Acoustic wave device, multiplexer, high-frequency front-end circuit, and communication apparatus

Abstract

An acoustic wave device includes a silicon oxide film, a piezoelectric body made of lithium tantalate, and interdigital transducer electrodes stacked on a supporting substrate made of silicon, in which the values of the wave length-normalized film thickness and the Euler angle of the piezoelectric body made of lithium tantalate, the wave length-normalized film thickness of the silicon oxide film, the wave length-normalized film thickness of the interdigital transducer electrodes in terms of aluminum thickness, the propagation direction of the supporting substrate, and the wave length-normalized film thickness of the supporting substrate are set such that represented by Formula (1) for at least one of responses of first, second, and third higher-order modes is more than about 2.4, and T.sub.Si>20.

Claims

1. An acoustic wave device, comprising: a supporting substrate made of silicon; a silicon oxide film stacked on or above the supporting substrate; a piezoelectric body stacked on or above the silicon oxide film, the piezoelectric body being made of lithium tantalate; and interdigital transducer electrodes disposed on or above a main surface of the piezoelectric body; wherein where a wave length determined by a pitch of electrode fingers of the interdigital transducer electrodes is denoted by , a wave length-normalized film thickness of the piezoelectric body is denoted by T.sub.LT, an Euler angle of the piezoelectric body is denoted by .sub.LT, a wave length-normalized film thickness of the silicon oxide film is denoted by T.sub.S, a wave length-normalized film thickness of the interdigital transducer electrodes in terms of aluminum thickness is denoted by T.sub.E, a propagation direction in the supporting substrate is denoted by .sub.Si, and a wave length-normalized film thickness of the supporting substrate is denoted by T.sub.Si, T.sub.LT, .sub.LT, T.sub.S, T.sub.E, and .sub.Si are set such that I.sub.h represented by Formula (1) below for at least one of responses of a first higher-order mode, a second higher-order mode, and a third higher-order mode is more than about 2.4, and T.sub.Si>20; $\begin{array}{cc}{I}_h=a_{T_{\mathrm{LT}}}^{\left(2\right)}\left({\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)}^2-b_{T_{\mathrm{LT}}}^{\left(2\right)}\right)+a_{T_{\mathrm{LT}}}^{\left(1\right)}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)+a_{T_S}^{\left(2\right)}\left({\left(T_S-c_{T_S}\right)}^2-b_{T_S}^{\left(2\right)}\right)+a_{T_S}^{\left(1\right)}\left(T_S-c_{T_S}\right)+a_{T_E}^{\left(4\right)}\left({\left(T_E-c_{T_E}\right)}^4-b_{T_E}^{\left(4\right)}\right)+a_{T_E}^{\left(3\right)}\left({\left(T_E-c_{T_E}\right)}^3-b_{T_E}^{\left(3\right)}\right)+a_{T_E}^{\left(2\right)}\left({\left(T_E-c_{T_E}\right)}^2-b_{T_E}^{\left(2\right)}\right)+a_{T_E}^{\left(1\right)}\left(T_E-c_{T_E}\right)+a_{{}_{\mathrm{Si}}}^{\left(6\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^6-b_{{}_{\mathrm{Si}}}^{\left(6\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(5\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(5\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(4\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(4\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(3\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^3-b_{{}_{\mathrm{Si}}}^{\left(3\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(2\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(2\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(1\right)}\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+a_{{}_{\mathrm{LT}}}^{\left(2\right)}\left({\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)}^2-b_{{}_{\mathrm{LT}}}^{\left(2\right)}\right)+a_{{}_{\mathrm{LT}}}^{\left(1\right)}\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_{\mathrm{LT}}{T}_S}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left(T_S-c_{T_S}\right)+d_{T_{\mathrm{LT}}{T}_E}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left(T_E-c_{T_E}\right)+d_{T_{\mathrm{LT}}{}_{\mathrm{Si}}}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_{\mathrm{LT}}{}_{\mathrm{LT}}}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_S{T}_E}\left(T_S-c_{T_S}\right)\left(T_E-c_{T_E}\right)+d_{T_S{}_{\mathrm{Si}}}\left(T_S-c_{T_S}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_S{}_{\mathrm{LT}}}\left(T_S-c_{T_S}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_E{}_{\mathrm{Si}}}\left(T_E-c_{T_E}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_E{}_{\mathrm{LT}}}\left(T_E-c_{T_E}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{{}_{\mathrm{Si}}{}_{\mathrm{LT}}}\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+e& \mathrm{Formula}\left(1\right)\end{array}$ where coefficients a, b, c, d, and e in Formula (1) are values presented in Tables 1 to 36 below in accordance with ranges of orientation of the supporting substrate either of (100), (110), or (111), a type of higher-order mode, the wave length-normalized film thickness of the silicon oxide film, the wave length-normalized film thickness of the piezoelectric body, and the propagation direction in the supporting substrate; TABLE-US-00073 TABLE 1 Si(100) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 0 0 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0 0 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 5.857231176 5.857231176 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.148 0.148 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 19.75255913 19.75255913 a.sub.TE.sup.(1) 2.877583447 2.877583447 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.022736 0.022736 c.sub.TE 0.242 0.242 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.004788767 0.004788767 a.sub.Si.sup.(1) 0.024306207 0.024306207 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 81.81 81.81 c.sub.Si 8.7 8.7 a.sub.LT.sup.(2) 0.008235936 0.008235936 a.sub.LT.sup.(1) 0.021048278 0.021048278 b.sub.LT.sup.(2) 65.16 65.16 c.sub.LT 52.2 52.2 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.786852571 0.786852571 d.sub.TESi 0 0 d.sub.TELT 0.237034335 0.237034335 d.sub.SiLT 0 0 e 1.499248378 1.499248378; TABLE-US-00074 TABLE 2 Si(100) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 125.5342427 a.sub.TLT.sup.(1) 13.43961051 7.643409732 b.sub.TLT.sup.(2) 0 0.006076558 c.sub.TLT 0.329807692 0.321186441 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 11.80744788 10.05306878 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.158653846 0.153389831 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0 7.595099843 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0 0.366101695 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.003335792 0 a.sub.Si.sup.(1) 0.039268266 0.013700762 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 191.7159763 0 c.sub.Si 13.26923077 16.01694915 a.sub.LT.sup.(2) 0.007476194 0 a.sub.LT.sup.(1) 0.010867175 0.053997369 b.sub.LT.sup.(2) 69.19378698 0 c.sub.LT 50.19230769 50.59322034 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.629167148 0.724576033 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0.521919406 d.sub.TSLT 0 0 d.sub.TESi 0 0.523966449 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.071831837 3.228508418; TABLE-US-00075 TABLE 3 Si(100) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 15.6141248 15.6141248 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.163309353 0.163309353 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 22.02440893 22.02440893 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.325179856 0.325179856 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 248.4374004 248.4374004 a.sub.TE.sup.(2) 36.57127964 36.57127964 a.sub.TE.sup.(1) 13.88180854 13.88180854 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0.000480119 0.000480119 b.sub.TE.sup.(2) 0.020416128 0.020416128 c.sub.TE 0.240647482 0.240647482 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.002456326 0.002456326 a.sub.Si.sup.(1) 0.048553126 0.048553126 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 279.6050929 279.6050929 c.sub.Si 22.3381295 22.3381295 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.005427275 0.005427275 b.sub.LT.sup.(2) 0 0 c.sub.LT 50.35971223 50.35971223 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 41.63149071 41.63149071 d.sub.TSSi 0.577179204 0.577179204 d.sub.TSLT 0.603866778 0.603866778 d.sub.TESi 0.134944598 0.134944598 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.703317679 2.703317679; TABLE-US-00076 TABLE 4 Si(100) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 133.7896555 a.sub.TLT.sup.(1) 7.761727985 9.701155851 b.sub.TLT.sup.(2) 0 0.006281971 c.sub.TLT 0.315508021 0.306914894 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 20.35135077 6.186650236 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.297860963 0.298404255 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 110.8304316 0 a.sub.TE.sup.(1) 4.036561723 8.229960495 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006431411 0 c.sub.TE 0.140374332 0.363297872 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.002534654 0.001652947 a.sub.Si.sup.(1) 0.024168138 0.003241344 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 269.2484772 266.6845858 c.sub.Si 21.4171123 20.26595745 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0 0.066116428 b.sub.LT.sup.(2) 0 0 c.sub.LT 90 50.4787234 d.sub.TLTTS 96.23533718 0 d.sub.TLTTE 66.46866878 0 d.sub.TLTSi 0.404808481 0.688053172 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0.733337318 0 d.sub.TSLT 0 0 d.sub.TESi 0.584322518 0.372994212 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 3.679364607 4.30794513; TABLE-US-00077 TABLE 5 Si(100) Second higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 5.687707928 5.687707928 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.139506173 0.139506173 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 5.653643283 5.653643283 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.148148148 0.148148148 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 1.004369706 1.004369706 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.255555556 0.255555556 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000197083 0.000197083 a.sub.Si.sup.(2) 0.003376583 0.003376583 a.sub.Si.sup.(1) 0.118081927 0.118081927 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 379.4708632 379.4708632 b.sub.Si.sup.(2) 278.0521262 278.0521262 c.sub.Si 23.14814815 23.14814815 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.128631041 0.128631041 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.32098765 49.32098765 d.sub.TLTTS 0 0 d.sub.TLTTE 72.43278274 72.43278274 d.sub.TLTSi 0.604747502 0.604747502 d.sub.TLTLT 1.743618251 1.743618251 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.994157261 0.994157261 d.sub.TESi 0 0 d.sub.TELT 0.280889881 0.280889881 d.sub.SiLT 0.003095822 0.003095822 e 5.638096455 5.638096455; TABLE-US-00078 TABLE 6 Si(100) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 7.809960834 4.249755245 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.30962963 0.302857143 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0.800874586 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0.150714286 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 3.563479635 9.07053135 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.148518519 0.353571429 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000160979 0 a.sub.Si.sup.(2) 0.000757552 0.001332545 a.sub.Si.sup.(1) 0.095765615 0.003836714 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 384.7407407 0 b.sub.Si.sup.(2) 278.2222222 285.0956633 c.sub.Si 21.33333333 20.89285714 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.043185248 0.033521037 b.sub.LT.sup.(2) 0 0 c.sub.LT 50 50.92857143 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.383208698 0.220029295 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0.974573109 d.sub.TESi 0 0 d.sub.TELT 1.01389349 1.078939399 d.sub.SiLT 0 0.002899732 e 5.569590226 5.29442278; TABLE-US-00079 TABLE 7 Si(100) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 11.51287 11.51287 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.136328125 0.136328125 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 6.022608826 6.022608826 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.305859375 0.305859375 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 180.607873 180.607873 a.sub.TE.sup.(2) 1.347493816 1.347493816 a.sub.TE.sup.(1) 4.841204365 4.841204365 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0.000227051 0.000227051 b.sub.TE.sup.(2) 0.019179688 0.019179688 c.sub.TE 0.25625 0.25625 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.001342794 0.001342794 a.sub.Si.sup.(1) 0.25625 0.25625 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 275.7568359 275.7568359 c.sub.Si 0.25625 0.25625 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.153688205 0.153688205 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.140625 49.140625 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 1.180623763 1.180623763 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.41394071 0.41394071 d.sub.SiLT 0.003203013 0.003203013 e 4.433641408 4.433641408; TABLE-US-00080 TABLE 8 Si(100) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 119.666412 118.2359738 a.sub.TLT.sup.(1) 4.447768142 2.271979446 b.sub.TLT.sup.(2) 0.006371047 0.00699901 c.sub.TLT 0.31147541 0.30631068 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 3.805216895 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0.298543689 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 117.8354557 121.7109482 a.sub.TE.sup.(1) 2.107193686 0.578851453 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006775956 0.006610661 c.sub.TE 0.15 0.35631068 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.001658706 0 a.sub.Si.sup.(1) 0.005677734 0.003834195 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 272.5477022 0 c.sub.Si 20.90163934 20.02427184 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.051921544 0.050011808 b.sub.LT.sup.(2) 0 0 c.sub.LT 48.36065574 48.93203883 d.sub.TLTTS 0 0 d.sub.TLTTE 61.26575286 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 82.22932804 d.sub.TSSi 0 0 d.sub.TSLT 0 0.470524678 d.sub.TESi 0 0 d.sub.TELT 0.904198722 0.776132158 d.sub.SiLT 0.003410501 0.003906326 e 5.339814906 5.463687811; TABLE-US-00081 TABLE 9 Si(100) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 16.39135605 16.39135605 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.196774194 0.196774194 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 4.824831305 4.824831305 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.170967742 0.170967742 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 45.57608817 45.57608817 a.sub.TE.sup.(1) 10.80005563 10.80005563 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.018296046 0.018296046 c.sub.TE 0.303225806 0.303225806 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000172048 0.000172048 a.sub.Si.sup.(2) 0.00384923 0.00384923 a.sub.Si.sup.(1) 0.009826773 0.009826773 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 143.0843208 143.0843208 b.sub.Si.sup.(2) 215.8688866 215.8688866 c.sub.Si 22.25806452 22.25806452 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.066799879 0.066799879 b.sub.LT.sup.(2) 0 0 c.sub.LT 50.16129032 50.16129032 d.sub.TLTTS 0 0 d.sub.TLTTE 112.847682 112.847682 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 1.750763196 1.750763196 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.466692151 0.466692151 d.sub.SiLT 0 0 e 2.904746788 2.904746788; TABLE-US-00082 TABLE 10 Si(100) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 8.135537689 8.135537689 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.311659193 0.311659193 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 20.38200282 20.38200282 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.149327354 0.149327354 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 3.460675692 3.460675692 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.267488789 0.267488789 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.003759233 0.003759233 a.sub.Si.sup.(1) 0.015931998 0.015931998 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 239.0395946 239.0395946 c.sub.Si 18.90134529 18.90134529 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.017576249 0.017576249 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.9103139 49.9103139 d.sub.TLTTS 152.1817236 152.1817236 d.sub.TLTTE 0 0 d.sub.TLTSi 0.359387178 0.359387178 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.911415415 0.911415415 d.sub.TESi 0 0 d.sub.TELT 0.275815872 0.275815872 d.sub.SiLT 0 0 e 3.952626598 3.952626598; TABLE-US-00083 TABLE 11 Si(100) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 26.36951471 26.36951471 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.161538462 0.161538462 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 10.09828536 10.09828536 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.321025641 0.321025641 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 21.38297597 21.38297597 a.sub.TE.sup.(1) 2.383287449 2.383287449 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.01947666 0.01947666 c.sub.TE 0.270512821 0.270512821 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000176024 0.000176024 a.sub.Si.sup.(2) 0.001397911 0.001397911 a.sub.Si.sup.(1) 0.107515297 0.107515297 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 282.3623122 282.3623122 b.sub.Si.sup.(2) 255.2071006 255.2071006 c.sub.Si 23.84615385 23.84615385 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.085112984 0.085112984 b.sub.LT.sup.(2) 0 0 c.sub.LT 48.97435897 48.97435897 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.816828716 0.816828716 d.sub.TLTLT 0.865519967 0.865519967 d.sub.TSTE 0 0 d.sub.TSSi 0.538336559 0.538338559 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.002971652 0.002971652 e 3.504362202 3.504362202; TABLE-US-00084 TABLE 12 Si(100) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 6.371850196 6.371850196 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.292192192 0.292192192 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0.609606885 0.609606885 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.2996997 0.2996997 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0 0 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0 0 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000224133 0.000224133 a.sub.Si.sup.(2) 0.004048532 0.004048532 a.sub.Si.sup.(1) 0.126847922 0.126847922 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 1375.85979 1375.85979 b.sub.Si.sup.(2) 281.2555799 281.2555799 c.sub.Si 19.77477477 19.77477477 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.056146223 0.056146223 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.48948949 49.48948949 d.sub.TLTTS 94.47145497 94.47145497 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.568942451 0.568942451 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.005654813 0.005654813 e 4.940340284 4.940340284; TABLE-US-00085 TABLE 13 Si(110) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 16.69742899 16.69742899 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.1675 0.1675 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 15.90196012 15.90196012 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.1525 0.1525 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0 0 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0 0 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000183963 0.000183963 a.sub.Si.sup.(2) 0.003236307 0.003236307 a.sub.Si.sup.(1) 0.071460688 0.071460688 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 5768.71875 5768.71875 b.sub.Si.sup.(2) 399.9375 399.9375 c.sub.Si 65.25 65.25 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0 0 b.sub.LT.sup.(2) 0 0 c.sub.LT 90 90 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 1.873870705 1.873870705 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 0.957101918 0.957101918 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 33.56520202 0 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.192857143 0 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 26.3030303 0 a.sub.TE.sup.(1) 6.181053391 0 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006326531 0 c.sub.TE 0.378571429 0 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0.000177142 a.sub.Si.sup.(2) 0 0.002186084 a.sub.Si.sup.