Hard coating and hard coating-covered member

Abstract

A hard coating, which is to disposed to cover a surface of a tool substrate, has a total thickness of 0.5-20 m and includes an A layer and nanolayer-alternated layer that are alternately laminated by physical vapor deposition. The nanolayer-alternated layer includes a B layer and C layer that are alternately laminated. The A layer has a thickness of 50-1000 nm and is AlCr(SiC) nitride that is represented by a composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein an atomic ratio W is 0.20-0.80 and an atomic ratio X is 0.01-0.20. The B layer has a thickness of 1-100 nm and is TiAl nitride that is represented by a composition formula of [Ti.sub.1-YAl.sub.Y]N wherein an atomic ratio Y is 0.30-0.85. The C layer has a thickness of 1-100 nm and is Ti(SiC) nitride represented by a composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein an atomic ratio Z is 0.05-0.45. The nanolayer-alternated layer has a thickness of 50-1000 nm.

Claims

1. A hard coating that is to be disposed to cover a surface of a substrate, wherein the hard coating has a total thickness of 0.5-20 m and includes an A layer and a nanolayer-alternated layer that are alternately laminated by physical vapor deposition, the nanolayer-alternated layer including a B layer and a C layer that are alternately laminated, the A layer has a thickness of 50-1000 nm and is AlCr(SiC) nitride that is represented by a composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein an atomic ratio W is 0.20-0.80 and an atomic ratio X is 0.01-0.20, the B layer has a thickness of 1-100 nm and is TiAl nitride that is represented by a composition formula of [Ti.sub.1-YAl.sub.Y]N wherein an atomic ratio Y is 0.30-0.85, the C layer has a thickness of 1-100 nm and is Ti(SiC) nitride that is represented by a composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein an atomic ratio Z is 0.05-0.45, and the nanolayer-alternated layer has a thickness of 50-1000 nm.

2. The hard coating according to claim 1, wherein a ratio T.sub.A/T.sub.NL of the thickness T.sub.A of the A layer to a thickness T.sub.NL of the nanolayer-alternated layer is 0.2-10.

3. The hard coating according to claim 1, wherein the A layer contains additive that is at least one kind of element selected from a group consisting of V, Y, Zr, Nb, Mo, Ta and W, such that a content ratio of the additive is not larger than 20 at %.

4. The hard coating according to claim 1, wherein the B layer contains additive that is at least one kind of element selected from a group consisting of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta and W, such that a content ratio of the additive is not larger than 10 at %.

5. The hard coating according to claim 1, wherein the C layer contains additive that is at least one kind of element selected from a group consisting of B, V, Y, Nb, Mo and W, such that a content ratio of the additive is not larger than 10 at %.

6. The hard coating according to claim 1, wherein the hard coating is disposed to directly cover the substrate.

7. The hard coating according to claim 1, wherein the hard coating is disposed to cover the substrate via an interface layer, and the interface layer has a thickness of 50-1000 nm, and is made of material substantially the same as material of the A layer, the B layer or the nanolayer-alternated layer.

8. A hard-coating-covered member comprising the substrate is covered partially or entirely with the hard coating according to claim 1.

9. The hard coating according to claim 1, wherein the A layer and the B layer are the AlCr(SiC) nitride and the TiAl nitride, respectively, which are represented by the respective composition formulas that are different from each other, and are different from each other in terms of main constituent elements.

10. The hard coating according to claim 1, wherein one of the A layer, the B layer and the C layer constitutes an uppermost layer of the hard coating.

11. The hard coating according to claim 1, wherein the A layer contains additive that is at least one kind of element selected from the group consisting of V, Y, Zr, Nb, Mo, Ta, and W, such that a content ratio of the additive is not larger than 20 at %, the B layer contains additive that is at least one kind of element selected from a group consisting of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta, and W, such that a content ratio of the additive is not larger than 10 at %, and the C layer contains additive that is at least one kind of element selected from a group consisting of B, V, Y, Nb, Mo, and W, such that a content ratio of the additive is not larger than 10 at %.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a front view showing a drill provided with a hard coating according to an embodiment of the present invention.

