SEPARATING MEMBRANE, DIAPHRAGM SEAL WITH A SEPARATING MEMBRANE OFSAID TYPE, AND PRESSURE MEASURING UNIT WITH A DIAPHRAGM SEAL OF SAID TYPE

Abstract

A separating membrane includes: a planar edge region for the joining of the separating membrane to a diaphragm seal body; a working region offset in an axial direction relative to the edge region; and a transition region between the edge region and the working region, wherein the transition region extends over a radial region of not more than one quarter of an outer radius of the transition region, wherein the working region has a substantially planar center and an embossed pattern or undulation pattern between the center and an outer edge of the working region, wherein from the rest position to a point of deflection with a dimensionless pressure equivalent, the separating membrane has a characteristic curve in which, for a coefficient of determination R2 of a linear regression of the characteristic curve, the following applies: (1−R2)<1%.

Claims

1-16. (canceled)

17. A separating membrane, comprising: a planar edge region configured to facilitate joining of the separating membrane to a diaphragm seal body; a working region offset in an axial direction relative to the edge region by at least three thicknesses of the separating membrane; and a transition region between the edge region and the working region, which extends over a radial region of at least one eighth of an outer radius of the transition region, wherein the transition region extends over a radial region of not more than one quarter of the outer radius of the transition region, wherein the working region has a substantially planar center whose radius is not less than one sixth of the outer radius of the transition region, wherein the working region between the center and an outer edge of the working region includes an embossed pattern or undulation pattern, wherein, from a rest position to a point of deflection with a dimensionless pressure equivalent of not less than 250, the separating membrane is configured such that a characteristic curve thereof has a coefficient of determination (R.sup.2) of a linear regression of the characteristic curve, the following applies: (1−R.sup.2)<1%.

18. The separating membrane of claim 17, wherein the transition region extends over a radial region of not less than one sixth of the outer radius of the transition region, and/or wherein the transition region extends over a radial region of not more than one fifth of the outer radius of the transition region.

19. The separating membrane of claim 17, wherein the separating membrane is configured such that for the coefficient of determination (R.sup.2) of the linear regression of the characteristic curve, the following applies: (1−R.sup.2)<0.25%.

20. The separating membrane of claim 17, wherein the undulation pattern adjoins the planar center and extends to the outer edge of the working region.

21. The separating membrane of claim 17, wherein an amplitude of the undulation pattern decreases from inside to outside.

22. The separating membrane of claim 17, wherein the radius of the planar center is not more than one sixth of the outer radius of the transition region.

23. The separating membrane of claim 17, wherein the undulation pattern has not more than seven half wave trains.

24. The separating membrane of claim 17, wherein an innermost wave train of the undulation pattern between two extreme values of the wave train has an axial distance of not less than one membrane thickness.

25. The separating membrane of claim 17, wherein an innermost wave train of the undulation pattern between two extreme values of the wave train has an axial distance of not more than two membrane thicknesses.

26. The separating membrane of claim 17, wherein an outermost wave train of the undulation pattern between two extreme values of the wave train has an axial distance of not more than three quarters of a membrane thickness.

27. The separating membrane of claim 17, wherein the transition region has a frustoconical shape.

28. The separating membrane of claim 17, wherein an average wave train of the undulation pattern is not less than six membrane thicknesses.

29. The separating membrane of claim 17, wherein an average wave train of the undulation pattern is not more than 10 membrane thicknesses.

30. The separating membrane of claim 17, wherein the outer radius of the transition region is not less than 200 times the membrane thickness.

31. The separating membrane of claim 17, wherein the outer radius of the transition region is not more than 360 times the membrane thickness.

32. The separating membrane of claim 17, wherein, from the rest position to the point of deflection with the dimensionless pressure equivalent of not less than 250, the separating membrane has a substantially axisymmetrical shape.

33. A diaphragm seal, comprising: a separating membrane according to claim 17; and a diaphragm seal body, wherein the diaphragm seal body includes an annular support surface surrounding a membrane bed, wherein the edge region of the separating membrane is joined to the support surface of the diaphragm seal body to define a diaphragm seal chamber between the diaphragm seal body and the separating membrane.