(1) 0.085067773 0.13561432 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 2642.857143 b.sub.Si.sup.(2) 0 500 c.sub.Si 34.28571429 55 a.sub.LT.sup.(2) 0 0.005336622 a.sub.LT.sup.(1) 0.070255628 0.032718563 b.sub.LT.sup.(2) 0 65.75963719 c.sub.LT 51.42857143 50.95238095 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.716151515 0 d.sub.SiLT 0.00729303 0.002110378 e 1.634922542 1.290881853; TABLE-US-00086 TABLE 14 Si(110) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 23.96596978 4.695531045 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.34 0.3296875 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 23.18485905 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.175555556 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 43.48595551 a.sub.TE.sup.(1) 0 2.467954545 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0.006875 c.sub.TE 0 0.15 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.018474062 0 a.sub.Si.sup.(1) 0.059131688 0 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 81.55555556 0 c.sub.Si 35.33333333 0 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.009475371 0 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.33333333 90 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0.617240199 0 d.sub.TSTE 0 0 d.sub.TSSi 2.612107038 0 d.sub.TSLT 2.129359248 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.871101002 0 e 2.851861362 2.210765625 0.25 T.sub.E 0.45 0 .sub.Si < 45 0 .sub.Si < 45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 7.344438725 7.344438725 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.338983051 0.338983051 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 70.50554427 70.50554427 a.sub.TE.sup.(1) 5.460437635 5.460437635 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006716461 0.006716461 c.sub.TE 0.365254237 0.365254237 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000119479 0.000119479 a.sub.Si.sup.(2) 0.003987724 0.003987724 a.sub.Si.sup.(1) 0.047908658 0.047908658 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 2384.203107 2384.203107 b.sub.Si.sup.(2) 216.791152 216.791152 c.sub.Si 30.76271186 30.76271186 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.026725166 0.026725166 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.83050847 49.83050847 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.573237288 2.573237288; TABLE-US-00087 TABLE 15 Si(110) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 10.87353735 17.74612134 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.167045455 0.158227848 a.sub.TS.sup.(2) 92.14417413 275.6432031 a.sub.TS.sup.(1) 6.141913324 0.713377524 b.sub.TS.sup.(2) 0.004213585 0.004749239 c.sub.TS 0.339772727 0.317721519 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 37.82699975 0 a.sub.TE.sup.(1) 4.315324766 3.259148162 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.007147469 0 c.sub.TE 0.153409091 0.138607595 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000254041 0.000266841 a.sub.Si.sup.(2) 0.00704637 0.003350583 a.sub.Si.sup.(1) 0.123432463 0.05687546 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 1197.310014 2539.305207 b.sub.Si.sup.(2) 188.2457386 286.0358917 c.sub.Si 28.125 63.60759494 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.046748629 0.00460971 b.sub.LT.sup.(2) 0 0 c.sub.LT 51.59090909 50.75949367 d.sub.TLTTS 0 0 d.sub.TLTTE 0 105.3055279 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 58.63016883 0 d.sub.TSSi 0.443510572 0.274149566 d.sub.TSLT 0 0 d.sub.TESi 0.293912516 0.280924747 d.sub.TELT 0 0.457718571 d.sub.SiLT 0 0.005165328 e 1.722804167 2.484892701 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 16.74814911 16.74814911 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.168032787 0.168032787 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 9.071522271 9.071522271 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.314754098 0.314754098 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 5.270739047 5.270739047 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.356557377 0.356557377 a.sub.Si.sup.(6) 3.73552E09 3.73552E09 a.sub.Si.sup.(5) 4.69013E08 4.69013E08 a.sub.Si.sup.(4) 1.07773E05 1.07773E05 a.sub.Si.sup.(3) 5.64997E05 5.64997E05 a.sub.Si.sup.(2) 0.007526984 0.007526984 a.sub.Si.sup.(1) 0.035719404 0.035719404 b.sub.Si.sup.(6) 1801696668 1801696668 b.sub.Si.sup.(5) 6726299.443 6726299.443 b.sub.Si.sup.(4) 1035415.498 1035415.498 b.sub.Si.sup.(3) 3573.665857 3573.665857 b.sub.Si.sup.(2) 720.1088417 720.1088417 c.sub.Si 48.19672131 48.19672131 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0 0 b.sub.LT.sup.(2) 0 0 c.sub.LT 90 90 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.976959016 2.976959016; TABLE-US-00088 TABLE 16 Si(110) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 5.239160454 5.820942031 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.309375 0.302702703 a.sub.TS.sup.(2) 24.40391167 40.38499201 a.sub.TS.sup.(1) 2.128595361 6.73354721 b.sub.TS.sup.(2) 0.006013184 0.005624543 c.sub.TS 0.3265625 0.275675676 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 51.46488975 a.sub.TE.sup.(1) 1.921891837 0.509929613 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0.006479182 c.sub.TE 0.153125 0.147297297 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0.000165117 a.sub.Si.sup.(2) 0.000936051 0.00475603 a.sub.Si.sup.(1) 0.02141106 0.040196571 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 2115.829763 b.sub.Si.sup.(2) 246.9177246 196.5668371 c.sub.Si 24.140625 57.97297297 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.023743346 0.023741003 b.sub.LT.sup.(2) 0 0 c.sub.LT 50.078125 48.51351351 d.sub.TLTTS 0 0 d.sub.TLTTE 35.16960363 48.00382984 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.234382842 0 d.sub.SiLT 0 0.00130658 e 2.175330984 2.239116787 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 39.48011293 a.sub.TLT.sup.(1) 4.867344296 2.496300587 b.sub.TLT.sup.(2) 0 0.00654321 c.sub.TLT 0.286363636 0.288888889 a.sub.TS.sup.(2) 0 40.45660337 a.sub.TS.sup.(1) 3.626479228 6.290401812 b.sub.TS.sup.(2) 0 0.005617234 c.sub.TS 0.31 0.272222222 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 1.508039016 0.870147512 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.341818182 0.351388889 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 9.55404E05 a.sub.Si.sup.(2) 0 0.002198207 a.sub.Si.sup.(1) 0.017752634 0.036260775 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 1531.394676 b.sub.Si.sup.(2) 0 199.8263889 c.sub.Si 21.13636364 60.41666667 a.sub.LT.sup.(2) 0 0.003220943 a.sub.LT.sup.(1) 0.038368027 0.005042496 b.sub.LT.sup.(2) 0 72.22222222 c.sub.LT 50.81818182 50 d.sub.TLTTS 0 43.45862557 d.sub.TLTTE 23.6423037 52.46703277 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0.273892853 d.sub.SiLT 0.001221935 0 e 2.271294054 2.496300587; TABLE-US-00089 TABLE 17 Si(110) Second higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 7.587457615 7.587457615 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.174380165 0.174380165 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 3.979714537 3.979714537 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.150413223 0.150413223 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0.865040993 0.865040993 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.245867769 0.245867769 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 5.87537E07 5.87537E07 a.sub.Si.sup.(3) 8.59015E07 8.59015E07 a.sub.Si.sup.(2) 0.001948222 0.001948222 a.sub.Si.sup.(1) 0.027558032 0.027558032 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 1129197.497 1129197.497 b.sub.Si.sup.(3) 1524.372996 1524.372996 b.sub.Si.sup.(2) 776.3813947 776.3813947 c.sub.Si 41.52892562 41.52892562 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.018744549 0.018744549 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.25619835 49.25619835 d.sub.TLTTS 140.6234074 140.6234074 d.sub.TLTTE 25.20654793 25.20654793 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 1.789519626 1.789519626 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 7.587457615 7.587457615 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.174380165 0.174380165 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 3.979714537 3.979714537 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.150413223 0.150413223 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0.865040993 0.865040993 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.245867769 0.245867769 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 5.87537E07 5.87537E07 a.sub.Si.sup.(3) 8.59015E07 8.59015E07 a.sub.Si.sup.(2) 0.001948222 0.001948222 a.sub.Si.sup.(1) 0.027558032 0.027558032 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 1129197.497 1129197.497 b.sub.Si.sup.(3) 1524.372996 1524.372996 b.sub.Si.sup.(2) 776.3813947 776.3813947 c.sub.Si 41.52892562 41.52892562 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.018744549 0.018744549 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.25619835 49.25619835 d.sub.TLTTS 140.6234074 140.6234074 d.sub.TLTTE 25.20654793 25.20654793 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 1.789519626 1.789519626; TABLE-US-00090 TABLE 18 Si(110) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 3.912934705 3.912934705 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.306451613 0.306451613 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 1.912614784 1.91264784 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.148924731 0.148924731 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.0004718 0.0004718 a.sub.Si.sup.(1) 0.003265633 0.003265633 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 847.4765869 847.4765869 c.sub.Si 35.32258065 36.32258065 a.sub.LT.sup.(2) 0.005014741 0.005014741 a.sub.LT.sup.(1) 0.023115164 0.023115164 b.sub.LT.sup.(2) 67.0626662 67.0626662 c.sub.LT 49.62365591 49.62365591 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.563162206 0.563162206 d.sub.SiLT 0 0 e 2.002512986 2.002512986 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 39.68139696 39.68139696 a.sub.TLT.sup.(1) 3.801935963 3.801935963 b.sub.TLT.sup.(2) 0.00692398 0.00692398 c.sub.TLT 0.297857143 0.297857143 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 6.089810932 6.089810932 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.347857143 0.347857143 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 8.78847E06 8.78847E06 a.sub.Si.sup.(2) 0.000160567 0.000160567 a.sub.Si.sup.(1) 0.023574651 0.023574651 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 2351.597668 2351.597668 b.sub.Si.sup.(2) 880.2091837 880.2091837 c.sub.Si 43.07142857 43.07142857 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.030121011 0.030121011 b.sub.LT.sup.(2) 0 0 c.sub.LT 51.28571429 51.28571429 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.125572529 0.125572529 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.417002414 0.417002414 d.sub.SiLT 0 0 e 2.550158637 2.550158637; TABLE-US-00091 TABLE 19 Si(110) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 2.992014692 2.992014692 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.156390977 0.156390977 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 9.089925228 9.089925228 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.305263158 0.305263158 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 5.773590917 5.773590917 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.166541353 0.166541353 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.000377109 0.000377109 a.sub.Si.sup.(1) 0.013702515 0.013702515 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 792.2381141 792.2381141 c.sub.Si 41.39097744 41.39097744 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.015804666 0.015804666 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.32330827 49.32330827 d.sub.TLTTS 0 0 d.sub.TLTTE 80.90186655 80.90186655 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 29.68261053 29.68261053 d.sub.TSSi 0.136750854 0.136750854 d.sub.TSLT 0 0 d.sub.TESi 0.146211814 0.146211814 d.sub.TELT 0.41229257 0.41229257 d.sub.SiLT 0 0 e 2.596813807 2.596813807 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 1.461725087 1.461725087 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.155345912 0.155345912 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 1.247751383 1.247751383 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.327672956 0.327672956 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 130.6388144 130.6388144 a.sub.TE.sup.(1) 0.010504162 0.010504162 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006662711 0.006662711 c.sub.TE 0.341823899 0.341823899 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 1.03604E05 1.03604E05 a.sub.Si.sup.(2) 0.000138558 0.000138558 a.sub.Si.sup.(1) 0.028102653 0.028102653 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 3096.349671 3096.349671 b.sub.Si.sup.(2) 957.6361695 957.6361695 c.sub.Si 43.20754717 43.20754717 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.028892246 0.028892246 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.62264151 49.62264151 d.sub.TLTTS 44.5976835 44.5976835 d.sub.TLTTE 150.2428298 150.2428298 d.sub.TLTSi 0.225109644 0.225109644 d.sub.TLTLT 0 0 d.sub.TSTE 47.35851038 47.35851038 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.049341112 2.049341112; TABLE-US-00092 TABLE 20 Si(110) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 2.80791074 2.80791074 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.3069869 0.3069869 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 5.618098986 5.618098986 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.286462882 0.286462882 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 8.962154821 8.962154821 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.167467249 0.167467249 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0 0 a.sub.Si.sup.(1) 0.003677309 0.003677309 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 0 0 c.sub.Si 40.93886463 40.93886463 a.sub.LT.sup.(2) 0.00527863 0.00527863 a.sub.LT.sup.(1) 0.008431458 0.008431458 b.sub.LT.sup.(2) 66.00179249 66.00179249 c.sub.LT 50.61135371 50.61135371 d.sub.TLTTS 63.6265441 63.6265441 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 57.20229582 57.20229582 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0.098212695 0.098212695 d.sub.TELT 0.32576925 0.32576925 d.sub.SiLT 0 0 e 2.431352404 2.431352404 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 0 0 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0 0 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 73.23839461 73.23839461 a.sub.TE.sup.(1) 5.710295136 5.710295136 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.007310763 0.007310763 c.sub.TE 0.330930233 0.330930233 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0 0 a.sub.Si.sup.(1) 0 0 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 0 0 c.sub.Si 0 0 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0 0 b.sub.LT.sup.(2) 0 0 c.sub.LT 90 90 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.39032093 2.39032093; TABLE-US-00093 TABLE 21 Si(110) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 11.04825287 11.04825287 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.164705882 0.164705882 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 12.86806521 12.86806521 a.sub.TE.sup.(1) 39.88235294 39.88235294 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.019258131 0.019258131 c.sub.TE 0.286470588 0.286470588 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.000762445 0.000762445 a.sub.Si.sup.(1) 0.031584918 0.031584918 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 749.7716263 749.7716263 c.sub.Si 52.58823529 52.58823529 a.sub.LT.sup.(2) 0.004115091 0.004115091 a.sub.LT.sup.(1) 0.023260981 0.023260981 b.sub.LT.sup.(2) 81.16262976 81.16262976 c.sub.LT 50.11764706 50.11764706 d.sub.TLTTS 0 0 d.sub.TLTTE 32.35244505 32.35244505 d.sub.TLTSi 0.348515389 0.348515389 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.000823202 0.000823202 e 1.678155024 1.678155024 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 11.04825287 11.04825287 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.164705882 0.164705882 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 12.86806521 12.86806521 a.sub.TE.sup.(1) 39.88235294 39.88235294 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.019258131 0.019258131 c.sub.TE 0.286470588 0.286470588 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.000762445 0.000762445 a.sub.Si.sup.(1) 0.031584918 0.031584918 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 749.7716263 749.7716263 c.sub.Si 52.58823529 52.58823529 a.sub.LT.sup.(2) 0.004115091 0.004115091 a.sub.LT.sup.(1) 0.023260981 0.023260981 b.sub.LT.sup.(2) 81.16262976 81.16262976 c.sub.LT 50.11764706 50.11764706 d.sub.TLTTS 0 0 d.sub.TLTTE 32.35244505 32.35244505 d.sub.TLTSi 0.348515389 0.348515389 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.000823202 0.000823202 e 1.678155024 1.678155024; TABLE-US-00094 TABLE 22 Si(110) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 34.01092867 34.01092867 a.sub.TLT.sup.(1) 3.294448859 3.294448859 2.996122319 2.996122319 b.sub.TLT.sup.(2) 0 0 0.005572031 0.005572031 c.sub.TLT 0.328378378 0.328378378 0.31344086 0.31344086 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 2.752851676 2.752851676 1.564359965 1.564359965 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.162837838 0.162837838 0.160752688 0.160752688 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 4.548790211 4.548790211 1.370514553 1.370514553 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.165540541 0.165540541 0.355913978 0.355913978 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 7.03888E08 7.03888E08 3.78178E08 3.78178E08 a.sub.Si.sup.(4) 1.4265E06 1.4265E06 9.79065E07 9.79065E07 a.sub.Si.sup.(3) 0.000180358 0.000180358 9.73597E05 9.73597E05 a.sub.Si.sup.(2) 0.002681874 0.002681874 0.00192926 0.00192926 a.sub.Si.sup.(1) 0.092266284 0.092266284 0.04329175 0.04329175 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 11701030.08 11701030.08 24265475.25 24265475.25 b.sub.Si.sup.(4) 1439156.296 1439156.296 1705613.393 1705613.393 b.sub.Si.sup.(3) 1798.436559 1798.436559 6938.899332 6938.899332 b.sub.Si.sup.(2) 930.5183985 930.5183985 1060.880593 1060.880593 c.sub.Si 40.23648649 40.23648649 40.08064516 40.08064516 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.046000242 0.046000242 0.001380272 0.001380272 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.52702703 49.52702703 50.05376344 50.05376344 d.sub.TLTTS 136.9978702 136.9978702 73.06084164 73.06084164 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0.096651605 0.096651605 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 56.78924979 56.78924979 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.081014811 0.081014811 0 0 d.sub.TELT 0 0 0.194432704 0.194432704 d.sub.SiLT 0 0 0.000875955 0.000875955 e 2.543790382 2.543790382 2.964933907 2.964933907; TABLE-US-00095 TABLE 23 Si(110) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 13.1565646 13.1565646 13.1565646 13.1565646 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.179661017 0.179661017 0.179661017 0.179661017 a.sub.TS.sup.(2) 54.97015257 54.97015257 54.97015257 54.97015257 a.sub.TS.sup.(1) 1.195559996 1.195559996 1.195559996 1.195559996 b.sub.TS.sup.(2) 0.006496856 0.006496856 0.006496856 0.006496856 c.sub.TS 0.299435028 0.299435028 0.299435028 0.299435028 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 12.83875925 12.83875925 12.83875925 12.83875925 a.sub.TE.sup.(1) 2.591177902 2.591177902 2.591177902 2.591177902 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.02062115 0.02062115 0.02062115 0.02062115 c.sub.TE 0.282768362 0.282768362 0.282768362 0.282768362 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.00094978 0.00094978 0.00094978 0.00094978 a.sub.Si.sup.(1) 0.016861509 0.016861509 0.016861509 0.016861509 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0.00094978 0.00094978 0.00094978 0.00094978 c.sub.Si 44.83050847 44.83050847 44.83050847 44.83050847 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.020120147 0.020120147 0.020120147 0.020120147 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.50847458 50.50847458 50.50847458 50.50847458 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0.250474306 0.250474306 0.250474306 0.250474306 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.031071552 0.031071552 0.031071552 0.031071552 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 1.687640015 1.687640015 1.687640015 1.687640015; TABLE-US-00096 TABLE 24 Si(110) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 8.387315737 8.387315737 11.34973266 6.017883428 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.313377926 0.313377926 0.291082803 0.294578313 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.140898252 0.140898252 3.107378473 2.287606243 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.299331104 0.299331104 0.277707006 0.296385542 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 1.209727849 1.209727849 4.259242642 1.280235687 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.152006689 0.152006689 0.343630573 0.351204819 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 2.33027E08 2.33027E08 0 0 a.sub.Si.sup.