(2) FIG. 2 is an enlarged bottom view as seen from a side of a distal end of the drill of FIG. 1, for explaining a construction of the drill.

(3) FIG. 3 is a schematic view of explaining an example of laminated structure of the hard coating that is provided to cover the drill of FIG. 1.

(4) FIG. 4 is a schematic view of explaining another example of laminated structure of the hard coating that is provided to cover the drill of FIG. 1.

(5) FIG. 5 is a schematic view of explaining still another example of laminated structure of the hard coating that is provided to cover the drill of FIG. 1.

(6) FIG. 6 is a schematic view of explaining further example of laminated structure of the hard coating that is provided to cover the drill of FIG. 1.

(7) FIG. 7 is a schematic view of explaining an arc ion plating apparatus as an example of a physical vapor deposition apparatus for forming the hard coating of FIG. 1 on a tool substrate.

(8) FIG. 8 is a table showing kinds of constituent elements of AlCr(SiC) nitride constituting A layers and a ratio of each of the constituent elements in test samples 1-50, which are different in kinds of constituent elements and a ratio of each of the constituent elements, kinds and composition ratios of additive and thickness of each of the A, B and C layers constituting the hard coating.

(9) FIG. 9 is a table showing kinds of constituent elements and a ratio of each of the constituent elements of TiAl nitride constituting the B layers in the test samples 1-50 shown in FIG. 8.

(10) FIG. 10 is a table showing kinds of constituent elements and a ratio of each of the constituent elements of Ti(SiC) nitride constituting the C layers in the test samples 1-50 shown in FIG. 8.

(11) FIG. 11 is a table showing the thickness of each of the A layers, B layers and C layers, a number of pairs of the laminated B layers and C layers, a thickness of each of nanolayer-alternated layers, a thickness of an interface layer, a number of pairs of the laminated A layers and nanolayer-alternated layers, and a total thickness of the hard coating in the test samples 1-50 shown in FIG. 8.

(12) FIG. 12 is a table showing a coating hardness, a wear width, a cutting distance and a judgement result in the test samples 1-50 shown in FIG. 8.

(13) FIG. 13 is a view showing characteristics of increase of the wear width, which was caused with increase of the cutting distance in the test samples 2, 3, 12, 22, 29, 37, 40 and 44 of the test samples 1-50 shown in FIG. 8.

MODES FOR CARRYING OUT THE INVENTION

(14) A hard coating as an embodiment of the present invention will now be described in detail with reference to the drawings.

Embodiment

(15) FIGS. 1 and 2 are views showing a drill 10 as an example of a hard-coating-covered tool or a hard-coating-covered member, which is covered with a hard coating 24 of the present invention. FIG. 1 is the front view as seen in a direction perpendicular to an axis O of the drill 10. FIG. 2 is an enlarged bottom view as seen from a side of a distal end of the drill 10 in which cutting edges 12 are provided. This drill 10 is two-fluted twist drill, and includes a shank 14 and a body 16 which are axially contiguous to each other and which are formed integrally with each other. The body 16 has a pair of flutes 18 each of which is formed in the body 16 to be twisted about the axis O in a clockwise direction. The pair of cutting edges 12 are provided by axially distal ends of the respective flutes 18. The drill 10 is to be rotated in a clockwise direction as seen from a side of the shank 14, such that a workpiece is cut by the cutting edges 12 whereby a hole is formed in the workpiece while chips produced as a result of the cutting of the workpiece are evacuated from the hole toward the shank 14 via the flutes 18.

(16) A pair of cutting-fluid lead-out holes 22 are provided to longitudinally extend through from an end face of the shank 14 through the shank 14 and the body 16, and open in respective flank faces 20 that are contiguous to the respective cutting edges 12 in a distal end of the body 16. In FIG. 1, a shaded area indicates a coated portion that is covered with a hard coating in the form of the hard coating 24. In the present embodiment, the drill 10 is covered at the body 16 as its part with the hard coating 24. However, the drill 10 may be covered in its entirety with the hard coating 24.

