SEMICONDUCTOR DEVICE WITH TEST PATTERN STRUCTURES

Abstract

Apparatuses and methods with controlled resist poisoning in manufacturing semiconductor devices are described. An example apparatus includes a first structure and a second structure. The first structure includes a first conductive component and a second conductive component adjacent to one another. The second structure includes a third conductive component and a fourth conductive component adjacent to one another. The third and fourth conductive components correspond to the first and second conductive components respectively. A first distance between the first conductive component and the second conductive component is different from a second distance between the third conductive component and the fourth conductive component.

Claims

1. An apparatus comprising: a first structure including: a first conductive component and a second conductive component adjacent to one another; and a second structure including: a third conductive component and a fourth conductive component adjacent to one another, the third and fourth conductive components corresponding to the first and second conductive components respectively; wherein a first distance between the first conductive component and the second conductive component is different from a second distance between the third conductive component and the fourth conductive component.

2. The apparatus of claim 1, wherein the first conductive component comprises a first wiring and the second conductive component comprises a first contact coupled to the first wiring, wherein the third conductive component is a second wiring and the fourth conductive component is a second contact coupled to the second wiring, wherein the first distance is a distance between a side of the first wiring and a side surface of the first contact adjacent to the side of the first wiring, and wherein the second distance is a distance between a side of the second wiring and a side surface of the second contact adjacent to the side of the second wiring.

3. The apparatus of claim 1, wherein the first conductive component and the second conductive component comprise a first wiring and a second wiring respectively, wherein the third conductive component and the fourth conductive component comprise a third wiring and a fourth wiring respectively.

4. The apparatus of claim 1, wherein the first structure comprises first and second wirings extending in a first direction and adjacent to one another in a second direction different from the first direction, wherein the second structure comprises third and fourth wirings extending in the first direction and adjacent to one another in the second direction, wherein the first conductive component and the second conductive component are a first contact and a second contact respectively coupled to the first wiring, the first and the second contacts adjacent to one another in the first direction, and wherein the third conductive component and the fourth conductive component are a third contact and a fourth contact respectively coupled to the third wiring, the third and the fourth contacts adjacent to one another in the first direction.

5. The apparatus of claim 1, wherein the first structure comprises first and second wirings extending in a first direction and adjacent to one another in a second direction different from the first direction, wherein the second structure comprises third and fourth wirings extending in the first direction and adjacent to one another in the second direction, wherein the first conductive component and the second conductive component are a first contact and a second contact respectively coupled to the first wiring, the first and the second contacts adjacent to one another in the second direction, and wherein the third conductive component and the fourth conductive component are a third contact and a fourth contact respectively coupled to the third wiring, the third and the fourth contacts adjacent to one another in the second direction.

6. The apparatus of claim 1, further comprises a dielectric layer below the first structure and the second structure, wherein the dielectric layer comprises silicon nitride (Si3N4).

7. The apparatus of claim 6, wherein the dielectric layer is a first dielectric layer, wherein the first structure and the second structure comprise a second dielectric layer including silicon dioxide (SiO2) or silicon oxycarbide (SiOC).

8. An apparatus comprising: a memory cell including a transistor and a capacitor above the transistor; a first dielectric layer above the capacitor; a test pattern including: a second dielectric layer above the first dielectric layer; a first structure that includes a first interconnect above the first dielectric layer, the first interconnect including: a first conductive component and a second conductive component adjacent to one another; and a second structure that includes a second interconnect above the first dielectric layer, the second interconnect including: a third conductive component and a fourth conductive component adjacent to one another, the third and fourth conductive components corresponding to the first and second conductive components respectively; wherein a first distance between the first conductive component and the second conductive component is different from a second distance between the third conductive component and the fourth conductive component.

9. The apparatus of claim 8, wherein the first dielectric layer comprises silicon nitride (Si3N4).

10. The apparatus of claim 9, wherein the second dielectric layer comprises silicon dioxide (SiO2) or silicon oxycarbide (SiOC).