(4) 7.78115E07 7.78115E07 0 0 a.sub.Si.sup.(3) 5.59108E05 5.59108E05 0.000194818 0 a.sub.Si.sup.(2) 0.002410767 0.002410767 0.000247924 0 a.sub.Si.sup.(1) 0.027662563 0.027662563 0.12904143 0.026766472 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 2083705.649 2083705.649 0 0 b.sub.Si.sup.(4) 1386257.115 1386257.115 0 0 b.sub.Si.sup.(3) 1267.413434 1267.413434 1811.750092 0 b.sub.Si.sup.(2) 895.5856198 895.5856198 293.105197 0 c.sub.Si 42.14046823 42.14046823 19.39490446 67.95180723 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.020067585 0.020067585 0.011988832 0.032566601 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.73244147 49.73244147 49.61783439 50.96385542 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 41.29194486 d.sub.TLTSi 0 0 0.203585177 0.376861254 d.sub.TLTLT 0 0 0.273779971 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0.20937463 d.sub.TSLT 0.349110894 0.349110894 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.216865482 0.216865482 0 0 d.sub.SiLT 0 0 0.00120304 0 e 2.390757235 2.390757235 2.548464154 2.523994879; TABLE-US-00097 TABLE 25 Si(111) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 16.07631847 20.22733656 30.72650306 27.83979251 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.145833333 0.1625 0.159574468 0.158695652 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 17.08812597 27.84866827 31.28009383 12.67453621 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.154166667 0.172916667 0.161702128 0.163043478 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 96.15629371 0 138.3065683 0 a.sub.TE.sup.(1) 1.263589744 2.833915191 9.345807167 7.807789594 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.006649306 0 0.006229063 0 c.sub.TE 0.170833333 0.14375 0.369148936 0.345652174 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0.006862727 a.sub.Si.sup.(1) 0.101535567 0.012511908 0.101466433 0.176438509 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 114.9456522 c.sub.Si 24.375 44.375 22.0212766 37.5 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 90 90 90 d.sub.TLTTS 477.9162005 760.9473336 1054.386561 1044.340968 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 1.332405924 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 250.1524613 102.33575 105.8611165 d.sub.TSSi 0 0 0 2.093429604 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.613440559 0 1.201832187 0.525734733 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 0.553295028 1.074792989 1.290770348 1.165057152; TABLE-US-00098 TABLE 26 Si(111) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 262.3995984 262.3995984 0 0 a.sub.TLT.sup.(1) 59.70400634 59.70400634 18.45032018 20.44479246 b.sub.TLT.sup.(2) 0.004691358 0.004691358 0 0 c.sub.TLT 0.355555556 0.355555556 0.332352941 0.331914894 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 73.33869606 73.33869606 9.963926388 24.5747574 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.185185185 0.185185185 0.166176471 0.165957447 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 19.84024877 19.84024877 8.905455835 17.17093947 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.157407407 0.157407407 0.369117647 0.373404255 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 4.69771E05 4.69771E05 0 0 a.sub.Si.sup.(3) 0.000362538 0.000362538 0 0 a.sub.Si.sup.(2) 0.055133453 0.055133453 0.004320224 0.021125116 a.sub.Si.sup.(1) 0.020862911 0.020862911 0.110606012 0.064218508 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 138552.1512 138552.1512 0 0 b.sub.Si.sup.(3) 78.36076818 78.36076818 0 0 b.sub.Si.sup.(2) 203.1635802 203.1636802 145.9775087 66.20642825 c.sub.Si 33.05555556 33.05555556 19.41176471 34.46808511 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.079155699 0.079155699 0 0.057672719 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.81481481 49.81481481 90 49.14893617 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 254.5809235 254.5809235 80.69948416 99.56817027 d.sub.TLTSi 2.260189055 2.260189055 0 0 d.sub.TLTLT 0.785540829 0.785540829 0 0 d.sub.TSTE 292.5762951 292.5762951 0 0 d.sub.TSSi 5.914103654 5.914103654 1.139436429 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 1.75463008 1.75463008 0.660099875 3.844659844 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0.006965097 e 1.304804416 1.304804416 2.734683251 3.115044468; TABLE-US-00099 TABLE 27 Si(111) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0.003649147 0 0 0 a.sub.TLT.sup.(1) 17.27824731 24.3903101 38.65647339 21.91795924 b.sub.TLT.sup.(2) 67.18624026 0 0 0 c.sub.TLT 0.154098361 0.15631068 0.17 0.1575 a.sub.TS.sup.(2) 84.63185118 0 148.7691928 140.0125491 a.sub.TS.sup.(1) 6.307527081 32.68184816 5.38083251 11.91949736 b.sub.TS.sup.(2) 0.00446166 0 0.005012245 0.004623438 c.sub.TS 0.352459016 0.345631068 0.331428571 0.33875 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 2.909874306 8.840975559 16.54803788 0.024546617 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.135245902 0.148058252 0.372857143 0.33125 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0.006216698 0 0 a.sub.Si.sup.(1) 0.068574135 0.018885558 0.187578295 0.122573316 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 147.1439344 0 0 c.sub.Si 22.62295082 43.10679612 22.71428571 39.1875 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.023219728 0.047846607 0.097088558 0.096327065 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.16393443 50.38834951 50.42857143 51.25 d.sub.TLTTS 0 144.763071 0 0 d.sub.TLTTE 0 0 161.2345526 0 d.sub.TLTSi 0.827435588 0 0 1.107475984 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 103.0553675 65.68497311 0 d.sub.TSSi 0 1.329400713 0.82928215 0.646921162 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.681669875 0.653050787 0.676734069 0.936807034 d.sub.TELT 0 0 0.481989709 0.52746173 d.sub.SiLT 0 0 0 0 e 1.560056382 2.656750279 2.259351603 1.805786084; TABLE-US-00100 TABLE 28 Si(111) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 77.3065693 243.6937004 0 a.sub.TLT.sup.(1) 13.49335267 9.878165228 6.309863061 12.90130633 b.sub.TLT.sup.(2) 0 0.00674795 0.006522811 0 c.sub.TLT 0.300961538 0.297350993 0.29858156 0.306818182 a.sub.TS.sup.(2) 133.2691939 160.4037443 82.71737336 100.5491122 a.sub.TS.sup.(1) 9.215218873 21.20902158 9.283157312 7.984268054 b.sub.TS.sup.(2) 0.006618898 0.005353274 0.006382979 0.005704201 c.sub.TS 0.314423077 0.303311258 0.3 0.311363636 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 90.39669198 0 0 a.sub.TE.sup.(1) 0.170720276 3.925569914 15.08313602 9.451928755 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006615499 0 0 c.sub.TE 0.15 0.147350993 0.363475177 0.346212121 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.00740803 0 0 0 a.sub.Si.sup.(1) 0.220502432 0.083594751 0.104344279 0.088096624 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 135.4659763 0 0 0 c.sub.Si 20.76923077 43.70860927 17.87234043 41.47727273 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.017420386 0.012240534 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.28846154 50.26490066 90 90 d.sub.TLTTS 149.298265 220.9283416 135.5319056 135.1493422 d.sub.TLTTE 0 0 0 65.38520659 d.sub.TLTSi 0 0 0 0.663828772 d.sub.TLTLT 0.703824061 0.739197646 0 0 d.sub.TSTE 122.4270642 0 94.62792088 0 d.sub.TSSi 0.714493384 1.189155195 0 1.017237669 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0.558597609 0 0 d.sub.TELT 0.734424122 0.628956462 0 0 d.sub.SiLT 0.003900657 0.003268439 0 0 e 2.246432623 2.691572945 3.425676672 3.236112132; TABLE-US-00101 TABLE 29 Si(111) Second higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 26.67263869 6.49243933 20.61574251 21.06290014 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.15443038 0.175438596 0.160759494 0.156896552 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 7.971316395 7.232224634 16.40433051 3.920556446 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.14556962 0.133333333 0.144303797 0.144827586 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 110.7824708 133.1826499 0 a.sub.TE.sup.(1) 12.77975858 10.04988717 5.027045348 5.686378626 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006463527 0.006582278 0 c.sub.TE 0.151265823 0.144736842 0.35 0.35862069 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0.007219474 0 a.sub.Si.sup.(1) 0.028716852 0.04192074 0.016815807 0.008780601 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 125.0280404 0 c.sub.Si 9.683544304 50 11.58227848 48.10344828 a.sub.LT.sup.(2) 0.01035547 0 0 0.014789077 a.sub.LT.sup.(1) 0.162093889 0.106646805 0.164306798 0.04587348 b.sub.LT.sup.(2) 61.8811088 0 0 55.43995244 c.sub.LT 49.62025316 50.35087719 51.01265823 51.20689655 d.sub.TLTTS 609.1883956 724.6623011 297.9828576 203.214973 d.sub.TLTTE 215.420422 0 159.6303697 0 d.sub.TLTSi 0 3.771938969 2.003207828 2.014745526 d.sub.TLTLT 1.80686724 0 2.218853872 0 d.sub.TSTE 0 307.4269587 0 0 d.sub.TSSi 0 0 1.097992723 0 d.sub.TSLT 1.985202008 0 2.104127874 0 d.sub.TESi 0 0 1.451355926 0 d.sub.TELT 203.386471 1.145649707 0 0 d.sub.SiLT 2.42647485 0.004357557 0 0 e 5.019952207 2.13826109 3.235663805 3.326865691; TABLE-US-00102 TABLE 30 Si(111) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 45.51074293 94.44342524 0 a.sub.TLT.sup.(1) 0.788515454 3.454988617 9.832405019 3.192556866 b.sub.TLT.sup.(2) 0 0.006485261 0.006459172 0 c.sub.TLT 0.298058252 0.295238095 0.298461538 0.298913043 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 8.97795964 1.31344944 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.142718447 0.147619048 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 9.791468713 0.170587985 0.71523762 10.72534968 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.15776699 0.124603175 0.356153846 0.347826087 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.003924448 0.001661439 0 0.00657999 a.sub.Si.sup.(1) 0.15776699 0.024952541 0.02404454 0.067389114 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 148.4588557 132.0861678 0 152.6937618 c.sub.Si 15.29126214 46.9047619 14.19230769 43.04347826 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.06700163 0.042141715 0.055240362 0.061747926 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 48.73786408 50.15873016 49.76923077 49.45652174 d.sub.TLTTS 116.7290786 78.78450728 0 0 d.sub.TLTTE 0 85.46351406 49.85282875 0 d.sub.TLTSi 0.70199108 0.445481139 0 0.604657146 d.sub.TLTLT 0.726496636 0 0 0 d.sub.TSTE 0 116.360096 0 0 d.sub.TSSi 0 0.622709588 0 0 d.sub.TSLT 2.041329502 0.339115637 0 0 d.sub.TESi 0 0.20688896 0 0 d.sub.TELT 0.774150432 0.439880407 0.6608739 1.068569294 d.sub.SiLT 0.005400114 0.002667922 0.004937546 0.006290209 e 4.209434885 1.791078273 3.48174155 3.934527612; TABLE-US-00103 TABLE 31 Si(111) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 4.673850215 0 8.8586067 1.957300157 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.141509434 0 0.153125 0.16 a.sub.TS.sup.(2) 82.42811022 0 87.42203531 0 a.sub.TS.sup.(1) 7.905282467 4.948155925 0.569845134 0.521030757 b.sub.TS.sup.(2) 0.006949092 0 0.006037326 0 c.sub.TS 0.294339623 0.314583333 0.297916667 0.285 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 53.51232744 79.38404758 0 0 a.sub.TE.sup.(1) 10.58973083 10.26534018 8.135327356 7.251553825 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.006016376 0.005677083 0 0 c.sub.TE 0.183962264 0.1375 0.336458333 0.37 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0.001429494 a.sub.Si.sup.(1) 0.010122468 0.039888924 0.016592245 0.004853684 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 145.6875 c.sub.Si 11.88679245 48.4375 14.0625 45.75 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.005093912 0.011098836 0.047530531 0.04750516 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50 50.41666667 50.72916667 49.75 d.sub.TLTTS 0 0 91.19418307 251.5375225 d.sub.TLTTE 0 0 156.3654518 0 d.sub.TLTSi 0.322255595 0 0 0.289820964 d.sub.TLTLT 0.768436344 0 0.735737765 0 d.sub.TSTE 0 75.51836907 0 0 d.sub.TSSi 0.512402643 0.300543357 0.724013025 0.245746891 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0.50556971 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0.002842264 0 0 e 2.770026639 2.638591885 1.980941925 2.412296494; TABLE-US-00104 TABLE 32 Si(111) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 4.449764983 0 13.78321665 10.59163435 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.321052632 0 0.309146341 0.303164557 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 3.433673203 1.746861763 3.363230821 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0.283443709 0.287804878 0.293037975 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 86.18383552 0 a.sub.TE.sup.(1) 3.853394073 8.768511808 1.867550529 15.68616064 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0.007157942 0 c.sub.TE 0.181578947 0.135430464 0.356097561 0.363291139 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.014178515 0.049910217 0.008697771 0.012742666 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 12.63157895 45.99337748 15.09146341 45 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0.061867934 0.051566965 0.028929641 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 50.59602649 50.30487805 50.56962025 d.sub.TLTTS 0 0 0 103.0440888 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0.181721459 0 0 0 d.sub.TLTLT 0 0 0 0.608943868 d.sub.TSTE 0 113.1914268 75.04640382 82.04954672 d.sub.TSSi 0 0 0.554356722 0.673316097 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0.512800103 0 d.sub.TELT 0 0 0.656702553 0 d.sub.SiLT 0 0 0 0 e 2.401219798 3.18651044 3.93030224 4.143483981; TABLE-US-00105 TABLE 33 Si(111) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 3.047618237 3.047618237 3.047618237 3.047618237 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.160869565 0.160869565 0.160869665 0.160869565 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 0 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 11.21750437 11.21750437 11.21750437 11.21750437 a.sub.TE.sup.(2) 3.666215654 3.666215654 3.666215654 3.666215654 a.sub.TE.sup.(1) 0.035248162 0.035248162 0.035248162 0.035248162 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0.000381688 0.000381688 0.000381688 0.000381688 b.sub.TE.sup.(2) 0.012589792 0.012589792 0.012589792 0.012589792 c.sub.TE 0.245652174 0.245652174 0.245652174 0.245652174 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.003582211 0.003582211 0.003582211 0.003582211 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 35.86956522 35.86956522 35.86956522 35.86956522 a.sub.LT.sup.(2) 0.000596775 0.000596775 0.000596775 0.000596775 a.sub.LT.sup.(1) 0.003385783 0.003385783 0.003385783 0.003385783 b.sub.LT.sup.(2) 77.88279773 77.88279773 77.88279773 77.88279773 c.sub.LT 47.82608696 47.82608696 47.82608696 47.82608696 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 2.939323227 2.939323227 2.939323227 2.939323227 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.000442922 0.000442922 0.000442922 0.000442922 e 0.277577227 0.277577227 0.277577227 0.277577227; TABLE-US-00106 TABLE 34 Si(111) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 0 0 0 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0 0 0 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 6.03484153 6.03484153 6.03484153 6.03484153 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.183333333 0.183333333 0.183333333 0.183333333 a.sub.TE.sup.(4) 215.3850281 215.3850281 215.3850281 215.3850281 a.sub.TE.sup.(3) 54.12265846 54.12265846 54.12265846 54.12265846 a.sub.TE.sup.(2) 0.942905209 0.942905209 0.942905209 0.942905209 a.sub.TE.sup.(1) 1.08045121 1.08045121 1.08045121 1.08045121 b.sub.TE.sup.(4) 0.000339332 0.000339332 0.000339332 0.000339332 b.sub.TE.sup.(3) 0.000317558 0.000317558 0.000317558 0.000317558 b.sub.TE.sup.(2) 0.011265432 0.011265432 0.011265432 0.011265432 c.sub.TE 0.211111111 0.211111111 0.211111111 0.211111111 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.004526908 0.004526908 0.004526908 0.004526908 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 27.5 27.5 27.5 27.5 a.sub.LT.sup.(2) 0.00046365 0.00046365 0.00046365 0.00046365 a.sub.LT.sup.(1) 0.005349146 0.005349146 0.005349146 0.005349146 b.sub.LT.sup.(2) 57.09876543 57.09876543 57.09876543 57.09876543 c.sub.LT 46.11111111 46.11111111 46.11111111 46.11111111 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 45.80413521 45.80413521 45.80413521 45.80413521 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.071786246 0.071786246 0.071786246 0.071786246 d.sub.SiLT 0.000425881 0.000425881 0.000425881 0.000425881 e 0.446604617 0.446604617 0.446604617 0.446604617; TABLE-US-00107 TABLE 35 Si(111) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 2.477108842 2.477108842 2.477108842 2.477108842 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.137349398 0.137349398 0.137349398 0.137349398 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.488747927 0.488747927 0.488747927 0.488747927 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.336144578 0.336144578 0.336144578 0.336144578 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 1.973253274 1.973253274 1.973253274 1.973253274 a.sub.TE.sup.(1) 0.124870592 0.124870592 0.124870592 0.124870592 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.017915517 0.017915517 0.017915517 0.017915517 c.sub.TE 0.256024096 0.256024096 0.256024096 0.256024096 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 7.6083E07 7.6083E07 7.6083E07 7.6083E07 a.sub.Si.sup.(3) 7.21121E06 7.21121E06 7.21121E06 7.21121E06 a.sub.Si.sup.(2) 0.000857107 0.000857107 0.000857107 0.000857107 a.sub.Si.sup.(1) 0.00490823 0.00490823 0.00490823 0.00490823 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 105622.9088 105622.9088 105622.9088 105622.9088 b.sub.Si.sup.(3) 217.2019476 217.2019476 217.2019476 217.2019476 b.sub.Si.sup.(2) 208.4409929 208.4409929 208.4409929 208.4409929 c.sub.Si 30.54216867 30.54216867 30.54216867 30.54216867 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 90 90 90 d.sub.TLTTS 4.821777856 4.821777856 4.821777856 4.821777856 d.sub.TLTTE 4.14067246 4.14067246 4.14067246 4.14067246 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.024454063 0.024454063 0.024454063 0.024454063 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 0.240178915 0.240178915 0.240178915 0.240178915; TABLE-US-00108 TABLE 36 Si(111) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 0 0 0 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0 0 0 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.380779889 0.380779889 0.380779889 0.380779889 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.285294118 0.285294118 0.285294118 0.285294118 a.sub.TE.sup.(4) 165.3225345 165.3225345 165.3225345 165.3225345 a.sub.TE.sup.(3) 23.65923214 23.65923214 23.65923214 23.65923214 a.sub.TE.sup.(2) 2.256295059 2.256295059 2.256295059 2.256295059 a.sub.TE.sup.(1) 0.292409126 0.292409126 0.292409126 0.292409126 b.sub.TE.sup.(4) 0.00051583 0.00051583 0.00051583 0.00051583 b.sub.TE.sup.(3) 0.00070344 0.00070344 0.00070344 0.00070344 b.sub.TE.sup.(2) 0.015017301 0.015017301 0.015017301 0.015017301 c.sub.TE 0.220588235 0.220588235 0.220588235 0.220588235 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.004846255 0.004846255 0.004846255 0.004846255 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 29.55882353 29.55882353 29.55882353 29.55882353 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.00165846 0.00165846 0.00165846 0.00165846 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 48.52941176 48.52941176 48.52941176 48.52941176 d.sub.TLTTS 0.04933649 0.04933649 0.04933649 0.04933649 d.sub.TLTTE 0.021023839 0.021023839 0.021023839 0.021023839 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 7.074776252 7.074776252 7.074776252 7.074776252 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.00049898 0.00049898 0.00049898 0.00049898 e 0.3405485 0.3405485 0.3405485 0.3405485.

