Manufacturing method of touch panel

Abstract

A manufacturing method of a touch panel includes the steps of providing a substrate, forming a first conductive film on the substrate, forming a first mask on the first conductive film, etching the first conductive film to form electrode portions and lower intersect portions of the touch panel, forming an insulating film made of a negative resist on the first conductive film, and forming a contact hole above the electrode portion by removing the insulating film. The steps further include forming a second conductive film on the insulating film, forming a second mask on the second conductive film, etching the second conductive film to form an upper intersect portion connected between two adjacent electrode portions via the contact hole and intersecting with the lower intersect portion, and forming protective film on the second conductive film.

Claims

1. A manufacturing method of a touch panel comprising: providing a substrate; forming a first conductive film on the substrate; forming a first mask on the first conductive film; etching the first conductive film to form a plurality of first electrodes and a plurality of second electrodes; removing the first mask; forming an insulating film made of a negative resist on the first conductive film; removing portions of the insulating film on the plurality of second electrodes to form contact portions in the insulating film, each of the contact portions exposing a part of a corresponding one of the second electrodes; forming a second conductive film on the insulating film and in the contact portions; forming a second mask on the second conductive film; etching the second conductive film to form a plurality of intersect electrodes on the insulating film and in the contact portions; removing the second mask; and forming a protective film on the plurality of intersect electrodes and in at least one of the contact portions, wherein each of the second electrodes includes a first region exposed from the insulating film at a corresponding one of the contact portions and a second region covered with the insulating film, the second region is larger than the first region, each adjacent two of the plurality of first electrodes are connected through a connecting portion which is made of the first conductive film, each adjacent two of the plurality of second electrodes are separated by a gap, the connecting portion extends across the gap, and each of the intersect electrodes intersects the connecting portion and connects a corresponding two of the plurality of second electrodes which are separated by the gap.

2. The manufacturing method of the touch panel according to claim 1, wherein the first conductive film is made of a transparent conductive material.

3. The manufacturing method of the touch panel according to claim 1, wherein the first mask is made of a positive resist.

4. The manufacturing method of the touch panel according to claim 1, wherein the second mask is made of a positive resist.

5. A manufacturing method of a touch panel comprising: providing a substrate; forming a first conductive film on the substrate; forming a first mask on the first conductive film; etching the first conductive film to form a plurality of separate electrode portions of an X electrode, and a plurality of pairs of lineally connected electrode portions and a plurality of connecting portions of Y electrodes; removing the first mask; forming an insulating film made of a negative resist on the first conductive film; removing portions of the insulating film on the plurality of separate electrode portions of the X electrode to form contact portions in the insulating film, each of the contact portions exposing a part of the X electrode; forming a second conductive film on the insulating film and in the contact portions; forming a second mask on the second conductive film; etching the second conductive film to form a plurality of intersect portions of the X electrode, each of which connects a corresponding adjacent two of the contact portions; removing the second mask; forming a protective film on the plurality of intersect portions of the X electrode and in at least one of the contact portions, wherein the X electrode includes a first region exposed from the insulating film at a corresponding one of the contact portions and a second region covered with the insulating film, the second region is larger than the first region, and each of the plurality of intersect portions intersects with a corresponding one of the plurality of connecting portions of the Y electrodes.

6. The manufacturing method of the touch panel according to claim 5, wherein the first conductive film is made of a transparent conductive material.

7. The manufacturing method of the touch panel according to claim 5, wherein the first mask is made of a positive resist.

8. The manufacturing method of the touch panel according to claim 5, wherein the second mask is made of a positive resist.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) In the accompanying drawings:

(2) FIG. 1 is a plan diagram illustrating electrode patterns of a touch panel Incorporated in a display device with a touch panel according to a first embodiment of the present invention;

(3) FIG. 2 is an enlarged plan diagram of a part of FIG. 1;

(4) FIG. 3 is a sectional diagram illustrating a sectional structure cut on the line III-III of FIG. 1;

(5) FIG. 4 is a sectional diagram illustrating a sectional structure cut on the line IV-IV of FIG. 1;

