Vertically die-stacked bonder and method using the same
10643968 ยท 2020-05-05
Assignee
Inventors
Cpc classification
H01L24/94
ELECTRICITY
H01L24/741
ELECTRICITY
H01L2224/75745
ELECTRICITY
H01L24/75
ELECTRICITY
H01L24/80
ELECTRICITY
International classification
Abstract
A vertically die-stacked bonder able to stack laterally dies one by one includes a self-elevating unit, a retrieval unit neighbored to the self-elevating unit, and a receiving unit neighbored to the retrieval unit. At least one die is located at the self-elevating unit. The self-elevating unit elevates one die by 90 degrees, so as to form a vertical state. The retrieval unit hands over the die in the vertical state to the receiving unit. The self-elevating unit then elevates another die by 90 degrees once again. The retrieval unit stacks laterally the another die in the vertical state to the previous die at the receiving unit. Thereupon, by stacking laterally the dies in the vertical state orderly, the speed of die stacking can be increased, the production costs can be reduced, and the productivity can be increased.
Claims
1. A vertically die-stacked method, comprising the steps of: (a) elevating a die by 90 degrees so as to have the die into a vertical state; (b) sucking the die in the vertical state by a retrieval unit, and moving the die to a receiving unit; (c) placing the die to the receiving unit by the retrieval unit; (d) elevating another die by 90 degrees so as to have the another die into the vertical state; (e) sucking the another die in the vertical state by the retrieval unit, and moving the another die to the receiving unit having the die; and (f) stacking laterally the another die in the vertical state to the die already at the receiving unit.
2. The vertically die-stacked method of claim 1, wherein, in the step (f), if a number of the dies stacked at the receiving unit has reached a predetermined amount, then the method is stopped; and, if the number of the dies stacked at the receiving unit has not yet reached the predetermined amount, then go back to perform the step (d).
3. The vertically die-stacked method of claim 1, wherein, in the step (a), the die is located at a self-elevating carrier of a self-elevating unit, the self-elevating carrier is to elevate 90 degrees so as to have the die elevated by 90 degrees.
4. The vertically die-stacked method of claim 1, wherein, in the step (b), a first vision unit captures image information of the receiving unit, and provides the image information to the retrieval unit and the receiving unit; wherein, in the step (c), the receiving unit bases on the image information from the first vision unit to adjust a position of the receiving unit with respect to the retrieval unit having the die; wherein, if the receiving unit is confirmed that the die can be placed to the receiving unit, the receiving unit moves laterally to place or adhere the die to the receiving unit; wherein the first vision unit aligns the dies on the receiving unit and on the retrieval unit simultaneously or individually.
5. The vertically die-stacked method of claim 1, wherein, in the step (e), a first vision unit captures image information of the another die at the receiving unit, and provides the image information to the receiving unit and the retrieval unit; wherein, in the step (f), the receiving unit bases on the image information from the first vision unit to adjust a position of the die at the receiving unit with respect to the another die at the retrieval unit; wherein, if the another die at the retrieval unit is able to stack the another die to the die at the receiving unit, the receiving unit moves laterally so as to have the another die at the retrieval unit to stack laterally onto the die already at the receiving unit; wherein the first vision unit aligns the dies on the receiving unit and on the retrieval unit.
6. The vertically die-stacked method of claim 1, wherein, in the step (e), a second vision unit captures image information of the another die at the self-elevating unit, and provides the image information to the self-elevating unit first position compensation, such that the retrieval unit sucks the another die been compensated in position and already been elevated.
7. The vertically die-stacked method of claim 3, further including a step of a supply unit providing the die to the self-elevating carrier.
8. The vertically die-stacked method of claim 7, wherein the supply unit has a carrier, at least one ejection pin and at least one supply-suck module, the ejection pin being located in the carrier, the carrier mounting at least one die, a third vision unit capturing the image information of the die at the carrier so as to provide the image information to the ejection pin and the supply-suck module, the ejection pin basing on the image information to eject a specific die, the supply-suck module basing on the image information to suck the specific die and place the die to the self-elevating unit via the carrier.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The present invention will now be specified with reference to its preferred embodiment illustrated in the drawings, in which:
(2)
(3)
(4)
(5)
DESCRIPTION OF THE PREFERRED EMBODIMENT
(6) The invention disclosed herein is directed to a vertically die-stacked bonder and a method using the same. In the following description, numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are possible while still achieving the results of the present invention. In other instance, well-known components are not described in detail in order not to unnecessarily obscure the present invention.
(7) Referring now to
(8) The self-elevating unit 10 has a self-elevating carrier 100 and a self-elevating displacement module 101, in which the self-elevating displacement module 101 is coupled with the self-elevating carrier 100.
(9) The retrieval unit 11 neighbored to the self-elevating unit 10 has at least two sucking modules 110 and a rotational retrieval module 111, in which the sucking modules 110 are individually mounted to the rotational retrieval module 111.
