Imaging optical unit and projection exposure unit including same

Abstract

An imaging optical unit for projection lithography has a plurality of mirrors for guiding imaging light from an object field into an image field. The object field is spanned by two object field coordinates, with a normal coordinate being perpendicular thereto. Imaging light propagates in a first imaging light plane through at least one first plane intermediate image of the imaging optical unit. In a second imaging light plane, the imaging light propagates through at least one second plane intermediate image of the imaging optical unit. The number of first plane intermediate images and the number of second plane intermediate images differ from one another. An imaging optical unit with reduced production costs emerges.

Claims

1. An imaging optical unit, comprising: a plurality of mirrors configured to guide imaging light along a path from an object field in an object plane into an image field in an image plane, wherein: the object field is spanned by a first Cartesian object field coordinate and a second Cartesian object field coordinate; a third Cartesian coordinate is perpendicular to both the first and second Cartesian object field coordinates; the imaging optical unit is configured so that, during use of the imaging optical unit: the imaging light propagates in a first imaging light plane in which an imaging light main propagation direction lies; and the imaging light propagates in a second imaging light plane in which the imaging light main propagation direction lies and which is perpendicular to the first imaging light plane; and a number of first plane intermediate images of the imaging light which propagates in the first imaging light plane is different from a number of second plane intermediate images of imaging light which propagates in the second imaging light plane.

2. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises a first mirror having an angle of incidence with the imaging light that is greater than 45.

3. The imaging optical unit of claim 2, wherein a used reflection surface of the first mirror has an aspect ratio of its surface dimensions of at most 3.

4. The imaging optical unit of claim 2, wherein: the number of first plane intermediate images of the imaging light which propagate in the first imaging light plane is less than the number of second plane intermediate images of imaging light which propagate in the second imaging light plane; and the second imaging light plane coincides with a folding plane of the first mirror.

5. The imaging optical unit of claim 2, wherein: one of the intermediate images is in the imaging light plane coinciding with the folding plane in the path upstream of the first mirror between the first mirror and a mirror disposed directly upstream thereof in the path; and a further intermediate image is in the imaging light plane coinciding with the folding plane in the path downstream of the first mirror between the first mirror and a mirror disposed directly downstream thereof in the path.

6. The imaging optical unit of claim 2, wherein: the plurality of mirrors comprises a second mirror; the first and second mirrors follow one another in the path; the second mirror has an angle of incidence with the imaging light that is greater than 45; the first and second mirrors have the same folding plane; and an intermediate image in the imaging light plane coinciding with the folding plane is in the path between the first and second mirrors.

7. The imaging optical unit of claim 1, wherein: the plurality of mirrors comprises a mirror having a passage opening configured to pass the imaging light; the mirror is configured to reflect the imaging light around the passage opening; and at least one intermediate image lies in the region of the passage opening.

8. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises a mirror having an angle of incidence with the imaging light that is less than 45.

9. The imaging optical unit of claim 1, wherein the imaging optical unit has an odd number of mirrors in the path between the object field and the image field.

10. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises a mirror which comprises a reflection surface comprising an outer boundary contour having a curved basic form corresponding to a curved basic form of the object field, and at least two contour bulges are arranged along a side edge of the boundary contour.

11. An optical system, comprising: an imaging optical unit according to claim 1; and an auxiliary device arranged in an intermediate image plane of one of the intermediate images.

12. An optical system, comprising: an imaging optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field with illumination light.

13. The optical system of claim 12, further comprising an auxiliary device arranged in an intermediate image plane of one of the intermediate images.

14. An apparatus, comprising: an optical system, comprising: an imaging optical unit according to claim 1; and an auxiliary device arranged in an intermediate image plane of one of the intermediate images; and a light source configured to produce the illumination light, wherein the apparatus is a projection exposure apparatus.

15. An apparatus, comprising: an optical system, comprising: an imaging optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field with illumination light; and a light source configured to produce the illumination light, wherein the apparatus is a projection exposure apparatus.

16. A method of using a projection exposure apparatus comprising an illumination optical unit and an imaging optical unit, the method comprising: using the illumination optical unit to illuminate a reticle comprising a structure; and using the imaging optical unit to project the illuminated structure onto a light-sensitive material, wherein the imaging optical unit is an imaging optical unit according to claim 1.

17. A mirror, comprising: a reflection surface comprising an outer boundary contour having a curved basic form, wherein: the mirror is configured to be used in an imaging optical unit that has a plurality of mirrors configured to guide imaging light along an imaging light beam path from an object field in an object plane into an image field in an image plane along an imaging light beam path having at least one intermediate image between the object field and the image field; the curved basic form corresponds to a curved basic form of the object field; at least two contour bulges are arranged along a side edge of the boundary contour; and at least one of the following holds: two of the contour bulges are arranged along a long side of the basic form; and at least two contour bulges are respectively arranged along two side edges of the boundary contour.

18. The mirror of claim 17, wherein two of the contour bulges are arranged along a long side of the basic form.

19. The mirror of claim 17, wherein at least two contour bulges are respectively arranged along two side edges of the boundary contour.

20. An imaging optical unit, comprising: a plurality of mirrors configured to guide imaging light along an imaging light beam path from an object field in an object plane into an image field in an image plane, wherein the plurality of mirrors comprises a mirror according to claim 17.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Exemplary embodiments of the disclosure are explained in greater detail below with reference to the drawings, in which:

(2) FIG. 1 schematically shows a projection exposure apparatus for EUV microlithography;

(3) FIG. 2 shows, in a meridional section, an embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1, wherein an imaging beam path for chief rays and for an upper coma ray and a lower coma ray of two selected field points is depicted;

(4) FIG. 3 shows a view of the imaging optical unit according to FIG. 2, as seen from the viewing direction III in FIG. 2;

(5) FIG. 4 shows plan views of boundary contours of optically used areas of the mirrors of the imaging optical unit according to FIGS. 2 and 3;

(6) FIG. 5 shows, in an illustration similar to FIG. 2, a further embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1;

(7) FIG. 6 shows a view of the imaging optical unit according to FIG. 5, as seen from the viewing direction VI in FIG. 5;

(8) FIG. 7 shows plan views of boundary contours of optically used areas of the mirrors of the imaging optical unit according to FIGS. 5 and 6;

(9) FIGS. 8-31 show, in illustrations similar to FIGS. 5 to 7, further embodiments of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1;

(10) FIG. 32 shows, in a meridional section, an embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1, wherein an imaging beam path for chief rays and for an upper coma ray and a lower coma ray of two selected field points is depicted;

(11) FIG. 33 shows, in an illustration similar to FIG. 32, a further embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1;

(12) FIG. 34 shows a view from viewing direction XXXIV in FIG. 32; and

(13) FIG. 35 shows a view from viewing direction XXXV in FIG. 33.

DETAILED DESCRIPTION

(14) A microlithographic projection exposure apparatus 1 has a light source 2 for illumination light or imaging light 3. The light source 2 is an EUV light source, which produces light in a wavelength range of e.g. between 5 nm and 30 nm, in particular between 5 nm and 15 nm. The light source 2 can be a plasma-based light source ((laser-produced plasma (LPP), gas-discharge produced plasma (GDP)) or else a synchrotron-based light source, for example a free electron laser (FEL). In particular, the light source 2 may be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are also possible. In general, even arbitrary wavelengths are possible for the illumination light 3 guided in the projection exposure apparatus 1, for example visible wavelengths or else other wavelengths which may find use in microlithography (for example, DUV, deep ultraviolet) and for which suitable laser light sources and/or LED light sources are available (e.g. 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm). A beam path of the illumination light 3 is depicted very schematically in FIG. 1.

(15) An illumination optical unit 6 serves to guide the illumination light 3 from the light source 2 to an object field 4 in an object plane 5. Using a projection optical unit or imaging optical unit 7, the object field 4 is imaged into an image field 8 in an image plane 9 with a predetermined reduction scale.

(16) In order to facilitate the description of the projection exposure apparatus 1 and the various embodiments of the projection optical unit 7, a Cartesian xyz-coordinate system is indicated in the drawing, from which system the respective positional relationship of the components illustrated in the figures is evident. In FIG. 1, the x-direction runs perpendicular to the plane of the drawing into the latter. The y-direction runs toward the left, and the z-direction runs upward.

(17) In the projection optical unit 7, the object field 4 and the image field 8 have a bent or curved embodiment and, in particular, an embodiment shaped like a partial ring. A radius of curvature of this field curvature can be 81 mm on the image side. A basic form of a boundary contour of the object field 4 or of the image field 8 has a corresponding bend. Alternatively, it is possible to embody the object field 4 and the image field 8 with a rectangular shape. The object field 4 and the image field 8 have an x/y-aspect ratio of greater than 1. Therefore, the object field 4 has a longer object field dimension in the x-direction and a shorter object field dimension in the y-direction. These object field dimensions extend along the field coordinates x and y.

(18) Accordingly, the object field 4 is spanned by the first Cartesian object field coordinate x and the second Cartesian object field coordinate y. The third Cartesian coordinate z, which is perpendicular to these two object field coordinates x and y, is also referred to as normal coordinate below.

(19) One of the exemplary embodiments depicted in FIGS. 2 et seq. can be used for the projection optical unit 7. The projection optical unit 7 according to FIG. 2 reduces by a factor of 4 in a sagittal plane xz and reduces by factor of 8 in a meridional plane yz. The projection optical unit 7 is an anamorphic projection optical unit. Other reduction scales in the two imaging light planes xz, yz are also possible, for example 3, 5, 6, 7 or else reduction scales that are greater than 8. Alternatively, the projection optical unit 7 may also have the respective same reduction scale in the two imaging light planes xz, yz, for example a reduction by a factor of 8. Then, other reduction scales are also possible, for example 4, 5 or even reduction scales which are greater than 8. The respective reduction scale may or may not be accompanied by an image flip, which is subsequently also elucidated by an appropriate sign specification of the reduction scale.

(20) In the embodiment of the projection optical unit 7 according to FIG. 2, the image plane 9 is arranged parallel to the object plane 5. What is imaged in this case is a section of a reflection mask 10, also referred to as reticle, coinciding with the object field 4. The reticle 10 is carried by a reticle holder 10a. The reticle holder 10a is displaced by a reticle displacement drive 10b.

(21) The imaging by way of the projection optical unit 7 is implemented on the surface of a substrate 11 in the form of a wafer, which is carried by a substrate holder 12. The substrate holder 12 is displaced by a wafer or substrate displacement drive 12a.

(22) FIG. 1 schematically illustrates, between the reticle 10 and the projection optical unit 7, a ray beam 13 of the illumination light 3 that enters into the projection optical unit and, between the projection optical unit 7 and the substrate 11, a ray beam 14 of the illumination light 3 that emerges from the projection optical unit 7. An image field-side numerical aperture (NA) of the projection optical unit 7 is not reproduced to scale in FIG. 1.

(23) The projection exposure apparatus 1 is of the scanner type. Both the reticle 10 and the substrate 11 are scanned in the y-direction during the operation of the projection exposure apparatus 1. A stepper type of the projection exposure apparatus 1, in which a stepwise displacement of the reticle 10 and of the substrate 11 in the y-direction is effected between individual exposures of the substrate 11, is also possible. These displacements are effected synchronously to one another by an appropriate actuation of the displacement drives 10b and 12a.

(24) FIGS. 2 and 3 show the optical design of a first embodiment of the projection optical unit 7. FIG. 2 shows the projection optical unit 7 in a meridional section, i.e. the beam path of the imaging light 3 in the yz plane. The meridional plane yz is also referred to as the second imaging light plane. FIG. 3 shows the imaging beam path of the projection optical unit 7 in the sagittal plane xz. A first imaging light plane xz.sub.HR is the plane which is spanned at the respective location of the beam path of the imaging light 3 by the first Cartesian object field coordinate x and a current imaging light main propagation direction z.sub.HR. The imaging light main propagation direction z.sub.HR is the beam direction of a chief ray 16 of a central field point. As a rule, this imaging light main propagation direction z.sub.HR changes at each mirror reflection at the mirrors M1 to M8. This change can be described as a tilt of the current imaging light main propagation direction z.sub.HR about the first Cartesian object field coordinate x about a tilt angle which equals the deflection angle of this chief ray 16 of the central field point at the respectively considered mirror M1 to M8. Subsequently, the first imaging light playing xz.sub.HR is also referred to as first imaging light plane xz for simplification purposes.

(25) The second imaging light plane yz likewise contains the imaging light main propagation direction z.sub.HR and is perpendicular to the first imaging light plane xz.sub.HR.

(26) Since the projection optical unit 7 is only folded in the meridional plane yz, the second imaging light plane yz coincides with the meridional plane.

(27) FIG. 2 depicts the beam path of in each case three individual rays 15 emanating from three object field points which are spaced apart from one another in the y-direction in FIG. 2. What is depicted are chief rays 16, i.e. individual rays 15 which pass through the center of a pupil in a pupil plane of the projection optical unit 7, and in each case an upper coma ray and a lower coma ray of these two object field points. Proceeding from the object field 4, the chief rays 16 include an angle CRA of 5.1 with a normal of the object plane 5.

(28) The object plane 5 lies parallel to the image plane 9.

(29) The projection optical unit 7 has an image-side numerical aperture of 0.55.

(30) The projection optical unit 7 according to FIG. 2 has a total of eight mirrors, which, proceeding from the object field 4, are numbered M1 to M8 in the sequence of the beam path of the individual rays 15.

(31) FIGS. 2 to 4 depict sections of the calculated reflection surfaces of the mirrors M1 to M8. A portion of these calculated reflection surfaces is used. Only this actually used region of the reflection surfaces, plus an overhang, is actually present in the real mirrors M1 to M8. These used reflection surfaces are carried in a known manner by mirror bodies.

(32) In the projection optical unit 7 according to FIG. 2, the mirrors M1, M4, M7 and M8 are configured as mirrors for normal incidence, that is to say as mirrors onto which the imaging light 3 impinges with an angle of incidence that is smaller than 45. Thus, overall, the projection optical unit 7 according to FIG. 2 has four mirrors M1, M4, M7 and M8 for normal incidence. These mirrors for normal incidence are also referred to as NI (normal incidence) mirrors.

(33) The mirrors M2, M3, M5 and M6 are mirrors for grazing incidence of the illumination light 3, that is to say mirrors onto which the illumination light 3 impinges with angles of incidence that are greater than 45 and, in particular, greater than 60. A typical angle of incidence of the individual rays 15 of the imaging light 3 on the mirrors M2, M3 and M5, M6 for grazing incidence lies in the region of 80. Overall, the projection optical unit 7 according to FIG. 2 has exactly four mirrors M2, M3, M5 and M6 for grazing incidence. These mirrors for grazing incidence are also referred to as GI (grazing incidence) mirrors.

(34) The mirrors M2 and M3 form a mirror pair arranged in succession directly in the beam path of the imaging light 3. The mirrors M5 and M6 also form a mirror pair arranged directly in succession in the beam path of the imaging light 3.

(35) The mirror pairs M2, M3 on the one hand and M5, M6 on the other hand reflect the imaging light 3 in such a way that the angles of reflection of the individual rays 15 add up at the respective mirrors M2, M3 and M5, M6 of these two mirror pairs. Thus, the respective second mirror M3 and M6 of the respective mirror pair M2, M3 and M5, M6 increases a deflecting effect which the respective first mirror M2, M5 exerts on the respective individual ray 15. This arrangement of the mirrors of the mirror pairs M2, M3 and M5, M6 corresponds to that described in DE 10 2009 045 096 A1 for an illumination optical unit.

(36) The mirrors M2, M3, M5 and M6 for grazing incidence each have very large absolute values for the radius, that is to say they have a relatively small deviation from a planar surface. These mirrors M2, M3, M5 and M6 for grazing incidence each have a comparatively weak refractive power, i.e. a lower beam-forming effect than a mirror which is concave or convex overall. The mirrors M2, M3, M5 and M6 contribute to a specific imaging aberration correction and, in particular, to a local imaging aberration correction.

(37) A deflection direction is defined below on the basis of the respectively depicted meridional sections for the purposes of characterizing a deflecting effect of the mirrors of the projection optical unit 7. As seen in the respective incident beam direction in the meridional section, for example according to FIG. 2, a deflecting effect of the respective mirror in the clockwise direction, i.e. a deflection to the right, is denoted by the abbreviation R. By way of example, the mirror M2 of the projection optical unit 7 has such a deflecting effect R. A deflecting effect of a mirror in the counterclockwise direction, i.e. toward the left as seen from the beam direction respectively incident on this mirror, is denoted by the abbreviation L. The mirrors M1 and M5 of the projection optical unit 7 are examples of the L deflecting effect. A weakly deflecting effect, or an effect that does not deflect at all, of a mirror with a folding angle f, for which the following applies: 1<f<1, is denoted by the abbreviation 0. The mirror M7 of the projection optical unit 7 is an example for the 0 deflecting effect. Overall, the projection optical unit 7 for the mirrors M1 to M8 has the following sequence of deflecting effects: LRRRLL0R.

(38) In principle, all described exemplary embodiments of the projection optical units can be mirrored about a plane extending parallel to the xz-plane without this changing fundamental imaging properties in the process. However, this naturally then changes the sequence of deflecting effects, which has the following sequence in the case of a projection optical unit which emerges by appropriate mirroring from the projection optical unit 7: RLLLRR0L.

(39) A selection of the deflection effect, i.e. a selection of a direction of the respective incident beam, for example on the mirror M4, and a selection of a deflection direction of the mirror pairs M2, M3 and M5, M6, is respectively selected in such a way that an installation space that is available for the projection optical unit 7 is used efficiently.

(40) The mirrors M1 to M8 carry a coating optimizing the reflectivity of the mirrors M1 to M8 for the imaging light 3. Here, this can be a ruthenium coating, a multilayer with, in each case, an uppermost layer made of e.g. ruthenium. In the mirrors M2, M3, M5 and M6 for grazing incidence, use can be made of a coating with e.g. one ply of molybdenum or ruthenium. These highly reflecting layers, in particular of the mirrors M1, M4, M7 and M8 for normal incidence, can be configured as multi-ply layers, wherein successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multi-ply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon. These may contain additional separation layers made of e.g. C (carbon), B.sub.4C (boron carbide) and can be terminated by a protective layer or a protective layer system toward the vacuum.

(41) For the purposes of calculating an overall reflectivity of the projection optical unit 7, a system transmission is calculated as follows: A mirror reflectivity is determined at each mirror surface depending on the angle of incidence of a guide ray, i.e. a chief ray of a central object field point, and combined by multiplication to form the system transmission.

(42) Details in respect of calculating the reflectivity are explained in WO 2015/014 753 A1.

(43) Further information in respect of reflection at a GI mirror (mirror for grazing incidence) are found in WO 2012/126 867 A. Further information in respect of the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A.

(44) An overall reflectivity or system transmission of the projection optical unit 7, emerging as a product of the reflectivities of all mirrors M1 to M8 of the projection optical unit 7, is R=8.02%.

(45) The mirror M8, that is to say the last mirror upstream of the image field 8 in the imaging beam path, has a passage opening 17 for the passage of the imaging light 3 which is reflected from the antepenultimate mirror M6 toward the penultimate mirror M7. The mirror M8 is used in a reflective manner around the passage opening 17. All other mirrors M1 to M7 do not have a passage opening and are used in a reflective manner in a region connected in a gap-free manner.

(46) In the first imaging light plane xz, the projection optical unit 7 has exactly one first plane intermediate image 18 in the imaging light beam path between the mirrors M6 and M7. This first plane intermediate image 18 lies in the region of the passage opening 17. A distance between the passage opening 17 and the image field 8 is more than four times greater than a distance between the passage opening 17 and the first plane intermediate image 18.

(47) In the second imaging light plane yz that is perpendicular to the first imaging light plane xz (cf. FIG. 2), the imaging light 3 passes through exactly two second plane intermediate images 19 and 20. The first of these two second plane intermediate images 19 lies between the mirrors M2 and M3 in the imaging light beam path. The other one of the two second plane intermediate images 20 lies in the region of the reflection of the imaging light 3 at the mirror M6.

(48) The number of the first plane intermediate images, i.e. exactly one first plane intermediate image in the projection optical unit 7, and the number of the second plane intermediate images, i.e. exactly two second plane intermediate images in the projection optical unit 7, differ from one another in the projection optical unit 7. In the projection optical unit 7, this number of intermediate images differs by exactly one.

(49) The second imaging light plane yz, in which the greater number of intermediate images, namely the two second plane intermediate images 19 and 20, are present, coincides with the folding plane yz of the GI mirrors M2, M3 and M5, M6. This folding plane is the plane of incidence of the chief ray 16 of the central field point upon reflection at the respective GI mirror. The second plane intermediate images are not, as a rule, perpendicular to the chief ray 16 of the central field point which defines the imaging light main propagation direction z.sub.HR. An intermediate image tilt angle, i.e. a deviation from this perpendicular arrangement, is arbitrary as a matter of principle and may lie between 0 and +/89.

(50) Auxiliary devices 18a, 19a, 20a can be arranged in the region of the intermediate images 18, 19, 20. These auxiliary devices 18a to 20a can be field stops for defining, at least in sections, a boundary of the imaging light beam. A field intensity prescription device in the style of an UNICOM, in particular with finger stops staggered in the x-direction, can also be arranged in one of the intermediate image planes of the intermediate images 18 to 20.

(51) The mirrors M1 to M8 are embodied as free-form surfaces which cannot be described by a rotationally symmetric function. Other embodiments of the projection optical unit 7, in which at least one of the mirrors M1 to M8 is embodied as a rotationally symmetric asphere, are also possible. An asphere equation for such a rotationally symmetric asphere is known from DE 10 2010 029 050 A1. It is also possible for all mirrors M1 to M8 to be embodied as such aspheres.

(52) A free-form surface can be described by the following free-form surface equation (equation 1):

(53) $\begin{matrix} Z = \frac{c_{x} x^{2} + c_{y} y^{2}}{1 + \sqrt{1 - (1 + k_{x}) {(c_{x} x)}^{2} - (1 + k_{y}) {(c_{y} y)}^{2}}} + C_{1} x + C_{2} y + C_{3} x^{2} + C_{4} xy + C_{5} y^{2} + C_{6} x^{3} + .Math. + C_{9} y^{3} + C_{10} x^{4} + .Math. + C_{12} x^{2} y^{2} + .Math. + C_{14} y^{4} + C_{15} x^{5} + .Math. + C_{20} y^{5} + C_{21} x^{6} + .Math. + C_{24} x^{3} y^{3} + .Math. + C_{27} y^{6} + .Math. & (1) \end{matrix}$

(54) The following applies to the parameters of this equation (1):

(55) Z is the sag of the free-form surface at the point x, y, where x.sup.2+y.sup.2=r.sup.2. Here, r is the distance from the reference axis of the free-form equation (x=0; y=0).

(56) In the free-form surface equation (1), C.sub.1, C.sub.2, C.sub.3 . . . denote the coefficients of the free-form surface series expansion in powers of x and y.

(57) In the case of a conical base area, c.sub.x, c.sub.y is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, c.sub.x=1/R.sub.x and c.sub.y=1/R.sub.y applies. Here, k.sub.x and k.sub.y each correspond to a conical constant of a corresponding asphere. Thus, equation (1) describes a biconical free-form surface.

(58) An alternative possible free-form surface can be generated from a rotationally symmetric reference surface. Such free-form surfaces for reflection surfaces of the mirrors of projection optical units of microlithographic projection exposure apparatuses are known from US 2007-0058269 A1.

(59) Alternatively, free-form surfaces can also be described with the aid of two-dimensional spline surfaces. Examples for this are Bezier curves or non-uniform rational basis splines (NURBS). By way of example, two-dimensional spline surfaces can be described by a grid of points in an xy-plane and associated z-values, or by these points and gradients associated therewith. Depending on the respective type of the spline surface, the complete surface is obtained by interpolation between the grid points using for example polynomials or functions which have specific properties in respect of the continuity and the differentiability thereof. Examples for this are analytical functions.

(60) FIG. 4 shows boundary contours of the reflection surfaces in each case impinged upon by the imaging light 3 on the mirrors M1 to M8 of the projection optical unit 7, i.e. the so-called footprints of the mirrors M1 to M8. These boundary contours are in each case depicted in an x/y-diagram, which corresponds to the local x- and y-coordinates of the respective mirror M1 to M8. The illustrations are true to scale in millimeters. Moreover, the form of the passage opening 17 is depicted in the illustration relating to the mirror M8.

(61) The following table summarizes the parameters maximum angle of incidence, extent of the reflection surface in the x-direction, extent of the reflection surface in the y-direction and maximum mirror diameter for the mirrors M1 to M8:

(62) TABLE-US-00001 M1 M2 M3 M4 M5 M6 M7 M8 Maximum 17.6 81.3 79.4 14.1 80.4 83.2 22.5 6.3 angle of incidence [] Extent of the 497.3 441.9 524.9 731.8 464.7 314.0 298.0 1003.7 reflection surface in the x-direction [mm] Extent of the 252.4 462.4 250.5 130.0 231.8 132.6 183.2 984.2 reflection surface in the y-direction [mm] Maximum 497.3 494.0 524.9 731.8 464.7 314.0 298.0 1004.0 mirror diameter [mm]

(63) On account of the second plane intermediate images 19 and 20 in the region of the GI mirrors M2, M3, M5 and M6, these GI mirrors, too, do not have an extreme extent in the y-direction. A y/x-aspect ratio of corresponding surface dimension of the reflection surfaces of these GI mirrors M2, M3, M6 and M7 is only greater than 1 for the mirror M2 and is approximately 1.05 there. None of the GI mirrors has a y/x-aspect ratio that is greater than 1.05. The y/x-aspect ratio deviates most strongly from the value of 1 at the mirrors M4 of the mirrors M1 to M8 of the projection optical unit 7 and there it has a value of approximately 1:5.6. In all other mirrors, the y/x-aspect ratio lies in the range between 3:1 and 1:3.

(64) The mirror M8 that predetermines the image-side numerical aperture has the largest maximum mirror diameter with a diameter of 1004 mm. None of the other mirrors M1 to M7 have a maximum diameter which is greater than 80% of the maximum mirror diameter of the mirror M8.

(65) A pupil-defining aperture stop AS is arranged in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 7. In the region of the aperture stop AS, the entire imaging light beam is accessible over its entire circumference.

(66) The mirror M6 of the projection optical unit 7 (cf. FIG. 4) has a reflection surface that can be used for reflection, with a boundary contour RK. This boundary contour RK has a basic form GF which is indicated by dashed lines in relation to the mirror M6 in FIG. 4. This basic format GF corresponds to a curved basic form of the object field 4. The basic form GF of the mirror M6 corresponds to that of the object field 4, i.e. it is likewise curved.

(67) Two contour bulges KA are arranged along a side edge of the boundary contour RK of the mirror M6 that lies at the top in FIG. 4.

(68) The boundary contour RK of the mirror M6 follows a boundary contour of an entire imaging light beam at the reflection at the mirror M6. This boundary contour of the entire imaging light beam has corresponding contour bulges, which is due to the intermediate imaging by the second plane intermediate image 20.

(69) Two further contour bulges KA are arranged on the opposite side edge of the boundary contour RK, depicted at the bottom in FIG. 4.

(70) The contour bulges KA are respectively arranged along the two long sides of the basic form GF.

(71) The optical design data of the reflection surfaces of the mirrors M1 to M8 of the projection optical unit 7 can be gathered from the following tables. These optical design data in each case proceed from the image plane 9, i.e. describe the respective projection optical unit in the reverse propagation direction of the imaging light 3 between the image plane 9 and the object plane 5.

(72) The first of these tables provides an overview of the design data of the projection optical unit 7 and summarizes the numerical aperture NA, the calculated design wavelength for the imaging light, the reduction factors x and y in the two imaging light planes xz and yz, the dimensions of the image field in the x-direction and y-direction, image field curvature, and an image aberration value rms and a stop location. This curvature is defined as the inverse radius of curvature of the field. The image aberration value is specified in m (ml), i.e. it depends on the design wavelength. Here, this is the rms value of the wavefront aberration.

(73) The second of these tables provides vertex point radii (Radius_x=R.sub.x, Radius_y=R.sub.y) and refractive power values (Power_x, Power_y) for the optical surfaces of the optical components. Negative values of radius mean curves which are concave toward the incident illumination light 3 in the section of the respective surface with the considered plane (xz, yz), which is spanned by a surface normal at the vertex point with the respective direction of curvature (x, y). The two radii Radius_x, Radius_y may have explicitly different signs.

(74) The vertex points at each optical surface are defined as points of incidence of a guide ray which travels from an object field center to the image field 8 along a plane of symmetry x=0, i.e. the plane of the drawing of FIG. 2 (meridional plane).

(75) The refractive powers Power_x (P.sub.x), Power_y (P.sub.y) at the vertex points are defined as:

(76) $P_{x} = - \frac{2 \cos AOI}{R_{x}}$ $P_{y} = - \frac{2}{R_{y} \cos AOI}$

(77) Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal.

(78) The third table specifies, for the mirrors M1 to M8, in millimeters, the conic constants k.sub.x and k.sub.y, the vertex point radius R.sub.x (=Radius_x) and the free-form surface coefficients C.sub.n. Coefficients C.sub.n not tabulated in the table each have the value of 0.

(79) The fourth table still specifies the magnitude along which the respective mirror, proceeding from a reference surface, was decentered (DCY) in the y-direction, and displaced (DCZ) and tilted (TLA, TLC) in the z-direction. This corresponds to a parallel shift and a tilting in the case of the freeform surface design method. Here, a displacement is carried out in the y-direction and in the z-direction in mm, and tilting is carried out about the x-axis and about the z-axis. In this case, the angle of rotation is specified in degrees. Decentering is carried out first, followed by tilting. The reference surface during decentering is in each case the first surface of the specified optical design data. Decentering in the y-direction and in the z-direction is also specified for the object field 4. In addition to the surfaces assigned to the individual mirrors, the fourth table also tabulates the image plane as the first surface, the object plane as the last surface and optionally a stop surface (with the label Stop).

(80) The fifth table still specifies the transmission data of the mirrors M8 to M1, namely the reflectivity thereof for the angle of incidence of an illumination light ray incident centrally on the respective mirror. The overall transmission is specified as a proportional factor remaining from an incident intensity after reflection at all mirrors in the projection optical unit.

(81) The sixth table specifies an edge of the stop AS as a polygonal line in local coordinates xyz. As described above, the stop AS is decentered and tilted.

