Nanopatch graphene composite
10600977 ยท 2020-03-24
Assignee
- CENTER FOR ADVANCED SOFT ELECTRONICS (Pohang-si, KR)
- POSTECH ACADEMY-INDUSTRY FOUNDATION (Pohang-si, KR)
Inventors
Cpc classification
Y02P70/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L29/08
ELECTRICITY
Abstract
Disclosed is a nanopatch graphene composite, which includes graphene including a defect and a nanopatch positioned on the defect, and is configured such that a nanopatch is formed through a self-assembling process on the surface of graphene, thus improving the mechanical properties and durability of the graphene composite. Also, a flexible organic transistor, including the nanopatch graphene composite of the invention, is transparent and has high mechanical durability, thus exhibiting device stability, and the molecular alignment of the organic semiconductor layer growing on the nanopatch graphene composite is induced so as to become favorable for charge injection, thereby increasing the performance of the device.
Claims
1. A nanopatch graphene composite, comprising: a graphene including a defect; and a nanopatch disposed on the defect, wherein the defect is at least one selected from the group consisting of a grain boundary, a dot defect, a line defect, cracking, folding, and wrinkling, and the nanopatch includes a self-assembled monolayer (SAM).
2. The nanopatch graphene composite of claim 1, wherein the self-assembled monolayer is formed by self-assembling, on the defect, a compound represented by Chemical Formula 1 below: ##STR00005## in Chemical Formula 1, R.sup.1 is a C3 to C30 alkyl group, R.sup.2 and R.sup.3, which are identical to or different from each other, are independently a hydrogen atom or a C1 to C6 alkyl group, and R.sup.4 is a C1 to C6 alkyl group.
3. The nanopatch graphene composite of claim 2, wherein the compound represented by Chemical Formula 1 is octadecyltrimethoxysilane (OTS).
4. The nanopatch graphene composite of claim 1, wherein the nanopatch suppresses or delays fracture of the graphene growing on the defect upon transforming the graphene.
5. The nanopatch graphene composite of claim 1, wherein the graphene is at least one selected from the group consisting of single-layer graphene, double-layer graphene and multilayer graphene.
6. An organic transistor, comprising: a flexible substrate; a semiconductor layer on the flexible substrate; and a gate electrode, a source electrode and a drain electrode, wherein at least one selected from the group consisting of the gate electrode, the source electrode and the drain electrode includes the nanopatch graphene composite of claim 1.
7. The organic transistor of claim 6, wherein the flexible substrate is at least one selected from the group consisting of polydimethylsiloxane, polyimide, polyethylene terephthalate, polyethylene naphthalate, polypropylene, polyethylene, polyamide and fiberglass-reinforced plastic.
8. A flexible strain sensor, comprising: a flexible substrate; an active layer formed on the flexible substrate and including the nanopatch graphene composite of claim 1; and an electrode electrically connected to the active layer.
9. A method of manufacturing a nanopatch graphene composite, comprising: (a) providing graphene including a defect; (b) oxidizing the graphene to form a functional group containing an oxygen atom on the defect, thus obtaining surface-modified graphene; and (c) bonding a self-assembled monolayer to the functional group, thus obtaining the nanopatch graphene composite.
10. The method of claim 9, wherein, in step (c), the self-assembled monolayer is formed by self-assembling a compound represented by Chemical Formula 1 below: ##STR00006## in Chemical Formula 1, R.sup.1 is a C3 to C30 alkyl group, R.sup.2 and R.sup.3, which are identical to or different from each other, are independently a hydrogen atom or a C1 to C6 alkyl group, and R.sup.4 is a C1 to C6 alkyl group.
11. The method of claim 9, wherein the oxidizing is selectively carried out on the defect of the graphene.
12. The method of claim 11, wherein the oxidizing is performed using UV/ozone.
Description
BRIEF DESCRIPTION OF DRAWINGS
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DESCRIPTION OF SPECIFIC EMBODIMENTS
(14) The present invention may be embodied in many different forms and should not be construed as being limited only to the embodiments set forth herein, but should be construed as covering modifications, equivalents or alternatives falling within the ideas and technical scope of the present invention. In the description of the present invention, detailed descriptions of related known techniques incorporated herein will be omitted when it may make the gist of the present invention unclear.
(15) As used herein, the terms first, second, etc. may be used to describe various elements, but these elements are not to be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element may be termed a second element, and, similarly, a second element may be termed a first element, without departing from the scope of exemplary embodiments of the present invention.