34. A pressure measuring unit, comprising: a diaphragm seal according to claim 33; a pressure sensor element; and a hydraulic path in communication with the diaphragm seal chamber and configured to transfer a pressure prevailing in the diaphragm seal chamber to the sensor element via a transfer fluid, wherein a total amount of the transfer fluid in the pressure chamber and in the hydraulic path is such that the separating membrane is deflected from its rest position to an extent that a pressure exerted on the transfer fluid by the separating membrane at temperatures between 300 K and 550 K exceeds the vapor pressure of the transfer fluid.

Description

[0039] The invention is explained in the following in further detail on the basis of the exemplary embodiments shown in the figures. The following are shown:

[0040] FIG. 1a: characteristic curves of various separating membranes according to the prior art (broken lines) and of an exemplary embodiment of a separating membrane according to the invention (solid line);

[0041] FIG. 1b: a characteristic curve of an exemplary embodiment of a separating membrane according to the invention in dimensionless coordinates;

[0042] FIG. 2: a profile z(r) of a separating membrane according to the prior art;

[0043] FIG. 3: a profile z(r) of an exemplary embodiment of a separating membrane according to the invention; and

[0044] FIG. 4: a longitudinal view through an exemplary embodiment of a pressure measuring unit according to the invention.

[0045] FIG. 1 shows a p(V) diagram in which characteristic curves of various separating membranes are shown. The dot-dash characteristic curve and the double dot-dash lines show characteristic curves of separating membranes determined using paraboloid approximation and having a diameter of 17.5 mm according to di Giovanni with a ratio of H/h=2 and H/h=4 at a separating membrane thickness of 25 μm.

[0046] The dotted characteristic curve shows measurement data of a separating membrane having a diameter of 17.5 mm and a separating membrane thickness of 25 μm. The profile of the separating membrane in the rest position of the separating membrane is shown in FIG. 2. The separating membrane has three, embossed, concentric, annular half-waves which point in the same direction with respect to their immediate surroundings, viz., downwards in FIG. 2. The embossing depth H has the same thickness as approximately 2 separating membranes. The basic shape of the separating membrane is not planar, but has a center which has been lowered by approximately 2.5 separating membrane thicknesses relative to the edge. The characteristic curve runs substantially parallel to the characteristic curve with an embossing depth of H/h=2 according to di Giovanni, with a planar basic shape. While, with an embossing depth of H/h=4, a separating membrane according to di Giovanni with a planar basic shape has a smaller deviation from linearity, it is still such that it is difficult to compensate for the measurement error due to the deflection of the separating membrane, particularly in the case of volumes of more than 20 μL. It should also be pointed out that, when estimating the volume stroke using cone approximation, the volume associated with a deflection y is smaller by one third. The deviations from linearity would therefore be even more pronounced for separating membranes according to di Giovanni when estimating using cone approximation. The solid line, on the other hand, shows the characteristic curve of an exemplary embodiment of a separating membrane according to the invention with a diameter of 17 mm, which has an almost constant stiffness up to a volume stroke of 40 μL relative to the rest position. This means a considerable improvement over the prior art with regard to the linearity of the separating membrane.

[0047] In FIG. 1b, the characteristic curve of the separating membrane according to the invention is represented without dimensions, irrespective of the specific measurements and materials. On the basis of such a representation, separating membranes of different dimensions can be compared with one another. In the case of a dimensionless deflection w of approximately 17 determined using cone approximation, a dimensionless pressure equivalent p* of approximately 300 is achieved.

[0048] The dimensionless pressure equivalent p* is given as:

[00006]$p^{*}=\frac{p}{E}.Math.{\left(\frac{a}{h}\right)}^4$

[0049] The dimensionless deflection w is given as:

[00007]$w:=\frac{y}{h}=\frac{3.Math.V}{\pi .Math.a^2.Math.h}$

[0050] In the above equations, p is the pressure difference between the two membrane sides, E is the modulus of elasticity of the membrane material, a is the membrane radius, h is the membrane thickness, and y is the deflection of the membrane center assuming the cone approximation at a given volume displacement V, which produces the pressure difference p.

[0051] The slope S=dp*/dw of a linear regression of the characteristic curve for the deflection between p*=0 and p*=300 is less than 20, and, for the degree of determination R.sup.2, the following applies: (1−R.sup.2)<0.25%. This value combination cannot be achieved with the sinus membranes according to di Giovanni and the membrane shape according to the prior art shown in FIG. 2.

