METHOD, DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

Abstract

A method for operating a magnetic actuator comprises: ascertaining a mathematical model of the actuator which describes a change in a motor constant of the actuator as a function of the electrical drive power supplied; driving the actuator with a first electrical drive power as a function of a predetermined target force; ascertaining the change in the motor constant of the actuator on account of driving the actuator with the first electrical drive power via the mathematical model; ascertaining a correction value for the first electrical drive power as a function of the ascertained change in the motor constant; and driving the actuator with a second electrical drive power as a function of the first electrical drive power and the ascertained correction value.

Claims

1. A method of operating a magnetic actuator configured to provide a mechanical force as a function of an electrical drive power, the method comprising: determining a mathematical model of the magnetic actuator, the mathematical model describing a change in a motor constant of the magnetic actuator as a function of an electrical drive power supplied to the magnetic actuator; driving the magnetic actuator with a first electrical drive power as a function of a target force; using the mathematical model to determine the change in the motor constant of the magnetic actuator due to driving the magnetic actuator with the first electrical drive power; determining a correction value for the first electrical drive power as a function of the change in the motor constant; and driving the magnetic actuator with a second electrical drive power as a function of the first electrical drive power and the correction value.

2. The method of claim 1, further comprising using the magnetic actuator to actuate an optical element.

3. The method of claim 1, wherein the optical element is in an optical system.

4. The method of claim 1, wherein the first electrical drive power is proportional to an input current at the magnetic actuator.

5. The method of claim 1, wherein determining the mathematical model comprises: driving the magnetic actuator with the first electrical drive power to provide the target force; detecting the force provided by the magnetic actuator; controlling the first electrical drive power as a function of the detected force; detecting a change in the first electrical drive power over time; and providing a model describing the temporal profile and/or determining a parameter value of the model as a function of the detected change in the first electrical drive power over time.

6. The method of claim 1, further comprising: detecting the electrical drive power supplied to the magnetic actuator; and using the electrical drive power when determining the change in the motor constant.

7. The method of claim 1, further comprising: detecting a present actuator temperature; and using the actuator temperature as feedback when determining the change in the motor constant.

8. The method of claim 1, wherein determining the mathematical model is performed under ambient conditions which correspond to envisaged operating conditions of the magnetic actuator.

9. The method of claim 1, the mathematical model is represented by at least one PT1 element and a PT0 element.

10. The method of claim 1, further comprising selecting the mathematical model based on a theoretical description of the magnetic actuator, wherein determining the mathematical model determining a parameter value of the mathematical model.

11. One or more machine-readable hardware storage devices comprising instructions that are executable by one or more processing devices to perform operations comprising the method of claim 1.

12. A system comprising: one or more processing devices; and one or more machine-readable hardware storage devices comprising instructions that are executable by the one or more processing devices to perform operations comprising the method of claim 1.

13. A method, comprising: determining a mathematical model of the magnetic actuator which describes a change in a motor constant of the magnetic actuator as a function of the electrical drive power supplied to the magnetic actuator; driving a magnetic actuator with a first electrical drive power as a function of a target force; using a mathematical model to determine a change in a motor constant of the magnetic actuator due to driving the magnetic actuator with the first electrical drive power, the mathematical model describing a change in the motor constant of the magnetic actuator as a function of the electrical drive power supplied to the magnetic actuator; determining a correction value for the first electrical drive power as a function of the change in the motor constant; and driving the magnetic actuator with a second electrical drive power as a function of the first electrical drive power and the correction value, wherein the method comprises using the magnetic actuator to actuate an optical element.

14. One or more machine-readable hardware storage devices comprising instructions that are executable by one or more processing devices to perform operations comprising the method of claim 13.

15. A system comprising: one or more processing devices; and one or more machine-readable hardware storage devices comprising instructions that are executable by the one or more processing devices to perform operations comprising the method of claim 13.