(17) FIG. 3 is a schematic view showing, in enlargement, a cross section of the hard coating 24 of the drill 10. As shown in FIG. 3, the hard coating 24 is disposed on a tool substrate 30 made of, for example, cemented carbide, via an interface layer 32 that is formed by physical vapor deposition to have a thickness of about 50-1000 nm. The hard coating 24 is formed by physical vapor deposition, and is constituted by A layers 34 and nanolayer-alternated layers 40 as multi-layer areas. Each of the A layers 34 is formed to have a thickness of 50-1000 nm. Each of the nanolayer-alternated layers 40 is constituted by B layers 36 each having a thickness of 1-100 nm and C layers 38 each having a thickness of 1-100 nm. The B layers 36 and the C layers 38 are alternately laminated such that each of the nanolayer-alternated layers 40 has a thickness of 50-1000 nm. The A layers 34 and the nanolayer-alternated layers 40 are alternately laminated such that the hard coating 24 has a total thickness of 0.5-20 m. In the hard coating 24 shown in FIG. 3, a lamination number of the A and nanolayer-alternated layers 34, 40 is, for example, an even number, and a lamination number of the B and C layers 36, 38 in each of the nanolayer-alternated layers 40 is, for example, an odd number that is not smaller than 3.

(18) Each of the A layers 34 has the thickness of 50-1000 nm and is made of AlCr(SiC) nitride that is represented by a composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein an atomic ratio W is 0.20-0.80 and an atomic ratio X is 0.01-0.20. The AlCr(SiC) nitride contains additive that is constituted by at least one kind of element selected from a group consisting of V, Y, Zr, Nb, Mo, Ta and W, such that the content ratio of the additive is not larger than 20 at %. The additive is characterized by causing solid-solution strengthening whereby the hardness of the AlCr(SiC) nitride is increased, and causing a strength of the AlCr(SiC) nitride to be increased and causing an oxide to be formed on the surface of the AlCr(SiC) nitride by increased temperature during a cutting operation, thereby increasing ware resistance.

(19) Each of the B layers 36 has the thickness of 1-100 nm and is made of TiAl nitride that is represented by a composition formula of [Ti.sub.1-YAl.sub.Y]N wherein an atomic ratio Y is 0.30-0.85. Each of the B layers 36 contains additive that is constituted by at least one kind of element selected from a group consisting of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta and W, such that the content ratio of the additive is not larger than 10 at %. The additive is characterized by causing solid-solution strengthening whereby the hardness of the TiAl nitride is increased, thereby contributing to increase of wear resistance.

(20) Each of the C layers 38 has the thickness of 1-100 nm and is made of TiSi nitride that is represented by a composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein an atomic ratio Z is 0.05-0.45. Each of the B layers 36 contains additive that is constituted by at least one kind of element selected from a group consisting of B, V, Y, Nb, Mo and W, such that the content ratio of the additive is not larger than 10 at %. The additive is characterized by causing solid-solution strengthening whereby the hardness of the Ti(SiC) nitride is increased, thereby contributing to increase of wear resistance. Further, among the additive , V, Nb, Mo and W cause an oxide to be formed by increased temperature during a cutting operation, thereby providing self-lubricating function and accordingly contributing to increase of tool life.

(21) The interface layer 32 is formed by physical vapor deposition similar to the physical vapor deposition by which the hard coating 24 is formed, so as to have a thickness of 50-1000 nm. The interface layer 32 may be made of the AlCr(SiC) nitride constituting the A layers 34, the TiAl nitride constituting the B layers 36, the Ti(SiC) nitride constituting the C layers 38, or material (TiAl nitride/Ti(SiC) nitride) of nanolayer laminated structure substantially the same as the nanolayer-alternated layers 40. FIG. 3 shows an example where the interface layer 32 is made of material substantially the same as the A layers 34, namely, is made of AlCr(SiC) nitride.

(22) In each of the nanolayer-alternated layers 40, a lamination number of the B and C layers 36, 38 may be either an even number or an odd number that is not smaller than 3. Further, in each of the nanolayer-alternated layers 40, an uppermost layer or a lowermost layer may be either the B layer 36 or C layer 38. In the hard coating 24, a lamination number of the A and nanolayer-alternated layers 34, 40 may be either an even number or an odd number that is not smaller than 3. Further, in the hard coating 24, an uppermost layer or a lowermost layer maybe either the A layer 34 or nanolayer-alternated layer 40.