(16) Further, it will be understood that when an element is referred to as being formed or layered on another element, it can be formed or layered so as to be directly attached to the entire surface or one surface of the other element, or intervening elements may be present therebetween.
(17) Unless otherwise stated, the singular expression includes a plural expression. In this application, the terms include or have are used to designate the presence of features, numbers, steps, operations, elements, parts, or combinations thereof described in the specification, and should be understood as not excluding the presence or additional probability of one or more different features, numbers, steps, operations, elements, parts, or combinations thereof.
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(19) Below is a description of the nanopatch graphene composite according to the present invention with reference to
(20) The present invention addresses a nanopatch graphene composite, comprising graphene including a defect and a nanopatch disposed on the defect.
(21) The defect may be at least one selected from the group consisting of a grain boundary, a dot defect, a line defect, cracking, folding, and wrinkling.
(22) The nanopatch may include a self-assembled monolayer (SAM).
(23) The self-assembled monolayer may be formed by self-assembling, on the defect, a compound represented by Chemical Formula 1 below:
(24) ##STR00003##
(25) in Chemical Formula 1,
(26) R.sup.1 is a C3 to C30 alkyl group,
(27) R.sup.2 and R.sup.3, which are identical to or different from each other, are independently a hydrogen atom or a C1 to C6 alkyl group, and
(28) R.sup.4 is a C1 to C6 alkyl group.
(29) The compound represented by Chemical Formula 1 may be octadecyltrimethoxysilane (OTS).
(30) The nanopatch may suppress or delay the fracture of the graphene growing on the defect upon transforming the graphene.
(31) The graphene may be at least one selected from the group consisting of single-layer graphene, double-layer graphene and multilayer graphene.
(32) In addition, the present invention addresses an organic transistor, comprising: a flexible substrate; a semiconductor layer on the substrate; and a gate electrode, a source electrode and a drain electrode, wherein at least one selected from the group consisting of the gate electrode, the source electrode and the drain electrode includes the nanopatch graphene composite of the invention.
(33) The flexible substrate may be at least one selected from the group consisting of polydimethylsiloxane, polyimide, polyethylene terephthalate, polyethylene naphthalate, polypropylene, polyethylene, polyamide, and fiberglass-reinforced plastic.
(34) In addition, the present invention addresses a flexible strain sensor, comprising: a flexible substrate; an active layer formed on the flexible substrate and including the nanopatch graphene composite of the invention; and an electrode electrically connected to the active layer.
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(36) Below, the method of manufacturing the nanopatch graphene composite according to the present invention is described below with reference to
(37) Specifically, graphene including a defect is provided (step a).
(38) Next, the graphene is oxidized to bond a functional group containing an oxygen atom onto the defect, thus obtaining surface-modified graphene (step b).
(39) The oxidizing may be selectively carried out on the defect of the graphene.
(40) The oxidizing may be performed using UV/ozone.
(41) Next, a self-assembled monolayer is attached to the functional group, thus obtaining the nanopatch graphene composite (step c).
(42) In step c, the self-assembled monolayer may be formed by self-assembling a compound represented by Chemical Formula 1 below:
(43) ##STR00004##
(44) in Chemical Formula 1,
(45) R.sup.1 is a C3 to C30 alkyl group,
(46) R.sup.2 and R.sup.3, which are identical to or different from each other, are independently a hydrogen atom or a C1 to C6 alkyl group, and
(47) R.sup.4 is a C1 to C6 alkyl group.
EXAMPLES
(48) A better understanding of the present invention will be given through the following Examples, which are merely set forth to illustrate, but are not to be construed as limiting the scope of the present invention.
Example 1-1: Manufacture of Nanopatch Graphene Composite Through Formation of Self-Assembled Monolayer Followed by Transfer Thereof onto SiO2/Si Wafer
(49) A copper foil (Alfa Aesar, product No.: 13382) was placed in a quartz chamber and heated to 1000 C. at a pressure of 50 mTorr for 1 hr in the presence of hydrogen gas of 10 sccm (standard cubic centimeters per minute), whereby the surface thereof was reduced. Next, methane gas of 45 sccm was allowed to flow at a pressure of 300 mTorr for 30 min. Subsequently, the quartz chamber was rapidly cooled, and a single-layer graphene thin film was thus formed on the copper foil.