16. A drive device configured to drive a magnetic actuator to provide a mechanical force as a function of an electrical drive power, the drive device comprising: a modeling unit configured to provide a mathematical model of the magnetic actuator which describes a change in a motor constant of the magnetic actuator as a function of the electrical drive power; a driving unit configured to drive the magnetic actuator with a first electrical drive power as a function of a target force; an evaluation unit configured to determine a change in the motor constant of the magnetic actuator due to driving the magnetic actuator with the first electrical drive power and as a function of the mathematical model; and a correction unit configured to determine a correction value for the first electrical drive power as a function of the determined change in the motor constant of the magnetic actuator, wherein the driving unit is configured to drive the magnetic actuator with a second electrical drive power as a function of the first electrical drive power and the correction value.

17. The drive device of claim 16, further comprising a detection unit configured to detect an electrical drive power supplied to the magnetic actuator, wherein the evaluation unit is configured to determine the change in the motor constant as a function of the detected electrical drive power.

18. A system, comprising: an actuator; and a drive device according to claim 16, wherein the drive device is configured to drive the actuator.

19. The system of claim 18, further comprising an optical element configured to be actuated by the actuator

20. The system of claim 18, wherein the system comprises a lithography optical system.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0075] FIG. 1 shows a schematic block diagram of an exemplary embodiment of a method for operating a magnetic actuator;

[0076] FIG. 2 schematically shows an exemplary embodiment of a magnetic actuator;

[0077] FIG. 3 shows an exemplary diagram of a motor constant at various temperatures;

[0078] FIG. 4 shows an exemplary diagram of a change in a drive power for providing a constant force;

[0079] FIG. 5 shows a schematic block diagram of a mathematical model of a magnetic actuator;

[0080] FIG. 6 shows a schematic block diagram of a mathematical model of a magnetic actuator;

[0081] FIG. 7 shows a schematic block diagram of an arrangement for ascertaining a mathematical model;

[0082] FIG. 8 shows a schematic block diagram of a drive device for driving a magnetic actuator;

[0083] FIG. 9 schematically shows an exemplary embodiment of an optical system;

[0084] FIG. 10A shows a schematic view of an embodiment of an EUV lithography apparatus; and

[0085] FIG. 10B shows a schematic view of an embodiment of a DUV lithography apparatus.

EXEMPLARY EMBODIMENTS

[0086] Identical elements or elements having an identical function have been provided with the same reference signs in the figures, unless indicated to the contrary. It should also be noted that the illustrations in the figures are not necessarily true to scale.

[0087] FIG. 1 shows a schematic block diagram of an exemplary embodiment of a method for operating a magnetic actuator 200 (see FIGS. 2, 7-9, 10A and 10B). The actuator 200 is configured for providing a mechanical force A (see FIG. 2) as a function of an electrical drive power PS (see FIG. 8 or 9).

[0088] A first step S1 involves ascertaining a mathematical model of the actuator 200 which describes a change in a motor constant k (see FIG. 3) of the actuator 200 as a function of the electrical drive power PS supplied. The relationship between the electrical drive power PS and the motor constant k is explained in greater detail below with reference to FIGS. 3-6.

[0089] A second step S2 involves driving the actuator 200 with a first electrical drive power PS as a function of a predetermined target force FS (see FIGS. 3, 8, 9, 10A and 10B). The first electrical drive power PS is determined on the basis of the (known) motor constant k under specific conditions, for example normal conditions.

[0090] A third step S3 involves ascertaining the change in the motor constant k of the actuator 200 on account of driving the actuator 200 with the first electrical drive power PS via the mathematical model. By way of example, the mathematical model is evaluated, for example the electrical drive power PS serving as an input variable.

[0091] A fourth step S4 involves ascertaining a correction value for the first electrical drive power PS as a function of the ascertained change in the motor constant k. The correction value is for example a correction value ΔI (see FIG. 3, 4 or 8) for the drive current I (see FIG. 2 or 7) applied to the actuator 200.

[0092] A fifth step S5 involves driving the actuator 200 with a second electrical drive power PS as a function of the first electrical drive power PS and the ascertained correction value. The second electrical drive power PS is for example a sum of the first electrical drive power PS and the correction value.

[0093] The change in the motor constant k owing to heating of the actuator 200 is compensated for in this way, such that the force A provided by the actuator 200 corresponds to the demanded target force FS. By way of example, the provided force A given a constant target force FS is likewise constant, even though the motor constant k changes slowly, without the need for explicit force feedback control for the actuator 200. In this case, the ascertainment of the mathematical model can be accorded particular importance since this substantially defines the accuracy of the compensation.

