Multilayer encapsulation, method for encapsulating and optoelectronic component

11569479 · 2023-01-31

Assignee

Inventors

Cpc classification

International classification

Abstract

A multilayer encapsulation, a method for encapsulating and an optoelectronic component are disclosed. In an embodiment an optoelectronic component includes a first electrode layer, an organic light-emitting layer stack abutting the first electrode layer, a second electrode layer abutting the light-emitting layer stack and a multilayer encapsulation abutting the second electrode layer, wherein the multilayer encapsulation comprises a barrier layer and a planarization layer, wherein the planarization layer abuts the second electrode layer, and wherein the planarization layer is arranged between the second electrode layer and the barrier layer.

Claims

1. An optoelectronic component comprising: a first electrode layer; an organic light-emitting layer stack abutting the first electrode layer; a second electrode layer abutting the light-emitting layer stack; and a multilayer encapsulation abutting the second electrode layer, wherein the multilayer encapsulation comprises a barrier layer and a planarization layer, wherein the planarization layer directly abuts the second electrode layer, wherein the planarization layer is arranged between the second electrode layer and the barrier layer; and wherein the barrier layer is formed using plasma enhanced chemical vapor deposition (PECVD).

2. The optoelectronic component according to claim 1, wherein the barrier layer contains inorganic material selected from a group comprising SiN, SiO.sub.2, SiC or combinations thereof.

3. The optoelectronic component according to claim 1, wherein the planarization layer is formed by inkjet printing.

4. The optoelectronic component according to claim 1, wherein the planarization layer has a root mean square roughness of <200 nm.

5. The optoelectronic component according to claim 1, wherein the encapsulation is flexible.

6. The optoelectronic component according to claim 1, wherein the barrier layer surrounds lateral edges of the planarization layer.

7. The optoelectronic component according to claim 1, further comprising a protective layer on the barrier layer.

8. An optoelectronic component comprising: a first electrode layer; an organic light-emitting layer stack abutting the first electrode layer; a second electrode layer abutting the light-emitting layer stack; and a multilayer encapsulation abutting the second electrode layer, wherein the multilayer encapsulation comprises a barrier layer and a planarization layer, wherein the planarization layer abuts the second electrode layer, wherein the planarization layer is arranged between the second electrode layer and the barrier layer; wherein the barrier layer surrounds lateral edges of the planarization layer; and wherein the optoelectronic component further comprises a protective layer on the barrier layer.

9. The optoelectronic component according to claim 8, wherein the planarization layer has a smaller area parallel to its main direction of extension than the barrier layer.

10. The optoelectronic component according to claim 8, wherein the planarization layer has a common interface with the barrier layer at the lateral edges.

11. The optoelectronic component according to claim 8, wherein the planarization layer has a thickness being selected from a range including 50 nm up to and including 1.2 μm.

12. The optoelectronic component according to claim 8, wherein the protective layer is an organic protective layer or a varnish on which laminated plastic or metal foils are applied.

13. The optoelectronic component according to claim 8, wherein the barrier layer is formed using plasma enhanced chemical vapor deposition (PECVD).

14. The optoelectronic component according to claim 8, wherein the barrier layer contains inorganic material selected from a group comprising SiN, SiO.sub.2, SiC or combinations thereof.

15. The optoelectronic component according to claim 8, wherein the planarization layer is formed by inkjet printing.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Further arrangements and exemplary embodiments are explained below with regard to the figures.

(2) FIG. 1 shows the schematic side view of an optoelectronic component; and

(3) FIG. 2, FIG. 3, FIGS. 4A-4B, FIGS. 5A-5C and FIGS. 6A-6B show schematic side views of encapsulations according to different embodiments.