2. The acoustic wave device according to claim 1, wherein I.sub.h for each of the first and second higher-order modes is more than about 2.4.

3. The acoustic wave device according to claim 1, wherein I.sub.h for each of the first and third higher-order modes is more than about 2.4.

4. The acoustic wave device according to claim 1, wherein I.sub.h for each of the second and third higher-order modes is more than about 2.4.

5. The acoustic wave device according to claim 1, wherein I.sub.h for each of the first, second, and third higher-order modes is more than about 2.4.

6. The acoustic wave device according to claim 1, wherein the piezoelectric body has a thickness of about 3.5 or less.

7. The acoustic wave device according to claim 6, wherein the piezoelectric body has a thickness of about 2.5 or less.

8. The acoustic wave device according to claim 6, wherein the piezoelectric body has a thickness of about 1.5 or less.

9. The acoustic wave device according to claim 6, wherein the piezoelectric body has a thickness of about 0.5 or less.

10. The acoustic wave device according to claim 1, wherein the acoustic wave device is an acoustic wave resonator.

11. An acoustic wave filter, comprising: a plurality of resonators; wherein at least one of the plurality of resonators is defined by the acoustic wave device according to claim 1.

12. The acoustic wave filter according to claim 11, wherein I.sub.h for each of the first and second higher-order modes is more than about 2.4.

13. The acoustic wave filter according to claim 11, wherein I.sub.h for each of the first and third higher-order modes is more than about 2.4.

14. The acoustic wave filter according to claim 11, wherein I.sub.h for each of the second and third higher-order modes is more than about 2.4.

15. The acoustic wave filter according to claim 11, wherein I.sub.h for each of the first, second, and third higher-order modes is more than about 2.4.

16. The acoustic wave filter according to claim 11, wherein the piezoelectric body has a thickness of about 3.5 or less.

17. A multiplexer, comprising: N acoustic wave filters, where N is 2 or more, having different pass bands; wherein one terminal of each of the N acoustic wave filters is commonly connected on an antenna terminal side; at least one acoustic wave filter among the N acoustic wave filters excluding an acoustic wave filter having a highest-frequency pass band includes a plurality of acoustic wave resonators; and at least one acoustic wave resonator among the plurality of acoustic wave resonators is defined by the acoustic wave device according to claim 1.

18. The multiplexer according to claim 17, wherein the multiplexer is a composite filter device for carrier aggregation.

19. A high-frequency front-end circuit, comprising: an acoustic wave filter including the acoustic wave device according to claim 1; and a power amplifier connected to the acoustic wave filter.

20. A communication apparatus, comprising: a high-frequency front-end circuit including an acoustic wave filter that includes the acoustic wave device according to claim 1, and a power amplifier connected to the acoustic wave filter; and an RF signal processing circuit.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1A is a schematic elevational cross-sectional view of an acoustic wave device according to a first preferred embodiment of the present invention, and FIG. 1B is a schematic plan view illustrating the electrode structure of the acoustic wave device according to the first preferred embodiment of the present invention.

(2) FIG. 2 illustrates admittance characteristics of an acoustic wave resonator.

(3) FIG. 3 illustrates the relationship between the propagation direction .sub.Si in a single-crystal Si layer and the strength S11 of the response of a first higher-order mode.

(4) FIG. 4 illustrates the relationship between the wave length-normalized film thickness T.sub.LT of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the first higher-order mode.

(5) FIG. 5 illustrates the relationship between the cut angle (90+.sub.LT) of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the first higher-order mode.

(6) FIG. 6 illustrates the relationship between the wave length-normalized film thickness T.sub.S of a SiO.sub.2 film and the strength S11 of the response of the first higher-order mode.

(7) FIG. 7 illustrates the relationship between the wave length-normalized film thickness T.sub.E of interdigital transducer electrodes and the strength S11 of the response of the first higher-order mode.

(8) FIG. 8 is a circuit diagram of a multiplexer including an acoustic wave device according to the first preferred embodiment of the present invention.

(9) FIG. 9 is a circuit diagram of an acoustic wave filter that includes the acoustic wave device according to the first preferred embodiment of the present invention and is used in a multiplexer.

(10) FIG. 10A illustrates the filter characteristics of a multiplexer including an acoustic wave device of a comparative example, and FIG. 10B illustrates the filter characteristics of a multiplexer according to the first preferred embodiment of the present invention.

(11) FIG. 11 illustrates the relationship between the wave length-normalized film thickness of a single-crystal Si layer and the maximum phases of responses of the first, second, and third higher-order modes.

(12) FIG. 12 illustrates the relationship between the propagation direction .sub.Si in a single-crystal Si layer and the strength S11 of the response of the second higher-order mode.

(13) FIG. 13 illustrates the relationship between the wave length-normalized film thickness T.sub.LT of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the second higher-order mode.

(14) FIG. 14 illustrates the relationship between the cut angle (90+.sub.LT) of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the second higher-order mode.

(15) FIG. 15 illustrates the relationship between the wave length-normalized film thickness T.sub.S of a SiO.sub.2 film and the strength S11 of the response of the second higher-order mode.

(16) FIG. 16 illustrates the relationship between the wave length-normalized film thickness T.sub.E of interdigital transducer electrodes and the strength S11 of the response of the second higher-order mode.

(17) FIG. 17 illustrates the relationship between the propagation direction .sub.Si in a single-crystal Si layer and the strength S11 of the response of the third higher-order mode.

(18) FIG. 18 illustrates the relationship between the wave length-normalized film thickness T.sub.LT of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the third higher-order mode.

(19) FIG. 19 illustrates the relationship between the cut angle (90+.sub.LT) of a piezoelectric body made of lithium tantalate and the strength S11 of the response of the third higher-order mode.

(20) FIG. 20 illustrates the relationship between the wave length-normalized film thickness T.sub.S of a SiO.sub.2 film and the strength S11 of the response of the third higher-order mode.

(21) FIG. 21 illustrates the relationship between the wave length-normalized film thickness T.sub.E of interdigital transducer electrodes and the strength S11 of the response of the third higher-order mode.

(22) FIG. 22 illustrates the relationship between the film thickness of a LiTaO.sub.3 film in an acoustic wave device and the quality factor.

(23) FIG. 23 illustrates the relationship between the film thickness of a LiTaO.sub.3 film in an acoustic wave device and the temperature coefficient of frequency TCF.

(24) FIG. 24 illustrates the relationship between the film thickness of a LiTaO.sub.3 film in an acoustic wave device and the acoustic velocity.

(25) FIG. 25 illustrates the relationship between the film thickness of a LiTaO.sub.3 film and the band width ratio.

(26) FIG. 26 illustrates the relationships among the film thickness of a SiO.sub.2 film, materials of high-acoustic-velocity films, and the acoustic velocity.

(27) FIG. 27 illustrates the relationships among the film thickness of a SiO.sub.2 film, the electromechanical coupling coefficient, and materials of high-acoustic-velocity films.

(28) FIG. 28 is a block diagram of a communication apparatus including a high-frequency front-end circuit according to a preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

(29) Preferred embodiments according to the present invention will be described in detail below with reference to the attached drawings so as to clarify the present invention.

(30) Preferred embodiments described in this specification are illustrative. It should be noted that partial replacement and combination of configurations in different preferred embodiments may be made.

(31) FIG. 1A is a schematic elevational cross-sectional view of an acoustic wave device according to a first preferred embodiment of the present invention, and FIG. 1B is a schematic plan view illustrating the electrode structure thereof.

(32) An acoustic wave device 1 is preferably a one-port acoustic wave resonator, for example. The acoustic wave device 1 includes a single-crystal Si layer 2 defining and functioning as a supporting substrate made of silicon. The term supporting substrate made of silicon includes a supporting substrate including only of silicon; and a supporting substrate made of a material including silicon as a main component and impurities. A SiO.sub.2 film 3 defining and functioning as a silicon oxide film and a piezoelectric body 4 made of lithium tantalate (LiTaO.sub.3) are stacked on the single-crystal Si layer 2. The piezoelectric body 4 includes first and second main surfaces 4a and 4b opposed to each other. Interdigital transducer electrodes 5 are disposed on the first main surface 4a. Reflectors 6 and 7 are disposed on both sides of the interdigital transducer electrodes 5 in the propagation direction of an acoustic wave. The SiO.sub.2 film 3 defining and functioning as a silicon oxide film may include not only SiO.sub.2 but also, for example, silicon oxide in which SiO.sub.2 is doped with fluorine or the like. In FIG. 1A, the SiO.sub.2 film 3 is directly on the single-crystal Si layer 2, the piezoelectric body 4 is directly on the SiO.sub.2 film 3, and the Interdigital transducer electrodes 5 are disposed directly on the piezoelectric body 4. However, the SiO.sub.2 film 3 may be indirectly on (or above) the single-crystal Si layer 2, the piezoelectric body 4 may be indirectly on (or above) the SiO.sub.2 film 3, and the Interdigital transducer electrodes 5 may be disposed indirectly on (or above) the piezoelectric body 4.

(33) The inventors of preferred embodiments of the present invention have discovered that in an acoustic wave resonator having such a structure in which a piezoelectric body made of lithium tantalate is stacked directly or indirectly on the single-crystal Si layer 2, responses due to first, second, and third higher-order modes are generated.

(34) FIG. 2 illustrates admittance characteristics of an acoustic wave resonator in order to explain first to third higher-order modes. The admittance characteristics illustrated in FIG. 2 are admittance characteristics of an acoustic wave resonator that has design parameters described below and that is not a preferred embodiment of the present invention.

(35) The single-crystal Si layer has Euler angles (.sub.Si, .sub.Si, .sub.Si)=(0, 0, 45). The SiO.sub.2 film has a film thickness of about 0.30. The piezoelectric body made of lithium tantalate has a film thickness of about 0.30. The piezoelectric body made of lithium tantalate has Euler angles (.sub.LT, .sub.LT, .sub.LT)=(0, 40, 0) The wave length determined by the pitch of electrode fingers of the interdigital transducer electrodes is about 1 m. Each of the interdigital transducer electrodes is defined by a stacked metal film in which an Al film and a Ti film are stacked, and each interdigital transducer electrode has a thickness of about 0.05 in terms of aluminum.

(36) As is apparent from FIG. 2, in the acoustic wave resonator described above, each of the responses of the first higher-order mode, the second higher-order mode, and the third higher-order mode appears at higher frequencies than the response of the main mode. Regarding the frequency positions, a position of response of first higher-order mode is lower than a position of response of second higher-order mode and a position of response of third higher-order mode, and the position of response of the second higher-order mode is lower than the position of response of the third higher-order mode. The response of the first higher-order mode is closest to the response of the main mode. However, FIG. 2 is an example, and the positional relationship of the frequencies of the modes may be switched, depending on conditions, such as the electrode thickness.

(37) A feature of the acoustic wave device 1 according to the present preferred embodiment is the fact that at least one of the response of the first higher-order mode, the response of the second higher-order mode, and the response of the third higher-order mode is reduced or prevented.

(38) The wave length determined by the pitch of the electrode fingers of the interdigital transducer electrodes 5 is denoted by . The wave length-normalized film thickness of the piezoelectric body 4 made of lithium tantalate is denoted by T.sub.LT. The Euler angle of the piezoelectric body made of lithium tantalate is denoted by .sub.LT. The wave length-normalized film thickness of the SiO.sub.2 film 3 is denoted by T.sub.S. The wave length-normalized film thickness of the interdigital transducer electrodes 5 in terms of aluminum thickness is denoted by T.sub.E. The propagation direction in the single-crystal Si layer 2 is denoted by .sub.Si. The wave length-normalized film thickness of the single-crystal Si layer 2 is denoted by T.sub.Si. T.sub.LT, .sub.LT, T.sub.S, T.sub.E, and .sub.Si are set such that I.sub.h represented by Formula (1) for at least one of the responses of the first higher-order mode, the second higher-order mode, and the third higher-order mode is preferably more than about 2.4, and T.sub.Si>about 20, for example. Thus, the at least one of the responses of the first, second, and third higher-order modes is effectively reduced or prevented. This will be described in detail below.

(39) In this specification, the wave length-normalized film thickness is a value obtained by normalizing the thickness of the film to the wave length determined by the pitch of the electrode fingers of the interdigital transducer electrodes. Thus, a value obtained by dividing actual thickness of the film by is the wave length-normalized film thickness. The wave length determined by the pitch of the electrode fingers of the interdigital transducer electrodes may be determined by the average pitch of the electrode fingers.

(40) $\begin{array}{cc}{I}_h=a_{T_{\mathrm{LT}}}^{\left(2\right)}\left({\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)}^2-b_{T_{\mathrm{LT}}}^{\left(2\right)}\right)+a_{T_{\mathrm{LT}}}^{\left(1\right)}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)+a_{T_S}^{\left(2\right)}\left({\left(T_S-c_{T_S}\right)}^2-b_{T_S}^{\left(2\right)}\right)+a_{T_S}^{\left(1\right)}\left(T_S-c_{T_S}\right)+a_{T_E}^{\left(4\right)}\left({\left(T_E-c_{T_E}\right)}^4-b_{T_E}^{\left(4\right)}\right)+a_{T_E}^{\left(3\right)}\left({\left(T_E-c_{T_E}\right)}^3-b_{T_E}^{\left(3\right)}\right)+a_{T_E}^{\left(2\right)}\left({\left(T_E-c_{T_E}\right)}^2-b_{T_E}^{\left(2\right)}\right)+a_{T_E}^{\left(1\right)}\left(T_E-c_{T_E}\right)+a_{{}_{\mathrm{Si}}}^{\left(6\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^6-b_{{}_{\mathrm{Si}}}^{\left(6\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(5\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(5\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(4\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(4\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(3\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^3-b_{{}_{\mathrm{Si}}}^{\left(3\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(2\right)}\left({\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)}^2-b_{{}_{\mathrm{Si}}}^{\left(2\right)}\right)+a_{{}_{\mathrm{Si}}}^{\left(1\right)}\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+a_{{}_{\mathrm{LT}}}^{\left(2\right)}\left({\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)}^2-b_{{}_{\mathrm{LT}}}^{\left(2\right)}\right)+a_{{}_{\mathrm{LT}}}^{\left(1\right)}\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_{\mathrm{LT}}{T}_S}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left(T_S-c_{T_S}\right)+d_{T_{\mathrm{LT}}{T}_E}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left(T_E-c_{T_E}\right)+d_{T_{\mathrm{LT}}{}_{\mathrm{Si}}}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_{\mathrm{LT}}{}_{\mathrm{LT}}}\left(T_{\mathrm{LT}}-c_{T_{\mathrm{LT}}}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_S{T}_E}\left(T_S-c_{T_S}\right)\left(T_E-c_{T_E}\right)+d_{T_S{}_{\mathrm{Si}}}\left(T_S-c_{T_S}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_S{}_{\mathrm{LT}}}\left(T_S-c_{T_S}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{T_E{}_{\mathrm{Si}}}\left(T_E-c_{T_E}\right)\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)+d_{T_E{}_{\mathrm{LT}}}\left(T_E-c_{T_E}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+d_{{}_{\mathrm{Si}}{}_{\mathrm{LT}}}\left({}_{\mathrm{Si}}-c_{{}_{\mathrm{Si}}}\right)\left({}_{\mathrm{LT}}-c_{{}_{\mathrm{LT}}}\right)+e& \mathrm{Formula}\left(1\right)\end{array}$

(41) In Formula (1), coefficients a, b, c, d, and e are values presented in Tables 37 to 72 below in accordance with ranges of, for example, the type of higher-order mode, the orientation of the single-crystal Si layer 2 either of (100), (110), or (111), the wave length-normalized film thickness of the SiO.sub.2 film 3, the wave length-normalized film thickness of the piezoelectric body made of lithium tantalate, and the propagation direction in the single-crystal Si layer 2.