(82) TABLE-US-00002 TABLE 1 for FIG. 2 Exemplary embodiment FIG. 2 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 12.0 ml Stop AS

(83) TABLE-US-00003 TABLE 2 for FIG. 2 Surface Radius_x [mm] Power_x [1/mm] Radius_y [mm] Power_y [1/mm] Operating mode M8 977.9363886 0.0020361 929.6273166 0.0021610 REFL M7 1294.8209643 0.0015445 435.8531595 0.0045890 REFL M6 18365.5486866 0.0000231 46554.4044838 0.0002030 REFL M5 5259.3234531 0.0000933 9321.2739117 0.0008744 REFL M4 1765.3339870 0.0011067 1142.0480083 0.0017928 REFL M3 2922.7328266 0.0001820 2482.4542085 0.0030292 REFL M2 1651.2946943 0.0003085 8489.6411649 0.0009249 REFL M1 2632.7505211 0.0007257 1790.4348754 0.0011694 REFL

(84) TABLE-US-00004 TABLE 3a for FIG. 2 Coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.11558328 0.06317830 0.67536006 RX 977.93638860 1294.82096400 18365.54869000 C7 3.26431733e09 9.19931196e07 6.01520941e08 C9 1.58538114e09 1.11351361e07 8.67911005e10 C10 2.62749675e11 1.65294576e09 2.46957387e11 C12 3.89038959e11 5.8094008e09 5.62790766e11 C14 1.02513051e11 5.53161746e09 2.39097835e11 C16 5.05646011e15 5.96237142e12 2.22416819e14 C18 4.92292703e15 1.27228894e11 2.83846346e13 C20 1.16365138e15 5.18801779e12 5.76795483e15 C21 3.04440558e17 5.32997236e15 1.09361216e16 C23 7.98657435e17 4.06529865e14 7.9007479e16 C25 6.41119264e17 7.80652921e14 4.56580147e16 C27 1.39235463e17 8.10562525e14 2.24207356e15 C29 6.20803428e21 2.93716245e17 9.54358468e19 C31 1.24534312e20 1.84555197e16 5.3458423e18 C33 4.42030372e21 1.84586928e16 1.86756383e17 C35 1.07126508e21 1.91912568e16 1.00354655e17 C36 2.91575118e23 9.09001497e20 6.26271473e21 C38 1.08152276e22 6.67834705e19 6.49920584e20 C40 1.4917793e22 1.73448182e18 1.11297067e19 C42 8.53194437e23 2.43380836e18 3.95874101e19 C44 1.41286848e23 5.65275748e19 5.41032235e19 C46 5.48565523e27 6.08367951e22 2.03215013e22 C48 1.54244255e26 3.0535911e21 4.18114672e22 C50 8.36720446e27 1.37751887e22 5.5893905e22 C52 5.14729095e28 1.06533988e20 8.75292138e21 C54 4.65607389e28 1.19886682e21 4.41429933e21 C55 3.994753e29 1.37140533e24 2.55530798e25 C57 1.95743945e28 1.10267807e23 3.51112917e24 C59 3.82935802e28 1.41353816e23 6.14784987e24 C61 3.52698144e28 9.07886953e24 6.9704448e23 C63 1.4336365e28 7.49817063e24 7.39060153e23 C65 1.94273034e29 3.91695015e23 5.92226689e23 C67 1.57733117e32 4.88361615e27 9.64794763e27 C69 6.12153839e32 3.56715922e26 5.2372298e26 C71 1.18717428e31 3.19191477e25 2.13380099e25 C73 1.063393e31 7.51279757e25 2.45159051e25 C75 2.89486089e32 6.71222307e25 1.71851249e24 C77 6.32013344e33 7.38715108e25 9.74025575e25 C78 1.11262585e35 3.03620946e29 2.58218161e30 C80 4.67368442e35 4.91226123e28 6.72675352e29 C82 1.23352933e34 1.67499613e27 1.55650129e29 C84 1.53536949e34 2.38894849e27 2.90832154e27 C86 9.5650515e35 8.23315242e29 6.09750745e27 C88 1.71733925e35 8.61039219e28 6.1107714e27 C90 5.94121394e36 1.76523408e27 7.99611209e28 C92 1.4787702e38 2.58993199e31 1.58067878e31 C94 8.90625365e38 1.71267929e30 1.06702074e30 C96 2.89055314e37 2.40810729e31 7.02875699e30 C98 4.29516754e37 2.22333849e29 3.28419568e29 C100 3.17681665e37 5.50483336e29 2.1648152e29 C102 8.36108049e38 5.43169134e29 1.11856162e28 C104 9.74872514e39 7.63910208e30 6.57499885e29 C105 1.04610049e40 0 0 C107 7.41863701e40 0 0 C109 2.255693e39 0 0 C111 3.77109587e39 0 0 C113 3.64577025e39 0 0 C115 2.02577223e39 0 0 C117 5.69128325e40 0 0 C119 4.83815892e41 0 0 C121 4.67494483e44 0 0 C123 3.13407576e43 0 0 C125 8.99958812e43 0 0 C127 1.4543934e42 0 0 C129 1.2834763e42 0 0 C131 6.10286793e43 0 0 C133 8.34784383e44 0 0 C135 2.74349368e44 0 0

(85) TABLE-US-00005 TABLE 3b for FIG. 2 Coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.77165478 KX 0.27864052 0.19204874 0.00000000 RX 5259.32345300 1765.33398700 2922.73282700 C7 1.8652865e07 4.24630231e08 1.94384684e07 C9 1.02802052e07 6.52977487e07 7.17829652e08 C10 5.35811112e11 1.10296456e11 7.42346358e11 C12 1.99417399e10 1.00977633e10 3.76056759e11 C14 1.01835137e10 2.41010461e09 3.93568892e11 C16 2.80626289e13 5.69400376e14 1.25218538e13 C18 1.17577236e13 1.19732124e12 2.13740953e13 C20 2.50255951e13 4.32169574e12 9.64163266e14 C21 2.6907927e16 2.39267428e18 1.53152765e17 C23 4.23262886e16 4.05603783e16 4.40460986e16 C25 2.15191279e16 1.89419852e15 2.63263458e16 C27 5.663038e16 7.91269935e14 4.09740933e16 C29 1.5876173e19 8.03015961e21 1.86842113e20 C31 2.92538582e18 1.25575575e18 2.14335016e19 C33 3.14262906e18 7.82872258e17 3.26621777e18 C35 2.0088391e18 1.00119594e15 4.39403082e19 C36 5.08999445e21 2.78323568e23 1.48137274e21 C38 7.30929047e21 3.91351204e22 6.05704744e22 C40 2.98409959e21 2.36229594e20 9.24943789e21 C42 3.84399776e20 7.46681843e19 1.57963955e21 C44 3.13179317e20 2.73402949e18 2.68227984e21 C46 5.10842468e24 8.55981332e26 1.99536481e24 C48 2.91936197e23 3.82725655e25 9.32028588e24 C50 1.38453799e22 1.24908171e22 1.36675154e23 C52 5.51592482e22 1.4570635e21 1.17711866e22 C54 3.41044893e22 8.01441707e20 9.9016006e23 C55 5.17252551e26 1.34968706e29 1.52532943e27 C57 2.00318594e25 1.44840346e27 2.0470899e26 C59 2.10437127e25 1.6131965e26 6.73921181e26 C61 3.69625695e25 8.05459452e25 3.84979616e25 C63 3.90489396e24 9.87992209e23 7.45595383e26 C65 1.69415126e25 8.02607569e22 3.07812088e25 C67 3.23262405e28 1.14795879e32 4.40966022e29 C69 2.68979529e29 1.90474992e29 5.89666435e29 C71 3.36239328e27 8.67278176e28 7.78323397e28 C73 9.49129081e27 2.06524492e26 4.01125727e28 C75 9.56175133e27 5.20174159e25 3.52455817e27 C77 1.16580455e26 1.72107549e24 6.57922701e28 C78 9.80464919e32 4.54180435e34 7.49347454e32 C80 9.31289455e31 6.32640281e33 2.27529195e31 C82 7.94127312e30 1.28727506e31 1.93638319e31 C84 3.16841696e29 5.32074606e31 3.0973772e30 C86 7.96302059e29 1.02870035e29 3.39277553e30 C88 1.07641552e29 7.15154387e27 1.49638592e29 C90 5.80007699e29 5.52471571e26 1.81838477e29 C92 6.37618517e35 1.00673819e36 4.35344188e34 C94 7.23981776e33 1.93844772e35 6.92879874e34 C96 2.27198696e32 4.0369611e34 1.30815712e33 C98 8.07732983e32 1.1395269e32 5.54290471e33 C100 1.81611958e31 1.72883542e30 1.51072988e32 C102 5.61071528e32 4.78892158e29 9.32848301e32 C104 8.84936177e32 2.47120721e28 5.24911338e32

(86) TABLE-US-00006 TABLE 3c for FIG. 2 Coefficient M2 M1 KY 0.01234570 0.00000000 KX 0.00000000 0.00000000 RX 1651.29469400 2632.75052100 C7 1.51550123e07 7.36996938e09 C9 1.21487821e08 2.0569377e08 C10 2.09113187e10 1.80026904e11 C12 7.96285921e11 2.02425339e10 C14 1.20235152e10 1.58699294e10 C16 2.42936866e13 1.14876287e13 C18 3.56848304e16 4.28329459e13 C20 2.73831533e13 3.62201583e14 C21 4.93325127e16 5.51321462e17 C23 1.59461068e16 5.36481007e17 C25 6.66776901e16 3.27342504e16 C27 2.41302066e16 1.34172814e15 C29 7.485099e20 1.44207244e19 C31 4.18658537e19 1.32626192e18 C33 2.38338714e18 4.93631418e18 C35 1.15578785e18 6.59449991e18 C36 4.45559292e21 7.91898678e22 C38 1.53820416e21 5.64637331e21 C40 3.30412695e21 1.46982681e20 C42 5.95781353e21 3.05459185e20 C44 4.72401785e21 6.10830044e20 C46 6.64520361e24 7.70691095e25 C48 3.47713297e25 9.16676497e25 C50 2.00485e23 1.06076605e22 C52 2.14721965e23 1.99224578e22 C54 9.43870644e25 9.42098864e23 C55 5.89271373e27 8.8726833e27 C57 5.14053514e26 1.32158184e25 C59 2.26598784e26 4.00410895e25 C61 3.67898874e26 4.34484571e25 C63 6.45066115e26 3.6616824e25 C65 1.70603744e26 2.44627583e24 C67 9.80740962e29 4.64135426e29 C69 3.87068653e29 2.42039766e28 C71 2.12238797e28 2.00886711e27 C73 7.90980539e29 8.12221417e27 C75 1.71846637e28 9.69211396e27 C77 4.83228352e29 2.69100732e27 C78 3.28414165e31 4.34877232e32 C80 6.2173288e31 1.23197166e30 C82 5.25200248e31 5.95477298e30 C84 4.09914682e31 1.20688548e29 C86 6.87904365e31 2.4844433e30 C88 4.06358345e31 1.08603958e29 C90 2.87455932e31 1.73556337e28 C92 1.43700292e33 6.95582298e35 C94 6.74298218e34 2.81521715e34 C96 1.7534426e33 1.38405426e32 C98 3.15685068e33 8.4479462e32 C100 1.49584673e33 2.7006613e31 C102 4.70629963e34 2.3767521e31 C104 3.32523652e34 5.76041521e31

(87) TABLE-US-00007 TABLE 4a for FIG. 2 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 882.77565409 M7 0.00000000 147.74416815 103.43278922 M6 0.00000000 82.17184405 1159.82035546 M5 0.00000000 195.88699161 1313.90521342 M4 0.00000000 689.91126350 1545.33998989 M3 0.00000000 161.29497309 1546.43843672 M2 0.00000000 732.36714651 1201.83267617 Stop 0.00000000 1015.58933861 693.77057038 M1 0.00000000 1198.65681500 365.37240755 Object 0.00000000 1348.48550683 2077.92168912

(88) TABLE-US-00008 TABLE 4b for FIG. 2 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M8 5.36724017 0.00000000 0.00000000 M7 191.50652875 0.00000000 0.00000000 M6 65.64698575 0.00000000 0.00000000 M5 39.33707785 0.00000000 0.00000000 M4 77.48616539 0.00000000 0.00000000 M3 15.51718699 0.00000000 0.00000000 M2 45.98528751 0.00000000 0.00000000 Stop 29.56527173 180.00000000 0.00000000 M1 192.06886766 0.00000000 0.00000000 Object 0.00000146 0.00000000 0.00000000

(89) TABLE-US-00009 TABLE 5 for FIG. 2 Surface Angle of incidence [deg] Reflectivity M8 5.39974096 0.66267078 M7 0.65775307 0.66564975 M6 77.78202576 0.84766857 M5 75.79531335 0.81712415 M4 12.35481935 0.64834731 M3 74.57586411 0.79655325 M2 75.24373779 0.80800760 M1 17.20845857 0.62924549 Overall transmission 0.0802

(90) TABLE-US-00010 TABLE 6 for FIG. 2 X [mm] Y [mm] Z [mm] 0.00000000 89.20801645 0.00000000 34.08528121 88.17188871 0.00000000 67.40598766 85.11507465 0.00000000 99.20831752 80.16474983 0.00000000 128.76104217 73.46969353 0.00000000 155.36725085 65.16806914 0.00000000 178.37639394 55.38904414 0.00000000 197.19924577 44.26886612 0.00000000 211.32549205 31.96726025 0.00000000 220.34120483 18.68302504 0.00000000 223.94717509 4.66585955 0.00000000 221.97922526 9.77769625 0.00000000 214.42559512 24.28603688 0.00000000 201.43485904 38.45542703 0.00000000 183.31296701 51.86145417 0.00000000 160.51193019 64.08136185 0.00000000 133.61280933 74.71394168 0.00000000 103.30527919 83.39836098 0.00000000 70.36584216 89.83225300 0.00000000 35.63590906 93.78743681 0.00000000 0.00000000 95.12190481 0.00000000 35.63590906 93.78743681 0.00000000 70.36584216 89.83225300 0.00000000 103.30527919 83.39836098 0.00000000 133.61280933 74.71394168 0.00000000 160.51193019 64.08136185 0.00000000 183.31296701 51.86145417 0.00000000 201.43485904 38.45542703 0.00000000 214.42559512 24.28603688 0.00000000 221.97922526 9.77769625 0.00000000 223.94717509 4.66585955 0.00000000 220.34120483 18.68302504 0.00000000 211.32549205 31.96726025 0.00000000 197.19924577 44.26886612 0.00000000 178.37639394 55.38904414 0.00000000 155.36725085 65.16806914 0.00000000 128.76104217 73.46969353 0.00000000 99.20831752 80.16474983 0.00000000 67.40598766 85.11507465 0.00000000 34.08528121 88.17188871 0.00000000

(91) An overall reflectivity of the projection optical unit 7 is 8.02%.

(92) The reference axes of the mirrors are generally tilted with respect to a normal of the image plane 9, as is made clear by the tilt values in the tables.

(93) The mirrors M1, M4 and M8 have negative values for the radius, i.e. they are, in principle, concave mirrors. The mirror M7 has a positive value for the radius, i.e. it is, in principle, a convex mirror. The mirrors M2, M3, M5 and M6 have radius values with different signs, i.e. they are toric or saddle mirrors.

(94) The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1 mm. The projection optical unit 7 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(95) An edge of a stop surface of the stop (cf., also, table 6 for FIG. 2) emerges from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate at the field center point in the direction of the stop surface with a complete image-side telecentric aperture. When the stop is embodied as an aperture stop, the edge is an inner edge.

(96) The stop AS can lie in a plane or else have a three-dimensional embodiment. The extent of the stop AS can be smaller in the scan direction (y) than in the cross scan direction (x).

(97) An installation length of the projection optical unit 7 in the z-direction, i.e. a distance between the object plane 5 and the image plane 9, is approximately 2080 mm.

(98) In the projection optical unit 7, a pupil obscuration is 15% of the entire aperture of the entry pupil. Thus, less than 15% of the numerical aperture is obscured as a result of the passage opening 17. The obscuration edge is constructed in a manner analogous to the construction of the stop edge explained above in conjunction with the stop 18. In the case of an embodiment as an obscuration stop, the edge is an outer edge of the stop. In a system pupil of the projection optical unit 7, a surface which cannot be illuminated due to the obscuration is less than 0.15.sup.2 of the surface of the overall system pupil. The non-illuminated surface within the system pupil can have a different extent in the x-direction than in the y-direction. The non-illuminated surface in the system pupil can be round, elliptical, square or rectangular. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil.

(99) A y-distance d.sub.OIS between a central object field point and a central image field point is approximately 1350 mm. A working distance between the mirror M7 and the image plane 9 is 77 mm.

(100) The mirrors of the projection optical unit 7 can be housed in a cuboid with the xyz-edge lengths of 1004 mm2021 mm1534 mm.

(101) The projection optical unit 7 is approximately telecentric on the image side.

(102) The obscuration edge is constructed in a manner analogous to the construction of the stop edge explained above in conjunction with the stop 18. In the case of an embodiment as an obscuration stop, the edge is an outer edge of the stop. In a system pupil of the projection optical unit 7, a surface which cannot be illuminated due to the obscuration is less than 0.15.sup.2 of the surface of the overall system pupil. The non-illuminated surface within the system pupil can have a different extent in the x-direction than in the y-direction. The non-illuminated surface in the system pupil can be round, elliptical, square, rectangular or else have the form of a polygonal line. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil.

(103) A further embodiment of a projection optical unit 21, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 5 to 7. Components and functions which were already explained above in the context of FIGS. 1 to 4 are appropriately denoted by the same reference signs and are not discussed again in detail.

(104) The mirrors M1 to M8 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(105) The following table once again shows the mirror parameters of mirrors M1 to M8 of the projection optical unit 21.

(106) TABLE-US-00011 M1 M2 M3 M4 M5 M6 M7 M8 Maximum 17.7 83.6 79.1 15.4 82.1 84.1 21.7 8.5 angle of incidence [] Extent of the 480.9 612.0 734.0 786.4 550.3 348.7 352.8 930.1 reflection surface in the x-direction [mm] Extent of the 240.7 495.6 227.5 123.4 359.4 121.4 211.1 921.6 reflection surface in the y-direction [mm] Maximum 480.9 612.8 734.0 786.5 550.8 348.7 353.0 936.4 mirror diameter [mm]

(107) None of the GI mirrors M2, M3, M5 and M6 has a y/x-aspect ratio of its reflection surface that is greater than 1. The NI mirror M4 has the most extreme y/x-aspect ratio at approximately 1:6.4.

(108) Here too, the mirror M8 has the largest maximum mirror diameter, measuring less than 950 mm.

(109) The optical design data from the projection optical unit 21 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(110) TABLE-US-00012 TABLE 1 for FIG. 5 Exemplary embodiment FIG. 5 NA 0.5 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.0 1/mm rms 9.2 ml Stop AS

(111) TABLE-US-00013 TABLE 2 Operating Surface Radius_x [mm] Power_x [1/mm] Radius_y [mm] Power_y [1/mm] mode M8 1028.1890922 0.0019300 959.8491743 0.0021000 REFL M7 3932.1050547 0.0005085 641.6674836 0.0031174 REFL M6 5352.1107774 0.0000757 24854.2346696 0.0003974 REFL M5 2870.1334684 0.0001444 5932.2095215 0.0016270 REFL M4 2683.8914762 0.0007230 1481.1480890 0.0013918 REFL M3 3205.8052729 0.0001568 3694.8995054 0.0021542 REFL M2 20005.7694322 0.0000193 14932.3149158 0.0006929 REFL M1 5312.3214757 0.0003611 2012.9727538 0.0010359 REFL for FIG. 5

(112) TABLE-US-00014 TABLE 3a for FIG. 5 Coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.11707187 0.04806187 0.41102881 RX 1028.18909200 3932.10505500 5352.11077700 C7 8.32110151e09 7.75192759e07 8.38431813e08 C9 2.65634274e09 5.91270104e07 3.8859897e08 C10 1.7055709e11 3.50377124e10 3.03629175e10 C12 3.4222558e11 2.1099725e09 6.89418154e11 C14 1.77106861e11 4.80002309e09 6.72089575e11 C16 1.14467378e14 8.02970149e13 6.68672697e13 C18 1.24019197e14 7.25793342e12 5.77645684e13 C20 1.84961531e15 7.83383236e13 2.52644253e14 C21 2.15820281e17 1.42170913e15 6.13051461e16 C23 6.10692437e17 7.31997494e15 3.41664153e16 C25 7.16991235e17 1.49144421e14 4.4277313e17 C27 1.35420803e17 4.03527766e15 1.58210976e14 C29 8.62061614e21 4.29985657e18 8.20744059e18 C31 2.63207728e20 3.69588953e17 4.68525896e18 C33 7.2137657e21 1.19620901e18 3.06007835e17 C35 9.80087706e21 1.70594431e17 1.6890856e16 C36 2.13708366e23 4.21759943e21 5.74352644e21 C38 8.22434751e23 2.3951499e20 5.33179782e20 C40 1.43850238e22 1.30926569e19 1.67190312e20 C42 8.16684483e23 4.14969602e19 1.38769568e18 C44 2.80014827e23 1.4099488e18 1.0296977e17 C46 1.18829244e27 4.53220944e24 1.42509336e22 C48 2.81954585e26 1.41737217e22 4.69109246e22 C50 1.85733281e26 3.26256632e22 5.80444096e22 C52 2.72041596e26 3.37691673e21 1.98920261e20 C54 2.37702476e28 7.74548198e21 2.08508467e19 C55 2.53602461e29 1.08361867e25 7.70794381e26 C57 1.39992921e28 5.30294989e25 2.55960339e24 C59 2.72691538e28 1.10149469e24 1.59315739e23 C61 2.38086239e28 2.23222466e25 4.74854092e23 C63 1.24030935e28 1.09712699e23 1.18627931e21 C65 1.85427438e29 1.0229509e23 1.02720137e21 C67 2.74820055e32 7.25647164e28 4.8045814e27 C69 5.18070943e32 3.24196497e27 1.25489123e26 C71 7.2409432e32 6.87767424e27 7.19619324e26 C73 1.24626527e31 5.1366772e26 2.03225531e24 C75 5.2993749e32 1.47904291e25 4.00593467e24 C77 3.2164977e32 9.75767738e27 4.61398026e23 C78 1.96159183e35 5.95503793e31 1.02993847e31 C80 2.07477209e35 3.50991441e30 5.33686479e29 C82 6.79009521e35 9.70294329e31 5.73736763e28 C84 1.54323386e34 1.54338338e28 1.87312898e27 C86 1.96855426e34 8.86955354e28 2.39794826e26 C88 1.38189955e34 1.47179885e27 1.67777792e25 C90 4.9760176e35 7.92160236e28 2.42405976e25 C92 1.24122918e38 8.64955586e33 6.17875305e32 C94 2.2387216e37 2.699854e32 7.1703801e31 C96 3.4409904e37 1.55238589e32 9.54082667e31 C98 2.84279628e37 9.78290545e31 5.27094915e29 C100 1.21418438e38 3.4681581e30 2.14210068e28 C102 1.88826532e38 4.2071042e30 1.19333327e27 C104 1.67545048e38 3.90299739e30 2.27692876e28 C105 3.31353145e41 0 0 C107 4.0002151e40 0 0 C109 1.25330728e39 0 0 C111 2.07743415e39 0 0 C113 2.25065136e39 0 0 C115 1.47353035e39 0 0 C117 4.51645253e40 0 0 C119 2.28432172e41 0 0 C121 8.2888995e44 0 0 C123 4.00545577e43 0 0 C125 7.56772316e43 0 0 C127 4.05636636e43 0 0 C129 2.53940071e43 0 0 C131 6.85819455e43 0 0 C133 2.51739126e43 0 0 C135 3.47946269e44 0 0

(113) TABLE-US-00015 TABLE 3b for FIG. 5 Coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.64021352 KX 0.22282184 0.21746393 0.00000000 RX 2870.13346800 2683.89147600 3205.80527300 C7 1.47299147e07 2.64994677e08 6.28701185e08 C9 6.23337864e08 1.57634285e07 4.65369704e08 C10 1.48854604e10 1.192183e11 2.29686752e11 C12 1.02913792e10 1.86491276e10 1.57020008e11 C14 2.53637748e11 2.79043703e09 1.16183001e11 C16 2.70788001e13 9.12488689e14 2.86529362e15 C18 1.56818296e13 2.21807015e12 1.98396494e14 C20 1.1477383e13 1.49107451e11 1.38283753e13 C21 1.67397123e16 2.28964432e17 4.39106972e17 C23 8.37104743e16 8.9801365e16 4.11622891e17 C25 7.47250405e17 7.10807871e15 1.21811131e16 C27 1.79902189e16 2.2394936e14 5.03509402e16 C29 8.27076091e19 1.70454112e19 4.82882592e20 C31 1.84287894e18 1.34325393e18 9.5068104e20 C33 1.21320541e18 3.6138162e17 5.1685178e19 C35 5.48084095e19 3.8395771e15 7.87749871e18 C36 1.85465234e21 3.7251701e23 1.26079958e22 C38 3.46046896e21 1.05875826e21 2.79363614e22 C40 9.44259685e21 4.07620659e20 2.48686978e21 C42 1.93639312e20 3.72631463e18 9.54609358e21 C44 1.81285681e20 3.33714823e18 4.8548579e20 C46 5.86611261e24 3.27395572e25 7.44419579e26 C48 1.21250192e23 2.48877687e23 1.45146899e24 C50 4.70679809e23 1.629748e21 1.70329245e24 C52 1.35442554e22 4.947345e21 5.74686981e23 C54 1.89474646e22 2.46150233e19 9.92108773e22 C55 8.51982321e27 2.55798506e29 1.77784215e28 C57 9.55965768e27 9.67336823e27 4.80247741e27 C59 8.56706064e27 5.9830259e25 4.94864751e26 C61 5.43620015e26 2.99229925e24 2.11534673e25 C63 5.14940966e25 2.11963201e22 9.49895777e25 C65 1.1325732e24 6.55165767e23 2.64833059e24 C67 3.20050186e29 1.08799851e31 4.25371744e32 C69 8.93307827e29 5.9737815e29 2.87246881e30 C71 4.40848262e28 2.50559555e27 6.01241562e30 C73 8.53288765e28 4.77493797e26 1.42915015e27 C75 1.04138051e27 1.07454562e24 1.45023879e27 C77 3.95557803e27 1.58374495e23 3.7330166e26 C78 7.67993746e33 1.3603387e34 4.70533824e34 C80 1.82202453e31 2.8502332e32 2.19064865e32 C82 7.59424732e31 2.35506707e30 4.5067788e31 C84 2.61465311e30 4.19888867e29 2.62808797e30 C86 4.10291005e30 2.35024421e28 3.12051609e30 C88 9.79786373e31 1.33377231e26 2.37410837e29 C90 7.50555478e30 1.17432361e26 2.93732287e28 C92 3.9655732e35 1.72718937e36 3.90363721e36 C94 4.46917432e34 4.18220567e34 1.49283393e34 C96 1.56112844e33 1.35239086e32 1.97806516e33 C98 4.3774859e33 1.80150492e31 8.83974058e33 C100 5.4549234e33 9.86612463e31 1.93388477e33 C102 2.81497244e34 2.95757417e29 9.15264296e32 C104 5.98693118e33 4.50915131e28 6.27379138e31

(114) TABLE-US-00016 TABLE 3c for FIG. 5 Coefficient M2 M1 KY 0.01610994 0.00000000 KX 0.00000000 0.00000000 RX 20005.76943000 5312.32147600 C7 9.97757392e08 1.14515844e09 C9 2.91949621e10 4.55089269e08 C10 2.70115051e11 6.40348255e11 C12 3.25994029e11 6.56125263e11 C14 6.37320775e11 1.21032297e10 C16 5.70345897e14 5.86255456e14 C18 2.34998283e13 6.57703817e14 C20 1.02164563e13 4.83818491e14 C21 1.81446991e16 3.12737429e17 C23 8.47472643e17 1.02850187e17 C25 5.297863e16 5.14354465e16 C27 5.75737107e16 4.3062722e16 C29 3.55617149e20 1.49808819e20 C31 5.36437096e19 5.5378949e19 C33 2.34497633e19 4.15769813e19 C35 1.69984307e18 3.04906337e18 C36 1.9178023e22 1.70283147e22 C38 7.87813152e23 7.11597023e22 C40 1.83575044e21 2.0097976e21 C42 2.14115511e21 5.03016856e21 C44 1.29072759e22 4.06117639e20 C46 4.36456706e24 4.25906296e26 C48 1.08223127e23 4.71637846e25 C50 4.4109074e24 1.24191908e23 C52 1.09242646e23 1.79368118e22 C54 2.91487178e24 5.96112215e24 C55 1.97519267e27 1.32162791e27 C57 7.06505036e27 8.3877702e27 C59 2.358499e27 5.87441823e26 C61 4.8961744e26 2.56618026e25 C63 6.59136487e26 9.06106721e26 C65 2.64120864e26 1.79467821e25 C67 3.46228797e29 7.84570376e30 C69 1.1864846e28 4.81900485e31 C71 2.08001966e28 1.15249378e28 C73 1.84703515e28 1.36349585e27 C75 3.16029006e29 6.24230347e27 C77 2.54423051e29 5.21093708e27 C78 1.03407606e33 3.54875723e33 C80 3.59466643e32 4.11652826e32 C82 9.23602595e32 2.71629404e31 C84 1.25103753e31 2.30117719e30 C86 2.6498546e31 4.73398183e30 C88 6.38528862e31 4.03545839e30 C90 3.10355559e31 8.23151308e30 C92 1.05059842e34 6.41686536e35 C94 5.23779013e34 1.71973327e34 C96 8.7667225e34 5.7757545e34 C98 8.99395043e34 2.97547589e34 C100 1.13652161e33 3.04986257e32 C102 1.1517371e33 1.32076094e31 C104 4.20064583e34 5.22857669e32

(115) TABLE-US-00017 TABLE 4a for FIG. 5 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 882.77533922 M7 0.00000000 195.71291787 116.12641402 M6 0.00000000 112.88128115 1167.50030789 M5 0.00000000 262.73607799 1347.86961998 M4 0.00000000 750.53634909 1589.60226228 M3 0.00000000 235.35640877 1618.85948606 M2 0.00000000 927.86499038 1259.80535144 Stop 0.00000000 1378.82735066 728.11966836 M1 0.00000000 1754.86756418 284.76737249 Object 0.00000000 1522.31770430 2073.12928528

(116) TABLE-US-00018 TABLE 4b for FIG. 5 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M8 7.16040462 0.00000000 0.00000000 M7 195.33928697 0.00000000 0.00000000 M6 61.96084316 0.00000000 0.00000000 M5 38.32023492 0.00000000 0.00000000 M4 77.66939217 0.00000000 0.00000000 M3 12.85309098 0.00000000 0.00000000 M2 38.55110875 0.00000000 0.00000000 Stop 26.91995318 180.00000000 0.00000000 M1 203.85632932 0.00000000 0.00000000 Object 1.40889103 0.00000000 0.00000000

(117) TABLE-US-00019 TABLE 5 for FIG. 5 Surface Angle of incidence[deg] Reflectivity M8 7.16040462 0.66024220 M7 1.01847774 0.66560265 M6 78.31860788 0.85537503 M5 78.04078388 0.85141092 M4 14.03041098 0.64275475 M3 75.44710587 0.81140397 M2 78.85487636 0.86287678 M1 16.44743829 0.63285937 Overall transmission 0.0911

(118) TABLE-US-00020 TABLE 6 for FIG. 5 X[mm] Y[mm] Z[mm] 0.00000000 80.61237695 0.00000000 38.90654191 79.83106129 0.00000000 76.96347650 77.46957065 0.00000000 113.32346519 73.48914023 0.00000000 147.14570305 67.86143904 0.00000000 177.60579355 60.59847490 0.00000000 203.91466853 51.76925797 0.00000000 225.34730932 41.50446204 0.00000000 241.27817834 29.99597516 0.00000000 251.21769593 17.49549950 0.00000000 254.84363465 4.31151215 0.00000000 252.02218346 9.19816293 0.00000000 242.81597223 22.64006773 0.00000000 227.47918826 35.60512570 0.00000000 206.44159792 47.69252180 0.00000000 180.28421807 58.53347376 0.00000000 149.71031735 67.81061415 0.00000000 115.51564449 75.26961108 0.00000000 78.56077700 80.72207728 0.00000000 39.74742241 84.04138390 0.00000000 0.00000000 85.15555607 0.00000000 39.74742241 84.04138390 0.00000000 78.56077700 80.72207728 0.00000000 115.51564449 75.26961108 0.00000000 149.71031735 67.81061415 0.00000000 180.28421807 58.53347376 0.00000000 206.44159792 47.69252180 0.00000000 227.47918826 35.60512570 0.00000000 242.81597223 22.64006773 0.00000000 252.02218346 9.19816293 0.00000000 254.84363465 4.31151215 0.00000000 251.21769593 17.49549950 0.00000000 241.27817834 29.99597516 0.00000000 225.34730932 41.50446204 0.00000000 203.91466853 51.76925797 0.00000000 177.60579355 60.59847490 0.00000000 147.14570305 67.86143904 0.00000000 113.32346519 73.48914023 0.00000000 76.96347650 77.46957065 0.00000000 38.90654191 79.83106129 0.00000000

(119) An overall reflectivity of the projection optical unit 21 is 9.11%.