11. The apparatus of claim 8, wherein the first conductive component comprises a first wiring, and the second conductive component comprises a first contact below the first wiring and coupled to the first wiring, wherein the third conductive component is a second wiring, and the fourth conductive component is a second contact below the second wiring and coupled to the second wiring, wherein the first distance is a distance between a side of the first wiring and a side surface of the first contact adjacent to the side of the first wiring, and wherein the second distance is a distance between a side of the second wiring and a side surface of the second contact adjacent to the side of the second wiring.

12. The apparatus of claim 8, wherein the test pattern further comprises a third dielectric layer above the first, second, third and fourth conductive components; wherein the first structure further comprises a fifth conductive component and a sixth conductive component adjacent to one another disposed above the first and second conductive components, wherein the second structure further comprises a seventh conductive component and an eighth conductive component adjacent to one another disposed above the third and fourth conductive components, wherein a third distance between the fifth conductive component and the sixth conductive component is different from a fourth distance between the seventh conductive component and the eighth conductive component.

13. The apparatus of claim 8, wherein the first conductive component and the second conductive component are a first wiring and a second wiring respectively, wherein the third conductive component and the fourth conductive component are a third wiring and a fourth wiring respectively.

14. The apparatus of claim 8, wherein the first structure comprises first and second wirings extending in a first direction and adjacent to one another in a second direction different from the first direction, wherein the second structure comprises third and fourth wirings extending in the first direction and adjacent to one another in the second direction, wherein the first conductive component and the second conductive component are a first contact and a second contact below the first wiring and respectively coupled to the first wiring, the first and the second contacts adjacent to one another in the first direction, and wherein the third conductive component and the fourth conductive component are a third contact and a fourth contact below the third wiring and respectively coupled to the third wiring, the third and the fourth contacts adjacent to one another in the first direction.

15. The apparatus of claim 8, wherein the first structure comprises first and second wirings extending in a first direction and adjacent to one another in a second direction different from the first direction, wherein the second structure comprises third and fourth wirings extending in the first direction and adjacent to one another in the second direction, wherein the first conductive component and the second conductive component are a first contact and a second contact below the first wiring and respectively coupled to the first wiring, the first and the second contacts adjacent to one another in the second direction, and wherein the third conductive component and the fourth conductive component are a third contact and a fourth contact below the third wiring and respectively coupled to the third wiring, the third and the fourth contacts adjacent to one another in the second direction.

16. A method of forming an apparatus including a test pattern comprising: forming a first dielectric layer; forming a first test structure and a second structure including: forming a second dielectric layer including the first and second structure above the first dielectric layer; forming first and second openings in the first and second structure respectively; forming first and second interconnects in the first and second openings respectively, wherein the first interconnect comprises a first conductive component and a second conductive component adjacent to one another, wherein the second interconnect comprises a third conductive component and a fourth conductive component adjacent to one another, the third and fourth conductive components corresponding to the first and second conductive components respectively, and wherein a first distance between the first conductive component and the second conductive component is different from a second distance between the third conductive component and the fourth conductive component.

17. The method of claim 16, wherein the first dielectric layer comprises silicon nitride (Si3N4).

18. The method of claim 16, further comprising: forming one or more first openings and one or more second openings in the first and second structure respectively in the second dielectric layer; and forming one or more first contacts and one or more second contacts in the one or more first openings and the one or more second openings, respectively.

19. The method of claim 16, wherein the first conductive component and the second conductive component are a pair of first contacts of the one or more first contacts adjacent to one another in a direction, and wherein the third conductive component and the fourth conductive component are a pair of second contacts of the one or more second contacts adjacent to one another in the direction.

20. The method of claim 18, further comprising: forming one or more third and fourth openings above lower portions of the one or more first and second openings in the first and second structure respectively in the second dielectric layer; and depositing a conductive material to fill the third and fourth openings and the lower portions of the one or more first and second openings.

21. The method of claim 20, wherein forming the one or more first and second openings comprises: first photo patterning; and first dry etching the second dielectric layer to expose the first dielectric layer, and wherein forming the one or more third and fourth openings comprises: second photo patterning; and second dry etching the second dielectric layer to form the one or more third and fourth openings including upper portions of the one or more first and second openings respectively.