(23) FIGS. 4, 5 and 6 show constructions of respective other examples of the hard coating 24. The hard coating 24 of FIG. 4 is different from that of FIG. 3 in that the lamination number of the A and nanolayer-alternated layers 34, 40 is an odd number, in that the lamination number of the B and C layers 36, 38 in each of the nanolayer-alternated layers 40 is an odd number; and in that the interface layer 32 is made of TiAl nitride that is substantially the same as the material of the B layers 36. The hard coating 24 of FIG. 5 is different from that of FIG. 3 in that the interface layer 32 disposed between the tool substrate 30 and the hard coating 24 is made of material (TiAl nitride/Ti(SiC) nitride) of nanolayer laminated structure substantially the same as the material of the nanolayer-alternated layers 40. The hard coating 24 of FIG. 6 is different from that of FIG. 3 in that the lamination number of the A and nanolayer-alternated layers 34, 40 is an odd number, in that the uppermost layer of the hard coating 24 is constituted by the nanolayer-alternated layer 40, and in that the hard coating 24 is disposed directly on the tool substrate 30 without via the interface layer 32.

(24) FIG. 7 is a schematic construction view (schematic view) of explaining an arc ion plating apparatus 50 that is used for manufacturing the drill 10. The arc ion plating apparatus 50 is operated to form the interface layer 32, A layers 34, B layers 36 and C layers 38 by an arc ion plating as a kind of physical vapor deposition such that these layers 32, 34, 36, 38 are deposited on the tool substrate 30 that has a shape substantially the same as the drill 10 shown in FIGS. 1 and 2.

(25) The arc ion plating apparatus 50 includes; for example, a rotary table 54 to be driven to be rotated about a rotation axis extending substantially in a vertical direction and to hold a plurality of workpieces, i.e., the plurality of tool substrates 30 each of which is not yet covered with the hard coating 24 and has the cutting edges 12 and flutes 18 already formed therein; a bias-voltage power source 56 for applying a negative bias voltage to the tool substrates 30; a processing vessel in the form of a chamber 58 which accommodates therein the tool substrates 30; a heater 59 provided in the chamber 58; a reaction-gas supplying device 60 for supplying a reaction gas into the chamber 58; a gas discharging device 62 for discharging a gas from an interior of the chamber 58 by, for example, a vacuum pump so as to reduce a pressure in the interior of the chamber 58; a first arc power source 64; a second arc power source 66 and a third arc power source 68. The rotary table 54 is a cylindrical-shaped or polygonal-prism-shaped table whose center corresponds to the above-described rotation axis. The plurality of tool substrates 30 are held in an outer peripheral portion of the rotary table 54 such that each of the tool substrates 30 has an attitude that causes its distal end protrudes upwardly. The reaction-gas supplying device 60 is equipped with a tank in which argon gas (Ar) is stored and also a tank in which nitrogen gas is stored, for supplying the nitrogen gas when the interface layer 32, A layers 34, B layers 36 and C layers 38 are to be formed.

(26) Each of the first arc power source 64; second arc power source 66 and third arc power source 68 is configured to selectively energize between a corresponding one of anodes 72, 76, 80 and a corresponding one of cathodes in the form of first evaporation source 70, second evaporation source 74 and third evaporation source 78 that are made of vapor deposition material, with an arc current, thereby selectively causing evaporation material to evaporate from the corresponding one of the first evaporation source 70, second evaporation source 74 and third evaporation source 78. After having being evaporated, the evaporation material becomes positive ion that is deposited to cover the tool substrate 30 to which negative () bias voltage is applied. It is set such that the first arc power source 64, second arc power source 66 and third arc power source 68 are selected to evaporate a prescribed composition for obtaining each of the interface layer 32, A layers 34, B layers 36 and C layers 38 The arc current and the bias voltage are determined. Further, a coating forming condition such as temperature of 400-550 C. and vacuum degree of 2-10 Pa is determined. The thickness of each of the interface layer 32, A layers 34, B layers 36 and C layers 38 is adjusted by controlling a length of time for the coating formation.