(42) TABLE-US-00037 TABLE 37 Si(100) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 0 0 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0 0 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 5.857231176 5.857231176 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.148 0.148 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 19.75255913 19.75255913 a.sub.TE.sup.(1) 2.877583447 2.877583447 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.022736 0.022736 c.sub.TE 0.242 0.242 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.004788767 0.004788767 a.sub.Si.sup.(1) 0.024306207 0.024306207 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 81.81 81.81 c.sub.Si 8.7 8.7 a.sub.LT.sup.(2) 0.008235936 0.008235936 a.sub.LT.sup.(1) 0.021048278 0.021048278 b.sub.LT.sup.(2) 65.16 65.16 c.sub.LT 52.2 52.2 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.786852571 0.786852571 d.sub.TESi 0 0 d.sub.TELT 0.237034335 0.237034335 d.sub.SiLT 0 0 e 1.499248378 1.499248378

(43) TABLE-US-00038 TABLE 38 Si(100) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 125.5342427 a.sub.TLT.sup.(1) 13.43961051 7.643409732 b.sub.TLT.sup.(2) 0 0.006076558 c.sub.TLT 0.329807692 0.321186441 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 11.80744788 10.05306878 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.158653846 0.153389831 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0 7.595099843 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0 0.366101695 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.003335792 0 a.sub.Si.sup.(1) 0.039268266 0.013700762 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 191.7159763 0 c.sub.Si 13.26923077 16.01694915 a.sub.LT.sup.(2) 0.007476194 0 a.sub.LT.sup.(1) 0.010867175 0.053997369 b.sub.LT.sup.(2) 69.19378698 0 c.sub.LT 50.19230769 50.59322034 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.629167148 0.724576033 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0.521919406 d.sub.TSLT 0 0 d.sub.TESi 0 0.523966449 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.071831837 3.228508418

(44) TABLE-US-00039 TABLE 39 Si(100) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 15.6141248 15.6141248 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.163309353 0.163309353 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 22.02440893 22.02440893 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.325179856 0.325179856 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 248.4374004 248.4374004 a.sub.TE.sup.(2) 36.57127964 36.57127964 a.sub.TE.sup.(1) 13.88180854 13.88180854 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0.000480119 0.000480119 b.sub.TE.sup.(2) 0.020416128 0.020416128 c.sub.TE 0.240647482 0.240647482 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.002456326 0.002456326 a.sub.Si.sup.(1) 0.048553126 0.048553126 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 279.6050929 279.6050929 c.sub.Si 22.3381295 22.3381295 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.005427275 0.005427275 b.sub.LT.sup.(2) 0 0 c.sub.LT 50.35971223 50.35971223 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 41.63149071 41.63149071 d.sub.TSSi 0.577179204 0.577179204 d.sub.TSLT 0.603866778 0.603866778 d.sub.TESi 0.134944598 0.134944598 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 2.703317679 2.703317679

(45) TABLE-US-00040 TABLE 40 Si(100) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 133.7896555 a.sub.TLT.sup.(1) 7.761727985 9.701155851 b.sub.TLT.sup.(2) 0 0.006281971 c.sub.TLT 0.315508021 0.306914894 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 20.35135077 6.186650236 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.297860963 0.298404255 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 110.8304316 0 a.sub.TE.sup.(1) 4.036561723 8.229960495 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006431411 0 c.sub.TE 0.140374332 0.363297872 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.002534654 0.001652947 a.sub.Si.sup.(1) 0.024168138 0.003241344 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 269.2484772 266.6845858 c.sub.Si 21.4171123 20.26595745 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0 0.066116428 b.sub.LT.sup.(2) 0 0 c.sub.LT 90 50.4787234 d.sub.TLTTS 96.23533718 0 d.sub.TLTTE 66.46866878 0 d.sub.TLTSi 0.404808481 0.688053172 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0.733337318 0 d.sub.TSLT 0 0 d.sub.TESi 0.584322518 0.372994212 d.sub.TELT 0 0 d.sub.SiLT 0 0 e 3.679364607 4.30794513

(46) TABLE-US-00041 TABLE 41 Si(100) Second higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 5.687707928 5.687707928 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.139506173 0.139506173 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 5.653643283 5.653643283 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.148148148 0.148148148 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 1.004369706 1.004369706 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.255555556 0.255555556 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000197083 0.000197083 a.sub.Si.sup.(2) 0.003376583 0.003376583 a.sub.Si.sup.(1) 0.118081927 0.118081927 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 379.4708632 379.4708632 b.sub.Si.sup.(2) 278.0521262 278.0521262 c.sub.Si 23.14814815 23.14814815 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.128631041 0.128631041 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.32098765 49.32098765 d.sub.TLTTS 0 0 d.sub.TLTTE 72.43278274 72.43278274 d.sub.TLTSi 0.604747502 0.604747502 d.sub.TLTLT 1.743618251 1.743618251 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.994157261 0.994157261 d.sub.TESi 0 0 d.sub.TELT 0.280889881 0.280889881 d.sub.SiLT 0.003095822 0.003095822 e 5.638096455 5.638096455

(47) TABLE-US-00042 TABLE 42 Si(100) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 7.809960834 4.249755245 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.30962963 0.302857143 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 0.800874586 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0.150714286 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 3.563479635 9.07053135 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.148518519 0.353571429 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000160979 0 a.sub.Si.sup.(2) 0.000757552 0.001332545 a.sub.Si.sup.(1) 0.095765615 0.003836714 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 384.7407407 0 b.sub.Si.sup.(2) 278.2222222 285.0956633 c.sub.Si 21.33333333 20.89285714 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.043185248 0.033521037 b.sub.LT.sup.(2) 0 0 c.sub.LT 50 50.92857143 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.383208698 0.220029295 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0.974573109 d.sub.TESi 0 0 d.sub.TELT 1.01389349 1.078939399 d.sub.SiLT 0 0.002899732 e 5.569590226 5.29442278

(48) TABLE-US-00043 TABLE 43 Si(100) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 11.51287 11.51287 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.136328125 0.136328125 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 6.022608826 6.022608826 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.305859375 0.305859375 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 180.607873 180.607873 a.sub.TE.sup.(2) 1.347493816 1.347493816 a.sub.TE.sup.(1) 4.841204365 4.841204365 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0.000227051 0.000227051 b.sub.TE.sup.(2) 0.019179688 0.019179688 c.sub.TE 0.25625 0.25625 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.001342794 0.001342794 a.sub.Si.sup.(1) 0.25625 0.25625 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 275.7568359 275.7568359 c.sub.Si 0.25625 0.25625 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.153688205 0.153688205 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.140625 49.140625 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 1.180623763 1.180623763 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.41394071 0.41394071 d.sub.SiLT 0.003203013 0.003203013 e 4.433641408 4.433641408

(49) TABLE-US-00044 TABLE 44 Si(100) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 119.666412 118.2359738 a.sub.TLT.sup.(1) 4.447768142 2.271979446 b.sub.TLT.sup.(2) 0.006371047 0.00699901 c.sub.TLT 0.31147541 0.30631068 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0 3.805216895 b.sub.TS.sup.(2) 0 0 c.sub.TS 0 0.298543689 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 117.8354557 121.7109482 a.sub.TE.sup.(1) 2.107193686 0.578851453 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.006775956 0.006610661 c.sub.TE 0.15 0.35631068 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.001658706 0 a.sub.Si.sup.(1) 0.005677734 0.003834195 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 272.5477022 0 c.sub.Si 20.90163934 20.02427184 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.051921544 0.050011808 b.sub.LT.sup.(2) 0 0 c.sub.LT 48.36065574 48.93203883 d.sub.TLTTS 0 0 d.sub.TLTTE 61.26575286 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 82.22932804 d.sub.TSSi 0 0 d.sub.TSLT 0 0.470524678 d.sub.TESi 0 0 d.sub.TELT 0.904198722 0.776132158 d.sub.SiLT 0.003410501 0.003906326 e 5.339814906 5.463687811

(50) TABLE-US-00045 TABLE 45 Si(100) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 16.39135605 16.39135605 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.196774194 0.196774194 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 4.824831305 4.824831305 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.170967742 0.170967742 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 45.57608817 45.57608817 a.sub.TE.sup.(1) 10.80005563 10.80005563 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.018296046 0.018296046 c.sub.TE 0.303225806 0.303225806 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000172048 0.000172048 a.sub.Si.sup.(2) 0.00384923 0.00384923 a.sub.Si.sup.(1) 0.009826773 0.009826773 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 143.0843208 143.0843208 b.sub.Si.sup.(2) 215.8688866 215.8688866 c.sub.Si 22.25806452 22.25806452 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.066799879 0.066799879 b.sub.LT.sup.(2) 0 0 c.sub.LT 50.16129032 50.16129032 d.sub.TLTTS 0 0 d.sub.TLTTE 112.847682 112.847682 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 1.750763196 1.750763196 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0.466692151 0.466692151 d.sub.SiLT 0 0 e 2.904746788 2.904746788

(51) TABLE-US-00046 TABLE 46 Si(100) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 8.135537689 8.135537689 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.311659193 0.311659193 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 20.38200282 20.38200282 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.149327354 0.149327354 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 3.460675692 3.460675692 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0.267488789 0.267488789 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0 0 a.sub.Si.sup.(2) 0.003759233 0.003759233 a.sub.Si.sup.(1) 0.015931998 0.015931998 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 0 0 b.sub.Si.sup.(2) 239.0395946 239.0395946 c.sub.Si 18.90134529 18.90134529 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.017576249 0.017576249 b.sub.LT.sup.(2) 0 c.sub.LT 49.9103139 49.9103139 d.sub.TLTTS 152.1817236 152.1817236 d.sub.TLTTE 0 0 d.sub.TLTSi 0.359387178 0.359387178 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.911415415 0.911415415 d.sub.TESi 0 0 d.sub.TELT 0.275815872 0.275815872 d.sub.SiLT 0 0 e 3.952626598 3.952626598

(52) TABLE-US-00047 TABLE 47 Si(100) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 26.36951471 26.36951471 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.161538462 0.161538462 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 10.09828536 10.09828536 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.321025641 0.321025641 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 21.38297597 21.38297597 a.sub.TE.sup.(1) 2.383287449 2.383287449 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0.01947666 0.01947666 c.sub.TE 0.270512821 0.270512821 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000176024 0.000176024 a.sub.Si.sup.(2) 0.001397911 0.001397911 a.sub.Si.sup.(1) 0.107515297 0.107515297 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 282.3623122 282.3623122 b.sub.Si.sup.(2) 255.2071006 255.2071006 c.sub.Si 23.84615385 23.84615385 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.085112984 0.085112984 b.sub.LT.sup.(2) 0 0 c.sub.LT 48.97435897 48.97435897 d.sub.TLTTS 0 0 d.sub.TLTTE 0 0 d.sub.TLTSi 0.816828716 0.816828716 d.sub.TLTLT 0.865519967 0.865519967 d.sub.TSTE 0 0 d.sub.TSSi 0.538336559 0.538336559 d.sub.TSLT 0 0 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.002971652 0.002971652 e 3.504362202 3.504362202

(53) TABLE-US-00048 TABLE 48 Si(100) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 a.sub.TLT.sup.(2) 0 0 a.sub.TLT.sup.(1) 6.371850196 6.371850196 b.sub.TLT.sup.(2) 0 0 c.sub.TLT 0.292192192 0.292192192 a.sub.TS.sup.(2) 0 0 a.sub.TS.sup.(1) 0.609606885 0.609606885 b.sub.TS.sup.(2) 0 0 c.sub.TS 0.2996997 0.2996997 a.sub.TE.sup.(4) 0 0 a.sub.TE.sup.(3) 0 0 a.sub.TE.sup.(2) 0 0 a.sub.TE.sup.(1) 0 0 b.sub.TE.sup.(4) 0 0 b.sub.TE.sup.(3) 0 0 b.sub.TE.sup.(2) 0 0 c.sub.TE 0 0 a.sub.Si.sup.(6) 0 0 a.sub.Si.sup.(5) 0 0 a.sub.Si.sup.(4) 0 0 a.sub.Si.sup.(3) 0.000224133 0.000224133 a.sub.Si.sup.(2) 0.004048532 0.004048532 a.sub.Si.sup.(1) 0.126847922 0.126847922 b.sub.Si.sup.(6) 0 0 b.sub.Si.sup.(5) 0 0 b.sub.Si.sup.(4) 0 0 b.sub.Si.sup.(3) 1375.85979 1375.85979 b.sub.Si.sup.(2) 281.2555799 281.2555799 c.sub.Si 19.77477477 19.77477477 a.sub.LT.sup.(2) 0 0 a.sub.LT.sup.(1) 0.056146223 0.056146223 b.sub.LT.sup.(2) 0 0 c.sub.LT 49.48948949 49.48948949 d.sub.TLTTS 94.47145497 94.47145497 d.sub.TLTTE 0 0 d.sub.TLTSi 0 0 d.sub.TLTLT 0 0 d.sub.TSTE 0 0 d.sub.TSSi 0 0 d.sub.TSLT 0.568942451 0.568942451 d.sub.TESi 0 0 d.sub.TELT 0 0 d.sub.SiLT 0.005654813 0.005654813 e 4.940340284 4.940340284

(54) TABLE-US-00049 TABLE 49 Si(110) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 16.69742899 16.69742899 33.56520202 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.1675 0.1675 0.192857143 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 15.90196012 15.90196012 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.1525 0.1525 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 26.3030303 0 a.sub.TE.sup.(1) 0 0 6.481053391 0 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0.006326531 0 c.sub.TE 0 0 0.378571429 0 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0.000183963 0.000183963 0 0.000177142 a.sub.Si.sup.(2) 0.003236307 0.003236307 0 0.002186084 a.sub.Si.sup.(1) 0.071460688 0.071460688 0.085067773 0.13561432 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 5768.71875 5768.71875 0 2642.857143 b.sub.Si.sup.(2) 399.9375 399.9375 0 500 c.sub.Si 65.25 65.25 34.28571429 55 a.sub.LT.sup.(2) 0 0 0 0.005336622 a.sub.LT.sup.(1) 0 0 0.070255628 0.032718563 b.sub.LT.sup.(2) 0 0 0 65.75963719 c.sub.LT 90 90 51.42857143 50.95238095 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 1.873870705 1.878870705 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0.716151515 0 d.sub.SiLT 0 0 0.00729303 0.002110378 e 0.957101918 0.957101918 1.634922542 1.290881853

(55) TABLE-US-00050 TABLE 50 Si(110) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 23.96596978 4.695531045 7.344438725 5.603099398 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.34 0.3296875 0.338983051 0.306666667 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 23.18485905 0 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.175555556 0 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 43.48595551 70.50554427 41.95412638 a.sub.TE.sup.(1) 0 2.467954545 5.460437635 2.19025056 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006875 0.006716461 0.006819556 c.sub.TE 0 0.15 0.365254237 0.360666667 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0.000119479 0.000172812 a.sub.Si.sup.(2) 0.018474062 0 0.003987724 0.002213009 a.sub.Si.sup.(1) 0.059131688 0 0.047908658 0.073831446 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 2384.203107 1647.952 b.sub.Si.sup.(2) 81.55555556 0 216.791152 242.24 c.sub.Si 35.33333333 0 30.76271186 62.6 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.009475371 0 0.026725166 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.33333333 90 49.83050847 90 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 42.3018696 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0.617240199 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 2.612107038 0 0 0 d.sub.TSLT 2.129359248 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.871101002 0 0 0 e 2.851861362 2.210765625 2.573237288 2.440604203

(56) TABLE-US-00051 TABLE 51 Si(110) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 10.87353735 17.74612134 16.74814911 16.74814911 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.167045455 0.158227848 0.168032787 0.168032787 a.sub.TS.sup.(2) 92.14417413 275.6432031 0 0 a.sub.TS.sup.(1) 6.141913324 0.713377524 9.071522271 9.071522271 b.sub.TS.sup.(2) 0.004213585 0.004749239 0 0 c.sub.TS 0.339772727 0.317721519 0.314754098 0.314754098 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 37.82699975 0 0 0 a.sub.TE.sup.(1) 4.315324766 3.259148162 5.270739047 5.270739047 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.007147469 0 0 0 c.sub.TE 0.153409091 0.138607595 0.356557377 0.356557377 a.sub.Si.sup.(6) 0 0 3.73552E09 3.73552E09 a.sub.Si.sup.(5) 0 0 4.69013E08 4.69013E08 a.sub.Si.sup.(4) 0 0 1.07773E05 1.07773E05 a.sub.Si.sup.(3) 0.000254041 0.000266841 5.64997E05 5.64997E05 a.sub.Si.sup.(2) 0.00704637 0.003350583 0.007526984 0.007526984 a.sub.Si.sup.(1) 0.123432463 0.05687546 0.035719404 0.035719404 b.sub.Si.sup.(6) 0 0 1801696668 1801696668 b.sub.Si.sup.(5) 0 0 6726299.443 6726299.443 b.sub.Si.sup.(4) 0 0 1035415.498 1035415.498 b.sub.Si.sup.(3) 1197.310014 2539.305207 3573.665857 3573.665857 b.sub.Si.sup.(2) 188.2457386 286.0358917 720.1088417 720.1088417 c.sub.Si 28.125 63.60759494 48.19672131 48.19672131 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.046748629 0.00460971 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 51.59090909 50.75949367 90 90 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 105.3055279 0 0 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 58.63016883 0 0 0 d.sub.TSSi 0.443510572 0.274149566 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.293912516 0.280924747 0 0 d.sub.TELT 0 0.457718571 0 0 d.sub.SiLT 0 0.005165328 0 0 e 1.722804167 2.484892701 2.976959016 2.976959016

(57) TABLE-US-00052 TABLE 52 Si(110) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 39.48011293 a.sub.TLT.sup.(1) 5.239160454 5.820942031 4.867344296 2.496300587 b.sub.TLT.sup.(2) 0 0 0 0.00654321 c.sub.TLT 0.309375 0.302702703 0.286363636 0.288888889 a.sub.TS.sup.(2) 24.40391167 40.38499201 0 40.45660337 a.sub.TS.sup.(1) 2.128595361 6.73354721 3.626479228 6.290401812 b.sub.TS.sup.(2) 0.006013184 0.005624543 0 0.005617284 c.sub.TS 0.3265625 0.275675676 0.31 0.272222222 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 51.46488975 0 0 a.sub.TE.sup.(1) 1.921891837 0.509929613 1.508039016 0.870147512 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006479182 0 0 c.sub.TE 0.153125 0.147297297 0.341818182 0.351388889 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0.000165117 0 9.55404E05 a.sub.Si.sup.(2) 0.000936051 0.00475603 0 0.002198207 a.sub.Si.sup.(1) 0.02141106 0.040196571 0.017752634 0.036260775 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 2115.829763 0 1531.394676 b.sub.Si.sup.(2) 246.9177246 196.5668371 0 199.8263889 c.sub.Si 24.140625 57.97297297 21.13636364 60.41666667 a.sub.LT.sup.(2) 0 0 0 0.003220943 a.sub.LT.sup.(1) 0.023743346 0.023741003 0.038368027 0.005042496 b.sub.LT.sup.(2) 0 0 0 72.22222222 c.sub.LT 50.078125 48.51351351 50.81818182 50 d.sub.TLTTS 0 0 0 43.45862557 d.sub.TLTTE 35.16960363 48.00382984 23.6423037 52.46703277 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.234382842 0 0 0.273892853 d.sub.SiLT 0 0.00130658 0.001221935 0 e 2.175330984 2.239116787 2.271294054 2.496300587

