Semiconductor Device and Method Using Tape Attachment
20230238376 · 2023-07-27
Assignee
Inventors
- GunHyuck Lee (Incheon, US)
- SangHyun Son (Seoul, KR)
- Yujeong Jang (Incheon, KR)
- Hyeoneui Lee (Seoul, KR)
Cpc classification
H01L25/50
ELECTRICITY
H01L2221/68359
ELECTRICITY
H01L2225/1041
ELECTRICITY
H01L2225/1058
ELECTRICITY
H01L21/4853
ELECTRICITY
H01L21/568
ELECTRICITY
International classification
H01L25/00
ELECTRICITY
H01L21/48
ELECTRICITY
Abstract
A semiconductor device has a first semiconductor package including a substrate and an encapsulant deposited over the substrate. An adhesive tape is disposed on the encapsulant. A conductive via is formed by trench cutting through the adhesive tape and encapsulant to expose the substrate. A second semiconductor package is disposed over the adhesive tape opposite the first semiconductor package. The first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
Claims
1. A method of making a semiconductor device, comprising: providing a first semiconductor package including a substrate and an encapsulant deposited over the substrate; disposing an adhesive tape on the encapsulant; forming a conductive via by trench cutting through the adhesive tape and encapsulant to expose the substrate; and disposing a second semiconductor package over the adhesive tape opposite the first semiconductor package, wherein the first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
2. The method of claim 1, further including disposing the adhesive tape on the encapsulant with a cover tape attached to the adhesive tape.
3. The method of claim 1, wherein forming the conductive via includes depositing a conductive epoxy or adhesive into an opening formed by the trench cutting.
4. The method of claim 1, wherein each of the first semiconductor package and second semiconductor package physically contacts the adhesive tape.
5. The method of claim 1, further including forming a shielding layer over the second semiconductor package prior to disposing the second semiconductor package over the adhesive tape opposite the first semiconductor package.
6. The method of claim 1, further including disposing a solder paste on the conductive via.
7. A method of making a semiconductor device, comprising: providing a first semiconductor package; disposing an adhesive tape over the first semiconductor package; forming a conductive via through the adhesive tape; and disposing a second semiconductor package over the first semiconductor package with the second semiconductor package electrically coupled to the first semiconductor package through the conductive via.
8. The method of claim 7, further including forming the conductive via using a conductive epoxy or adhesive.
9. The method of claim 8, further including curing the conductive epoxy or adhesive after disposing the second semiconductor package over the first semiconductor package.
10. The method of claim 7, further including disposing the adhesive tape on a substrate of the first semiconductor package.
11. The method of claim 10, further including disposing the second semiconductor package with a substrate of the second semiconductor package in physical contact with the adhesive tape.
12. The method of claim 7, further including removing a cover tape of the adhesive tape after forming the conductive via.
13. The method of claim 7, further including forming the conductive via through an encapsulant of the first semiconductor package.
14. A method of making a semiconductor device, comprising: providing a first semiconductor package; disposing an adhesive tape over the first semiconductor package; and disposing a second semiconductor package over the first semiconductor package with the adhesive tape between the first semiconductor package and second semiconductor package.
15. The method of claim 14, further including forming a shielding layer over the first semiconductor package.
16. The method of claim 14, wherein the first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
17. The method of claim 14, further including forming a conductive via through the adhesive tape.
18. The method of claim 14, further including forming an opening through the adhesive tape using a trench cut.
19. The method of claim 18, further including forming the opening through an encapsulant of the first semiconductor package.
20. A semiconductor device, comprising: a first semiconductor package; a second semiconductor package; and an adhesive tape disposed between the first semiconductor package and second semiconductor package.
21. The semiconductor device of claim 20, further including a conductive via formed through the adhesive tape.
22. The semiconductor device of claim 21, wherein the conductive via includes a conductive epoxy or adhesive.
23. The semiconductor device of claim 21, wherein the conductive via extends through an encapsulant of the first semiconductor package.
24. The semiconductor device of claim 20, wherein the adhesive tape extends from a substrate of the first semiconductor package to a substrate of the second semiconductor package.
25. The semiconductor device of claim 20, further including a shielding layer formed over the first semiconductor package.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0004]
[0005]
[0006]
[0007]
[0008]
[0009]
[0010]
DETAILED DESCRIPTION OF THE DRAWINGS
[0011] The present invention is described in one or more embodiments in the following description with reference to the figures, in which like numerals represent the same or similar elements. While the invention is described in terms of the best mode for achieving the invention's objectives, it will be appreciated by those skilled in the art that it is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims and their equivalents as supported by the following disclosure and drawings. The term “semiconductor die” as used herein refers to both the singular and plural form of the words, and accordingly, can refer to both a single semiconductor device and multiple semiconductor devices.