[0094] FIG. 2 schematically shows an exemplary embodiment of a magnetic actuator 200 that can be operated for example in accordance with the method from FIG. 1. The magnetic actuator 200 comprises a permanent magnet 210 surrounded by a conductor arrangement 220, which here forms a coil. On one side, the permanent magnet 210 of the actuator 200 is mechanically connected to the element 230 to be actuated. This ensures that the force

[0095] A provided by the actuator 200 is transmitted to the element 230. On the other side, the permanent magnet 210 is secured to a rigid force frame 250 via a coupling element 240. The coupling element 240 transmits the force opposing the force A to the force frame 250, which forms a mechanical fixed point for the actuator 200. The coupling element 240 is embodied as a spring, for example, which defines a rest position of the permanent magnet 210 in relation to the force frame 250 and permits a relative movement between the permanent magnet 210 and the force frame 250. The deflection is proportional to the force A, for example, for which reason the two terms can be used interchangeably with one another.

[0096] The conductor arrangement 220 is connected to a voltage or current source V, which provides an electrical drive power PS (see FIG. 8, 9, 10A or 10B). The electrical drive power PS can be calculated in accordance with Ohm's law, for example, as the product of the drive voltage VS and the drive current IS. In order to achieve a higher accuracy, a phase angle of current and voltage can be taken into account. The conductor arrangement 220 can be fixed relative to the force frame 250.

[0097] If the voltage source V energizes the conductor arrangement 220 with a drive current IS, an induced magnetic field builds up for example within the coil, i.e. in the region of the permanent magnet 210. The magnetic field interacts with the magnetic field of the permanent magnet 210, thus resulting in a mechanical force action. Furthermore, the interaction leads to heating of the permanent magnet 210. The heating has the effect that the magnetization of the permanent magnet 210 becomes weaker, which affects the magnitude of the force action. This is described in more specific detail below with reference to FIG. 3.

[0098] FIG. 3 shows an exemplary diagram of a motor constant k for an electrical actuator 200, for example one of those shown in FIG. 2, FIGS. 7-8, FIG. 10A or FIG. 10B, at two different temperatures T1 and T2.

[0099] The diagram shows a current axis I and a force axis F. The lines T1 and T2 correspond to the functional relationship of the provided force of the magnetic actuator 200 as a function of the current I with which the actuator 200 is driven. The current I could also be replaced by the voltage or generally the electrical power. The motor constant k of the actuator 200 is given by the gradient of the respective line T1, T2. In this case, the line T1 corresponds to a temperature of 25° C., for example, and the line T2 corresponds to a temperature of 45° C., for example. It is immediately clear from this illustration that, at different temperatures, different currents are also used in order to attain the same force, for example the target force FS. In this regard, for example, from a first current value I0 that is sufficient to attain the target force FS at 25° C. (line T1), a current value Iinf increased by a difference magnitude ΔI is present in order to attain the same target force FS at the temperature of 45° C. (line T2). Since the temperature of the actuator 200 increases principally owing to the driving with the electrical drive power PS (and accordingly decreases when the electrical drive power PS decreases), the dynamic behavior of the actuator 200 can be simulated with the aid of a mathematical model on the basis of the known electrical drive power PS.

[0100] FIG. 4 shows an exemplary diagram of a change in a drive power for providing a constant force, for example for one of the magnetic actuators 200 shown in FIG. 2, FIGS. 7-9, FIG. 10A or FIG. 10B. The diagram has a horizontal time axis t and a vertical current axis I, the current I being regarded here as representative of the electrical power. At a first point in time t0, the actuator 200 is energized with a first current I0. As already explained above, this leads to heating of the permanent magnet 210 (see FIG. 2) and consequently to a reduced motor constant k (see FIG. 3). In order nevertheless to provide the same force, the actuator 200 is operated with a drive current IS that rises continuously in accordance with the temperature of the permanent magnet 210. At a point in time t1, for example, a thermal equilibrium is reached in the permanent magnet 210, for which reason the motor constant k does not change further and the drive current IS remains stable at a value of Iinf=I0+ΔI. The period of time that elapses until the thermal equilibrium is reached depends on various factors, for example a heat capacity and a thermal conductivity of the actuator 200. The behavior of the actuator 200 in terms of time dynamics can be represented via a P feedback control system, for example, as is explained below with reference to FIG. 5.

