DISPLAY DEVICE
20200152910 ยท 2020-05-14
Inventors
- Tohru OKABE (Sakai City, JP)
- Shinsuke SAIDA (Sakai City, JP)
- Hiroki TANIYAMA (Sakai City, JP)
- Shinji ICHIKAWA (Sakai City, JP)
- Ryosuke GUNJI (Sakai City, JP)
- Akira INOUE (Sakai City, JP)
- Yoshihiro NAKADA (Sakai City, JP)
- Hiroharu JINMURA (Sakai City, JP)
Cpc classification
H10K59/124
ELECTRICITY
H10K71/00
ELECTRICITY
G09F9/00
PHYSICS
H05B33/10
ELECTRICITY
G09F9/30
PHYSICS
International classification
Abstract
The display device includes: a TFT layer; a light-emitting layer in an upper layer than the TFT layer; a first inorganic sealing film in an upper layer than the light-emitting layer; and a second inorganic sealing film in an upper layer than the first inorganic sealing film. An organic edge film is provided on a peripheral edge of a frame region surrounding a display region. The second inorganic sealing film overlaps with an upper face of the organic edge film, and an end face of the organic edge film and an end face of the second inorganic sealing film are aligned with each other.
Claims
1: A display device comprising: a TFT layer; a light-emitting layer in an upper layer than the TFT layer; a first inorganic sealing film in an upper layer than the light-emitting layer; and a second inorganic sealing film in an upper layer than the first inorganic sealing film, wherein an organic edge film is provided on a peripheral edge of a frame region surrounding a display region, the second inorganic sealing film overlaps with an upper face of the organic edge film, and an end face of the organic edge film and an end face of the second inorganic sealing film are aligned with each other, a terminal portion including a plurality of terminals to which external signals are input is provided on an edge of the frame region, the second inorganic sealing film is formed in a whole part of the display region and a whole part other than the terminal portion of the frame region, a bending portion is provided on a side of a display region of the terminal portion, and a terminal wiring line passing through the bending portion is sandwiched between an organic reinforcing film and a flattening film, and the second inorganic sealing film is formed on the flattening film.
2. (canceled)
3: The display device according to claim 1, wherein the end face of the organic edge film and the end face of the second inorganic sealing film are flush with each other.
4: The display device according to claim 3, wherein the second inorganic sealing film includes a part overlapping with the organic edge film, the part being a silicon inorganic film containing oxygen, and another part not overlapping with the organic edge film, the other part being a silicon nitride film.
5: The display device according to claim 1, wherein the first inorganic sealing film overlaps with the upper face of the organic edge film, and the end face of the organic edge film and an end face of the first inorganic sealing film are aligned with each other, and formation patterns of the first inorganic sealing film and the second inorganic sealing film are identical.
6: The display device according to claim 5, wherein the end face of the organic edge film, the end face of the first inorganic sealing film, and the end face of the second inorganic sealing film are flush with each other.
7: The display device according to claim 6, wherein the first inorganic sealing film includes a part overlapping with the organic edge film, the part being a silicon inorganic film containing oxygen, and another part not overlapping with the organic edge film, the other part being a silicon nitride film.
8: The display device according to claim 1, wherein an edge of the display region includes a curved portion, and the organic edge film is formed along the curved portion.
9. (canceled)
10: The display device according to claim 19, wherein the second inorganic sealing film has a part overlapping with the flattening film, the part being a silicon inorganic film containing oxygen.
11-12. (canceled)
Description
BRIEF DESCRIPTION OF DRAWINGS
[0007]
[0008]
[0009]
[0010]
[0011]
[0012]
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[0014]
[0015]
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[0017]
[0018]
[0019]
DESCRIPTION OF EMBODIMENTS
[0020] Hereinafter, the same layer means that the layer is formed in the same process (film formation process), a lower layer means that the layer is formed in an earlier process than the process in which the layer to compare is formed, and an upper layer means that the layer is formed in a later process than the process in which the layer to compare is formed.
[0021]
[0022] When a flexible display device is manufactured, as illustrated in
[0023] Next, the lower face of the resin layer 12 is irradiated with laser light through the support substrate to lower the bonding force between the support substrate 13 and the resin layer 12, and the support substrate 13 is peeled off from the resin layer 12 (step S7). Next, a lower face film 10 is bonded on the lower face of the resin layer 12 (step S8). Next, a layered body 7 including the lower face film 10, the resin layer 12, the barrier layer 3, the TFT layer 4, the light-emitting element layer 5, and the sealing layer 6 is divided by the partition lines BL (see
[0024] Examples of a material of the resin layer 12 include polyimide, and examples of a material of the lower face film 10 include polyethylene terephthalate (PET).
