System for monitoring fan filter units in clean rooms

Abstract

A system for monitoring FFUs in each of clean rooms includes a first exhaust fan disposed above the clean rooms; lines each having one end connected to the FFUs in each clean room and the other end connected to a gateway; a personal computer communicating with the gateway; gas removal units disposed under the clean rooms and connected to a second exhaust fan; an emergency damper connected to the second exhaust fan; a CO.sub.2 cylinders room disposed besides the emergency damper; and gas detectors, each communicating with the FFUs via the line, each gas detector having a connector connected to the gateway.

Claims

1. A system for monitoring a plurality of fan filter units (FFUs) in each of a plurality of clean rooms, comprising: a first exhaust fan disposed above the clean rooms; a plurality of lines each having one end connected to the FFUs in each clean room and the other end connected to a gateway; a personal computer communicating with the gateway; a plurality of gas removal units disposed under the clean rooms and connected to a second exhaust fan; an emergency damper connected to the second exhaust fan; a CO.sub.2 cylinders room disposed besides the emergency damper; and a plurality of gas detectors, each communicating with the FFUs via the line, each gas detector including a connector configured to connect to the gateway for communicating with the personal computer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] FIG. 1 schematically depicts a monitor system according to the invention;

[0007] FIG. 2 schematically depicts the FFUs; and

[0008] FIG. 3 schematically depicts an embodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

[0009] Referring to FIGS. 1 to 3, a monitor system 1 in accordance with the invention comprises a plurality of fan filter units (FFUs) U disposed in each of two clean rooms A; a first exhaust fan E1 disposed above the clean rooms A; two lines P each having one end connected to each FFU U in either clean room A or B, and the other end connected to a gateway GW; a personal computer PC communicating with the gateway GW; a plurality of gas removal units G disposed under the clean rooms A and connected to a second exhaust fan E2; an emergency damper D connected to the second exhaust fan E2; a CO.sub.2 cylinders room C disposed besides the emergency damper D; and a plurality of gas detectors M each communicating with the FFUs U via the line P, the gas detector M including a connector M1 configured to connect to the gateway GW for communicating with the personal computer PC. A Human Machine Interface (HMI) is installed in the personal computer PC. The monitor system 1 is connected to MODBUS TCP/IP and MODBUS RTU.

[0010] While the invention has been described in terms of preferred embodiments, those skilled in the art will recognize that the invention can be practiced with modifications within the spirit and scope of the appended claims.