaft (12); and wherein two connecting plates (15) are mounted in the openings, upper ends of the two connecting plates (15) being connected to the movable coupling (14) respectively, and lower ends of the two connecting plates (15) being connected to the stirring component respectively.

18. The tank according to claim 17, wherein the two connecting plates (15) are arranged in an inclined way.

19. The stirring device according to claim 12, wherein when the two stirring plates (16) are folded, the two stirring plates (16) and the two connecting plates (15) are arranged side-by-side along a direction perpendicular to a length direction of the two stirring plates (16), one stirring plate (16) is located at a first side of the two connecting plates (15), the other stirring plate (16) is located at a second side of the two connecting plates (15) opposite to the first side.

20. The stirring device according to claim 12, wherein when the two stirring plates (16) are open, an end portion of the inner telescopic shaft (12) away from the rotary rod (11) is spaced apart from the two stirring plates (16).

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The present disclosure will be described in a more detailed way below based on embodiments and with reference to the accompanying drawings, in which:

(2) FIG. 1 is a structural diagram of a stirring device for treatment of photoresist settlement in one embodiment of the present disclosure;

(3) FIG. 2 is a structural diagram of a stirring plate of a stirring device for treatment of photoresist settlement in one embodiment of the present disclosure;

(4) FIG. 3 is a structural diagram of a tank body of a photoresist tank in one embodiment of the present disclosure; and

(5) FIG. 4 is a structural diagram of a photoresist tank in one embodiment of the present disclosure.

DETAILED DESCRIPTION OF THE EMBODIMENTS

(6) In the following, the present disclosure will be further illustrated in combination with the drawings.

(7) FIG. 1 schematically shows a stirring device for treatment of photoresist settlement, comprising:

(8) a sleeve shaft 13, an inner telescopic shaft 12, a stirring component, and a rotary rod 11,

(9) wherein the rotary rod 11 is mounted on an upper end of the sleeve shaft 13 for driving the sleeve shaft 13 to rotate; the stirring component is mounted on a lower end of the sleeve shaft 13 and rotates with the sleeve shaft 13; and the inner telescopic shaft 12 is arranged inside of the sleeve shaft 13 and connected to the stirring component for controlling opening and closing of the stirring component. The stirring device brings about excellent stirring effects, has a simple structure, enables convenient and efficient operations, and improves the safety performance.

(10) As shown in FIG. 1, in one preferred embodiment, the sleeve shaft 13 is in a cask shape, which is convenient for mounting and operations. The sleeve shaft 13 is made of a metal or hard plastic material, which is for the convenience of mounting and operations.

(11) As shown in FIG. 1, in one preferred embodiment, height of the sleeve shaft 13 is smaller than that of the inner telescopic shaft 12, which is convenient for taking out the inner telescopic shaft 12 and the stirring component. Thus the maintenance and the package thereof are convenient and efficient.

(12) As shown in FIG. 1, in one preferred embodiment, the rotary rod 11 is in a shape of transverse L. Such a rotary rod is convenient to hold in hand and its join force is good and thus can provide a driving force for the sleeve shaft 13 in a better way. The rotary rod 11 is welded on one side of the upper end of the sleeve shaft 13 with fastness and thus is difficult to destroy.

(13) Furthermore, the rotary rod 11 can be further connected to a mechanical arm. Labor force can be saved with the rotation of the rotary rod 11 driven by the mechanical arm.

(14) As shown in FIG. 1, in one embodiment, furthermore, openings (not shown in the figure) are provided on two sides of the lower end of the sleeve shaft 13. This enables the stirring component to be opened and closed, and thus forms torque transmission during rotation thereof, so as to achieve better stirring effects.

(15) As shown in FIG. 1 and FIG. 2, in one embodiment, the stirring component comprises two stirring plates 16 having a same structure and being symmetrically mounted. One end of the stirring plate 16 is in a semicircle shape and another end thereof is in a vertical shape. A groove 161 is provided on a side of an upper portion of the stirring plate 16, and is connected to the semicircle shape. This facilitates flexible folding and unfolding of the two stirring plates 16, and will not cause a jam phenomenon.

(16) Furthermore, a sum of width of the two stirring plates 16 and a diameter of the inner telescopic shaft 12 is smaller than a diameter of the sleeve shaft 13. The two stirring plates 16 and the inner telescopic shaft 12 can be received in the sleeve shaft 13. This is convenient for disassembly and maintenance. For example, the stirring plates 16 can be folded to fit to the inner telescopic shaft 12, such that the inner telescopic shaft 12 can be pulled out directly together with the stirring plates 16 under the circumstance of not pulling out the sleeve shaft 13. This is convenient for use, maintenance, and storage.

(17) Furthermore, two connecting plates 15 are arranged in an inclined way. The two stirring plates 16 are unfolded by the two connecting plates 15. The two stirring plates 16 show a horizontal straight line when being unfolded. The two connecting plates 15 and the two stirring plates 16 show a triangle shape. A support force is more concentrated and the stability is better. The stirring plates 16 of different sizes can be selected based on actual requirements.

(18) As shown in FIG. 1, in one preferred embodiment, a movable coupling 14 is arranged on a lower end of the inner telescopic shaft 12. The two connecting plates 15 are arranged in the openings. Upper ends of the two connecting plates 15 are connected to the movable coupling 14, respectively, and lower ends of the two connecting plates 15 are connected to the stirring component, respectively. This facilitates folding and will not cause a jam phenomenon. An axle ring design is adopted between the stirring plates 16 and the inner telescopic shaft 12. This design facilitates the folding and unfolding of the stirring plates 16.

(19) In one preferred embodiment, an electronic timer can be also mounted on the rotary rod 11, to facilitate checking of the stirring time, and a preferred stirring duration lasts for 3-5 minutes. This can improve the work efficiency.

(20) FIG. 3 and FIG. 4 schematically show the photoresist tank, comprising a photoresist outlet 22 constructed on a tank body 20, on which a round opening 21 is further constructed for entry and exit of the stirring device for the treatment of photoresist settlement. A total length of the two stirring plates 16 in the stirring device is smaller than a diameter of the tank body 20.

(21) In specific use, the round opening 21 of the photoresist tank is opened; the stirring device is arranged in the photoresist tank; the inner telescopic shaft 12 is pressed downward to open the two stirring plates 16; the rotary rod 11 drives the sleeve shaft 13 and the stirring plates 16 to rotate; and the stirring plates 16 approach a bottom portion of the photoresist tank. At this moment, manual control is adopted to control stirring of the stirring device upward from the bottom gradually, so as to achieve the objective of homogeneous component of the photoresist. The stirring of the photoresist is thus more homogeneous. The stirring device is convenient and efficient for use, saves a lot of manpower and material resources, and is of rapid stirring speed and high safeness.

(22) The present disclosure is described by referring to the preferred embodiments. Under the condition of not departing from the scope of the present disclosure, any skilled person can make any improvements and replace its components with equivalents. Particularly, as long as there is no structural conflict, all technical features mentioned in all the embodiments can be combined in any manners. The present disclosure is not limited to the specific embodiments disclosed herein but includes all the technical solutions falling within the scope of the claims.