Device and Method for Applying Pressure to Stress-Producing Layers for Improved Guidance of a Separation Crack

Abstract

The present invention relates to a method, according to claim 1, for separating at least one solid body layer (1), particularly a solid body disk, from a donor substrate (2). The method according to the invention comprises preferably at least the following steps: providing a donor substrate (2); producing or arranging a stress-producing layer (4) on a particularly flat surface (5) of the donor substrate (2) which axially defines the donor substrate (2); pressing at least one pressure application element (6) of a pressure application device (8) onto at least one pre-determined portion of the stress-producing layer (4), in order to press the stress-producing layer (4) onto the surface (5); separating the solid body layer (1) from the donor substrate (2) by thermally applying the stress-producing layer (4), thereby producing mechanical stress in the donor substrate (2), the mechanical stress creating a crack for separating a solid body layer (1), and the pressure application element (6) being pressed onto the stress-producing layer (4) during the thermal application of the stress-producing layer (4).

Claims

1-15. (canceled)

16. A method of separating a solid-state slice from a donor substrate, the method comprising: providing the donor substrate; generating or disposing a stress generation layer on a surface of the donor substrate and that axially bounds the donor substrate; pressing at least one pressurizing element of a pressurizing device onto at least one predetermined proportion of the stress generation layer for pressing the stress generation layer onto the surface; separating the solid-state slice from the donor substrate by subjecting the stress generation layer to thermal stress which generates mechanical stresses in the donor substrate and gives rise to a crack for separation of the solid-state slice, wherein the at least one pressurizing element is pressed onto the stress generation layer during the subjecting of the stress generation layer to the thermal stress.

17. The method of claim 16, wherein the at least one pressurizing element applies a compression force in a range between 10 N and 100 kN to the stress generation layer.

18. The method of claim 16, wherein the at least one pressurizing element is in two-dimensional contact with the stress generation layer during the application of pressure.

19. The method of claim 16, wherein the at least one pressurizing element generates pressure in an edge region of the donor substrate on which the stress generation layer is disposed.

20. The method of claim 16, wherein the at least one pressurizing element generates pressure in a center region of the donor substrate on which the stress generation layer is disposed.

21. The method of claim 16, wherein the at least one pressurizing element generates pressure over an entire flat proportion of the surface of the donor substrate on which the stress generation layer is disposed.

22. The method of claim 16, wherein the pressurizing element is in a mobile arrangement and, owing to the thermal stress on the stress generation layer, is deflected by the stress generation layer relative to the donor substrate.

23. The method of claim 16, wherein the donor substrate is in a mobile arrangement and, owing to the thermal stress on the stress generation layer, is deflected by the stress generation layer relative to the lest one pressurizing element.

24. The method of claim 23, wherein the at least one pressurizing element is not deflected until after a predefined minimum force has been exceeded.

25. The method of claim 16, wherein a plurality of pressurizing elements are provided, wherein individual ones of the plurality of pressurizing elements serve to apply locally different pressures and/or have different shapes and/or contact surface dimensions and/or are deflectable to different extents and/or are deflectable with different forces.

26. The method of claim 16, wherein the at least one pressurizing element is pressed onto the stress generation layer for generation of a predefined contact pressure profile, wherein the predefined contact pressure profile varies at least in sections on a distance of the application of pressure from an axial center of the donor substrate and/or on a propagation rate of the crack and/or the thermal stress and/or on a material of the donor substrate and/or on conditioning of the donor substrate.

27. The method of claim 16, further comprising: conditioning the donor substrate, wherein modifications within the donor substrate are generated by means of laser beams, wherein the modifications define a detachment region along which the solid-state slice is separated from the donor substrate.

28. The method of claim 27, wherein the stress generation layer includes a polymer material, wherein the polymer material has a glass transition temperature below 20 C., wherein the polymer material is cooled down to a temperature below the glass transition temperature, wherein the glass transition that occurs generates the mechanical stresses in the donor substrate.