(10) The receiving unit 12 neighbors to the retrieval unit 11 has a receiving carrier 120 and a receiving displacement module 121, in which the receiving carrier 120 is located on the receiving displacement module 121.
(11) The first vision unit 13 is located under the retrieval unit 11 at a position respective to the receiving carrier 120.
(12) The second vision unit 14 is located above the self-elevating unit 10.
(13) The supply unit 16 neighbored to the self-elevating unit 10 has at least one supply-suck module 160, a carrier 161 and at least one ejection pin 162, in which the carrier 161 is to mount thereon at least one die 15, the ejection pin 162 is mounted inside the carrier 161 so as to eject the die 15 placed on the carrier 161, and the supply-suck module 160 is located above the carrier 161 so as to suck the die 15 on the carrier 161 and then displace the die 15 to the self-elevating unit 10.
(14) The third vision unit 17 is located above the carrier 161.
(15) Referring now to
(16) In this second embodiment, the self-elevating unit 20, the retrieval unit 21, the receiving unit 22, the second vision unit 24, the supply unit 26 and the third vision unit 27 are the same to those in the first embodiment, and thus details thereabout are omitted herein.
(17) The first vision unit 23 has a lens module 230 and an image-capturing module 231, in which the lens module 230 is located under the retrieval unit 21 at a position facing the receiving carrier 220, and the image-capturing module 231 is located above the retrieval unit 21 at a place opposing to the lens module 230 with respect to the retrieval unit 21.
(18) Referring now to
(19) Step S1: Provide a die, as shown in
(20) Step S2: Elevate the die into a vertical state. As shown in
(21) Step S3: Suck the die in the vertical state by the retrieval unit. The second vision unit 14 captures image information of the dies 15 on the self-elevating carrier 100, and then the image information is transmitted to the self-elevating displacement module 101 for compensating the position, such that the retrieval unit 11 can accurately fetch, by sucking, the die 15 that has been compensated in positioning and elevated into the vertical state. Then, the rotational retrieval module 111 rotates the sucking module 110 (having the die 15 already) to a position of the receiving unit 12.
(22) As shown in
(23) In addition, the first vision unit 13 can simultaneously or individually align the receiving carrier 120 and the die 15 at the retrieval unit 11.
(24) Referring now to
(25) Step S4: Place the die to the receiving unit. As shown in
(26) As shown in
(27) Step S5: Elevate another die into the vertical state. The self-elevating carrier 100 elevates this another die 15 and turns this die 15 into the vertical state. Similar to Step S1, the supply unit 16 provides this die 15 to the self-elevating carrier 100 again. Also, similar to Step S2, the second vision unit 14 captures the image information of the another die 15, and then transmits the image information to the retrieval unit 11.
(28) Step S6: Suck this another die in the vertical state by the retrieval unit. Similar to Step S3, the self-elevating unit 10 compensates the position with respect to the retrieval unit 11 so as to allow the retrieval unit 11 to fetch this another die 15 in the vertical state precisely. The retrieval unit 11 receives the image information from the second vision unit 14, and allows the sucking module 110 to fetch, by sucking, this another die 15 on the self-elevating carrier 100. The sucking module 110 having this another die 15 is then rotated by the rotational retrieval module 111 to match the position of the receiving unit 12.
(29) As shown in
(30) Further, the first vision unit 13 captures the image information from the receiving carrier 120 or the existing image information of the die 15, and then provides the image information top the retrieval unit 11 and the receiving unit 12.
(31) In addition, the first vision unit 13 can align the die 15 of the receiving carrier 120 and the die 15 of the retrieval unit 11 simultaneously.
(32) As shown in
(33) Step S7: Stack laterally this another die in the vertical state to the die already at the receiving unit. As shown in
(34) If the image information received by the receiving unit 12 from the first vision unit 13 matches the precise position for stacking the die 15 onto the receiving unit 12, then the receiving unit 12 would not need any position adjustment. The receiving displacement module 121 moves laterally so as to have the another die 15 to be placed or adhered to the die 15 already at the receiving unit 12.
(35) If the number of the dies 15 stacked at the receiving carrier 120 has reached a predetermined amount, then the method is stopped.
(36) If the number of the dies 15 stacked at the receiving carrier 120 has not yet reached the predetermined amount, then go back to perform Step S5.
(37) In summary, the vertically die-stacked bonder and the method using the same of the present invention are to elevate the die by 90 degrees so as to set the die in the vertical state, and then to stack laterally the dies in the vertical state orderly, such that the stacking speed of the dies can be increased, the production cost can be reduced, and the productivity can be enhanced.
(38) In addition, the self-elevating unit can adjust the position with respect to the retrieval unit, so that the self-elevating unit can be accurately aligned with the retrieval unit, and thus the die can be placed to the predetermined position at the retrieval unit.
(39) While the present invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be without departing from the spirit and scope of the present invention.