(58) TABLE-US-00053 TABLE 53 Si(110) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 7.587457615 7.587457615 7.587457615 7.587457615 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.174380165 0.174380165 0.174380165 0.174380165 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 3.979714537 3.979714537 3.979714537 3.979714537 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.150413223 0.150413223 0.150413223 0.150413223 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 0.865040993 0.865040993 0.865040993 0.865040993 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.245867769 0.245867769 0.245867769 0.245867769 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 5.87537E07 5.87537E07 5.87537E07 5.87537E07 a.sub.Si.sup.(3) 8.59015E07 8.59015E07 8.59015E07 8.59015E07 a.sub.Si.sup.(2) 0.001948222 0.001948222 0.001948222 0.001948222 a.sub.Si.sup.(1) 0.027558032 0.027558032 0.027558032 0.027558032 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 1129197.497 1129197.497 1129197.497 1129197.497 b.sub.Si.sup.(3) 1524.372996 1524.372996 1524.372996 1524.372996 b.sub.Si.sup.(2) 776.3813947 776.3813947 776.3813947 776.3813947 c.sub.Si 41.52892562 41.52892562 41.52892562 41.52892562 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.018744549 0.018744549 0.018744549 0.018744549 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.25619835 49.25619835 49.25619835 49.25619835 d.sub.TLTTS 140.6234074 140.6234074 140.6234074 140.6234074 d.sub.TLTTE 25.20654793 25.20654793 25.20654793 25.20654793 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 1.78.9519626 1.789519626 1.789519626 1.789519626

(59) TABLE-US-00054 TABLE 54 Si(110) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 39.68139696 39.68139696 a.sub.TLT.sup.(1) 3.912934705 3.912934705 3.801935963 3.801935963 b.sub.TLT.sup.(2) 0 0 0.00692398 0.00692398 c.sub.TLT 0.306451613 0.306451613 0.297857143 0.297857143 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 0 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 1.912614784 1.912614784 6.089810932 6.089810932 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.148924731 0.148924731 0.347857143 0.347857143 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 8.78847E06 8.78847E06 a.sub.Si.sup.(2) 0.0004718 0.0004718 0.000160567 0.000160567 a.sub.Si.sup.(1) 0.003265633 0.003265633 0.023574651 0.023574651 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 2351.597668 2351.597668 b.sub.Si.sup.(2) 847.4765869 847.4765869 880.2091837 880.2091837 c.sub.Si 35.32258065 35.32258065 43.07142857 43.07142857 a.sub.LT.sup.(2) 0.005014741 0.005014741 0 0 a.sub.LT.sup.(1) 0.023115164 0.023115164 0.030121011 0.03012011 b.sub.LT.sup.(2) 67.0626662 67.0626662 0 0 c.sub.LT 49.62365591 49.62365591 51.28571429 51.28571429 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0.125572529 0.125572529 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.563162206 0.563162206 0.417002414 0.417002414 d.sub.SiLT 0 0 0 0 e 2.002512986 2.002512986 2.550158637 2.550158637

(60) TABLE-US-00055 TABLE 55 Si(110) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 2.992014692 2.992014692 1.461725087 1.461725087 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.156390977 0.156390977 0.155345912 0.155345912 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 9.089925228 9.089925228 1.247751383 1.247751383 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.305263158 0.305263158 0.327672956 0.327672956 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 130.6388144 130.6388144 a.sub.TE.sup.(1) 5.773590917 5.773590917 0.010504162 0.010504162 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0.006662711 0.006662711 c.sub.TE 0.166541353 0.166541353 0.341823899 0.341823899 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 1.03604E05 1.03604E05 a.sub.Si.sup.(2) 0.000377109 0.000377109 0.000138558 0.000138558 a.sub.Si.sup.(1) 0.013702515 0.013702515 0.028102653 0.028102653 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 3096.349671 3096.349671 b.sub.Si.sup.(2) 792.2381141 792.2381141 957.6361695 957.6361695 c.sub.Si 41.39097744 41.39097744 43.20754717 43.20754717 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.015804666 0.015804666 0.028892246 0.028892246 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.32330827 49.32330827 49.62264151 49.62264151 d.sub.TLTTS 0 0 44.5976835 44.5976835 d.sub.TLTTE 80.90186655 80.90186655 150.2428298 150.2428298 d.sub.TLTSi 0 0 0.225109644 0.225109644 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 29.68261053 29.68261053 47.35851038 47.35851038 d.sub.TSSi 0.136750854 0.136750854 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.146211814 0.146211814 0 0 d.sub.TELT 0.41229257 0.41229257 0 0 d.sub.SiLT 0 0 0 0 e 2.596813807 2.596813807 2.049341112 2.049341112

(61) TABLE-US-00056 TABLE 56 Si(110) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 2.80791074 2.80791074 0 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.3069869 0.3069869 0 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 5.618098986 5.618098986 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.286462882 0.286462882 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 73.23839461 73.23839461 a.sub.TE.sup.(1) 8.962154821 8.962154821 5.710295136 5.710295136 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0.007310763 0.007310763 c.sub.TE 0.167467249 0.167467249 0.330930233 0.330930233 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.003677309 0.003677309 0 0 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 40.93886463 40.93886463 0 0 a.sub.LT.sup.(2) 0.00527863 0.00527863 0 0 a.sub.LT.sup.(1) 0.008431458 0.008431458 0 0 b.sub.LT.sup.(2) 66.00179249 66.00179249 0 0 c.sub.LT 50.61135371 50.61135371 90 90 d.sub.TLTTS 63.6265441 63.6265441 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 57.20229582 57.20229582 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.098212695 0.098212695 0 0 d.sub.TELT 0.32576925 0.32576925 0 0 d.sub.SiLT 0 0 0 0 e 2.431352404 2.431352404 2.39032093 2.39032093

(62) TABLE-US-00057 TABLE 57 Si(110) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 11.04825287 11.04825287 11.04825287 11.04825287 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.164705882 0.164705882 0.164705882 0.164705882 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 0 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 12.86806521 12.86806521 12.86806521 12.86806521 a.sub.TE.sup.(1) 39.88235294 39.88235294 39.88235294 39.88235294 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.019258131 0.019258131 0.019258131 0.019258131 c.sub.TE 0.286470588 0.286470588 0.286470588 0.286470588 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.000762445 0.000762445 0.000762445 .0.000762445 a.sub.Si.sup.(1) 0.031584918 0.031584918 0.031584918 0.031584918 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 749.7716263 749.7716263 749.7716263 749.7716263 c.sub.Si 52.58823529 52.58823529 52.58823529 52.58823529 a.sub.LT.sup.(2) 0.004115091 0.004115091 0.004115091 0.004115091 a.sub.LT.sup.(1) 0.023260981 0.023260981 0.023260981 0.023260981 b.sub.LT.sup.(2) 81.16262976 81.16262976 81.16262976 81.16262976 c.sub.LT 50.11764706 50.11764706 50.11764706 50.11764706 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 32.35244505 32.35244505 32.35244505 32.35244505 d.sub.TLTSi 0.348515389 0.348515389 0.348515389 0.348515389 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.000823202 0.000823202 0.000823202 0.000823202 e 1.678155024 1.678155024 1.678155024 1.678155024

(63) TABLE-US-00058 TABLE 58 Si(110) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 34.01092867 34.01092867 a.sub.TLT.sup.(1) 3.294448859 3.294448859 2.996122319 2.996122319 b.sub.TLT.sup.(2) 0 0 0.005572031 0.005572031 c.sub.TLT 0.328378378 0.328378378 0.31344086 0.31344086 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 2.752851676 2.752851676 1.564359965 1.564359965 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.162837838 0.162837838 0.160752688 0.160752688 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 4.548790211 4.548790211 1.370514553 1.370514553 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.165540541 0.165540541 0.355913978 0.355913978 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 7.03888E08 7.03888E08 3.78178E08 3.78178E08 a.sub.Si.sup.(4) 1.4265E06 1.4265E06 9.79065E07 9.79065E07 a.sub.Si.sup.(3) 0.000180358 0.000180358 9.73597E05 9.73597E05 a.sub.Si.sup.(2) 0.002681874 0.002681874 0.00192926 0.00192926 a.sub.Si.sup.(1) 0.092266284 0.092266284 0.04329175 0.04329175 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 11701030.08 11701030.08 24265475.25 24265475.25 b.sub.Si.sup.(4) 1439156.296 1439156.296 1705613.393 1705613.393 b.sub.Si.sup.(3) 1798.436559 1798.436559 6938.899332 6938.899332 b.sub.Si.sup.(2) 930.5183985 930.5183985 1060.880593 1060.880593 c.sub.Si 40.23648649 40.23648649 40.08064516 40.08064516 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.046000242 0.046000242 0.001380272 0.001380272 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.52702703 49.52702703 50.05376344 50.05376344 d.sub.TLTTS 136.9978702 136.9978702 73.06084164 73.06084164 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0.096651605 0.096651605 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 56.78924979 56.78924979 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.081014811 0.081014811 0 0 d.sub.TELT 0 0 0.194432704 0.194432704 d.sub.SiLT 0 0 0.000875955 0000875955 e 2.543790382 2.543790382 2.964933907 2.964933907

(64) TABLE-US-00059 TABLE 59 Si(110) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 60 0 .sub.Si < 45 45 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 13.1565646 13.1565646 13.1565646 13.1565646 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.179661017 0.179661017 0.179661017 0.179661017 a.sub.TS.sup.(2) 54.97015257 54.97015257 54.97015257 54.97015257 a.sub.TS.sup.(1) 1.195559996 1.195559996 1.195559996 1.195559996 b.sub.TS.sup.(2) 0.006496856 0.006496856 0.006496856 0.006496856 c.sub.TS 0.299435028 0.299435028 0.299435028 0.299435028 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 12.83875925 12.83875925 12.83875925 12.83875925 a.sub.TE.sup.(1) 2.591177902 2.591177902 2.591177902 2.591177902 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.02062115 0.02062115 0.02062115 0.02062115 c.sub.TE 0.282768362 0.282768362 0.282768362 0.282768362 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.00094978 0.00094978 0.00094978 0.00094978 a.sub.Si.sup.(1) 0.016861509 0.016861509 0.016861509 0.016861509 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0.00094978 0.00094978 0.00094978 0.00094978 c.sub.Si 44.83050847 44.83050847 44.83050847 44.83050847 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.020120147 0.020120147 0.020120147 0.020120147 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.50847458 50.50847458 50.50847458 50.50847458 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0.250474306 0.250474306 0.250474306 0.250474306 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.031071552 0.031071552 0.031071552 0.031071552 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 1.687640015 1.687640015 1.687640015 1.687640015

(65) TABLE-US-00060 TABLE 60 Si(110) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 45 45 .sub.Si 90 0 .sub.Si < 45 45 .sub.Si 90 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 8.387315737 8.387315737 11.34973266 6.017883428 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.313377926 0.313377926 0.291082803 0.294578313 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.14098252 0.140898252 3.107378473 2.287606243 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.299331104 0.299331104 0.277707006 0.296385542 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 1.209727849 1.209727849 4.259242642 1.280235687 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.152006689 0.152006689 0.343630573 0.351204819 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 2.33027E08 2.33027E08 0 0 a.sub.Si.sup.(4) 7.78115E07 7.78115E07 0 0 a.sub.Si.sup.(3) 5.59108E05 5.59108E05 0.000194818 0 a.sub.Si.sup.(2) 0.002410767 0.002410767 0.000247924 0 a.sub.Si.sup.(1) 0.027662563 0.027662563 0.12904143 0.026766472 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 2083705.649 2083705.649 0 0 b.sub.Si.sup.(4) 1386257.115 1386257.115 0 0 b.sub.Si.sup.(3) 1267.413434 1267.413434 1811.750092 0 b.sub.Si.sup.(2) 895.5856198 895.5856198 293.105197 0 c.sub.Si 42.14046823 42.14046823 19.39490446 67.95180723 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.020067585 0.020067585 0.011988832 0.032566601 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.73244147 49.73244147 49.61783439 50.96385542 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 41.29194486 d.sub.TLTSi 0 0 0.203585177 0.376861254 d.sub.TLTLT 0 0 0.273779971 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0.20937463 d.sub.TSLT 0.349110894 0.349110894 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.216865482 0.216865482 0 0 d.sub.SiLT 0 0 0.00120304 0 e 2.390757235 2.390757235 2.548464154 2.523994879

(66) TABLE-US-00061 TABLE 61 Si(111) First higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 16.07631847 20.22733656 30.72650306 27.83979251 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.145833333 0.1625 0.159574468 0.158695652 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 17.08812597 27.84866827 31.28009383 12.67453621 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.154166667 0.172916667 0.161702128 0.163043478 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 96.15629371 0 138.3065683 0 a.sub.TE.sup.(1) 1.263589744 2.883915191 9.345807167 7.807789594 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.006649306 0 0.006229063 0 c.sub.TE 0.170833333 0.14375 0.369148936 0.345652174 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0.006862727 a.sub.Si.sup.(1) 0.101535567 0.012511908 0.101466433 0.176438509 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 114.9456522 c.sub.Si 24.375 44.375 22.0212766 37.5 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 90 90 90 d.sub.TLTTS 477.9162005 760.9473336 1054.386561 1044.340968 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 1.332405924 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 250.1524613 102.33575 105.8611165 d.sub.TSSi 0 0 0 2.093429604 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.613440559 0 1.201832187 0.525734733 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 0.553295028 1.074792989 1.290770348 1.165057152

(67) TABLE-US-00062 TABLE 62 Si(111) First higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 262.3995984 262.3995984 0 0 a.sub.TLT.sup.(1) 59.70400634 59.70400634 18.45032018 20.44479246 b.sub.TLT.sup.(2) 0.004691358 0.004691358 0 0 c.sub.TLT 0.355555556 0.355555556 0.332352941 0.331914894 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 73.33869606 73.33869606 9.963926388 24.5747574 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.185185185 0.185185185 0.166176471 0.165957447 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 19.84024877 19.84024877 8.905455835 17.17093947 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.157407407 0.157407407 0.369117647 0.373404255 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 4.69771E05 4.69771E05 0 0 a.sub.Si.sup.(3) 0.000362538 0.000362538 0 0 a.sub.Si.sup.(2) 0.055133453 0.055133453 0.004320224 0.02112516 a.sub.Si.sup.(1) 0.020862911 0.020862911 0.110606012 0.064218508 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 138552.1512 138552.1512 0 0 b.sub.Si.sup.(3) 78.36076818 78.36076818 0 0 b.sub.Si.sup.(2) 203.1635802 203.1635802 145.9775087 66.20642825 c.sub.Si 33.05555556 33.05555556 19.41176471 34.46808511 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.079155699 0.079155699 0 0.057672719 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 49.81481481 49.81481481 90 49.14893617 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 254.5809235 254.5809235 80.69948416 99.56817027 d.sub.TLTSi 2.260189055 2.260189055 0 0 d.sub.TLTLT 0.785540829 0.785540829 0 0 d.sub.TSTE 292.5762951 292.5762951 0 0 d.sub.TSSi 5.914103654 5.914103654 1.139436429 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 1.75463008 1.75463008 0.660099875 3.844659844 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0.006965097 e 1.304804416 1.304804416 2.734683251 3.115044468

(68) TABLE-US-00063 TABLE 63 Si(111) First higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0.003649147 0 0 0 a.sub.TLT.sup.(1) 17.27824731 24.3903101 38.65647339 21.91795924 b.sub.TLT.sup.(2) 67.18624026 0 0 0 c.sub.TLT 0.154098361 0.15631068 0.17 0.1575 a.sub.TS.sup.(2) 84.63185118 0 148.7691928 140.0125491 a.sub.TS.sup.(1) 6.307527081 32.68184816 15.38083251 11.91949736 b.sub.TS.sup.(2) 0.004461166 0 0.005012245 0.004623438 c.sub.TS 0.352459016 0.345631068 0.331428571 0.33875 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 2.909874306 8.840975559 16.54803788 0.024546617 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.135245902 0.148058252 0.372857143 0.33195 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0.006216698 0 0 a.sub.Si.sup.(1) 0.068574135 0.018885558 0.187578295 0.122573316 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 147.1439344 0 0 c.sub.Si 22.62295082 43.10679612 22.71428571 39.1875 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.023219728 0.047846607 0.097088558 0.096327065 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.16393443 50.38834951 50.42857143 51.25 d.sub.TLTTS 0 144.763071 0 0 d.sub.TLTTE 0 0 161.2345526 0 d.sub.TLTSi 0.827435588 0 0 1.107475984 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 103.0553675 65.68497311 0 d.sub.TSSi 0 1.329400713 0.82928215 0.646921162 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.681669875 0.653050787 0.676734069 0.936807034 d.sub.TELT 0 0 0.481989709 0.52746173 d.sub.SiLT 0 0 0 0 e 1.560056382 2.656750279 2.259351603 1.805786084

(69) TABLE-US-00064 TABLE 64 Si(111) First higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 77.3065693 243.6937004 0 a.sub.TLT.sup.(1) 13.49335267 9.878165228 6.309863061 12.90130633 b.sub.TLT.sup.(2) 0 0.00674795 0.006522811 0 c.sub.TLT 0.300961538 0.297350993 0.29858156 0.306818182 a.sub.TS.sup.(2) 133.2691939 160.4037443 82.71737336 100.5491122 a.sub.TS.sup.(1) 9.215218873 21.20902158 9.283157312 7.984268054 b.sub.TS.sup.(2) 0.006618898 0.005353274 0.006382979 0.005704201 c.sub.TS 0.314423077 0.303311258 0.3 0.311363636 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 90.39669198 0 0 a.sub.TE.sup.(1) 0.170720276 3.925569914 15.08313602 9.451928755 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006615499 0 0 c.sub.TE 0.15 0.147350993 0.363475177 0.346212121 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.00740803 0 0 0 a.sub.Si.sup.(1) 0.220502432 0.083594751 0.104344279 0.088096624 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 135.4659763 0 0 0 c.sub.Si 20.76923077 43.70860927 17.87234043 41.47727273 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.017420386 0.012240534 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50.28846154 50.26490066 90 90 d.sub.TLTTS 149.298265 220.9283416 135.5319056 135.1493422 d.sub.TLTTE 0 0 0 65.38520659 d.sub.TLTSi 0 0 0 0.663828772 d.sub.TLTLT 0.703824061 0.739197646 0 0 d.sub.TSTE 122.4270642 0 94.62792088 0 d.sub.TSSi 0.714493384 1.189155195 0 1.017237669 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0.558597609 0 0 d.sub.TELT 0.734424122 0.628956462 0 0 d.sub.SiLT 0.003900657 0.003268439 0 0 e 2.246432623 2.691572945 3.425676672 3.236112132