22. The method of claim 21, wherein the second photo patterning comprises: forming an anti-reflective coating on a top surface of the second dielectric layer, on side surfaces of the second dielectric layer inside the one or more third and fourth openings, and on a top surface of the first dielectric layer at bottoms of the one or more third and fourth openings; and depositing a photoresist on the anti-reflective coating.

23. The method of claim 20, further comprising: forming one or more first wirings and one or more second wirings in the one or more third openings and the one or more fourth openings, respectively.

24. The method of claim 23, wherein the first conductive component and the second conductive component are a pair of first wirings of the one or more first wirings adjacent to one another in a direction, and wherein the third conductive component and the fourth conductive component are a pair of second wirings of the one or more second wirings adjacent to one another in the direction.

25. The method of claim 23, wherein the first conductive component is one of the first wirings, and the second conductive component is one of the first contacts below the one of the first wirings and coupled to the one of the first wirings, wherein the third conductive component is one of the second wirings, and the fourth conductive component is one of the second contacts below the one of the second wirings and coupled to the one of the second wirings, wherein the first distance is a distance between a first side of the one of the first wirings adjacent to another one of the first wirings and a side surface of the one of the first contacts adjacent to the first side, and wherein the second distance is a distance between a second side of the one of the second wirings adjacent to another one of the second wirings and a side surface of the one of second contacts adjacent to the second side.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] FIG. 1 is a vertical cross-sectional view of a structure in a semiconductor device.

[0007] FIG. 2 is a vertical cross-sectional view of a structure in the semiconductor device.

[0008] FIG. 3 is a vertical cross-sectional view of a structure in the semiconductor device.

[0009] FIG. 4 is a vertical cross-sectional view of a structure in the semiconductor device.

[0010] FIG. 5 is a vertical cross-sectional view of a structure in a semiconductor device in accordance with an embodiment of the present disclosure.

[0011] FIG. 6 is a schematic diagram of test structures in a semiconductor device in accordance with an embodiment of the present disclosure.

[0012] FIG. 7A is a schematic diagram for a test structure of a structure in a semiconductor device in accordance with an embodiment of the present disclosure.

[0013] FIGS. 7B and 7C are vertical cross-sectional views of the structure of FIG. 7A in the semiconductor device in accordance with the embodiment of the present disclosure.

[0014] FIG. 8A is a schematic diagram for a test structure of a structure in a semiconductor device in accordance with an embodiment of the present disclosure.

[0015] FIGS. 8B and 8C are vertical cross-sectional views of the structure of FIG. 8A in the semiconductor device in accordance with the embodiment of the present disclosure.

[0016] FIG. 9A is a schematic diagram for a test structure of a structure in a semiconductor device in accordance with an embodiment of the present disclosure.

[0017] FIGS. 9B and 9C are vertical cross-sectional views of the structure of FIG. 9A in the semiconductor device in accordance with the embodiment of the present disclosure.

[0018] FIG. 10A is a schematic diagram for a test structure of a structure in a semiconductor device in accordance with an embodiment of the present disclosure.

[0019] FIGS. 10B and 10C are vertical cross-sectional views of the structure of FIG. 10A in the semiconductor device in accordance with the embodiment of the present disclosure.

DETAILED DESCRIPTION

[0020] Various embodiments of the present disclosure will be explained below in detail with reference to the accompanying drawings. The following detailed description refers to the accompanying drawings that show, by way of illustration, specific aspects in which embodiments of the present disclosure may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the embodiments of present disclosure. Other embodiments may be utilized, and structure, logical and electrical changes may be made without departing from the scope of the present disclosure. The various embodiments disclosed herein are not necessary mutually exclusive, as some disclosed embodiments can be combined with one or more other disclosed embodiments to form new embodiments.