[0025] The barrier layer 3 is a layer for preventing foreign matters such as water and oxygen from reaching the TFT layer 4 and the light-emitting element layer 5 and, for example, can be formed of a silicon oxide film, a silicon nitride film, or a silicon oxynitride film; or a layered film of these formed by CVD.
[0026] The TFT layer 4 includes a semiconductor film 15, an inorganic insulating film 16 (gate insulating film) in an upper layer than the semiconductor film 15; a gate electrode GE in an upper layer than the inorganic insulating film 16; an inorganic insulating film 18 in an upper layer than the gate electrode GE; a capacitance wiring line CE in an upper layer than the inorganic insulating film 18; an inorganic insulating film 20 in an upper layer than the capacitance wiring line CE; a source wiring line SH in an upper layer than the inorganic insulating film 20; and a flattening film 21 (interlayer insulating film) in an upper layer than the source wiring line SH.
[0027] In a frame region NA of the TFT layer 4, a terminal used for connection with an electronic circuit board such as an IC chip and an FPC; and a terminal wiring line for connecting the terminal with a wiring line of the display line DA and the like are formed.
[0028] The semiconductor film 15 is formed of, for example, low temperature polysilicon (LTPS) or an oxide semiconductor. In
[0029] The gate electrode GE, the capacitance electrode CE, the source wiring line SH, the terminal, and the terminal wiring line are formed of, for example, a monolayer film or a layered film of metal containing at least one of aluminum (Al), tungsten (W), molybdenum (Mo), tantalum (Ta), chromium (Cr), titanium (Ti), or copper (Cu).
[0030] The inorganic insulating films 16, 18, and 20 can be formed of, for example, a silicon oxide (SiOx) film or a silicon nitride (SiNx) film; or a layered film thereof formed by a CVD method.
[0031] The flattening film 21 can be formed of, for example, a coatable photosensitive organic material such as polyimide or acrylic.
[0032] The light-emitting element layer 5 (for example, organic light emitting diode layer) includes an anode 22 in an upper layer than the flattening film 21; an anode edge cover 23, having insulating properties, for covering the edge of the anode 22; an electroluminescence (EL) layer 24 in an upper layer than the anode 22; and a cathode 25 in an upper layer than the EL layer 24 and includes, for each subpixel, a light emitting element (for example, organic light emitting diode (OLED)) including the anode 22 in an island shape, the EL layer 24, and the cathode 25; and a sub pixel circuit for driving the light emitting element. The anode edge cover 23 can be formed of, for example, a coatable photosensitive organic material such as polyimide or acrylic.
[0033] The EL layer 24 is formed by layering, for example, a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer in this order from the lower layer side. The light-emitting layer is formed in an island shape for each subpixel by using a vapor deposition method or ink-jet method. Other layers are formed in an island shape or a solid-like shape (common layer). In addition, a configuration is also possible in which one or more layers of the hole injection layer, the hole transport layer, the electron transport layer, and the electron injection layer are not formed.
[0034] The anode electrode (anode) 22 is formed by layering of indium tin oxide (ITO) and silver (Ag); or indium tin oxide (ITO) and alloy containing Ag, for example, and has light reflectivity (described in detail below). The cathode 25 can be formed of a transparent conductive material such as MgAg alloy (ultra-thin film), indium tin oxide (ITO), and indium zinc oxide (IZO).
[0035] When the light-emitting element layer 5 is an OLED layer, a positive hole and an electron are recombined in the EL layer 24 due to the drive current between the anode 22 and the cathode 25, and the resulting exciton falls to the ground state, which causes light to be emitted. Since the cathode 25 is transparent and the anode 22 has light reflectivity, the light emitted from the EL layer 24 travels upward and becomes top-emitting.
[0036] The light-emitting element layer 5 may be used not only in a case of constituting the OLED element, but also in a case of constituting an inorganic light emitting diode or a quantum dot light emitting diode.
[0037] The sealing layer 6 is transparent and includes an inorganic sealing film 26 for covering the cathode 25, an organic sealing film 27 in an upper layer than the inorganic sealing film 26, and an inorganic sealing film 28 in an upper layer than the organic sealing film 27. The sealing layer 6 for covering the light-emitting element layer 5 prevents foreign matters such as water and oxygen from penetrating into the light-emitting element layer 5.