[0012] Semiconductor devices are generally manufactured using two complex manufacturing processes: front-end manufacturing and back-end manufacturing. Front-end manufacturing involves the formation of a plurality of die on the surface of a semiconductor wafer. Each die on the wafer contains active and passive electrical components, which are electrically connected to form functional electrical circuits. Active electrical components, such as transistors and diodes, have the ability to control the flow of electrical current. Passive electrical components, such as capacitors, inductors, and resistors, create a relationship between voltage and current necessary to perform electrical circuit functions.
[0013] Back-end manufacturing refers to cutting or singulating the finished wafer into the individual semiconductor die and packaging the semiconductor die for structural support, electrical interconnect, and environmental isolation. To singulate the semiconductor die, the wafer is scored and broken along non-functional regions of the wafer called saw streets or scribes. The wafer is singulated using a laser cutting tool or saw blade. After singulation, the individual semiconductor die are mounted to a package substrate that includes pins or contact pads for interconnection with other system components. Contact pads formed over the semiconductor die are then connected to contact pads within the package. The electrical connections can be made with conductive layers, bumps, stud bumps, conductive paste, bond wires, or other suitable interconnect structure. An encapsulant or other molding compound is deposited over the package to provide physical support and electrical isolation. The finished package is then inserted into an electrical system and the functionality of the semiconductor device is made available to the other system components.
[0014]
[0015]
[0016] An electrically conductive layer 112 is formed over active surface 110 using PVD, CVD, electrolytic plating, electroless plating, or other suitable metal deposition process. Conductive layers 112 include one or more layers of aluminum (Al), copper (Cu), tin (Sn), nickel (Ni), gold (Au), silver (Ag), or other suitable electrically conductive material. Conductive layer 112 operates as contact pads electrically connected to the circuits on active surface 110.
[0017] Conductive layer 112 can be formed as contact pads disposed side-by-side a first distance from the edge of semiconductor die 104, as shown in
[0018] An electrically conductive bump material is deposited over conductive layer 112 using an evaporation, electrolytic plating, electroless plating, ball drop, or screen printing process. The bump material can be Al, Sn, Ni, Au, Ag, lead (Pb), bismuth (Bi), Cu, solder, and combinations thereof, with an optional flux solution. For example, the bump material can be eutectic Sn/Pb, high-lead solder, or lead-free solder. The bump material is bonded to conductive layer 112 using a suitable attachment or bonding process. The bump material can be reflowed by heating the material above its melting point to form conductive balls or bumps 114. In one embodiment, conductive bumps 114 are formed over an under bump metallization (UBM) having a wetting layer, barrier layer, and adhesion layer. Conductive bumps 114 can also be compression bonded or thermocompression bonded to conductive layer 112. Conductive bumps 114 represent one type of interconnect structure that can be formed over conductive layer 112 for electrical connection to a substrate. The interconnect structure can also use bond wires, conductive paste, stud bump, micro bump, conductive pillars, or other electrical interconnect.
[0019] In
[0020]
[0021] Substrate 152 includes one or more insulating layers 154 interleaved with one or more conductive layers 156. Insulating layer 154 is a core insulating board in one embodiment, with conductive layers 156 patterned over the top and bottom surfaces, e.g., a copper-clad laminate substrate. Conductive layers 156 also include conductive vias electrically coupled through insulating layers 154. Substrate 152 can include any number of conductive and insulating layers interleaved over each other. A solder mask or passivation layer can be formed over either side of substrate 152. Any suitable type of substrate or leadframe is used for substrate 152 in other embodiments.
[0022] Any components desired to implement the intended functionality of PoPb 150 are mounted to or disposed over substrate 152 and electrically connected to conductive layers 156. Substrate 152 has two major surfaces: top surface 157 and bottom surface 159. Electrical components can be mounted onto top surface 157 and bottom surface 159 in any suitable configuration.