(70) TABLE-US-00065 TABLE 65 Si(111) Second higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 26.67263869 6.49243933 20.61574251 21.06290014 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.15443038 0.175438596 0.160759494 0.156896552 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 7.971316395 7.232224634 16.40433051 3.920556446 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.14556962 0.133333333 0.144303797 0.144827586 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 110.7824708 133.1826499 0 a.sub.TE.sup.(1) 12.77975858 10.04988717 5.027045348 5.686378626 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0.006463527 0.006582278 0 c.sub.TE 0.151265823 0.144736842 0.35 0.35862069 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0.007219474 0 a.sub.Si.sup.(1) 0.028716852 0.04192074 0.016815807 0.008780601 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 125.0280404 0 c.sub.Si 9.683544304 50 11.58227848 48.10344828 a.sub.LT.sup.(2) 0.01035547 0 0 0.014789077 a.sub.LT.sup.(1) 0.162093889 0.106646805 0.164306798 0.04587348 b.sub.LT.sup.(2) 61.8811088 0 0 55.43995244 c.sub.LT 49.62025316 50.35087719 51.01265823 51.20689655 d.sub.TLTTS 609.1883956 724.6623011 297.9828576 203.214973 d.sub.TLTTE 215.420422 0 159.6303697 0 d.sub.TLTSi 0 3.771938969 2.003207828 2.014745526 d.sub.TLTLT 1.80686724 0 2.218853872 0 d.sub.TSTE 0 307.4269587 0 0 d.sub.TSSi 0 0 1.097992723 0 d.sub.TSLT 1.985202008 0 2.104127874 0 d.sub.TESi 0 0 1.451355926 0 d.sub.TELT 203.386471 1.145649707 0 0 d.sub.SiLT 2.42647485 0.004357557 0 0 e 5.019952207 2.13826109 3.235663805 3.326865691

(71) TABLE-US-00066 TABLE 66 Si(111) Second higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 45.51074293 94.44342524 0 a.sub.TLT.sup.(1) 0.788515154 3.454988617 9.832405019 3.192556866 b.sub.TLT.sup.(2) 0 0.006485261 0.006459172 0 c.sub.TLT 0.298058252 0.295238095 0.298461538 0.298913043 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 8.97795964 1.31344944 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.142718447 0.147619048 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 0 0 a.sub.TE.sup.(1) 9.791468713 0.170587985 0.71523762 10.72534988 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0 0 c.sub.TE 0.15776699 0.124603175 0.356153846 0.347826087 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0.003924448 0.001661439 0 0.00657999 a.sub.Si.sup.(1) 0.15776699 0.024952541 0.02404454 0.067389114 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 148.4588557 132.0861678 0 152.6937618 c.sub.Si 15.29126214 46.9047619 14.19230769 43.04347826 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.06700163 0.042141715 0.055240362 0.061747926 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 48.73786408 50.15873016 49.76923077 49.45652174 d.sub.TLTTS 116.7290786 78.78450728 0 0 d.sub.TLTTE 0 85.46351406 49.85282875 0 d.sub.TLTSi 0.70199108 0.445481139 0 0.604657146 d.sub.TLTLT 0.726496636 0 0 0 d.sub.TSTE 0 116.360096 0 0 d.sub.TSSi 0 0.622709588 0 0 d.sub.TSLT 2.041329502 0.339115637 0 0 d.sub.TESi 0 0.20688896 0 0 d.sub.TELT 0.774150432 0.439880407 0.6608739 1.068569294 d.sub.SiLT 0.005400114 0.002667922 0.004937546 0.006290209 e 4.209434885 1.791078273 3.48174155 3.934527612

(72) TABLE-US-00067 TABLE 67 Si(111) Second higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 4.673850215 0 8.8586067 1.957300157 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.141509434 0 0.153125 0.16 a.sub.TS.sup.(2) 82.42811022 0 87.42203531 0 a.sub.TS.sup.(1) 7.905282467 4.948155925 0.569845134 0.521030757 b.sub.TS.sup.(2) 0.006949092 0 0.006037326 0 c.sub.TS 0.294339623 0.314583333 0.297916667 0.285 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 53.51232744 79.38404758 0 0 a.sub.TE.sup.(1) 10.58973083 10.26534018 8.135327356 7.251553825 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.006016376 0.005677083 0 0 c.sub.TE 0.183962264 0.1375 0.336458333 0.37 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0.001429494 a.sub.Si.sup.(1) 0.010122468 0.039888924 0.016592245 0.004853684 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 145.6875 c.sub.Si 11.88679245 48.4375 14.0625 45.75 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.005093912 0.011098836 0.047530531 0.04750516 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 50 50.41666667 50.72916667 49.75 d.sub.TLTTS 0 0 91.19418307 251.5375225 d.sub.TLTTE 0 0 156.3654518 0 d.sub.TLTSi 0.322255595 0 0 0.289820964 d.sub.TLTLT 0.768436344 0 0.735737765 0 d.sub.TSTE 0 75.51836907 0 0 d.sub.TSSi 0.512402643 0.300543357 0.724013025 0.245746891 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0.50556971 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0.002842264 0 0 e 2.770026639 2.638591885 1.980941925 2.412296494

(73) TABLE-US-00068 TABLE 68 Si(111) Second higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 4.449764983 0 13.78321665 10.59163435 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.321052632 0 0.309146341 0.303164557 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 3.433673203 1.746861763 3.363230821 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0.283443709 0.287804878 0.293037975 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 0 0 86.18383552 0 a.sub.TE.sup.(1) 3.853394073 8.768511808 1.867550529 15.68616064 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0 0 0.007157942 0 c.sub.TE 0.181578947 0.135430464 0.356097561 0.363291139 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.014178515 0.049910217 0.008697771 0.012742666 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 12.63157895 45.99337748 15.09146341 45 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0.061867934 0.051566965 0.028929641 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 50.59602649 50.30487805 50.56962025 d.sub.TLTTS 0 0 0 103.0440888 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0.181721459 0 0 0 d.sub.TLTLT 0 0 0 0.608943868 d.sub.TSTE 0 113.1914268 75.04640382 82.04954672 d.sub.TSSi 0 0 0.554356722 0.673316097 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0.512800103 0 d.sub.TELT 0 0 0.656702553 0 d.sub.SiLT 0 0 0 0 e 2.401219798 3.18651044 3.93030224 4.143483981

(74) TABLE-US-00069 TABLE 69 Si(111) Third higher-order mode 0 < T.sub.LT < 0.2 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 3.047618237 3.047618237 3.047618237 3.047618237 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.160869565 0.160869565 0.160869565 0.160869565 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0 0 0 0 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0 0 0 0 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 11.21750437 11.21750437 11.21750437 11.21750437 a.sub.TE.sup.(2) 3.666215654 3.666215654 3.666215654 3.666215654 a.sub.TE.sup.(1) 0.035248162 0.035248162 0.035248162 0.035248162 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0.000381688 0.000381688 0.000381688 0.000381688 b.sub.TE.sup.(2) 0.012589792 0.012589792 0.012589792 0.012589792 c.sub.TE 0.245652174 0.245652174 0.245652174 0.245652174 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.003582211 0.003582211 0.003582211 0.003582211 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 35.86956522 35.86956522 35.86956522 35.86956522 a.sub.LT.sup.(2) 0.000596775 0.000596775 0.000596775 0.000596775 a.sub.LT.sup.(1) 0.003385783 0.003385783 0.003385783 0.003385783 b.sub.LT.sup.(2) 77.88279773 77.88279773 77.88279773 77.88279773 c.sub.LT 47.82608696 47.82608696 47.82608696 47.82608696 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 2.939323227 2.939323227 2.939323227 2.939323227 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.000442922 0.000442922 0.000442922 0.000442922 e 0.277577227 0.277577227 0.277577227 0.277577227

(75) TABLE-US-00070 TABLE 70 Si(111) Third higher-order mode 0.2 T.sub.LT 3.5 0 T.sub.S < 0.2 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 0 0 0 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0 0 0 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 6.03484153 6.03484153 6.03484153 6.03484153 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.183333333 0.183333333 0.183333333 0.183333333 a.sub.TE.sup.(4) 215.3850281 215.3850281 215.3850281 215.3850281 a.sub.TE.sup.(3) 54.12265846 54.12265846 54.12265846 54.12265846 a.sub.TE.sup.(2) 0.942905209 0.942905209 0.942905209 0.942905209 a.sub.TE.sup.(1) 1.08045121 1.08045121 1.08045121 1.08045121 b.sub.TE.sup.(4) 0.000339332 0.000339332 0.000339332 0.000339332 b.sub.TE.sup.(3) 0.000317558 0.000317558 0.000317558 0.000317558 b.sub.TE.sup.(2) 0.011265432 0.011265432 0.011265432 0.011265432 c.sub.TE 0.211111111 0.211111111 0.211111111 0.211111111 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.004526908 0.004526908 0.004526908 0.004526908 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 27.5 27.5 27.5 27.5 a.sub.LT.sup.(2) 0.00046365 0.00046365 0.00046365 0.00046365 a.sub.LT.sup.(1) 0.005349146 0.005349146 0.005349146 0.005349146 b.sub.LT.sup.(2) 57.09876543 57.09876543 57.09876543 57.09876543 c.sub.LT 46.11111111 46.11111111 46.11111111 46.11111111 d.sub.TLTTS 0 0 0 0 d.sub.TLTTE 0 0 0 0 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 45.80413521 45.80413521 45.80413521 45.80413524 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0.071786246 0.071786246 0.071786246 0.071786246 d.sub.SiLT 0.000425881 0.000425881 0.000425881 0.000425881 e 0.446604617 0.446604617 0.446604617 0.446604617

(76) TABLE-US-00071 TABLE 71 Si(111) Third higher-order mode 0 < T.sub.LT < 0.2 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 2.477108842 2.477108842 2.477108842 2.477108842 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0.137349398 0.137349398 0.137349398 0.137349398 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.488747927 0.488747927 0.488747927 0.488747927 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.336144578 0.336144578 0.336144578 0.336144578 a.sub.TE.sup.(4) 0 0 0 0 a.sub.TE.sup.(3) 0 0 0 0 a.sub.TE.sup.(2) 1.973253274 1.973253274 1.973253274 1.973253274 a.sub.TE.sup.(1) 0.124870592 0.124870592 0.124870592 0.124870592 b.sub.TE.sup.(4) 0 0 0 0 b.sub.TE.sup.(3) 0 0 0 0 b.sub.TE.sup.(2) 0.017915517 0.017915517 0.017915517 0.017915517 c.sub.TE 0.256024096 0.256024096 0.256024096 0.256024096 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 7.6083E07 7.6083E07 7.6083E07 7.6083E07 a.sub.Si.sup.(3) 7.21121E06 7.21121E06 7.21121E06 7.21121E06 a.sub.Si.sup.(2) 0.000857107 0.000857107 0.000857107 0.000857107 a.sub.Si.sup.(1) 0.00490823 0.00490823 0.00490823 0.00490823 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 105622.9088 105622.9088 105622.9088 105622.9088 b.sub.Si.sup.(3) 217.2019476 217.2019476 217.2019476 217.2019476 b.sub.Si.sup.(2) 208.4409929 208.4409929 208.4409929 208.4409929 c.sub.Si 30.54216867 30.54216867 30.54216867 30.54216867 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0 0 0 0 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 90 90 90 90 d.sub.TLTTS 4.821777856 4.821777856 4.821777856 4.821777856 d.sub.TLTTE 4.14067246 4.14067246 4.14067246 4.14067246 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 0 0 0 0 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0.024454063 0.024454063 0.024454063 0.024454063 d.sub.TELT 0 0 0 0 d.sub.SiLT 0 0 0 0 e 0.240178915 0.240178915 0.240178915 0.240178915

(77) TABLE-US-00072 TABLE 72 Si(111) Third higher-order mode 0.2 T.sub.LT 3.5 0.2 T.sub.S 2.0 0.05 T.sub.E < 0.25 0.25 T.sub.E 0.45 0 .sub.Si < 30 30 .sub.Si 60 0 .sub.Si < 30 30 .sub.Si 60 a.sub.TLT.sup.(2) 0 0 0 0 a.sub.TLT.sup.(1) 0 0 0 0 b.sub.TLT.sup.(2) 0 0 0 0 c.sub.TLT 0 0 0 0 a.sub.TS.sup.(2) 0 0 0 0 a.sub.TS.sup.(1) 0.380779889 0.380779889 0.380779889 0.380779889 b.sub.TS.sup.(2) 0 0 0 0 c.sub.TS 0.285294118 0.285294118 0.285294118 0.285294118 a.sub.TE.sup.(4) 165.3225345 165.3225345 165.3225345 165.3225345 a.sub.TE.sup.(3) 23.65923214 23.65923214 23.65923214 23.65923214 a.sub.TE.sup.(2) 2.256295059 2.256295059 2.256295059 2.256295059 a.sub.TE.sup.(1) 0.292409126 0.292409126 0.292409126 0.292409126 b.sub.TE.sup.(4) 0.00051583 0.00051583 0.00051583 0.00051583 b.sub.TE.sup.(3) 0.00070344 0.00070344 0.00070344 0.00070344 b.sub.TE.sup.(2) 0.015017301 0.015017301 0.015017301 0.015017301 c.sub.TE 0.220588235 0.220588235 0.220588235 0.220588235 a.sub.Si.sup.(6) 0 0 0 0 a.sub.Si.sup.(5) 0 0 0 0 a.sub.Si.sup.(4) 0 0 0 0 a.sub.Si.sup.(3) 0 0 0 0 a.sub.Si.sup.(2) 0 0 0 0 a.sub.Si.sup.(1) 0.004846255 0.004846255 0.004846255 0.004846255 b.sub.Si.sup.(6) 0 0 0 0 b.sub.Si.sup.(5) 0 0 0 0 b.sub.Si.sup.(4) 0 0 0 0 b.sub.Si.sup.(3) 0 0 0 0 b.sub.Si.sup.(2) 0 0 0 0 c.sub.Si 29.55882353 29.55882353 29.55882353 29.55882353 a.sub.LT.sup.(2) 0 0 0 0 a.sub.LT.sup.(1) 0.00165846 0.00165846 0.00165846 0.00165846 b.sub.LT.sup.(2) 0 0 0 0 c.sub.LT 48.52941176 48.52941176 48.52941176 48.52941176 d.sub.TLTTS 0.04933649 0.04933649 0.04933649 0.04933649 d.sub.TLTTE 0.021023839 0.021023839 0.021023839 0.021023839 d.sub.TLTSi 0 0 0 0 d.sub.TLTLT 0 0 0 0 d.sub.TSTE 7.074776252 7.074776252 7.074776252 7.074776252 d.sub.TSSi 0 0 0 0 d.sub.TSLT 0 0 0 0 d.sub.TESi 0 0 0 0 d.sub.TELT 0 0 0 0 d.sub.SiLT 0.00049898 0.00049898 0.00049898 0.00049898 e 0.3405485 0.3405485 0.3405485 0.3405485

(78) The inventors of preferred embodiments of the present invention have examined how the strength of the responses of the first higher-order mode, the second higher-order mode, and the third higher-order mode change by variously changing the design parameters of T.sub.LT, .sub.LT, T.sub.S, T.sub.E, .sub.Si, and T.sub.Si.

(79) As the strength of response of the higher-order mode when the parameters are changed, the absolute value of S11 was determined. A smaller decibel value of the absolute value of S11 indicates a higher strength of the response of the higher-order mode. In the case of calculating S11, the intersecting width of the electrode fingers was 20, the number of pairs of the electrode fingers was 94, and S11 was determined by a two-dimensional finite element method using an electrode single-pair model.

(80) The interdigital transducer electrodes had a structure in which metal films were stacked in order of Ti/Pt/Ti/Al from the piezoelectric body side. The thickness of the interdigital transducer electrodes was changed by changing the thickness of the Pt film. As the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes, a wave length-normalized film thickness in terms of aluminum thickness was determined using the total mass of the interdigital transducer electrodes estimated from the density of each of the metal films.

(81) First Higher-Order Mode

(82) An acoustic wave resonator having the admittance characteristics illustrated in FIG. 2 is used as a reference structure. FIGS. 3 to 7 each illustrate a change in the strength S11 of the response of the first higher-order mode when the parameters are changed with respect to the reference structure. FIG. 3 indicates that the strength S11 of the response of the first higher-order mode changes when the propagation direction .sub.Si in the single-crystal Si layer changes from about 0 to about 45 with respect to the reference structure.

(83) Similarly, FIG. 4 indicates that the strength S11 of the response of the first higher-order mode changes also when the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate changes.

(84) As illustrated in FIG. 5, the strength S11 of the response of the first higher-order mode changes also when the cut angle (90+.sub.LT) of the piezoelectric body made of lithium tantalate changes.

(85) As illustrated in FIG. 6, the strength S11 of the response of the first higher-order mode changes also when the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film changes.

(86) As illustrated in FIG. 7, the strength S11 of the response of the first higher-order mode changes also when the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes in terms of Al thickness changes.

(87) FIGS. 3 to 7 indicate that the strength of the response of the first higher-order mode is able to be adjusted by changing these parameters. That is, the strength of the response of the first higher-order mode is able to be reduced by selecting the values of the parameters while the response of the main mode is maintained.

(88) From the calculation results of FIGS. 3 to 7 and the like, the inventors of preferred embodiments of the present invention have derived the fact that I.sub.h corresponding to the strength of the response of the higher-order mode is determined from the Formula (1) described above and the coefficients a, b, c, d, and e in Tables 37 to 72.