[0101] FIG. 5 shows a schematic block diagram of a mathematical model of a magnetic actuator 200, for example of the actuator 200 illustrated in FIG. 2, FIGS. 7-9, FIG. 10A or FIG. 10B. The mathematical model is represented here in the form of a P feedback control system having an nth order P element PTn and a proportional element PT0 in a series circuit. Taking account of a nominal motor constant k, for example the motor constant k of the modeled actuator 200 under normal conditions, the resulting output value of the P feedback control system is the change Δk in the motor constant k. The change Δk in the motor constant k can be written as a function of the drive current IS and time t for example in accordance with equation (3).

Δk(t)=k.Math.ΔI(t)/(IS+ΔI(t))  equation (3).

[0102] In this case, ΔI(t) is the temporally variable component of the drive current IS, as illustrated for example in the diagrams in FIG. 3 or 4.

[0103] The input variable for the P feedback control system is the electrical drive power PS. The PTn element, which is a PT1 element, for example, outputs the correction value ΔI for the current as output value. The PTn element is characterized by at least one time constant and a gain factor, for example. The PT0 element describes the change Δk in the motor constant k for example on the basis of the correction value ΔI and the nominal motor constant k.

[0104] FIG. 6 shows a further schematic block diagram of a mathematical model of a magnetic actuator 200, for example of the actuator 200 illustrated in FIG. 2, FIGS. 7-9, FIG. 10A or FIG. 10B. Here, in a similar manner to FIG. 5, the mathematical model is represented in the form of a P feedback control system. In contrast to FIG. 5, here two nth order P elements PTn are arranged in a series circuit with a proportional element PT0. The overall transfer function of the P feedback control system illustrated corresponds to that of the system illustrated in FIG. 5. In order to ensure that the mathematical model does not drift away from reality, which could occur for example as a result of model inaccuracies or small discrepancies between the electrical drive power PS provided to the mathematical model as input variable and the actual drive power, here an actuator temperature T, optionally the coil temperature, is supplied to the mathematical model as a physical measurement variable of the magnetic actuator 200. This ensures that the dynamic development of the mathematical model remains coupled to the actual behavior of the actuator 200.

[0105] The first PTn element describes for example the transfer function between the electrical drive power PS and a coil temperature T of the magnetic actuator 200. If the electrical drive power PS supplied to the mathematical model is erroneous, an erroneous coil temperature T arises as a consequence. By virtue of the coil temperature T being supplied to the model as a measurement value in the present case, measurement errors, for example of the electrical drive power PS, can be corrected. The coil temperature T can be detected on the basis of a coil voltage and a coil current.

[0106] FIG. 7 shows a schematic block diagram of an arrangement for ascertaining a mathematical model of a magnetic actuator 200. In this case, the magnetic actuator 200 is operated via an electrical drive circuit controlled by a control unit 300. A sensor unit 310 is assigned to the actuator 200, which sensor unit detects a provided force or an effected deflection of the actuator 200 and outputs it to the control unit 300. Furthermore, a current measuring unit for measuring the drive current IS and a voltage measuring unit for measuring a drive voltage VS are arranged in the electrical circuit. The control unit 300 effects control with respect to the force or deflection of the actuator 200, for example. For example, the drive voltage VS is constant, and so the change in the motor constant k (see FIG. 3) is compensated for by changing the drive current IS. The control unit 300 therefore controls the voltage source V via a temporally variable current I(t).

[0107] An ascertaining unit 320 receives all measurement, sensor and control signals, for example, from the control unit 300. In this regard, by recording the temporally variable control signal I(t), it is possible to identify the PT0 element and the PTn element from FIG. 5, that is to say that it is possible to ascertain the parameter values of the PT0 element and of the PTn element. The ascertaining unit 320 can apply various automatic algorithms in order to identify the mathematical model. In this case, a plurality of different models can be predefined, for example, from which the ascertaining unit 320 selects the best model. In this case, the “best model” can be that model which has the smallest deviation in accordance with a specific quality factor. The ascertaining unit 320 can for example also comprise a neural network, which at least partly carries out or assists the ascertaining of the mathematical model. By way of example, such a neural network can be used in order to make a preselection from the plurality of possible mathematical models.