[0038] Each of the inorganic sealing film 26 and the inorganic sealing film 28 can be formed of, for example, a silicon oxide film, a silicon nitride film, or a silicon oxynitride film; or a layered film of these, formed by CVD. The organic sealing film 27 is a transparent organic film having a flattening effect and can be formed of a coatable organic material such as acrylic.
[0039] The lower face film 10 is a film, bonded on the lower face of the resin layer 12 after the support substrate is peeled off, for achieving a display device with excellent flexibility, and examples of the material of the lower face film 10 include PET. The function film 39 includes, for example, an optical compensation function, a touch sensor function, a protection function, or the like.
[0040] In the above, the case of manufacturing a flexible display device is described, but in the case of manufacturing a non-flexible display device, since the substrate does not need to be replaced, the process transitions from step S5 to step S9 in
First Embodiment
[0041]
[0042] In the first embodiment, in step S3 in
[0043] In step S5 in
[0044] As illustrated in
[0045] The silicon nitride film has a high denseness and excellent sealing performance but is so hard that cracking tends to occur in dividing. On the other hand, the sealing performance of the silicon oxide film is inferior to that of the silicon nitride film, but the silicon oxide film is softer than the silicon nitride film such that the occurrence of cracking is suppressed in dividing. Therefore, in step S9, as illustrated in
[0046] In a display device 2 obtained through the dividing in step S9, as illustrated in
[0047] It should be noted that the organic edge film 21f may be in a forwardly tapered shape that is gradually narrowing upward, and, in a case of a forwardly tapered shape, the taper angle is preferably steep (close to 90 degrees). Thus, even if cracking occurs in the end portion 28f (a part formed of the silicon oxide film) of the inorganic sealing film 28 in dividing, the propagation of cracking into the inner part 28k (a part formed of the silicon nitride film) of the inorganic sealing film 28 is suppressed.
[0048]
[0049]
[0050]
[0051] In this configuration, the end face 28e of the inorganic sealing film 28 and the end face 26e of the inorganic sealing film 26 for covering the upper face of the organic edge film 21f are contiguously flush with each other, and the end face 26e of the inorganic sealing film 26 for covering the upper face of the organic edge film 21f and the end face 21e of the organic edge film are contiguously flush with each other. These end faces (28e, 26e, and 21e) constitute a part of the edge EX of the display device 2. In this case, since the end portion 26f of the inorganic sealing film 26 (a part overlapping with the organic edge film 21f) is a flexible silicon oxide film, the occurrence of cracking in the sealing layer 6 is suppressed in dividing. This modified example has a merit in that identically shaped masks can be used for forming the inorganic sealing film 26 and the inorganic sealing film 28.
[0052]
Second Embodiment
[0053]
[0054] As illustrated in
[0055] The terminal TM is connected to the display region DA by the terminal wiring line TW passing through the bending portion CL. The organic reinforcing film Qc is formed of an organic material such as polyimide or acrylic and is formed in an upper layer than the inorganic insulating film 20 and in a lower layer than the terminals TM and TM.
[0056] As illustrated in
[0057] The terminal wiring lines TW include a wiring line WS1 and a wiring line WS2 positioned on both sides of the bending portion CL and a wiring line WS3, passing through the bending portion CL, that is electrically connected to each of the first wiring line WS1 and the second wiring line WS2. The wiring line WS1 and the wiring line WS2 are formed in the same layer as the gate electrode GE (see
[0058] The wiring line WS3 extends, over the organic reinforcing film Qc, from one side of the bending portion CL to the other side of the bending portion CL, and is sandwiched between the organic reinforcing film Qc and the flattening film 21 (for example, acrylic film) in the bending portion CL. One end of the wiring line WS3 is connected to the wiring line WS1 through a contact hole Hct extending through the inorganic insulating films 18 and 20, and the other end of the wiring line WS3 is connected to the wiring line WS2 through a contact hole Hc2 extending through the inorganic insulating films 18 and 20. In the bending portion CL, the part 28c of the inorganic sealing film 28 is formed on the flattening film 21.
[0059] As illustrated in
[0060]
[0061] In step S5 in
[0062] Since the silicon oxide film is softer than the silicon nitride film, in step S9, the layered body 7 is divided, as illustrated in
Supplement
[0063] The electro-optical element (electro-optical element of which luminance and transmittance are controlled by the current) included in the display device according to the present embodiment is not particularly limited. Examples of the display device according to the present embodiment include an organic electro luminescence (EL) display including an organic light emitting diode (OLED) as the electro-optical element, an inorganic EL display including an inorganic light emitting diode as the electro-optical element, and a quantum dot light emitting diode (QLED) display including a QLED as the electro-optical element.