[0021] FIG. 5 is a vertical cross-sectional view of a structure of a memory device 500 including a memory cell region 504 and a peripheral region 514 in accordance with one embodiment of the present disclosure. The following description uses a dynamic random-access memory (DRAM) as an illustrative example of the memory device 500. The memory device 500 includes a portion fabricated in a front-end-of-line (FEOL) above a substrate 502. The portion fabricated in the FEOL includes memory cells 506 in the memory cell region 504. The memory cells 506 are disposed on the substrate 502. Each of the memory cells 506 includes a transistor 508 and a capacitor 510 coupled to the transistor 508. In some embodiments, the transistor 508 is disposed on the substrate 502, and the capacitor 510 is disposed above the transistor 508. A dielectric layer 512 may be disposed above the capacitor 510. In the peripheral region 514, the portion fabricated in the FEOL includes a transistor 516 that may be disposed on the substrate 502. A dielectric layer 518 may be disposed above the substrate 502 in the peripheral region 514. The dielectric layer 518 may be disposed above the transistor 516. A via 520 coupled to the transistor 516 may be disposed within the dielectric layer 518. In some embodiments, the dielectric layers 512 and 518 may include one or more insulating materials. For example, the one or more insulating materials may include silicon nitride (Si3N4).

[0022] The memory device 500 includes a portion 522 fabricated in a back-end-of-line (BEOL) above the portion fabricated in the FEOL. The portion 522 includes one or more dielectric layers 531 above the dielectric layers 512 and 518 in the FEOL. The portion 522 may also include interconnects 524, 526 and 528 disposed above the dielectric layers 512 and 518. While the portion 522 in FIG. 5 includes the interconnects 524, 526 and 528, a number of interconnects may not be limited to three. In some embodiments, the interconnect 524 may be disposed on the dielectric layers 512 and 518. The interconnect 526 may be disposed on the interconnect 524. The interconnect 528 may be disposed on the interconnect 528. In some embodiments, some interconnects in the portion 522 may include one or more contacts 530 and one or more wirings 532. In some embodiments, the one or more dielectric layers of the portion 522 may be disposed between the wirings 532 in the portion 522. Each of the one or more contacts 530 may be disposed in one of the one or more dielectric layers 531. Each of the one or more wirings 532 may be disposed on one of the one or more dielectric layers 531.

[0023] In some embodiments, the one or more dielectric layers 531 include one or more insulating materials. For example, the one or more insulating materials may include silicon dioxide (SiO2) or silicon oxycarbide (SiOC). The interconnects 524, 526 and 528 are conductive layers. In some embodiments, the interconnects 524, 526 and 528 may be a first metal layer (M1), a second metal layer (M2), and a third metal layer (M3) including metal, respectively. For example, the interconnects 524, 526 and 528 may include copper (Cu). Each of the interconnects 524, 526 and 528 may be formed using the dual-Damascene process. The contacts 530 and the wirings 532 above the contacts 530 may be formed simultaneously in the dual-Damascene process.

[0024] FIG. 6 is a schematic diagram of test structures 61A and 61B in a test portion 60 of a semiconductor device in accordance with an embodiment of the present disclosure. In some embodiments, the test portion 60 may be in the memory device 500 of FIG. 5. The test portion 60 includes a plurality of test structures, including the test structures 61A and 61B. In this example, two test structures 61A and 61B are illustrated; however a number of the plurality of test structures is not be limited to two. The test portion 60 may be formed anywhere in the semiconductor device. The test portion 60 may be disposed any space in each die, such as any corner of each die. Alternatively, the test portion 60 may be disposed in a scribe region between adjacent dies. The test portion 60 may be disposed in a manner that positioning of the test portion 60 does not affect physical/electrical characteristics of the die.

[0025] The test structures 61A and 61B may be formed simultaneously using the dual-Damascene process. The test portion 60 includes a dielectric layer 62 in a BEOL, such as any of the dielectric layer 531 in the portion 522 of FIG. 5. The dielectric layer 62 includes one or more insulating materials. For example, the one or more insulating materials may include silicon dioxide (SiO2) or silicon oxycarbide (SiOC). In some embodiments, the test portion 60 may be formed on a dielectric base layer, such as the dielectric base layer 11 of FIGS. 1-4 or above the dielectric layers 512 and 518. The test structures 61A and 61B are disposed in and on the dielectric layer 62. The test structures 61A and 61B include conductive components, such as wirings and contacts coupled to the wirings. The conductive components may include, for example, copper (Cu).

