Power module based on multi-layer circuit board
10636732 · 2020-04-28
Assignee
Inventors
Cpc classification
H01L25/18
ELECTRICITY
H01L2924/00012
ELECTRICITY
H05K1/0263
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L2224/0603
ELECTRICITY
H05K1/0204
ELECTRICITY
H01L2924/00
ELECTRICITY
H05K1/183
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/40225
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L2224/48491
ELECTRICITY
H01L2224/49111
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2924/15153
ELECTRICITY
H01L24/73
ELECTRICITY
H01L23/3735
ELECTRICITY
International classification
H01L23/48
ELECTRICITY
H01L25/07
ELECTRICITY
H01L23/538
ELECTRICITY
H01L23/14
ELECTRICITY
H01L23/373
ELECTRICITY
H01L23/498
ELECTRICITY
H01L29/40
ELECTRICITY
H01L23/52
ELECTRICITY
Abstract
A power module comprises at least one power semiconductor device with an electrical top contact area on a top side; and a multi-layer circuit board with multiple electrically conducting layers which are separated by multiple electrically isolating layers, the electrically isolating layers being laminated together with the electrically conducting layers; wherein the multi-layer circuit board has at least one cavity, which is opened to a top side of the multi-layer circuit board, which cavity reaches through at least two electrically conducting layers; wherein the power semiconductor device is attached with a bottom side to a bottom of the cavity; and wherein the power semiconductor device is electrically connected to a top side of the multi-layer circuit board with a conducting member bonded to the top contact area and bonded to the top side of the multi-layer circuit board.
Claims
1. A power module, comprising: at least one power semiconductor device with an electrical top contact area on a top side; a multi-layer circuit board with multiple electrically conducting layers and an electrically conducting bottom layer which are separated by multiple electrically isolating layers, the multiple electrically isolating layers being laminated together with the electrically conducting layers and the electrically conducting bottom layer, which is provided at a bottom side of the multi-layer circuit board; wherein the multi-layer circuit board has at least one cavity, which is opened to a top side of the multi-layer circuit board, which the at least one cavity reaches through the multiple electrically conducting layers and the multiple electrically isolating layers and the at least one cavity reaches through the multi-layer circuit board to the electrically conducting bottom layer; wherein the at least one power semiconductor device is electrically connected to a top side of the multi-layer circuit board with a conducting member bonded to the top contact area and bonded to the top side of the multi-layer circuit board; wherein the power semiconductor device is bonded with a bottom contact area to the electrically conducting bottom layer; wherein the electrically conducting bottom layer is part of an insulated metal substrate that forms an integral part of the multi-layer circuit board, the insulated metal substrate comprising the electrically conducting bottom layer and a further metal layer isolated from the electrically conducting bottom layer by a further isolation layer different from the multiple electrically isolating layers.
2. The power module of claim 1, wherein the electrically conducting bottom layer is part of a ceramics substrate comprising the electrically conducting bottom layer attached to a ceramics layer.
3. The power module of claim 1, wherein the multi-layer circuit board comprises at least two multi-layer circuit boards that have at least one cavity, in which power semiconductor devices are bonded, are attached to a common substrate.
4. The power module of claim 1, wherein the electrically conducting bottom layer or a metal layer attached to the electrically conducting bottom layer has a structured bottom surface for cooling.
5. The power module of claim 1, wherein the at least one power semiconductor device is completely received in the at least one cavity.
6. The power module of claim 1, wherein the at least one power semiconductor device has a gate contact area on the top side, which is electrically connected with the conducting member to the top side of the multi-layer circuit board.
7. The power module of claim 1, wherein the multi-layer circuit board comprises at least two cavities, in which at least two power semiconductor devices are attached with bottom sides to the bottoms of the cavities; and/or wherein each of the at least one power semiconductor device is positioned in a separate cavity.
8. The power module of claim 1, wherein the at least one power semiconductor device is electrically connected via wirebonds as the conducting member to the top side of the multi-layer circuit board; and/or wherein the at least one power semiconductor device is electrically connected via a metal strip as the conducting member to the top side of the multi-layer circuit board.
9. The power module of claim 1, wherein a metal buffer layer is bonded to the top contact area of the at least one power semiconductor device and the conducting member interconnecting the top contact area with the top side of the multi-layer circuit board is bonded to the metal buffer layer.