(6) FIG. 5 is a block diagram illustrating a schematic configuration of the display device with the touch panel according to the first embodiment of the present invention;

(7) FIG. 6 is a plan diagram illustrating electrode patterns of a touch panel incorporated in a display device with a touch panel according to a second embodiment of the present invention;

(8) FIG. 7 is a sectional diagram illustrating a sectional structure cut on the line VII-VII of FIG. 6;

(9) FIG. 8 is a sectional diagram illustrating a sectional structure cut on the line VIII-VIII of FIG. 6;

(10) FIG. 9 is a plan diagram illustrating electrode patterns of a conventional capacitance coupling type touch panel;

(11) FIG. 10 is a sectional diagram illustrating a sectional structure cut on the line X-X of FIG. 9; and

(12) FIG. 11 is a sectional diagram illustrating a sectional structure cut on the line XI-XI of FIG. 9.

DETAILED DESCRIPTION OF THE INVENTION

(13) Hereinafter, referring to the drawings, embodiments of the present invention are described in detail. Throughout the drawings illustrative of the embodiments of the present invention, similar functions are denoted by similar reference numerals and symbols, and repeated description thereof is avoided.

First Embodiment

(14) A first embodiment of the present invention is described by way of example in which the present invention is applied to a display device with a touch panel, which includes the touch panel on a display panel such as a liquid crystal display panel.

(15) FIGS. 1 to 5 illustrate the display device with the touch panel according to the first embodiment of the present invention:

(16) FIG. 1 is a plan diagram illustrating electrode patterns of a touch panel incorporated in the display device with the touch panel;

(17) FIG. 2 is an enlarged plan diagram of a part of FIG. 1;

(18) FIG. 3 is a sectional diagram illustrating a sectional structure cut on the line of FIG. 1;

(19) FIG. 4 is a sectional diagram illustrating a sectional structure cut on the line IV-IV of FIG. 1; and

(20) FIG. 5 is a block diagram illustrating a schematic configuration of the display device with the touch panel.

(21) In FIG. 5, a touch panel 20 illustrates a sectional structure cut on the line V-V of FIG. 1.

(22) As illustrated in FIG. 5, the display device with the touch panel of the first embodiment includes a liquid crystal display panel 30, the capacitance coupling type touch panel 20 disposed on a surface of an observer side of the liquid crystal display panel 30, and a backlight 40 disposed below a surface opposed to the observer side of the liquid crystal display panel 30. For the liquid crystal display panel 30, for example, a liquid crystal display panel of an in-plane switching (IPS) type, a twisted nematic (TN) type or a vertical alignment (VA) type is used.

(23) As illustrated in FIGS. 1 to 4, the touch panel 20 includes a plurality of electrodes 1X extending in a first direction (e.g., X direction) and being disposed in parallel at predetermined array pitches in a second direction (e.g., Y direction) intersecting the first direction, and a plurality of electrodes 2Y intersecting the electrodes 1X, extending in the second direction, and being disposed in parallel at predetermined array pitches in the first direction.

(24) The plurality of electrodes 2Y are each formed with an electrode pattern in which a plurality of first portions 2a and a plurality of second portions 2b wider than the first portions 2a are alternately arranged in the second direction. The plurality of electrodes 2Y are each disposed on a surface of an observer side of a substrate 11 to be covered with an insulating film 12 formed thereon. For the substrate 11, a transparent insulating substrate such as glass is used.

(25) The plurality of electrodes 1X are each formed with an electrode pattern in which a plurality of first portions 1a and a plurality of second portions 1b wider than the first portions 1a are alternately arranged in the first direction. Each of the first portions 1a of the plurality of electrodes 1X is formed on a conductive layer different from that of the electrode 2Y to intersect the first portion 2a of the electrode 2Y in a planar manner. Each of the second portions 1b of the plurality of electrodes 1X is formed on the same conductive layer as that of the electrode 2Y separately from the electrode 2Y. In this embodiment, the first portion 1a of the electrode 1X is formed above the electrode 2Y.

(26) Each of the second portions 1b of the plurality of electrodes 1X is covered with the insulating film 12 as in the case of the electrodes 2Y. Each of the first portions 1a of the plurality of electrodes 1X is disposed on the insulating film 12 to be covered with a protective layer 13 formed thereon.