[0026] The test structures 61A and 61B include different patterns of wirings and contacts, including different pattern parameters. The different pattern parameters include a first distance between first and second conductive components in the test structure 61A and a second distance between third and fourth conductive components corresponding to the first and second conductive component in the test structure 61B. For example, the first and second distances may be different space widths between adjacent wirings, different space widths between adjacent contacts, and different space widths between a side of a wiring and a contact adjacent to the side of the wiring. The test portion 60 may be used to compare effects of resist poisoning on the patterns in the test structures 61A and 61B. Based on the results of using the different test structures, a suitable structure for wirings and contacts formed by a dual-Damascene process may be determined.

[0027] FIG. 7A is a schematic diagram for a test layout of a structure 70 in a semiconductor device in accordance with an embodiment of the present disclosure. FIG. 7A may be a top view showing the test layout of the structure 70 including a line A-A′ extending in a direction 712 and a line B-B′ extending in a direction 711. The directions 711 and 712 are different from each other. In some embodiments, the direction 712 may be perpendicular to the direction 711.

[0028] FIGS. 7B and 7C are vertical cross-sectional views of the structure 70 in the semiconductor device in accordance with the embodiment of the present disclosure. FIG. 7B is a cross-sectional view showing the structure 70 along the line A-A′ shown in FIG. 7A. FIG. 7C is a cross-sectional view showing the structure 70 along the line B-B′ shown in FIG. 7A.

[0029] In some embodiments, the structure 70 may be included in the portion 522 fabricated in a back-end-of-line (BEOL) of FIG. 5. The structure 70 may be formed using the dual-Damascene process. The structure 70 may be included in a memory array region 504 and/or a peripheral region 514 of the memory device 500. In some embodiments, the structure 70 may be included in the test structures 61A and/or 61B of FIG. 6. The structure 70 may be used to describe pattern parameters of test structures, such as the test structures 61A and 61B.

[0030] The structure 70 includes a dielectric layer 72, wirings 73A and 73B, and contacts 74 coupled to either one of the wirings 73A and 73B. Each of the wirings 73A and 73B is a conductive component. Each of the wirings 73A and 73B has a length X in the direction 711 and a width Y in the direction 712. The wirings 73A and 73B are disposed adjacent to one another in the direction 712, with a distance Z between the adjacent wirings 73A and 73B. The distance Z is an example of a distance between two conductive components, for example, between two adjacent wirings 73A and 73B. The distance Z between the adjacent wirings 73A and 73B is a distance between two adjacent wirings 73A and 73B and may represent a width of a space between the adjacent wirings 73A and 73B.

[0031] Some of the contacts 74 may be disposed under the wiring 73A and coupled to the wiring 73A. Some of the contacts 74 may be disposed under the wiring 73B and coupled to the wiring 73B. In some embodiments, the contacts 74 may be in a pillar shape. Each of the contacts 74 is a conductive component. Each of the contacts 74 may have a cross section having a length CHX in the direction 711 and a width CHY in the direction 712. The contacts 74 may include adjacent contacts 74 in the direction 711 with a distance CHS1 between the adjacent contacts 74. The distance CHS1 between the adjacent contacts 74 may represent a width of a space between the adjacent contacts 74. The contacts 74 may include adjacent contacts 74 in the direction 712 with a distance CHS2 between the adjacent contacts 74. The distance CHS1 is another example of a distance between two conductive components, for example, between adjacent contacts 74. Similarly, the distance CHS2 is another example of a distance between two conductive components, for example, between adjacent contacts 74.

[0032] The contacts 74 may include some contacts 74 adjacent to a side 75 of each of wirings 73A and 73B with a distance Y0 from the side 75. The distance Y0 between some contacts 74 and the side 75 may represent a width of a space between the contacts 74 and the side 75. The distance Y0 is another example of a distance between two conductive components. For example, the distance Y0 may be a distance between the side 75 and a side surface of the contact 74 adjacent to the side 75.