(27) For example, the first evaporation source 70 is constituted by an A-layer evaporation-source material which is AlCr(SiC) nitride represented by the composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein an atomic ratio W is 0.20-0.80 and an atomic ratio X is 0.01-0.20 and which contains the additive that is at least one kind of element selected from the group consisting of V, Y, Zr, Nb, Mo, Ta and W such that the content ratio of the additive is not larger than 20 at %. The second evaporation source 74 is constituted by a B-layer evaporation-source material which is TiAl nitride represented by the composition formula of [Ti.sub.a-YAl.sub.Y]N wherein an atomic ratio Y is 0.300.85 and which contains the additive that is at least one kind of element selected from a group consisting of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta and W such that the content ratio of the additive is not larger than 10 at %. The third evaporation source 78 is constituted by a C-layer evaporation-source material which is Ti(SiC) nitride represented by the composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein an atomic ratio Z is 0.050.45 such that the Ti(SiC) nitride contains the additive that is at least one kind of element selected from a group consisting of B, V, Y, Nb, Mo and W such that the content ratio of the additive is not larger than 10 at %.

(28) When the interface layer 32 is to be formed on the tool substrate 30, for example, the AlCr(SiC) nitride is evaporated from the first evaporation source 70 by the first arc power source 64, or the TiAl nitride is evaporated from the second evaporation source 74 by the second arc power source 66. When each of the A layers 34 is to be formed on the tool substrate 30, the AlCr(SiC) nitride is evaporated from the first evaporation source 70 by the first arc power source 64. When each of the nanolayer-alternated layers 40 is to be formed on the tool substrate 30, terms in which the TiAl nitride is evaporated from the second evaporation source 74 by the second arc power source 66 and terms in which the Ti(SiC) nitride is evaporated from the third evaporation source 78 by the third arc power source 68 are alternately provided whereby the B layers 36 of nano-order constituted by the TiAl nitride and the C layers 38 of nano-order constituted by the Ti(SiC) nitride are alternately laminated. With these operations being selectively carried out, the hard coating 24 shown in FIG. 3 is disposed on the tool substrate 30, for example.

(29) For checking wear resistance and welding resistance, the present inventors prepared 50 kinds of test samples 1-50 in each of which the hard coating 24 shown in FIG. 3 is formed on the tool substrate 30 having substantially the same shape as the drill 10 shown in FIGS. 1 and 2 and made of cemented carbide, by using the arc ion plating apparatus 50 of FIG. 7. The test samples 1-50 are different from one another, as shown in FIGS. 8, 9, 10 and 11, in terms of the composition ratios (at %) and thickness (nm) of the interface layer 32, A layers 34, B layers 36 and C layers 38, the number of pairs of the laminated B and C layers 36, 38 in each of the nanolayer-alternated layers 40, the thickness of each of the nanolayer-alternated layers 40 and the number of pairs of the laminated A and nanolayer-alternated layers 34, 40. Then, the present inventors measured the coating hardness of each of the test samples 1-50 in accordance with a coating-hardness (Vickers hardness) measuring method described below, and measured the wear width and the cutting distance when a cutting is made by each of the test samples 1-50 in accordance with a cutting test condition, so as to evaluate a cutting performance. FIG. 12 shows result of the evaluation. It is noted that a unit of composition values shown in FIGS. 8, 9, and 10 is at % (atomic %).

(30) (Coating-Hardness Measuring Method)

(31) In accordance with Vickers hardness test method (JISG0202, Z2244), the HV value (Vickers hardness) of the hard coating of each of the test samples 1-50 was measured under a condition indicated by hardness symbol HV0.025.

(32) (Cutting Test Condition)

(33) Workpiece material: SCM440 (30HRC)

(34) Cutting speed: 100 m/min.

(35) Rotating speed: 5305 min.sup.1

(36) Feed rate: 0.18 mm/rev.

(37) Cutting depth: 30 mm (blind hole)

(38) Step feed amount: Non-step feed

(39) Cutting fluid: Water-soluble cutting fluid

(40) (Wear-Width Measuring Method)

(41) The drilling was repeated until the cutting distance of the cutting edges of the distal end of the drill reached 50 m. Then, when the cutting distance reached 50 m, the wear width of the coating in the flank face in the distal end portion of the drill, namely, the width of exposure of the substrate in portions adjacent to the cutting edges was actually measured by using a stereoscopic microscope with scale. The measured wear width is shown at *1 in FIG. 12.