First Aspect
[0064] A display device including:
[0065] a TFT layer;
[0066] a light-emitting layer in an upper layer than the TFT layer;
[0067] a first inorganic sealing film in an upper layer than the light-emitting layer; and
[0068] a second inorganic sealing film in an upper layer than the first inorganic sealing film,
[0069] wherein an organic edge film is provided on a peripheral edge of a frame region surrounding a display region, and
[0070] the second inorganic sealing film overlaps with an upper face of the organic edge film, and an end face of the organic edge film and an end face of the second inorganic sealing film are aligned with each other.
Second Aspect
[0071] The display device according to, for example, the first aspect,
[0072] wherein a terminal portion including a plurality of terminals to which external signals are input is provided on an edge of the frame region, and
[0073] the second inorganic sealing film is formed in a whole part of the display region and a whole part other than the terminal portion of the frame region.
Third Aspect
[0074] The display device according to, for example, the first or second aspect, wherein the end face of the organic edge film and the end face of the second inorganic sealing film are flush with each other.
Fourth Aspect
[0075] The display device according to, for example, the third aspect, wherein the second inorganic sealing film includes a part overlapping with the organic edge film, the part being a silicon inorganic film containing oxygen, and another part not overlapping with the organic edge film, the other part being a silicon nitride film.
Fifth Aspect
[0076] The display device according to, for example, the first or second aspect, wherein the first inorganic sealing film overlaps with the upper face of the organic edge film, and the end face of the organic edge film and an end face of the first inorganic sealing film are aligned with each other, and formation patterns of the first inorganic sealing film and the second inorganic sealing film are identical.
Sixth Aspect
[0077] The display device according to, for example, the fifth aspect, wherein the end face of the organic edge film, the end face of the first inorganic sealing film, and the end face of the second inorganic sealing film are flush with each other.
Seventh Aspect
[0078] The display device according to, for example, the sixth aspect, wherein the first inorganic sealing film includes a part overlapping with the organic edge film, the part being a silicon inorganic film containing oxygen, and another part not overlapping with the organic edge film, the other part being a silicon nitride film.
Eighth Aspect
[0079] The display device according to any one of, for example, the first to seventh aspects, wherein an edge of the display region includes a curved portion, and the organic edge film is formed along the curved portion.
Ninth Aspect
[0080] The display device according to, for example, the second aspect,
[0081] wherein a bending portion is provided on a side of a display region of the terminal portion, and
[0082] a terminal wiring line passing through the bending portion is sandwiched between an organic reinforcing film and a flattening film, and the second inorganic sealing film is formed on the flattening film.
[0083] Tenth Aspect
[0084] The display device according to, for example, the ninth aspect, wherein the second inorganic sealing film has a part overlapping with the flattening film, the part being a silicon inorganic film containing oxygen.
[0085] Eleventh Aspect
[0086] A method for manufacturing a display device, the method including partitioning a layered body including:
[0087] a TFT layer,
[0088] a light-emitting layer in an upper layer than the TFT layer,
[0089] a first inorganic sealing film in an upper layer than the light-emitting layer, and
[0090] a second inorganic sealing film in an upper layer than the first inorganic sealing film, the method including:
[0091] forming an organic edge film on a peripheral edge of a frame region surrounding a display region;
[0092] forming the second inorganic sealing film overlapping with the organic edge film; and
[0093] dividing the layered body with a cutting surface passing through the second inorganic sealing film and the organic edge film.
Twelfth Aspect
[0094] The method for manufacturing a display device according to, for example, the eleventh aspect,
[0095] wherein the layered body includes a plurality of panel regions, and
[0096] the method further includes forming the second inorganic sealing film by using a mask having an opening common to the plurality of panel regions.
REFERENCE SIGNS LIST
[0097] 2 Display device [0098] 3 Barrier layer [0099] 4 TFT layer [0100] 5 Light-emitting element layer [0101] 6 Sealing layer [0102] 12 Resin layer [0103] 16, 18, 20 Inorganic insulating film [0104] 21 Flattening film [0105] 21f Organic edge film [0106] 23 Anode edge cover [0107] 23b, 23c Bank [0108] 24 EL layer [0109] 27 Organic sealing film [0110] 28 Inorganic sealing film [0111] 70 Display device manufacturing apparatus [0112] Qc Organic reinforcing film [0113] Qf Organic edge film [0114] TM Terminal [0115] TW Terminal wiring line [0116] WS1 to WS3 Wiring line