(50) The single-layer graphene thin film was patterned through photolithography, after which the surface of the graphene was treated with UV/ozone for 3 min. A 3 mM OTS solution, prepared by stirring 10 mL of 1,1,2-trichloroethylene (Sigma-Aldrich) solution and 12 L of octadecyltrimethoxysilane (Gelest, Inc.) solution, was applied on the graphene substrate through a spin-coating process, after which an ammonia water atmosphere was created in the chamber and the sample was stored therein for about 10 hr, thereby inducing the covalent bonding of the OTS molecule and the graphene surface. Thereafter, the sample was taken out of the chamber, and unreacted OTS molecules were washed off from the graphene surface with an acetone solution, followed by drying. Finally, the graphene thin film on the copper foil was transferred onto a SiO.sub.2/Si wafer, thereby manufacturing a nanopatch graphene composite (OTS-Graphene, OTS-G).
Example 1-2: Manufacture of Nanopatch Graphene Composite Through Transfer of Graphene onto SiO2/Si Wafer Followed by Formation of Self-Assembled Monolayer
(51) A copper foil (Alfa Aesar, product No.: 13382) was placed in a quartz chamber and heated to 1000 C. at a pressure of 50 mTorr for 1 hr in the presence of hydrogen gas of 10 sccm (standard cubic centimeters per minute), whereby the surface thereof was reduced. Next, methane gas of 45 sccm was allowed to flow at a pressure of 300 mTorr for 30 min. Subsequently, the quartz chamber was rapidly cooled, and a single-layer graphene thin film was thus formed on the copper foil.
(52) The single-layer graphene thin film formed on the copper foil was spin-coated with a poly(methyl methacrylate) film (Aldrich, PMMA product No.: 162265, Mw=996 kg mol.sup.1), and graphene present on the surface opposite the coating surface was removed through oxygen plasma. The PMMA/graphene/copper foil was floated on the surface of an aqueous solution containing 0.1 M ammonium sulfate ((NH.sub.4).sub.2S.sub.2O.sub.8) to remove the copper foil, and the PMMA/graphene film was transferred to deionized water. Next, the PMMA/graphene film was transferred onto a SiO.sub.2/Si wafer having a thickness of 300 nm and then baked at 120 C., and PMMA was removed with acetone. Subsequently, patterning was performed through photolithography.
(53) Thereafter, in order to functionalize the graphene surface, UV/ozone treatment (AH1700, Ahtech LTS) was conducted for 3 min. A 3 mM OTS solution, prepared by stirring 10 mL of 1,1,2-trichloroethylene (Sigma-Aldrich) solution and 12 L of octadecyltrimethoxysilane (Gelest, Inc.) solution, was applied on the graphene substrate through a spin-coating process, after which an ammonia water atmosphere was created in the chamber and the sample was stored therein for about 10 hr, thereby inducing the covalent bonding of the OTS molecule and the graphene surface. Thereafter, the sample was taken out of the chamber, and unreacted OTS molecules were washed off from the graphene surface with deionized water, isopropyl alcohol (IPA) and an acetone solution, followed by drying. Finally, a nanopatch graphene composite (OTS-Graphene, OTS-G) on a SiO.sub.2/Si wafer was manufactured.
Example 1-3: Nanopatch Graphene Composite Formed on Polyethylene Terephthalate (PET)
(54) A nanopatch graphene composite (OTS-Graphene, OTS-G) formed on polyethylene terephthalate (PET) was manufactured in the same manner as in Example 1-1, with the exception that the graphene thin film on the copper foil was transferred onto the polyethylene terephthalate (PET), in lieu of transferring the graphene thin film on the copper foil onto the SiO.sub.2/Si wafer.
Example 1-4: Nanopatch Graphene Composite Formed on Polydimethylsiloxane (PDMS)
(55) A nanopatch graphene composite (OTS-Graphene, OTS-G) formed on polydimethylsiloxane (PDMS) was manufactured in the same manner as in Example 1-1, with the exception that the graphene thin film on the copper foil was transferred onto the polydimethylsiloxane (PDMS), in lieu of transferring the graphene thin film on the copper foil onto the SiO.sub.2/Si wafer.
Comparative Example 1: Pristine Graphene Thin Film (Pristine Graphene)
(56) A copper foil (Alfa Aesar, product No.: 13382) was placed in a quartz chamber and heated to 1000 C. at a pressure of 50 mTorr for 1 hr in the presence of hydrogen gas of 10 sccm, whereby the surface thereof was reduced. Next, methane gas of 45 sccm was allowed to flow at a pressure of 300 mTorr for 30 min. Subsequently, the quartz chamber was rapidly cooled, and thus a pristine graphene thin film on the copper foil was manufactured. The grown single-layer graphene thin film was transferred onto a silicon wafer (or a polymer substrate) using the PMMA support layer.