(89) The inventors of preferred embodiments of the present invention have discovered that the coefficients in Formula (1) are values presented in Table 37 to 40, Tables 49 to 52, or Tables 61 to 64 in accordance with the ranges of the crystal orientation of the single-crystal Si layer, the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate, the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film, the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes, and the propagation direction .sub.Si in the single-crystal Si layer. Thus, the conditions of T.sub.LT, .sub.LT, T.sub.S, T.sub.E, and .sub.Si when I.sub.h1 corresponding to the strength of the response of the first higher-order mode is more than about 2.4 are determined.

(90) In a multiplexer in which multiple acoustic wave filters are connected at one terminal of each filter, the response of a higher-order mode in any one of the multiple acoustic wave filters is required to have a strength S11 of more than about 2.4 dB. This is because the influence on transmission characteristics of acoustic wave filters other than the one of the multiple acoustic wave filters is negligible. In cellular phones and the like, for example, usually, ripples appearing in a pass band of a filter are required to be about 0.8 dB or more from the viewpoint of ensuring the receiver sensitivity. It has been discovered that in the case where a higher-order mode of one acoustic wave filter is in the pass band of another acoustic wave filter, ripples having a strength of about of the strength of the response of the higher-order mode occur in the pass band of another filter. Thus, in order to achieve ripples having a magnitude of about 0.8 dB or more in the pass band of another filter, the strength S11 of the response of the higher-order mode of one filter may be more than about 2.4 dB.

(91) Additionally, in the acoustic wave device 1 according to the first preferred embodiment, T.sub.Si>20.

(92) Regarding the first higher-order mode, I.sub.h is larger than about 2.4 (I.sub.h>2.4), and T.sub.Si is larger than about 20 (T.sub.Si>20). It is thus possible to effectively reduce or prevent the influence of the response of the first higher-order mode on the pass band of another acoustic wave filter. This will be described with reference to FIGS. 8 to 11.

(93) FIG. 8 is a circuit diagram of a multiplexer. In a multiplexer 10, first to fourth acoustic wave filters 11 to 14 are commonly connected on the antenna terminal 15 side. FIG. 9 is a circuit diagram of a first acoustic wave filter 11. The first acoustic wave filter 11 includes multiple series-arm resonators S1 to S3 and multiple parallel-arm resonators P1 and P2. That is, the first acoustic wave filter 11 is a ladder filter. The series-arm resonators S1 to S3 and the parallel-arm resonators P1 and P2 are defined by the acoustic wave devices 1.

(94) In preferred embodiments of the present invention, the circuit configuration of the acoustic wave filter including the acoustic wave device is not limited thereto. For example, an acoustic wave filter including a longitudinally coupled resonator acoustic wave filter may be used. In this case, the longitudinally coupled resonator acoustic wave filter may be the acoustic wave device. An acoustic wave resonator coupled to the longitudinally coupled resonator acoustic wave filter may be defined by the acoustic wave device according to preferred embodiments of the present invention.

(95) Pass bands of the first to fourth acoustic wave filters 11 to 14 are referred to as a first pass band to a fourth pass band. Regarding the frequency positions, preferably, first pass band<second pass band<third pass band<fourth pass band.

(96) For comparison, a multiplexer including a first acoustic wave filter according to a comparative example was provided as in the foregoing preferred embodiment, except that the acoustic wave resonator having the reference structure described above was used. That is, in the multiplexer of the comparative example, the acoustic wave resonator having the reference structure and having the admittance characteristics illustrated in FIG. 2 was used in place of the acoustic wave device 1 of the present preferred embodiment described above. FIG. 10A illustrates filter characteristics of the first acoustic wave filter and a second acoustic wave filter in the multiplexer of the comparative example. A solid line indicates the filter characteristics of the first acoustic wave filter. A broken line indicates the filter characteristics of the second acoustic wave filter. Band A indicates the pass band of the first acoustic wave filter. Band B indicates the pass band of the second acoustic wave filter. A large ripple appears in the second pass band. This is because the response of the first higher-order mode of the acoustic wave resonator used in the first acoustic wave filter largely appears.

(97) FIG. 10B illustrates filter characteristics of a multiplexer according to a preferred embodiment of the present invention. A solid line indicates the filter characteristics of the first acoustic wave filter. A broken line indicates the filter characteristics of the second acoustic wave filter. Here, the first acoustic wave filter is defined by the acoustic wave device according to the foregoing preferred embodiment. Thus, a large ripple does not appear in the second pass band. That is, in the pass band of the second acoustic wave filter, which is another filter, a large ripple does not appear. Thus, the filter characteristics of the second acoustic wave filter are not easily degraded.

(98) As described above, in the multiplexer according to a preferred embodiment of the present invention, the response of the first higher-order mode is reduced or prevented in the acoustic wave filter including the acoustic wave device according to a preferred embodiment of the present invention. It is thus possible to effectively reduce or prevent the deterioration of the filter characteristics of another acoustic wave filter having a higher-frequency pass band than the acoustic wave filter.

(99) FIG. 11 illustrates the relationship between the wave length-normalized film thickness of the single-crystal Si layer 2 and the maximum phases of responses of the first, second, and third higher-order modes. FIG. 11 indicates that when T.sub.Si>20, it is possible to effectively reduce or prevent the strength of the response of each of the first higher-order mode, the second higher-order mode, and the third higher-order mode.

(100) Second Higher-Order Mode

(101) FIG. 12 illustrates the relationship between the propagation direction .sub.Si in the single-crystal Si layer and the strength S11 of the response of the second higher-order mode. As is apparent from FIG. 12, the strength S11 of the response of the second higher-order mode changes when .sub.Si changes. Similarly, as illustrated in FIG. 13, the strength S11 of the response of the second higher-order mode changes when the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate changes. As illustrated in FIG. 14, the strength S11 of the response of the second higher-order mode changes also when the cut angle (90+.sub.LT) of the piezoelectric body made of lithium tantalate changes. As illustrated in FIG. 15, the strength S11 of the response of the second higher-order mode changes also when the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film changes. As illustrated in FIG. 16, the strength S11 of the response of the second higher-order mode changes also when the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes in terms of Al changes.

(102) From the calculation results of FIGS. 12 to 16 and the like, similarly to the case of the first higher-order mode, the coefficients in Formula (1) for expressing I.sub.h2 corresponding to the strength of the response of the second higher-order mode were determined. When the coefficients of Formula (1) are set as described in Tables 41 to 44, Tables 53 to 56, or Tables 65 to 68 in accordance with ranges of the orientation of the single-crystal Si layer of (100), (110), or (111), the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate, the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film, the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes, and the propagation direction .sub.Si, I.sub.h2 corresponding to the strength of the response of the second higher-order mode are able to be expressed. In particular, in the case where the conditions of T.sub.LT, .sub.LT, T.sub.S, T.sub.E, and .sub.Si when I.sub.h2 is about 2.4 or more are determined and where T.sub.Si is larger than about 20 (T.sub.Si>20), the response of the second higher-order mode is also able to be sufficiently reduced.

(103) Third Higher-Order Mode

(104) FIG. 17 illustrates the relationship between the propagation direction .sub.Si in the single-crystal Si layer and the strength S11 of the response of the third higher-order mode. As is apparent from FIG. 17, the strength S11 of the response of the third higher-order mode changes when .sub.Si changes. Similarly, as illustrated in FIG. 18, the strength S11 of the response of the third higher-order mode changes also when the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate changes. As illustrated in FIG. 19, the strength S11 of the response of the third higher-order mode changes also when the cut angle (90+.sub.LT) of the piezoelectric body made of lithium tantalate changes. As illustrated in FIG. 20, the strength S11 of the response of the third higher-order mode changes also when the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film changes. As illustrated in FIG. 21, the strength S11 of the response of the third higher-order mode changes also when the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes in terms of Al changes.

(105) From FIGS. 17 to 21 and the like, the coefficients in Formula (1) for expressing I.sub.h3 corresponding to the strength of the response of the third higher-order mode were determined. When the coefficients of Formula (1) are set as described in Tables 45 to 48, Tables 57 to 60, or Tables 69 to 72 in accordance with ranges of the orientation of the single-crystal Si layer of (100), (110), or (111), the wave length-normalized film thickness T.sub.LT of the piezoelectric body made of lithium tantalate, the wave length-normalized film thickness T.sub.S of the SiO.sub.2 film, the wave length-normalized film thickness T.sub.E of the interdigital transducer electrodes, and the propagation direction .sub.Si, I.sub.h3 corresponding to the strength of the response of the third higher-order mode are able to be expressed. In particular, in the case where the conditions of T.sub.LT, .sub.LT, T.sub.S, T.sub.E, and .sub.Si when I.sub.h3 is about 2.4 or more are determined and where T.sub.Si is larger than about 20 (T.sub.Si>20), the response of the third higher-order mode is able to also be sufficiently reduced.

(106) Regarding I.sub.h for all of the first higher-order mode, the second higher-order mode, and the third higher-order mode, I.sub.h>about 2.4 is preferable. In this case, it is possible to effectively reduce or prevent the influence of the first to third higher-order modes on another acoustic wave filter. Regarding I.sub.h for the first higher-order mode and the second higher-order mode, I.sub.h for the first higher-order mode and the third higher-order mode, or I.sub.h for the second higher-order mode and the third higher-order mode, I.sub.h>about 2.4 may preferably be used. In this case, it is possible to reduce or prevent the influence of two higher-order modes selected from the first to third higher-order modes.

(107) In the case of using the structure of preferred embodiments of the present invention, as described above, a higher-order mode tends to be confined in a portion where the SiO.sub.2 film 3 and the piezoelectric body 4 are stacked. However, in the case where the piezoelectric body 4 has a thickness of about 3.5 or less, the stacked portion of the SiO.sub.2 film 3 and the piezoelectric body 4 has a small thickness. Thus, the higher-order mode is not easily confined therein.

(108) More preferably, the piezoelectric body 4 made of lithium tantalate has a thickness of about 2.5 or less, for example. In this case, the absolute value of the temperature coefficient of frequency TCF is able to be reduced. Even more preferably, the piezoelectric body 4 made of lithium tantalate has a thickness of about 1.5 or less, for example. In this case, the electromechanical coupling coefficient is able to be easily adjusted. Still even more preferably, the piezoelectric body 4 made of lithium tantalate has a thickness of about 0.5 or less, for example. In this case, the electromechanical coupling coefficient is able to be easily adjusted in a wide range.

(109) In Formula (1),

(110) a) In the case of using Si(100) (Euler angles (.sub.Si=05, .sub.Si=05, .sub.Si)), the range of .sub.Si is preferably 0.sub.Si45, for example. However, from the symmetry of the crystal structure of Si(100), .sub.Si and .sub.Si(n90) have the same meaning (where n=1, 2, 3 . . . ). Similarly, .sub.Si and .sub.Si have the same meaning.

(111) b) In the case of using Si(110) (Euler angles (.sub.Si=455, .sub.Si=905, .sub.Si)), the range of .sub.Si is preferably 0.sub.Si90, for example. However, from the symmetry of the crystal structure of Si(110), .sub.Si and .sub.Si(n180) have the same meaning (where n=1, 2, 3 . . . ). Similarly, .sub.Si and .sub.Si have the same meaning.

(112) c) In the case of using Si(111) (Euler angles (.sub.Si=455, .sub.Si=54.735615, .sub.Si)), the range of .sub.Si is preferably 0.sub.Si60 for example. However, from the symmetry of the crystal structure of Si(111), .sub.Si and .sub.Si(n120) have the same meaning (where n=1, 2, 3 . . . ). Similarly, .sub.Si and .sub.Si have the same meaning.

(113) The range of .sub.LT is 180<.sub.LT0. .sub.LT and .sub.LT+180 may be treated as having the same meaning.

(114) In this specification, for example, the range of 05 in the Euler angles (05, , 015) means within the range about 5 or more and about +5 or less. The range of 015 means within the range of about 15 or more and about +15 or less.

(115) FIG. 22 illustrates, in an acoustic wave device in which a low-acoustic-velocity film made of a SiO.sub.2 film having a thickness of about 0.35 and a piezoelectric film made of lithium tantalate with Euler angles of (0, 140.0, 0) are stacked on a high-acoustic-velocity supporting substrate made of silicon, the relationship between the film thickness of the LiTaO.sub.3 film and the quality factor. The vertical axis of FIG. 22 is the product of the quality characteristics and the band width ratio (f) of the resonator. FIG. 23 illustrates the relationship between the film thickness of the LiTaO.sub.3 film and the temperature coefficient of frequency TCF. FIG. 24 illustrates the film thickness of the LiTaO.sub.3 film and the acoustic velocity. From FIG. 22, the film thickness of the LiTaO.sub.3 film is preferably about 3.5 or less, for example. In this case, the quality factor is high, compared with the case of a film thickness of more than about 3.5. More preferably, the film thickness of the LiTaO.sub.3 film is about 2.5 or less, for example, in order to further increase the quality factor.

(116) From FIG. 23, in the case where the LiTaO.sub.3 film has a thickness of about 2.5 or less, the absolute value of the temperature coefficient of frequency TCF is able to be reduced, compared with the case of a film thickness of more than about 2.5. More preferably, the film thickness of the LiTaO.sub.3 film is about 2 or less, for example. In this case, the absolute value of the temperature coefficient of frequency TCF is able to be about 10 ppm/ C. or less. To reduce the absolute value of the temperature coefficient of frequency TCF, the film thickness of the LiTaO.sub.3 film is more preferably about 1.5 or less, for example.

(117) From FIG. 24, when the film thickness of the LiTaO.sub.3 film is more than 1.5, a change in acoustic velocity is markedly small.

(118) As illustrated in FIG. 25, however, when the film thickness of the LiTaO.sub.3 film is in the range of about 0.05 or more and about 0.5 or less, the band width ratio changes greatly. Thus, the electromechanical coupling coefficient is able to be adjusted in a wider range. To extend the adjustment ranges of the electromechanical coupling coefficient and the band width ratio, the film thickness of the LiTaO.sub.3 film is preferably in the range of about 0.05 or more and about 0.5 or less, for example.

(119) FIG. 26 illustrates the relationship between the film thickness of SiO.sub.2 () and the acoustic velocity, and FIG. 27 illustrates the relationship between the film thickness of SiO.sub.2 () and the electromechanical coupling coefficient. The acoustic wave device according to preferred embodiments of the present invention may include a low-acoustic-velocity film and a high-acoustic-velocity film disposed between the single-crystal Si layer and the piezoelectric body. Here, for example, a silicon nitride film, an aluminum oxide film, or a diamond film was preferably used as a high-acoustic-velocity film disposed below the low-acoustic-velocity film made of SiO.sub.2. The low-acoustic-velocity film refers to a film in which the acoustic velocity of a bulk wave that propagates through the low-acoustic-velocity film is lower than the acoustic velocity of an acoustic wave that propagates through the piezoelectric body. The high-acoustic-velocity film refers to a film in which the acoustic velocity of a bulk wave that propagates through the high-acoustic-velocity film is higher than the acoustic velocity of an acoustic wave that propagates through the piezoelectric body. The film thickness of the high-acoustic-velocity film was 1.5. The acoustic velocity of a bulk wave that propagates through silicon nitride is about 6,000 m/s. The acoustic velocity of a bulk wave that propagates through aluminum oxide is about 6,000 m/s. The acoustic velocity of a bulk wave that propagates through diamond is about 12,800 m/s. As illustrated in FIGS. 26 and 27, when the material of the high-acoustic-velocity film and the film thickness of the SiO.sub.2 film are changed, the electromechanical coupling coefficient and the acoustic velocity are little changed. In particular, as illustrated in FIG. 27, when the film thickness of the SiO.sub.2 film is about 0.1 or more and about 0.5 or less, the electromechanical coupling coefficient is little changed regardless of the material of the high-acoustic-velocity film. As illustrated in FIG. 26, when the film thickness of the SiO.sub.2 film is about 0.3 or more and about 2 or less, the acoustic velocity is unchanged regardless of the material of the high-acoustic-velocity film. Thus, the film thickness of the low-acoustic-velocity film made of silicon oxide is preferably about 2 or less, and more preferably about 0.5 or less, for example.

(120) The acoustic wave device of each preferred embodiment may be used as a component, such as a multiplexer, used in a high-frequency front-end circuit. An example of such a high-frequency front-end circuit will be described below.

(121) FIG. 28 is a schematic block diagram of a communication apparatus including a high-frequency front-end circuit according to a preferred embodiment of the present invention. A communication apparatus 240 includes an antenna 202, a high-frequency front-end circuit 230, and an RF signal processing circuit 203. The high-frequency front-end circuit 230 is a circuit section connected to the antenna 202. The high-frequency front-end circuit 230 includes a multiplexer 210 and amplifiers 221 to 224 to define and function as power amplifiers. The multiplexer 210 includes first to fourth filters 211 to 214. As the multiplexer 210, a multiplexer according to a preferred embodiment of the present invention may preferably be used. The multiplexer 210 includes a common antenna terminal 225 connected to the antenna 202. One terminal of each of the first to third filters 211 to 213 defining and functioning as reception filters and one terminal of the fourth filter 214 defining and functioning as a transmission filter are connected in common to the common antenna terminal 225. Output terminals of the first to third filters 211 to 213 are connected to the amplifiers 221 to 223, respectively. The input terminal of the fourth filter 214 is connected to the amplifier 224.

(122) The output terminals of the amplifiers 221 to 223 are connected to the RF signal processing circuit 203. The input terminal of the amplifier 224 is connected to the RF signal processing circuit 203.

(123) The multiplexer according to the present preferred embodiment may be appropriately used as the multiplexer 210 in the communication apparatus 240.

(124) Multiplexer according to preferred embodiments of the present invention may include multiple transmission filters and multiple reception filters. The multiplexer includes n band-pass filters where n is 2 or more. Thus, a duplexer is also included in a multiplexer in the present invention.

(125) Filters, multiplexers that can be used for a multiband system, front-end circuits, and communication apparatuses according to preferred embodiments of the present invention can be widely used for communication equipment such as mobile phones, for example.

(126) While preferred embodiments of the present invention have been described above, it is to be understood that variations and modifications will be apparent to those skilled in the art without departing from the scope and spirit of the present invention. The scope of the present invention, therefore, is to be determined solely by the following claims.