(120) The projection optical unit 21 has an image-side numerical aperture of 0.50. In the first imaging light plane xz, the projection optical unit 21 has a reduction factor .sub.x of 4.00. In the second imaging light plane yz, the projection optical unit 21 has a reduction factor .sub.y of 8.00. An object-side chief ray angle is 6.0. A pupil obscuration is 17%. An object-image offset d.sub.OIS is approximately 1520 mm. The mirrors of the projection optical unit 21 can be housed in a cuboid with xyz-edge lengths of 930 mm2625 mm1570 mm.

(121) The reticle 10 and hence the object plane 5 are tilted at an angle T of 1.4 about the x-axis. This tilt angle T is indicated in FIG. 5.

(122) A working distance between the mirror M7 closest to the wafer and the image plane 9 is approximately 80 mm.

(123) FIG. 7 shows, once again, the boundary contours of the reflection surfaces of the mirrors M1 to M8 of the projection optical unit 21.

(124) A further embodiment of a projection optical unit 22, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 8 to 10. Components and functions which were already explained above in the context of FIGS. 1 to 7 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(125) The projection optical unit 22 has a total of six mirrors M1 to M6 in the beam path of the imaging light 3 between the object field 4 and the image field 8. All six mirrors M1 to M6 are embodied as NI mirrors. Once again, the free-form equation (1) specified above applies to the mirrors M1 to M6.

(126) The projection optical unit 22 for the mirrors M1 to M6 has the following sequence of deflecting effects: RLRL0L.

(127) The following table once again shows the mirror parameters of mirrors M1 to M6 of the projection optical unit 22.

(128) TABLE-US-00021 M1 M2 M3 M4 M5 M6 Maximum 21.7 15.0 14.9 10.5 20.5 9.9 angle of incidence [] Extent of the reflection 368.5 707.4 350.4 481.0 383.2 888.8 surface in the x-direction [mm] Extent of the reflection 195.0 115.4 75.8 87.3 188.8 866.8 surface in the y-direction [mm] Maximum 368.7 707.5 350.4 481.0 383.2 889.4 mirror diameter [mm]

(129) Once again, the last mirror in the imaging beam path M6 has the largest mirror diameter in this case at less than 900 mm. Four of the six mirrors have a maximum mirror diameter that is less than 500 mm. Three of the six mirrors have a maximum mirror diameter that is less than 400 mm.

(130) The projection optical unit 22, too, has exactly one first plane intermediate image 18 and two second plane intermediate images 19, 20. The first plane intermediate image 18 lies in the beam path of the imaging light 3 between the mirrors M4 and M5 in the region of the passage opening 17 in the mirror M6.

(131) The first of the two second plane intermediate images 19 lies between the mirrors M1 and M2 in the imaging light beam path. In the region of this first second plane intermediate image 19, the entire imaging light beam is accessible from the outside.

(132) The second of the two second plane intermediate images 20 lies between the mirrors M3 and M4 in the imaging light beam path, near the reflection at the mirror M4.

(133) FIG. 10 shows, once again, the boundary contours of the reflection surfaces of the mirrors M1 to M6 of the projection optical unit 22.

(134) The optical design data from the projection optical unit 22 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(135) TABLE-US-00022 TABLE 1 for FIG. 8 Exemplary embodiment FIG. 8 NA 0.5 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 30.4 ml Stop AS

(136) TABLE-US-00023 TABLE 2 for FIG. 8 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M6 1014.9918248 0.0019477 893.7079569 0.0022640 REFL M5 4610.1894926 0.0004338 445.6719052 0.0044876 REFL M4 1174.3233785 0.0016932 1051.9540567 0.0019123 REFL M3 1010.0226976 0.0019510 1197.8415209 0.0016946 REFL M2 1312.0179701 0.0015026 457.6913193 0.0044329 REFL M1 2662.6604435 0.0007175 689.9531731 0.0030345 REFL

(137) TABLE-US-00024 TABLE 3a for FIG. 8 Coefficient M6 M5 M4 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1014.99182500 4610.18949300 1174.32337800 C7 1.63639571e08 6.87483772e07 5.05861922e08 C9 2.56462343e09 8.13225055e08 6.91885105e08 C10 3.47436391e11 5.1256056e10 2.20583412e11 C12 4.44052628e11 1.08128581e09 1.23932264e11 C14 1.24765499e11 1.98667881e09 1.3750797e10 C16 1.67475636e14 8.26682729e13 1.38362898e14 C18 9.76310679e15 4.46159816e12 2.16077936e13 C20 1.45702228e15 3.24741965e12 2.28312825e13 C21 3.24995571e17 1.05414267e15 4.08171639e17 C23 9.0792086e17 6.91730224e15 4.24398459e16 C25 7.35193153e17 8.25850133e15 1.75536482e15 C27 1.85937479e17 3.10952802e14 1.1585979e14 C29 3.5703491e21 3.79157699e18 1.86810268e19 C31 1.62630367e20 1.17545811e17 4.98612502e18 C33 6.86959019e21 5.76661234e17 4.52757427e17 C35 8.17002723e22 1.66090704e18 1.08408627e16 C36 3.2700837e23 2.65910919e21 2.31577232e23 C38 1.34204537e22 1.56511463e20 7.09104552e21 C40 2.04464085e22 1.10292873e19 7.98817392e20 C42 1.28721975e22 3.17002038e19 2.25764225e19 C44 2.96501352e23 8.14163076e19 2.01105282e18 C46 3.53309255e27 1.82114149e23 6.19948554e24 C48 7.54713713e27 1.58912096e22 6.80341023e23 C50 1.78836502e26 4.08001034e22 3.63898676e23 C52 3.86147907e27 1.28151939e21 7.13925671e21 C54 7.91589003e28 2.63398048e21 1.04122167e20 C55 1.43124789e29 1.33926566e26 1.1354639e27 C57 9.15031711e29 1.44374755e25 3.20632475e27 C59 1.89538308e28 1.17688068e24 2.94313435e25 C61 1.69419016e28 3.65160042e24 3.37682466e24 C63 7.08899858e29 5.45288447e24 2.87305808e23 C65 1.19238698e29 4.81365787e24 1.92631285e22 C67 8.84476216e33 0 0 C69 1.98727303e32 0 0 C71 4.96871795e32 0 0 C73 1.44538227e32 0 0 C75 1.04191135e32 0 0 C77 4.64811674e33 0 0 C78 7.8772164e35 0 0 C80 4.88956574e34 0 0 C82 1.35090835e33 0 0 C84 1.94584721e33 0 0 C86 1.54538702e33 0 0 C88 6.249653e34 0 0 C90 9.73653236e35 0 0

(138) TABLE-US-00025 TABLE 3b for FIG. 8 Coefficient M3 M2 M1 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1010.02269800 1312.01797000 2662.66044300 C7 1.22170857e06 6.37823316e08 1.04546816e07 C9 3.4882529e07 4.66354991e08 4.33781443e07 C10 1.79366666e10 1.60437821e11 1.67219502e10 C12 2.29403181e09 2.76521017e10 1.27323858e10 C14 2.35161032e09 5.10158035e12 7.40803126e11 C16 1.96936012e12 5.01626897e14 1.9388874e13 C18 3.06827899e12 4.35561341e13 2.24745804e13 C20 9.34367333e13 1.3947707e13 1.42809061e13 C21 2.08970015e15 2.70438568e17 8.36581833e17 C23 1.44355508e14 4.62969015e16 9.24640588e17 C25 1.03942716e14 1.77055219e15 9.30437101e16 C27 4.45724605e14 1.3432402e15 4.97813101e16 C29 1.13501065e17 2.08662747e20 1.06307014e18 C31 7.37625827e17 1.11182127e18 1.03467077e19 C33 5.22864623e16 1.63709053e18 4.43520233e18 C35 3.18335684e15 1.15476436e16 7.19972734e18 C36 1.48856757e22 3.17157665e23 2.01947584e22 C38 2.4509923e20 1.76326446e22 1.15195494e21 C40 4.57082031e19 1.18268185e21 1.7753503e20 C42 5.32101962e18 2.19596361e19 7.59631967e20 C44 1.5864064e17 2.06176518e18 5.39549368e20 C46 5.09328497e23 4.19812761e28 4.26631568e25 C48 1.03961327e22 3.07261947e24 8.61056344e24 C50 1.74534839e21 8.0086339e24 6.16639119e23 C52 7.74976733e20 1.84308643e21 7.81194941e23 C54 1.25718836e20 9.71541989e21 1.67382093e22 C55 2.02154535e26 1.81898014e29 3.72618487e27 C57 1.9578895e25 7.72527746e28 1.92836548e26 C59 3.33959317e24 7.31594235e27 1.55354656e27 C61 4.88859554e23 4.2851618e26 6.3515115e25 C63 5.77450758e22 2.46460998e24 2.18154993e24 C65 3.46696439e21 1.16458004e23 2.03857604e24

(139) TABLE-US-00026 TABLE 4a for FIG. 8 Surface DCX DCY DCZ Image plane 0.00000000 0.00000000 0.00000000 M6 0.00000000 0.00000000 851.91437338 M5 0.00000000 215.33453017 163.05420307 M4 0.00000000 202.86472499 1489.58314522 M3 0.00000000 88.22184657 985.10610976 M2 0.00000000 34.90345715 1713.07366623 Stop 0.00000000 135.82751472 1401.74952443 M1 0.00000000 293.49163988 1114.25248790 Object plane 0.00000000 414.92461745 2499.99892470

(140) TABLE-US-00027 TABLE 4b for FIG. 8 Surface TLA[deg] TLB[deg] TLC[deg] Image plane 0.00000000 0.00000000 0.00000000 M6 8.67950248 0.00000000 0.00000000 M5 162.57155265 0.00000000 0.00000000 M4 23.74155941 0.00000000 0.00000000 M3 160.20743108 0.00000000 0.00000000 M2 19.17019370 0.00000000 0.00000000 Stop 73.99216967 180.00000000 0.00000000 M1 168.13377923 0.00000000 0.00000000 Object plane 0.00803708 0.00000000 0.00000000

(141) TABLE-US-00028 TABLE 5 for FIG. 8 Surface Angle of incidence[deg] Reflectivity M6 8.71355191 0.65746407 M5 0.04144783 0.66566082 M4 6.17488689 0.66169307 M3 9.84785496 0.65503404 M2 9.68325312 0.65540855 M1 17.20204356 0.62927702 Overall transmission 0.0782

(142) TABLE-US-00029 TABLE 6 for FIG. 8 X[mm] Y[mm] Z[mm] 0.00000000 33.91943836 0.00000000 39.06721628 33.65070311 0.00000000 77.39353501 32.85500161 0.00000000 114.21865728 31.55954113 0.00000000 148.74973474 29.79710172 0.00000000 180.16015462 27.59244760 0.00000000 207.60469095 24.95188839 0.00000000 230.25345814 21.86101434 0.00000000 247.34324552 18.29294351 0.00000000 258.23929132 14.22650701 0.00000000 262.49585262 9.66923988 0.00000000 259.90237404 4.67735378 0.00000000 250.50536902 0.63372866 0.00000000 234.60234893 6.09139258 0.00000000 212.71071500 11.47957768 0.00000000 185.51982813 16.56006824 0.00000000 153.83698419 21.09555441 0.00000000 118.53749665 24.86968553 0.00000000 80.52602701 27.70183298 0.00000000 40.71219752 29.45685009 0.00000000 0.00000000 30.05126322 0.00000000 40.71219752 29.45685009 0.00000000 80.52602701 27.70183298 0.00000000 118.53749665 24.86968553 0.00000000 153.83698419 21.09555441 0.00000000 185.51982813 16.56006824 0.00000000 212.71071500 11.47957768 0.00000000 234.60234893 6.09139258 0.00000000 250.50536902 0.63372866 0.00000000 259.90237404 4.67735378 0.00000000 262.49585262 9.66923988 0.00000000 258.23929132 14.22650701 0.00000000 247.34324552 18.29294351 0.00000000 230.25345814 21.86101434 0.00000000 207.60469095 24.95188839 0.00000000 180.16015462 27.59244760 0.00000000 148.74973474 29.79710172 0.00000000 114.21865728 31.55954113 0.00000000 77.39353501 32.85500161 0.00000000 39.06721628 33.65070311 0.00000000

(143) An overall reflectivity of the projection optical unit 22 is 7.82%.

(144) The projection optical unit 22 has a numerical aperture of 0.50. A reduction factor is 4.0 (.sub.x) in the first imaging light plane xz and 8.0 (.sub.y) in the second imaging light plane yz. A chief ray angle CRA in relation to a normal of the object field 4 is 5.0. A maximum pupil obscuration is 15%. An object-image offset d.sub.OIS is approximately 415 mm. The mirrors of the projection optical unit 22 can be housed in a cuboid with xyz-edge lengths of 889 mm860 mm1602 mm.

(145) The object plane 5 and the image plane 9 extend parallel to one another.

(146) A working distance between the mirror M5 closest to the wafer and the image plane 9 is 129 mm. A mean wavefront aberration rms is 30.4 m.

(147) An aperture stop AS is arranged upstream of the first second plane intermediate image 19 in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 22. The entire imaging light beam is completely accessible at the location of the aperture stop AS.

(148) A further embodiment of a projection optical unit 23, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 11 to 13. Components and functions which were already explained above in the context of FIGS. 1 to 10 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(149) The basic design of the projection optical unit 23, in particular the sequence of NI mirrors and GI mirrors, is similar, once again, to the design of the projection optical units 7 and 21.

(150) The mirrors M1 to M8 are once again embodied as free-form surfaces, for which the free-form surface equation (1), specified above, applies.

(151) The following table once again shows the mirror parameters of mirrors M1 to M8 of the projection optical unit 23.

(152) TABLE-US-00030 M1 M2 M3 M4 M5 M6 M7 M8 Maximum 20.0 76.2 77.4 14.8 78.7 81.0 22.0 7.6 angle of incidence [] Extent of the 399.2 447.1 565.9 829.9 496.6 329.7 370.5 945.8 reflection surface in the x-direction [mm] Extent of the 229.5 251.5 251.8 169.3 249.6 235.8 185.3 919.8 reflection surface in the y-direction [mm] Maximum 399.4 447.4 565.9 830.0 496.6 330.1 370.6 946.3 mirror diameter [mm]

(153) All mirrors M1 to M8 and, in particular, the GI mirrors M2, M3, M5 and M6 have a y/x-aspect ratio that is less than 1. Once again, the last mirror in the imaging light beam path, mirror M8, has the largest mirror diameter, measuring almost 950 mm. Six of the eight mirrors have a diameter that is less than 570 mm. Five of the eight mirrors have a diameter that is less than 500 mm. Three of the eight mirrors have a diameter that is less than 400 mm.

(154) The projection optical unit 23 has exactly one first plane intermediate image 18, once again in the region of the passage opening 17 in the mirror M8 that is last in the imaging light beam path. Furthermore, the projection optical unit 23 has a total of three second plane intermediate images 19, 24 and 25. The second plane intermediate image 24, which is first in the imaging light beam path, of the projection optical unit 23 lies between the mirrors M1 and M2 in the imaging light beam path and is completely accessible. The second plane intermediate images 19, which is second in the imaging light beam path, lies between the mirrors M2 and M3 in the imaging light beam path. The second plane intermediate images 25, which is third in the imaging light beam path, lies between the mirrors M3 and M4 in the imaging light beam path.

(155) In relation to the mirror M2, one of the second plane intermediate images, namely the intermediate image 24, lies upstream of this GI mirror M2 and the NI mirror M1 that, in the beam path, is directly upstream of the mirror in the beam path and the next second plane intermediate image 19 lies downstream of the mirror M2 and upstream of the GI mirror M3 that, in the beam path, is directly downstream of the mirror. In this way, the GI mirror M3, too, lies between two second plane intermediate images 19 and 25. This arrangement of the two GI mirrors M2 and M3 between two second plane intermediate images 24 and 19 and 19 and 25, respectively, in this case, leads to an extent of these mirrors M2 and M3 not becoming too large in the y-direction despite the large angle of incidence on these two GI mirrors M2 and M3.

(156) In the projection optical unit 23, the number of the first plane intermediate images differs from the number of second plane intermediate images by two.

(157) FIG. 13 shows, once again, the boundary contours of the reflection surfaces of the mirrors M1 to M8.

(158) The optical design data from the projection optical unit 23 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(159) TABLE-US-00031 TABLE 1 for FIG. 11 Exemplary embodiment FIG. 11 NA 0.55 Wavelength 13.5 nm beta_x 4.5 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 24.8 ml Stop AS

(160) TABLE-US-00032 TABLE 2 for FIG. 11 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M8 953.6498674 0.0020852 863.7070005 0.0023289 REFL M7 2308.9882772 0.0008662 391.2204972 0.0051122 REFL M6 9658.7357159 0.0000478 3111.8571118 0.0027854 REFL M5 3851.9659125 0.0001115 5994.4927929 0.0015541 REFL M4 1667.4841416 0.0011730 752.6104660 0.0027173 REFL M3 1905.0727177 0.0002547 1075.1194517 0.0076679 REFL M2 2138.0869388 0.0002430 864.5423534 0.0089053 REFL M1 3536.1125421 0.0005403 988.4714077 0.0021179 REFL

(161) TABLE-US-00033 TABLE 3a for FIG. 11 Coefficient M8 M7 M6 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 953.64986730 2308.98827700 9658.73571600 C7 2.22708175e09 6.91396275e07 4.11083096e07 C9 6.92896088e09 6.95739894e07 1.35296426e07 C10 4.33919499e12 7.10184469e10 8.68487959e11 C12 2.89123145e11 1.52069726e09 8.4433536e11 C14 8.71987959e12 2.08177301e09 5.45808309e10 C16 8.74336708e15 1.1921338e12 3.78983348e13 C18 3.54027801e15 1.48310938e12 1.9991786e12 C20 7.7050072e15 1.10792541e11 8.1961092e13 C21 1.337077e17 1.13443702e17 4.98626651e16 C23 5.92031494e17 1.2659377e14 4.44580625e16 C25 5.74369237e17 1.92128159e14 2.20063337e15 C27 1.40128254e17 5.55778233e14 3.41024779e15 C29 8.8183677e21 1.02813716e17 3.12210591e19 C31 4.70913655e21 1.49218467e17 1.1994085e17 C33 1.31878574e20 1.7182799e17 3.37395149e17 C35 8.8318716e21 2.06086404e16 2.46938063e17 C36 2.52492021e23 2.67591142e20 4.5558175e20 C38 9.83537761e23 4.15456058e20 1.48484206e20 C40 1.57747152e22 1.53357719e19 3.50389768e21 C42 9.70680981e23 4.17441636e19 1.61335261e19 C44 1.94775827e23 1.05280588e18 1.2699496e19 C46 8.68286173e27 5.15251583e23 4.80088793e22 C48 3.08227673e26 9.29040968e23 5.06879666e22 C50 1.43858909e26 4.10730564e22 1.33502706e21 C52 8.30889224e27 2.05745722e21 1.93623086e21 C54 5.30486044e27 2.67755405e21 2.17618862e22 C55 4.63046046e30 3.25292546e25 1.98546568e24 C57 9.39092565e29 1.69856578e25 1.68377598e24 C59 2.07380678e28 3.16582308e24 2.04251254e24 C61 2.5301093e28 1.04673475e23 3.7329624e25 C63 1.42078456e28 5.09423332e24 2.05490534e23 C65 2.90099345e29 7.85991524e24 1.49401369e23 C67 1.03726667e32 1.32354182e27 2.65357044e26 C69 3.43484911e32 4.85145166e28 2.4662259e26 C71 1.47350771e31 1.32173476e26 7.52616524e26 C73 2.20731256e31 1.18787482e25 1.55971922e25 C75 1.27957619e31 3.74259495e25 8.48519515e26 C77 3.05045038e32 6.69790007e25 2.4106086e26 C78 8.08438843e35 3.10582806e30 3.15506345e29 C80 5.33507979e34 1.46918389e29 1.34252881e28 C82 1.45494891e33 1.63440897e28 1.130906e28 C84 1.77334302e33 8.28609845e28 1.42102698e28 C86 1.0728849e33 2.0265052e27 7.92059242e28 C88 3.14533478e34 2.00292243e27 1.90061294e27 C90 3.62310307e35 4.60528862e27 8.19891657e28 C92 2.10825946e38 7.75920339e33 4.38295239e31 C94 1.89410857e37 2.76161652e32 5.5931353e31 C96 6.11342862e37 2.56662189e31 1.52276815e30 C98 9.82533213e37 2.12912577e30 2.76638929e30 C100 7.57114364e37 7.1611517e30 5.30427726e30 C102 2.76706333e37 1.49858531e29 1.03346049e30 C104 3.91409133e38 8.168915e30 4.71627921e31 C105 1.30795789e40 1.31817471e35 1.20977915e34 C107 9.65901044e40 1.26931175e34 2.45248062e33 C109 3.13255514e39 1.82499426e33 4.76819617e33 C111 4.73813484e39 1.26748341e32 2.71472842e33 C113 3.46842424e39 4.55926104e32 1.42634982e32 C115 1.05817389e39 9.65149938e32 4.44412642e32 C117 3.46863288e41 1.10688586e31 5.15740381e32 C119 1.95806808e41 9.6895382e33 1.78585218e32 C121 9.86388998e45 0 0 C123 1.15483765e43 0 0 C125 2.80307739e43 0 0 C127 1.48788179e42 0 0 C129 2.20554522e42 0 0 C131 1.73538345e42 0 0 C133 7.32406904e43 0 0 C135 1.30647414e43 0 0 C136 2.51510668e46 0 0 C138 2.18777209e45 0 0 C140 8.73933701e45 0 0 C142 1.84588291e44 0 0 C144 2.24093845e44 0 0 C146 1.62951234e44 0 0 C148 6.95575174e45 0 0 C150 1.60650247e45 0 0 C152 1.60339863e46 0 0

(162) TABLE-US-00034 TABLE 3b for FIG. 11 Coefficient M5 M4 M3 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 3851.96591300 1667.48414200 1905.07271800 C7 1.22859438e07 1.16740006e07 3.95673757e07 C9 9.36510041e08 4.85163876e08 3.15401785e07 C10 1.19183083e10 3.19830516e12 3.97230764e10 C12 1.72203066e10 1.0052782e11 6.69392837e10 C14 2.23394608e10 2.11360925e10 7.20620228e10 C16 2.31839315e13 2.59109296e14 5.28212155e13 C18 1.80332614e13 4.76153787e14 1.06006303e12 C20 7.27536115e13 1.1206662e12 1.944371e12 C21 7.88583079e18 8.07826975e18 4.2907125e16 C23 6.29581241e16 2.42631794e17 1.28611937e15 C25 8.71627214e16 4.19446399e16 4.69085643e15 C27 2.55176244e15 2.80158755e15 5.87158197e15 C29 8.64454797e19 8.43084834e21 1.63376273e18 C31 6.0647703e19 1.36024001e19 3.96140838e18 C33 2.34974902e18 2.7865049e18 1.227677e17 C35 8.87114798e18 2.14184133e17 1.31596761e17 C36 3.3700367e21 1.3712054e23 1.46270175e21 C38 1.85528518e21 7.61964911e23 1.70938412e21 C40 1.37962106e20 4.30922944e22 7.14839055e21 C42 4.62529356e20 4.74458048e20 2.3077492e20 C44 3.12819501e20 8.71004582e20 3.05152745e20 C46 3.23184954e23 9.96979971e26 1.95058108e24 C48 1.3694096e23 1.01755658e25 3.42145549e24 C50 2.05573669e22 1.33621582e23 9.93301807e23 C52 3.1180598e22 7.13156626e22 4.04026987e22 C54 3.57860299e23 7.82210858e21 8.44742313e22 C55 3.87334641e26 6.93046716e30 6.72095988e27 C57 1.49329687e25 8.08596814e28 5.74744789e26 C59 4.19709817e25 1.65358077e27 1.59309952e25 C61 3.94020888e24 2.81149827e25 1.55028309e24 C63 7.23174029e24 2.13334271e24 5.74854863e24 C65 1.07149845e23 5.99274968e23 9.89232845e24 C67 4.64943492e28 3.25441971e31 7.46767666e30 C69 1.6981346e29 6.47924174e30 7.63657816e29 C71 1.86598355e27 1.21842872e29 4.99956952e28 C73 7.36494557e27 1.74514795e27 1.48529228e27 C75 2.04730955e27 9.98234615e26 3.46704751e27 C77 1.99371493e26 2.58665375e25 4.34329914e26 C78 1.45038539e31 8.34095716e35 2.05909149e32 C80 2.5293606e30 4.82206167e33 4.8671983e31 C82 3.63634853e30 1.40771474e32 5.11840897e31 C84 6.53186569e29 6.54331204e31 .sup.1.25252e29 C86 2.6613913e28 1.87631998e30 8.55280419e29 C88 4.62635571e28 1.48298151e27 2.86137741e28 C90 6.18523745e28 5.36798943e27 3.48446373e28 C92 2.32207396e33 1.42753873e37 2.44920451e34 C94 2.04745568e33 2.27330575e35 1.27641527e34 C96 1.76045972e33 1.94737917e34 3.41179417e33 C98 4.49216894e33 9.91240601e33 8.8221502e33 C100 8.24120927e32 3.56554008e33 3.7003387e32 C102 5.98019017e31 8.25368113e30 9.21723637e32 C104 7.43854852e31 2.44582791e29 1.21518455e30 C105 9.61099067e38 2.13122119e40 1.57023792e38 C107 1.33574615e35 1.00516673e38 6.64416881e37 C109 3.0413733e36 8.77932337e38 4.68884249e36 C111 2.63488695e34 1.86963182e36 6.3997021e35 C113 2.00767073e33 3.0673235e35 5.08585923e34 C115 5.44782166e33 6.82426904e35 2.42661715e33 C117 9.50194881e33 1.66156597e32 5.80105722e33 C119 1.41231787e32 3.55214787e32 2.94550628e33

(163) TABLE-US-00035 TABLE 3c for FIG. 11 Coefficient M2 M1 KY 0.00000000 0.00000000 KX 0.00000000 0.00000000 RX 2138.08693900 3536.11254200 C7 5.08202758e07 2.51152933e08 C9 4.64808292e07 1.00801413e07 C10 5.2152857e10 2.24633273e11 C12 1.2267042e09 2.81663757e10 C14 1.10849009e09 2.97053626e10 C16 2.52456679e14 7.12707541e14 C18 2.43228507e12 4.33393838e13 C20 3.36955187e12 1.75916282e13 C21 3.84258086e16 2.33914375e16 C23 1.24580259e15 5.24252881e16 C25 7.13518758e15 9.94837914e17 C27 1.09465829e14 1.8200099e16 C29 2.45456804e18 4.06697139e19 C31 1.05895518e18 9.64572917e19 C33 2.56862086e17 9.64610367e20 C35 3.11915404e17 3.47465193e18 C36 5.42483468e21 2.62416646e21 C38 1.28767465e20 1.44806927e21 C40 1.35252884e20 1.12861847e20 C42 9.46548492e20 1.66263444e20 C44 3.08566898e20 1.69962152e20 C46 8.72930921e24 7.78828244e24 C48 4.85393634e23 1.16957458e24 C50 2.32310873e23 1.39613061e23 C52 2.39006483e22 1.04152972e22 C54 9.02421435e22 3.89969663e22 C55 1.01540766e25 1.57448755e26 C57 2.57150976e25 1.58418149e25 C59 4.56583035e25 1.25865785e24 C61 6.19287099e25 3.30511747e24 C63 1.87389977e24 3.45411645e24 C65 9.25959414e24 2.02675319e25 C67 1.04592096e28 1.69192397e29 C69 1.23125975e27 5.09626594e28 C71 3.49347998e27 1.52966585e27 C73 1.24984375e27 5.22009103e27 C75 2.53379392e26 1.58063539e26 C77 2.22668166e26 2.90525317e26 C78 4.36147293e31 1.14436766e31 C80 3.50509868e30 4.10818926e30 C82 1.09441954e29 3.97798422e29 C84 2.64435076e29 1.48424979e28 C86 4.36593909e30 2.45523884e28 C88 1.03536362e28 2.03667484e28 C90 1.91004648e28 5.93786093e30 C92 3.91796018e33 3.34860549e34 C94 1.20860185e32 8.83042357e33 C96 6.26423498e32 3.97981753e32 C98 1.38594908e31 1.28012778e31 C100 2.04699035e31 2.79159426e31 C102 6.47529985e33 5.09078455e31 C104 1.42008486e30 5.24494913e31 C105 1.83450743e36 1.5810545e36 C107 4.66809471e36 3.91193275e35 C109 1.33330289e34 4.3895162e34 C111 4.18080915e34 2.21004026e33 C113 9.08314357e34 5.17653775e33 C115 7.49682185e34 6.37788931e33 C117 8.10366391e34 4.23046932e33 C119 2.83722223e33 2.68970093e35

(164) TABLE-US-00036 TABLE 4a for FIG. 11 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M8 0.00000000 0.00000000 825.93553536 M7 0.00000000 152.41225394 120.73685442 M6 0.00000000 86.70381571 1227.10679876 M5 0.00000000 288.90332638 1486.61328456 M4 0.00000000 788.79112975 1720.09206911 M3 0.00000000 63.19842658 1714.10424934 M2 0.00000000 501.09999256 1469.79865760 Stop 0.00000000 709.45610187 1107.00590480 M1 0.00000000 944.01022630 698.59677889 Object 0.00000000 1073.94708727 2183.78189551

(165) TABLE-US-00037 TABLE 4b for FIG. 11 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M8 6.09778402 0.00000000 0.00000000 M7 192.19556804 0.00000000 0.00000000 M6 64.93990082 0.00000000 0.00000000 M5 38.55543909 0.00000000 0.00000000 M4 77.28091044 0.00000000 0.00000000 M3 14.77992460 0.00000000 0.00000000 M2 44.64396244 0.00000000 0.00000000 Stop 24.06892752 180.00000000 0.00000000 M1 192.43462686 0.00000000 0.00000000 Object 0.00000000 0.00000000 0.00000000

(166) TABLE-US-00038 TABLE 5 for FIG. 11 Surface Angle of incidence[deg] Reflectivity M8 6.13281062 0.66174979 M7 0.12234545 0.66566439 M6 76.65954883 0.83082833 M5 77.60306126 0.84505091 M4 12.04904974 0.64926632 M3 75.95982040 0.81978588 M2 74.94335346 0.80291383 M1 17.19094173 0.62933155 Overall transmission 0.0832

(167) TABLE-US-00039 TABLE 6 for FIG. 11 X[mm] Y[mm] Z[mm] 0.00000000 33.70252519 0.00000000 30.86140168 33.30508715 0.00000000 60.93202620 32.11151271 0.00000000 89.44636869 30.12170033 0.00000000 115.68586451 27.34710426 0.00000000 138.99559433 23.82429945 0.00000000 158.79775798 19.62526558 0.00000000 174.60427294 14.85927900 0.00000000 186.02935604 9.66597496 0.00000000 192.80157508 4.20338061 0.00000000 194.77348028 1.36441882 0.00000000 191.92612369 6.87758580 0.00000000 184.36687248 12.18822531 0.00000000 172.32108075 17.16515588 0.00000000 156.11966244 21.69588021 0.00000000 136.18490669 25.68612451 0.00000000 113.01636038 29.05791801 0.00000000 87.17765216 31.74769820 0.00000000 59.28476118 33.70545241 0.00000000 29.99574553 34.89486127 0.00000000 0.00000000 35.29381045 0.00000000 29.99574553 34.89486127 0.00000000 59.28476118 33.70545241 0.00000000 87.17765216 31.74769820 0.00000000 113.01636038 29.05791801 0.00000000 136.18490669 25.68612451 0.00000000 156.11966244 21.69588021 0.00000000 172.32108075 17.16515588 0.00000000 184.36687248 12.18822531 0.00000000 191.92612369 6.87758580 0.00000000 194.77348028 1.36441882 0.00000000 192.80157508 4.20338061 0.00000000 186.02935604 9.66597496 0.00000000 174.60427294 14.85927900 0.00000000 158.79775798 19.62526558 0.00000000 138.99559433 23.82429945 0.00000000 115.68586451 27.34710426 0.00000000 89.44636869 30.12170033 0.00000000 60.93202620 32.11151271 0.00000000 30.86140168 33.30508715 0.00000000

(168) The projection optical unit 23 has an overall transmission of 8.32%.