[0108] FIG. 8 shows a schematic block diagram of a drive device 400 for driving a magnetic actuator 200, for example the magnetic actuator 200 shown in FIG. 2, 7, 9, 10A or 10B. The drive device 400 is configured for example for carrying out the method described with reference to FIG. 1. A predetermined target force FS is supplied to the drive device 400 externally, for example from a control computer (not shown). A predetermined target position of the actuator 200 can also be considered instead of the predetermined target force FS. The drive device 400 is configured to drive the actuator 200 with an electrical drive power PS, such that the actuator 200 provides the predetermined target force FS and thus brings about movement to the predetermined target position.

[0109] For this purpose, the drive device 400 comprises a driving unit 420 comprising for example a controlled voltage or current source V (see FIG. 2 or 7), which can provide the electrical drive power PS. Furthermore, the drive device 400 comprises an evaluation unit 430 configured to evaluate a mathematical model of the actuator 200, provided by a modeling unit 410, as a function of the present drive power PS. By way of example, the mathematical model is given in the form of a P feedback control system (see FIG. 5 or 6). The evaluation unit 430 supplies the drive power PS as input signal and obtains as output signal a value for the change Δk in the motor constant k of the actuator 200. The value Δk is supplied to a correction unit 440, which ascertains a correction value ΔI for the drive power PS on the basis of the value Δk, which correction value in this example is represented as a correction value ΔI for the drive current IS (see FIG. 2 or 7).

[0110] The driving unit 420 changes the drive power PS by the correction value ΔI; by way of example, the drive current IS is increased or decreased by the correction value ΔI. The mathematical model is constantly evaluated on the basis of the drive power PS. Since all earlier drive powers PS were likewise supplied to the mathematical model, these are taken into account in the present state of the mathematical model. Therefore, the mathematical model can correctly represent even processes exhibiting a great time delay, as a function of the drive power PS. In many applications, the target force FS or the corresponding target position changes with a high frequency of 1-100 kHz, the motor constant k changing more slowly by orders of magnitude, which is owing to the comparatively slow change in the actuator temperature in reaction to a changed drive power PS. By virtue of the correction of the electrical drive power PS on the basis of the mathematical model, it is possible to compensate for the change Δk in the motor constant k of the actuator 200 as early as before intervention by a closed control loop, and therefore firstly more rapidly and secondly with a lower complexity, whereby a precision of the actuation by the actuator 200 is improved.

[0111] FIG. 9 schematically shows an exemplary embodiment of an optical system 500. The optical system 500 is for example an illumination beam path, for example in a microscope. The optical system 500 comprises a light source LS, the light from which is collimated by a first lens element 128. The collimated light is incident on a first optical element 510, which is embodied as a plane mirror and is mounted so as to be displaceable about an axis via a magnetic actuator 200 in order to control a direction of the collimated light. The light is reflected onto a second optical element 510, which is embodied here as a parabolically curved mirror that focuses the light onto a point on an object 124.

[0112] The magnetic actuator 200 is for example the magnetic actuator 200 illustrated in FIG. 2, FIG. 7 or FIG. 8. In this case, the magnetic actuator 200 is controlled for example by a drive device 400, as described with reference to FIG. 8, and in accordance with the method described with reference to FIG. 1. As described with reference to FIG. 8, a predetermined target force FS, which here corresponds to a predetermined angle of the plane mirror 510 in relation to the incident light and thus to a specific illumination position on the object 124, is supplied to the drive device 400 externally. The drive device 400 thereupon drives the actuator 200 with the electrical drive power PS, such that the plane mirror 510 is adjusted to the predetermined angle. In order to counteract a slow change in the angle and thus a displacement of the illumination position owing to the heating of the actuator 200, the electrical drive power PS is constantly compensated for by the drive device 400 on the basis of the mathematical model, as described with reference to FIG. 8. The illumination of the object 124 is thus possible very precisely. It goes without saying that the drive device 400 does not exclude more extensive feedback control, for example via a closed control loop, but rather can be used in addition thereto.