29. The method of claim 27, wherein the donor substrate has crystal lattice planes inclined relative to a flat main surface, wherein the flat main surface bounds the donor substrate on one side in a longitudinal direction of the donor substrate, with a crystal lattice plane normal inclined in a first direction relative to a main surface normal, wherein the laser beams are introduced into the donor substrate via the flat main surface in a region of at least one laser focus to alter the material properties of the donor substrate, wherein the at least one laser focus is formed by the laser beams emitted by a laser, wherein a change in a material property of the donor substrate forms a linear design by altering a penetration site of the laser beams into the donor substrate, wherein the changes in the material property are generated in at least one generation plane, wherein the crystal lattice planes of the donor substrate are in an inclined alignment relative to the generation plane, wherein the linear design is inclined relative to an interface line that arises at the interface between the generation plane and the crystal lattice plane, wherein the altered material property causes the donor substrate to tear in the form of subcritical cracks, wherein the mechanical stresses cause the subcritical cracks to be joined to one another by the crack which detaches the solid-state slice from the donor substrate.

30. The method of claim 29, wherein laser radiation of the laser beams is generated with pulse lengths of less than 2 ns and/or the subcritical cracks are generated with a crack length between 10 m and 100 m.

31. The method of claim 16, wherein the donor substrate comprises silicon carbide, and wherein a material alteration occurs within the donor substrate by a predetermined transformation of the silicon carbide to silicon and carbon.

32. A method of separating a solid-state slice from a donor substrate, the method comprising: providing a donor substrate; generating or disposing a stress generation layer on a surface of the donor substrate and that axially bounds the donor substrate; disposing a pressurizing element of a pressurizing device at a predetermined distance from the stress generation layer for contacting with the stress generation layer during the separating; and separating the solid-state slice from the donor substrate by subjecting the stress generation layer to thermal stress which generates mechanical stresses in the donor substrate, the mechanical stresses resulting in deflection of proportions of the solid-state slice and which gives rise to a crack for separation of the solid-state slice, wherein at least a separated proportion of the solid-state slice, owing to the stress generation layer, is deflected in a direction of the pressurizing element and pressed against the pressurizing element, wherein the pressurizing element limits a maximum deflection of the solid-state slice.

33. A plant for separating solid-state slices from donor substrates, comprising: a laser device configured to generate modifications within a donor substrate to form a detachment region for guiding a separation crack; a temperature control device configured to cool a stress generation layer placed or generated on the donor substrate for triggering the separation crack; a pressurizing device configured to pressurize the stress generation layer disposed on the donor substrate during the propagation of the separation crack.

Description

[0132] These show by way of example:

[0133] FIG. 1a a schematic of an apparatus for pressurization of a donor substrate provided with a stress generation layer by means of a pressurizing device,

[0134] FIG. 1b a schematic of an arrangement according to FIG. 1b, wherein the donor substrate has been modified in its interior by means of laser beams,

[0135] FIG. 2 a schematic of an apparatus for limiting a deflection movement of the solid-state layer components removed,

[0136] FIG. 3a/b/c a schematic of a pressurizing device with multiple pressurizing elements,

[0137] FIG. 4a a schematic of an apparatus for pressurizing different surface components of the stress generation layer with different pressures,

[0138] FIG. 4b a schematic of an apparatus for pressurizing different surface components of the stress generation layer with different pressures and for limiting the deflection movement of the solid-state wafer, and

[0139] FIG. 4c a schematic of a top view of the apparatus shown in FIG. 4b.