[0033] As previously described, the test structures 61A and 61B in FIG. 6 have different pattern parameters. The different pattern parameters may include different distances Z (space widths) between the adjacent wirings 73A and 73B, different distances Y0 (space widths) between the side 75 and contacts 74 adjacent to the side 75, different distances CHS1 (space widths) between the contacts 74 adjacent in the direction 711, and/or different distances CHS2 (space widths) between the contacts 74 adjacent in the direction 712.

[0034] Examples of variations of the structure 70 for the test structures 61A and 61B will be described with reference to FIG. 8A to FIG. 10C. In the examples of FIG. 8A to FIG. 10C, a length X and a width Y of wirings and a length CHX and a width CHY of contacts may be constant.

[0035] FIG. 8A is a schematic diagram for a test layout of a structure 80 in a semiconductor device in accordance with an embodiment of the present disclosure. FIG. 8A may be a top view showing the test layout of the structure 80 including a line A-A′ extending in a direction 812 and a line B-B′ extending in a direction 811. The directions 811 and 812 are different from each other. In some embodiments, the direction 812 may be perpendicular to the direction 811.

[0036] FIGS. 8B and 8C are vertical cross-sectional views of the structure 80 in the semiconductor device in accordance with the embodiment of the present disclosure. FIG. 8B is a cross-sectional view showing the structure 80 along the line A-A′ shown in FIG. 8A. FIG. 8C is a cross-sectional view showing the structure 80 along the line B-B′ shown in FIG. 8A. In some embodiments, the structure 80 may be used for any of the test structures 61A and 61B, but not both.

[0037] The structure 80 includes a dielectric layer 82, wirings 83A and 83B, and contacts 84 coupled to either one of the wirings 83A and 83B. Each of the wirings 83A and 83B and the contacts 84 is a conductive component. Each of the wirings 83A and 83B has a length X in the direction 811 and a width Y in the direction 812. The wirings 83A and 83B are disposed adjacent to one another in the direction 812, with a distance Z that is 200 nm between the adjacent wirings 83A and 83B. The distance Z is an example of a distance between two conductive components, for example, between two adjacent wirings 83A and 83B.

[0038] Some of the contacts 84 may be disposed under the wiring 83A and coupled to the wiring 83A. Some of the contacts 84 may be disposed under the wiring 83B and coupled to the wiring 83B. In some embodiments, the contacts 84 may be in a pillar shape. Each of the contacts 84 may have a cross section having a length CHX in the direction 811 and a width CHY in the direction 812. The contacts 84 may include adjacent contacts 84 in the direction 811 with a distance CHS1 that is 250 nm between the adjacent contacts 84. The contacts 84 may include adjacent contacts 84 in the direction 812 with a distance CHS2 between the adjacent contacts 84. The distance CHS1 is another example of a distance between two conductive components, for example, between adjacent contacts 84. Similarly, the distance CHS2 is another example of a distance between two conductive components, for example, between adjacent contacts 84.

[0039] The contacts 84 may include some contacts 84 adjacent to a side 85 of each of wirings 83A and 83B with a distance Y0 that is 50 nm from the side 85. The distance Y0 is another example of a distance between two conductive components. For example, the distance Y0 may be a distance between the side 85 and a side surface of the contact 84 adjacent to the side 85.

[0040] FIG. 9A is a schematic diagram for a test layout of a structure 90 in a semiconductor device in accordance with an embodiment of the present disclosure. FIG. 9A may be a top view showing the test layout of the structure 90 including a line A-A′ extending in a direction 912 and a line B-B′ extending in a direction 911. The directions 911 and 912 are different from each other. In some embodiments, the direction 912 may be perpendicular to the direction 911.