[0113] FIG. 10A shows a schematic view of an EUV lithography apparatus 100A, which comprises a beam shaping and illumination system 102 and an optical system 500 embodied as a projection system. In this case, EUV stands for “extreme ultraviolet” and denotes a wavelength of the working light of between 0.1 nm and 30 nm. The beam shaping and illumination system 102 and the projection system 500 are respectively provided in a vacuum housing (not shown), each vacuum housing being evacuated with the aid of an evacuation device (not shown). The vacuum housings are surrounded by a machine room (not shown), in which driving apparatuses for mechanically moving or setting optical elements are provided. Furthermore, electrical controllers and the like may also be provided in the machine room.

[0114] The EUV lithography apparatus 100A has an EUV light source 106A. A plasma source (or a synchrotron), which emits radiation 109A in the EUV range (extreme ultraviolet range), that is to say for example in the wavelength range of 5 nm to 20 nm, can for example be provided as the EUV light source 106A. In the beam shaping and illumination system 102, the EUV radiation 109A is focused and the desired operating wavelength is filtered out from the EUV radiation 109A. The EUV radiation 109A generated by the EUV light source 106A has a relatively low transmissivity through air, for which reason the beam guiding spaces in the beam shaping and illumination system 102 and in the projection system 500 are evacuated.

[0115] The beam shaping and illumination system 102 illustrated in FIG. 10A has five mirrors 110, 112, 114, 116, 118. After passing through the beam shaping and illumination system 102, the EUV radiation 109A is guided onto a photomask (reticle) 120. The photomask 120 is likewise embodied as a reflective optical element and can be arranged outside the systems 102, 500. Furthermore, the EUV radiation 109A can be directed onto the photomask 120 via a mirror 122. The photomask 120 has a structure which is imaged onto an object 124, for example a wafer or the like, in a reduced fashion via the projection system 500.

[0116] The projection system 500 (also referred to as a projection lens) has five mirrors M1 to M5 and an optical element 510 for imaging the photomask 120 onto the wafer 124, the optical element being actuable via a plurality of magnetic actuators 200. In this case, individual mirrors M1 to M5 and the optical element 510 of the projection system 500 can be arranged symmetrically in relation to an optical axis 126 of the projection system 500. It should be noted that the number of mirrors M1 to M5 of the EUV lithography apparatus 100A is not restricted to the number shown. A greater or lesser number of mirrors M1 to M5 can also be provided. Furthermore, the mirrors M1 to M5 are generally curved on their front sides for beam shaping. Furthermore, individual or all of the mirrors M1 to M5 can be configured as actuable via one or more actuators 200, in a corresponding manner to the optical element 510.

[0117] The actuators 200 correspond to those shown in FIG. 2 or FIGS. 7-9, for example. In the present case, the optical element 510 is configured as a mirror, the front side of which is deformable by the actuators 200. By way of example, optical aberrations can be compensated for by the optical element 510, with the result that a resolution of the EUV lithography apparatus 100A is increased. Each of the actuators 200 is driven via a drive device 400 assigned to it, as explained with reference to FIG. 8. In FIG. 10A, only one drive device 400 is illustrated, for reasons of clarity. As described above, the respective drive device 400 receives a predetermined target force FS that is intended to be applied or provided by the assigned actuator 200, and thereupon drives the assigned actuator 200 with the electrical drive power PS, which is continuously corrected or adapted as described above. In this case, the predetermined target force FS can comprise for example a predetermined temporal force profile.

[0118] FIG. 10B shows a schematic view of a DUV lithography apparatus 100B, which comprises a beam shaping and illumination system 102 and an optical system 500 embodied as a projection system. In this case, DUV stands for “deep ultraviolet” and denotes a wavelength of the working light of between 30 nm and 250 nm. As has already been described with reference to FIG. 10A, the beam shaping and illumination system 102 and the projection system 500 can be arranged in a vacuum housing and/or be surrounded by a machine room with corresponding driving apparatuses.

[0119] The DUV lithography apparatus 100B has a DUV light source 106B. By way of example, an ArF excimer laser that emits radiation 109B in the DUV range at 193 nm, for example, can be provided as the DUV light source 106B.