[0023] Semiconductor die 104 is mounted to surface 157 of substrate 152 in
[0024] Encapsulant 170 is deposited over substrate 152 and semiconductor die 104 in
[0025] In
[0026] A cover or backing tape 182 is disposed onto one surface of adhesive tape 180 to prevent the top adhesive surface of the tape from being exposed during processing. In
[0027] In
[0028]
[0029] After conductive vias 196 are formed, and cured if needed, cover tape 182 is removed to expose the top adhesive surface of adhesive tape 180, as shown in
[0030] Conductive vias 196 are formed with top surfaces coplanar to adhesive tape 180 or slightly recessed. In other embodiments, conductive vias 196 are formed with top surfaces approximately coplanar to or recessed within encapsulant 170. Conductive vias 196 can be formed extending higher than the top surface of tape 180.
[0031] In
[0032] A package-on-package top (PoPt) 200 is disposed over and mounted to PoPb 150 in
[0033] PoPb 150 and PoPt 200 can both remain as unsingulated panels of units, and then both are singulated together after mounting. In other embodiments, PoPt 200, PoPb 150, or both are singulated prior to mounting. PoPt 200 and PoPb 150 could each separately be considered semiconductor packages. After combining them, the combination could also be considered a semiconductor package. PoP 210 is a semiconductor package consisting of two stacked semiconductor packages.
[0034]
[0035] PoP 210 is a complex package type formed using a simple process due to the use of adhesive tape 180 and conductive vias 196. Conductive vias 196 are significantly smaller than copper-cored solder balls, which would commonly be embedded in encapsulant 170 in the prior art instead. Moreover, a separate interposer is not required between PoPt 200 and PoPb 150 like some prior art PoP implementations. Forming via openings 190 with a trench cut allows a significantly finer interconnect pitch than the prior art. The overall process is simpler, cheaper, and with improved warpage characteristics. PoPt 200 and PoPb 150 are stacked using adhesive tape 180 to hold the packages together. A trench cut and fill is used to electrically connect PoPt 200 and PoPb 150.
[0036]
[0037]
[0038] In
[0039] In
[0040] Double-sided package 241 has top package 240 and bottom package 230 disposed with their respective substrates oriented toward each other unlike previous embodiments in which both substrates were oriented in the same direction. Bottom package 230 and top package 240 can both remain as unsingulated panels of units, and then both are singulated together after mounting. In other embodiments, top package 230, bottom package 240, or both are singulated prior to mounting.
[0041]
[0042]
[0043] Shielding layer 262 is formed on side surfaces of encapsulant 244 and substrate 243. Shielding layer 262 is optionally connected to ground voltage through conductive layers of substrate 243, which can be exposed at side surfaces of substrate 243. Shielding layer 262 is formed prior to mounting top package 240 on bottom package 230 so that the shielding layer is only formed on top package 240. In other embodiments, shielding layer 262 is formed after package 260 is complete so that the shielding layer extends down to bottom package 230. Any of the above embodiments can have a shielding layer formed in a similar manner.
[0044]
[0045]
[0046] In
[0047] In some embodiments, a semiconductor device has two packaging levels. First level packaging is a technique for mechanically and electrically attaching the semiconductor die to an intermediate substrate. Second level packaging involves mechanically and electrically attaching the intermediate substrate to PCB 342. In other embodiments, a semiconductor device may only have the first level packaging where the die is mechanically and electrically mounted directly to PCB 342.
[0048] For the purpose of illustration, several types of first level packaging, including bond wire package 346 and flipchip 348, are shown on PCB 342. Additionally, several types of second level packaging, including ball grid array (BGA) 350, bump chip carrier (BCC) 352, land grid array (LGA) 356, multi-chip module (MCM) 358, quad flat non-leaded package (QFN) 360, quad flat package 362, and embedded wafer level ball grid array (eWLB) 366 are shown mounted on PCB 342 along with PoP 210. Conductive traces 344 electrically couple the various packages and components disposed on PCB 342 to PoP 210, giving use of the components within PoP 210 to other components on the PCB.
[0049] Depending upon the system requirements, any combination of semiconductor packages, configured with any combination of first and second level packaging styles, as well as other electronic components, can be connected to PCB 342. In some embodiments, electronic device 340 includes a single attached semiconductor package, while other embodiments call for multiple interconnected packages. By combining one or more semiconductor packages over a single substrate, manufacturers can incorporate pre-made components into electronic devices and systems. Because the semiconductor packages include sophisticated functionality, electronic devices can be manufactured using less expensive components and a streamlined manufacturing process. The resulting devices are less likely to fail and less expensive to manufacture resulting in a lower cost for consumers.
[0050] While one or more embodiments of the present invention have been illustrated in detail, the skilled artisan will appreciate that modifications and adaptations to those embodiments may be made without departing from the scope of the present invention as set forth in the following claims.