Comparative Example 2: Exfoliated Graphene
(57) Exfoliated graphene was manufactured by exfoliating graphene from graphite (Kish graphite, Covalent Materials Inc.) using the adhesive force of Scotch tape.
Device Example 1: Fabrication of Field Emission Transistor Including Nanopatch Graphene Composite
(58) A field emission transistor including the nanopatch graphene composite was fabricated by thermally depositing, as a source electrode and a drain electrode, a 60 nm-thick Au electrode (L=150 m, W=300 m) on the nanopatch graphene composite manufactured in Example 1-1.
(59) Fabrication of Flexible Organic Transistor
Device Example 2: Fabrication of Flexible Organic Transistor Including Nanopatch Graphene Composite
(60) A 2.5 m-thick perylene thin film was thermally deposited in a vacuum on a silicon wafer. On the perylene/silicon wafer substrate, a 2 m-thick polyimide layer was applied through spin coating. On the polyimide/perylene/silicon wafer substrate, the gate electrode-patterned nanopatch graphene composite (OTS-G) of Example 1-1 was introduced. On the gate electrode-patterned nanopatch graphene composite/polyimide/perylene/silicon wafer substrate, an aluminum oxide insulating layer was deposited to a thickness of 30 to 100 nm through ALD (Atomic Layer Deposition). On the AlO.sub.x/gate electrode-patterned nanopatch graphene composite/polyimide/perylene/silicon wafer substrate, the source/drain electrode-patterned nanopatch graphene composite of Example 1-1 was introduced. Finally, the substrate was deposited with a 50 nm-thick organic semiconductor pentacene (Sigma-Aldrich) at a rate of 0.2 s.sup.1, thereby fabricating a flexible organic transistor including the nanopatch graphene composite.
Device Example 3: Fabrication of Flexible Organic Transistor Including Nanopatch Graphene Composite
(61) A flexible organic transistor including the nanopatch graphene composite was fabricated in the same manner as in Device Example 2, with the exception that an organic semiconductor DNTT (dinaphtho[2,3-b:2,3-f]thieno[3,2-b]thiophene, Sigma-Aldrich) was deposited on the substrate, in lieu of depositing the organic semiconductor pentacene on the substrate.
Device Example 4: Fabrication of Flexible Organic Transistor Including Nanopatch Graphene Composite
(62) A flexible organic transistor including the nanopatch graphene composite was fabricated in the same manner as in Device Example 3, with the exception that an organic semiconductor C.sub.8-BTBT (2,7-dioctyl[1]benzothieno[3,2-b][1]benzothiophene, Sigma-Aldrich) was deposited on the substrate, in lieu of depositing pentacene on the substrate.
(63) Fabrication of Flexible Strain Sensor
Device Example 5: Fabrication of Flexible Strain Sensor Including Nanopatch Graphene Composite Formed on Polydimethylsiloxane (PDMS)
(64) A flexible strain sensor was fabricated by depositing liquid metal (gallium-indium eutectic, product No.: 495425) as both electrodes on the nanopatch graphene composite of Example 1-4.
Comparative Device Example 1: Fabrication of Field Emission Transistor Including Pristine Graphene Thin Film
(65) A field emission transistor including the pristine graphene thin film was fabricated in the same manner as in Device Example 1, with the exception that a 60 nm-thick Au electrode was thermally deposited on the pristine graphene thin film manufactured in Comparative Example 1, in lieu of thermally depositing the 60 nm-thick Au electrode on the nanopatch graphene composite manufactured in Example 1-1.
Comparative Device Example 2: Fabrication of Flexible Organic Transistor Including Pristine Graphene Thin Film
(66) A flexible organic transistor including the pristine graphene thin film was fabricated in the same manner as in Device Example 2, with the exception that the pristine graphene thin film manufactured in Comparative Example 1 was introduced in lieu of introducing the gate electrode-patterned nanopatch graphene composite (OTS-G) and the source/drain electrode-patterned nanopatch graphene composite.
Comparative Device Example 3: Fabrication of Flexible Organic Transistor Including Pristine Graphene Thin Film
(67) A flexible organic transistor including the pristine graphene thin film was fabricated in the same manner as in Device Example 3, with the exception that the pristine graphene thin film manufactured in Comparative Example 1 was introduced in lieu of introducing the gate electrode-patterned nanopatch graphene composite (OTS-G) and the source/drain electrode-patterned nanopatch graphene composite.