[0041] FIGS. 9B and 9C are vertical cross-sectional views of the structure 90 in the semiconductor device in accordance with the embodiment of the present disclosure. FIG. 9B is a cross-sectional view showing the structure 90 along the line A-A′ shown in FIG. 9A. FIG. 9C is a cross-sectional view showing the structure 90 along the line B-B′ shown in FIG. 9A. In some embodiments, the structure 90 may be used for any of the test structures 61A and 61B, but not both.

[0042] The structure 90 includes a dielectric layer 92, wirings 93A and 93B, and contacts 94 coupled to either one of the wirings 93A and 93B. Each of the wirings 93A and 93B and the contacts 94 is a conductive component. The wirings 93A and 93B, and the contacts 94 in FIGS. 9A-9C correspond to the wirings 83A and 83B, and the contacts 84 in FIGS. 8A-8C, respectively. Each of the wirings 93A and 93B has a length X in the direction 911 and a width Y in the direction 912. The wirings 93A and 93B are disposed adjacent to one another in the direction 912, with a distance Z that is 100 nm, shorter than the distance Z of FIGS. 8A-8B, between the adjacent wirings 93A and 93B. The distance Z is an example of a distance between two conductive components, for example, between two adjacent wirings 93A and 93B.

[0043] Some of the contacts 94 may be disposed under the wiring 93A and coupled to the wiring 93A. Some of the contacts 94 may be disposed under the wiring 93B and coupled to the wiring 93B. In some embodiments, the contacts 94 may be in a pillar shape. Each of the contacts 94 may have a cross section having a length CHX in the direction 911 and a width CHY in the direction 912. The contacts 94 may include adjacent contacts 94 in the direction 911 with a distance CHS1 that is 250 nm between the adjacent contacts 94. The contacts 94 may include adjacent contacts 94 in the direction 912 with a distance CHS2 between the adjacent contacts 94. The distance CHS1 is another example of a distance between two conductive components, for example, between adjacent contacts 94. Similarly, the distance CHS2 is another example of a distance between two conductive components, for example, between adjacent contacts 94. The distance CHS1 is another example of a distance between two conductive components, for example, between adjacent contacts 94. Similarly, the distance CHS2 is another example of a distance between two conductive components, for example, between adjacent contacts 94.

[0044] The contacts 94 may include some contacts 94 adjacent to a side 95 of each of wirings 93A and 93B with a distance Y0 that is 50 nm from the side 95. The distance Y0 is another example of a distance between two conductive components. For example, the distance Y0 may be a distance between the side 95 and a side surface of the contact 94 adjacent to the side 95.

[0045] FIG. 10A is a schematic diagram for a test layout of a structure 100 in a semiconductor device in accordance with an embodiment of the present disclosure. FIG. 10A may be a top view showing the test layout of the structure 100 including a line A-A′ extending in a direction 1012 and a line B-B′ extending in a direction 1011. The directions 1011 and 1012 are different from each other. In some embodiments, the direction 1012 may be perpendicular to the direction 1011.

[0046] FIGS. 10B and 10C are vertical cross-sectional views of the structure 100 in the semiconductor device in accordance with the embodiment of the present disclosure. FIG. 10B is a cross-sectional view showing the structure 100 along the line A-A′ shown in FIG. 10A. FIG. 10C is a cross-sectional view showing the structure 100 along the line B-B′ shown in FIG. 10A. In some embodiments, the structure 100 may be used for any of the test structures 61A and 61B, but not both.

[0047] The structure 100 includes a dielectric layer 102, wirings 103A and 103B, and contacts 104 coupled to either one of the wirings 103A and 103B. Each of the wirings 103A and 103B, and the contacts 104 is a conductive component. The wirings 103A and 103B, and the contacts 104 in FIGS. 10A-10C correspond to the wirings 83A and 83B, and the contacts 84 in FIGS. 8A-8C, respectively. The wirings 103A and 103B, and the contacts 104 in FIGS. 10A-10C also correspond to the wirings 93A and 93B, and the contacts 94 in FIGS. 9A-9C, respectively. Each of the wirings 103A and 103B has a length X in the direction 1011 and a width Y in the direction 1012. The wirings 103A and 103B are disposed adjacent to one another in the direction 1012, with a distance Z that is 100 nm, shorter than the distance Z of FIGS. 8A-8B, between the adjacent wirings 103A and 103B. The distance Z is an example of a distance between two conductive components, for example, between two adjacent wirings 103A and 103B.