(27) The first portion 1a of the electrode 1X intersects the first portion 2a of the electrode 2Y in a planar manner, and is electrically and mechanically connected to two adjacent second portions 1b sandwiching the first portion 2a via a contact hole 12a formed through the insulating film 12 which is an interlayer insulating film between the first portion 1a of the electrode 1X and the electrode 2Y.

(28) In other words, each of the plurality of electrodes 1X includes a first portion 1a formed on a conductive layer different from that of the electrode 2Y to intersect the electrode 2Y, and a second portion 1b formed on the same conductive layer as that of the electrode 2Y separately from the electrode 2Y. The first portion 1a of the electrode 1X is connected to the second portion 1b of the electrode 1X via the contact hole 12a formed through the insulating film 12 between the first portion 1a and the electrode 2Y.

(29) The second portion 2b of the electrode 2Y is disposed between the first portions 1a in the two adjacent electrodes 1X in a plan view. The second portion 1b of the electrode 1X is disposed between the first portions 2a in the two adjacent electrodes 2Y in a plan view.

(30) In other words, the electrode 2Y has a portion wider than that of a portion intersecting the electrode 1X between the electrode 2Y and the electrode 1X. The electrode 1X has a portion wider than that of a portion intersecting the electrode 2Y between the electrode 1X and the electrode 2Y.

(31) The electrodes 1X and 2Y are made of highly transmissive materials, for example, transparent conductive materials such as indium tin oxides (ITOs).

(32) FIG. 5 schematically illustrates capacities C1 and C3 between an observer's finger 50 and the electrode 1X and a capacity C2 between the observer's finger 50 and the electrode 2Y. The touch panel 20 of this embodiment detects a capacity difference of coupled capacities between the electrodes 1X and 2Y to detect touch position coordinates in a touch surface of the touch panel 20 touched by the observer's finger 50.

(33) Referring to FIGS. 1 to 4, a manufacturing method for the touch panel 20 of this embodiment is described.

(34) First, a first conductive film made of a transparent conductive material (e.g., ITO) is formed on the surface of the observer side of the substrate 11.

(35) A first mask far the electrode pattern is formed on the first conductive film by using, for example, a positive resist. Then, the first conductive film is etched by using the first mask as an etching mask to form the electrode 2Y and the second portion 1b of the electrode 1X.

(36) The first mask is removed, and the insulating film 12 made of, for example, a negative resist, is formed on the substrate 11 and on the electrode 2Y and the second portion 1b of the electrode 1X. In this step, the electrode 2Y and the second portion 1b of the electrode 1X are covered with the insulating film 12.

(37) The contact hole 12a is formed in a necessary part of the insulating film 12. A second conductive film made of a transparent conductive material (e.g., ITO) is formed on the insulating film 12 and in the contact hole 12a.

(38) A second mask for the electrode pattern is formed on the second conductive film by using, for example, a positive resist. Then, the second conductive film is etched by using the second mask as an etching mask to form the first portion 1a of the electrode 1X on the insulating film 12. In this step, the first portion 1a of the upper layer is electrically and mechanically connected to the second portion 1b of the lower layer via the contact hole 12a. The first portion 1a of the upper layer intersects the first portion 1a of the electrode 2Y of the lower layer.

(39) Next, the second mask is removed, and the protective film 13 made of, for example, a negative resist, is formed on the insulating film 12 and on the first portion 1a of the electrode 1X, thereby forming a structure illustrated in FIGS. 1 to 4. In this step, the first portion 1a of the electrode 1X is covered with the protective film 13.

(40) Formation of peripheral wiring line patterns can be inserted in an appropriate place among the steps.

(41) In a conventional capacitance coupling type touch panel, as illustrated in FIGS. 9 to 11, a plurality of electrodes 1X and a plurality of electrodes 2Y are formed on different conductive layers (lower and upper layers) via an insulating film 12. In the case of this electrode structure, distortion occurs in a protective film 13 formed on the insulating film 12 and the electrode 1X of the upper layer due to the electrode 1X of the upper layer, and optical path lengths are different between the lower and upper layers with respect to a reflected light. Thus, a color difference is generated between the electrode 2Y of the lower layer and the electrode 1X of the upper layer, making electrode patterns of the electrodes 1X and 2Y visible.