(4) In the exemplary embodiments and figures, identical, like or similar elements can each be provided with the same reference signs. The depicted elements and their proportions among each other are not to be regarded as true to scale, but rather individual elements, such as layers, components, devices and areas, can be exaggeratedly large for better representation and/or better understanding.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

(5) FIG. 1 shows the schematic side view of an optoelectronic component according to one embodiment. A layer stack 20 is arranged on the substrate 10, which is surrounded by an encapsulation 30. The layer stack 20 can be an organic light-emitting layer stack. The first and second electrode layers, which are arranged below or above the light-emitting layer stack 20 and with which the layer stack 20 can be electrically contacted, are not explicitly shown. The encapsulation 30 is arranged on the layer stack 20 and laterally with respect to the layer stack 20 and, together with substrate 10, includes layer stack 20. The optoelectronic component in FIG. 1, for example, is an OLED that can be either rigid or flexible.

(6) In the following, the encapsulation 30 is shown and described in schematic side views, whereby each exemplary embodiment shown in FIGS. 2 to 6 can be applied to a layer stack 20 as shown in FIG. 1. The encapsulations 30 shown in FIGS. 2 to 6 may be encapsulations of OLEDs, for example.

(7) FIG. 2 shows the schematic side view of an encapsulation 30, which has a planarization layer 32, on the top and bottom side of which in each case a barrier layer 31 is arranged. In this example, the planarization layer 32 is a layer made of PHPS, the barrier layers 31 each contain a metal oxide. The layer thickness of the barrier layer 31 is about 50 nm. The thickness of the planarization layer 32 may vary depending on the manufacturing method. If the planarization layer 32 is obtained by a UV curing process, the thickness of the resulting planarization layer 32 is selected from the range including 50 nm up to and including 500 nm, in particular including 200 nm up to and including 300 nm. If the planarization layer 32 is obtained by a temperature curing process, the thickness of the resulting planarization layer 32 may be selected from the range including 50 nm up to and including 1200 nm, in particular including 800 nm up to and including 1200 nm.

(8) The barrier layers 31 can be applied by means of ALD, CVD, PECVD, sputtering or MLD, for example. ALD is preferred, as a very homogeneous layer growth with a resulting very good barrier effect of barrier layer 31 is achieved. The metal oxide is, for example, alumina, zirconium oxide or titanium oxide. For example, if an alumina layer is produced by means of ALD, trimethyl aluminium and water can be applied to the surface to be encapsulated or the element to be encapsulated or the existing planarization layer, and Al.sub.2O.sub.3 can be formed. If MLD is used for production an alcohol or dialcohol is used instead of water, which leads to an alumina containing organic residues. This method is used when particularly flexible barrier layers 31 are to be produced.

(9) To produce the planarization layer 32, PHPS, especially a 20% solution of PHPS in dibutyl ether, is first applied to the surface to be encapsulated or the element to be encapsulated or, in this example, the already existing barrier layer 31 by means of spin coating, slot die coating, spray coating or inkjet printing.

(10) Depending on the curing conditions of the subsequent curing of the PHPS, different material properties of the resulting planarization layer 32 are obtained. In case PHPS is cured by UV curing, a very dense SiON-containing planarization layer 32 is obtained. For this, the PHPS layer is irradiated with a 172 nm Xe lamp for about 1 to 3 minutes under a reduced oxygen atmosphere. A dense SiO.sub.2-containing planarization layer 32 is formed when cured at elevated temperatures, e.g. at 80° C. in a water vapor atmosphere for 10 minutes to one hour.

(11) The completed planarization layer 32 has a water permeability of 10.sup.−4 g/dm.sup.2 for 200 nm layer thickness, together with the barrier layers 31 the encapsulation 30 has a water permeability of less than 10.sup.−6 g/dm.sup.2.

(12) FIG. 3 shows the schematic side view of another exemplary embodiment of the encapsulation 30. The arrangement of planarization layer 32 and barrier layers 31 corresponds to that of FIG. 2, with the planarization layer 32 being applied in a structured manner so that the barrier layers 31 also surround the planarization layer 32 laterally. In order to obtain such a structuring of the planarization layer 32, PHPS can be applied by means of slot die coating, spray coating, inkjet printing and stencil printing. The further fabrication of the planarization layer 32 and the barrier layer 31 as well as their materials correspond to those manufacturing methods and materials mentioned with respect to FIG. 2.