[0052] FIG. 3 shows the membrane center line z(r) of the exemplary embodiment of a separating membrane 100 according to the invention, the characteristic curve of which is shown in FIGS. 1a and 1b.

[0053] The separating membrane 100 comprises a planar edge region 110 and a working region 120 which are connected to one another by a substantially frustoconical transition region 130. It is provided for the separating membrane 100 to be connected to a diaphragm seal body along an outer radius of the edge region 110 by means of a circumferential joint. The working region comprises a substantially planar center 122, which is surrounded by an undulation pattern 124 that extends as far as an outer edge of the working region, to which the transition region 130 adjoins. The planar center 122 does not have any undulation patterns that contribute to an increase in the volume stroke. An undulation pattern in this region would also be of little help as a contribution to the total volume stroke, because the volume below the center is very small due to the small radii. Nevertheless, contours can occur in the planar center 122, e.g., when the separating membrane 100 is embossed on a membrane bed, which has an opening for the transfer fluid in its center. Even if the contour of such an opening is embossed in the planar center 122, the latter is still considered a planar center in the sense of the invention.

[0054] The separating membrane 100 has a metallic material, in particular a media-resistant steel, e.g., 1.4435, and has a material thickness of approximately 30 μm. The outer radius of the separating membrane 100 is approximately 8.5 mm. The outer radius of the transition region 130 is about 8.2 mm, while the inner radius of the transition region is not more than 8 mm. The height of the transition region is more than four membrane thicknesses.

[0055] The undulation pattern has five half wave trains, the amplitude of which decreases from the inside to the outside. Thus, the difference between the two outer extrema of the undulation pattern is approximately one third of a membrane thickness, while the difference between the two inner extrema of the undulation pattern is approximately four thirds of the membrane thickness. The radius of the planar center 122 is approximately one tenth of the radius of the separating membrane 100.

[0056] The separating membrane formed in this way shows the observed linear behavior. The shape is obtained by embossing a planar circular membrane blank, which is joined along its edge to a diaphragm seal body, on a membrane bed of the diaphragm-seal body, the contour of which serves as a die for the separating membrane.

[0057] FIG. 4 shows a pressure measuring unit 200 according to the invention, which comprises a diaphragm seal 140 according to the invention with a separating membrane 100 according to the invention. The separating membrane 100 is joined along an outer radius of its edge region 110 to a circumferential joint with an edge region 152 of the diaphragm seal body 150, wherein a planar circular membrane blank is joined to the diaphragm seal body 150, and the final shape of the separating membrane 100 is produced by embossing the circular membrane blank on a membrane bed 154 of the diaphragm-seal body 150. Due to the elasticity of the material of the separating membrane 100, the latter springs back after the embossing on the membrane bed 154 into its equilibrium position defined by the embossing, as a result of which a diaphragm seal chamber 160 is formed between the separating membrane 100 and the diaphragm seal body 150. A hydraulic path 162 extends from the diaphragm seal chamber 160 to a pressure sensor element 180 in order to apply a pressure prevailing in the diaphragm seal chamber 160 to a measuring membrane 184 in a sensor chamber 182 of the pressure sensor element 180. The hydraulic path 162 comprises a bore 164 through the diaphragm seal body 150, and a capillary line 166, which extends between the diaphragm seal body 150 and the pressure sensor element 180. The quantity of a transfer fluid in the space enclosed between the separating membrane 100 and the measuring membrane 184 is selected such that the separating membrane is already slightly pre-stressed at 300 K, so that, above 300 K, the pressure on the transfer fluid caused by the pre-stress is higher than the vapor pressure of the transfer fluid. In this way, the transfer fluid is prevented from outgassing when a media pressure present at the separating membrane falls below the vapor pressure of the transfer fluid.

[0058] The pressure sensor element has an electrical converter, not shown in detail here, in order to provide a pressure-dependent primary signal, which is processed by a measuring circuit 190 of the pressure measuring unit 200. The pressure measuring unit 200 furthermore has a substantially metallic housing 192, in which the pressure sensor element 180 and the measuring circuit 190 are arranged, wherein the housing 192 is connected here to the diaphragm seal body 150.