[0120] The beam shaping and illumination system 102 illustrated in FIG. 10B guides the DUV radiation 109B onto a photomask 120. The photomask 120 is embodied as a transmissive optical element and can be arranged outside the systems 102, 500. The photomask 120 has a structure which is imaged onto an object 124, for example a wafer or the like, in a reduced fashion via the projection system 500.

[0121] The projection system 500 has a plurality of lens elements 128, mirrors 130 and/or optical elements 510 for imaging the photomask 120 onto the wafer 124, the optical elements being actuable via magnetic actuators 200. In this case, individual lens elements 128, mirrors 130 and/or optical elements 510 of the projection system 500 can be arranged symmetrically relative to an optical axis 126 of the projection system 500. It should be noted that the number of lens elements 128 and mirrors 130 of the DUV lithography apparatus 100B is not restricted to the number shown. A greater or lesser number of lens elements 128 and/or mirrors 130 can also be provided. Furthermore, the mirrors 130 are generally curved on their front sides for beam shaping. Furthermore, individual or all of the lens elements 128 and/or mirrors 130 can be configured as actuable via one or more actuators 200, in a corresponding manner to the optical element 510.

[0122] The actuators 200 correspond to those shown in FIG. 2 or FIGS. 7-9, for example. The optical elements 510 are configured as displaceable lens elements in the present case. By way of example, optical aberrations can be compensated for by the optical element 510, with the result that a resolution of the DUV lithography apparatus 100B is increased. Each of the actuators 200 is driven via a drive device 400 assigned to it, as explained with reference to FIG. 8. As described above, the respective drive device 400 receives a predetermined target force FS that corresponds here to a predetermined position of the respective lens element 510 that is intended to be applied or provided by the assigned actuator 200, and thereupon drives the assigned actuator 200 with the electrical drive power PS, which is continuously corrected or adapted as described above.

[0123] An air gap between the last lens element 128 and the wafer 124 can be replaced by a liquid medium 132 having a refractive index>1. The liquid medium 132 can be high-purity water, for example. Such a construction is also referred to as immersion lithography and has an increased photolithographic resolution. The medium 132 can also be referred to as an immersion liquid.

[0124] Although the present disclosure has been described on the basis of exemplary embodiments, it is modifiable in diverse ways.

LIST OF REFERENCE SIGNS

[0125] 100A EUV lithography apparatus [0126] 100B DUV lithography apparatus [0127] 102 Beam shaping and illumination system [0128] 106A EUV light source [0129] 106B DUV light source [0130] 109A EUV radiation [0131] 109B DUV radiation [0132] 110 Mirror [0133] 112 Mirror [0134] 114 Mirror [0135] 116 Mirror [0136] 118 Mirror [0137] 120 Photomask [0138] 122 Mirror [0139] 124 Object [0140] 126 Optical axis [0141] 128 Lens element [0142] 130 Mirror [0143] 132 Medium [0144] 200 Actuator [0145] 210 Permanent magnet [0146] 220 Conductor arrangement [0147] 230 Actuated element [0148] 240 Coupling element [0149] 250 Force frame [0150] 300 Control unit [0151] 310 Detection unit [0152] 320 Ascertaining unit [0153] 400 Drive device [0154] 410 Modeling unit [0155] 420 Driving unit [0156] 430 Evaluation unit [0157] 440 Correction unit [0158] 500 Optical system [0159] 510 Optical element [0160] A Force [0161] FS Target force [0162] I Current [0163] I0 Current value [0164] Iinf Current value [0165] IS Drive current [0166] K Motor constant [0167] LS Light source [0168] M1 Mirror [0169] M2 Mirror [0170] M3 Mirror [0171] M4 Mirror [0172] M5 Mirror [0173] PS Electrical drive power [0174] PT0 Proportional element [0175] Ptn nth order P element [0176] S1 Method step [0177] S2 Method step [0178] S3 Method step [0179] S4 Method step [0180] S5 Method step [0181] t Time [0182] t0 Point in time [0183] t1 Point in time [0184] T Temperature [0185] T1 Line [0186] T2 Line [0187] V Voltage/current source [0188] VS Drive voltage [0189] ΔI Correction value [0190] Δk Change