(42) (Cutting-Distance Measuring Method and Judging Method)

(43) The cutting distance of the cutting edges of the distal end of the drill was calculated based on the cutting test condition (rotating speed: 5305 min.sup.1, feed rate: 0.18 mm/rev, cutting depth: 30 mm) and the number of machined holes (total cutting distance) until the wear width of the drill reached 0.2 mm. The calculated cutting distance is shown at *2 in FIG. 12. Those having the cutting distance shorter 50 m were judged unacceptable, and are indicated with X mark at *3 in FIG. 12. Those having the cutting distance not shorter 50 m were judged acceptable, and are indicated with O mark at *3 in FIG. 12.

(44) As shown in FIG. 12, the coating hardness of the test samples 7-50 corresponding to the embodiments of the present invention was 3190-3540 (HV0.025), and was higher than 2510 as the largest value of the coating hardness of the test samples 1-6 according to comparative examples.

(45) Further, as shown in FIG. 12, the test samples 1-6 corresponding to the comparative examples were judged unacceptable, since the cutting distance until the wear width reached 0.2 mm was smaller than 50m as an acceptable minimum value. In the test sample 1, due to absence of the B layers 36, there are not formed the nanolayer-alternated layers 40 each of which is an alternated layer of the B and C layers 36, 38, and the thickness of the interface layer 32 is larger than 1000 nm. In the test sample 2, due to absence of the C layers 38, there are not formed the nanolayer-alternated layers 40 each of which is an alternated layer of the B and C layers 36, 38, and the thickness T.sub.A of each of the A layers 34 is larger than 1000 nm. In the test sample 3, there are not provided the A layers 34, the thickness T.sub.B of each of the B layers 36 and the thickness T.sub.C of each of the C layers 38 are larger than 100 nm, the thickness of each of the nanolayer-alternated layers 40 is larger than 1000 nm, and the total thickness is larger than 20 m. In the test sample 4, the thickness T.sub.B of each of the B layers 36 is larger than 100 nm, the thickness T.sub.C of each of the C layers 38 is smaller than 1 nm, and the thickness of the interface layer 32 is larger than 1000 nm. In the test sample 5, there are not provided the A layers 34, the thickness T.sub.B of each of the B layers 36 and the thickness T.sub.C of each of the C layers 38 are smaller than 1 nm, the thickness of each of the nanolayer-alternated layers 40 is smaller than 50 nm, and the total thickness is smaller than 0.5 m. In the test sample 6, the thickness T.sub.A of each of the A layers 34 is so small and smaller than 50 nm, the thickness T.sub.B of each of the B layers 36 and the thickness T.sub.C of each of the C layers 38 are smaller than 1 nm, the thickness of the interface layer 32 is smaller than 50 nm, and the total thickness is smaller than 0.5 m.

(46) However, the test samples 7-50 corresponding to the embodiments of the invention were judged acceptable, since the cutting distance until the wear width reached 0.2 mm was not smaller than 50 m as the acceptable minimum value. It is noted that substantially the same results as those shown in FIG. 12 were obtained also in the drills shown in FIGS. 4-6. That is, substantially the same results as those shown in FIG. 12 were obtained irrespective of whether the interface layer 32 is present or absent, irrespective of whether the uppermost layer or lowermost layer of the hard coating 24 is the A layer 34 or nanolayer-alternated layer 40, irrespective of whether the lamination number of the hard coating 24 is an odd number or an even number, and irrespective of whether the lamination number of each of the nanolayer-alternated layers 40 is an odd number or an even number.