10. The power module of claim 1, wherein a first electrically conducting layer and a second electrically conducting layer electrically connected to the top contact area and the bottom contact area of the at least one power semiconductor device are overlapping each other in at least more than 10% of an area of the top side or the bottom side of the multi-layer circuit board; and/or wherein the first electrically conducting layer and/or the second electrically conducting layer extend over more than 50% of the area of the top side or bottom side of the multi-layer circuit board.
11. The power module of claim 1, wherein a first electrically conducting layer and/or a second electrically conducting layer electrically connected to the top and/or bottom contact areas of the at least one power semiconductor device are thicker than a third electrically conducting layer electrically interconnected with a gate contact area of the power semiconductor device.
12. The power module of claim 1, wherein the multiple electrically conducting layers of the multi-layer circuit board are interconnected by conducting vias extending through the multi-layer circuit board orthogonally to the multiple electrically conducting layers.
13. The power module of claim 1, wherein the power module comprising at least two power semiconductor switches electrically interconnected by the electrically conducting layers of the multi-layer circuit board, the bottom layer and the conducting member to form a half-bridge.
14. The power module of claim 1, wherein terminals for connecting an external connection of the power module are directly bonded to the top side of the multi-layer circuit board and/or are part of the multi-layer circuit board.
15. The power module of claim 1, wherein the multi-layer circuit board and the at least one power semiconductor device in the cavity are encapsulated into a plastics material.
16. The power module of claim 2, wherein the multi-layer circuit board comprises at least two multi-layer circuit boards that have at least one cavity in which power semiconductor devices are bonded, are attached to a common substrate.
17. The power module of claim 2, wherein the electrically conducting bottom layer or a metal layer attached to the electrically conducting bottom layer has a structured bottom surface for cooling.
18. The power module of claim 3, wherein the electrically conducting bottom layer or a metal layer attached to the electrically conducting bottom layer has a structured bottom surface for cooling.
19. The power module of claim 2, wherein the at least one power semiconductor device is completely received in the at least one cavity.
20. The power module of claim 3, wherein the at least one power semiconductor device is completely received in the at least one cavity.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The subject-matter of the invention will be explained in more detail in the following text with reference to exemplary embodiments which are illustrated in the attached drawings.
(2)
(3)
(4)
(5)
(6)
(7) The reference symbols used in the drawings, and their meanings, are listed in summary form in the list of reference symbols. In principle, identical parts are provided with the same reference symbols in the figures.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
(8)
(9) The multi-layer circuit board 12 comprises three thick layers 16a, 16b, 16c (about 300 m thick) and two thin layers 18 (thinner than the thick layers 16a, 16b, 16c, about 75 m thick), each of which is situated between two thick layers 16a, 16b, 16c. The thick layers 16a, 16b, 16c are used for current routing through the power module 10. The thin layers 18 are used for routing of gate signals through the power module 10.
(10) Between the layers 16a, 16b, 16c, 18, the multi-layer circuit board 12 comprises isolation layers 20, which are based on prepreg material (such as fibre enforced epoxy resin). All the layers 16a, 16b, 16c, 18, 20 of the multi-layer circuit board 12 have been joined/laminated together by pressing under heat to form the multi-layer circuit board 12. The electrically conducting layers 16a, 16b, 16c, 18 are electrically interconnected with vias 22, which reach through the electrically isolating layers 20. The layers 16a, 16b, 16c, 18 and the vias 22 may be made of Cu.
(11) Each cavity 14 may protrude through at least two electrically conducting layers 16a, 16b, 18 and/or at least two isolation layers 20. Sidewalls of a cavity 14 may extend substantially vertical, i.e. orthogonally to an extension of the layers 16a, 16b, 16c, 18, 20. The sidewalls of a cavity 14 may be covered with isolation material from the isolation layers 20.
(12) The top layer 16a provides contact areas for a DC+ terminal 24a, DC terminal 24b, AC terminal 24c and one or more gate terminals (not shown). These terminals 24a, 24b, 24c may be bonded to the top layer 16a and/or may be provided by folded metal strips.
(13) The terminals 24a, 24b, 24c (as well as the gate terminals), which are used as external power connections of the power module 10, may be provided as terminals for screw connections and/or press-in pins and/or lead frame structures. The terminals 24a, 24b, 24c (as well as the gate terminals) may be directly attached to or integrated into the multi-layer circuit board 12.
(14) The power terminals 24a, 24b, 24c may reach out vertically from the multi-layer circuit board 12 as shown in
(15) The gate terminals also may reach out vertically from the multi-layer circuit board 12 (for example using pins or sockets to connect to a gate drive circuit board) or also horizontally using a lead frame structure.