(169) The projection optical unit 23 has an image-side numerical aperture of 0.55.

(170) In the first imaging light plane xz, the reduction factor .sub.x is 4.50. In the second imaging light plane yz, the reduction factor .sub.x is 8.00. An object-field-side chief ray angle is 5.0. A maximum pupil obscuration is 12%. An object-image offset d.sub.OIS is approximately 1080 mm. The mirrors of the projection optical unit 23 can be housed in a cuboid with xyz-edge lengths of 946 mm1860 mm1675 mm.

(171) In the projection optical unit 23, the object plane 5 and the image plane 9 extend parallel to one another. A working distance between the mirror M7 closest to the wafer and the image plane 9 is 94 mm. A mean wavefront aberration rms is approximately 24 m.

(172) An aperture stop AS is arranged upstream of the first second plane intermediate image 24 in the imaging light beam path between the mirrors M1 and M2. The entire imaging light beam is completely accessible in the region of the aperture stop AS.

(173) A further embodiment of a projection optical unit 26, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 14 to 16. Components and functions which were already explained above in the context of FIGS. 1 to 13 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(174) Mirrors M1, M6 and M7 are embodied as NI mirrors and the mirrors M2 to M5 are embodied as GI mirrors. The GI mirrors M2 to M5 have a deflecting effect in the same direction, Overall, the following applies for the sequence of the deflecting effect in the mirrors M1 to M7 of the projection optical unit 26: RLLLL0R.

(175) The mirrors M1 to M7 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(176) The following table once again shows the mirror parameters of mirrors M1 to M7 of the projection optical unit 26.

(177) TABLE-US-00040 M1 M2 M3 M4 M5 M6 M7 Maximum 16.9 78.6 75.1 72.2 76.5 16.3 10.0 angle of incidence [] Extent of the reflection 366.4 442.6 520.2 464.1 182.3 409.8 821.9 surface in the x-direction [mm] Extent of the reflection 177.5 393.2 193.4 231.3 260.7 100.6 796.0 surface in the y-direction [mm] Maximum 366.5 448.5 520.3 464.1 268.7 409.8 822.4 mirror diameter [mm]

(178) Only the mirror M5 has a y/x-aspect ratio that is greater than 1. The y/x-aspect ratio of the mirror M5 is less than 1.5.

(179) The last mirror M7 has the largest mirror diameter, measuring approximately 820 mm. None of the other mirrors M1 to M6 has a larger diameter than 525 mm. Five of the seven mirrors have a maximum diameter smaller than 450 mm.

(180) The projection optical unit 26, once again, has exactly one first plane intermediate image 18 and two second plane intermediate images 19, 20. The first plane intermediate image 18 is arranged exactly level with the passage of the imaging light through the passage opening 17. This causes a very small x-extent of the passage opening 17. The two second plane intermediate images 19, 20 are arranged, firstly, in the imaging light beam path between the GI mirrors M3 and M4 and, secondly, in the imaging light beam path between the GI mirrors M4 and M5. Hence, the GI mirror M4 is, once again, a GI mirror between two second plane intermediate images, as already explained above in conjunction with the embodiment according to FIGS. 11 to 13.

(181) The projection optical unit 26 has, firstly, an odd number of mirrors and, secondly, a difference in the number of first plane intermediate images and second plane intermediate images of exactly 1. This achieves an image position that is the right way round in comparison with the object position; i.e., an image flip is compensated.

(182) FIG. 16 shows, once again, the boundary contours of the reflection surfaces of the mirrors M1 to M7.

(183) The optical design data from the projection optical unit 26 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(184) TABLE-US-00041 TABLE 1 for FIG. 14 Exemplary embodiment FIG. 14 NA 0.45 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.0 1/mm rms 40.1 ml Stop AS

(185) TABLE-US-00042 TABLE 2 for FIG. 14 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M7 1118.1920556 0.0017717 899.8350288 0.0022439 REFL M6 77660.0792965 0.0000257 221.9926726 0.0090093 REFL M5 1386.8269930 0.0004288 2455.8257737 0.0027388 REFL M4 811.5247859 0.0008055 1112.5367564 0.0055003 REFL M3 1397.9253073 0.0004552 2809.2148857 0.0022378 REFL M2 16748.6228787 0.0000291 86553.8665992 0.0000949 REFL M1 5806.9159005 0.0003319 1647.2565533 0.0012601 REFL

(186) TABLE-US-00043 TABLE 3a for FIG. 14 Coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00137021 0.91505988 0.56499787 RX 1118.19205600 77660.07930000 1386.82699300 C7 1.35972277e09 1.31702537e06 8.21566727e08 C9 1.19562911e09 1.06795699e06 6.71317569e08 C10 1.27946071e11 6.00960647e10 1.85048127e10 C12 3.62273134e11 1.17179851e09 7.91150245e11 C14 3.22516678e12 2.45659314e08 3.48012619e11 C16 8.90234813e15 6.8386461e14 8.39554879e13 C18 5.48904832e15 1.19036933e11 7.17409427e14 C20 3.99556769e16 8.45160514e11 3.60144042e14 C21 2.1960617e17 2.49887747e16 7.12991585e16 C23 5.89249041e17 9.32259724e15 2.90210248e15 C25 4.55753256e17 6.68675048e14 3.70422222e17 C27 5.5757165e18 1.19018192e12 8.51977396e17 C29 2.4344109e21 8.62777329e18 1.74126592e17 C31 5.55579318e21 3.34187564e17 7.17207054e18 C33 3.31675441e21 1.29777485e15 2.10588262e18 C35 1.75995157e21 8.94713659e16 1.15186427e18 C36 1.41908532e23 3.26000767e21 1.19195804e20 C38 7.80332525e23 6.53124238e21 9.90671134e20 C40 1.13822672e22 6.68112351e19 5.5105019e20 C42 5.90298206e23 1.86124502e18 5.32734848e22 C44 6.65947093e24 1.01586039e16 7.15851654e21 C46 2.00312205e27 8.88928654e24 9.36621032e22 C48 3.84346115e27 5.50464203e23 3.68359583e22 C50 1.21351091e26 1.75186317e21 7.42676069e22 C52 5.94610051e27 1.06480223e19 2.26019232e22 C54 1.02529435e27 6.80466177e20 6.85884917e24 C55 1.87169414e29 3.03257207e27 3.53966472e25 C57 7.63481393e29 1.65155904e26 6.31531629e24 C59 1.618503e28 3.24021454e24 2.08579182e24 C61 1.50863465e28 3.30781882e23 2.85752418e24 C63 7.4694491e29 2.05676238e22 8.81519764e25 C65 8.40416665e30 1.06163773e21 2.93156768e26 C67 3.03979955e33 0 0 C69 1.86338693e33 0 0 C71 6.61723971e32 0 0 C73 1.08032051e31 0 0 C75 2.27309233e32 0 0 C77 6.99250984e33 0 0 C78 1.01710204e35 0 0 C80 1.77734667e34 0 0 C82 4.92421677e34 0 0 C84 5.90814608e34 0 0 C86 3.58119042e34 0 0 C88 7.3533067e35 0 0 C90 9.04662218e36 0 0

(187) TABLE-US-00044 TABLE 3b for FIG. 14 Coefficient M4 M3 M2 KY 0.00000000 0.14280139 0.01218901 KX 0.07494948 0.00000000 0.00000000 RX 811.52478590 1397.92530700 16748.62288000 C7 3.86023657e08 1.7217439e07 1.68453717e07 C9 3.81360594e07 2.22668277e08 5.53150287e08 C10 9.50508955e12 1.34447743e10 5.4023144e11 C12 5.70678081e11 9.89796339e11 1.09720673e10 C14 8.49743848e12 8.20556261e11 1.13182448e10 C16 1.61961347e14 3.16757938e13 8.17990626e14 C18 1.81336141e12 1.46692844e13 7.87681986e14 C20 2.45995083e12 3.69363439e13 2.2119085e13 C21 6.01959296e17 2.32061711e16 4.88073984e16 C23 9.61849791e16 6.62327921e16 8.33140175e16 C25 3.76110948e15 4.1293339e16 5.11355813e16 C27 4.07712151e16 1.30372287e15 5.07663031e16 C29 6.19189144e19 1.12258072e18 8.07168061e19 C31 1.20524092e18 3.06340009e19 3.29075739e18 C33 1.72295617e17 8.88294932e18 3.4168599e18 C35 1.70676574e17 1.38680217e17 1.83754623e18 C36 1.43724929e22 7.1900244e22 3.39550843e23 C38 3.38007799e22 2.93538162e21 2.70487171e21 C40 2.74909383e20 1.10840295e20 1.63959268e21 C42 6.45193579e20 3.57255186e20 6.86550247e21 C44 7.36421248e20 8.97646863e20 4.94290723e21 C46 2.3853282e24 3.37918053e24 3.13909373e24 C48 1.56518232e23 3.28081782e24 6.07559407e24 C50 3.29980178e23 1.15298309e23 1.68311399e23 C52 1.06645652e22 1.67150633e22 1.09033213e23 C54 2.15354941e22 3.05800431e22 5.37428244e24 C55 1.02369612e28 7.38084675e28 9.80514031e27 C57 3.04109444e27 7.17188177e27 1.00470224e26 C59 3.11173505e26 3.89129269e26 2.43587516e26 C61 2.38777712e25 2.43305684e26 7.71285207e26 C63 1.38932479e26 3.05746638e25 4.41126952e26 C65 4.39598759e25 5.10266314e25 3.4826267e28

(188) TABLE-US-00045 TABLE 3c for FIG. 14 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 5806.91590000 C7 1.57733574e08 C9 4.04579031e08 C10 4.89660517e11 C12 4.59750467e10 C14 8.1358196e10 C16 2.24075942e13 C18 1.3292697e13 C20 2.50231172e12 C21 7.03566708e17 C23 6.62324975e17 C25 8.78933469e16 C27 8.82219671e16 C29 7.23734311e19 C31 1.78828999e18 C33 2.4711693e17 C35 1.58549093e17 C36 7.87923961e22 C38 1.47075761e21 C40 6.17727512e20 C42 2.51981333e20 C44 6.28995506e20 C46 5.69906696e24 C48 5.15465198e23 C50 4.7110842e23 C52 8.65036303e22 C54 2.31317136e22 C55 4.3793195e27 C57 1.6423552e27 C59 1.37172536e25 C61 1.63243103e24 C63 6.69935139e26 C65 6.65963303e24

(189) TABLE-US-00046 TABLE 4a for FIG. 14 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M7 0.00000000 0.00000000 871.29627896 M6 0.00000000 218.32338321 98.52317410 M5 0.00000000 58.06517479 1076.82261676 M4 0.00000000 561.60349183 1493.78229143 M3 0.00000000 1208.38154717 1510.41842453 M2 0.00000000 1670.36640710 1179.32899124 Stop 0.00000000 1788.84239898 938.34283647 M1 0.00000000 2045.77302675 415.73295536 Object 0.00000000 2170.48986012 1880.60987391

(190) TABLE-US-00047 TABLE 4b for FIG. 14 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M7 7.88800730 0.00000000 0.00000000 M6 195.77601460 0.00000000 0.00000000 M5 56.92538181 0.00000000 0.00000000 M4 20.55009475 0.00000000 0.00000000 M3 17.07725962 0.00000000 0.00000000 M2 49.72391045 0.00000000 0.00000000 Stop 164.02654214 0.00000000 0.00000000 M1 169.34310441 0.00000000 0.00000000 Object 9.09286877 0.00000000 180.00000000

(191) TABLE-US-00048 TABLE 5 for FIG. 14 Surface Angle of incidence [deg] Reflectivity M7 7.88800730 0.65901737 M6 0.00000000 0.66565840 M5 72.70139641 0.76171724 M4 70.92331654 0.72452174 M3 71.44932909 0.73598206 M2 75.90402008 0.81888591 M1 15.52321404 0.63691659 Overall transmission 0.0929

(192) TABLE-US-00049 TABLE 6 for FIG. 14 X [mm] Y [mm] Z [mm] 0.00000000 60.12634248 0.00000000 31.00173429 59.39348922 0.00000000 61.23683000 57.21904481 0.00000000 89.95971748 53.67233536 0.00000000 116.46546521 48.86006031 0.00000000 140.10740705 42.91611197 0.00000000 160.31308861 35.99125711 0.00000000 176.59845642 28.24503313 0.00000000 188.57919514 19.84317315 0.00000000 195.97740908 10.96270342 0.00000000 198.62281719 1.80162097 0.00000000 196.45010574 7.41479310 0.00000000 189.49577612 16.43782216 0.00000000 177.89719433 25.01004611 0.00000000 161.89435001 32.88564405 0.00000000 141.83277687 39.84892316 0.00000000 118.16525762 45.72666520 0.00000000 91.45022545 50.39326310 0.00000000 62.34514559 53.76818640 0.00000000 31.59291444 55.80674921 0.00000000 0.00000000 56.48822373 0.00000000 31.59291444 55.80674921 0.00000000 62.34514559 53.76818640 0.00000000 91.45022545 50.39326310 0.00000000 118.16525762 45.72666520 0.00000000 141.83277687 39.84892316 0.00000000 161.89435001 32.88564405 0.00000000 177.89719433 25.01004611 0.00000000 189.49577612 16.43782216 0.00000000 196.45010574 7.41479310 0.00000000 198.62281719 1.80162097 0.00000000 195.97740908 10.96270342 0.00000000 188.57919514 19.84317315 0.00000000 176.59845642 28.24503313 0.00000000 160.31308861 35.99125711 0.00000000 140.10740705 42.91611197 0.00000000 116.46546521 48.86006031 0.00000000 89.95971748 53.67233536 0.00000000 61.23683000 57.21904481 0.00000000 31.00173429 59.39348922 0.00000000

(193) The projection optical unit 26 has an image field dimension of two-times 13.0 mm in the x-direction and of 1.2 mm in the y-direction. Unlike in the preceding embodiments, the object field 4 and the image field 8 each are rectangular in the projection optical unit 26. Accordingly, the field curvature is 0.

(194) In the projection optical unit 26, an image-side numerical aperture is 0.45. A reduction factor is 4.00 (.sub.x) in the first imaging light plane xz and 8.00 (.sub.y) in the second imaging light plane yz. An object-side chief ray angle CRA is 4.2. A pupil obscuration is at most 13%.

(195) The projection optical unit 26 has an overall transmission of 9.29%.

(196) An object-image offset d.sub.OIS is approximately 2170 mm in the projection optical unit 26. The mirrors of the projection optical unit 26 can be housed in a cuboid with the xyz-edge lengths of 822 mm2551 mm1449 mm.

(197) In the projection optical unit 26, the object plane 5 is tilted relative to the image plane 9 by 9.1 about the x-axis.

(198) A working distance between the mirror M6 closest to the wafer and the image plane is 80 mm. A mean wavefront aberration rms is approximately 35 m.

(199) A further embodiment of a projection optical unit 27, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 17 to 19. Components and functions which were already explained above in the context of FIGS. 1 to 16 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(200) The projection optical unit 27 has a total of 9 mirrors M1 to M9. The mirrors M1, M2, M3, M5, M6, M7 are embodied as GI mirrors. The remaining mirrors M4, M8 and M9 are embodied as NI mirrors. Like in all projection optical units described above, the last mirror M9 in the imaging light beam path is embodied with a passage opening 17 for the imaging light 3 in the projection optical unit 27 as well. In the projection optical unit 27, the imaging light beam path has a crossing point. Here, the imaging light partial beams, firstly, between the mirrors M2 and M3 and, secondly, between the mirrors M6 and M7 cross in a crossing region 28.

(201) In the projection optical unit 27 too, a first plane intermediate image 18 is present near the passage opening 17 in the mirror M9 and two second plane intermediate images 19, 20. In the projection optical unit 27, the first of the two second plane intermediate images 19 lies between the mirrors M4 and M5 in the imaging light beam path, near the reflection at the mirror M5. The second of the two second plane intermediate images lies between the mirrors M7 and M8 in the imaging light beam path, near the reflection at the mirror M7.

(202) An aperture stop AS lies in the imaging light beam path between the mirrors M2 and M3 and downstream of the crossing point 28. The imaging light beam is completely accessible in the region of the aperture stop AS.

(203) The mirrors M1 to M9 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(204) The following table once again shows the mirror parameters of mirrors M1 to M9 of the projection optical unit 27.

(205) TABLE-US-00050 M1 M2 M3 M4 M5 M6 M7 M8 M9 Maximum 83.1 75.4 82.3 16.1 78.8 75.6 82.9 75.6 68.8 angle of incidence [] Extent of the reflection 169.8 255.3 441.6 753.3 670.0 589.6 304.4 354.8 750.4 surface in the x-direction [mm] Extent of the reflection 326.6 366.7 407.7 134.7 97.9 264.6 132.0 176.2 731.9 surface in the y-direction [mm] Maximum mirror 330.5 369.8 442.2 753.3 670.0 589.6 305.5 354.8 751.8 diameter [mm]

(206) In the projection optical unit 27, the mirrors M1 and M2 have a y/x-aspect ratio that is greater than 1. None of the mirrors M1 to M9 has a y/x-aspect ratio that is greater than 2. The mirror M1 has the largest y/x-aspect ratio in the region of 1.9.

(207) In the projection optical unit 27, the mirror M4 has the largest maximum diameter, measuring 753.3 mm. This diameter is slightly larger than that of the last mirror M9, which has a diameter of 751.8 mm. Five of the nine mirrors M1 to M9 have a diameter that is less than 450 mm. Four of the nine mirrors M1 to M9 have a diameter that is less than 400 mm.

(208) FIG. 19 shows the boundary contours of the reflection surfaces of the mirrors M1 to M9.

(209) The optical design data from the projection optical unit 27 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIGS. 2 to 4.

(210) TABLE-US-00051 TABLE 1 for FIG. 17 Exemplary embodiment FIG. 17 NA 0.5 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 10.4 ml Stop AS

(211) TABLE-US-00052 TABLE 2 for FIG. 17 Surface Radius_x [mm] Power_x [1/mm] Radius_y [mm] Power_y [1/mm] Operating mode M9 866.8072275 0.0022782 774.1551842 0.0026165 REFL M8 16799.3113404 0.0001190 468.0718547 0.0042729 REFL M7 2294.4146894 0.0002863 1705.1686250 0.0035712 REFL M6 1428.0401884 0.0003739 1527.9490527 0.0049036 REFL M5 1803.1480743 0.0003449 1798.9550061 0.0035758 REFL M4 3252.9549354 0.0005968 979.9292401 0.0021027 REFL M3 4728.4030238 0.0000695 9129.5671479 0.0013325 REFL M2 5562.6987709 0.0000997 5283.6560864 0.0013653 REFL M1 60685.4143772 0.0000065 9650.8869136 0.0010566 REFL

(212) TABLE-US-00053 TABLE 3a for FIG. 17 Coefficient M9 M8 M7 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 866.80722750 16799.31134000 2294.41468900 C7 1.16750793e08 8.78095547e07 6.17468179e08 C9 3.227879e08 1.8198111e06 1.04202991e07 C10 1.9034586e11 6.23675302e10 7.3871998e11 C12 6.93669116e11 9.021444e10 5.40603404e11 C14 9.10699557e12 6.12688457e09 6.46020015e11 C16 3.15819834e14 1.17072896e12 3.52872023e14 C18 5.07731957e14 6.23133942e12 9.05095754e13 C20 3.43495607e14 9.16741216e12 2.0007813e12 C21 3.27663144e17 9.71634515e16 1.09224112e16 C23 1.23584293e16 9.4783838e15 4.07690678e15 C25 1.48878993e16 7.54253173e15 1.5218218e14 C27 2.01063297e17 1.52044449e13 6.05641827e15 C29 1.5610135e20 8.3013727e18 5.29921031e18 C31 1.99814617e20 5.36304932e18 8.07953201e18 C33 1.11450808e19 2.50804621e16 3.2570662e16 C35 6.07436807e20 1.39798089e15 8.05811987e16 C36 3.55570338e23 3.89794855e21 4.65712112e22 C38 2.50288622e22 2.41971723e20 7.26833672e20 C40 4.27782804e22 6.12588427e20 3.22790412e18 C42 2.71769746e22 2.15559322e18 1.50014564e17 C44 4.35242415e23 3.53718368e18 2.10967102e17 C46 3.98426924e26 1.32724993e23 1.02393958e22 C48 5.7285325e27 5.76804727e24 1.07933989e20 C50 1.74816328e25 8.93039513e22 8.20017408e20 C52 2.51560547e25 6.17750026e21 2.58788551e19 C54 5.59816005e26 2.62650678e20 2.59842357e19 C55 2.27621057e29 4.92904916e27 5.63858543e26 C57 4.68887693e28 2.28490721e25 1.91342595e23 C59 1.21077926e27 1.24045883e24 1.95979904e22 C61 1.34960352e27 6.99435043e24 1.01941857e21 C63 6.45173081e28 3.32275577e23 2.41468045e21 C65 5.87726468e29 1.50175538e22 1.7630178e21 C67 4.45396788e32 5.1119351e28 2.04915236e26 C69 5.51131174e32 2.63032348e27 2.53651339e25 C71 2.08374464e31 7.53232015e27 1.75316445e24 C73 6.43925301e31 1.0184489e25 6.62874977e24 C75 3.80140733e31 5.90051712e25 1.2861965e23 C77 2.62734124e31 1.34460748e24 6.1504095e24 C78 1.81539619e34 1.4112104e31 1.28307565e29 C80 3.87877832e34 3.22975415e31 1.77832019e28 C82 9.50620474e34 2.74623061e30 1.52243334e27 C84 1.22684771e33 1.52852009e28 7.00528843e27 C86 4.68273715e34 4.63890933e28 2.14475826e26 C88 3.31350093e34 3.31483992e27 3.7840444e26 C90 2.36738088e34 1.42151698e26 6.47532148e27 C92 9.00803971e38 1.98638804e33 4.9137387e32 C94 4.1621932e37 1.61097703e32 5.58389838e31 C96 3.03008076e37 6.312729e32 2.80619132e30 C98 1.85579089e36 1.07008134e30 9.56158675e30 C100 1.23900393e36 2.08486148e31 2.7250613e29 C102 1.34403292e36 6.69649223e30 5.09959978e29 C104 6.21670071e37 3.5356384e29 1.28713474e29 C105 1.98093774e40 0 0 C107 2.5557529e39 0 0 C109 1.05792795e38 0 0 C111 2.0513119e38 0 0 C113 2.38857043e38 0 0 C115 1.66561627e38 0 0 C117 5.21569492e39 0 0 C119 4.32149861e40 0 0 C121 5.86326897e43 0 0 C123 1.71432174e43 0 0 C125 9.72731414e43 0 0 C127 8.87965167e43 0 0 C129 1.24386669e42 0 0 C131 6.0507722e42 0 0 C133 1.87199557e42 0 0 C135 2.70433567e42 0 0

(213) TABLE-US-00054 TABLE 3b for FIG. 17 Coefficient M6 M5 M4 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1428.04018800 1803.14807400 3252.95493500 C7 4.27764592e07 1.267072e07 1.00985236e07 C9 6.14217231e08 7.14563402e09 6.1822491e08 C10 2.85032609e10 1.59934504e12 7.25353647e11 C12 2.10890593e10 4.51122111e10 5.08897932e11 C14 1.04116732e09 1.3708745e09 3.6473465e10 C16 5.47215882e13 1.15113425e13 1.49177251e14 C18 1.21252244e12 6.08056768e13 2.58895804e13 C20 8.04452139e13 7.24133342e12 1.04297967e12 C21 6.24395637e17 1.12122965e16 3.46316226e17 C23 1.22488487e15 5.31682676e16 4.3573283e17 C25 1.93894654e15 3.79094438e15 4.88555627e16 C27 6.1182821e15 8.66426346e14 7.49855686e16 C29 6.02877018e19 9.12169339e19 4.78255626e20 C31 3.15486125e18 1.00992269e18 6.70828206e20 C33 1.71876661e17 9.37575205e17 6.34973765e19 C35 8.81823493e18 3.41647588e15 1.22964652e17 C36 1.8107487e22 2.89061035e22 5.13743928e23 C38 2.81007224e21 1.01682473e21 5.57192066e23 C40 2.10783719e21 5.76887097e20 2.77676738e21 C42 2.02106332e20 1.68705709e18 2.72529513e20 C44 2.47262722e19 1.4815978e16 8.55807158e20 C46 2.18867888e24 1.98347379e24 9.52054888e26 C48 5.58835437e24 2.67202796e23 6.51265722e25 C50 1.32824471e22 6.16516709e22 3.20028199e23 C52 7.55905184e22 5.2956271e20 1.76590223e22 C54 1.38795101e21 1.22196395e18 5.1899596e21 C55 1.95572414e27 9.54335495e28 7.11250833e29 C57 1.54116067e27 5.51567556e27 8.95991852e28 C59 1.10763545e25 4.96695555e25 1.69284305e27 C61 5.90773942e25 2.72829594e23 1.5115867e25 C63 1.98933904e24 4.01265763e23 2.1243805e24 C65 1.26252468e24 4.02328436e20 2.08401169e23 C67 1.81326459e29 5.67543261e30 2.714e32 C69 5.52644338e29 3.72306985e28 1.38037069e30 C71 6.23281305e29 2.22465939e26 5.8554786e29 C73 1.81738193e27 3.90182078e25 6.6606928e27 C75 2.14916057e26 3.31383345e23 1.15631076e26 C77 2.45531374e26 1.08852997e21 1.19941073e25 C78 5.61446965e33 1.62996535e33 6.54978682e35 C80 3.14271637e33 2.13205986e32 3.84844227e33 C82 3.91267533e32 4.18395599e30 1.88731708e32 C84 5.72404322e31 2.50482179e28 4.0887544e30 C86 2.04498774e29 6.91099846e27 3.03868316e29 C88 1.54960845e28 6.02044471e25 1.88015638e28 C90 5.17527548e30 1.0374045e23 3.16125863e27 C92 6.42753428e35 9.97525491e36 1.2646031e37 C94 1.52301705e35 1.82950393e33 2.23965486e35 C96 1.47788252e34 8.72657446e32 6.71336498e34 C98 1.50892249e34 1.35409691e31 1.04126049e32 C100 3.98962853e32 4.13438548e29 2.263743e31 C102 3.01155182e31 3.44434789e27 1.40136966e30 C104 1.89515076e31 3.63109737e26 2.19047602e29

