Organic optoelectronic device and method for manufacturing the same
10629840 ยท 2020-04-21
Inventors
- Sheng-Yang Huang (Hsinchu, TW)
- Ching-Yan Chao (Hsinchu, TW)
- Cheng-Hao Chang (Miaoli, TW)
- Feng-Wen Yen (Taipei, TW)
Cpc classification
H10K71/00
ELECTRICITY
International classification
Abstract
The present invention provides an organic optoelectronic device and a method for manufacturing the same, in which laser scanning is used to form the electrical connection between the second electrode layer and the contact electrode layer. The present invention can effectively decrease the frequency of replacement of metal masks, significantly shorten the time required for replacing the metal masks, and reduce the down time due to the replacement of metal masks. In addition, the organic optoelectronic device can have a large active area due to the narrow border of the electrical connection formed by the laser scanning.
Claims
1. A method for manufacturing an organic optoelectronic device, comprising: depositing a first electrode layer on one portion of a substrate, and depositing a contact electrode layer on the other portion of the substrate; depositing an organic layer and a second electrode layer sequentially on the first electrode layer and the contact electrode layer through a metal mask; partially remove the second electrode layer, the organic layer, and the contact electrode layer by laser scanning to puncture through the second electrode layer, the organic layer, and the contact electrode layer and form a via hole therein; and electrically connecting the second electrode layer to the contact electrode layer through the via hole.
2. The method of claim 1, wherein a separation space is formed between the first electrode layer and the contact electrode layer.
3. The method of claim 2, wherein a portion of the organic layer is disposed in the separation space.
4. The method of claim 1, wherein the deposition range of the organic layer is the same as that of the second electrode layer.
5. The method of claim 1, wherein the contact electrode layer is a metal layer, a metal oxide layer, or a stack of a metal layer and a metal oxide layer.
6. The method of claim 1, wherein the laser scanning uses a laser wavelength of 1064 nm and a power of less than 3 W.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) For a better understanding of the embodiments of the present invention, reference will now be made to the DESCRIPTION OF THE PREFERRED EMBODIMENTS below, in conjunction with the following drawings, in which like reference numerals refer to corresponding parts throughout the figures.
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DESCRIPTION OF THE PREFERRED EMBODIMENTS
(8) The following description is about embodiments of the present invention; however, it is not intended to limit the scope of the present invention.
(9) Please refer to
(10) Please refer to
(11) S201: depositing a first electrode layer 200 on one portion of a substrate 100, and depositing a contact electrode layer 300 on the other portion of the substrate 100;
(12) S202: depositing an organic layer 400 on the first electrode layer 200 and the contact electrode layer 300 through a metal mask;
(13) S203: depositing a second electrode layer 500 on the organic layer 400 through the metal mask used in step S202;
(14) S204: partially removing the second electrode layer 500 and the organic layer 400 by laser scanning to puncture through the second electrode layer 500 and the organic layer 400 to form a via hole therein, and to further form an electrical connection 510 connecting the contact electrode layer 300 in the via hole.
(15) Please refer to Table 1 below, which shows the comparison data of the organic optoelectronic devices manufactured by the method of the present invention before and after laser scanning. As shown in Table 1, the luminous area of the organic light-emitting diode is 61 mm63 mm; the thickness of the organic layer is 230 nm. The second electrode layer is aluminum with a thickness of 100 nm. The contact electrode layer is the stack of ITO (120 nm) and Mo/Al/Mo (50 nm/500 nm/50 nm). The size of the via hole is 0.06 mm; and the scanning pitch is 0.3 mm. The scanning area is 1 mm60 mm. The maximum power of the laser is 30 W. Examples 1 to 5 are scanned and punctured through by using different percentages of power.
(16) TABLE-US-00001 TABLE 1 Power Initial impedance after percentage (%) impedance () laser scanning () Control N.A. 2.2 N.A. Example 1 20 >20M 32 Example 2 10 >20M 2.3 Example 3 5 >20M 2.2 Example 4 2 >20M 2.2 Example 5 1 >20M 2.1
(17) According to Table 1, most of the prior manufacturing processes adopting metal masks having openings with different sizes can electrically connect the second electrode layer (metal layer) to the contact electrode layer directly, so the impedance of the second electrode (cathode) can be obtained by measuring two ends of the contact electrode layer, which is about 2.2, as shown in the data of Control. The Examples use the same metal mask according to the manufacturing process of the present invention. As shown in Table 1, since the second electrode layer and the contact electrode layer is separated by the organic layer before laser scanning, the initial impedance of the second electrode (cathode) measured from the two ends of the contact electrode layer is higher than 20 M. As shown in Example 5, the second electrode layer, the organic layer, and contact electrode layer can be partially punctured through by using only 1% (0.3 W) of power percentage in laser scanning, and then the second electrode layer may be electrically connected with the contact electrode layer. The impedance can be significantly reduced to 2.1 after laser scanning. On the contrary, when the power of laser scanning is over-high (>20%), the second electrode layer (metal layer) will be excessively removed, which will incur the increase of the impedance.
(18) Please refer to Table 2 below, which shows the comparison data obtained before and after current application on the organic optoelectronic devices manufactured by the method of the present invention. Examples 6-9 show the impedance comparison data before and after continuous application of the current of 1 A and 40 mA, respectively, to the organic optoelectronic devices, which are formed by using the same conditions of laser scanning as that of Example 5.
(19) TABLE-US-00002 TABLE 2 Initial 40 mA, 40 mA, 1 A, 1 A, 1 A, impedance 1 min 5 min 1 min 5 min 60 min () () () () () () Example 6 2.2 2.2 2.0 2.1 2.1 2.2 Example 7 2.2 2.2 2.4 2.2 2.2 2.5 Example 8 2.2 2.2 2.1 2.2 2.2 2.3 Example 9 2.2 2.2 2.2 2.2 2.2 2.6
(20) According to Examples 6-9 in Table 2, after continuous application of the current of 1 A for one hour, the impedance is still stable (about 2). Therefore, the organic optoelectronic device manufactured by the method of the present invention can meet the performance requirements of the prior evaporation technology.
(21) Please refer to Table 3 below and
(22) TABLE-US-00003 TABLE 3 Prior evaporation The present technology invention Impedance between two 2.2 2.5 ends of the second electrode (Impedance of cathode) () Current density 3.9 4.0 (mA/cm.sup.2) Driving voltage (V) 5.0 4.8 Current efficiency (cd/A) 27.1 26.9 Power efficiency (lm/W) 17.3 17.6
(23) Please refer to
(24) When the method of the present invention is used to manufacture organic optoelectronic devices, the frequency of using, aligning, and replacing the metal masks can be effectively reduced, which can significantly reduce the manufacturing time and the contamination resulted from replacing the metal masks. Moreover, the organic optoelectronic device of the present invention can have narrower border and larger active area than that of prior technologies because the electrical connection area of the organic optoelectronic device of the present invention is defined by laser scanning. Furthermore, the method for manufacturing organic optoelectronic device of the present invention can be applied to manufacturing not only organic light-emitting diodes (OLED), but also organic photovoltaics (OPV) and organic thin-film transistors (OTFT), etc., and can apply laser scanning with any patterns according to definitions.
(25) The above disclosure is related to the detailed technical contents and inventive features thereof. Those skilled in the art may make a variety of modifications and replacements based on the disclosures and suggestions of the invention as described without departing from the spirit thereof. Although such modifications and replacements are not fully disclosed in the above descriptions, they have substantially been covered by the following claims.