Comparative Device Example 4: Fabrication of Flexible Organic Transistor Including Pristine Graphene Thin Film
(68) A flexible organic transistor including the pristine graphene thin film was fabricated in the same manner as in Device Example 4, with the exception that the pristine graphene thin film manufactured in Comparative Example 1 was introduced in lieu of introducing the gate electrode-patterned nanopatch graphene composite (OTS-G) and the source/drain electrode-patterned nanopatch graphene composite.
TEST EXAMPLES
Test Example 1: AFM Morphology Analysis
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(70) With reference to
Test Example 2: Analysis of Structure of Nanopatch on Nanopatch Graphene Composite
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(72) As shown in
(73) As shown in
(74) Thus, the self-assembled nanopatch was configured such that the upper hexagonal OTS structure was formed on the graphene lattice.
Test Example 3: Analysis of UV-Vis Spectra
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(76) As shown in
(77) Thus, the high transmittance of the nanopatch graphene composite of Example 1-1 was maintained.
Test Example 4: Measurement of Current-Voltage Change of Graphene Field Emission Transistor
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(79) As shown in
(80) Thus, the electrical properties of graphene were maintained even when the self-assembled nanopatch was formed on the surface thereof.
Test Example 5: Comparison of Mechanical Properties of Graphene
(81)
(82) As shown in
(83) As shown in
(84) Thus, in the nanopatch graphene composite according to the present invention, the elastic coefficient (Young modulus) was maintained and the two-dimensional fracture strength was measured and found to be high compared to that of conventional graphene, from which the mechanical properties are evaluated to be greatly improved.
Test Example 6: Difference in Performance of Organic Transistor Due to Introduction of Nanopatch Graphene Composite
(85)
(86) As shown in
(87) The performance indexes of the organic transistors of Device Examples 2 to 4 and Comparative Device Examples 2 to 4 are summarized in Table 1 below.
(88) As set forth in Table 1, the organic transistors of Device Examples 2 to 4 exhibited high charge mobility and low electrode contact resistance compared to the organic transistors of Comparative Device Examples 2 to 4.
(89) TABLE-US-00001 TABLE 1 Width normalized Average hole Threshold On/off contact Organic mobility voltage current resistance semiconductor Device (cm.sup.2/Vs) (V) ratio (MOhm .Math. cm) Pentacene Comparative 0.039 11.4 10.sup.4 2.1 Device (0.04) (4.3) Example 2 Device 0.14 9.8 10.sup.6 0.79 Example 2 (0.03) (3.7) DNTT Comparative 0.16 8.3 10.sup.6 1.7 Device (0.11) (4.3) Example 3 Device 0.79 8.3 10.sup.7 0.25 Example 3 (0.17) (4.2) C.sub.8-BTBT Comparative 0.035 1.2 10.sup.6 5.1 Device (0.03) (3.6) Example 4 Device 0.12 2.6 10.sup.7 1.4 Example 4 (0.04) (2.7)
(90) Therefore, the organic transistors of Device Examples 2 to 4 are evaluated to exhibit superior performance compared to the organic transistors of Comparative Device Examples 2 to 4.
Test Example 7: Changes in Molecular Alignment of Organic Semiconductor
(91)
(92) As shown in
(93) Thus, the molecular alignment of the organic semiconductor layer growing on the nanopatch graphene composite of Device Examples 2 and 3 was induced so as to become favorable for charge injection, whereby the performance of the organic transistor device was increased.
Test Example 8: Comparison of Electrical Properties of Nanopatch Graphene Composite Through Graphene Transfer Followed by Nanopatch Formation and Through Nanopatch Formation Followed by Graphene Transfer
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(95) As shown in
(96) Thus, the nanopatch graphene composites of Examples 1-1 and 1-2 exhibited similar electrical properties.
Test Example 9: Evaluation of Bendability, Stretchability and Tensile Strain of Graphene
(97)
(98) As shown in
(99) As shown in
(100) For bending and stretching, the nanopatch graphene composites manufactured in Examples 1-3 and 1-4 manifested superior mechano-electric stability compared to the pristine graphene thin film manufactured in Comparative Example 1.
Test Example 10: Changes in Resistance of Flexible Strain Sensor Including Nanopatch Graphene Composite Formed on Polydimethylsiloxane (PDMS)
(101)
(102) As shown in
(103) Thus, based on the performance of the flexible strain sensor of Device Example 5, the nanopatch graphene composite of the invention can be found to be efficiently applicable to the sensor.
(104) The scope of the invention is represented by the claims below rather than the aforementioned detailed description, and all of the changes or modified forms that are derived from the meaning, range, and equivalent concepts of the appended claims should be construed as being included in the scope of the present invention.