(214) TABLE-US-00055 TABLE 3c for FIG. 17 Co- efficient M3 M2 M1 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 4728.40302400 5562.69877100 60685.41438000 C7 3.61924163e08 2.6704986e08 3.18396583e08 C9 9.09400287e09 4.92069061e08 5.61785678e08 C10 1.66121272e10 2.85945157e10 2.00099393e11 C12 3.14017712e11 1.7543017e10 1.96165665e11 C14 2.4941173e11 1.9667076e11 1.06060991e10 C16 2.31506575e14 5.96445065e14 7.74363249e14 C18 1.76964023e13 8.28471598e14 3.1260441e14 C20 1.63396775e14 5.89862775e14 2.21560889e13 C21 7.28717776e17 4.02951969e16 3.69444556e17 C23 3.75579206e17 3.45033757e16 9.78225945e16 C25 4.59399079e16 1.24492889e17 1.70892112e16 C27 1.18304491e16 2.78756077e16 4.32330918e16 C29 7.50643063e19 3.0805972e18 6.64795481e20 C31 9.33852618e20 1.94354444e18 9.2062443e19 C33 1.86784143e18 1.72349432e18 4.0341719e19 C35 2.66729478e19 9.34868812e19 7.75268883e19 C36 4.01258937e22 2.33334008e21 1.28461574e19 C38 8.23187379e22 1.92684343e20 1.99616288e19 C40 1.49421902e21 2.31550048e21 5.47670117e20 C42 4.72750154e21 1.86112917e21 1.95018351e20 C44 2.61134724e21 9.05455405e21 3.19738342e21 C46 8.1476518e24 1.04531901e22 3.14500232e22 C48 4.67926054e24 3.07010776e23 3.55621884e22 C50 9.96367582e24 4.05168914e23 1.15857141e21 C52 5.63570004e24 4.25589231e23 1.50292097e22 C54 1.96315571e23 2.69155178e24 4.22027773e23 C55 6.32105216e26 2.36074182e25 2.0609926e23 C57 5.5869514e26 7.49827714e25 2.67127439e23 C59 6.03481823e27 1.27721888e25 4.72519756e24 C61 5.72251835e26 3.75574802e25 2.43544621e24 C63 4.81078871e26 1.38096394e25 3.61474814e25 C65 5.293619e28 1.47197601e25 2.58312448e25 C67 1.05665619e28 5.70444448e29 1.04981547e26 C69 9.35967107e29 1.54864005e27 5.00353406e26 C71 7.45163445e29 8.49518579e28 9.69578012e26 C73 3.23937637e29 1.17862243e27 5.21036133e26 C75 1.23502373e28 1.42504572e27 5.29641094e27 C77 1.99884473e28 9.05697691e29 4.96757793e29 C78 4.62768807e31 3.66791362e30 1.17108755e27 C80 2.01004484e31 1.33376517e29 1.96800952e27 C82 2.04780369e31 9.59453599e30 4.90123394e28 C84 1.83439038e31 6.383457e30 7.65331985e28 C86 2.22521716e31 1.45702307e30 3.04755827e28 C88 1.4576265e30 1.04939729e30 1.27821433e29 C90 4.89653954e31 1.6223442e30 2.60372926e30 C92 1.291584e33 4.48909307e32 4.05041524e30 C94 1.68046406e34 6.48100172e32 8.44993426e30 C96 8.98812615e34 8.87297065e32 1.19335237e31 C98 1.44926189e33 3.33931372e32 1.58514417e30 C100 1.61667889e33 1.1191494e32 4.87213504e31 C102 2.9240278e33 1.34011075e32 6.07148296e33 C104 4.46022792e34 2.24305766e33 5.01077783e33

(215) TABLE-US-00056 TABLE 4a for FIG. 17 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M9 0.00000000 0.00000000 713.83346098 M8 0.00000000 199.50194718 110.47777299 M7 0.00000000 128.62607427 1098.64247245 M6 0.00000000 515.91461114 1356.40753743 M5 0.00000000 742.37411066 1363.84229101 M4 0.00000000 1340.69974378 969.49103752 M3 0.00000000 507.31215558 1051.71634870 Stop 0.00000000 308.06159909 1147.17260780 M2 0.00000000 176.78443109 1379.45094669 M1 0.00000000 469.61783006 1834.00281766 Object 0.00000000 525.34409896 2142.75119785

(216) TABLE-US-00057 TABLE 4b for FIG. 17 Surface TLA [deg] TLB [deg] TLC [deg] Image 0.00000000 0.00000000 0.00000000 M9 9.14833640 0.00000000 0.00000000 M8 161.66708308 0.00000000 0.00000000 M7 52.63856031 0.00000000 0.00000000 M6 17.76332452 0.00000000 0.00000000 M5 15.75408205 0.00000000 0.00000000 M4 250.48833875 0.00000000 0.00000000 M3 164.38361154 0.00000000 0.00000000 Stop 64.83614755 0.00000000 180.00000000 M2 138.59631791 0.00000000 0.00000000 M1 111.51091807 0.00000000 0.00000000 Object 15.48957967 0.00000000 180.00000000

(217) TABLE-US-00058 TABLE 5 for FIG. 17 Surface Angle of incidence [deg] Reflectivity M9 9.10898391 0.65665659 M8 0.15757055 0.66566547 M7 70.82640064 0.72236638 M6 74.51795811 0.79553776 M5 71.88564195 0.74519096 M4 13.92249363 0.64314446 M3 80.53767244 0.88529643 M2 73.90465970 0.78455360 M1 78.68907114 0.86057777 Overall transmission 0.0720

(218) TABLE-US-00059 TABLE 6 for FIG. 17 X [mm] Y [mm] Z [mm] 0.00000000 33.09539039 0.00000000 27.98016280 32.83576102 0.00000000 55.32425435 32.05074898 0.00000000 81.40074512 30.72264495 0.00000000 105.58948827 28.82419673 0.00000000 127.29244915 26.32536013 0.00000000 145.94921302 23.20382833 0.00000000 161.05688683 19.45738748 0.00000000 172.19243862 15.11500672 0.00000000 179.03446120 10.24419289 0.00000000 181.38115751 4.95267331 0.00000000 179.16172567 0.61635830 0.00000000 172.43973897 6.29280692 0.00000000 161.40839010 11.88969195 0.00000000 146.37862928 17.21448827 0.00000000 127.76237102 22.08081609 0.00000000 106.05334108 26.31822001 0.00000000 81.80784000 29.77880701 0.00000000 55.62700619 32.34167284 0.00000000 28.14162808 33.91669706 0.00000000 0.00000000 34.44802533 0.00000000 28.14162808 33.91669706 0.00000000 55.62700619 32.34167284 0.00000000 81.80784000 29.77880701 0.00000000 106.05334108 26.31822001 0.00000000 127.76237102 22.08081609 0.00000000 146.37862928 17.21448827 0.00000000 161.40839010 11.88969195 0.00000000 172.43973897 6.29280692 0.00000000 179.16172567 0.61635830 0.00000000 181.38115751 4.95267331 0.00000000 179.03446120 10.24419289 0.00000000 172.19243862 15.11500672 0.00000000 161.05688683 19.45738748 0.00000000 145.94921302 23.20382833 0.00000000 127.29244915 26.32536013 0.00000000 105.58948827 28.82419673 0.00000000 81.40074512 30.72264495 0.00000000 55.32425435 32.05074898 0.00000000 27.98016280 32.83576102 0.00000000

(219) The projection optical unit 27 has an overall transmission of 7.2%.

(220) The projection optical unit 27 has an image-side numerical aperture of 0.50.

(221) A reduction factor in the first imaging light plane xz is 4 (.sub.x). A reduction factor in the second imaging light plane xy is 8 (.sub.y). An object-side chief ray angle CRA is 5.5. A maximum pupil obscuration is 15%.

(222) An object-image offset d.sub.OIS of the projection optical unit 27 is approximately 530 mm. The mirrors of the projection optical unit 27 can be housed in a cuboid with the xyz-edge lengths of 753 mm1869 mm1860 mm.

(223) In the projection optical unit 27, the object plane 5 is tilted relative to the image plane 9 by 15.5% about an axis that is parallel to the x-axis.

(224) A working distance between the mirror M8 closest to the wafer and the image plane 9 is 83 mm. A mean wavefront aberration rms is 10.4 m.

(225) A further embodiment of a projection optical unit 29, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 20 to 22. Components and functions which were already explained above in the context of FIGS. 1 to 19 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(226) FIG. 20 shows a meridional section of the projection optical unit 29. FIG. 21 shows a sagittal view of the projection optical unit 29. FIG. 22 shows, once again, the boundary contours of the reflection surfaces of the mirrors M1 to M9 of the projection optical unit 29.

(227) The projection optical unit 29 has 3 NI mirrors, namely the mirrors M1, M8 and M9. The projection optical unit 29 has 6 GI mirrors, namely the mirrors M2 to M7.

(228) The mirrors M2 to M7 all have the same direction in terms of the mirror deflection effect. In this respect, the projection optical unit 29 is similar to the projection optical unit 26 according to FIGS. 14 to 16.

(229) The mirrors M1 to M9 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(230) The following table once again shows the mirror parameters of mirrors M1 to M9 of the projection optical unit 29.

(231) TABLE-US-00060 M1 M2 M3 M4 M5 M6 M7 M8 M9 Maximum 12.1 84.2 80.6 79.1 75.8 78.8 85.3 17.9 10.4 angle of incidence [] Extent of the reflection 567.4 681.0 749.5 752.9 644.5 538.0 281.4 589.1 929.8 surface in the x-direction [mm] Extent of the reflection 280.0 584.6 369.2 312.1 169.0 98.4 450.0 200.5 889.4 surface in the y-direction [mm] Maximum mirror 567.6 681.3 750.7 752.7 644.5 538.1 452.3 589.1 930.3 diameter [mm]

(232) Apart from the mirror M7, none of the mirrors of the projection optical unit 29 have a y/x-aspect ratio that is greater than 1. The y/x-aspect ratio of the mirror M7 is approximately 1.6.

(233) The last mirror M9 in the imaging beam path has the largest maximum diameter, measuring 930.3 mm. The maximum diameters of all other mirrors M1 to M8 are less than 800 mm. Four of the nine mirrors M1 to M9 have a maximum diameter that is less than 600 mm.

(234) Once again, the projection optical unit 29 has exactly one first plane intermediate image 18 in the region of the passage opening 17 in the mirror M9 and two second plane intermediate images 19, 20. The first of the two second plane intermediate images 19 lies between the GI mirrors M4 and M5 in the imaging light beam path. The second of the two second plane intermediate images 20 lies between the two GI mirrors M6 and M7 in the imaging light beam path.

(235) The optical design data from the projection optical unit 29 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(236) TABLE-US-00061 TABLE 1 for FIG. 20 Exemplary embodiment FIG. 20 NA 0.5 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.0 1/mm rms 11.4 ml Stop AS

(237) TABLE-US-00062 TABLE 2 for FIG. 20 Surface Radius_x [mm] Power_x [1/mm] Radius_y [mm] Power_y [1/mm] Operating mode M9 1221.3204850 0.0016299 934.3318163 0.0021506 REFL M8 4215.6636573 0.0004744 484.8221637 0.0041252 REFL M7 3514.6574105 0.0000960 8774.5487881 0.0013514 REFL M6 1322.0337936 0.0004485 1544.1607213 0.0043686 REFL M5 1225.5513700 0.0004448 1165.4051512 0.0062957 REFL M4 2025.8551251 0.0002369 3191.5729569 0.0026117 REFL M3 2688.6482003 0.0001407 26540.8770199 0.0003984 REFL M2 5902.4437402 0.0000558 6888.6468544 0.0017631 REFL M1 8202.7105009 0.0002401 1786.9980352 0.0011365 REFL

(238) TABLE-US-00063 TABLE 3a for FIG. 20 Coefficient M9 M8 M7 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1221.32048500 4215.66365700 3514.65741100 C7 6.48621457e09 2.70181739e07 8.70215332e08 C9 2.51048646e09 2.09527218e08 1.0113038e07 C10 1.11165132e11 1.39330486e10 1.53416608e10 C12 2.91336189e11 2.28376849e10 3.98919589e10 C14 3.29969657e12 7.78019798e10 1.19879074e10 C16 3.30962098e14 3.14365711e13 6.78606735e13 C18 5.74881439e15 1.38334025e12 2.50172985e13 C20 1.80725216e16 1.91669172e12 1.37309377e13 C21 1.51549926e17 3.1057383e17 1.60011616e15 C23 2.05973575e17 4.30103776e16 1.40263065e15 C25 4.20086457e17 6.9930155e16 8.79758937e16 C27 2.12400508e18 4.03780946e14 1.20104305e16 C29 1.46401176e20 3.26975136e19 1.42943118e17 C31 3.24776004e20 1.36352471e18 4.18802461e18 C33 1.58227638e20 1.65158046e17 2.50288724e18 C35 4.55306998e22 4.30975727e17 2.83728882e19 C36 4.37750241e25 3.33999042e22 8.85677189e21 C38 6.15751054e23 7.72867676e21 7.76607264e20 C40 7.41239376e23 6.55036238e20 5.92531624e21 C42 4.2219319e23 1.92030538e19 5.82582739e21 C44 4.71729051e24 1.1750837e18 4.39302422e22 C46 3.00005887e26 3.07649844e24 9.31126292e23 C48 5.02441216e26 6.78983324e23 3.53569596e22 C50 5.54469897e26 2.02571647e22 8.15194828e24 C52 5.86302543e27 2.66454688e21 3.01898725e24 C54 1.18379859e26 1.2454532e20 1.19322371e24 C55 1.46294994e29 6.51798397e28 2.12225804e25 C57 3.92398918e29 9.21288857e27 4.70156385e25 C59 1.07024742e28 1.55766648e26 2.8868744e24 C61 1.03272515e28 1.62790893e24 4.10931912e25 C63 2.52905737e29 1.66410272e23 3.27456225e26 C65 6.01515241e30 1.15374037e23 5.46227836e27 C67 6.77138154e33 6.29495646e30 3.98723172e27 C69 3.36895071e32 2.74167033e28 1.31637748e26 C71 5.91932375e32 3.25317607e27 1.64283121e26 C73 5.65496784e32 9.06080301e27 1.13987301e27 C75 4.22550137e33 5.47076775e26 2.26180236e28 C77 1.86347639e33 2.69737159e25 2.47129491e30 C78 5.69521668e36 9.676187e34 2.32708681e33 C80 1.44414441e36 1.96827508e32 2.4890295e29 C82 1.99322435e34 1.56292087e30 4.63833458e29 C84 2.96282143e34 1.35084229e29 3.19539678e29 C86 8.59003806e35 1.65029179e29 2.64292864e30 C88 2.78969129e35 2.719885e28 3.38078195e31 C90 2.7443014e35 5.38264343e28 8.02912406e33 C92 2.63716255e38 0 0 C94 1.41483782e38 0 0 C96 5.25192176e38 0 0 C98 2.20234859e37 0 0 C100 4.82347119e38 0 0 C102 1.86723295e37 0 0 C104 8.8737411e38 0 0 C105 4.36464732e42 0 0 C107 1.21008936e40 0 0 C109 3.65476297e41 0 0 C111 6.15824076e41 0 0 C113 7.64763975e41 0 0 C115 3.96878813e41 0 0 C117 7.7510377e41 0 0 C119 5.35056123e41 0 0

(239) TABLE-US-00064 TABLE 3b for FIG. 20 Co- efficient M6 M5 M4 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1322.03379400 1225.55137000 2025.85512500 C7 4.27950112e08 5.84703546e08 8.97366121e08 C9 4.17284284e07 9.39099159e07 8.97651368e08 C10 1.7358341e12 2.04679461e11 3.35542823e11 C12 4.21877305e10 5.37555035e10 6.64926214e11 C14 3.15656821e09 2.68438704e09 1.78345381e11 C16 1.08839994e13 6.61750395e13 3.15319489e14 C18 4.01366751e12 1.44422461e12 7.98256204e15 C20 1.30233138e11 1.03660478e11 1.25346627e13 C21 1.07645526e17 1.82221706e17 4.02332593e17 C23 2.11833236e15 2.48580207e15 4.75597672e17 C25 9.67123493e15 1.30554838e14 2.10674203e16 C27 1.33144249e13 2.09485848e14 1.99899839e16 C29 1.88196584e18 4.56414396e19 8.74600426e20 C31 9.71980395e18 3.44014518e18 8.86388592e19 C33 1.82639944e16 8.1516558e17 1.23472448e19 C35 1.5126297e15 2.78986798e16 1.09548579e19 C36 4.625507e22 2.18674967e22 1.21593626e22 C38 2.76640535e21 5.38282737e21 1.20532003e21 C40 6.93994125e20 2.09335725e20 1.49330284e21 C42 6.12829851e19 3.19701569e19 5.02053714e21 C44 9.01881312e19 2.42814691e18 4.27170182e21 C46 1.38069564e23 1.2039556e24 1.15189186e24 C48 2.58649381e22 7.77124773e24 3.16705352e24 C50 2.90784805e21 3.59675767e22 4.0653013e24 C52 5.42006595e20 3.5170037e21 1.91026596e23 C54 2.29979118e19 1.07320159e20 9.44350026e24 C55 4.3212238e27 6.42267011e28 6.34734328e28 C57 1.22210193e25 4.99247996e27 3.71231003e27 C59 1.30493616e24 1.21918885e25 1.0081319e27 C61 6.14045583e23 2.30701112e24 4.23834329e26 C63 2.46817892e22 4.92852048e23 7.42880115e26 C65 5.49135377e21 9.47901007e23 3.62157818e26 C67 7.03790422e29 5.43910058e30 3.15461775e30 C69 2.97708262e27 8.70163166e30 5.37401656e30 C71 1.01856775e25 1.02008574e27 1.05505788e29 C73 2.19711129e24 1.35856777e26 1.68378824e29 C75 1.26099993e23 2.42376141e25 1.4961554e28 C77 7.11644827e23 7.74230426e25 1.92517608e28 C78 1.25601496e32 8.04588789e34 1.07210323e33 C80 1.08697771e30 1.08540263e32 4.28340028e33 C82 3.07198117e29 6.63449584e31 1.41427412e33 C84 8.12369626e28 3.04722399e30 1.04543684e31 C86 1.50045253e26 7.92742778e29 6.73484186e31 C88 6.8056223e26 5.58379196e28 1.28702955e30 C90 3.36436769e25 6.19385096e27 3.17119137e31

(240) TABLE-US-00065 TABLE 3c for FIG. 20 Coefficient M3 M2 M1 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 2688.64820000 5902.44374000 8202.71050100 C7 5.4242055e09 8.83048352e08 6.2978424e09 C9 1.34994231e08 6.69061957e08 2.81576029e08 C10 4.50309645e11 9.75267665e11 2.48161861e11 C12 9.28536251e12 4.70618898e11 2.99096443e12 C14 8.67137628e12 5.02797113e11 5.9279665e11 C16 1.06056197e13 3.32025035e13 4.50793228e14 C18 4.2812029e14 1.4148906e13 4.96691078e14 C20 8.67184017e14 2.05141367e14 1.048468e13 C21 1.1873352e16 3.58039305e17 2.89600708e17 C23 2.77948857e16 3.09393609e16 1.28726971e16 C25 6.49893216e17 3.62342671e16 5.07326679e16 C27 6.02898901e17 1.8762241e16 4.00525976e16 C29 1.57467526e20 6.13077125e19 6.09790017e20 C31 3.54755545e19 2.24632097e19 3.76370302e19 C33 1.16755371e19 7.61264438e19 1.10116263e19 C35 1.70088294e19 4.44194779e19 2.63499738e18 C36 7.01576249e23 1.88463965e22 4.5509124e23 C38 1.0799985e21 3.89264895e22 4.42107849e22 C40 1.82739825e21 2.09684763e23 3.53826268e22 C42 4.2205569e21 1.20838494e21 8.47370257e21 C44 3.93429468e22 8.84141926e22 5.43189415e21 C46 4.18972217e25 1.84113508e25 4.34461019e25 C48 3.46458657e24 3.40575576e24 7.24968778e24 C50 5.62145231e24 5.45106155e24 2.09880353e23 C52 9.15011889e24 9.21654467e25 1.16157164e23 C54 4.19488997e24 1.59119253e24 4.16022167e23 C55 4.72464228e28 1.39930124e27 7.24355278e30 C57 4.91680241e27 1.56494908e27 4.09367164e28 C59 5.25537606e27 1.26075995e26 2.48389699e26 C61 3.29546805e26 1.44671246e26 7.79737962e26 C63 4.56591637e26 8.83632165e27 2.60595725e25 C65 4.78091055e26 1.98660532e27 4.34169209e25 C67 2.17612083e30 8.37804268e31 1.59224842e30 C69 8.5439834e30 6.28752374e31 4.76515206e29 C71 2.65983135e29 2.4285503e30 3.30166016e28 C73 5.98513653e29 1.42242261e29 7.65304059e28 C75 7.69832277e29 1.55423735e29 2.64998122e28 C77 1.11232906e28 9.76791313e31 4.26662374e28 C78 4.63832043e34 3.39359504e33 5.21447544e34 C80 5.20269628e33 9.14348231e34 1.00883236e32 C82 1.31600486e32 1.12272624e32 2.25573959e31 C84 1.5855366e31 1.22099672e32 1.698327e30 C86 4.77316653e31 5.53234051e33 2.80871381e30 C88 9.19684751e31 9.25716556e33 3.34205539e30 C90 5.58433631e31 4.34744206e34 8.11996042e30

(241) TABLE-US-00066 TABLE 4a for FIG. 20 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M9 0.00000000 0.00000000 874.92613231 M8 0.00000000 149.96653386 108.05779848 M7 0.00000000 63.62123637 1200.25946018 M6 0.00000000 271.52684626 1553.41894167 M5 0.00000000 470.91963555 1646.49107699 M4 0.00000000 1082.43401319 1575.57656013 M3 0.00000000 1402.07740902 1356.86559672 M2 0.00000000 1675.34361170 948.86652584 Stop 0.00000000 1780.47276911 552.55974886 M1 0.00000000 1939.88081432 48.36287033 Object 0.00000000 2133.49017642 2102.38048006

(242) TABLE-US-00067 TABLE 4b for FIG. 20 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M9 5.53247750 0.00000000 0.00000000 M8 191.06495501 0.00000000 0.00000000 M7 69.22482399 0.00000000 0.00000000 M6 42.26836342 0.00000000 0.00000000 M5 9.20367069 0.00000000 0.00000000 M4 20.49802677 0.00000000 0.00000000 M3 45.28410877 0.00000000 0.00000000 M2 65.66507482 0.00000000 0.00000000 Stop 170.67859831 0.00000000 0.00000000 M1 175.14354488 0.00000000 0.00000000 Object 0.15719400 0.00000000 180.00000000

(243) TABLE-US-00068 TABLE 5 for FIG. 20 Surface Angle of incidence[deg] Reflectivity M9 5.53247750 0.66251340 M8 0.00000000 0.66565840 M7 80.28977900 0.88208835 M6 72.75376044 0.76274834 M5 74.18154684 0.78956505 M4 76.11675570 0.82230133 M3 79.09716229 0.86620474 M2 80.52187166 0.88509282 M1 10.00034173 0.65468031 Overall transmission 0.0967

(244) TABLE-US-00069 TABLE 6 for FIG. 20 X[mm] Y[mm] Z[mm] 0.00000000 75.15520054 0.00000000 47.96870740 74.37166721 0.00000000 94.83418130 72.01003446 0.00000000 139.51000833 68.04638564 0.00000000 180.94300303 62.46695638 0.00000000 218.12954032 55.29607159 0.00000000 250.13349992 46.62001118 0.00000000 276.10831313 36.59891053 0.00000000 295.32537634 25.46381611 0.00000000 307.20933498 13.50153273 0.00000000 311.37631602 1.03396852 0.00000000 307.66695882 11.59968020 0.00000000 296.16560163 24.05538106 0.00000000 277.19991698 35.99362549 0.00000000 251.32062868 47.08956739 0.00000000 219.26580101 57.04356306 0.00000000 181.91736137 65.58890956 0.00000000 140.25750388 72.49589183 0.00000000 95.33052822 77.57496890 0.00000000 48.21392686 80.68258848 0.00000000 0.00000000 81.72869195 0.00000000 48.21392686 80.68258848 0.00000000 95.33052822 77.57496890 0.00000000 140.25750388 72.49589183 0.00000000 181.91736137 65.58890956 0.00000000 219.26580101 57.04356306 0.00000000 251.32062868 47.08956739 0.00000000 277.19991698 35.99362549 0.00000000 296.16560163 24.05538106 0.00000000 307.66695882 11.59968020 0.00000000 311.37631602 1.03396852 0.00000000 307.20933498 13.50153273 0.00000000 295.32537634 25.46381611 0.00000000 276.10831313 36.59891053 0.00000000 250.13349992 46.62001118 0.00000000 218.12954032 55.29607159 0.00000000 180.94300303 62.46695638 0.00000000 139.51000833 68.04638564 0.00000000 94.83418130 72.01003446 0.00000000 47.96870740 74.37166721 0.00000000

(245) The projection optical unit 29 has an overall transmission of 9.67%.

(246) An image-side numerical aperture of the projection optical unit 29 is 0.50. The reduction factor .sub.x in the first imaging light plane xz is 4. The reduction factor .sub.y in the second imaging light plane yz is 8. Here too, the different number of intermediate images in the two imaging light planes leads to a correction of the image flip on account of the odd number of mirrors.

(247) An object-side chief ray angle CRA is 5.0. A maximum obscuration of the entry pupil is 12%. An object-image offset d.sub.OIS is approximately 2150 mm. The mirrors of the projection optical unit 29 can be housed in a cuboid with xyz-edge lengths of 930 mm2542 mm1713 mm.

(248) The object plane 5 is tilted relative to the image plane 9 about the x-axis by an angle T of 0.2.

(249) A working distance between the mirror M8 closest to the wafer and the image plane 9 is 80 mm. A mean wavefront aberration rms is 11.4 m.

(250) The aperture stop AS is arranged in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 29. The imaging light beam is completely accessible in the region of the aperture stop AS.

(251) A further embodiment of a projection optical unit 30, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 23 to 25. Components and functions which were already explained above in the context of FIGS. 1 to 22 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(252) FIG. 23 shows a meridional section of the projection optical unit 30. FIG. 24 shows a sagittal view of the projection optical unit 30. FIG. 25 shows, once again, the boundary contours of the reflection surfaces of the ten mirrors M1 to M10 of the projection optical unit 30.

(253) The projection optical unit 30 has three NI mirrors, namely the mirrors M1, M9 and M10. The projection optical unit 30 has seven GI mirrors, namely the mirrors M2 to M8.

(254) The mirrors M2 to M8 all have the same direction in terms of the mirror deflection effect. In this respect, the projection optical unit 30 is similar to the projection optical units 26 according to FIGS. 14 to 16 and 29 according to FIGS. 20 to 22.

(255) The mirrors M1 to M10 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(256) The following tables once again show the mirror parameters of mirrors M1 to M10 of the projection optical unit 30.

(257) TABLE-US-00070 M1 M2 M3 M4 M5 Maximum 13.1 83.4 80.9 83.0 81.1 angle of incidence [] Extent of the reflection 585.6 573.4 596.4 684.0 746.7 surface in the x-direc- tion [mm] Extent of the reflection 298.5 234.7 366.9 417.9 419.8 surface in the y-direc- tion [mm] Maximum 585.6 573.5 603.1 689.3 748.8 mirror diameter [mm] M6 M7 M8 M9 M10 Maximum 83.5 80.6 80.9 24.0 8.2 angle of incidence [] Extent of the reflection 731.5 643.0 524.9 323.8 1008.4 surface in the x-direc- tion [mm] Extent of the reflection 262.5 153.0 213.1 258.0 996.9 surface in the y-direc- tion [mm] Maximum 733.0 643.0 525.0 324.0 1008.9 mirror diameter [mm]

(258) All mirrors M1 to M10 of the projection optical unit 30 have a y/x-aspect ratio that is less than 1.

(259) The last mirror M10 in the imaging beam path has the largest maximum diameter, measuring 1008.9 mm. The maximum diameters of all other mirrors M1 to M9 are less than 750 mm. Seven of the ten mirrors have a maximum diameter that is less than 700 mm. Four of the ten mirrors have a maximum diameter that is less than 600 mm.

(260) Once again, the projection optical unit 30 has exactly one first plane intermediate image 18 in the region of the passage opening 17 in the mirror M10 and two second plane intermediate images 19, 20. A distance between the first plane intermediate image 18 and the passage opening 17 is less than a third of the distance between the last mirror M10 and the image field 8.

(261) In the projection optical unit 30, the first of the two second plane intermediate images 19 lies in the region of a reflection of the imaging light 3 at the GI mirror M4. The second of the two second plane intermediate images 20 lies in the imaging light beam path in the region of the reflection at the GI mirror M6.