(47) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the composition of the A layers 34 is such that a content ratio of Al is 20-79 at %, a content ratio of Cr is 78-20 at %, and the additive is constituted by an element or elements selected from V, Y, Zr, Nb, Mo, Ta and W and a content ratio of the additive is 0-20 at %, for example, as shown in the test samples 7 and 13 of FIG. 8. That is, the preferable composition of the A layers 34 is AlCr(SiC) nitride represented by the composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein the atomic ratio W is 0.20-0.80 and the atomic ratio X is 0.01-0.20. The thickness T.sub.A of each of the A layers 34 is preferably 50-1000 nm, for example, as shown in the test samples 7 and 11 of FIG. 11.

(48) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the composition of the B layers 36 is such that a content ratio of Ti is 15-70 at %, a content ratio of Al is 85-30 at %, and the additive is constituted by at least one kind of element of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta and W and a content ratio of the additive is 0-10 at %, for example, as shown in the test samples 7 and 13 of FIG. 9. That is, the preferable composition of the B layers 36 is TiAl nitride represented by the composition formula of [Ti.sub.1-YAl.sub.Y]N wherein an atomic ratio Y is 0.30-0.85. The thickness T.sub.B of each of the B layers 36 is preferably 1-100 nm, for example, as shown in the test samples 10 and 12 of FIG. 11.

(49) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the composition of the C layers 38 is such that a content ratio of Ti is 53-94.5 at %, a content ratio of (SiC) is 5-45 at %, and the additive is constituted by at least one kind of element of B, C, V, Y, Nb, Mo and W and a content ratio of the additive is 0-10 at %, for example, as shown in the test samples 12 and 16 of FIG. 10. That is, the preferable composition of the C layers 38 is Ti(SiC) nitride represented by the composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein the atomic ratio Z is 0.05-0.45. The thickness T.sub.C of each of the C layers 38 is preferably 1-100 nm, for example, as shown in the test samples 10 and 12 of FIG. 11.

(50) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the thickness of each of the nanolayer-alternated layers 40 is 50-1000 nm, for example, as shown in the test sample 7 and 12 of FIG. 11. Further, a ratio T.sub.A/T.sub.NL of the thickness T.sub.A of each of the A layers 34 to the thickness T.sub.NL of each of the nanolayer-alternated layers 40 is 0.2-10.

(51) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the thickness of the interface layer 32 is 50-1000 nm, for example, as shown in the test samples 7 and 11 of FIG. 11.

(52) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the total thickness (total film thickness) of the hard coating 24 is 0.5-20 m, for example, as shown in the test samples 19 and 20 of FIG. 11.

(53) In the test samples 7-50 shown in FIG. 12 and corresponding to the embodiments of the invention, the number of repeat in each of the nanolayer-alternated layers 40 in which the B and C layers 36, 38 are laminated, i.e., the number of pairs of the laminated B and C layers 36, 38 in each of the nanolayer-alternated layers 40 is 2-500, for example, as shown in the test samples 48 and 12. Further, the number of repeat in the hard coating 24 in which the A and nanolayer-alternated layers 34, 40 are laminated, i.e., the number of pairs of the laminated A and nanolayer-alternated layers 34, 40 in the hard coating 24 is 2-199, for example, as shown in the test samples 7 and 12.

(54) FIG. 13 is a view showing characteristics of increase of the wear width, which was caused with increase of the cutting distance in the test samples 2 and 3 corresponding to the comparative examples and the test samples 12, 22, 29, 37, 40 and 44 corresponding to the embodiments of the invention in the above-described cutting test. A rate of increase of the wear width in the test samples 2 and 3 corresponding to the comparative examples is considerably large as compared with that in the test samples 12, 22, 29, 37, 40 and 44 corresponding to the embodiments of the invention.

(55) According to the present embodiment, the hard coating 24, which is to be disposed to cover the surface of the tool substrate 30, has the total thickness of 0.5-20 m, and consists of the A layers 34 and the nanolayer-alternated layers 40 that are alternately laminated by physical vapor deposition, wherein each of the nanolayer-alternated layers 40 consists of the B layers 36 and the C layers 38 that are alternately laminated. Each of the A layers 34 has the thickness of 50-1000 nm and is AlCr(SiC) nitride that is represented by the composition formula of [Al.sub.1-W-XCr.sub.W(SiC).sub.X]N wherein the atomic ratio W is 0.20-0.80 and the atomic ratio X is 0.01-0.20. Each of the B layers 36 has the thickness of 1-100 nm and is TiAl nitride that is represented by the composition formula of [Ti.sub.1-YAl.sub.Y]N wherein the atomic ratio Y is 0.30-0.85. Each of the C layers 38 has the thickness of 1-100 nm and is Ti(SiC) nitride that is represented by the composition formula of [Ti.sub.1-Z(SiC).sub.Z]N wherein the atomic ratio Z is 0.05-0.45. Each of the nanolayer-alternated layers 40 has the thickness of 50-1000 nm. Consequently, it is possible to obtain the drill 10 which provides wear resistance when being used to cut carbon steel, cast iron or the like, and which provides welding resistance when being used to cut alloy steel, stainless steel or the like.