(42) On the other hand, in the capacitance coupling type touch panel 20 of this embodiment, as illustrated in FIGS. 1 to 4, the electrode 1X includes the first portion 1a formed on the layer different from that of the electrode 2Y to intersect the electrode 2Y, and the second portion 1b formed on the same layer as that of the electrode 2Y separately from the electrode 2Y. The first portion 1a is connected to the second portion 1b via the contact hole 12a formed through the insulating film 12 between the first portion 1a and the electrode 2Y.

(43) In the case of this electrode structure, the protective film 13 can be formed to be uniform, enabling suppression of distortion of the protective film 13 and visualization of the electrode patterns caused by a color difference due to the distortion of the protective film 13. As a result, deterioration of optical characteristics caused by visualization of the electrode patterns can be suppressed, and hence reduction in characteristics of the display device incorporating the touch panel 20 can be suppressed.

(44) Portions in which color differences are generated can be reduced to a minimum, in other words, to only the first portion 1a of the electrode 1X, and hence visualization of electrode patterns caused by a color difference generated due to an optical path difference can also be suppressed. As a result, deterioration of optical characteristics caused by visualization of the electrode patterns can be suppressed, and hence reduction in characteristics of the display device incorporating the touch panel 20 can be suppressed.

(45) When a defect occurs in the first portion 1a (bridge portion) formed on the upper layer, the defect can be repaired by re-executing the step of forming the first portion 1a, and deterioration of optical characteristics caused by visualization of the electrode patterns can be suppressed to improve processing performance.

Second Embodiment

(46) FIGS. 6 to 8 illustrate a display device with a touch panel according to a second embodiment of the present invention:

(47) FIG. 6 is a plan diagram illustrating electrode patterns of a touch panel incorporated in the display device with the touch panel;

(48) FIG. 7 is a sectional diagram illustrating a sectional structure cut on the line VII-VII of FIG. 6; and

(49) FIG. 8 is a sectional diagram illustrating a sectional structure cut on the line VIII-VIII of FIG. 6.

(50) The display device with the touch panel of the second embodiment is basically similar in configuration to that of the first embodiment, and is different as follows.

(51) In the first embodiment, as illustrated in FIGS. 1 to 4, the electrode 2Y and the second portion 1b of the electrode 1X are formed on the lower conductive layer, and the first portion 1a of the electrode 1X is formed on the upper conductive layer. In the second embodiment, however, as illustrated in FIGS. 6 to 8, a first portion 1a of an electrode 1X is formed on a lower conductive layer, and an electrode 2Y and a second portion 1b of an electrode 1X are formed on an upper conductive layer.

(52) The first portion 1a (lower layer in this embodiment) of the electrode 1X intersects a first portion 2a of the electrode 2Y, and is electrically and mechanically connected to two adjacent second portions 1b (upper layer in this embodiment) sandwiching the first portion 2a via a contact hole 12a formed through an insulating film 12 which is an interlayer insulating film between the first portion 1a of the electrode 1X and the electrode 2Y.

(53) Also in the second embodiment, visualization of electrode patterns caused by a color difference due to distortion of a protective film 13 and visualization of electrode patterns caused by a color difference due to an optical path difference can be suppressed. Thus, deterioration of optical characteristics caused by visualization of the electrode patterns can be suppressed, and reduction in characteristics of the display device incorporating the touch panel 20 can be suppressed.

(54) The above-mentioned embodiments have been directed to the display device with the touch panel, which includes the touch panel on the liquid crystal display panel as an example of the display panel. However, the present invention is not limited to this. The present invention can be applied to a display device with a touch panel which includes the touch panel on another display panel such as an organic EL display panel or an inorganic EL display panel.

(55) The invention which has been made by the inventors of the present invention has specifically been described based on the embodiments. Not limited to the embodiments, however, various changes and modifications can be made without departing from the gist of the invention.