(262) The optical design data from the projection optical unit 30 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(263) TABLE-US-00071 TABLE 1 for FIG. 23 Exemplary embodiment FIG. 23 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 10.4 ml Stop AS

(264) TABLE-US-00072 TABLE 2 for FIG. 23 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M10 975.5487706 0.0020377 962.5583837 0.0020905 REFL M9 1786.9869429 0.0011192 611.2039578 0.0032722 REFL M8 2095.9442088 0.0002189 3875.9706125 0.0022490 REFL M7 1045.4690941 0.0004223 10312.0596231 0.0008787 REFL M6 1215.3805004 0.0002681 38549.7142600 0.0003185 REFL M5 1644.5074901 0.0002579 2517.0332413 0.0037473 REFL M4 214162.6635241 0.0000017 3370.4881649 0.0032692 REFL M3 4047.7543473 0.0000871 7308.5674280 0.0015528 REFL M2 5005.1733746 0.0000808 1156.6671379 0.0085532 REFL M1 3798.9753152 0.0005177 1377.9111045 0.0014761 REFL

(265) TABLE-US-00073 TABLE 3a for FIG. 23 Coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 975.54877060 1786.98694300 2095.94420900 C7 5.95804097e09 8.03929648e07 8.3011434e08 C9 1.52364857e08 7.43589206e07 4.7181499e07 C10 9.28099e13 2.37499492e10 2.02775452e11 C12 2.03295286e11 1.68623915e09 9.33342076e10 C14 3.41805e12 1.15900623e09 1.88007174e09 C16 1.42799093e14 2.01463554e12 6.11396757e13 C18 4.97214041e15 2.06895474e13 4.85149273e12 C20 1.32525577e14 2.94709467e12 8.94508956e12 C21 1.49502256e18 2.85556664e16 7.74114074e17 C23 3.1935411e17 9.04365887e15 4.65092634e15 C25 3.31420566e17 1.05454924e14 3.08749913e14 C27 5.86281511e18 7.34133351e15 5.17090551e14 C29 1.26997904e20 5.76866938e18 9.30619914e19 C31 7.76177662e21 1.79812907e17 4.34796101e17 C33 1.50829309e20 8.14507407e18 2.19762816e16 C35 1.22801974e20 2.27167577e17 2.99980346e16 C36 2.1467814e24 7.6583843e20 1.11004135e21 C38 4.69712554e23 6.25650447e20 4.461594e20 C40 7.77443045e23 3.54035566e20 4.26992684e19 C42 4.52759935e23 2.60958385e20 1.54031954e18 C44 4.5075988e24 1.97889894e19 1.4763913e18 C46 1.2818549e26 2.24761699e22 5.00232186e23 C48 1.56907351e26 9.99234563e23 3.46718952e22 C50 7.63880336e27 3.04672894e22 2.81615015e21 C52 2.62423865e26 1.12872852e21 7.73566576e21 C54 1.3223325e26 1.39660252e21 7.25601264e21 C55 4.91404028e31 1.7749894e24 7.28168609e27 C57 5.49015313e29 4.18918707e25 2.27362519e25 C59 1.19636029e28 2.37980171e24 1.10460061e24 C61 1.21575333e28 1.30384498e24 7.85664558e24 C63 4.81080894e29 3.8847099e24 3.09055201e23 C65 1.11934428e29 6.79231048e24 6.70387564e23 C67 3.35019698e32 2.38620726e28 2.44599566e28 C69 5.67292204e32 1.19770461e27 1.34268575e27 C71 6.03548629e32 8.03882829e27 1.73920457e26 C73 6.30996158e33 1.53983174e26 1.45057385e25 C75 5.19267709e32 6.20914706e26 4.77275337e25 C77 1.23924124e32 4.47651624e26 6.11524253e25 C78 2.3725453e36 2.34547492e29 4.49789027e32 C80 8.83337074e35 1.30801418e30 5.00787029e30 C82 3.20486752e34 5.45618829e29 6.24961973e29 C84 4.31424577e34 1.19872753e28 6.80689304e28 C86 2.83533832e34 1.66096044e29 3.1258368e27 C88 8.20994418e35 2.02826868e28 6.05199729e27 C90 1.16789084e35 6.83570559e29 2.9852638e27 C92 2.843655e38 1.53289092e32 1.35088954e33 C94 3.36094687e38 1.7850554e32 4.90992003e32 C96 1.49968333e37 4.20515949e32 9.22306786e31 C98 1.69899738e37 1.4826376e31 6.47768699e30 C100 8.80150382e38 4.50266357e31 2.24773669e29 C102 7.03462778e38 1.46581483e30 3.28786082e29 C104 2.97045845e38 3.94310002e31 5.81148918e30 C105 4.76141065e42 1.41949569e34 1.69050404e37 C107 1.6878978e40 4.95411568e35 6.59328032e37 C109 2.60807696e40 9.52116258e34 3.43622241e34 C111 3.44175669e40 2.38482471e33 3.4960256e33 C113 3.99153873e40 2.88133837e33 1.87453448e32 C115 1.03370812e40 7.70741325e34 5.38181997e32 C117 1.35912164e40 5.14237082e33 6.45183346e32 C119 2.83877758e41 1.15789492e34 5.47296591e34 C121 5.9855365e44 0 0 C123 3.58371657e43 0 0 C125 6.74451435e43 0 0 C127 5.68244733e43 0 0 C129 8.7411743e44 0 0 C131 2.72373418e43 0 0 C133 3.47596581e43 0 0 C135 1.15763536e43 0 0 C136 7.3034626e48 0 0 C138 4.12182647e46 0 0 C140 1.49526036e45 0 0 C142 3.2358839e45 0 0 C144 4.18920423e45 0 0 C146 3.39263213e45 0 0 C148 1.33209474e45 0 0 C150 1.863829e47 0 0 C152 6.14799467e47 0 0

(266) TABLE-US-00074 TABLE 3b for FIG. 23 Coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1045.46909400 1215.38050000 1644.50749000 C7 9.5792129e08 9.85907747e08 1.54027134e07 C9 6.62613291e08 2.44290281e08 9.05741401e09 C10 7.40502097e11 4.12531064e11 3.18252976e11 C12 4.08948603e10 2.13920421e10 1.69205919e10 C14 9.87692725e10 9.31726672e11 1.13306483e12 C16 2.14106934e13 6.28352563e14 2.24154389e13 C18 3.43955471e13 4.40526697e13 1.46427009e15 C20 1.97092267e12 5.12351393e13 5.17690392e15 C21 2.27675195e16 1.18505694e16 2.22667245e16 C23 2.42352609e16 4.14773002e16 1.79837464e17 C25 8.58109566e15 1.56476746e15 1.13489728e16 C27 2.25847919e14 1.80874528e15 2.01629864e16 C29 9.27614962e19 3.8444837e19 6.10856847e19 C31 7.90475103e19 6.61811399e19 4.27607556e19 C33 8.76130063e18 6.63551226e18 3.51912523e19 C35 1.35523796e18 1.18525201e17 6.95837547e19 C36 1.98141766e22 2.92380598e22 4.45944546e22 C38 3.654101e21 1.43515228e21 4.39560373e22 C40 3.03300085e21 7.04841407e21 1.80506109e21 C42 3.96315687e19 2.20895897e20 3.79556064e21 C44 7.54291762e19 4.26828311e20 6.39845413e21 C46 1.35299802e23 8.61301054e24 2.48638664e24 C48 1.7517203e24 5.90539907e25 2.7786426e24 C50 3.03043526e22 1.90322534e23 1.2995714e23 C52 4.48492838e22 1.34714972e22 3.17115678e23 C54 2.61364128e21 2.00099998e22 2.27789546e23 C55 2.62872082e27 3.52236706e27 4.46219179e28 C57 8.29018857e26 7.37835617e27 3.23080215e27 C59 9.87595964e26 2.59399915e28 5.88214824e27 C61 1.33683359e24 1.20217809e25 2.37543587e26 C63 2.38226885e24 5.62138903e25 1.29437348e26 C65 1.12061078e23 1.57580136e24 5.84130015e26 C67 8.62369094e29 3.44232588e29 1.30394282e30 C69 1.0856691e28 6.66914299e29 5.00509797e30 C71 2.00936961e27 1.43708604e28 3.39871859e29 C73 9.21543403e27 3.23430874e28 2.92457247e28 C75 8.74991463e26 3.06388254e28 6.08263151e28 C77 7.71033623e25 1.17311277e26 3.80152335e28 C78 6.23778722e33 1.26615681e32 4.13882349e33 C80 6.21014273e31 3.5254233e33 1.46703005e32 C82 8.95894887e31 2.19232643e31 1.85054171e32 C84 2.18641836e31 1.17554177e30 1.84470244e32 C86 1.3695322e29 5.18933781e30 9.47400187e32 C88 1.75395859e27 9.16361654e30 4.88248476e31 C90 1.43209341e26 7.8544656e29 1.17574141e30 C92 2.05090173e34 3.9960171e35 1.08187025e35 C94 7.60088632e34 1.09957929e34 1.18791897e35 C96 1.00872099e32 4.54994406e34 3.05105106e34 C98 2.26804397e31 4.51060461e33 2.50549956e33 C100 2.46369136e30 4.31519977e32 7.93503412e33 C102 1.13090407e29 1.35113735e31 1.22506006e32 C104 1.44593604e29 3.99172166e31 9.13299628e33 C105 4.19017572e38 1.38399499e38 1.89493701e38 C107 1.50992299e36 1.40332039e38 2.1432617e38 C109 4.25127052e36 3.01861848e37 1.09876139e38 C111 1.05208601e34 6.8370801e37 1.2616574e36 C113 1.76414667e33 6.60279764e36 7.4946947e36 C115 3.99316502e33 9.13127758e35 1.86018645e35 C117 1.48508087e32 3.68280235e34 2.26682249e35 C119 7.17664912e31 8.31069559e34 1.34001465e35

(267) TABLE-US-00075 TABLE 3c for FIG. 23 Coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 214162.66350000 4047.75434700 5005.17337500 C7 2.98068193e07 3.40159923e08 1.53289528e07 C9 5.61609225e08 1.0109082e07 1.19599907e06 C10 2.31126138e10 1.13587051e10 1.71565532e10 C12 9.68157642e12 1.96351094e12 9.69554638e10 C14 1.78309191e11 2.07056507e10 2.52024483e09 C16 1.43916345e13 1.39220002e13 3.34685833e13 C18 1.38913507e13 6.9799513e14 2.79609875e12 C20 4.27413144e14 5.7781008e13 3.54664231e14 C21 4.76669999e16 2.33642412e16 5.21059427e16 C23 4.42788651e16 7.61513304e17 1.96357314e15 C25 3.27344931e17 6.04184022e16 6.04569672e16 C27 6.38302953e17 1.53772654e15 5.41292875e14 C29 1.40930006e18 1.96589441e19 2.38101659e18 C31 3.79697584e19 6.83863216e19 1.51800562e17 C33 3.33127907e19 2.23362525e18 8.74528208e17 C35 1.65970278e20 5.24001813e18 4.78342984e16 C36 2.46259394e21 7.31967756e22 1.77577302e21 C38 9.63192307e22 6.52093992e22 4.99470817e21 C40 4.6441045e22 2.83339637e21 5.13512935e20 C42 6.32863913e22 1.31280497e20 8.91850061e19 C44 5.74325671e22 2.16776697e20 3.00994968e18 C46 6.35531003e24 3.38804527e24 5.59164118e24 C48 5.57913557e25 3.20270766e24 8.48881414e24 C50 1.7256835e24 1.3538911e23 2.8296468e22 C52 3.33754858e24 6.04654145e23 6.46376294e21 C54 3.48516782e25 7.28443369e23 1.32941809e20 C55 5.23980471e27 3.85287855e27 4.04572356e27 C57 4.69201423e27 1.14702936e26 4.39721795e27 C59 3.05001052e27 1.13591604e26 1.44344469e25 C61 8.5077925e28 2.82985611e26 5.73252344e24 C63 1.61770546e26 9.78900011e26 2.58611178e23 C65 1.33708124e26 1.27638251e25 1.54141621e23 C67 1.10490492e29 1.44433652e29 1.70927884e28 C69 4.15774494e30 4.27636912e29 8.23476294e29 C71 2.07939058e29 8.82142368e29 2.37746803e28 C73 6.3114047e29 1.79835007e28 5.30603865e26 C75 1.19639508e28 2.14539274e28 6.20757645e26 C77 1.38131207e29 6.24476296e28 2.94223714e25 C78 1.27622264e33 8.64007915e32 4.19387448e33 C80 4.1304249e32 9.26936252e32 3.59838074e31 C82 3.73020917e32 8.32970473e32 4.82922533e31 C84 3.48343186e32 4.58966665e31 1.04705138e29 C86 1.27316151e31 1.50473043e31 1.405332e28 C88 1.02926202e31 4.84455042e30 1.06018689e27 C90 1.5520292e31 5.08388151e30 2.33228215e27 C92 5.77087985e36 2.3208429e35 4.51778365e34 C94 3.27155345e35 2.05177822e34 5.85507675e34 C96 2.22541179e34 1.4182386e34 5.47410971e33 C98 1.2929922e34 7.3618392e34 2.13598023e31 C100 1.21610939e33 3.56951639e34 1.18107064e30 C102 1.38966172e33 2.11845232e32 3.21534062e30 C104 2.04957978e34 1.52325188e32 7.77916404e30 C105 2.32832807e38 3.20761498e37 5.85487373e38 C107 1.15973567e37 1.32126849e37 1.86190597e36 C109 1.3025795e37 6.18369858e37 2.34340078e36 C111 6.82017694e37 2.75175491e36 9.43098976e35 C113 7.41982901e37 3.00662899e36 1.09550777e33 C115 2.83757994e36 5.08471416e36 5.96651054e33 C117 2.33564828e36 2.86756309e35 1.87181852e33 C119 6.03189805e37 1.32771814e35 1.02742882e32

(268) TABLE-US-00076 TABLE 3d for FIG. 23 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 3798.97531500 C7 4.03766338e09 C9 4.3194842e09 C10 6.01080824e11 C12 1.63211364e11 C14 3.27624583e11 C16 3.92017522e15 C18 2.92031813e14 C20 2.05676259e14 C21 3.06304743e17 C23 2.76883852e17 C25 6.03618233e17 C27 1.63598483e16 C29 1.25011464e19 C31 1.42263601e19 C33 2.19802e19 C35 7.16733765e19 C36 2.29879048e22 C38 4.25456289e23 C40 6.77664934e22 C42 5.73097971e23 C44 1.03597287e20 C46 1.49835059e25 C48 4.94722185e26 C50 4.46231936e24 C52 3.41955215e24 C54 9.96533789e24 C55 3.57497059e28 C57 2.65994162e27 C59 3.06521007e26 C61 6.30968074e26 C63 1.0307333e25 C65 3.32819547e25 C67 1.85388921e30 C69 3.53159276e30 C71 3.10470607e29 C73 4.14868733e29 C75 7.66872797e29 C77 8.66901471e28 C78 4.01154289e33 C80 1.8007793e32 C82 2.61587328e31 C84 1.39265589e30 C86 3.42875335e30 C88 4.66556397e30 C90 5.03706516e30 C92 1.9480775e36 C94 2.1044583e35 C96 3.40943999e34 C98 1.69349476e34 C100 2.17147474e34 C102 4.10866825e33 C104 2.24081208e32 C105 1.3866307e38 C107 5.17463408e39 C109 8.29771816e37 C111 8.04376424e36 C113 2.81931438e35 C115 6.54260577e35 C117 5.75688991e35 C119 2.42635211e36

(269) TABLE-US-00077 TABLE 4a for FIG. 23 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 887.59443974 M9 0.00000000 172.59978370 121.13732975 M8 0.00000000 99.24967241 1334.28063207 M7 0.00000000 43.11388355 1572.24075699 M6 0.00000000 112.95031228 1761.46566363 M5 0.00000000 503.77097618 2006.77295677 M4 0.00000000 1183.14523455 2114.39526090 M3 0.00000000 1743.06358961 1985.12864378 M2 0.00000000 2003.97800329 1804.40694815 Stop 0.00000000 2113.61386051 1637.66603203 M1 0.00000000 2492.77847092 1061.00930582 Object 0.00000000 2076.12855898 3021.09698946

(270) TABLE-US-00078 TABLE 4b for FIG. 23 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 6.34541885 0.00000000 0.00000000 M9 192.66070633 0.00000000 0.00000000 M8 89.67846951 0.00000000 0.00000000 M7 63.60604245 0.00000000 0.00000000 M6 41.30053662 0.00000000 0.00000000 M5 20.55849861 0.00000000 0.00000000 M4 1.99914258 0.00000000 0.00000000 M3 23.85411988 0.00000000 0.00000000 M2 45.69125060 0.00000000 0.00000000 Stop 3.79702826 180.00000000 0.00000000 M1 202.66318975 0.00000000 0.00000000 Object 17.00057091 0.00000000 0.00000000

(271) TABLE-US-00079 TABLE 5 for FIG. 23 Surface Angle of incidence[deg] Reflectivity M10 6.31397756 0.66150254 M9 0.06437817 0.66566199 M8 76.73613039 0.83201039 M7 77.24808925 0.83978524 M6 80.62494847 0.88641903 M5 77.75809141 0.84731989 M4 79.54253199 0.87222913 M3 79.84982464 0.87631951 M2 78.33671121 0.85563145 M1 10.48014292 0.65352413 Overall transmission 0.0988

(272) TABLE-US-00080 TABLE 6 for FIG. 23 X[mm] Y[mm] Z[mm] 0.00000000 58.63894911 0.00000000 42.42944258 58.04084453 0.00000000 83.98447050 56.24367346 0.00000000 123.78358698 53.24189366 0.00000000 160.93247075 49.03816514 0.00000000 194.52480961 43.66001421 0.00000000 223.65792956 37.17775396 0.00000000 247.46839690 29.71554726 0.00000000 265.18506321 21.45178837 0.00000000 276.18941267 12.61227118 0.00000000 280.07094098 3.45771151 0.00000000 276.66743077 5.73341781 0.00000000 266.08310291 14.68331396 0.00000000 248.68009273 23.13096284 0.00000000 225.04389947 30.84493482 0.00000000 195.93172761 37.63275631 0.00000000 162.21535772 43.34567089 0.00000000 124.82654256 47.87714206 0.00000000 84.71129442 51.15623627 0.00000000 42.80037098 53.13928275 0.00000000 0.00000000 53.80277791 0.00000000 42.80037098 53.13928275 0.00000000 84.71129442 51.15623627 0.00000000 124.82654256 47.87714206 0.00000000 162.21535772 43.34567089 0.00000000 195.93172761 37.63275631 0.00000000 225.04389947 30.84493482 0.00000000 248.68009273 23.13096284 0.00000000 266.08310291 14.68331396 0.00000000 276.66743077 5.73341781 0.00000000 280.07094098 3.45771151 0.00000000 276.18941267 12.61227118 0.00000000 265.18506321 21.45178837 0.00000000 247.46839690 29.71554726 0.00000000 223.65792956 37.17775396 0.00000000 194.52480961 43.66001421 0.00000000 160.93247075 49.03816514 0.00000000 123.78358698 53.24189366 0.00000000 83.98447050 56.24367346 0.00000000 42.42944258 58.04084453 0.00000000

(273) The projection optical unit 30 has an overall transmission of 9.88%.

(274) An image-side numerical aperture of the projection optical unit 30 is 0.55. The reduction factor .sub.x in the first imaging light plane xz is 4. The reduction factor .sub.y in the second imaging light plane yz is 8.

(275) An object-side chief ray angle CRA is 5.0. A maximum obscuration of the entry pupil is 20%. An object-image offset d.sub.OIS is approximately 2080 mm. The mirrors of the projection optical unit 30 can be housed in a cuboid with xyz-edge lengths of 1008 mm3091 mm2029 mm.

(276) The object plane 5 is tilted relative to the image plane 9 about the x-axis by an angle T of 17.

(277) A working distance between the mirror M10 closest to the wafer and the image plane 9 is 87 mm. A mean wavefront aberration rms is 10.60 m.

(278) The aperture stop AS is arranged in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 30. The imaging light beam is completely accessible in the region of the aperture stop AS.

(279) A further embodiment of a projection optical unit 31, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 26 to 28. Components and functions which were already explained above in the context of FIGS. 1 to 25 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(280) FIG. 26 shows a meridional section of the projection optical unit 31. FIG. 27 shows a sagittal view of the projection optical unit 31. FIG. 28 shows, once again, the boundary contours of the reflection surfaces of the ten mirrors M1 to M10 of the projection optical unit 31.

(281) The projection optical unit 31 has three NI mirrors, namely the mirrors M1, M9 and M10. The projection optical unit 31 has seven GI mirrors, namely the mirrors M2 to M8.

(282) The mirrors M2 to M8 all have the same direction in terms of the mirror deflection effect. In this respect, the projection optical unit 31 is similar to the projection optical unit 30 according to FIGS. 23 to 25.

(283) The mirrors M1 to M10 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(284) The following tables once again show the mirror parameters of mirrors M1 to M10 of the projection optical unit 31.

(285) TABLE-US-00081 M1 M2 M3 M4 M5 Maximum 12.8 82.0 79.3 83.0 80.4 angle of incidence [] Extent of the reflection 507.0 348.8 349.6 328.9 399.0 surface in the x-direc- tion [mm] Extent of the reflection 266.7 235.5 309.7 283.1 329.1 surface in the y-direc- tion [mm] Maximum 507.1 349.1 385.0 408.8 421.5 mirror diameter [mm] M6 M7 M8 M9 M10 Maximum 83.0 80.4 79.5 21.6 7.0 angle of incidence [] Extent of the reflection 388.8 358.0 290.1 233.2 891.4 surface in the x-direc- tion [mm] Extent of the reflection 194.1 117.0 206.0 197.3 879.5 surface in the y-direc- tion [mm] Maximum 393.8 358.0 290.3 234.2 892.0 mirror diameter [mm]

(286) All mirrors M1 to M10 of the projection optical unit 31 have a y/x-aspect ratio that is less than 1.

(287) The last mirror M10 in the imaging beam path has the largest maximum diameter, measuring 892.0 mm. The maximum diameters of all other mirrors M1 to M9 are less than 550 mm. Eight of the ten mirrors have a maximum diameter that is less than 500 mm. Six of the ten mirrors have a maximum diameter that is less than 400 mm.

(288) Once again, the projection optical unit 31 has exactly one first plane intermediate image 18 in the region of the passage opening 17 in the mirror M10 and two second plane intermediate images 19, 20. The first of the two second plane intermediate images 19 lies in the imaging beam path, the region of the reflection at the GI mirror M4. The second of the two second plane intermediate images 20 lies in the imaging beam path in the region of the reflection at the GI mirror M7.

(289) The mirror M7 (cf. FIG. 28) has a reflection surface boundary contour RK with a basic form GF which, once again, corresponds to the curved basic form of the object field 4 or of the image field 8 of the projection optical unit 31. Two contour bulges KA are arranged along the side edge of this boundary contour RK, which is shown at the top in FIG. 28 and which is the long side edge in relation to the basic form GF. The function of these contour bulges KA corresponds to that which was already explained above with reference to the mirror M6 of the projection optical unit 7 in the embodiment according to FIGS. 2 to 4.

(290) The optical design data from the projection optical unit 31 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(291) TABLE-US-00082 TABLE 1 for FIG. 26 Exemplary embodiment FIG. 26 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 7.5 Field dimension_x 26.0 mm Field dimension_y 1.0 mm Field curvature 0.012345 1/mm rms 7.8 ml Stop AS

(292) TABLE-US-00083 TABLE 2 for FIG. 26 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M10 850.9984003 0.0023394 842.5330814 0.0023847 REFL M9 690.4525083 0.0028966 439.5683912 0.0045499 REFL M8 1626.5101949 0.0003056 18899.4493659 0.0004259 REFL M7 894.6483361 0.0005281 33415.4312586 0.0002534 REFL M6 1304.5130313 0.0002811 18951.9259358 0.0005756 REFL M5 2002.4714622 0.0002249 1848.6392687 0.0048054 REFL M4 13571.6618991 0.0000291 2667.7243909 0.0038029 REFL M3 2929.4401727 0.0001380 5283.0628904 0.0018729 REFL M2 1765.1515098 0.0002484 1283.3399004 0.0071079 REFL M1 2088.8983816 0.0009404 1280.5878935 0.0015901 REFL

(293) TABLE-US-00084 TABLE 3a for FIG. 26 Coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 850.99840030 690.45250830 1626.51019500 C7 7.03002946e09 1.12832575e06 6.12641257e08 C9 1.55280432e08 1.2159954e06 1.3921232e07 C10 1.12111283e11 1.70900183e09 1.05449944e10 C12 3.09329566e11 5.22963449e09 5.54183446e10 C14 1.74817678e12 1.12031112e09 3.43759946e10 C16 1.17459377e14 1.10629457e11 1.01509149e12 C18 6.10523134e15 9.95900689e12 6.2656672e13 C20 1.61333143e14 4.44954285e12 1.72502948e12 C21 1.59220258e17 1.52048436e14 5.145233e16 C23 7.04797949e17 6.22062916e14 5.09268635e17 C25 5.27874467e17 7.53214031e14 2.67922335e15 C27 1.10240684e17 1.53301075e14 7.76389234e15 C29 2.16726344e20 1.38206693e16 2.15656063e18 C31 9.04198121e21 3.08632687e17 8.64279245e18 C33 2.30879218e20 5.76656034e17 1.5099794e17 C35 1.00834913e20 1.03425145e16 2.63359643e17 C36 2.14878734e23 7.59951862e20 9.46694556e21 C38 1.19644095e22 6.67732433e19 1.9173226e21 C40 1.66028267e22 1.35355603e18 6.98066679e20 C42 9.26934025e23 6.38737212e19 5.18396999e20 C44 2.71890576e23 1.08072084e19 2.45233569e19 C46 3.03368513e26 2.20243567e21 1.5327447e22 C48 3.19077558e26 2.43245202e21 1.04282583e21 C50 1.16311692e26 7.73188086e21 1.17201163e21 C52 1.8557501e26 1.40710351e20 4.02316222e21 C54 1.13552496e26 1.34258539e20 5.39197892e21 C55 3.49082911e29 5.77685598e24 1.5698251e24 C57 3.19623602e28 3.81572271e23 2.70267218e24 C59 6.62888681e28 1.13738432e22 2.77569561e24 C61 5.49474662e28 9.8457023e23 8.1161275e24 C63 2.33723415e28 6.44703944e23 8.56751222e24 C65 6.11229244e29 7.54582826e23 4.1168243e23 C67 8.43043691e32 2.50016809e26 1.2946523e26 C69 2.12547632e31 5.66061831e26 9.65290282e26 C71 1.79344385e31 4.54813421e25 6.79293961e26 C73 1.06815298e31 1.29533612e24 4.956337e25 C75 1.05755587e31 1.55384636e24 6.14365077e25 C77 8.46368304e33 5.60304945e25 3.49493613e25 C78 1.06144694e35 8.75573136e28 1.03825281e28 C80 7.27835685e34 2.58893701e27 2.13916224e28 C82 2.42013765e33 1.2067901e26 1.24128655e28 C84 2.59612915e33 1.49597539e26 1.36300786e27 C86 8.89251311e34 5.08486485e27 2.54214587e27 C88 4.24278168e35 4.81867076e27 2.75194399e27 C90 8.34509197e36 5.09469282e27 5.79969549e27 C92 1.70298609e37 8.27996984e31 4.94243267e31 C94 7.35037693e37 5.9450189e30 3.34975554e30 C96 1.54424725e36 2.94477093e29 8.03367696e30 C98 6.13331746e37 1.01069595e28 3.3727749e29 C100 1.28065428e36 2.0690222e28 7.64674986e29 C102 9.35297851e37 2.09170374e28 3.50268561e29 C104 8.72230446e38 1.92939795e29 1.77267398e29 C105 4.33579071e40 3.92839494e32 2.73420503e33 C107 6.67869952e39 1.31611785e31 6.73493598e33 C109 2.55657274e38 9.19416961e31 8.86390859e34 C111 4.10862904e38 1.67494418e30 1.04183129e31 C113 3.02138728e38 1.02449935e30 3.89787802e31 C115 1.06320348e38 3.76885269e31 4.0813407e31 C117 2.62841711e39 3.60960998e31 6.43010051e32 C119 3.19060904e40 9.39336476e32 7.0451153e31 C121 8.77211122e43 4.89468126e35 7.66026768e36 C123 3.85601224e42 6.89110707e35 3.23128947e35 C125 9.53448338e42 6.3366408e34 2.45165302e34 C127 9.67154428e42 2.01379939e33 6.53749443e34 C129 6.71055197e43 6.28157945e33 2.58964212e33 C131 6.86184229e42 9.91715428e33 3.69905543e33 C133 3.00403221e42 9.21971687e33 2.53197671e33 C135 2.12945038e43 1.25764882e33 4.45495448e33 C136 1.13878838e45 6.8751793e37 2.4618018e38 C138 1.87411622e44 2.13811275e36 5.65630181e38 C140 8.54897409e44 2.28771775e35 2.62366196e37 C142 1.78978429e43 5.83739868e35 2.3076713e36 C144 1.87587925e43 6.00556142e35 1.27178851e35 C146 9.29426856e44 4.29425805e37 2.38221259e35 C148 2.25947742e44 4.99346508e35 2.24046545e35 C150 5.2803677e45 4.17428318e35 1.09648004e35 C152 5.67509953e46 6.18032669e36 9.30861482e36 C154 7.54374179e49 0 0 C156 4.33032443e48 0 0 C158 1.44192772e47 0 0 C160 2.32499596e47 0 0 C162 1.17862963e47 0 0 C164 1.16609868e47 0 0 C166 1.42697874e47 0 0 C168 4.03481152e48 0 0 C170 2.03671085e49 0 0 C171 1.661131e51 0 0 C173 2.82534838e50 0 0 C175 1.41975872e49 0 0 C177 3.59720313e49 0 0 C179 5.05571087e49 0 0 C181 3.89904427e49 0 0 C183 1.57429847e49 0 0 C185 4.02999425e50 0 0 C187 1.06893714e50 0 0 C189 1.25335447e51 0 0

(294) TABLE-US-00085 TABLE 3b for FIG. 26 Coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 894.64833610 1304.51303100 2002.47146200 C7 1.08112771e07 1.04335481e07 1.10979512e07 C9 1.13000051e07 2.20798445e08 6.00145368e09 C10 1.17589399e10 4.78714462e11 6.40363293e11 C12 4.20978683e10 2.5290518e10 1.95262505e10 C14 1.39671003e09 4.11188896e10 1.57759281e11 C16 1.06370796e13 2.58531409e14 2.55096961e13 C18 1.63118441e12 5.99630932e13 4.64367829e13 C20 5.21760043e12 1.84885391e12 1.78763837e13 C21 4.20095046e16 5.35288064e18 4.78304505e16 C23 1.28788127e15 1.16592841e15 6.76366991e16 C25 2.24603177e14 4.24493445e16 6.43409213e16 C27 6.66272337e14 1.37793734e14 1.3197354e16 C29 3.41059778e18 9.53689977e20 2.58200642e19 C31 3.68397697e18 2.92104626e19 1.45175003e18 C33 1.52001612e16 6.90020201e18 1.00464425e18 C35 4.91058447e16 1.20787125e16 2.98913737e19 C36 4.98603076e21 1.41092473e21 2.74358727e21 C38 9.16903491e21 1.97406532e21 5.24074149e22 C40 1.47271995e19 3.34460739e20 1.40871746e20 C42 3.07422757e18 1.06724041e19 9.53341509e21 C44 6.2957705e18 1.32000706e18 1.47064843e20 C46 1.85365336e22 4.76594089e24 8.2933825e24 C48 1.28210118e21 2.58185303e23 6.44879498e24 C50 8.73336698e21 1.26595369e22 1.53890294e23 C52 1.99451811e20 3.26154339e21 9.77860571e24 C54 1.35148582e19 7.66852471e21 7.3231509e25 C55 2.04919022e25 2.00836232e25 1.76764762e25 C57 2.13209361e25 2.12156909e25 1.07292061e25 C59 6.67031327e24 6.13616768e25 2.86382758e25 C61 1.2510699e22 4.10599237e24 5.40705817e25 C63 5.62409591e22 6.38112745e23 5.83425481e25 C65 2.932744e23 3.11441795e23 1.829156e24 C67 9.07561132e27 1.37972111e27 9.8408785e29 C69 1.12029331e25 1.70924762e27 2.63624292e28 C71 2.34177287e25 9.92372194e27 1.3177282e27 C73 4.9855072e24 5.32263488e26 1.64852392e28 C75 1.07981493e23 8.2123685e25 1.25617763e27 C77 4.20616759e23 1.17407193e25 9.365847e27 C78 5.17650497e30 8.29545495e30 4.04537672e30 C80 8.1321703e29 2.18697679e29 2.11123385e30 C82 5.05010944e28 5.08995306e29 1.04180761e29 C84 4.1407741e27 1.63285579e28 3.49688833e29 C86 7.54993507e26 4.12929765e28 2.55288354e29 C88 2.95901058e25 3.9753868e27 2.10034523e29 C90 4.47805219e25 2.10900597e26 4.9364073e29 C92 3.17297336e31 2.7136031e32 1.0925254e32 C94 4.39871315e30 7.74413927e32 7.37173106e33 C96 2.21978454e30 1.3340811e30 2.05419638e32 C98 3.51293551e29 6.54025347e30 4.22617588e32 C100 1.7393042e27 1.14443482e29 3.18007759e32 C102 2.21659182e27 1.63902209e29 9.69320597e32 C104 2.261453e26 3.72776469e28 4.37544226e31 C105 4.12534461e35 1.14480182e34 3.01382907e35 C107 2.76513255e33 2.48225368e34 3.82965838e35 C109 6.66123874e33 7.08107492e34 2.24841818e34 C111 5.68286568e32 1.28989041e32 8.72165939e34 C113 2.21079604e30 6.06542575e32 7.27967829e34 C115 2.37579413e29 2.19301557e31 4.91779127e34 C117 6.27847083e30 2.24385315e31 2.37594002e34 C119 4.78585387e29 2.80185274e30 1.6756456e34 C121 3.90632846e36 3.01907852e37 1.34464067e37 C123 6.26723855e35 7.38603762e36 6.76565399e38 C125 1.05715992e34 9.61938133e36 1.51891289e37 C127 3.09523937e33 8.01514865e35 5.00274107e37 C129 1.20382485e32 1.890792e34 8.2689123e37 C131 1.5791079e31 1.25739753e33 1.40678273e36 C133 4.84783534e31 6.43336332e34 2.19255971e36 C135 3.25553962e30 1.01661431e32 7.71863723e36 C136 6.44594661e41 5.18329556e40 3.10095869e41 C138 3.35868415e38 6.80645707e39 4.35334696e41 C140 1.80786666e37 1.78639777e38 2.42366057e39 C142 2.38820743e36 9.21396534e38 1.02431909e38 C144 2.22167615e35 3.78975523e37 1.04663468e38 C146 3.32759736e34 2.96891077e37 6.10106481e39 C148 2.06724289e33 1.82263628e36 4.98328999e40 C150 3.9794396e33 7.77903373e37 3.42284275e39 C152 2.3470777e32 1.47710607e35 1.59359975e38