(56) According to the present embodiment, the ratio T.sub.A/T.sub.NL of the thickness T.sub.A of each of A layers 34 to the thickness T.sub.NL of each of the nanolayer-alternated layers 40 is 0.2-10. Thus, it is possible to obtain a tool which provides wear resistance when being used to cut carbon steel, cast iron or the like, and which provides welding resistance when being used to cut alloy steel, stainless steel or the like.

(57) According to the present embodiment, each of the A layers 34 contains the additive that is at least one kind of element selected from the group consisting of V, Y, Zr, Nb, Mo, Ta and W, such that the content ratio of the additive is not larger than 20 at %. Thus, solid-solution strengthening is caused in each of the A layers 34 whereby the hardness of the AlCr(SiC) nitride can be increased, so that the strength is increased and an oxide is formed on the surface by increased temperature during a cutting operation, thereby providing excellent wear resistance and preferable balance of wear resistance to welding resistance, and accordingly resulting in long tool life of the drill 10.

(58) According to the present embodiment, each of the B layers 36 contains the additive that is at least one kind of element selected from the group consisting of B, C, V, Cr, Zr, Nb, Mo, Hf, Ta and W, such that the content ratio of the additive is not larger than 10 at %. Thus, solid-solution strengthening is caused in each of the B layers 36 whereby the hardness of the TiAl nitride can be increased, thereby providing excellent wear resistance of the drill 10.

(59) According to the present embodiment, each of the C layers 38 contains the additive that is at least one kind of element selected from the group consisting of B, V, Y, Nb, Mo and W, such that the content ratio of the additive is not larger than 10 at %. Thus, solid-solution strengthening is caused in each of the C layers 38 whereby the hardness of the Ti(SiC) nitride can be increased, thereby providing excellent wear resistance of the drill 10. Particularly, where the additive is at least one of V, Nb, Mo and W, an oxide is formed by increased temperature during a cutting operation, thereby providing self-lubricating function and accordingly leading to further increased tool life of the drill 10.

(60) According to the present embodiment, the hard coating 24 shown in FIG. 6 is disposed to directly cover the tool substrate 30. Thus, an interface layer is not required to be disposed between the hard coating 24 and the tool substrate 30, whereby the production can be made easily.

(61) According to the present embodiment, the hard coating 24 shown in FIGS. 3, 4 and 5 is disposed to cover the tool substrate 30 via the interface layer 32, and the interface layer 32 has the thickness of 50-1000 nm, and is made of the material substantially the same as material of the A layers 34, B layers 36 or nanolayer-alternated layers 40. Thus, it is possible to further increase bonding strength between the heard coating 24 and the tool substrate 30.

(62) According to the present embodiment, the drill 10 is a hard-coating-covered tool is covered partially with the hard coating 24. Thus, it is possible to provide wear resistance when the drill 10 is used to cut carbon steel or cast iron, and provide welding resistance when the drill 10 is used to cut alloy steel or stainless steel.

(63) While the embodiment of the present invention has been described in detail by reference to the accompanying drawings, it is to be understood that the described embodiment is merely an embodied form and that the present invention can be embodied with various modifications and improvements on the basis of knowledge of those skilled in the art.

DESCRIPTION OF REFERENCE SIGNS

(64) 10: Drill (Hard-coating-covered tool, Hard-coating-covered member), 30: Tool substrate (substrate), 24: Hard coating, 34: A layers, 36: B layers, 38: C layers, 40: nanolayer-alternated layers