(13) The structured application of PHPS causes an encapsulation 30, which also laterally reduces or prevents the diffusion of water or oxygen through the lateral edges of the planarization layer 32.

(14) FIG. 4 shows the schematic side view of encapsulations 30, which are multilayered.

(15) In FIG. 4a, the encapsulation 30 is formed from a first barrier layer 31, a planarization layer 32 arranged on top of it, a further barrier layer 31, a further planarization layer 32 arranged on top of it and a third planarization layer 31. The fabrication and materials of barrier layers 31 and planarization layers 32 correspond to those specified in FIG. 2. The alternating arrangement of barrier layers 31 and planarization layers can be continued as desired, depending on the desired thickness, flexibility and permeability of water, oxygen and other gas of the encapsulation.

(16) FIG. 4b shows the schematic side view of an encapsulation 30, which is constructed analogously to the encapsulation 30 shown in FIG. 4A, whereby the planarization layers 32 are structured here, so that they are also surrounded laterally by the barrier layers 31. Here, too, a continuation of the alternating stacked barrier layers 31 and planarization layers 32 is conceivable. The fabrication and materials of barrier layers 31 and planarization layers 32 correspond to those specified in FIG. 2 or, as far as the structured application of planarization layers 31 is concerned, to the fabrication mentioned with respect to FIG. 3.

(17) FIG. 5 shows the schematic side view of exemplary embodiments of encapsulations 30, in which the planarization layer 32 also serves as a protective layer for barrier layer 31. In these exemplary embodiments, the encapsulation 30 ensures a very low water and oxygen permeability and at the same time a mechanical protection of the encapsulated element, for example, an encapsulated OLED.

(18) In FIG. 5a, a barrier layer 31 is arranged on a planarization layer 32 and a further planarization layer 32 is arranged on the barrier layer 31. In such an encapsulation 30, the planarization layer 32 serves as a protective layer for the barrier layer 31. The planarization layer 32 is thus the outer layer of the encapsulation and can protect the encapsulation and the encapsulated component from mechanical damage. The fabrication and materials of barrier layers 31 and planarization layers 32 correspond to those specified in FIG. 2.

(19) FIG. 5b shows an alternative exemplary embodiment in which the lower planarization layer 31 is not present. This means that the barrier layer 31 is applied directly to an OLED, for example, and a planarization layer 32 applied to it is used as an outer protective layer. The fabrication and materials of barrier layers 31 and planarization layers 32 correspond to those specified in FIG. 2.

(20) Another alternative is shown in FIG. 5c. Here, the lower planarization layer 31 is structured so that it is also laterally surrounded by the barrier layer 31 applied to it and the further planarization layer 32 applied to the barrier layer 31. The fabrication and materials of barrier layers 31 and planarization layers 32 correspond to the fabrication mentioned in FIG. 2 or, as far as the structuring of planarization layer 32 is concerned, to the fabrication mentioned with respect to FIG. 3. This structure reduces or prevents potential lateral penetration of water or oxygen through the planarization layer 32.

(21) FIG. 6 shows further exemplary embodiments of the encapsulation 30 in a schematic side view. A further layer, a protective layer 40, is shown here, which is applied to a barrier layer 31, which in turn is applied to a planarization layer 32. The protective layer 40 can be an organic protective layer or a varnish on which laminated plastic or metal foils, for example, are applied as additional scratch protection. The protective layer 40 serves to protect the barrier layer 31 from mechanical damage. In this example of the encapsulation 30, the planarization layer 32 has the function of planarization and thus improved adhesion for the barrier layer 31. Fabrication and materials of the barrier layers 31 and the planarization layers 32 correspond to those mentioned in FIG. 2.

(22) FIG. 6b shows the planarization layer 32 being structured so that it is also laterally surrounded by barrier layer 31. Incidentally, this example corresponds to the one shown in FIG. 6a.

(23) The invention is not limited by the description based on the examples. Rather, the invention covers each new feature and each combination of features, which includes in particular any combination of features in the patent claims, even if this feature or combination itself is not explicitly stated in the patent claims or exemplary embodiments.