(295) TABLE-US-00086 TABLE 3c for FIG. 26 Coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 13571.66190000 2929.44017300 1765.15151000 C7 2.4867906e07 4.08857083e08 5.7556894e09 C9 1.31816749e07 9.89325337e08 1.14539535e06 C10 1.48061453e10 9.97694826e11 5.45484776e11 C12 1.21532663e10 2.57218721e10 6.04005833e10 C14 1.16631039e10 4.04653062e10 2.16860795e09 C16 1.2664286e14 5.04233236e14 2.44731848e13 C18 5.47315517e13 3.35933025e13 2.42823996e12 C20 2.41591161e13 8.111824e13 7.35728966e14 C21 1.59004743e16 1.59830806e15 2.30482615e15 C23 1.04464337e15 2.87520329e16 4.20889256e16 C25 1.55721846e15 8.61175146e16 7.33809515e15 C27 7.50169667e16 4.10119512e15 2.88368567e14 C29 2.18585533e18 6.13843321e19 1.48260706e17 C31 2.70123455e18 1.38332816e18 2.53495907e17 C33 4.38939645e18 5.67758167e18 5.60276862e17 C35 1.86451426e18 1.33485001e17 1.48945852e16 C36 5.00909256e21 5.45445522e21 4.95064554e21 C38 3.00745498e21 6.14787355e21 4.91817794e20 C40 1.78924217e20 3.67760273e21 1.6957518e19 C42 6.33866332e21 2.49007667e20 2.45066144e19 C44 9.33191026e21 7.67966033e20 2.10705647e19 C46 2.84838666e23 5.43800202e23 1.29798113e22 C48 3.60495373e23 1.02681305e22 7.8287201e23 C50 1.16022145e22 4.84478465e23 1.64313217e21 C52 7.7979898e24 2.37125083e22 1.04461941e21 C54 8.35587682e23 3.51811104e22 5.38944309e21 C55 1.14055283e26 2.62138126e25 4.35489266e25 C57 2.65384423e26 3.11299601e25 1.3762689e24 C59 3.70188932e25 9.09956536e25 5.9051924e25 C61 3.01756263e25 8.80462249e25 4.52988194e24 C63 4.07672634e25 1.39144761e24 2.30701197e23 C65 1.09635103e24 5.99660749e25 3.82791002e23 C67 1.38494804e27 2.82529724e27 2.5491701e27 C69 2.73347994e27 6.39440845e27 4.86335108e27 C71 5.51982944e27 7.63567546e27 4.16119656e26 C73 2.9413266e27 7.47710103e27 1.53698552e25 C75 8.74573032e28 1.49764036e27 3.27774011e25 C77 7.16378196e27 5.65452184e27 9.56022723e25 C78 2.49097034e30 1.18516516e29 1.89603348e29 C80 1.94277476e30 6.00108899e30 1.24066875e28 C82 4.00548354e30 4.83120236e29 4.6099092e29 C84 4.09297855e30 4.89571367e29 1.18235574e28 C86 2.79175815e29 4.54130678e30 3.51054923e29 C88 3.46634258e29 5.10942244e29 3.26522615e28 C90 6.98750754e29 3.42818363e30 3.78078944e27 C92 2.78034443e32 7.07006655e32 8.91891738e32 C94 6.87000404e32 1.91992861e31 1.68682533e31 C96 1.31346242e31 3.33161247e31 5.25800206e31 C98 1.91021348e31 3.25505098e31 5.93272094e30 C100 1.22327875e31 1.57698995e31 1.54795048e29 C102 4.57847514e32 1.14929139e31 1.44958724e29 C104 2.87175318e31 3.24308979e31 3.25867584e29 C105 7.49234545e35 2.23778665e34 3.95765903e34 C107 1.36436739e34 5.50218186e35 4.14957517e33 C109 4.06669286e35 1.30072273e33 3.38295815e33 C111 1.44266678e34 2.12805306e33 1.03803927e33 C113 7.55798972e34 5.77392498e34 1.72138239e32 C115 1.24090466e33 4.04630096e35 3.80780335e32 C117 1.51672627e33 2.20736189e33 3.60119016e32 C119 2.54322977e33 1.94012119e33 3.7836678e31 C121 1.47062443e37 4.95634083e37 6.48736325e37 C123 6.76764495e37 2.62857791e36 3.07063488e36 C125 1.52780264e36 5.42778062e36 8.49236895e36 C127 2.43152897e36 6.8744822e36 6.411214e35 C129 3.9070541e36 2.64110857e36 3.34055113e34 C131 1.52422552e36 4.57033388e36 4.96867057e34 C133 6.94885323e37 1.42202438e35 3.35741831e34 C135 4.46614262e36 4.43260704e36 1.41983923e33 C136 5.82720549e40 1.2738577e39 2.95962778e39 C138 1.48616538e39 4.40022068e40 4.81277463e38 C140 1.59901737e39 1.67191433e38 6.61371003e38 C142 4.27476461e39 3.36569747e38 8.78235469e38 C144 7.9967858e39 2.28602413e38 3.4335812e37 C146 2.28492536e38 1.51730517e39 1.52442242e36 C148 1.59254776e38 1.46051228e38 1.97429432e36 C150 2.45997969e38 2.36937048e38 1.26580266e36 C152 3.70175785e38 4.00174707e39 1.93212266e36

(296) TABLE-US-00087 TABLE 3d for FIG. 26 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2088.89838200 C7 3.42683525e08 C9 1.6512688e08 C10 4.38584664e11 C12 4.18259048e11 C14 4.6250256e12 C16 2.38962576e14 C18 1.19663942e13 C20 2.61037397e13 C21 2.63044596e17 C23 2.37150015e17 C25 1.57559118e16 C27 4.7889248e16 C29 7.53232216e20 C31 2.05517927e19 C33 1.61629336e19 C35 1.45937682e18 C36 4.9764225e23 C38 3.27842891e22 C40 2.80802645e21 C42 2.769078e21 C44 1.47214512e21 C46 4.70047246e25 C48 7.39186519e24 C50 7.57901529e23 C52 1.65362047e22 C54 1.09834948e22 C55 3.21208271e27 C57 5.61919098e27 C59 1.22809043e25 C61 5.60328258e25 C63 5.47540805e25 C65 1.79792769e25 C67 4.27223866e31 C69 1.52895416e28 C71 1.99104409e27 C73 8.52429426e27 C75 1.37557711e26 C77 4.93968315e27 C78 6.87550869e32 C80 7.80050004e32 C82 2.51344446e30 C84 2.2898419e29 C86 6.02505261e29 C88 3.61828628e29 C90 5.5528325e30 C92 9.50562723e36 C94 1.49044558e33 C96 2.78503789e32 C98 1.77498716e31 C100 5.21503374e31 C102 5.64843247e31 C104 1.0992411e31 C105 6.42767711e37 C107 1.21466068e36 C109 2.44962564e35 C111 3.69492236e34 C113 1.7711647e33 C115 3.09168063e33 C117 1.83366676e33 C119 1.3402897e34 C121 6.32273889e41 C123 7.53170421e39 C125 1.44659913e37 C127 1.19754969e36 C129 5.25380881e36 C131 1.09748045e35 C133 9.51371783e36 C135 1.14567726e36 C136 2.32228213e42 C138 8.71321698e42 C140 1.04819209e40 C142 2.03692092e39 C144 1.44529556e38 C146 4.48708715e38 C148 6.21272731e38 C150 3.74464272e38 C152 8.57142389e39

(297) TABLE-US-00088 TABLE 4a for FIG. 26 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 786.31794313 M9 0.00000000 135.66761714 90.09404872 M8 0.00000000 80.64099022 1189.77813151 M7 0.00000000 15.95855480 1398.24950705 M6 0.00000000 93.52154823 1507.83829965 M5 0.00000000 413.44248899 1650.69955943 M4 0.00000000 950.27772844 1645.50394918 M3 0.00000000 1417.56980610 1433.50578895 M2 0.00000000 1602.36234269 1221.51469689 Stop 0.00000000 1657.11014994 1042.75065199 M1 0.00000000 1849.90639774 413.22704495 Object 0.00000000 1995.41823598 2076.33636439

(298) TABLE-US-00089 TABLE 4b for FIG. 26 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 5.51329727 0.00000000 0.00000000 M9 191.07732290 0.00000000 0.00000000 M8 86.94524857 0.00000000 0.00000000 M7 58.89543640 0.00000000 0.00000000 M6 34.54583072 0.00000000 0.00000000 M5 11.75436531 0.00000000 0.00000000 M4 12.47852673 0.00000000 0.00000000 M3 36.66195105 0.00000000 0.00000000 M2 60.94687944 0.00000000 0.00000000 Stop 17.62929935 180.00000000 0.00000000 M1 186.01364938 0.00000000 0.00000000 Object 0.00029494 0.00000000 0.00000000

(299) TABLE-US-00090 TABLE 5 for FIG. 26 Surface Angle of incidence[deg] Reflectivity M10 5.47743096 0.66257916 M9 0.16980600 0.66566578 M8 75.61143735 0.81411830 M7 76.33505862 0.82576260 M6 79.43553650 0.87079247 M5 76.98906045 0.83587884 M4 78.63034221 0.85975915 M3 78.33822296 0.85565285 M2 77.33481505 0.84108094 M1 10.82988596 0.65263931 Overall transmission 0.0872

(300) TABLE-US-00091 TABLE 6 for FIG. 26 X[mm] Y[mm] Z[mm] 0.00000000 55.07179086 0.00000000 28.32134635 54.58202803 0.00000000 55.98211712 53.09558841 0.00000000 82.33019561 50.57144987 0.00000000 106.73054258 46.97017287 0.00000000 128.57548660 42.28058930 0.00000000 147.29804478 36.53990071 0.00000000 162.38870287 29.84523566 0.00000000 173.41580382 22.35491655 0.00000000 180.04860871 14.27850894 0.00000000 182.08062285 5.85873273 0.00000000 179.44972021 2.65150686 0.00000000 172.25003968 11.00899969 0.00000000 160.72981012 18.99114170 0.00000000 145.27218516 26.39671205 0.00000000 126.36269179 33.04140748 0.00000000 104.55198226 38.75465411 0.00000000 80.42276570 43.38151418 0.00000000 54.56592829 46.78945614 0.00000000 27.56670420 48.87682670 0.00000000 0.00000000 49.57985235 0.00000000 27.56670420 48.87682670 0.00000000 54.56592829 46.78945614 0.00000000 80.42276570 43.38151418 0.00000000 104.55198226 38.75465411 0.00000000 126.36269179 33.04140748 0.00000000 145.27218516 26.39671205 0.00000000 160.72981012 18.99114170 0.00000000 172.25003968 11.00899969 0.00000000 179.44972021 2.65150686 0.00000000 182.08062285 5.85873273 0.00000000 180.04860871 14.27850894 0.00000000 173.41580382 22.35491655 0.00000000 162.38870287 29.84523566 0.00000000 147.29804478 36.53990071 0.00000000 128.57548660 42.28058930 0.00000000 106.73054258 46.97017287 0.00000000 82.33019561 50.57144987 0.00000000 55.98211712 53.09558841 0.00000000 28.32134635 54.58202803 0.00000000

(301) The projection optical unit 31 has an overall transmission of 8.72%.

(302) An image-side numerical aperture of the projection optical unit 31 is 0.55. The reduction factor .sub.x in the first imaging light plane xz is 4. The reduction factor .sub.y in the second imaging light plane yz is 7.5.

(303) An object-side chief ray angle CRA is 5.0. A maximum obscuration of the entry pupil is 16%. An object-image offset d.sub.OIS is approximately 3230 mm. The mirrors of the projection optical unit 31 can be housed in a cuboid with xyz-edge lengths of 891 mm2395 mm1615 mm.

(304) In the projection optical unit 31, the object plane 5 extends parallel to the image plane 9.

(305) A working distance between the mirror M10 closest to the wafer and the image plane 9 is 65 mm. A mean wavefront aberration rms is 7.65 m.

(306) The aperture stop AS is arranged in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 31. The imaging light beam is completely accessible in the region of the aperture stop AS.

(307) A further embodiment of a projection optical unit 32, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 29 to 31. Components and functions which were already explained above in the context of FIGS. 1 to 28 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(308) FIG. 29 shows a meridional section of the projection optical unit 32. FIG. 30 shows a sagittal view of the projection optical unit 32. FIG. 31 shows, once again, the boundary contours of the reflection surfaces of the seven mirrors M1 to M7 of the projection optical unit 32.

(309) The projection optical unit 32 has three NI mirrors, namely the mirrors M1, M6 and M7. The projection optical unit 32 has four GI mirrors, namely the mirrors M2 to M5.

(310) The mirrors M2 to M5 all have the same direction in terms of the mirror deflection effect. In this respect, the projection optical unit 32 is similar to the projection optical unit 26 according to FIGS. 14 to 16.

(311) The mirrors M1 to M7 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1), specified above, applies.

(312) The following table once again shows the mirror parameters of mirrors M1 to M7 of the projection optical unit 32.

(313) TABLE-US-00092 M1 M2 M3 M4 M5 M6 M7 Maximum 17.4 76.8 74.4 73.1 77.0 14.7 8.0 angle of incidence [] Extent of the reflection 376.0 475.6 562.6 479.7 181.9 468.4 902.7 surface in the x- direction [mm] Extent of the reflection 182.5 372.5 198.5 263.3 288.3 109.2 874.7 surface in the y- direction [mm] Maximum 376.1 476.1 562.6 479.7 294.6 468.4 903.2 mirror diameter [mm]

(314) Six of the mirrors M1 to M7 of the projection optical unit 32 have a y/x-aspect ratio that is less than 1. The y/x-aspect ratio of the mirror M5 is less than 1.6.

(315) The last mirror M7 in the imaging beam path has the largest maximum diameter, measuring 903.2 mm. The maximum diameters of all other mirrors M1 to M6 are less than 600 mm. Five of the seven mirrors have a maximum diameter that is less than 500 mm.

(316) Once again, the projection optical unit 32 has exactly one first plane intermediate image 18 in the region of the passage opening 17 in the mirror M7 and two second plane intermediate images 19, 20. The first of the two second plane intermediate images 19 lies between the mirrors M3 and M4 in the imaging beam path. The second of the two second plane intermediate images 20 lies between the mirrors M4 and M5 in the imaging beam path.

(317) An image-side numerical aperture of the projection optical unit 32 is 0.45. The reduction factor .sub.x in the first imaging light plane xz is 4. The reduction factor .sub.y in the second imaging light plane yz is 8.

(318) An object-side chief ray angle CRA is 5.2. An object-image offset d.sub.OIS is approximately 2470 mm.

(319) A working distance between the mirror M7 closest to the wafer and the image plane 9 is 87 mm. A mean wavefront aberration rms is 30.60 m.

(320) The aperture stop AS is arranged in the imaging light beam path between the mirrors M1 and M2 in the projection optical unit 32. The imaging light beam is completely accessible in the region of the aperture stop AS.

(321) A further embodiment of a projection optical unit 33, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 32 and 34. Components and functions which were already explained above in the context of FIGS. 1 to 31 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(322) The projection optical unit 33 according to FIGS. 32 and 34 reduces by a factor of 4 in the sagittal plane xz and by a factor of 8 in the meridional plane yz.

(323) FIG. 32 shows the projection optical unit 33 in a meridional section, i.e. the beam path of the imaging light 3 (cf. individual rays 15 in FIG. 2) in the yz plane. FIG. 34 shows the projection optical unit 33 in a view in which the individual rays 15 are projected onto the xz plane, i.e. in a sagittal view. The meridional plane yz is also referred to as the second imaging light plane. A first imaging light plane xz.sub.HR is the plane which is spanned at the respective location of the beam path of the imaging light 3 by the first Cartesian object field coordinate x and a current imaging light main propagation direction z.sub.HR. The imaging light main propagation direction z.sub.HR is the beam direction of a chief ray 16 of a central field point. As a rule, this imaging light main propagation direction z.sub.HR changes at each mirror reflection at the mirrors M1 to M6. This change can be described as a tilt of the current imaging light main propagation direction z.sub.HR about the first Cartesian object field coordinate x about a tilt angle which equals the deflection angle of this chief ray 16 of the central field point at the respectively considered mirror M1 to M6. The respective first imaging light planes xz.sub.HR are indicated by dashed lines in FIG. 32 and are perpendicular to the plane of the drawing (yz plane) in each case.

(324) Subsequently, the first imaging light playing xz.sub.HR is also referred to as first imaging light plane xz for simplification purposes.

(325) The second imaging light plane yz likewise contains the imaging light main propagation direction z.sub.HR and is perpendicular to the first imaging light plane xz.sub.HR.

(326) Since the projection optical unit 33 is only folded in the meridional plane yz, the second imaging light plane yz coincides with the meridional plane.

(327) FIG. 32 depicts the beam path of in each case three individual rays 15 emanating from three object field points which are spaced apart from one another in the y-direction in FIG. 32. What is depicted are the chief rays 16, i.e. the individual rays 15 which pass through the center of a pupil in a pupil plane of the projection optical unit 33, and in each case an upper coma ray and a lower coma ray of these two object field points. Proceeding from the object field 4, the chief rays 16 include an angle CRA of 5.2 with a normal of the object plane 5.

(328) The object plane 5 lies parallel to the image plane 9.

(329) The projection optical unit 33 has an image-side numerical aperture of 0.55.

(330) The projection optical unit 33 according to FIG. 32 has a total of six mirrors, which, proceeding from the object field 4, are numbered M1 to M6 in the sequence of the beam path of the individual rays 15.

(331) FIG. 32 depicts sections of the calculated reflection surfaces of the mirrors M1 to M6. A portion of these calculated reflection surfaces is used. Only this actually used region of the reflection surfaces, plus an overhang, is actually present in the real mirrors M1 to M6. These used reflection surfaces are carried in a known manner by mirror bodies.

(332) In the projection optical unit 33 according to FIG. 32, all mirrors M1 to M6 are configured as mirrors for normal incidence, that is to say as mirrors onto which the imaging light 3 impinges with an angle of incidence that is smaller than 45. Thus, overall, the projection optical unit 7 according to FIG. 32 has six mirrors M1 to M6 for normal incidence. These mirrors for normal incidence are also referred to as NI (normal incidence) mirrors.

(333) The projection optical unit 7 does not have a mirror for grazing incidence (GI mirror, grazing incidence mirror).

(334) In principle, all described exemplary embodiments of the projection optical units can be mirrored about a plane extending parallel to the xz-plane without this changing fundamental imaging properties in the process.

(335) The mirrors M1 to M6 carry a coating that optimizes the reflectivity of the mirrors M1 to M6 for the imaging light 3. These highly reflective layers can be embodied as multi-ply layers, where successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multi-ply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon. These may contain additional separation layers made of e.g. C (carbon), B.sub.4C (boron carbide) and can be terminated by a protective layer or a protective layer system toward the vacuum.

(336) Further information in respect of the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A.

(337) An overall reflectivity or system transmission of the projection optical unit 33, emerging as a product of the reflectivities of all mirrors M1 to M8 of the projection optical unit 33, is approximately R=7.0%.

(338) The mirror M6, that is to say the last mirror upstream of the image field 8 in the imaging beam path, has a passage opening 17 for the passage of the imaging light 3 which is reflected from the antepenultimate mirror M4 toward the penultimate mirror M5. The mirror M6 is used in a reflective manner around the passage opening 17. None of the other mirrors M1 to M5 have passage openings and the mirrors are used in a reflective manner in a continuous region without gaps.

(339) In the first imaging light plane xz, the projection optical unit 33 has exactly one first plane intermediate image 18 in the imaging light beam path between the mirrors M4 and M5. This first plane intermediate image 18 lies in the region of the passage opening 17. A distance between the passage opening 17 and the image field 8 is more than four times greater than a distance between the passage opening 17 and the first plane intermediate image 18.

(340) In the second imaging light plane yz that is perpendicular to the first imaging light plane xz, the imaging light 3 passes through exactly two second plane intermediate images 19 and 20. The first of these two second plane intermediate images 19 lies between the mirrors M1 and M2 in the imaging light beam path. The other one of the two second plane intermediate images 20 lies between the mirrors M4 and M5 in the imaging light beam path, in the region of the first plane intermediate image 18. Thus, both the first plane intermediate image 18 and the second plane intermediate image 20 lie in the region of the passage opening 17 in the mirror M6. The entire beam of the imaging light 3 has a small diameter at the location of the passage opening 17. Accordingly, the diameter of the passage opening 17 can be selected to be small without curtailing the imaging light 3 in the partial beam path between the mirrors M4 and M5.

(341) The number of the first plane intermediate images, i.e. exactly one first plane intermediate image in the projection optical unit 33, and the number of the second plane intermediate images, i.e. exactly two second plane intermediate images in the projection optical unit 33, differ from one another in the projection optical unit 33. In the projection optical unit 33, this number of intermediate images differs by exactly one.

(342) The second imaging light plane yz, in which the greater number of intermediate images, namely the two second plane intermediate images 19 and 20, are present, coincides with the folding plane yz of the mirrors M1 to M6. This folding plane is the plane of incidence of the chief ray 16 of the central field point upon reflection at the respective mirror M1 to M6. The second plane intermediate images are not, as a rule, perpendicular to the chief ray 16 of the central field point which defines the imaging light main propagation direction z.sub.HR. An intermediate image tilt angle, i.e. a deviation from this perpendicular arrangement, is arbitrary as a matter of principle and may lie between 0 and +/89.

(343) Auxiliary devices 18a, 19a, 20a can be arranged in the region of the intermediate images 18, 19, 20. These auxiliary devices 18a to 20a can be field stops for defining, at least in sections, a boundary of the imaging light beam. A field intensity prescription device in the style of an UNICOM, in particular with finger stops staggered in the x-direction, can also be arranged in one of the intermediate image planes of the intermediate images 18 to 20.

(344) The mirrors M1 to M6 are embodied as free-form surfaces which cannot be described by a rotationally symmetric function. Other embodiments of the projection optical unit 33, in which at least one of the mirrors M1 to M6 is embodied as a rotationally symmetric asphere, are also possible. An asphere equation for such a rotationally symmetric asphere is known from DE 10 2010 029 050 A1. It is also possible for all mirrors M1 to M6 to be embodied as such aspheres.

(345) The following table summarizes the parameters maximum angle of incidence, extent of the reflection surface in the x-direction, extent of the reflection surface in the y-direction and maximum mirror diameter for the mirrors M1 to M6 of the projection optical unit 33:

(346) TABLE-US-00093 M1 M2 M3 M4 M5 M6 Maximum angle of 12.7 12.5 17.5 13.5 22.0 10.9 incidence [] Extent of the 763.7 426.9 524.9 913.0 407.7 793.7 reflection surface in the x-direction [mm] Extent of the reflection 315.7 148.3 256.7 354.4 206.6 767.7 surface in the y-direction [mm] Maximum mirror 763.9 426.9 524.9 913.0 407.8 793.8 diameter [mm]

(347) A maximum angle of incidence of the imaging light on all mirrors M1 to M6 is less than 25. This maximum angle of incidence is present on the mirror M5 and is 22.0.

(348) The maximum angle of incidence of the imaging light 3 on the first four mirrors M1 to M4 in the imaging light beam path downstream of the object field 4 is less than 20. This largest angle of incidence on the first four mirrors M1 to M4 is present on the mirror M3 and is 17.5.

(349) A y/x-aspect ratio deviates most strongly from the value of 1 at the mirrors M4 of the mirrors M1 to M6 of the projection optical unit 33 and there it has a value of approximately 1:2.6. In all other mirrors, the y/x-aspect ratio lies in the range between 1:1 and 1:2.5. An x/y-aspect ratio of the mirrors M1 to M4 is greater than 2:1 in each case.

(350) The mirror M4 has the largest maximum mirror diameter with a diameter of 913 mm. None of the other mirrors M1 to M3, M5, M6 have a maximum diameter which is greater than 800 mm.

(351) A pupil-defining aperture stop AS is arranged in the imaging light beam path between the mirrors M2 and M3 in the projection optical unit 33. In the region of the aperture stop AS, the entire imaging light beam is accessible over its entire circumference. The aperture stop AS restricts the entire external cross section of the entire imaging light beam. The aperture stop AS is arranged spatially adjacent to the second plane intermediate image 19. This arrangement renders it possible to fold the imaging light partial beam between the mirrors M1 and M2 little in relation to the imaging light partial beam between the mirrors M2 and M3, and so a correspondingly low maximum angle of incidence of the entry rays of the imaging light 3 on the mirror M2 results.

(352) The optical design data from the reflection surfaces of the mirrors M1 to M6 from the projection optical unit 33 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(353) TABLE-US-00094 TABLE 1 for FIG. 32 Exemplary embodiment FIG. 32 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.025 mm Field curvature 0.012055 1/mm rms 14.8 ml Stop AS

(354) TABLE-US-00095 TABLE 2 for FIG. 32 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M6 858.8749765 0.0023024 737.8428816 0.0027415 REFL M5 11682.0944369 0.0001709 534.1551388 0.0037506 REFL M4 1809.2188844 0.0010846 1922.0843519 0.0010605 REFL M3 6440.5662221 0.0003000 50750.8327561 0.0000408 REFL M2 4674.6964470 0.0004248 1689.0780794 0.0011926 REFL M1 3024.6211530 0.0006495 1563.8351466 0.0013020 REFL

(355) TABLE-US-00096 TABLE 3a for FIG. 32 Coefficient M6 M5 M4 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 858.87497650 11682.09444000 1809.21888400 C7 1.75601165e08 9.76351323e07 9.24894814e09 C9 4.12151659e08 1.56366742e06 1.30495858e08 C10 2.3717266e11 4.05325511e10 5.79972529e12 C12 7.77186732e11 8.75399624e10 3.79452218e12 C14 9.96610891e12 4.36073106e09 4.96523891e13 C16 4.78999259e14 1.32627983e12 3.34101424e15 C18 3.80178838e14 2.2544009e12 4.32759723e15 C20 6.511239e14 1.98197357e11 1.12275782e14 C21 3.92631731e17 5.49613894e16 2.56249544e18 C23 1.90245505e16 4.01086987e15 4.40565287e18 C25 1.74273842e16 1.5885968e14 8.76955689e18 C27 2.10056418e17 7.29644441e14 4.39478392e17 C29 6.92447499e20 7.26806853e19 1.16221193e21 C31 9.67320853e22 9.07342399e18 2.09560033e20 C33 1.58051548e19 8.64687575e17 9.71341566e20 C35 1.31073342e19 6.14527486e16 1.0702907e19 C36 7.37235909e23 1.62385505e21 1.65841605e24 C38 3.82619485e22 2.24043808e21 2.45488766e24 C40 6.28798296e22 9.40837613e20 4.20470613e23 C42 3.62609295e22 1.26850842e18 3.32122136e22 C44 1.13486477e23 2.74573501e18 1.21683021e22 C46 1.37331048e25 4.2081407e23 5.7969842e27 C48 1.47293299e25 2.88686689e22 2.23585834e26 C50 2.07891229e25 2.45657195e22 8.67407678e25 C52 5.16694591e25 4.84753531e21 2.97297137e24 C54 2.27538477e25 6.32501824e21 1.05704009e23 C55 3.24119108e29 3.08147298e26 5.64088431e30 C57 6.41610415e28 3.57346972e25 2.00859294e29 C59 1.69412665e27 2.06843583e24 9.52490119e29 C61 1.72411595e27 2.47503441e24 1.97416699e27 C63 5.7995256e28 4.01267717e23 3.83090877e26 C65 1.635162e29 4.62428375e23 1.21532476e25 C67 1.22726086e31 1.2494157e27 6.17049136e32 C69 2.84133671e31 5.44453482e27 7.76588296e31 C71 4.44381319e31 3.78606642e26 2.18932157e31 C73 1.77800746e30 4.15333379e26 1.78648032e29 C75 1.6160079e30 1.24201006e25 3.46971259e29 C77 3.10049067e31 3.13835508e25 2.00008177e29 C78 4.00765463e34 3.71999699e31 2.61982192e35 C80 2.12693373e33 8.2624255e30 5.31477481e34 C82 4.00467472e33 9.39873312e29 8.16603132e33 C84 6.27063161e33 1.0314431e28 1.14008163e32 C86 3.54293249e33 9.4886599e28 3.12780164e32 C88 9.29818695e34 5.58939473e27 2.06573781e30 C90 7.896513e34 1.32131239e27 6.03635915e30 C92 5.73838546e37 1.70280303e32 2.4443233e37 C94 3.39136484e36 9.34845871e32 5.29050095e36 C96 2.86917081e36 5.06073109e31 3.61960832e35 C98 5.07534678e37 3.15612468e30 4.78854298e35 C100 2.99347712e36 6.44314e30 5.76086779e35 C102 1.31255149e36 3.67811047e29 4.76487931e34 C104 1.74787841e36 1.59011113e29 2.31589865e32 C105 1.31762349e40 1.09344483e36 5.14787253e41 C107 3.54057177e39 1.10846109e34 2.64963079e39 C109 1.78073131e39 1.72014461e33 6.49527987e38 C111 1.55177824e39 3.05219736e33 3.04866424e37 C113 9.44170173e40 1.606718e32 3.01731009e37 C115 6.64945728e39 5.29558524e33 6.40489097e37 C117 3.11940525e39 7.18345117e32 4.90591508e35 C119 5.50110677e39 7.25898814e31 6.03700342e35 C121 9.71158605e43 6.95775525e38 3.26101881e43 C123 7.23217134e43 3.34409103e37 1.06619266e41 C125 5.69478444e43 2.68711867e36 1.08286695e40 C127 1.01640903e41 1.59432765e35 5.65210621e40 C129 3.54945098e41 6.92583272e35 6.24703952e40 C131 5.75167037e41 1.44445437e34 5.42019444e39 C133 3.08126364e41 1.06727558e33 1.50612862e38 C135 2.19317005e42 4.78626916e33 4.47539966e37 C136 2.9364696e46 2.35545286e41 3.64930823e47 C138 1.90854146e44 2.28045861e40 4.04460613e45 C140 4.87396267e44 1.12315129e38 1.50547812e43 C142 1.22392623e43 5.18269145e39 1.08187079e42 C144 1.5701492e43 8.12616097e38 2.14893577e42 C146 1.41544082e43 7.94029513e37 2.09572031e41 C148 4.16578745e44 1.02187357e37 5.68091764e42 C150 4.93563592e45 2.08165148e36 4.3697037e40 C152 1.23605467e44 9.57945472e36 5.32462749e40