[0140] FIG. 1a shows an apparatus for separating solid-state slices 1 (cf. FIG. 2) from a donor substrate 2. This apparatus preferably has a holding device 14 for fixing the donor substrate 2. There is a stress generation layer 4, especially consisting of or including a polymer material, disposed on the donor substrate 2. The surface of the stress generation layer 4 remote from the donor substrate 2, in the variant shown, comes into contact with a contact side of a pressurizing element 6 of a pressurizing device 8. The pressurizing device 8 here may, for example, include or be coupled to an electric or hydraulic or pneumatic or mechanical force generation device, especially an actuator, for generating a force for pressing the pressurizing element 6 against the stress generation layer 4. The pressurization is preferably adjustable by means of the force generation device. A temperature control device 26 preferably imparts thermal stress, especially cooling, to the stress generation layer 4. The thermal stress on the stress generation layer 4 here may be indirect or exclusively indirect, meaning that, for example, the temperature of the pressurizing element 6 is first adjusted, and this then adjusts the temperature of the stress generation layer 4. It is also conceivable that there is direct and indirect control of the temperature of the stress generation layer 4 with time. The temperature control device 26 is preferably a functional fluid 28, especially nitrogen in preferably liquid or nebulized form. In addition, the pressurizing element 6 can be pressed onto predetermined proportions of the stress generation layer 4 and, at the same time, the temperature of different predetermined proportions of the same stress generation layer 4 can be adjusted by the temperature control device 26.

[0141] The thermal stress results in contraction of the stress generation layer 4, which generates mechanical stresses in the donor substrate 2. The pressurizing device 8, simultaneously with the generation of stress, brings about pressurization of components of the stress generation layer 4 or of the complete stress generation layer 4 disposed between the pressurizing element 6 and the substrate 2.

[0142] The pressurizing device 8 thus counteracts force peaks that occur on attainment of the glass transition of the stress generation layer 4. In addition, the pressurizing device 8 preferably likewise reduces deflection of the components of the solid-state layer 1 that have been split off, which means that the wedge action that arises in the course of crack propagation occurs with a significantly smaller angle, which means that the crack runs in a much more stable manner in the predefined detachment plane 12 (cf. FIG. 1b).

[0143] Reference sign D indicates the preferred direction of pressure application.

[0144] The illustration shown in FIG. 1b corresponds essentially to the illustration shown in FIG. 1a, wherein the donor substrate 2 has modifications 10 that have been generated by means of laser beams. The modifications 10 define a detachment region 12 for progression of a crack for separation of the solid-state slice 1 from the donor substrate 2.

[0145] FIG. 2 shows that the pressurizing element 6 may have one or more passage element(s) 18 or conductive element(s) 18 for conducting the functional fluid. In addition, this illustration shows a situation in which the pressurizing element 6 is used to limit the deflection movement of the solid-state layer components removed. The contact side 16 of the pressurizing element 6 is preferably spaced apart at a distance AS from the exposed surface of the stress generation layer 4 or from the detachment plane 12. The distance AS is preferably a fraction or less than a defined fraction of the shortest distance between the radial circumferential surface O and the axial center L. In addition, this embodiment, purely by way of example, has a guide device 30 for defining a direction of movement of the pressurizing device 8 in the event of deflection. Such guide devices may be provided in all the embodiments described herein.

[0146] FIG. 3a shows, in schematic form, that multiple pressurizing elements 6a, 6b, 6c of different configuration may be part of the pressurizing device 8. The pressurizing elements 6a, 6b, 6c shown here have different heights. When 6a is pressed onto the stress generation layer 4, there is thus greater compression of the stress generation layer 6 than when 6c is pressed on. Thus, there is a greater pressure in the region between 6a and the donor substrate 2 than between 6c and the donor substrate 2. In other words, a greater pressure is preferably built up in the center than in the edge region, and the reverse configuration is also possible. In this embodiment, the region 6b is pressed to the least degree, if at all, onto the donor substrate 4.