[0048] Some of the contacts 104 may be disposed under the wiring 103A and coupled to the wiring 103A. Some of the contacts 104 may be disposed under the wiring 103B and coupled to the wiring 103B. In some embodiments, the contacts 104 may be in a pillar shape. Each of the contacts 104 may have a cross section having a length CHX in the direction 1011 and a width CHY in the direction 1012. The contacts 104 may include adjacent contacts 104 in the direction 1011 with a distance CHS1 that is 150 nm, shorter than the distance CHS1 of FIGS. 8A-8B and 9A-9B, between the adjacent contacts 104. The contacts 104 may include adjacent contacts 104 in the direction 1012 with a distance CHS2 between the adjacent contacts 104. The distance CHS1 is another example of a distance between two conductive components, for example, between adjacent contacts 104. Similarly, the distance CHS2 is another example of a distance between two conductive components, for example, between adjacent contacts 104.

[0049] The contacts 104 may include some contacts 104 adjacent to a side 105 of each of wirings 103A and 103B with a distance Y0 that is 50 nm from the side 105. The distance Y0 is another example of a distance between two conductive components. For example, the distance Y0 may be a distance between the side 105 and a side surface of the contact 104 adjacent to the side 105.

[0050] Because of the shorter distance Z of FIGS. 9A-9B than the distance Z of FIGS. 8A-8B, an effect of resist poisoning on patterning wirings may be more salient in the structure 90 than in the structure 80. Because of the shorter CHS1 in the structure 100, a density of contacts 104 in the direction 1011 becomes higher than a density of contacts 84 or 94 in the direction 811 or 911. The higher density of contacts 104 combined with the shorter distance Z of FIGS. 10A-10B than the distance Z of FIGS. 8A-8B, an effect of resist poisoning on patterning wirings may be even more salient in the structure 100 than in the structure 90.

[0051] As shown in comparison between different distances between corresponding conductive components in the structures 80, 90 and 100, the effect of resist poisoning on patterning wirings, whether it is salient or not, may be observed. Such observation may be used for determining suitable distances between the conductive components. Thus, by comparison of test structures including different distances between two corresponding conductive components, appropriate distances between two conductive components may be determined.

[0052] Embodiments of a test pattern including a plurality of test structures in the BEOL above the FEOL that include a first test structure and a second test structure including different pattern parameters are described above. The first test structure includes first and second conductive components adjacent to one another. The second test structure includes third and fourth conductive components adjacent to one another, corresponding to the first and second conductive components respectively. The different pattern parameters may be a first distance between the first and second conductive components and a second distance between the third and fourth conductive components that is different from the first distance. For example, the first and second distances may be different space widths between adjacent wirings, different space widths between adjacent contacts, and different space widths between a side of a wiring and a contact adjacent to the side of the wiring. The different pattern parameters may provide a user comparative results showing effects of resist poisoning on the plurality of test structures. Based on the result, the user may be able to verify what pattern parameters may be less affected or not affected by the resist poisoning, and further able to determine appropriate pattern parameters to avoid forming short circuits in the Dual-damascene process due to resist poisoning while forming a portion above the FEOL.

[0053] Although various embodiments have been disclosed in the present disclosure, it will be understood by those skilled in the art that the scope of the disclosure extends beyond the specifically disclosed embodiments to other alternative embodiments and/or uses and obvious modifications and equivalents thereof. In addition, other modifications which are within the scope of this disclosure will be readily apparent to those of skill in the art based on this disclosure. It is also contemplated that various combination or sub-combination of the specific features and aspects of the embodiments may be made and still fall within the scope of the disclosure. It should be understood that various features and aspects of the disclosed embodiments can be combined with or substituted for one another in order to form varying embodiments. Thus, it is intended that the scope of at least some of the present disclosure should not be limited by the particular disclosed embodiments described above.