(356) TABLE-US-00097 TABLE 3b for FIG. 32 Coef- ficient M3 M2 M1 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6440.56622200 4674.69644700 3024.62115300 C7 2.75621082e08 1.33344077e07 8.13680852e09 C9 2.13772967e07 4.88439323e07 5.25766875e08 C10 9.05428093e11 2.4651278e10 4.04575459e12 C12 9.97338804e11 3.42470844e10 1.29491379e11 C14 8.68032839e11 7.31944141e10 7.96400769e12 C16 2.05047244e13 1.75843577e13 5.544904e16 C18 1.34167844e13 1.38921296e12 7.29182129e15 C20 1.73209287e13 1.66984422e12 3.01026401e14 C21 9.16122712e17 4.83036548e16 8.06064519e19 C23 1.09772479e16 1.07200979e15 1.50707101e18 C25 7.56588666e16 5.73756053e15 8.45373733e18 C27 1.67309364e15 4.42677763e15 3.25143759e17 C29 2.16545447e19 1.13834484e18 9.71555651e22 C31 5.68407901e19 8.59930026e18 1.00947506e21 C33 6.38803875e18 1.94419133e17 2.20716112e20 C35 6.0317108e18 1.84553665e16 9.50209226e19 C36 4.37147715e22 8.94388533e22 3.17263448e25 C38 2.31254227e22 5.73932727e21 5.13351486e24 C40 4.04758904e21 1.11881151e20 3.52315788e23 C42 3.17472839e20 3.32163198e19 6.48990287e22 C44 9.85162714e20 1.8034724e18 7.74038563e21 C46 4.1324221e24 1.07264182e23 6.57538448e27 C48 1.08450683e23 1.14076514e22 1.23024327e27 C50 3.68038057e23 1.77193073e21 5.48205165e26 C52 2.16095044e22 6.33924939e21 2.14983022e24 C54 2.41539568e22 3.18513118e20 4.11656476e23 C55 5.4475152e27 8.76303942e27 2.46528392e30 C57 8.2180888e27 4.28356923e26 1.32430341e28 C59 1.53403997e25 9.18224618e25 1.73597019e28 C61 4.03258962e25 2.60047232e24 4.7745939e27 C63 3.53575651e24 7.63901326e23 6.04547381e26 C65 8.31549041e24 4.35078172e22 7.54618751e25 C67 9.87087274e29 3.56838335e28 8.88835362e32 C69 6.42776984e28 2.84407951e27 5.61337491e31 C71 1.01602965e27 4.57862438e26 4.00758063e30 C73 1.41613033e30 6.37072226e25 9.87094819e30 C75 4.43477538e27 1.92873559e24 1.24431428e28 C77 5.64483223e27 2.99431785e24 1.94178739e27 C78 6.57189519e32 3.55474086e32 4.93765851e36 C80 3.95411808e31 6.34983549e32 1.37798134e33 C82 6.45360265e30 5.97194435e30 1.79738233e33 C84 1.76221617e29 3.4243908e28 9.45814317e32 C86 4.93632546e29 2.90233773e27 4.84143104e31 C88 3.47366201e28 1.64734281e26 2.85035612e30 C90 5.69693718e28 8.7332442e26 3.51411701e29 C92 9.41428626e34 4.07301235e33 4.99363876e37 C94 9.52828137e33 3.91076643e32 6.51134396e36 C96 4.03443132e32 6.72956002e31 4.31274648e35 C98 8.16791536e32 1.07442969e29 2.93394382e34 C100 5.06109148e31 1.46674302e28 1.25604389e33 C102 2.27324283e30 4.12153973e28 4.12484361e33 C104 3.25497507e30 3.17476096e28 7.96225335e32 C105 2.84264594e37 8.01264065e37 6.15642053e41 C107 4.14759235e36 2.17790829e35 6.4351619e39 C109 1.13957341e34 3.89579308e34 2.3184794e38 C111 3.64220606e34 1.62536408e32 7.22249316e37 C113 4.64657733e34 1.53002667e31 5.7129879e36 C115 2.88642202e34 1.00791788e30 2.03780388e35 C117 7.44826089e33 4.72609071e31 5.56109055e35 C119 1.00966682e32 7.69819227e30 6.86936805e34 C121 3.10161513e39 1.4205369e38 9.82000697e43 C123 4.61926649e38 8.58182682e38 2.14923463e41 C125 2.73215469e37 4.42601259e36 1.52471202e40 C127 9.55584866e37 5.38081705e35 1.039324e39 C129 4.89550473e36 1.37871892e33 4.79859802e39 C131 2.76267148e35 1.46401094e32 3.70949403e38 C133 1.08744782e34 3.75359399e32 5.38604799e38 C135 1.43759826e34 3.76390962e32 1.31857729e36 C136 3.12192213e43 8.75181853e42 2.53432908e46 C138 1.15972236e41 2.91207673e40 1.15659019e44 C140 6.88975315e40 6.99129714e39 4.69836892e44 C142 2.90125414e39 2.13001905e37 1.46558091e42 C144 4.26224447e39 2.15878626e36 2.57968797e41 C146 2.12388457e38 1.92354163e35 8.70323809e41 C148 1.00587068e37 1.25257261e34 3.0826717e40 C150 2.69054759e37 1.60142154e34 2.17287446e40 C152 3.45264757e37 4.28993407e35 3.7668963e39

(357) TABLE-US-00098 TABLE 4a for FIG. 32 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M6 0.00000000 0.00000000 680.26363148 M5 0.00000000 175.01413342 115.40717146 0 0.00000000 67.03531830 696.81352059 M4 0.00000000 177.89118720 2015.60763050 M3 0.00000000 463.67514111 1019.61228072 Stop 0.00000000 437.35060541 1536.16364485 M2 0.00000000 411.13780579 2050.52247554 M1 0.00000000 916.20837074 360.59865458 Object 0.00000000 1103.19655335 2500.12593849

(358) TABLE-US-00099 TABLE 4b for FIG. 32 Surface TLA [deg] TLB [deg] TLC [deg] Image 0.00000000 0.00000000 0.00000000 M6 8.60749020 0.00000000 0.00000000 M5 13.86804194 180.00000000 0.00000000 Stop 1.91361326 0.00000000 0.00000000 M4 21.65427373 0.00000000 0.00000000 M3 17.85241632 180.00000000 0.00000000 AS 1.32428889 0.00000000 0.00000000 M2 9.77865522 0.00000000 0.00000000 M1 5.82256804 180.00000000 0.00000000 Object 0.00521430 0.00000000 0.00000000

(359) TABLE-US-00100 TABLE 5 for FIG. 32 Surface Angle of incidence [deg] Reflectivity M6 8.60749020 0.65767358 M5 3.34693847 0.66458709 M4 11.13317026 0.65184268 M3 14.93502767 0.63931878 M2 6.86126657 0.66070757 M1 10.81735374 0.65267164 Overall transmission 0.0785

(360) TABLE-US-00101 TABLE 6 for FIG. 32 X [mm] Y [mm] Z [mm] 0.00000000 112.29771418 0.00000000 33.95300806 110.50829091 0.00000000 67.19709735 105.23305301 0.00000000 99.02112992 96.74222105 0.00000000 128.70836648 85.46276877 0.00000000 155.53408145 71.94865414 0.00000000 178.77033514 56.83454541 0.00000000 197.70656829 40.78032165 0.00000000 211.69220377 24.42406785 0.00000000 220.19846094 8.34604314 0.00000000 222.88505781 6.96008041 0.00000000 219.65050117 21.10835728 0.00000000 210.64850400 33.82750503 0.00000000 196.26500687 44.95249418 0.00000000 177.06410535 54.40979859 0.00000000 153.72103885 62.20042270 0.00000000 126.96076580 68.38008729 0.00000000 97.51311407 73.03741008 0.00000000 66.08745553 76.27157774 0.00000000 33.36449943 78.17125573 0.00000000 0.00000000 78.79727683 0.00000000 33.36449943 78.17125573 0.00000000 66.08745553 76.27157774 0.00000000 97.51311407 73.03741008 0.00000000 126.96076580 68.38008729 0.00000000 153.72103885 62.20042270 0.00000000 177.06410535 54.40979859 0.00000000 196.26500687 44.95249418 0.00000000 210.64850400 33.82750503 0.00000000 219.65050117 21.10835728 0.00000000 222.88505781 6.96008041 0.00000000 220.19846094 8.34604314 0.00000000 211.69220377 24.42406785 0.00000000 197.70656829 40.78032165 0.00000000 178.77033514 56.83454541 0.00000000 155.53408145 71.94865414 0.00000000 128.70836648 85.46276877 0.00000000 99.02112992 96.74222105 0.00000000 67.19709735 105.23305301 0.00000000 33.95300806 110.50829091 0.00000000

(361) An overall reflectivity of the projection optical unit 33 is approximately 7.85%.

(362) The reference axes of the mirrors are generally tilted with respect to a normal of the image plane 9, as is made clear by the tilt values in the tables.

(363) The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1 mm. The projection optical unit 33 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(364) An edge of a stop surface of the stop (cf., also, table 6 for FIG. 32) emerges from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate at the field center point in the direction of the stop surface with a complete image-side telecentric aperture. When the stop is embodied as an aperture stop, the edge is an inner edge.

(365) The stop AS can lie in a plane or else have a three-dimensional embodiment. The extent of the stop AS can be smaller in the scan direction (y) than in the cross scan direction (x).

(366) An installation length of the projection optical unit 33 in the z-direction, i.e. a distance between the object plane 5 and the image plane 9, is approximately 2500 mm.

(367) In the projection optical unit 33, a pupil obscuration is 15% of the entire aperture of the entry pupil. Thus, less than 15% of the numerical aperture is obscured as a result of the passage opening 17. The obscuration edge is constructed in a manner analogous to the construction of the stop edge explained above in conjunction with the stop 18. In the case of an embodiment as an obscuration stop, the edge is an outer edge of the stop. In a system pupil of the projection optical unit 33, a surface which cannot be illuminated due to the obscuration is less than 0.15.sup.2 of the surface of the overall system pupil. The non-illuminated surface within the system pupil can have a different extent in the x-direction than in the y-direction. The non-illuminated surface in the system pupil can be round, elliptical, square or rectangular. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil.

(368) A y-distance d.sub.OIS (object-image offset) between a central object field point and a central image field point is approximately 1100 mm. A working distance between the mirror M5 and the image plane 9 is 90 mm.

(369) The mirrors of the projection optical unit 33 can be housed in a cuboid with the xyz-edge lengths of 913 mm1418 mm1984 mm.

(370) The projection optical unit 33 is approximately telecentric on the image side.

(371) A further embodiment of a projection optical unit 34, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 33 and 35. FIG. 33 shows, once again, a meridional section and FIG. 35 shows a sagittal view of the projection optical unit 34. Components and functions which were already explained above in the context of FIGS. 1 to 32 and 34 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(372) The mirrors M1 to M6 are once again embodied as free-form surface mirrors, for which the free-form surface equation (1) specified above applies.

(373) The following table once again shows the mirror parameters of mirrors M1 to M6 of the projection optical unit 34.

(374) TABLE-US-00102 M1 M2 M3 M4 M5 M6 Maximum angle of 9.0 14.2 16.6 11.3 21.4 9.7 incidence [] Extent of the 509.7 525.9 442.0 857.3 464.6 950.6 reflection surface in the x-direction [mm] Extent of the reflection 210.7 153.5 171.9 293.9 172.2 917.1 surface in the y-direction [mm] Maximum mirror 509.7 526.0 442.1 857.3 464.6 950.9 diameter [mm]

(375) None of the mirrors M1 to M6 has a y/x-aspect ratio of its reflection surface that is greater than 1. The mirror M2 has the smallest y/x-aspect ratio at approximately 1:3.4.

(376) Here, the mirror M6 has the largest maximum mirror diameter, measuring 950.9 mm.

(377) The optical design data from the projection optical unit 34 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(378) TABLE-US-00103 TABLE 1 for FIG. 33 Exemplary embodiment FIG. 33 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.012345 1/mm rms 15.3 ml Stop AS

(379) TABLE-US-00104 TABLE 2 for FIG. 33 Operating Surface Radius_x [mm] Power_x [1/mm] Radius_y [mm] Power_y [1/mm] mode M6 1006.7284257 0.0019693 842.2517827 0.0023954 REFL M5 5965.3172078 0.0003353 391.8243663 0.0051043 REFL M4 1561.8151501 0.0012619 1649.3044398 0.0012306 REFL M3 1880.6366574 0.0010299 3383.4646405 0.0006104 REFL M2 5843.2989604 0.0003379 914.8700717 0.0022144 REFL M1 4100.6049314 0.0004851 898.9161353 0.0022371 REFL

(380) TABLE-US-00105 TABLE 3a for FIG. 33 Coef- ficient M6 M5 M4 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1006.72842600 5965.31720800 1561.81515000 C7 2.36080773e08 1.28554798e06 3.94514132e09 C9 4.2069464e09 1.07681842e06 1.62903175e09 C10 1.17644873e11 4.17941495e10 6.48276378e12 C12 3.59134517e11 2.88742693e09 1.76483997e11 C14 1.63305797e11 6.95203918e09 3.4186017e13 C16 3.32910335e14 1.11774422e12 7.60337079e16 C18 3.36483434e14 1.32703447e11 6.40178912e15 C20 7.90772381e15 1.3867734e11 2.20113512e14 C21 2.39696783e17 7.7521509e16 5.4865664e18 C23 7.21389701e17 1.13884842e14 4.97674411e18 C25 8.58520679e17 5.1496675e14 1.61922965e17 C27 2.49737385e17 1.03640903e13 5.2042106e17 C29 2.36771533e20 6.69920634e18 2.46740499e21 C31 7.23068755e20 7.48829488e17 2.94884664e20 C33 5.04364058e20 3.19263293e16 9.68386762e20 C35 8.81491788e21 4.7637767e17 1.61788245e19 C36 3.07931348e23 1.88599363e21 4.7228178e25 C38 1.2368233e22 3.86262162e20 1.5000994e23 C40 2.10717929e22 3.74624343e19 1.71575087e22 C42 1.55975256e22 5.55280341e19 2.29927658e21 C44 3.49712831e23 2.54793079e19 4.86801861e21 C46 2.66204224e26 6.027065e24 8.05564747e27 C48 1.06852252e25 1.35565132e22 2.12494726e26 C50 1.39905245e25 1.28558155e21 3.31373857e25 C52 7.38507052e26 3.91068516e21 5.70573409e24 C54 1.20370276e26 7.12291126e21 1.41345158e24 C55 2.69457175e29 2.23174837e27 2.1395474e30 C57 1.77986898e28 3.32509965e25 1.48447807e28 C59 3.66895205e28 3.53118757e24 3.27794124e28 C61 3.98218369e28 2.6586045e23 1.89615686e26 C63 2.03566054e28 4.0294128e23 1.00894697e25 C65 5.30268041e29 3.23594134e22 1.13309229e25 C67 3.0047318e32 2.9829458e28 1.83843732e32 C69 1.55074503e31 7.06201039e27 2.03057508e31 C71 4.70669939e31 7.46696177e26 1.53278455e30 C73 3.89482265e31 1.82406791e25 5.45541074e29 C75 8.18915595e32 8.6022715e25 3.66861957e28 C77 8.15530371e33 6.57527779e25 1.39584841e28 C78 3.3235481e35 6.71728717e32 1.15787845e35 C80 2.61100277e34 1.18245822e30 1.13061166e33 C82 1.07477883e33 3.624861e29 3.47838169e33 C84 1.84308773e33 9.0142297e29 5.12555002e32 C86 1.82743964e33 1.42012455e27 5.72799315e31 C88 9.28722157e34 1.85608864e27 1.62324547e30 C90 1.04744708e34 2.7671563e26 3.15634748e31 C92 1.28436626e37 3.28236635e33 4.59915186e38 C94 4.58925734e37 6.13084953e32 1.76190676e36 C96 1.46331065e37 1.19479671e30 1.11464545e35 C98 5.73381884e37 1.06320106e29 9.94287718e36 C100 2.03899668e37 2.83336892e29 1.19466153e33 C102 3.72313868e37 1.09821473e28 6.56891196e33 C104 1.33892457e37 8.26930634e29 6.75668551e34 C105 2.54605643e42 2.91865459e37 2.91255207e41 C107 4.2759669e40 4.89002957e36 3.18092396e39 C109 1.37326821e39 5.61432253e34 2.61564889e38 C111 2.26926013e39 8.66021369e33 3.59867394e38 C113 3.77714415e39 1.88255881e32 1.06600252e36 C115 3.89548381e39 7.64730421e32 6.80748387e36 C117 2.09996643e39 3.16857153e32 2.850714e36 C119 2.54320661e40 3.19444666e31 1.04473406e35 C121 1.21614444e43 2.32998757e38 0 C123 6.49368051e44 5.04254106e37 0 C125 2.89343618e42 7.30943297e36 0 C127 6.07402874e42 1.21067923e34 0 C129 6.32771343e42 7.23619769e34 0 C131 3.36969492e42 1.2428046e33 0 C133 2.104793e43 3.52791806e33 0 C135 1.77306314e43 1.02737596e32 0 C136 1.52575809e46 2.12924071e42 0 C138 2.30237851e45 2.07292225e40 0 C140 7.87878875e45 4.36510753e39 0 C142 1.5800379e44 9.4878367e38 0 C144 2.52175277e44 9.4252e37 0 C146 2.658207e44 3.21331684e36 0 C148 1.73727174e44 1.06350303e35 0 C150 6.65813017e45 1.05592399e35 0 C152 8.98636196e46 3.26212163e35 0

(381) TABLE-US-00106 TABLE 3b for FIG. 33 Coef- ficient M3 M2 M1 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1880.63665700 5843.29896000 4100.60493100 C7 4.94029343e08 1.49179578e07 7.73453613e09 C9 1.90649177e07 1.56715489e08 3.20483091e08 C10 8.97962559e11 1.04449418e10 2.45522201e11 C12 8.62966033e10 3.739312e12 1.01617201e10 C14 1.72078355e10 1.31318293e10 2.77000383e10 C16 2.00154532e13 9.73768186e14 2.03576356e14 C18 9.11364311e13 1.58355358e13 1.94910249e13 C20 2.01758014e12 4.96235302e13 6.81883948e13 C21 7.35882998e16 8.20220031e17 4.61681069e18 C23 4.83251272e16 1.51701684e16 7.82206035e18 C25 2.49131175e15 7.21394993e16 3.21596342e16 C27 4.5294101e15 2.73671786e15 1.27108558e15 C29 1.74504569e18 1.9860959e21 2.12228815e20 C31 2.18679872e18 5.75861209e19 2.22428091e19 C33 9.36508454e18 1.31083424e18 9.06535225e20 C35 4.96430229e17 3.13301142e17 3.51793744e17 C36 3.43328396e22 8.20150186e23 3.04376562e23 C38 1.35049644e20 1.73800191e21 1.58444309e22 C40 7.32106265e21 2.64009548e20 1.87047244e21 C42 4.07732261e19 2.4290507e19 1.91910499e20 C44 6.44543663e19 9.92250873e19 1.3098699e19 C46 1.1357514e23 6.85737803e25 6.72152116e26 C48 1.88750153e23 8.28542257e24 9.48692673e25 C50 2.43074745e22 1.86471291e22 2.91710329e24 C52 4.11977741e22 2.03147349e21 2.07056289e23 C54 4.49237652e21 3.61364485e23 2.45380768e23 C55 1.28868081e27 1.40543445e27 8.73981974e28 C57 3.3048524e25 3.74175772e26 2.95434759e28 C59 3.91588107e25 5.74632156e25 6.78617966e27 C61 1.12703785e23 9.65404462e24 5.41578074e25 C63 5.52941228e23 6.43759572e23 3.28650311e24 C65 1.17857183e24 2.55557626e22 1.29846463e24 C67 5.60276243e30 1.246671e29 2.14903234e30 C69 2.96093489e28 1.81147151e28 6.03676056e30 C71 1.53896678e26 1.04355606e27 6.52210129e29 C73 5.38762556e27 6.35307839e26 2.61271121e28 C75 7.03953591e26 3.37289815e25 3.72205453e28 C77 2.39732418e25 4.3699226e25 6.61454986e26 C78 7.38287739e32 5.15111147e33 7.78620254e33 C80 8.0679497e30 5.93676557e31 1.10593906e32 C82 1.86642027e29 7.6402297e30 7.5135761e31 C84 1.46666077e28 1.53054394e28 4.2156926e30 C86 1.16839579e27 1.93800725e27 7.20454782e29 C88 2.71039548e27 9.64306599e27 2.63101456e28 C90 5.57449245e27 3.35251116e26 1.62675507e28 C92 6.90715973e35 7.74524297e35 1.59436458e35 C94 3.53289956e33 9.77085827e34 6.04425154e35 C96 1.38988534e31 2.7791015e32 8.37212226e34 C98 1.05676201e30 4.47091465e32 4.218493e33 C100 2.8300685e31 4.8671863e30 9.32282295e33 C102 4.21395731e30 1.61442883e29 2.37304382e32 C104 4.27990879e30 4.06284648e29 3.24174527e30 C105 8.74018101e37 9.1640292e39 2.68034362e38 C107 7.20609305e35 3.31672266e36 6.17847878e38 C109 3.05138754e34 4.71797412e35 6.49183349e36 C111 1.16191956e33 6.0757407e34 1.55751393e35 C113 1.12796824e32 1.48310841e32 4.66813792e34 C115 4.60817817e32 1.3034314e31 2.94237332e33 C117 5.07248021e32 5.0498434e31 8.09943855e33 C119 3.25810602e31 1.65054488e30 1.34504174e32

(382) TABLE-US-00107 TABLE 4a for FIG. 33 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M6 0.00000000 0.00000000 823.56702252 M5 0.00000000 180.17345446 156.98468248 M4 0.00000000 344.49567167 2142.94126767 M3 0.00000000 169.32702293 1392.39086385 Stop 0.00000000 124.47525498 1855.02797681 M2 0.00000000 62.86723152 2490.50255031 M1 0.00000000 488.47152498 1529.14826845 Object 0.00000000 177.89305993 3000.03510500

(383) TABLE-US-00108 TABLE 4b for FIG. 33 Surface TLA [deg] TLB [deg] TLC [deg] Image 0.00000000 0.00000000 0.00000000 M6 7.56264709 0.00000000 0.00000000 M5 14.96206408 180.00000000 0.00000000 M4 24.59708091 0.00000000 0.00000000 M3 19.96636844 180.00000000 0.00000000 Stop 8.44368788 0.00000000 0.00000000 M2 14.70850835 0.00000000 0.00000000 M1 17.90125287 180.00000000 0.00000000 Object 16.92289808 0.00000000 0.00000000

(384) TABLE-US-00109 TABLE 5 for FIG. 33 Surface Angle of incidence [deg] Reflectivity M6 7.56264709 0.65958150 M5 0.16323010 0.66566562 M4 9.79824693 0.65514770 M3 14.42895939 0.64127863 M2 9.17109930 0.65652593 M1 5.97835478 0.66195441 Overall transmis- 0.0802

(385) TABLE-US-00110 TABLE 6 for FIG. 33 X [mm] Y [mm] Z [mm] 0.00000000 74.47687523 0.00000000 33.42303871 73.30016348 0.00000000 66.20895326 69.81789891 0.00000000 97.69836577 64.16914383 0.00000000 127.19700543 56.57212560 0.00000000 153.97830881 47.30798153 0.00000000 177.30271236 36.70256857 0.00000000 196.45254533 25.10940417 0.00000000 210.77915870 12.89656449 0.00000000 219.75712654 0.43675223 0.00000000 223.03684474 11.90374040 0.00000000 220.48252499 23.78006122 0.00000000 212.18414282 34.88544628 0.00000000 198.44034760 44.96581894 0.00000000 179.71982840 53.82983649 0.00000000 156.61422236 61.35361805 0.00000000 129.79477480 67.47742250 0.00000000 99.97891473 72.19240955 0.00000000 67.90733792 75.52146833 0.00000000 34.33014480 77.49927798 0.00000000 0.00000000 78.15483696 0.00000000 34.33014480 77.49927798 0.00000000 67.90733792 75.52146833 0.00000000 99.97891473 72.19240955 0.00000000 129.79477480 67.47742250 0.00000000 156.61422236 61.35361805 0.00000000 179.71982840 53.82983649 0.00000000 198.44034760 44.96581894 0.00000000 212.18414282 34.88544628 0.00000000 220.48252499 23.78006122 0.00000000 223.03684474 11.90374040 0.00000000 219.75712654 0.43675223 0.00000000 210.77915870 12.89656449 0.00000000 196.45254533 25.10940417 0.00000000 177.30271236 36.70256857 0.00000000 153.97830881 47.30798153 0.00000000 127.19700543 56.57212560 0.00000000 97.69836577 64.16914383 0.00000000 66.20895326 69.81789891 0.00000000 33.42303871 73.30016348 0.00000000

(386) An overall reflectivity of the projection optical unit 34 is approximately 8.02%.

(387) The projection optical unit 34 has an image-side numerical aperture of 0.55. In the first imaging light plane xz, the projection optical unit 34 has a reduction factor .sub.x of 4.00. In the second imaging light plane yz, the projection optical unit 21 has a reduction factor .sub.y of 8.00. An object-side chief ray angle is 5.2. An installed length of the projection optical unit 34 is approximately 3000 mm. A pupil obscuration is 9%. An object-image offset d.sub.OIS is approximately 177.89 mm and is therefore significantly smaller than the object-image offset d.sub.OIS of the projection optical unit 7 according to FIG. 32.

(388) The mirrors of the projection optical unit 34 can be housed in a cuboid with xyz-edge lengths of 951 mm1047 mm2380 mm.

(389) The reticle 10 and hence the object plane 5 are tilted relative to the image plane 9 at an angle T of 10 about the x-axis. This tilt angle T is indicated in FIG. 33.

(390) A working distance between the mirror M5 closest to the wafer and the image plane 9 is approximately 126 mm.

(391) Some data of projection optical units described above are summarized again in tables I and II below. The respective first column serves to assign the data to the respective exemplary embodiment.

(392) The following table I summarizes the optical parameters of numerical aperture (NA), image field extent in the x-direction (Fieldsize X), image field extent in the y-direction (Fieldsize Y), image field curvature (field curvature) and overall reflectivity or system transmission (transmission).

(393) The following table II specifies the parameters sequence of the mirror type (mirror type order), sequence of the mirror deflection effect (mirror rotation order), refractive power sequence in the xz-plane (x power order) and refractive power sequence in the yz-plane (y power order). These sequences respectively start with the last mirror in the beam path, i.e. follow the reverse beam direction. By way of example, the sequence R0LLRRRL relates to the deflection effect in the sequence M8 to M1 in the embodiment according to FIG. 2.

(394) TABLE-US-00111 TABLE I FIG. NA FIELDSIZE X FIELDSIZE Y FIELD CURVATURE TRANSMISSION % 2 0.55 26 1 0.0123455 8.02 5 0.5 26 1.2 0 9.11 8 0.5 26 1 0.0123455 7.82 11 0.55 26 1 0.0123455 8.32 14 0.45 26 1.2 0 9.29 17 0.5 26 1 0.0123455 7.2 20 0.5 26 1.2 0 9.67 23 0.55 26 1 0.0123455 9.88 26 0.55 26 1 0.0123455 8.72

(395) TABLE-US-00112 TABLE II MIRROR TYPE MIRROR ROTATION FIG. ORDER ORDER xPOWER ORDER yPOWER ORDER 2 NNGGNGGN ROLLRRRL +++ +++++++ 5 NNGGNGGN RRLLRRRL ++++++ +++++++ 8 NNNNNN LOLRLR +++ +++++ 11 NNGGNGGN ROLLRRRL +++ +++++ 14 NNGGGGN ROLLLLR +++++++ +++++ 17 NNGGGNGGG LORRRRRRR ++++++ ++++++ 20 NNGGGGGGN ROLLLLLLR +++++++++ ++++++ 23 NNGGGGGGGN RORRRRRRRL +++++++ +++++++ 26 NNGGGGGGGN RORRRRRRRL +++++++ +++++++

(396) In the mirror type, the specification N relates to a normal incidence (NI) mirror and the designation G relates to a grazing incidence (GI) mirror. In the refractive power sequences, + represents a concave mirror surface and represents a convex mirror surface. When comparing the refractive power sequences in x and y, it is possible to see that all exemplary embodiments, with the exception of e.g. the embodiment according to FIG. 5, have different refractive power sequences in x and y. These mirrors with different signs in the refractive power in x and y represent saddles or toric surfaces. To the extent that GI mirrors occur in one of the exemplary embodiments, these respectively occur at least in pairs, as can be gathered from the mirror type sequence in table II.

(397) In order to produce a microstructured or nanostructured component, the projection exposure apparatus 1 is used as follows: First, the reflection mask 10 or the reticle and the substrate or the wafer 11 are provided. Subsequently, a structure on the reticle 10 is projected onto a light-sensitive layer of the wafer 11 with the aid of the projection exposure apparatus 1. Then, a microstructure or nanostructure on the wafer 11, and hence the microstructured component, is produced by developing the light-sensitive layer.

Imaging optical unit and projection exposure unit including same

Assignee

Inventors

Cpc classification

Classification Explorer

G02B27/18

PHYSICS

Classification Explorer

G03F7/70233

PHYSICS

Classification Explorer

G02B17/0663

PHYSICS

International classification

Classification Explorer

G02B5/08

PHYSICS

Classification Explorer

G03F7/20

PHYSICS

Classification Explorer

G02B27/18

PHYSICS

Classification Explorer

G02B7/182

PHYSICS

Classification Explorer

G02B17/06

PHYSICS

Abstract

Claims

Description