(16) The power terminals 24a, 24b, 24c and/or the gate terminals are attached to the top layer 16a by soldering, sintering or welding. It also may be possible that the power terminals 24a, 24b, 24c and/or the gate terminals are already integrated during the manufacturing of the multi-layer circuit board 12.
(17) The bottom layer 16c provides a bottom of the cavities 14 to which the power semiconductor devices 15a, 15b are bonded with a bottom side, for example by Ag sintering. The top side of the power semiconductor devices 15a, 15b are electrically connected to the top side of the multi-layer circuit board 12 via conducting members in the form of wirebonds 26a.
(18) In particular, the bottom side of each semiconductor devices 15a, 15b provides a bottom contact area 28a (providing the source of the semiconductor device 15a, 15b), which is bonded to the bottom layer 16c. The top side of each semiconductor devices 15a, 15b provides a top contact area 28b (providing the drain of the semiconductor device 15a, 15b) and a gate contact area 28c. The top contact area 28b is electrically connected via a plurality of wirebonds 26a with a corresponding contact area provided by the top layer 16a. The gate contact area 28c is electrically connected via one wirebond 26a with a corresponding contact area provided by the top layer 16a.
(19) The power semiconductor devices 15a, 15b are completely received in their respective cavity 14, i.e. their top side does not protrude over the top side of the multi-layer circuit board 12.
(20) In
(21) The bottom layer 16c may be attached via a further isolation layer 30 to a base metal layer 32, which may be used for supporting the power module 10 and/or for cooling the power semiconductor devices 15a, 15b.
(22) It may be possible that the isolation layer 30 and the base metal layer 32 are joined with the multi-layer circuit board 12 after the manufacturing of the multi-layer circuit board 12. However, it also may be possible that the bottom layer 16c, the isolation layer 30 and the base metal layer 32 are provided by an isolated metal substrate 34, which is integrated into the multi-layer circuit board 12, i.e. joined with the multi-layer circuit board 12 during the manufacturing of the multi-layer circuit board 12.
(23) It also may be possible to integrate a ceramics substrate into the multi-layer circuit board 12.
(24)
(25)
(26) Furthermore, a metal buffer layer 38 may be bonded to the top contact area 28b. The conducting members 26a, 26b may be bonded to this metal buffer layer 38. The metal buffer layer 38 may be bonded to the corresponding power semiconductor device 15a, 15b already on the wafer level. Such a metal buffer layer 38 may improve the power cycling capability of the wirebonds 26a and may provide an additional thermal mass on the top side of the power semiconductor device 15a, 15b.
(27) As shown in
(28)
(29) Also the other layers 16b, 16c, 18 may comprise such disconnected parts, which are separated by isolation material based on the prepreg material used for the forming of the multi-layer circuit board.
(30) As shown in
(31) The semiconductor devices 15a, 15b may be electrically interconnected by the thick layers 16a, 16b, 16c to form a half-bridge (see below
(32) Furthermore, the DC terminal 24b may be arranged close to the DC+ terminal 24a in a strip-line fashion.
(33) This may ensure a low commutation loop stray inductance of the power module 10. Also, the parts of the gate layers 18 may also run in a large area in parallel to the layers 16a, 16b, 16c. This large-area planar gate layer approach also may ensure a low gate inductance and may reduce a coupling between the gate signals and the current in the layers 16a, 16b, 16c.
(34) It should be noted that further conducting layers may be added, for example, for additional signals such as an on-chip temperature or a signal from a current sensor.
(35)
(36)
(37) As shown in
(38) While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive; the invention is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art and practising the claimed invention, from a study of the drawings, the disclosure, and the appended claims. In the claims, the word comprising does not exclude other elements or steps, and the indefinite article a or an does not exclude a plurality. A single processor or controller or other unit may fulfil the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.
LIST OF REFERENCE SYMBOLS
(39) 10 power module 12 multi-layer circuit board 14 cavity 15a power semiconductor device 15b power semiconductor device 16a top layer 16b intermediate layer 16c bottom layer 18 gate layer 20 isolation layer 22 via 24a DC+ terminal 24b DC terminal 24c AC terminal 24d gate terminal 26a conducting member (wirebond) 26b conducting member (metal strip) 28a bottom contact area 28b top contact area 28c gate contact area 30 isolation layer 32 base metal layer 34 isolated metal substrate 36 encasing 38 metal buffer layer 40 gate contact area 42 freewheeling diode 44 ceramics substrate