[0147] FIG. 3b shows, in schematic form, that pressurization is possible from the thicker side, where the layer is prevented from bending by a holding device 14 (e.g. vacuum vessel, or else by means of holding tape . . . ). The detachment region 12 here is preferably at a smaller distance from the processed layer in at least the majority of the removal steps effected in the division of a donor substrate 2 into a multitude of wafers than from a surface with which a pressurizing element is contacted. In this case, the processed surface 40 bounds the donor substrate 2 in longitudinal donor substrate direction on the one hand and the surface on which the pressurizing element is contacted bounds the donor substrate 2 in longitudinal donor substrate direction on the other hand. This ensures, in the case of at least partly completed devices on the wafer, that these are bent only within a limited scope, if at all. In addition, the necessity of pressurizing the surface of the device side is avoided.

[0148] FIG. 3c shows a variant in which the processed surface 40 is bonded to a transfer substrate or a wafer (technically transfer wafer) by means of a bonding layer or a bonding interface 42. The bonding layer or bonding interface 42 may be formed here, for example, by an adhesive layer, especially an adhesive tape, or by a phase-changing substance, especially a fluid, especially a liquid. If the bonding interface 42 is formed by a phase-changing substance, the phase-changing substance preferably has a freezing point at ambient pressure of lower than 20 C. or of lower than 10 C. or of lower than 5 C. or of 0 C. or of lower than 5 C. or of lower than 20 C. The phase-changing substance is preferably water, especially demineralized water (DM water). The bonding substrate 44 and/or the processed surface 40 are preferably wetted or moistened with the phase-changing substance, wherein the phase-changing substance is in a first state of matter. Subsequently, the processed surface 40 is placed onto or applied to, especially pressed onto, the bonding substrate 44. In addition, the temperature of the phase-changing substance is preferably adjusted to below the freezing point of the phase-changing substance, which results in conversion of the phase-changing substance from the first state of matter, especially liquid, to a second state of matter, especially solid. The cooling can be brought about here by the cooling which is effected to adjust the temperature of the receiving layer. Additionally or alternatively, it is possible that the phase-changing substance is adjusted to a temperature below its freezing point prior to the adjustment of temperature of the receiving layer. This is advantageous since this bonding interface can be reversibly produced and eliminated. In addition, more preferably, no toxic substances are required here.

[0149] FIG. 4a shows a working example in which the pressurizing device 8 includes multiple pressurizing elements 6a, 6b and 6c that are movable relative to one another. These pressurizing elements 6a, 6b, 6c may each be coupled via force transmitters 20, 22, 24 to one or more actuators for providing equal or different pressing forces. According to the invention, the individual pressurizing elements 6a, 6b, 6c may be deflected independently of one another, especially when the force acting on the respective pressurizing element 6a, 6b, 6c exceeds a threshold force or minimum force defined for the respective pressurizing element 6a, 6b, 6c.

[0150] FIG. 4b shows an embodiment in which the pressurizing element 6b is moved further into the stress generation layer 4 than the other pressurizing elements 6a and 6c.

[0151] FIG. 4c shows, purely by way of example, that the pressurizing device 8 can have a round contact side 16. The pressurizing elements 6a, 6b, 6c are formed here correspondingly. Alternatively, however, it is likewise possible in the context of the present invention that the contact side16 may have a shape different from a round shape, especially a shape with one or more straight edges, especially a rectangular shape.

LIST OF REFERENCE SIGNS

[0152] 1 solid-state slice [0153] 2 donor substrate [0154] 4 stress generation layer [0155] 5 surface [0156] 6 pressurizing element [0157] 8 pressurizing device [0158] 10 modification [0159] 12 detachment region [0160] 14 holding device [0161] 15 heating element [0162] 16 contact side of the pressurizing element/contact surface for limiting deflection [0163] 18 passage element [0164] 20 first force application element [0165] 22 second force application element [0166] 24 third force application element [0167] 26 temperature control device [0168] 28 functional fluid [0169] 30 guide [0170] 40 processed surface [0171] 42 bonding interface [0172] 44 bonding substrate [0173] A shortest distance between center L and circumferential surface [0174] D pressure application direction [0175] L longitudinal direction/axial center [0176] AS distance between pressurizing element and detachment plane